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ISONO Yoshitada
Graduate School of Engineering / Department of Mechanical Engineering
Professor

Researcher basic information

■ Research Areas
  • Nanotechnology/Materials / Nano/micro-systems
■ Committee History
  • Apr. 2007 - Present, 1. 2007.4～現在 (社)日本材料学会分子動力学部門委員会 委員長
  • Oct. 2006 - Present, 京都市ベンチャー企業目利き委員会調査専門委員
  • Jul. 2006 - Present, 2. 2006.7～現在 （独）新エネルギー・産業技術総合開発機構(NEDO)「高集積・複合MEMS製造技術開発事業・MEMS知識データベース委員会」委員
  • Apr. 2006 - Present, 23. 2006.4～現在 ドイツ・アルベートルドウィック大学フライブルグ・マイクロシステム学科と立命館大学総合理工学研究機構との研究交流協定・共同研究プログラム運営メンバー
  • Apr. 2006 - Present, 3. 2006.4～現在 （財）マイクロマシンセンター「MEMS関連技術分野の標準化ロードマップに関する調査研究委員会」調査研究委員
  • Apr. 2005 - Present, 4. 2005.4～現在 (社)日本機械学会・材料力学部門「マイクロ・ナノ材料評価／微小機械部品設計技術に関する調査研究会」委員長
  • Apr. 2004 - Present, 10. 2004.4～現在 (社)日本材料学会評議員
  • Apr. 2003 - Present, 13. 2003.4～現在 (社)日本機械学会・論文集編集委員会校閲委員
  • Apr. 2005 - Mar. 2007, 22. 2005.4～2007.3 (独)日本学術振興会国際共同研究プログラム
  • Oct. 2006, 21. 2006.10 立命館大学21世紀COEプログラム「マイクロ・ナノサイエンス・集積化システム」国際ワークショップ「International Workshop on Micro/Nano Science and Engineering for the 21st Century」Vice Chair
  • Apr. 2005 - Mar. 2006, 8. 2005.4～2006.3 (財)マイクロマシンセンター，平成17年度エネルギー使用合理化システム標準化調査「マイクロ・ナノ材料の疲労試験に関する標準化推進委員会」調査研究委員会・委員
  • Apr. 2005 - Mar. 2006, 6. 2005.4～2006.3 (財)マイクロマシンセンター，平成17年度エネルギー使用合理化システム標準化調査「マイクロ・ナノ材料の疲労試験に関する標準化調査研究」標準化推進委員会・委員
  • Jul. 2003 - Jul. 2005, 11. 2003.7～2005.7 (社)電気学会・センサ/マイクロマシンE準部門「ナノファブリケーション調査専門委員会」委員長
  • Apr. 2004 - Apr. 2005, 5. 2004.4～2005.4 (社)日本材料学会マイクロマテリアル部門委員会運営委員
  • Jul. 2004 - Mar. 2005, 9. 2004.7～2005.3 (財)マイクロマシンセンター，平成16年度エネルギー使用合理化システム標準化調査「マイクロ・ナノ材料の疲労試験に関する標準化調査研究」調査研究委員会・委員
  • Jul. 2004 - Mar. 2005, 7. 2004.7～2005.3 (財)マイクロマシンセンター，平成16年度エネルギー使用合理化システム標準化調査「マイクロ・ナノ材料の疲労試験に関する標準化調査研究」標準化推進委員会・委員
  • Apr. 2003 - Mar. 2004, 19. 2003.4～2004.3 経済産業省「創造技術研究開発費補助金等審査委員会」，審査委員
  • Apr. 2003 - Mar. 2004, 17. 2003.4～2004.3 国土交通省「道路維持管理におけるナノテクノロジー活用検討会」検討委員
  • Apr. 2003 - Mar. 2004, 12. 2003.4～2004.3 (財)マイクロマシンセンター「新機能性材料のNEMSへの展開に関する調査研究」研究委員
  • Apr. 2002 - Mar. 2004, 16. 2002.4～2004.3 (社)日本材料学会・関西支部常議委員
  • Sep. 2002 - May 2003, 15. 2002.9～2003.5 (財)マイクロマシンセンター「MEMS設計・解析支援シミュレーションシステムに関する調査研究・技術調査小委員会」調査研究委員
  • Apr. 2002 - Apr. 2003, 14. 2002.4～2003.4 (社)日本材料学会分子動力学部門委員会運営委員
  • Jan. 2003 - Mar. 2003, 18. 2003.1～2003.3 国土交通省「道路維持管理におけるナノテクノロジー活用検討会」検討委員
  • Sep. 2002 - Mar. 2003, 20. 2002.9～2003.3 経済産業省「創造技術研究開発費補助金等審査委員会」審査委
  • ドイツ・アルベートルドウィック大学フライブルグ・マイクロシステム学科との共同研究プログラム・研究課題名「MEMSのシミュレーションベース・デザインのためのマルチスケール解析法の開発」・共同研究者

Research activity information

■ Award
  • Jan. 2017 電気学会, 平成28年電気学会優秀論文発表（IEEJ Excellent Presentation Award）, 金ナノ粒子二量体配列を用いたDNA塩基の高感度・高速表面増強ラマン分光
    池上 晃平, SUGANO KOJI, ISONO YOSHITADA
    Japan society

  • Oct. 2016 電気学会, 第33回「センサ・マイクロマシンと応用システム」シンポジウム 優秀技術論文賞, 金ナノロッド構造を用いた光熱変換によるレーザ波長計測マイクロ振動子デバイス
    SUGANO KOJI, 田中 祐樹, 前田 悦男, 米谷 玲皇, ISONO YOSHITADA
    Japan society

  • Oct. 2015 電気学会, 第32回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞, 金ナノ粒子二量体配列を用いたDNA 塩基の表面増強ラマン分光
    饗庭 清仁, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA
    Japan society

  • Jan. 2015 電気学会, 平成26年電気学会優秀論文発表（IEEJ Excellent Presentation Award）, 金粒子配列ナノ流路を用いた表面増強ラマン分光分析デバイス
    竹下 俊光, 末國 啓輔, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA
    Japan society

■ Paper
  • Tomoya Imanishi, Keiju Miyamoto, Shuntaro Higashi, Shunsuke Oki, Akio Uesugi, Koji Sugano, Takanori Aono, Yoshitada Isono
    Institute of Electrical Engineers of Japan (IEE Japan), Jan. 2023, IEEJ Transactions on Sensors and Micromachines, 143(1) (1), 13 - 18
    Scientific journal

  • Koji Sugano, Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Yoshitada Isono
    Jan. 2022, Optics Letters, 47(2) (2), 373 - 376, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Integration of silicon nanowire bridges in microtrenches with perpendicular bottom-up growth promoted by surface nanoholes
    Akio Uesugi, Shusuke Nishiyori, Tatsuya Nakagami, Koji Sugano, Yoshitada Isono
    2022, Japanese Journal of Applied Physics, 61(7) (7), English
    [Refereed]

  • Surface-Potential-Modulated Piezoresistive Effect of Core-Shell 3C-SiC Nanowires via Passivation
    Akio Uesugi, Shinya Nakata, Kodai Inoyama, Koji Sugano, Yoshitada Isono
    2022, Nanotechnology, 33(50) (50), English
    [Refereed]

  • Naoki Kondo, Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono
    2022, Microsystem Technologies, 28(5) (5), 1281 - 1290, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono
    Wiley, Dec. 2021, Electronics and Communications in Japan, 104(4) (4), English
    [Refereed]
    Scientific journal

  • Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono
    Institute of Electrical Engineers of Japan (IEE Japan), Sep. 2021, IEEJ Transactions on Sensors and Micromachines, 141(9) (9), 321 - 326, English
    [Refereed]
    Scientific journal

  • Tatsuya Tsubota, Naoyuki Arai, Atsuya Harada, Akio Uesugi, Koji Sugano, Yoshitada Isono
    The Optical Society, Aug. 2021, Journal of the Optical Society of America B, 38(10) (10), 2863 - 2872, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono
    IOP Publishing, May 2021, Japanese Journal of Applied Physics, 60(5) (5), 055502 - 055502, English
    [Refereed]
    Scientific journal

  • Akihiro Morita, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono
    IOP Publishing, Mar. 2021, Nano Express, 2(1) (1), 010032 - 010032, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Kyosuke Nimura, Kenji Osaka, Kazuma Sawada, Akio Uesugi, Koji Sugano, Yoshitada Isono
    IOP Publishing, Feb. 2021, Journal of Micromechanics and Microengineering, 31(2) (2), 025009 - 025009, English
    [Refereed]
    Scientific journal

  • Akio Uesugi, Shinya Nakata, Kodai Inoyama, Koji Sugano, Yoshitada Isono
    IEEE, Jan. 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), English
    [Refereed]
    International conference proceedings

  • 近赤外光吸収体を有する静電型マイクロ振動デバイスを用いた水の分光測定
    鈴木隆正, 中藤康太, 上杉晃生, 菅野公二, 磯野吉正
    2021, 141(8) (8), 321 - 326, Japanese
    [Refereed]

  • Tatsuya Tsubota, Akio Uesugi, Koji Sugano, Yoshitada Isono
    2021, Microsystem Technologies, 27(3) (3), 997 - 1005
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Koji Sugano, Yuki Tanaka, Akio Uesugi, Etsuo Maeda, Reo Kometani, Yoshitada Isono
    Elsevier BV, Nov. 2020, Sensors and Actuators A: Physical, 315, 112337 - 112337, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Kohei Takegami, Kota Nakafuji, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono
    2020, Japanese Journal of Applied Physics, 59(SI) (SI)
    [Refereed]
    International conference proceedings
    Link to Kobe Univ. Repository (Kernel)

  • Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono
    The Institute of Electrical Engineers of Japan, 2020, IEEJ Transactions on Sensors and Micromachines, 140(4) (4), 72 - 78, Japanese
    [Refereed]
    Scientific journal

  • Shinya Nakata, UESUGI Akio, SUGANO KOJI, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, ISONO YOSHITADA
    Apr. 2019, Nanotechnology, 30(26) (26), 265702, English
    [Refereed]
    Scientific journal

  • MANIPULATION OF BIOMOLECULES INTO NANOGAP BY PLASMONIC OPTICAL EXCITATION FOR HIGHLY SENSITIVE BIOSENSING
    Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono
    2019, 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 166 - 169, English
    [Refereed]
    International conference proceedings

  • SERS DETECTION OF A SINGLE NUCLEOBASE IN A DNA OLIGOMER USING A GOLD NANOPARTICLE DIMER
    Koji Sugano, Katsunari Maruoka, Akio Uesugi, Yoshitada Isono
    2019, 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 979 - 982, English
    [Refereed]
    International conference proceedings

  • T. Aono, A. Kazama, R. Okada, T. Iwasaki, Y. Isono
    Institute of Physics Publishing, Jan. 2018, Journal of Micromechanics and Microengineering, 28(3) (3), 035004, English
    [Refereed]
    Scientific journal

  • A Novel 3-axis Tiny Tactile Sensor Developed by 3-D Microstructuring using Punch Creep Forming Process
    Kenji Osaka, Satoshi Nakata, Kensuku Yamamoto, Takao Toyoda, Koji Sugano, Yoshitada Isono
    Jan. 2018, The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2018), 1036 - 1039, English
    [Refereed]
    International conference proceedings

  • Katsunari Maruoka, Koji Sugano, Yoshitada Isono
    Institute of Electrical and Electronics Engineers Inc., Jul. 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 468 - 471, English
    [Refereed]
    International conference proceedings

  • Koji Sugano, Kiyohito Aiba, Kohei Ikegami, Yoshitada Isono
    Jun. 2017, JAPANESE JOURNAL OF APPLIED PHYSICS, 56(6) (6), 06GK01, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Koji Sugano, Kohei Ikegami, Yoshitada Isono
    Jun. 2017, JAPANESE JOURNAL OF APPLIED PHYSICS, 56(6) (6), 06GK03, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Bonding Strength Characterization of Eutectic-based WLP using Molecular Dynamics and Wafer Level Shear Testing
    Takanori Aono, Atsushi Kazama, Ryoji Okada, Tomio Iwasaki, Yoshitada Isono
    Jun. 2017, The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017), 1199 - 1202, English
    [Refereed]
    International conference proceedings

  • Surface-Enhanced Raman Spectroscopy Analysis Device with Gold Nanoparticle Arranged Nanochannel
    Toshimitsu Takeshita, Keisuke Suekuni, Kiyohito Aiba, SUGANO KOJI, ISONO YOSHITADA
    Mar. 2017, Electronics and Communications in Japan, 100(4) (4), 33 - 41, English
    [Refereed]
    Scientific journal

  • Kohei Ikegami, Koji Sugano, Yoshitada Isono
    2017, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017(MEMS) (MEMS), 408 - 411, English
    [Refereed]
    International conference proceedings

  • Koji Sugano, Yuki Tanaka, Etsuo Maeda, Reo Kometani, Yoshitada Isono
    2017, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 159 - 162, English
    [Refereed]
    International conference proceedings

  • Koji Sugano, Yuki Tanaka, Etsuo Maeda, Reo Kometani, Yoshitada Isono
    2017, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017(MEMS) (MEMS), 159 - 162, English
    [Refereed]
    International conference proceedings

  • T. Aono, K. Suzuki, M. Kanamaru, R. Okada, D. Maeda, M. Hayashi, Y. Isono
    Oct. 2016, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 26(10) (10), English
    [Refereed]
    Scientific journal

  • Koji Sugano, Ryu Matsumoto, Ryota Tsutsui, Hiroyuki Kishihara, Naoki Matsuzuka, Ichiro Yamashita, Yukiharu Uraoka, Yoshitada Isono
    Jul. 2016, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 26(7) (7), English
    [Refereed]
    Scientific journal

  • J. Greil, S. Assali, Y. Isono, A. Belabbes, F. Bechstedt, F. O. Valega Mackenzie, A. Yu. Silov, E. P. A. M. Bakkers, J. E. M. Haverkort
    Jun. 2016, NANO LETTERS, 16(6) (6), 3703 - 3709, English
    [Refereed]
    Scientific journal

  • Naoki Matsuzuka, Takuya Hara, Yoshitada Isono
    Jun. 2016, SENSORS AND ACTUATORS A-PHYSICAL, 243, 25 - 34, English
    [Refereed]
    Scientific journal

  • Shinya Nakata, Koji Sugano, Mario Negri, Francesca Rossi, Giancarlo Salyiati, Alois Lugstein, Yoshitada Isono
    2016, 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2016-February, 543 - 546, English
    [Refereed]
    International conference proceedings

  • Kenji Yamauchi, Keisuke Obata, Shinya Nakata, Koji Sugano, Kisaragi Yashiro, Yoshitada Isono
    2016, SENSORS AND MATERIALS, 28(2) (2), 75 - 88, English
    [Refereed]
    Scientific journal

  • Kiyohito Aiba, Kohei Ikegami, Shin-Nosuke Yamazaki, Koji Sugano, Yoskitada Isono
    Institute of Electrical Engineers of Japan, 2016, IEEJ Transactions on Sensors and Micromachines, 136(6) (6), 256 - 260, Japanese
    [Refereed]
    International conference proceedings

  • Toshimitsu Takeshita, Keisuke Suekuni, Kiyohito Aiba, Koji Sugano, Yoshitada Isono
    Institute of Electrical Engineers of Japan, Jun. 2015, IEEJ Transactions on Sensors and Micromachines, 135(6) (6), 214 - 220, Japanese
    [Refereed]
    Scientific journal

  • SUGANO KOJI, Keisuke Suekuni, Toshimitsu Takeshita, Kiyohito Aiba, ISONO YOSHITADA
    A micro/nanofluidic device containing linearly arranged gold nanoparticles embedded in nanochannels was developed for highly sensitive and highly efficient surface-enhanced Raman spectroscopy (SERS). The Si nanochannel array was fabricated using a photolithography-based process. The nanochannel width was controlled from 100 to 400 nm. Synthesized particles of mean diameter 100 nm were arranged linearly in the nanochannels, using a nanotrench-guided self-assembly process. We developed a process for integrating linearly arranged nanoparticles and micro/nanofluidic components. The particle geometry provided significant Raman enhancement. Furthermore, efficient Raman analysis was possible by scanning a laser spot, because the particles were arranged in one direction. The fabricated structures were evaluated for SERS using 4,4′-bipyridine molecules at concentrations of 1 mM and 10 µM. The Raman peaks was obtained from a few hot spots. The Raman spectra showed that the molecule-specific Raman intensities were correlated with the number of hot spots in the nanochannel.
    Institute of Physics, May 2015, Japanese Journal of Applied Physics, 54(6S1) (6S1), 06FL03, English
    [Refereed]
    Scientific journal

  • K. Yamauchi, T. Kuno, K. Sugano, Y. Isono
    2015, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 28th Vol.1, 369 - 372, English
    [Refereed]
    International conference proceedings

  • Stefan Wagesreither, Emmerich Bertagnolli, Shinya Kawase, Yoshitada Isono, Alois Lugstein
    Nov. 2014, NANOTECHNOLOGY, 25(45) (45), 1 - 6, English
    [Refereed]
    Scientific journal

  • Hyun-Jin Oh, Hideaki Omori, Mitsutaka Sadakata, Ikko Tsubokura, Yoshitada Isono
    Aug. 2014, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 23(4) (4), 944 - 954, English
    [Refereed]
    Scientific journal

  • Hyun-Jin Oh, Shinya Kawase, Itsuo Hanasaki, Yoshitada Isono
    Feb. 2014, JAPANESE JOURNAL OF APPLIED PHYSICS, 53(2) (2), 027201, English
    [Refereed]
    Scientific journal

  • Keisuke Suekuni, Toshimitsu Takeshita, Koji Sugano, Yoshitada Isono
    2014, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 27th Vol.2, 1059 - 1062, English
    [Refereed]
    International conference proceedings

  • Taiki Kimura, Naoki Saito, Toshimitsu Takeshita, Koji Sugano, Yoshitada Isono
    2014, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 27th Vol.1, 600 - 603, English
    [Refereed]
    International conference proceedings

  • Lydia Anggraini, Bungo Tanaka, Naoki Matsuzuka, Yoshitada Isono
    May 2013, Japanese Journal of Applied Physics, 52(5) (5), 1 - 56501, English
    [Refereed]
    Scientific journal

  • DEVELOPMENT OF MWCNT EMBEDDED MICROMECHANICAL RESONATOR WORKING AS RAREFIED GAS SENSOR
    H. Kishihara, I. Hanasaki, N. Matsuzuka, I. Yamashita, Y. Uraoka, Y. Isono
    2013, 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 985 - 988, English
    [Refereed]
    International conference proceedings

  • Experimental Nano Mechanics for Silicon & Carbon Nanomaterials Using MEMS Technology
    Yoshitada Isono
    Nov. 2012, 25th International Microprocesses and Nanotechnology Conference, Kobe, 2012., English
    [Refereed]
    International conference proceedings

  • Biomolecular Adsorption Control for CNT-domain Fabrication
    Itsuo Hanasaki, Yoshitada Isono, Bin Zheng, Yukiharu Uraoka, Ichiro Yamashita
    Oct. 2012, 25th International Microprocesses and Nanotechnology Conference, Kobe, 2012, English
    [Refereed]
    International conference proceedings

  • Itsuo Hanasaki, Yoshitada Isono
    May 2012, PHYSICAL REVIEW E, 85(5) (5), 1 - 51134, English
    [Refereed]
    Scientific journal

  • Hideaki Omori, Mitsutaka Sadakata, Ikko Tsubokura, Itsuo Hanasaki, Yoshitada Isono
    2012, 2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 25th Vol.1, 412 - 415, English
    [Refereed]
    International conference proceedings

  • Itsuo Hanasaki, Toshihiro Tanaka, Yoshitada Isono, Bin Zheng, Yukiharu Uraoka, Ichiro Yamashita
    Jul. 2011, JAPANESE JOURNAL OF APPLIED PHYSICS, 50(7) (7), 1 - 75102, English
    [Refereed]
    Scientific journal

  • Itsuo Hanasaki, Yoshitada Isono, Bin Zheng, Yukiharu Uraoka, Ichiro Yamashita
    Jun. 2011, JAPANESE JOURNAL OF APPLIED PHYSICS, 50(6) (6), 1 - 65201, English
    [Refereed]
    Scientific journal

  • Hyun-Jin Oh, Itsuo Hanasaki, Yoshitada Isono, Seung-Woo Han, Hak-Joo Lee
    2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 24th Vol.1, 493 - 496, English
    [Refereed]
    International conference proceedings

  • Hiroshi Kinoshita, Yoshitada Isono, Nobuo Ohmae
    A process for bonding a carbon nanotube (CNT) film to a Au film at low temperature was developed with a view to using the CNT films as electrical contact materials in radio-frequency microelectromechanical systems (RF MEMS) switches. First, a CNT film was synthesized on a silicon substrate at 750 °C and subsequently coated with Au at room temperature. Finally, the Au-coated CNT film was bonded at 100 °C to a Au film, which was then deposited on a silicon substrate to act as a transmission line. An apparatus was developed to measure contact resistances and forces under contact conditions mimicking those that will be encountered in actual RF MEMS switches, such as micronewton loads and square-micrometer contact areas. Contact resistance and force of the bonded CNT film sample were simultaneously measured as a function of displacement between the sample and an electrode Au tip and compared with those for a Au film and Au-coated CNT film. The bonded CNT film sample had no adhesion force, but higher contact resistance than the other samples.
    Japanese Society of Tribologists, Jan. 2011, Tribology Online, 6(4) (4), 189 - 192, English
    [Refereed]
    Scientific journal

  • Yoshihiko Hashimoto, Itsuo Hanasaki, Yoshitada Isono
    2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 24th Vol.2, 1217 - 1220, English
    [Refereed]
    International conference proceedings

  • Lydia Anggraini, Naoki Matsuzuka, Yoshitada Isono
    Institute for Research and Community Services, Institut Teknologi Bandung, 2010, ITB Journal of Science, 42(1) (1), 1 - 10, English
    [Refereed]
    Scientific journal

  • Koichi Nakamura, Yoshitada Isono, Toshiyuki Toriyama, Susumu Sugiyama
    Aug. 2009, Physical Review B - Condensed Matter and Materials Physics, 80(4) (4), 1 - 45205, English
    [Refereed]
    Scientific journal

  • Koichi Nakamura, Yoshitada Isono, Toshiyuki Toriyama, Susumu Sugiyama
    Jun. 2009, JAPANESE JOURNAL OF APPLIED PHYSICS, 48(6) (6), 1 - 6, English
    [Refereed]
    Scientific journal

  • Takahiro Namazu, Yoshitada Isono
    Feb. 2009, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 18(1) (1), 129 - 137, English
    [Refereed]
    Scientific journal

  • NAMAZU Takahiro, ISONO Yoshitada
    2009, Journal of Micro Electro Mechanical Systems, Vol.18, No.1, pp. 129 - 137, English
    [Refereed]
    Scientific journal

  • Mario Kiuchi, Shinji Matsui, Yoshitada Isono
    Jun. 2008, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 18(6) (6), 1 - 10, English
    [Refereed]
    Scientific journal

  • Koichi Nakamura, Yoshitada Isono, Toshiyuki Toriyama
    Jun. 2008, JAPANESE JOURNAL OF APPLIED PHYSICS, 47(6) (6), 5132 - 5138, English
    [Refereed]
    Scientific journal

  • Hensy Gandjar, Yuki Takagi, Naoki Matsuzuka, Yoshitada Isono
    May 2008, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3(3) (3), 260 - 267, English
    [Refereed]
    Scientific journal

  • Hyun-Jin Oh, Yoshitada Isono, Takahiro Namazu, Yoshihiro Saito, Akira Yamaguchi
    May 2008, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3(3) (3), 281 - 289, English
    [Refereed]
    Scientific journal

  • MATSUZUKA Naoki, ISONO Yoshitada
    This paper describes the design, fabrication and measurement of an electrostatic RF-MEMS resonator with a resonant frequency in an MHz range. In the design, the Duffing equation was applied to a vibration model of a mechanical oscillator, for precisely analyzing its vibration characteristic. Electromechanical coupling provided us with an equivalent circuit of the MEMS resonator vibrating the oscillator, which enables to analyze the impedance of the resonator. In the fabrication, sub-micron gaps between the oscillator and two electrodes were created by combining focused ion beam (FIB) sputtering with deep reactive ion etching (Deep-RIE), for decreasing a driving voltage and increasing a detection capacitance. We have, so far, succeeded in fabricating the RF-MEMS resonator with a micro-mechanical oscillator and the gaps of 600 nm in width, and measuring the resonant frequency in an MHz range.
    The Japan Society of Mechanical Engineers, 2008, The proceedings of the JSME annual meeting, 2008, 153 - 154, Japanese

  • NAKAMURA Koichi, ISONO Yoshitada, TORIYAMA Toshiyuki
    We have simulated the piezoresistivity in single-crystal silicon materials based on the first-principles calculations of model structures. Our novel approach to calculate the piezoresistance coefficients is valid qualitatively for electron transport in the multi-valley conduction band structure of n-type bulk silicon, in particular, the shear piezoresistance coefficient π_<44> can be presented clearly as a negative constant. For p-type bulk silicon, an easy additional procedure for the spin-orbit coupling in the valence bands gives an appropriate hole distribution and piezoresistance coefficients in a qualitative level. The calculation result that p-type <001> silicon nanowire will have a giant piezoresistivity is considered to be reliable.
    The Japan Society of Mechanical Engineers, 2008, The proceedings of the JSME annual meeting, 2008, 155 - 156, Japanese

  • Mario Kiuchi, Shinji Matsui, Yoshitada Isono
    Apr. 2007, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16(2) (2), 191 - 201, English
    [Refereed]
    Scientific journal

  • SUZUKI Ryusei, ISONO Yoshitada, MORII Akio
    This paper proposes a novel tensile testing technique using CCD camera system for evaluating mechanical properties of MEMS materials. Single crystal silicon (SCS) films with 2 micron thick and polycrystalline silicon (Polysilicon) films with 1 micron thick were tested. Here, elongation at the gauge of specimen was directly measured by the CCD camera. Consequently, we have succeeded in evaluating the tensile strength and tensile strain on a micro scale. It was found that the averaged Young's modules of SCS was 168.3GPa, which is close to theoretical value in [110] direction on (100) plane of SCS. The fracture strength of SCS ranged from 1.8 to 2.8GPa. The averaged Young's modules of polysilicon was 161.1GPa. The fracture strength of Polysilicon ranged from 1.2 to 1.7GPa.
    The Japan Society of Mechanical Engineers, 2007, The proceedings of the JSME annual meeting, 2007, 731 - 732, Japanese

  • SUZUKI Ryusei, ISONO Yoshitada, OGAWA Masato
    This paper proposes a novel shear testing technique for MEMS materials based on an Asymmetrical Four-Point Bending (AFPB) method This research has newly developed a shear tester and a AFPB test specimen that are able to apply pure shear stress loading to a micro single crystal silicon (SCS) specimen with "U" and "V" shaped notches, in order to estimate shear strength and fracture toughness. Consequently, we have succeeded in evaluating the shear strength and shear strain of SCS on a micro scale. Shear modules of SCS averaged 58.7GPa, which is close to theoretical value in [112] direction on (110) plane of SCS. The fracture toughness was 3.6 to 4.5 MPa√m. The shear strength was 0.6 to 2.1GPa in average. The crack initiated on the slip plane at the bottom of notches, whereas it propagated perpendicularly to the maximum principal stress direction dominated by mode II predicted by FEM.
    The Japan Society of Mechanical Engineers, 2007, The proceedings of the JSME annual meeting, 2007, 719 - 720, Japanese

  • Development of scanning probe parallel nanowriting system with electron beam resist
    Naoki Matsuzuka, Bungo Tanaka, Toshihiko Nagarmira, Tobru Sasaki, Takahiro Namaza, Yoshitada Isono
    2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, English
    [Refereed]
    International conference proceedings

  • Ti-NiSMA film-actuated 2-D multi-probe array for scanning probe nano-lithography on a wide area
    Y. Okamura, T. Namazu, D. Kamoyama, N. Urushihara, T. Sasaki, T. Nagamura, Y. Isono
    2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, English
    [Refereed]
    International conference proceedings

  • Y Isono, T Namazu, N Terayama
    Feb. 2006, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 15(1) (1), 169 - 180, English
    [Refereed]
    Scientific journal

  • Y Lee, J Tada, Y Isono
    Aug. 2005, FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES, 28(8) (8), 675 - 686, English
    [Refereed]
    Scientific journal

  • T Shimazu, M Katayama, Y Isono
    May 2005, IEICE TRANSACTIONS ON ELECTRONICS, E88C(5) (5), 1020 - 1024, English
    [Refereed]
    Scientific journal

  • Effect of gas flow ratio in PE-CVD on elastic properties of sub-micron thick silicon nitride films for MEMS
    Y Isono, T Namazu, Y Saito, A Yamaguchi, N Fukushima
    2005, Transducers '05, Digest of Technical Papers, Vols 1 and 2, 847 - 850, English
    [Refereed]
    International conference proceedings

  • Silicon anisotropic wet etching simulation using molecular dynamics
    T Kakinaga, A Hatai, O Tabata, Y Isono
    2005, Transducers '05, Digest of Technical Papers, Vols 1 and 2, 816 - 819, English
    [Refereed]
    International conference proceedings

  • Toshinori Unno, Toshiyuki Toriyama, Yoshitada Isono, Susumu Sugiyama
    2005, Journal of The Japan Institute of Electronics Packaging, 8(2) (2), 125 - 132, English
    [Refereed]
    Scientific journal

  • Yoshitada Isono, Junichi Tada, Toshinori Unno, Susumu Sugiyama, Toshiyuki Toriyama
    2005, IEEJ Transactions on Sensors and Micromachines, 125(7) (7), 294 - 301, English
    [Refereed]
    Scientific journal

  • Development of full-reversed bending fatigue tester based on AFM technique for cyclic damage evaluation of MEMS
    Y Isono, T Kikuchi, H Kitoh
    2005, ADVANCES IN FRACTURE AND STRENGTH, PTS 1- 4, 297-300, 567 - 573, English
    [Refereed]
    Scientific journal

  • K Kakushima, T Watanabe, K Shimamoto, T Gouda, M Ataka, H Mimura, Y Isono, G Hashiguchi, Y Mihara, H Fujita
    Jun. 2004, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 43(6B) (6B), 4041 - 4044, English
    [Refereed]
    Scientific journal

  • Characteristics of Ni electroformed micro connector used for high density packaging
    Toshinori Unno, Toshiyuki Toriyama, Yoshitada Isono, Susumu Sugiyama
    2004, Proceedings of the 2004 International Symposium on Micro-NanoMechatronics and Human Science, MHS2004; The Fourth Symposium 'Micro-NanoMechatronics for and Information-Based Society' The 21st Century, 105 - 108, English
    International conference proceedings

  • KITO Hiroaki, KIKUCHI Takanori, ISONO Yoshitada
    We newly developed a full-reversed bending fatigue tester for evaluating low-cycle fatigue of MEMS materials. This paper focuses on design of the micro fatigue tester based on AFM technique, which can apply tension/compression loads to a microscale specimen of cantilever type, and establishment of the bending fatigue test procedure. The efficacy of the design and driven concept is demonstrated by applying a cyclic loading to the specimen and direct measurement of the applied load of the specimen using a bult-in laser reflection technique. This research succeeded in obtaining an elastic hysteresis loop of microscale specimen.
    The Japan Society of Mechanical Engineers, 2004, The proceedings of the JSME annual meeting, 2004, 371 - 372, Japanese

  • NAMAZU Takahiro, ISONO Yoshitada
    This paper proposes a new high-cycle fatigue parameter for correlating fatigue lives of micro/nanoscale single crystal silicon (Si) structures under bending and tensile stressing. Fatigue tests of micro/nanoscale Si structures under bending/tensile stressing were conducted in order to reveal the influence of deformation mode on Si fatigue lives. Consequently, the authors enabled to propose a shear stress parameter for predicting fatigue lives of Si structures ranging from micro- to nanoscale, regardless of deformation mode and specimen size. The parameter can be used for reliable design of MEMS/NEMS components subjected to fluctuating stress.
    The Japan Society of Mechanical Engineers, 2004, The proceedings of the JSME annual meeting, 2004, 369 - 370, Japanese

  • High-cycle fatigue damage evaluation for micro-nanoscale single crystal silicon under bending and tensile stressing
    T Namazu, Y Isono
    2004, MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 149 - 152, English
    [Refereed]
    International conference proceedings

  • 田中 武司, 磯野 吉正, 河合 竜弥
    The present paper describes the sintering characteristics of functionally gradient material (hereafter f.g.m.), such as aluminum nitride/HSS and zirconia/Ni, in order to clarify the influences of sintering conditions to the physical and mechanical properties of these compounds, and their applications to a kind of tool materials. It is clarified that both AIN and ZrO_2 compounds that were successfully fabricated by SPS, provide the moderate physical and mechanical properties. Micro Vickers hardness of AIN/10wt%HSS compound is larger than that of AIN compound. The hardness of ZrO_2/Ni compound is smaller than that of ZrO_2 compound due to the softness of Ni. The surface roughness of aluminum alloy cut by both AIN/HSS and ZrO_2/Ni f.g.ms. is slightly smaller than that cut by P20 in wet and dry cutting. The forces in cutting by AIN/HSS f.g.m are smaller than those in cutting by P20 and ZrO_2/Ni f.g.m. The flank wear of P20 is less than that of both AIN/HSS and ZrO_2/Ni f.g.ms. due to a larger hardness of tungsten carbide. However, the wear rates of P20 are larger than those of functionally gradient materials.
    The Japan Society for Precision Engineering, 2004, 精密工学会誌, Vol. 70, No. 6, pp. 818-822(6) (6), 818 - 822, Japanese
    [Refereed]
    Scientific journal

  • Kuniyuki Kakushima, Manabu Ataka, Hiroyuki Fujita, Toshiyuki Watanabe, Kouji Shimamoto, Yoshimasa Isono, Takushi Gouda, Gen Hashiguchi, Yutaka Mihara, Hidenori Mimura
    2004, IEEJ Transactions on Sensors and Micromachines, 124(7) (7), 248 - 254, English
    [Refereed]
    Scientific journal

  • Takamitsu Kakinaga, Osamu Tabata, Noriaki Baba, Yoshitada Isono, J. G. Korvink, K. H. Ehrmann
    2004, IEEJ Transactions on Sensors and Micromachines, 124(1) (1), 7 - 13, English
    [Refereed]
    Scientific journal

  • T Namazu, Y Isono
    Mar. 2003, SENSORS AND ACTUATORS A-PHYSICAL, 104(1) (1), 78 - 85, English
    [Refereed]
    Scientific journal

  • Noriaki Baba, Koji Makino, Takamitsu Kakinaga, Osamu Tabata, Yoshitada Isono, J. G. Korvínk
    Institute of Electrical and Electronics Engineers Inc., 2003, MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science, 277 - 280, English
    [Refereed]
    International conference proceedings

  • High-cycle fatigue test of nanoscale Si and SiO2 wires based on AFM technique
    T Namazu, Y Isono
    2003, MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, 662 - 665, English
    International conference proceedings

  • 田中 武司, 磯野 吉正
    The phase transformation of zirconia and the deterioration of ground surface are provided in grinding zirconia/nickel compounds. The present paper describes the influences of these phenomena to the strength of compounds. The bending strength of compounds decreases with an increase of nickel contents. The cracks propagate at the interface between zirconia and nickel in the zirconia-enriched compounds. Monoclinic phase contents increase by phase transformation of zirconia in grinding. However, its increase rate lowers with an increase of nickel contents. The bending strength of compounds increases with more zirconia by phase transformation after grinding, and decreases with more nickel than about 50wt% nickel contents due to large ground surface roughness. The increase of compressive residual stress in zirconia depends on phase transformation derived by grinding, and the residual stress in nickel changes from tensile to compressive accompanying with more contents of nickel.
    The Japan Society for Precision Engineering, 2003, 精密工学会誌, 69(8) (8), 1087 - 1092, Japanese
    [Refereed]
    Scientific journal

  • 磯野 吉正, 谷渕 栄仁, 田中 武司, 寺山 暢之
    This paper studies elementary and structural effects on mechanical properties of silicon incorporated amorphous hydrogenous carbon films. Fifteen kinds of the carbon films were prepared by plasma-enhanced chemical vapor deposition method of the penning ionization gauge discharge type using argon, acethylen and tetramethylsilane gases. X-ray photoelectron and Raman spectroscopes performed elementary and microstructural analyses of the carbon films, respectively. Nano-indentation tests were also carried out in order to characterize the reduced elastic modulus and hardness of the carbon films. Intermixture of the tetramethylsilane gas led to a formation of silicon-carbon bonding and an increase of hydrogen atoms in the films. Hydrogen atoms also increased with a reduction of the negative bias voltage at the film substrate. The reduced modulus and hardness of the carbon films ranged from 53 GPa to 163 GPa and from 9 GPa to 29 GPa, respectively. Better mechanical properties resulted from a reduction of tetramethylsilane gases and an increase of the negative bias voltage. The bias voltage especially had a larger influence on the mechanical properties than the gas flow rate. Molecular orbital calculations revealed that the role of a double bond of carbon atoms was likely significant for better mechanical properties of the carbon films.
    The Japan Society of Mechanical Engineers, 2003, 日本機械学会論文集A編, 69(679) (679), 602 - 609, Japanese
    [Refereed]
    Scientific journal

  • S Sundararajan, B Bhushan, T Namazu, Y Isono
    May 2002, ULTRAMICROSCOPY, 91(1-4) (1-4), 111 - 118, English
    [Refereed]
    Scientific journal

  • T Namazu, Y Isono, T Tanaka
    Apr. 2002, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 11(2) (2), 125 - 135, English
    [Refereed]
    Scientific journal

  • K Oka, S Aoyagi, Y Arai, Y Isono, G Hashiguchi, H Fujita
    Apr. 2002, SENSORS AND ACTUATORS A-PHYSICAL, 97-8, 478 - 485, English
    [Refereed]
    Scientific journal

  • Simulator for observing the Si anisotropic chemical etching process in atomic scale
    T Kakinaga, N Baba, O Tabata, Y Isono, K Ehrmann, JG Korvink
    2002, MHS2002: PROCEEDINGS OF THE 2002 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 35 - 40, English
    [Refereed]
    International conference proceedings

  • Mechanical characterization of sub-micrometer thick DLC films by AFM tensile testing for surface modification in MEMS
    Y Isono, T Namazu, N Terayama, T Tanaka
    2002, FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 431 - 434, English
    [Refereed]
    International conference proceedings

  • Quasi-static/cyclic loading tests of nanometric SiO2 wires using AFM technique for NEMS designs
    T Namazu, Y Isono
    2002, PROCEEDINGS OF THE 2002 2ND IEEE CONFERENCE ON NANOTECHNOLOGY, 51 - 54, English
    [Refereed]
    International conference proceedings

  • 田中 武司, 磯野 吉正
    The present paper describes the influences of the valve roundness and corner dullness to a gasoline leakage, after analyzing them with the shape preciseness of valve-seat system. Moreover, the influences of CBN wheel grinding conditions on the preciseness of valve are discussed. In order to decrease a gasoline leakage from valve-seat clearance, it is necessary to decrease the roundness and corner dullness of valve, as well as the roundness and average clearance of seat. For the small roundness of valve, valve should be fed at the minimum feed rate to CBN wheel under the low eccentricity. The resin-bonded CBN wheel provides the small roundness without sharp scratching under the large wheel speed. The vitrified-bonded CBN wheel with grain size over #800 improves the corner dullness of valve by the sharp edge of wheel formed by the diamond truer of #600 grain size.
    The Japan Society of Mechanical Engineers, 2002, 日本機械学会論文集C編, 68(674) (674), 3094 - 3101, Japanese
    [Refereed]
    Scientific journal

  • cBNホイールによる軟鋼の冷風研削における研削現象
    田中 武司, 磯野 吉正, 盛貞 悦一
    2002, 砥粒加工学会誌, Vol. 46, No. 5, pp. 234-239(5) (5), 234 - 234, English
    [Refereed]
    Scientific journal

  • cBNホイールによる延性材料の冷風研削現象について
    田中 武司, 磯野 吉正, 盛貞 悦一
    2002, 砥粒加工学会誌, Vol. 46, No. 9, pp. 452-457(9) (9), 457 - 457, English
    [Refereed]
    Scientific journal

  • T Tanaka, Y Isono
    Jun. 2001, JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 113(1-3) (1-3), 385 - 391, English
    [Refereed]
    Scientific journal

  • NAMAZU Takahiro, ISONO Yoshitada, TANAKA Takeshi
    This paper describes a development of strain measurement technique using micro tensile tester built in AFM. The micro tensile tester was designed for evaluation of Young's modulus and fracture strength of MEMS materials, In tensile test, gauge patterns on the test specimen were directly measured by the AFM. Averaged Young's modulus of Si[110] was 170 GPa, which was in agreement with analytical values calculated from anisotropic theory. This technique is, therefore, efficient to the evaluation of mechanical properties for micro-scaled materials.
    The Japan Society of Mechanical Engineers, 2001, The proceedings of the JSME annual meeting, 1, 325 - 326, Japanese

  • TANIBUCHI Takahito, MURAMOTO Kenichi, ISONO Yoshitada, TANAKA Takeshi
    This paper describes an evaluation of mechanical properties for a-Si:C:H thin films by means of nano-indentation test. This research focuses on revealing the relationship between mechanical properties of films, depositing conditions and film structure. The a-Si:C:H films were prepared by the plasma-enhanced CVD method of the hot cathode PIG discharge type. The microstructure of the films was examined by XPS and Raman spectroscopy. Young's modulus of the films increased with an increase of bias voltage and with decreasing hydrogen content in the film. Better mechanical properties of the a-Si:C:H thin films was achieved by the higher bias voltage of the deposition condition.
    The Japan Society of Mechanical Engineers, 2001, The proceedings of the JSME annual meeting, 1, 297 - 298, Japanese

  • AFM bending testing of nanometric single crystal silicon wire at intermediate temperatures for MEMS
    Y Isono, T Namazu, T Tanaka
    2001, 14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 135 - 138, English
    [Refereed]
    International conference proceedings

  • Takeshi Tanaka, Yoshitada Isono
    2001, Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 67(660) (660), 2719 - 2724, English
    [Refereed]
    Scientific journal

  • インコネル718の冷風研削における研削現象
    田中 武司, 磯野 吉正, 盛貞 悦一
    2001, 砥粒加工学会誌, Vol. 45, No. 10, pp. 490-465(10) (10), 490 - 490, English
    [Refereed]
    Scientific journal

  • PZTセラミックスの延性/脆性モード研削の研究”, 砥粒加工学会誌, 砥粒加工学会
    田中 武司, 磯野 吉正
    2001, 砥粒加工学会誌, Vol. 45, No. 8, pp. 391-396, English
    [Refereed]
    Scientific journal

  • T Namazu, Y Isono, T Tanaka
    Dec. 2000, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 9(4) (4), 450 - 459, English
    [Refereed]
    Scientific journal

  • Nano-scale bending test of Si beam for MEMS
    Takahiro Namazu, Yoshitada Isono, Takeshi Tanaka
    IEEE, 2000, Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 205 - 210, English
    Scientific journal

  • NAMAZU Takahiro, ISONO Yoshitada, TANAKA Takeshi
    This research makes clear the temperature effect on mechanical properties of micro/nano scale Si beams by using Atomic Force Microscope (AFM). The Si and SiO_2 beam were fabricated on a Si diaphragm by means of field-enhanced anodization with AFM and anisotropic etching. The beams were approximately 200-800nm in width and 255nm in thickness. As a result of bending tests, bending strength and Young's modulus of Si beam in the <110> direction decreased with increasing temperature ranging from 295K to 573K.
    The Japan Society of Mechanical Engineers, 2000, The proceedings of the JSME annual meeting, 2000, 215 - 216, Japanese

  • Son Hoanh Truong, Yoshitada Isono, Takeshi Tanaka
    Japan Society for Precision Engineering, 2000, Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 66(12) (12), 1911 - 1916, English
    [Refereed]
    Scientific journal

  • Nobuyuki Naka, Kazuto Yamamoto, Yoshitada Isono, Takeshi Tanaka, Nobuyuki Terayama
    Japan Society of Mechanical Engineers, 2000, Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 66(644) (644), 698 - 705, Japanese
    [Refereed]
    Scientific journal

  • SH Truong, Y Isono, T Tanaka
    May 1999, JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 90, 385 - 391, English
    [Refereed]
    Scientific journal

  • Y Isono, T Tanaka
    Apr. 1999, JSME INTERNATIONAL JOURNAL SERIES A-SOLID MECHANICS AND MATERIAL ENGINEERING, 42(2) (2), 158 - 166, English
    [Refereed]
    Scientific journal

  • 中 庸行, 磯野 吉正, 田中 武司, 寺山 暢之
    This paper describes the microstructural effect of Diamond-Like Carbon (DLC) thin film on micro-tribological properties. DLC thin films with density of 1.9-2.4 g/cm3 were deposited on Silicon (111) surface by Plasma-Enhanced CVD method of the hot cathode PIG discharge type. The effect of deposition conditions on the microstructure of DLC thin film was evaluated by Raman spectroscopy. Increasing the bias voltage and the discharge current shifted the peak of the G-band shift toward high frequency and enlarged I (D)/I (G) ratio. Pin-on-Plate friction experiments were carried out using a diamond pin in high vacuum. The friction coefficients of DLC thin films indicated constant values during the friction. The friction coefficients increased with shifting G-band toward low frequency in the range above 1540 cm-1, but those did not vary with increasing I (D)/I (G). The friction coefficients were directly proportional to density of the film. Molecular orbital calculations revealed that the adhesion energy on the sp3 bonding atom cluster was higher than that on the sp2 bonding atom cluster.
    The Japan Society of Mechanical Engineers, 1999, 日本機械学会論文集A編, 65(634) (634), 1427 - 1434, English
    [Refereed]
    Scientific journal

  • Some effects of over coated metal for the mechanical property improvement of bond bridge of porous metal bonded diamond wheel
    SH Truong, Y Isono, T Tanaka
    Dec. 1998, INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING, 32(4) (4), 275 - 277, English
    [Refereed]
    Scientific journal

  • Y Isono, T Tanaka, N Terayama
    Dec. 1998, MATERIALS SCIENCE RESEARCH INTERNATIONAL, 4(4) (4), 267 - 274, English
    [Refereed]
    Scientific journal

  • Y Isono, H Kishimoto, T Tanaka
    Mar. 1998, MATERIALS SCIENCE RESEARCH INTERNATIONAL, 4(1) (1), 39 - 44, English
    [Refereed]
    Scientific journal

  • 中 庸行, 磯野 吉正, 田中 武司, 寺山 暢之
    This paper describes the effect of density of Diamond-Like Carbon (DLC) thin film on tribological property. DLC thin films having the density of 1.9-2.5 g/cm3 were prepared on (111) of Silicon surface by the hot cathode PIG Discharge Type Plasma-Enhanced CVD method. Ball on disk friction experiments were carried out using diamond ball. The friction coefficients increased from 0.05 to 0.20 with increasing film density in the density range below 2.185 g/cm3, but those did not change above 2.185 g/cm3. The specific wear value also increased with increasing film density. The effect of film density on tribological property between DLC thin film and diamond pin was examined by molecular dynamics simulation. The diamond pin slides to uniaxial direction on DLC thin film having the density 1.5-3.0 g/cm3. Atoms of DLC thin film having the density of 1.5 g/cm3 were moved most actively. Atomic movement being like to shear deformation was observed during frictional processes. The effect of film density on friction coefficients in MD simulations was similar to that in experiments qualitatively.
    The Japan Society of Mechanical Engineers, 1998, 日本機械学会論文集A編, 64(620) (620), 1061 - 1068, English
    [Refereed]
    Scientific journal

  • 光造形法による砥石の開発と特性評価
    田中 武司, 磯野 吉正, 進藤 寛英, 石崎 陽介
    1998, 砥粒加工学会誌, Vol. 42, No. 8, pp. 344-350(8) (8), 344 - 344, English
    [Refereed]
    Scientific journal

  • TRUONG Son Hoanh, 磯野 吉正, 田中 武司
    It has been aimed to develop porous metal bonded diamond wheel with an ideal bond bridge like a vitrified bond, the pore rates of about 50 vol% and the bending strength of 10 to 50 MPa, because a lot of merits, such as low grinding temperature and a few grinding force, many chip pockets and easy dressing and truing, may be obtained. The following conclusions are obtained by some treatments. (1) The phosphorus diffuses into bond bridge with oxygen by heating after the phosphorating treatment. (2) The shear strength of bond bridge and the elastic modulus of bending test pieces increased by the heat treatment under high pressure by the diffusion of phosphorus and the subzero treatment by a martensite transformation of metal. (3) The original targets of development of porous metal bonded diamond wheel are accomplished with such treatments.
    The Japan Society for Precision Engineering, 1998, 精密工学会誌, 64(6) (6), 923 - 928, English
    [Refereed]
    Scientific journal

  • A Trial of Bond Bridge Formation with Extracted Metals from Colloidal Solution
    TRUONG Son Hoanh, ISONO Yoshitada, TANAKA Takeshi
    1998, International Journal of JSPE, Vol. 33, No. 1, pp. 40-42, English
    [Refereed]
    Scientific journal

  • 磯野 吉正, 田中 武司
    1998, 日本機械学会論文集A編, 64(625) (625), 2263 - 2270, English
    [Refereed]
    Scientific journal

  • Y Isono, T Tanaka
    Jul. 1997, JSME INTERNATIONAL JOURNAL SERIES A-SOLID MECHANICS AND MATERIAL ENGINEERING, 40(3) (3), 211 - 218, English
    [Refereed]
    Scientific journal

  • New Product of Zirconia/Alumina Fine Ceramics Compounds and Its Grinding Characteristics
    TANAKA Takeshi, ISONO Yoshitada, TSUDA Takahiro, KOJIMA Masahiro
    1997, Rapid Product Development, pp. 197-206, English
    [Refereed]
    Scientific journal

  • T Tanaka, Y Isono
    Jan. 1997, JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 63(1-3) (1-3), 175 - 180, English
    [Refereed]
    Scientific journal

  • 磯野 吉正, 田中 武司
    1997, 日本機械学会論文集A編, 63(612) (612), 1814 - 1821, English
    [Refereed]
    Scientific journal

  • 磯野 吉正, 田中 武司
    1996, 日本機械学会論文集A編, 62(602) (602), 2364 - 2371, English
    [Refereed]
    Scientific journal

  • T TANAKA, Y ISONO, S UEDA
    Apr. 1995, PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 17(2) (2), 117 - 123, English
    [Refereed]
    Scientific journal

  • メタルボンドダイヤモンドホイールの特性と性能に及ぼす金属成分の影響
    田中 武司, 磯野 吉正
    1995, 精密工学会誌, Vol. 61, No. 6, pp. 841-843, English
    [Refereed]
    Scientific journal

  • A Study on Work Toughening of Zirconia Ceramics by Grinding Process
    TANAKA Takeshi, ISONO Yoshitada, KOJIMA Masahiro, TSUDA Takahiro
    1995, International State of Art in Abrasive Technology, pp. 41-48, English
    [Refereed]
    Scientific journal

  • MULTIAXIAL LOW-CYCLE FATIGUE DAMAGE EVALUATION USING AC POTENTIAL METHOD FOR ALLOY 738LC SUPERALLOY
    Y ISONO, M SAKANE, M OHNAMI, K FUJIYAMA
    Oct. 1994, JOURNAL OF ENGINEERING MATERIALS AND TECHNOLOGY-TRANSACTIONS OF THE ASME, 116(4) (4), 488 - 494, English
    [Refereed]
    Scientific journal

  • 田中 武司, 磯野 吉正, 上田 智
    Zirconia is regarded as the structural materials of machine element which provide the distinct properties of tenacity by the martensitic transformation from a tetragonal phase to the monoclinic or rhombohedral phases under the plastic deformation and the brittle fracture. The present paper makes clear the relationships between both fracture modes and the phase transformations. In several machining processes which form the surface with both fracture modes, it is experimentally examined how the surface roughness and the phase transformation influence to the toughening of ZrO2-Y2O3. The phase transformation plays an important role in grinding and shotpeening, but the surface roughness influences much to the toughening of ZrO2-Y2O3 in oscillated wet-lapping. In grinding, a tetragonal phase equivalently transforms to the monoclinic and rhombohedral phases, but a monoclinic phase is mostly presented in oscillated wet-lapping and shotpeening. It was made clear that the plastic deformation related to the transformation of tetragonal phase to a rhombohedral phase, as well as the brittle fracture related to the transformation of tetragonal phase to a monoclinic phase.
    The Japan Society for Precision Engineering, 1994, 精密工学会誌, 60(10) (10), 1465 - 1469, English
    [Refereed]
    Scientific journal

■ MISC
  • Evaluation of Thermoelectric Voltage of Monolithically-Integrated Core-Shell Si Nanowire Bridges
    上杉晃生, 西依脩祐, 菅野公二, 磯野吉正
    2023, 電気学会論文誌 E, 143(7) (7)

  • Sensitivity improvement of surface-enhanced Raman spectroscopy by control of gold colloid cencentration
    中村友河, 上杉晃生, 菅野公二, 磯野吉正
    2023, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 40th

  • Piezoresistive effect of Si nanowires with Al2O3 electret film coating
    長野貴哉, 仲上達也, 上杉晃生, 菅野公二, 磯野吉正
    2023, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 40th

  • Calculation of resonance frequency shift of doubly-clamped beam with initial deflection
    松塚直樹, 安木大恭, 近藤直輝, 上杉晃生, 菅野公二, 磯野吉正
    2023, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 40th

  • Sensitivity enhancement of surface-enhanced Raman spectroscopy by nanogap control of gold nanoparticle dimer
    CHANG Yuanzhi, 中村友河, 上杉晃生, 菅野公二, 磯野吉正
    2023, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 40th

  • Evaluation of a single DNA oligomer measurement by surface-enhanced Raman spectroscopy
    品部智哉, 伊藤寛樹, 上杉晃生, 菅野公二, 磯野吉正
    2022, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 39th

  • Electretization of Atomic Layer Deposited Al2O3 Dielectric Films
    井口慶人, 楢崎桃子, 上杉晃生, 菅野公二, 磯野吉正
    2022, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 39th

  • Evaluation of Thermoelectric Voltage of Monolithically-Integrated Core-Shell Si Nanowire Bridges
    上杉晃生, 西依脩祐, 菅野公二, 磯野吉正
    2022, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 39th

  • Detection of a single adenine with methylation by surface enhanced Raman spectroscopy using a gold nanoparticle dimer
    伊藤寛樹, 上杉晃生, 菅野公二, 磯野吉正
    2022, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 39th

  • Influence of shell surface potential to piezoresistive effects of core/shell SiC nanowires
    上杉晃生, 仲田進哉, 菅野公二, 磯野吉正
    2021, マルチスケール材料力学シンポジウム講演論文集(CD-ROM), 6th

  • Promotion of perpendicular growth of silicon nanowires by MACE-formed surface nanoholes
    上杉晃生, 西依脩祐, 菅野公二, 磯野吉正
    2021, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 38th

  • Control of piezoresistivity in core-shell structured SiC nanowires by surface potential field
    上杉晃生, 仲田進哉, 菅野公二, 磯野吉正
    2021, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 38th

  • Fabrication, control, and characterization of gold nanoparticle dimer based nanogap electrode for electrical and optical single molecule measurement
    住友孝行, CHANG Yuanzhi, 森田明宏, 上杉晃生, 菅野公二, 磯野吉正
    2021, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 38th

  • マイクロ振動子のたわみ状態制御による振動型光センサの高感度化—Study on sensitivity improvement of microresonator-based optical sensor by deflection control
    竹上 航平, 近藤 直輝, 上杉 晃生, 菅野 公二, 磯野 吉正
    Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese

  • 高温パンチクリープ成形技術を用いた3軸力センサの開発および被覆樹脂の粘弾性特性を考慮したセンサ性能評価—Development of three-axis force sensor by 3D microstructuring using high temperature punch creep forming and sensor performance evaluation considering resin viscoelasticity
    澤田 和磨, 丹村 響介, 大坂 憲司, 上杉 晃生, 菅野 公二, 磯野 吉正
    Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese

  • 金ナノ構造を用いた波長依存性を有するSOI型近赤外ボロメータ素子—Study on wavelength-dependent SOI-type near-infrared bolometer element using gold nanostructure
    坪田 達也, 上杉 晃生, 菅野 公二, 磯野 吉正
    Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese

  • 金ナノ構造光吸収体集積静電型マイクロ振動子デバイスによる近赤外光強度センサ—Near-infrared light intensity sensing by electrostatic microresonator transducer integrated with gold nanostructure optical absorber
    鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正
    Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese

  • 近赤外吸収体を有する静電型マイクロ振動子デバイスを用いた水の分光測定—Spectroscopic measurement of water using electrostatic transducer with Near-infrared absorber
    鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正
    Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese

  • 金ナノ粒子二量体を用いたナノギャップ電極の作製とその電気的・光学的評価—Fabrication of nanogap electrode based on gold nanoparticle dimer and its electrical and optical evaluation
    住友 孝行, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正
    Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese

  • 光センシングマイクロ共振デバイスの梁長さおよび振幅が計測分解能に与える影響—Effects of beam length and amplitude on measurement resolution in optical sensing using microresonator
    近藤 直輝, 竹上 航平, 上杉 晃生, 菅野 公二, 磯野 吉正
    Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese

  • 光励起ナノギャップ電極を用いたDNAオリゴマーの光トラップおよび1分子検出—Optical trapping and single-molecule detection of DNA oligomer using optically-excited nanogap electrodes
    森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正
    Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 6p, Japanese

  • 架橋成長Siナノワイヤの熱電特性評価に関する研究—Characterization of thermoelectric properties of bridged-grown Si nanowire
    北川 諒, 岸本 卓巳, 小國 凌, 上杉 晃生, 菅野 公二, 磯野 吉正
    Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese

  • シリコンマイクロ振動子光センサにおける共振周波数特性の形状依存性—Pattern dependency of resonant frequency response of silicon microresonator for optical sensing
    竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正
    Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese

  • 金ナノグレーティング構造の光吸収ピーク波長制御による高感度レーザ波長計測マイクロ振動子デバイス—Highly sensitive laser wavelength measurement using microresonator controlling absorption peak of gold nanograting
    竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正
    Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese

  • コアシェルSiCナノワイヤの電気伝導性に及ぼすシェル表面電位の影響解明—Effect of shell surface potential to electrical properties of core-shell SiC nanowire
    井ノ山 滉大, 仲田 進哉, 上杉 晃生, 菅野 公二, 磯野 吉正
    Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese

  • 静電型マイクロ振動子トランスデューサを用いたシリコン近赤外光強度センサ
    中藤康太, 上杉晃生, 菅野公二, 磯野吉正
    2019, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 36th

  • Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性—Polarization dependence of near-infrared absorption spectrum of Si-deposited gold nano-grating structures
    新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正
    2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 6p, Japanese

  • VLS成長SiNW単体に対する熱電変換特性評価—Characterization of thermoelectric properties for VLS-growth SiNWs
    北川 諒, 井本 大暉, 上杉 晃生, 菅野 公二, 磯野 吉正
    2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 5p, Japanese

  • Near-infrared optical property of Si-deposited gold nanowire grating structures
    新居 直之, 菅野 公二, 磯野 吉正
    Institute of Electrical Engineers of Japan, 31 Oct. 2017, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 34, 6p, Japanese

  • Development of tiny MEMS tactile sensor using high temperature creep forming technique
    大坂 憲司, 中田 悟史, 山本 賢祐, 菅野 公二, 磯野 吉正
    Institute of Electrical Engineers of Japan, 31 Oct. 2017, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 34, 1 - 5, Japanese

  • Surface-Enhanced Raman Spectroscopy Detection of Adenine Molecule using single Gold Nanoparticle dimer
    丸岡 克成, 池上 晃平, 菅野 公二, 磯野 吉正
    電気学会, 19 Dec. 2016, 電気学会研究会資料. PHS, 2016(58) (58), 43 - 46, Japanese

  • Optical Property of Si thin film deposited gold nanowire array
    新居 直之, 城谷 修司, 菅野 公二, 磯野 吉正
    電気学会, 19 Dec. 2016, 電気学会研究会資料. MSS, 2016(27) (27), 1 - 3, Japanese

  • Study on High Temperature Creep Deformation of Si Thin Film by Backward Analysis Method for Development of Tactile Sensors
    山本 賢祐, 中田 悟史, 菅野 公二, 磯野 吉正
    Institute of Electrical Engineers of Japan, 02 Oct. 2016, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 33, 1 - 4, Japanese

  • Evaluation of Piezoresistivity of VLS-Grown Core/Shell-SiC Nanowires Using Electrostatically Actuated Nanotensile Testing Device
    仲田 進哉, 井本 大暉, Rossi Feancesca, Lugstein Alois, 菅野 公二, 磯野 吉正
    Institute of Electrical Engineers of Japan, 02 Oct. 2016, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 33, 1 - 4, Japanese

  • Highly-Sensitive and Rapid Detection of DNA bases using Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimer Array
    池上 晃平, 菅野 公二, 磯野 吉正
    Institute of Electrical Engineers of Japan, 02 Oct. 2016, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 33, 1 - 6, Japanese

  • Gold Nanoparticle Synthesis Using High-Speed Pulsed Mixing Microfluidic Device
    Koji Sugano, Ayumi Maedomari, Yuki Tanaka, Yoshitada Isono
    Nov. 2015, 28th InteProc. of rnational Microprocesses and Nanotechnology Conference (MNC2015), 13P-11-66, English

  • Crystal Orientation Dependency of Strain-Induced Electrical Properties for VLS-Grown Single Crystal Silicon Nanowires
    仲田 進哉, 北田 勇馬, Wagesreither Stefan, Lugstein Alois, 菅野 公二, 磯野 吉正
    Institute of Electrical Engineers of Japan, 28 Oct. 2015, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 32, 4p, Japanese

  • Surface enhanced Raman spectroscopy of nucleobases using gold nanoparticle dimer array
    饗庭 清仁, 池上 晃平, 菅野 公二, 磯野 吉正
    Institute of Electrical Engineers of Japan, 28 Oct. 2015, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 32, 1 - 4, Japanese

  • Evaluation of Piezoresistivity for VLS-Grown Silicon Nanowires Under Enormous Elastic Strain
    Nakata Shinya, Kitada Yuma, Wagesreither Stefan, Lugstein Alois, Sugano Koji, Isono Yoshitada
    The Japan Society of Mechanical Engineers, 04 Oct. 2015, Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics, 2015(14) (14), 184 - 184, English

  • Evaluation of Shear Piezoresistance Coefficient of Silicon Nanowire by Asymmetrical Four Point Bending Test
    TAKESHITA Toshimitsu, KIMURA Taiki, SUGANO Koji, ISONO Yoshitada
    This research evaluated the shear piezoresistance property of p-type single crystal silicon nanowire (SiNW) by the asymmetrical four-point bending (AFPB) testing proposed by the authors. We fabricated the p-type SiNW on the AFPB specimen with "V"-shaped notches (V-notches) made of single crystal silicon. Bending the specimen by the asymmetrical four point-supports, simple shear stress can be produced at the center of the specimen. Consequently, we have succeeded in evaluating the shear piezoresistance coefficient of SiNW directly, which was found to be π_<44>=203.28×10^<-11> Pa^<-1> at an impurity concentration of 4×10^<18> cm^<-3>. This value is 2.1 times larger than that of p-type piezoresistors used in conventional piezoresistance sensors on a micrometer scale. The proposed evaluation technique and obtained result will be effective for design application of high-sensitivity mechanical sensors integrating SiNW piezoresistance elements.
    The Japan Society of Mechanical Engineers, 07 Sep. 2014, Mechanical Engineering Congress, Japan, 2014, "J2240304 - 1"-"J2240304-5", Japanese

  • Study on interlayer sliding deformation mechanism of MWCNT using MEMS-based nanotensile testing device
    Yamauchi Kenji, Omori Hideaki, Isono Yoshitada, Yashiro Kisaragi
    We have developed the in-situ scanning electron microscopy (SEM) nanomaterial manipulation system including newly designed Electrostatically Actuated NAnotensile Testing devices (EANATs), in order to investigate mechanical characteristics of multi-walled carbon nanotubes (MWCNTs) synthesized by an atmosphere pressure-chemical vapor deposition (APCVD). The new EANATs can measure uniaxial tensile displacement of nanomaterials with the capacitive displacement sensor incorporated to the cantilever motion amplification system. The nanomaterial manipulation system functions to pick up an individual MWCNT from a substrate and to fix it on EANATs. Stress-strain relations of MWCNTs were successfully obtained from the nanotensile tests, and Young's moduli were estimated to be 243 to 623 GPa. The shear strength at stick-slip event during interlayer sliding of MWCNTs under tensile loading was directly derived from the shear interaction force in tensile force-displacement curves and SEM observations.
    The Japan Society of Mechanical Engineers, 04 Nov. 2013, マイクロ・ナノ工学シンポジウム, 2013(5) (5), 139 - 140, Japanese

  • Characterization of anisotropic Brownian motion of ellipsoid by the large deviation theory
    HANASAKI Itsuo, ISONO Yoshitada
    Brownian motion of an ellipsoid is faster in the longitudinal direction than that in the perpendicular direction. This leads to the diffusion anisotropy while it is isotropic in the long time limit. The mean square displacements from the particle trajectory do not reveal such characteristics and cannot distinguish the dynamics from that of spherical particles. Furthermore, it is often difficult to determine the particle orientiation at every time step of the single particle tracking experiments. In this study, we show that the diffusion anisotropy can be evaluated from the particle trajectory without the information of particle orientation by the statistical quantities based on the large deviation principle in mathematics. The scope of this study is the characterization of fluctuation phenomena beyond the central limit theorem.
    The Japan Society of Mechanical Engineers, 16 Nov. 2012, Fluids engineering conference ..., 2012, 231 - 232, Japanese

  • Low Temperature Formation Process and Low Load Electrical Contact of a Carbon Nanotube Film Bonded to a Au Film
    Hiroshi Kinoshita, Naganori Koda, Masanori Seki, Masahiro Fujii, Yoshitada Isono, Nobuo Ohmae
    2011, Proceedings of International Tribology Conference Hiroshima 2011(ITC Hiroshima 2011)

  • Mechanical Characterization of Nanometer Thick Gold Thin Film Using MEMS Tensile Testing Device
    Oh Hyunjin, Isono Yoshitada
    The Japan Society of Mechanical Engineers, 16 Mar. 2010, 関西支部講演会講演論文集, 2010(85) (85), "1 - 2", Japanese

  • Mechanical and Piezoresistance Characterization of FIB-CVD Carbon Nanowires for Nano Mechanical Sensors
    Kiuchi Mario, Matsui Shinji, Isono Yoshitada
    ナノメカニカルセンサの開発を目指して、MEMSデバイスを用いたアモルファスカーボンナノワイヤ(CNW)の力学的・電気的特性評価を実施した。具体的には、MEMS技術を用いて開発した静電駆動型ナノ材料引張試験デバイスを用いて、FIB-CVD法によって作製した直径約100nmのCNWの機械的性質および弾塑性変形挙動を実験的に解明するとともに、CNWの単軸応力下における電気抵抗特性であるピエゾ抵抗効果について検討した。
    The Japan Society of Mechanical Engineers, 16 Sep. 2008, M&M材料力学カンファレンス, 2008, "OS0405 - 1"-"OS0405-2", Japanese

  • Band deformation due to stress and piezoresistivity in bulk silicon
    NAKAMURA Koichi, ISONO Yoshitada, TORIYAMA Toshiyuki
    We have discussed the deformation of band structure due to stresses and the piezoresistivity in single-crystal bulk silicon based on the first-principles calculations. For n-type bulk silicon, the longitudinal and transverse piezoresistance coefficients originate from the energy gap between the valleys, whereas the shear piezoresistance coefficient arises from a distortion of the "ellipsoids" in the valleys. The distinction between the origins of piezoresistivity can be followed as a dependence on a surface concentration or temperature by our novel procedure to calculate the piezoresistance coefficients. Furthermore, for p-type bulk silicon, we have applied the perturbational approach to the band splitting in the valence bands due to the spin-orbit coupling, and then a more quantitative estimate of the piezoresistance coefficients can be expected.
    The Japan Society of Mechanical Engineers, 16 Sep. 2008, M&M材料力学カンファレンス, 2008, "OS0415 - 1"-"OS0415-2", Japanese

  • First-principle calculation of piezoresistance effect in silicon nanowires
    NAKAMURA Koichi, ISONO Yoshitada, TORIYAMA Toshiyuki
    We have simulated the piezoresistance coefficients in single-crystal silicon nanowires (SiNWs) based on the first-principle calculations of model structures. Variations of band gaps and curvatures due to tensile stresses will exert an influence on carrier densities and effective masses, and frequently contribute to a drastic turn of the conductivity. In particular, in the <001> SiNW model, uniaxial tensile stress to [001] longitudinal direction causes a sharp drop in band energy of the highest valence band with a small hole effective mass, leading to a drastic decrease in the hole conductivity. It is found that p-type <001> SiNW will be one of the most suitable candidates for nano-scale piezoresistor due to a giant piezoresistivity.
    The Japan Society of Mechanical Engineers, 24 Oct. 2007, M&M材料力学カンファレンス, 2007, 496 - 497, Japanese

  • Koichi Nakamura, Yoshitada Isono, Toshiyuki Toriyama
    2007, MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 268 - +, English
    [Refereed]

  • Mechanical Evaluation of Carbon Nanowire By Electrostatic Actuated NAno Tensile Testing Devices (EANAT)
    KIUCHI Mario, ISONO Yoshitada, SUGIYAMA Susumu, MORITA Takahiko, MATSUI Sinji
    10 Mar. 2005, 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2005(1) (1), 13 - 16, Japanese

  • AFM tensile test of sub-micron thick DLC film for surface modification in MEMS
    Isono Yoshitada, Namazu Takahiro
    This research focuses on revealing mechanical properties of diamond-like carbon (DLC) films for surface modification in MEMS. New compact tensile tester operating in an atomic force microscope (AFM) was developed for characterization of Young's modulus, Poisson's ratio and fracture strength of DLC films. The DLC films having sub-micron thickness from 0.2μm to 0.5μm were deposited onto microscale single crystal silicon (SCS) specimens by PE-CVD method of the hot cathode PIG discharge type. Young's moduli of the DLC films in AFM tensile tests ranged from 99 GPa to 112 GPa. AFM tensile tests and nano-indentation tests revealed that Poisson's ratio of DLC films ranged from 0.27 to 0.40. Fracture stress of the films also exhibited from 0.5 GPa to 1.1 GPa, which depended on the film thickness and deposition condition. SEM observations of fracture surfaces suggested that the fracture initiation of DLC/SCS specimens was induced at the boundary between the film and SCS substrate.
    The Japan Society of Mechanical Engineers, 10 Sep. 2003, Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics, 2003(2) (2), "OS06W0370 - 1"-"OS06W0370-6", English

  • 2002 2nd IEEE Conference on Nanotechnology : IEEE-NANO2002
    磯野 吉正
    01 Feb. 2003, 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society, 123(2) (2), 56 - 56, Japanese

  • Chemo-mechanical actuator using self-oscillating gel for artificial cilia
    O Tabata, H Kojima, T Kasatani, Y Isono, R Yoshida
    2003, MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, 12 - 15, English
    [Refereed]

  • Development of Nanoscale Fabrication and Material Testing Based on AFM Technique for MEMS
    NAMAZU Takahiro, ISONO Yoshitada
    20 Sep. 2002, 電気学会研究会資料. PHS, フィジカルセンサ研究会, 2002(7) (7), 35 - 38, Japanese

  • Fabrication of grinding wheel by rapid prototyping and its performance
    TANAKA Takeshi, ISONO Yoshitada
    砥粒加工学会, 01 Mar. 2002, Journal of the Japan Society of Grinding Engineers, 46(3) (3), 120 - 123, Japanese

  • Development of micro tensile tester operated in AFM to measure mechanical properties of DLC films
    ISONO Yoshitada, NAMAZU Takahiro, TERAYAMA Nobuyuki, TANAKA Takeshi
    This paper describes mechanical properties of Diamond-like Carbon (DLC) films for the protection of MEMS against their friction and wear. The compact tensile tester operated in atomic force microscope was developed in this research to evaluate Young's modulus, Poisson's ratio and fracture strength of DLC films. The DLC films with thickness of 0.2 and 0.3 μm were deposited on 20 μm-thick single crystal silicon specimens by Plasma-enhanced Chemical Vapor Deposition (PE-CVD) method of the hot cathode Penning Ionization Gauge (PIG) discharge type. The AFM tensile test and nano-indentation test were revealed that Young's modulus and Poisson's ratio of the DLC films ranged from 99 GPa to 112 GPa, and from 0.36 to 0.46,respectively.
    The Japan Society of Mechanical Engineers, 2002, 関西支部講演会講演論文集, 2002(77) (77), "1 - 29"-"1-30", Japanese

  • Resin-piled Grinding Wheel
    TANAKA Takeshi, ISONO Yoshitada
    砥粒加工学会, 01 Dec. 2000, Journal of the Japan Society of Grinding Engineers, 44(12) (12), 538 - 541, Japanese

  • Evaluation of Polishing Ability for Grinding Stone Developed by Using Rapid Prototyping
    UMPO Hiroki, ISONO Yoshitada, TANAKA Takeshi
    The method, which developed the grinding stone by hardening after the abrasive grain layer is laminated by the mixing in the ultraviolet curing resin, is described. And the characteristic of developed grinding stone was evaluated from the polishing experiment. The following results are obtained : (1) it is possible to the change strength and elasticity of the grinding stone and improve the performance by mixing more 2 types of resin. (2) The mechanical strength of is not proportional to the mixture ratio, when using more 2 types of resin. (3) The rapid prototyping (RP) grinding stone has the polishing performance, which is not inferior than that of the general grinding stone.
    The Japan Society of Mechanical Engineers, 16 Mar. 2000, 関西支部講演会講演論文集, 2000(75) (75), "2 - 35"-"2-36", Japanese

  • The Study of Machining in Fluorescence State Excited by Ultraviolet : Inspection of basic principal and phenomenon
    Ohyoshi Toshihiro, Isono Yoshitada, Tanaka Takeshi
    In this study, The excited state by ultraviolet, the materials of excited conditions react with processing materials more strongly. Since it seems that we can use these reactions as the machining method, it is necessary to inspect the basic principal and phenomenon. The machining experiment shows that this phenomenon was useful, and it was actually confirmed that the effect is same as the basic experiment.
    The Japan Society of Mechanical Engineers, 16 Mar. 2000, 関西支部講演会講演論文集, 2000(75) (75), "2 - 39"-"2-40", Japanese

  • Characteristic Evaluation of Functionally Gradient Material made with Spark Plasma sintering System and Development of Cutting Tool
    KAWAI Tatsuya, ISONO Yoshitada, TANAKA Takeshi
    In this study, the functionally gradient material that combined heat and abrasion resistance of ceramic and both characteristic of thermal conductivity and mechanical strength of metal, and that supplements the ceramic fragility in the metal, was noticed as cutting tool of aluminum alloy which is difficult to cut material. The material is produced by the Spark Plasma Sintering System, and the application to the tool is evaluated.
    The Japan Society of Mechanical Engineers, 16 Mar. 2000, 関西支部講演会講演論文集, 2000(75) (75), "2 - 49"-"2-50", Japanese

  • Experimental Study on High Pore Rate Formation and Grinding Performance of Porous Metal Bonded Diamond Wheel
    HOANH Troung Son, ISONO Yoshitada, TANAKA Takeshi
    01 Mar. 2000, 精密工学会大会学術講演会講演論文集, 2000(1) (1), 300 - 300, English

  • Molecular Dynamics Study of the Hydrogen Content Effect on Mechanical Properties of Hydrogenated Amorphous Carbon Film
    KAWARA Naoki, ISONO Yoshitada, NAKA Nobuyuki, TANAKA Takeshi
    日本機械学会, 2000, 熱流体系および固体系のミクロシミュレーションに関する合同シンポジウム・分子動力学シンポジウム講演論文集, 2000(5) (5), 13 - 14, Japanese

  • DLC/a-SiC積層薄膜の付着強度評価クライテリオンの検討
    中 庸行, 磯野 吉正, 田中 武司, 寺山 暢之
    01 Sep. 1999, 精密工学会大会学術講演会講演論文集, 1999(2) (2), 534 - 534, Japanese

  • Molecular Dynamics Simulations of Atomic Scale Indentation and Cutting Process with Atomic Force Microscope
    ISONO Yoshitada, TANAKA Takeshi
    This paper describes the effect of the material used for a tool on atomic scale indentation and cutting mechanisms of metal workpieces, by means of molecular dynamics simulations. The interatomic force between the tool and workpiece is assumed to be a two-body interatomic potential using parameters based on the ab-initio molecular orbital calculation for a(Cr, Ni)-(C, Si)_6H_9 atom cluster. Molecular dynamics simulated the atomic scale indentation and cutting process of the chromium and nickel workpieces using the diamond, silicon and diamond-like carbon(DLC) tools. The diamond and DLC tools formed the indentation mark. Young's modulus of the chromium and nickel in indentation simulations was larger than that in experiments. This was qualitatively explained by the effect of the surface energy for the workpiece on the elastic modulus. The machinability of the chromium and nickel with the diamond tool was better than that of the silicon tool in atomic scale cutting simulations. The depth of the cut for the workpieces in nano scale cutting experiments with AFM, was similar to that in atomic scale cutting by molecular dynamics simulations.
    The Japan Society of Mechanical Engineers, 15 Apr. 1999, JSME International Journal Ser. A Solid Mechanics and Material Engineering, 42(2) (2), 158 - 166, English

  • 易流動性液体の漏れ防止に関する研究(第2報) -バルブの角だれが漏れ量に及ぼす影響について-
    田中 武司, 磯野 吉正, 山崎 雅人
    05 Mar. 1998, 精密工学会大会学術講演会講演論文集, 1998(1) (1), 677 - 677, Japanese

  • 超砥粒ホイールによる低温研削加工に関する研究(第3報) -軟鋼研削における冷風研削特性について-
    片岡 健一, 磯野 吉正, 田中 武司, 盛貞 悦一
    05 Mar. 1998, 精密工学会大会学術講演会講演論文集, 1998(1) (1), 281 - 281, Japanese

  • DLC/TMS-SiC積層薄膜の付着強度評価
    山本 和人, 磯野 吉正, 田中 武司, 寺山 暢之
    05 Mar. 1998, 精密工学会大会学術講演会講演論文集, 1998(1) (1), 434 - 434, Japanese

  • PZT系セラミックスのマイクロ研削における微小変形破壊機構
    脇坂 宣範, 磯野 吉正, 田中 武司
    05 Mar. 1998, 精密工学会大会学術講演会講演論文集, 1998(1) (1), 468 - 468, Japanese

  • DLC/TMS-SiC 積層薄膜の付着強度評価
    磯野 吉正, 田中 武司, 山本 和人, 寺山 暢之
    日本材料学会, 1998, 学術講演会講演論文集, 47, 187 - 188, Japanese

  • ファインセラミックスの加工特異性に関する研究(第9報)ジルコニア/ニッケル複合材料の創製と研削特性
    田中 武司, 磯野 吉正, 益田 智史
    01 Oct. 1997, 精密工学会大会学術講演会講演論文集, 1997(2) (2), 384 - 384, Japanese

  • Three-Dimensional Molecular Dynamics Simulation of Atomic scale Precision Processing Using a Pin Tool
    ISONO Yoshitada, TANAKA Takeshi
    This paper describes the effect of temperature and interatomic force between a workpiece and tool on the atomic-scale cutting mechanism, by means of molecular dynamics simulation. The interatomic force between the workpiece and tool is assumed to be derived from the Morse potential function. Molecular dynamics cutting simulations were carried out using a rigid pin tool, with changing of the temperature and the value of Morse potential parameters γ_0, D and α. The increase in the potential parameters D and α resulted in the positive effect of surface roughness, but the increase in the parameter γ_0 and temperature resulted in the negative effect of surface roughness. Chip formation and side flow resulted due to the collision between the workpiece and tool, which lead to a temperature increase of the workpiece. The surface of workpieces observed experimentally in micro-scale cutting was similar to that in atomic-scale cutting by molecular dynamics simulation.
    The Japan Society of Mechanical Engineers, 15 Jul. 1997, JSME International Journal Ser. A Solid Mechanics and Material Engineering, 40(3) (3), 211 - 218, English

  • 光造形法によるナノグラインディングホイールの開発(第一報) -試作アルミナホイールによる2, 3の実験結果-
    進藤 寛英, 磯野 吉正, 田中 武司
    01 Mar. 1997, 精密工学会大会学術講演会講演論文集, 1997(1) (1), 1107 - 1108, Japanese

  • メタリファイドボンドダイヤモンドホイールの開発と研削性能に関する研究(第5報) -結合橋の強じん化と研削性能の関連性について-
    大泉 直規, 磯野 吉正, 田中 武司
    01 Mar. 1997, 精密工学会大会学術講演会講演論文集, 1997(1) (1), 251 - 252, Japanese

  • 第一原理計算に基づくcBNの物性評価(第一報) -原子間ポテンシャルの構築-
    岸本 宏一, 磯野 吉正, 田中 武司
    01 Sep. 1996, 精密工学会大会学術講演会講演論文集, 1996(2) (2), 89 - 90, Japanese

  • 超砥粒ホイールによる低温研削加工に関する研究(第2報) -冷却方式と研削特性の関連性について-
    片岡 健一, 高橋 毅, 磯野 吉正, 田中 武司, 盛貞 悦一
    01 Sep. 1996, 精密工学会大会学術講演会講演論文集, 1996(2) (2), 665 - 666, Japanese

■ Books And Other Publications
  • カーボンナノチューブの表面処理・分散技術と複合化事例
    技術情報協会
    Contributor, 第10章第6節「多層カーボンナノチューブの機械・電気特性評価」, 技術情報協会, Dec. 2019, Japanese, ISBN: 9784861047725

  • 小さなものをつくるためのナノ/サブミクロン評価法
    肥後 矢吉, 谷川 紘, 鈴木 健一郎, ISONO YOSHITADA, 荻 博次, 土屋 智由, 石山 千恵美
    Joint work, コロナ社, Jul. 2015, Japanese
    Scholarly book

  • Characterization of Materials (2nd edition), Volume 1, Chapter; Characterizing Micro and Nanomaterials Using MEMS Technology (by Yoshitada Isono)
    Elton N. Kaufmann, Yoshitada Isono
    Others, John Wiley and Sons, Inc., U. S. A.,, Nov. 2012, English
    Scholarly book

  • Electronic States and Piezoresistivity in Silicon Nanowires: Chapter 15 "Nanowires"
    Koichi Nakamura, Dzung Viet Dao, ISONO YOSHITADA, Toshiyuki Toriyama, Susumu Sugiyama
    Joint work, InTech, Oct. 2010, English
    Scholarly book

  • 電気学会技術報告1060号「ナノシステム創製を支える最新ナノテクノロジー」, 第4章4.2節ナノ材料評価・ナノデバイス創製を支えるナノ実験力学の展開,
    Isono Yoshitada
    Others, (社)電気学会, May 2006, Japanese
    Report

  • 矢川元基・編「構造工学ハンドブック」, 第12章12.3節ナノ・マイクロ構造設計, 第12章12.4節ナノ・マイクロ解析法
    Isono Yoshitada, 樋口俊郎
    Others, 丸善株式会社, Mar. 2004, Japanese
    Scholarly book

  • 樋口俊郎・編「マイクロマシン技術総覧」, 第1編2章マイクロ材料第1節シリコン
    Isono Yoshitada, 矢川元基
    Others, 産業技術サービスセンター, Jan. 2003, Japanese
    Scholarly book

■ Lectures, oral presentations, etc.
  • 単結晶シリコン薄膜定常クリープ特性の結晶方位依存性
    尹 聖午, 堀川 宇則, 澤田 和磨, 上杉 晃生, 菅野 公二, 磯野 吉正
    第38回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2021, Japanese

  • 電気的・光学的1分子計測に向けた金ナノ粒子二量体ナノギャップの作製・制御・評価
    住友 孝行, 常 沅芷, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正
    第38回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2021, Japanese

  • ウエハレベルパッケージ技術による低侵襲医療用極小3軸MEMS触覚センサの作製
    今西 智也, 宮本 桂寿, 東 駿太郎, 大木 舜介, 上杉 晃生, 菅野 公二, 青野 宇紀, 磯野 吉正
    第38回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2021, Japanese

  • Promotion of perpendicular growth of silicon nanowires by MACE-formed surface nanoholes
    Akio Uesugi, Syusuke Nishiyori, Koji Sugano, Yoshitada Isono
    34th International Microprocesses and Nanotechnology Conference (MNC2021), Oct. 2021, English

  • Characterization of nanogap with gold nanoparticle dimer controlled by four-point bending for electrical and optical single molecule measurement
    Yuanzhi Chang, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono
    34th International Microprocesses and Nanotechnology Conference (MNC2021), Oct. 2021, English

  • Growth Direction of VLS Silicon Nanowires with Surface Nanoholes Formed Using MACE
    Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono
    33rd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2020, English

  • Electrical and Optical Characterization of Nanogap Electrodes with an Assembled Gold Nanoparticle Chain
    Takayuki Sumitomo, Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono
    33rd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2020, English

  • マイクロ振動子のたわみ制御による振動型光センサの高感度化
    竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  • 金ナノ構造光吸収体集積静電型マイクロ振動子デバイスによる近赤外光強度センシング
    鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  • 高温パンチクリープ成形技術を用いた3軸力覚センサの開発および被覆樹脂の粘弾性特性を考慮したセンサ性能評価
    澤田 和磨, 丹村 響介, 大坂 憲司, 上杉 晃生, 菅野 公二, 磯野 吉正
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  • 光センシングマイクロ共振デバイスの梁長さおよび振幅が計測分解能に与える影響
    近藤 直輝, 竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  • 金ナノ粒子二量体を用いたナノギャップ電極の作製とその電気的・光学的評価
    住友 孝行, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  • 近赤外吸収体を有する静電型マイクロ振動子デバイスを用いた水の分光測定
    鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  • 金ナノ構造を用いた波長依存性を有するSOI型近赤外ボロメータ素子
    坪田 達也, 上杉 晃生, 菅野 公二, 磯野 吉正
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  • MEMS-based strain engineering for epitaxial grown semiconductive nanowires
    Yoshitada Isono
    8th International Conference on Nanoscience and Nanotechnology (ICONN2020),, Feb. 2020, English
    [Invited]

  • Evaluation of Thermoelectric Properties of VLS-Grown Bridged Si Nanowire
    A. Uesugi, R. Kitagawa, R. Oguni, K. Sugano, Y. Isono
    32nd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2019, English

  • Near-Infrared Light Absorbers Using Si-Deposited Gold Nanowire Grating Structures
    K. Takegami, N. Arai, A. Uesugi, K. Sugano, Y. Isono
    32nd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2019, English

  • Effect of The Numbers of Beams and Corners on Resonant Frequency Response of Silicon Microresonator to Near-Infrared-Light Irradiation for Optical Sensing
    K. Takegami, N. Arai, A. Uesugi, K. Sugano, Y. Isono
    32nd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2019, English

  • Effect of Gold Nanoparticle Diameter on Raman Intensity of DNA Oligomers toward Single Nucleobase Detection
    K. Murotani, K. Maruoka, A. Uesugi, K. Sugano, Y. Isono
    32nd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2019, English

  • Microresonator-Based Photodetector of Near-Infrared Light Using Electrostatic Transducers
    K. Nakafuji, A. Uesugi, K. Sugano, Y. Isono
    32nd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2019, English

  • シリコンマイクロ振動子光センサにおける共振周波数特性の形状依存性
    竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正
    第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  • 静電型マイクロ振動子トランスデューサを用いたシリコン近赤外光強度センサ
    中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正
    第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  • 金ナノ粒子二量体表面増強ラマン分光によるDNA オリゴマーの1 塩基検出
    金谷 恭臣, 丸岡 克成, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正
    第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  • 金ナノグレーティング構造の光吸収ピーク波長制御による高感度レーザ波長計測マイクロ振動子デバイス
    竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正
    第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  • コアシェルSiC ナノワイヤの電気伝導性に及ぼすシェル表面電位
    井ノ山 滉大, 仲田 進哉, 上杉 晃生, 菅野 公二, 磯野 吉正
    第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  • 架橋成長Si ナノワイヤの熱電特性評価に関する研究
    北川 諒, 岸本 卓巳, 小國 凌, 上杉 晃生, 菅野 公二, 磯野 吉正
    第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  • 結晶シリコン薄膜の高温パンチクリープ成形による極小3軸力覚センサの開発
    丹村 響介, 大坂 憲司, 豊田 崇夫, 菅野 公二, 磯野 吉正
    第3回マルチスケール材料力学シンポジウム, May 2019, Japanese

  • Surface-Enhanced Raman Spectroscopy of DNA Bases Using Gold Nanoparticle Dimer Array
    Katsunari Maruoka, Kohei Ikegami, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA
    31st International Microprocesses and Nanotechnology Conference (MNC2018), Nov. 2018, English, International conference
    Poster presentation

  • Development of 3D Formed Tactile Sensor by High Temperature Punch Creep Forming Technique
    Kyosuke Nimura, Kenji Osaka, Takao Toyoda, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA
    31st International Microprocesses and Nanotechnology Conference (MNC2018), Nov. 2018, English, International conference
    Oral presentation

  • VLS成長SiNW単体に対する熱電変換特性評価
    北川 諒, 井本 大暉, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA
    第35回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2018, Japanese, Domestic conference
    Poster presentation

  • Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性
    新居 直之, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA
    第35回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2018, Japanese, Domestic conference
    Poster presentation

  • 単結晶シリコン薄膜の高温パンチクリープ成形による極小3軸力覚センサの開発
    丹村 響介, 大坂 憲司, 豊田 崇夫, SUGANO KOJI, ISONO YOSHITADA
    日本材料学会マルチスケール材料力学シンポジウム, May 2018, Japanese, Domestic conference
    Oral presentation

  • Surface-Enhanced Raman Spectroscopy of Adenine Molecule Using Single Dimer of Gold Nanoparticles
    Katsunari Maruoka, Kohei Ikegami, SUGANO KOJI, ISONO YOSHITADA
    30th International Microprocesses and Nanotechnology Conference (MNC2017), Nov. 2017, English, International conference
    Poster presentation

  • Laser Wavelength Measurement Using Gold Nanoparticle Aggregate Integrated Microresonator
    SUGANO KOJI, Shuji Joya, Naoyuki Arai, Yuki Tanaka, Etsuo Maeda, Reo Kometani, ISONO YOSHITADA
    30th International Microprocesses and Nanotechnology Conference (MNC2017), Nov. 2017, English, International conference
    Oral presentation

  • 単一金ナノ粒子二量体を用いた表面増強ラマン分光によるDNAオリゴマー1分子検出
    丸岡 克成, SUGANO KOJI, ISONO YOSHITADA
    第34回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2017, Japanese, Domestic conference
    Oral presentation

  • 高温クリープ立体成形技術による極小MEMS触覚センサの開発研究
    大坂 憲司, 中田 悟史, 山本 賢祐, SUGANO KOJI, ISONO YOSHITADA
    第34回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2017, Japanese, Domestic conference
    Poster presentation

  • Si薄膜被覆金ナノワイヤグレーティング構造の近赤外域光学特性評価
    新居 直之, SUGANO KOJI, ISONO YOSHITADA
    第34回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2017, Japanese, Domestic conference
    Poster presentation

  • Evaluation of mechano-electric properties for VLS-grown core/shell silicon carbide nanowires
    Shinya Nakata, Daiki Imoto, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA
    14th International Conference on Fracture, Jun. 2017, English, International conference
    Oral presentation

  • VLS成長Core/Shell-SiCナノワイヤのピエゾ抵抗効果に及ぼすSiO2被覆の影響
    仲田 進哉, SUGANO KOJI, ISONO YOSHITADA
    日本材料学会マルチスケール材料力学シンポジウム, May 2017, Japanese, Domestic conference
    Poster presentation

  • 単一金ナノ粒子二量体を用いたアデニンの表面増強ラマン分光検出
    丸岡 克成, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA
    フィジカルセンサ/マイクロマシン・センサシステム合同研究会, Dec. 2016, Japanese, Domestic conference
    Oral presentation

  • Si薄膜被覆金ナノワイヤアレイ構造の光学特性評価
    新居 直之, 城谷 修司, SUGANO KOJI, ISONO YOSHITADA
    フィジカルセンサ/マイクロマシン・センサシステム合同研究会, Dec. 2016, Japanese, ，城谷修司，菅野公二，磯野吉正, Domestic conference
    Oral presentation

  • Piezoresistance effect of VLS-synthesized core/shell-SiC nanowires
    Shinya Nakata, Daiki Imoto, SUGANO KOJI, Francesca Rossi, Alois Lugstein, ISONO YOSHITADA
    International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference
    Poster presentation

  • Near Infrared Optical Absorption Property of Gold Nanoparticle Aggregates for Laser Wavelength Measurement
    Shuji Joya, Naoyuki Arai, Yuki Tanaka, SUGANO KOJI, ISONO YOSHITADA
    International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference
    Poster presentation

  • High temperature creep forming technique of single crystal silicon thin film for 3D MEMS tactile sensors
    Kensuke Yamamoto, Satoshi Nakata, SUGANO KOJI, ISONO YOSHITADA
    International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference
    Poster presentation

  • Highly-Sensitive and Rapid Detection of DNA bases using Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimer Array
    Kohei Ikegami, SUGANO KOJI, ISONO YOSHITADA
    International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference
    Poster presentation

  • Single-Molecule Surface-Enhanced Raman Spectroscopy of 4,4'-bipyridine on Fabricated Substrates with Directionally Arrayed Gold Nanoparticle Dimers
    SUGANO KOJI, Kiyohito Aiba, Kohei Ikegami, ISONO YOSHITADA
    29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference
    Oral presentation

  • Optimization of Gold Nanorod Array Structure on Microresonator for Resonant-Based Laser Wavelength Measurement Using Photothermal Conversion
    SUGANO KOJI, Yuki Tanaka, Etsuo Maeda, Reo Kometani, ISONO YOSHITADA
    29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference
    Oral presentation

  • Mechanical Characterization of VLS-Grown Core-Shell SiC Nanowires for Nanomechanical Sensors
    Shinya Nakata, SUGANO KOJI, Francesca Rossi, Giancarlo Salyiati, Alois Lugstein, Yoshitada Isono
    29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference
    Oral presentation

  • Characterization Method of Relative Raman Enhancement for Surface Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimer Array
    Kohei Ikegami, SUGANO KOJI, ISONO YOSHITADA
    29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference
    Oral presentation

  • 金ナノ粒子二量体配列を用いたDNA塩基の高感度・高速表面増強ラマン分光
    池上 晃平, SUGANO KOJI, ISONO YOSHITADA
    第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference
    Oral presentation

  • 金ナノロッド構造を用いた光熱変換によるレーザ光波長計測マイクロ振動子デバイス
    SUGANO KOJI, 田中 祐樹, 前田 悦男, 米谷 玲皇, ISONO YOSHITADA
    第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference
    Oral presentation

  • 逆解析手法による単結晶Si薄膜の高温クリープ特性解明と触覚センサ開発への応用
    山本 賢祐, 中田 悟史, SUGANO KOJI, ISONO YOSHITADA
    第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference
    Oral presentation

  • 逆解析による単結晶Si薄膜の三次元高温クリープ成形加工技術の確立
    山本 賢祐, 中田 悟史, SUGANO KOJI, ISONO YOSHITADA
    日本機械学会 M&M2016材料力学カンファレンス, Oct. 2016, Japanese, Domestic conference
    Oral presentation

  • VLSボトムアップ成長Core/Shell-SiCナノワイヤのMEMS援用ピエゾ抵抗特性評価
    仲田 進哉, 井本 大暉, Feancesca Rossi, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA
    第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference
    Oral presentation

  • 逆解析手法による単結晶シリコン薄膜の高温クリープ三次元成形加工技術の確立
    山本 賢祐, 中田 悟史, SUGANO KOJI, ISONO YOSHITADA
    マルチスケール材料力学シンポジウム, May 2016, Japanese, Domestic conference
    Poster presentation

  • 3C-SiCNWのMEMS援用Elastic Strain Engineering研究 －ピエゾ抵抗効果の実験解明
    仲田 進哉, 井本 大暉, SUGANO KOJI, ISONO YOSHITADA
    マルチスケール材料力学シンポジウム, May 2016, Japanese, Domestic conference
    Oral presentation

  • Fabrication and Characterization of CNT Forest Integrated Micromechanical Resonator for Rarefied Gas Sensor
    SUGANO KOJI, Ryu Matsumoto, Ryota Tsutsui, Hiroyuki Kishihara, Naoki Matsuzuka, ISONO YOSHITADA
    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Apr. 2016, English, International conference
    Oral presentation

  • Crystal Orientation Dependence of Piezoresistivity for VLS-Grown Single Crystal Silicon Nanowires
    Shinya Nakata, Yuma Kitada, Stefan Wagesreither, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA
    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Apr. 2016, English, International conference
    Oral presentation

  • Gold Nanoparticle Synthesis Using High-Speed Pulsed Mixing Microfluidic Device
    SUGANO KOJI, Ayumi Maedomari, Yuki Tanaka, ISONO YOSHITADA
    28th International Microprocesses and Nanotechnology Conference (MNC2015), Nov. 2015, English, International conference
    Poster presentation

  • 金ナノ粒子二量体配列を用いた表面増強ラマン分光におけるラマン増強度評価法
    池上 晃平, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA
    第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference
    Oral presentation

  • 金ナノ粒子二量体配列を用いたDNA塩基の表面増強ラマン分光
    饗庭 清仁, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA
    第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference
    Poster presentation

  • 金ナノ粒子二量体配列における表面増強ラマン分光1分子検出特性
    饗庭 清仁, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA
    第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference
    Oral presentation

  • 金ナノ粒子直線状配列を用いた表面増強ラマン分光の特性評価
    池上 晃平, 竹下 俊光, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA
    第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference
    Oral presentation

  • VLS成長シリコンナノワイヤの歪み誘起電気伝導特性の結晶方位依存性
    仲田 進哉, 北田 勇馬, Stefan Wagesreither, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA
    第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference
    Oral presentation

  • Evaluation of Piezoresistivity for VLS-Grown Silicon NanowiresUnder Enormous Elastic Strain
    Sinya Nakata, Yuma Kitada, Stefan Wagesreither, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA
    International Conference on Advanced Technology in Experimental Mechanics 2015 (ATEM'15), Oct. 2015, English, International conference
    Oral presentation

  • 直線状金ナノ粒子配列の表面増強ラマン分光特性
    竹下 俊光, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA
    平成27年度電気学会マイクロマシン・センサシステム部門総合研究会, Jul. 2015, Japanese, Domestic conference
    Oral presentation

  • Surface-Enhanced Raman Spectroscopy Analysis Using Micro/Nanofluidic Devices with Gold Nanoparticle-Embedded Nanochannels
    SUGANO KOJI, Keisuke Suekuni, Toshimitsu Takeshita, ISONO YOSHITADA
    27th International Microprocesses and Nanotechnology Conference (MNC2014), Nov. 2014, English, Fukuoka, Japan, International conference
    Oral presentation

  • 半導体ナノワイヤ物性評価のためのMEMS-Based Strain Engineering
    北田 勇真, 川瀬 真也, SUGANO KOJI, Stefan Wagesreither, Alois Lugstein, ISONO YOSHITADA
    第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014, Japanese, Domestic conference
    Poster presentation

  • 金粒子配列ナノ流路を用いた表面増強ラマン分光分析デバイス
    竹下 俊光, 末國 啓輔, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA
    第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014, Japanese, Domestic conference
    Oral presentation

  • MEMS デバイスによる多層カーボンナノチューブの層間すべり変形機構の解明
    竹下 俊光, 木村 大気, SUGANO KOJI, ISONO YOSHITADA
    日本機械学会2014年度年次大会, Sep. 2014, Japanese, Domestic conference
    Oral presentation

  • 表面増強ラマン分光法のための金粒子配列ナノチャンネルの作製
    末國 啓輔, 竹下 俊光, SUGANO KOJI, ISONO YOSHITADA
    第30回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2013, Japanese, 仙台, Domestic conference
    Poster presentation

  • MEMS デバイスによる多層カーボンナノチューブの層間すべり変形機構の解明
    山内 健司, 大森 英明, ISONO YOSHITADA, YASHIRO KISARAGI
    日本機械学会 マイクロ・ナノ工学部門主催第5回マイクロ・ナノ工学シンポジウム, Nov. 2013, Japanese, 仙台, Domestic conference
    Oral presentation

  • Development of MWCNT Embedded Micromechanical Resonator Working as rarefied Gas Sensor
    松本 竜, 岸原 宏幸, SUGANO KOJI, 花崎 逸雄, 山下 一郎, 浦岡 行治, ISONO YOSHITADA
    応用物理学会 関西支部第2回講演会, Oct. 2013, Japanese, 奈良, Domestic conference
    Poster presentation

  • MWCNT-Embedded MEMS Resonator Fabricated by Bio-MEMS Compatible Process for Rarefied Gas Sensing
    SUGANO KOJI, Ryu Matsumoto, Yukiharu Uraoka, Ichiro Yamashita, Yoshitada Isono
    2013 JSAP-MRS Joint Symposia, Sep. 2013, English, Kyoto, International conference
    Oral presentation

  • Experimental Nano Mechanics for Silicon & Carbon Nanomaterials Using MEMS Technology
    Yoshitada Isono
    25th International Microprocesses and Nanotechnology Conference, Nov. 2012, English
    [Invited]
    Invited oral presentation

  • Wear Durability of Au Coated MWCNT Contact Electrodes for Micro Switch
    Keisuke Suekuni, Naganori Khoda, Itsuo Hanasaki, Yoshitada Isono, Hiroshi Kinoshita
    Proceedings of the 30th Sensor Symposium on Sensors, Micromachines and Applied Systems, 2012 Annual Conference of Sensors and Micromachines, Oct. 2012, Japanese, 社団法人 電気学会, 北九州市, Domestic conference
    Oral presentation

  • Mechanical Characterization of Nano-thick Au Thin Films at Elevated Temperatures
    Shinnya Kawase, Hyunjin Oh, Itsuo Hanasaki, Yoshitada Isono
    Proceedings of the 30th Sensor Symposium on Sensors, Micromachines and Applied Systems,, Oct. 2012, Japanese, 社団法人 電気学会, 北九州市, Domestic conference
    Oral presentation

  • 高分解能MEMS容量センサ搭載ナノ材料特性評価システムの開発と多層CNT破壊メカニズムの解明
    大森 英明, 貞方 光尊, 坪倉 一孝, 花崎 逸雄, 磯野 吉正
    第28回センサ・マイクロマシンと応用システムシンポジウム, Sep. 2011, Japanese, 東京, Domestic conference
    Oral presentation

  • Evaluation of mechanical properties of sub 100 nm-thick Au thin films for nano transfer printing
    Hyun-Jin Oh, Itsuo Hanasaki, Yoshitada Isono
    International Conference on Advanced Technology in Experimental Mechanics 2011 (ATEM'11), Sep. 2011, English, Kobe, International conference
    Oral presentation

  • CNT実装MEMS共振型ガスセンサの開発
    岸原 宏幸, 原 拓也, 鄭 彬, 浦岡 行治, 山下 一郎, 松塚 直樹, 花崎 逸雄, 磯野 吉正
    第28回センサ・マイクロマシンと応用システムシンポジウム, Sep. 2011, Japanese, 東京, Domestic conference
    Poster presentation

  • Carbon Nanotubes-embedded MEMS Resonator Device for Hydrogen Gas Sensing System
    Takuya Hara, Hiroyuki Kishihara, Itsuo Hanasaki, Bin Zheng, Ichiro Yamashita, Yukiharu Uraoka, Naoki Matsuzuka, Yoshitada Isono
    International Conference on Advanced Technology in Experimental Mechanics 2011 (ATEM'11), Sep. 2011, English, Kobe, International conference
    Oral presentation

  • 共振周波数調節機能を備えたダイナミックモードAFMカンチレバーの開発
    橋本 佳彦, 花崎 逸雄, 磯野 吉正
    第27回 センサ・マイクロマシンと応用システム シンポジウム, Oct. 2010, Japanese, 島根, Domestic conference
    Oral presentation

  • Mechanical characterization of sub-100nm-thick Au film by tensile testing device based on MEMS technology
    Hyun-Jin Oh, Itsuo Hanasaki, Yoshitada Isono
    第27回 センサ・マイクロマシンと応用システム シンポジウム, Oct. 2010, Japanese, 島根, Domestic conference
    Oral presentation

  • Experimental Nanomechanics for FIB-CVD Carbon Nanowires Using MEMS Devices
    Yoshitada Isono
    The 5th International Symposium on Nanoscale Mechatronics & Manufacturing(ISNMM), Aug. 2010, English, Seoul, International conference
    Invited oral presentation

  • 多段階交互塗布による基板上へのフェリチン分子吸着密度制御と高密度化
    花崎 逸雄, 田中 利宏, 磯野 吉正, 鄭 彬, 浦岡 行治, 山下 一郎
    第57回応用物理学関係連合講演会, Mar. 2010, Japanese, 神奈川県平塚市, Domestic conference
    Oral presentation

  • MEMS機能デバイスによるナノ厚金薄膜の力学特性評価に関する研究
    呉 衒珍, 磯野 吉正
    日本機械学会関西支部第85期定時総会講演会, Mar. 2010, Japanese, Domestic conference
    Oral presentation

  • 変断面両端固定梁を有する静電駆動MEMS共振器の簡易設計手法の構築
    Yoshitada Isono, 松塚 直樹, 原 拓也
    日本機械学会2009年度年次大会, Sep. 2009, Japanese, Domestic conference
    Oral presentation

  • タンパク質分子のリフトオフプロセスを用いたCNT形成技術
    花崎 逸雄, 呉 衒珍, 鄭 彬, 浦岡 行治, 山下 一郎, 磯野 吉正
    2009年度精密工学会秋季大会, Sep. 2009, Japanese, 神戸, Domestic conference
    Oral presentation

  • Scanning Probe Parallel Nanolithography for NEMS Fabrication Using MEMS Cantileber Array
    ISONO Yoshitada
    Korea-Japan-China MEMS Standardization Workshop, Jun. 2009, English, IEC Korian National Committee, Jeju, Korea, International conference
    Oral presentation

  • MEMS技術を用いた実験ナノメカニクスの展開
    磯野 吉正
    第129回日本材料学会破壊力学部門委員会講演会, May 2009, Japanese, 日本材料学会, 京都, Domestic conference
    Invited oral presentation

  • n型バルクシリコンにおけるピエゾ抵抗係数のキャリア濃度・温度依存シミュレーション
    中村 康一, 磯野 吉正, 鳥山 寿之, 杉山 進
    第56回応用物理学関係連合講演会, Mar. 2009, Japanese, つくば, Domestic conference
    Oral presentation

  • Process Condition od Scanning Probe Nanolithography Using Positive EB Resist
    ANGGRAINI Lydia, MATSUDUKA Naoki, ISONO Yoshitada
    The 25th Sensor Symposium on Sensors, Micromachines and Applied Systems, Oct. 2008, Japanese, IEEJ, Okinawa, Domestic conference
    Oral presentation

  • New technique of Scanning Probe Parallel Nanolithography Using Individually Driving Multi-Probe
    ISONO Yoshitada, WATANABE Naoki, SASAKI Tohru, NAGAMURA Toshihiko, OCHI Toshihiko
    2nd IEEE Nanotechnology Materials and Devices Conference, Oct. 2008, English, IEEE, Kyoto, International conference
    Oral presentation

  • MEMS設計工学の体系化とその必要性
    磯野 吉正
    日本機械学会2007年度年次大会, Oct. 2008, Japanese, JSME, 吹田市, Domestic conference
    [Invited]
    Invited oral presentation

  • First-Principles Simulation on Orientation Dependence of Piezoresistance Properties in Silicon Nanowires
    NAKAMURA Koichi, ISONO Yoshitada, TORIYAMA Toshiyuki
    21th International Microprocesses and Nanotechnology Conference, Oct. 2008, English, The Japan Society of Applied Physics, Fukuoka, International conference
    Oral presentation

  • Electronic States in Silicon Nanowires and Prospects of Their Piezoresistivity
    NAKAMURA Koichi, ISONO Yoshitada, TORIYAMA Toshiyuki, SUGIYAMA Susumu
    The 25th Sensor Symposium on Sensors, Micromachines and Applied Systems, Oct. 2008, Japanese, IEEJ, Okinawa, Domestic conference
    Oral presentation

  • 応力印加によるバルクシリコンのバンドひずみとピエゾ物性への効果
    中村 康一, 磯野 吉正, 鳥山寿之
    日本機械学会材料力学カンファレンス, Sep. 2008, Japanese, JSME, 草津, Domestic conference
    Oral presentation

  • MEMS技術によるカーボンナノワイヤの力学特性評価とピエゾ抵抗効果の解明
    木内 万里夫, 松井 真二, 磯野 吉正
    日本機械学会材料力学カンファレンス, Sep. 2008, Japanese, JSME, 草津, Domestic conference
    Oral presentation

  • 単結晶シリコン材料のピエゾ抵抗物性シミュレーション
    中村 康一, 磯野 吉正, 鳥山寿之
    日本機械学会2008年次大会, Aug. 2008, Japanese, JSME, 横浜, Domestic conference
    Oral presentation

  • MHz帯域RF-MEMS共振器の設計開発
    松塚 直樹, 磯野 吉正
    日本機械学会2008年次大会, Aug. 2008, Japanese, JSME, 横浜, Domestic conference
    Oral presentation

  • 第一原理計算による単結晶シリコンナノワイヤーのピエゾ抵抗係数予測
    中村 康一, 磯野 吉正, 鳥山 寿之
    第55回応用物理学関係連合講演会, Mar. 2008, Japanese, 千葉, Domestic conference
    Oral presentation

  • 光リソグラフィ技術の限界と自己組織化によるナノパターニング技術
    磯野 吉正
    電子ジャーナル講演会[サブ45nm世代の超高精度微細加工技術],, Nov. 2007, Japanese, (株)電子ジャーナル, 仙台市, Domestic conference
    [Invited]
    Invited oral presentation

  • MEMSプローブによるナノパターニング技術
    磯野 吉正
    第4回オープンワークショップ「バイオとナノテクノロジーの融合研究」, Nov. 2007, Japanese, 文部科学省リーディングプロジェクト(LP)「ナノテクノロジーを利用した新しい原理のデバイス開発」, 東京都江東区, Domestic conference
    [Invited]
    Invited oral presentation

  • First-Principle Study on Piezoresistance Effect in Silicon Nanowires
    NAKAMURA Koichi, ISONO Yoshitada, TORIYAMA Toshiyuki
    20th International Microprocesses and Nanotechnology Conference (MNC 2007), Nov. 2007, English, The Japan Society of Applied Physics, Kyoto, International conference
    Oral presentation

  • シリコンナノワイヤのピエゾ抵抗効果に関する第一原理計算
    中村 康一, 磯野 吉正, 鳥山 寿之
    M&M2007材料力学カンファレンス, Oct. 2007, Japanese, JSME, 東京都目黒区, Domestic conference
    Oral presentation

  • Development of Scanning Probe Parallel Nanowriting System with Individually Driving Multi-Probe Cantilever Array
    ISONO Yoshitada, WATANABE Naoki, URUSHIHARA Naoki, KAKINAGA Takamitsu, NAGANUMA Toshihiko, SASAKI Toru
    The 24th Sensor Symposium on Sensors, Micromachines and Applied Systems, Oct. 2007, Japanese, IEEJ, Funabashi, Domestic conference
    Oral presentation

  • 非対称四点曲げ試験法によるマイクロSi構造体のせん断強度評価
    鈴木 竜生, 小河 真仁, 磯野 吉正
    日本機械学会2007年度年次大会, Sep. 2007, Japanese, JSME, 吹田市, Domestic conference
    [Invited]
    Invited oral presentation

  • MEMS技術に基づく実験ナノメカニクス
    磯野 吉正
    日本機械学会2007年度年次大会, Sep. 2007, Japanese, JSME, 吹田市, Domestic conference
    [Invited]
    Invited oral presentation

  • Ti-Ni SMA Film-Actuated 2-D Multi-Probe Array for Scanning Probe Nano-lithography on a Wide Area
    OKAMURA Yuta, NAMAZU Takahiro, KAMOYAMA Daisuke, URUSHIHARA Naoki, SASAKI Toru, NAGAMURA Toshihiko, ISONO Yoshitada
    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 2007, English, IEEE, Lyon, France, International conference
    Oral presentation

  • NEMS
    ISONO Yoshitada
    Workshop on MEMS Standardization, Jun. 2007, English, The International Electron Commission, Beijing, China, International conference
    [Invited]
    Invited oral presentation

  • Evaluation of Piesoresistive Effects for Carbon Nanowire Using MEMS Actuators
    KIUCHI Mario, ISONO Yoshitada, MATSUI Shinji, NAKAMATSU Kenichiro
    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 2007, English, IEEE, Lyon, France, International conference
    Oral presentation

  • Development of Scanning Probe Parallel Nanowriting System with Electron Beam Resist
    MATSUZUKA Naoki, TANAKA Bungo, NAGAMURA Toshihiko, SASAKI Tohru, NAMAZU Takahiro, ISONO Yoshitada
    The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Jun. 2007, English, IEEE, Lyon, France, International conference
    Oral presentation

  • MEMS駆動マルチプローブアレイによるパラレルナノライティング技術の開発
    磯野 吉正
    日本材料学会マイクロマテリアル部門委員会, Apr. 2007, Japanese, 日本材料学会マイクロマテリアル部門委員会, 草津市, Domestic conference
    [Invited]
    Invited oral presentation

  • Thermal Actuated Multi-Probes Cantilever Array for Scanning Probe Parallel Nano Writing System
    ISONO YOSHITADA
    Technical Digest of The 20th IEEE International Conference on MEMS 2007, 2007, English, International conference
    Oral presentation

  • Novel Shear Strength Evaluation of MEMS Materials Using Asymmetrical Four-Point Bending Technique
    OGAWA Masato, ISONO Yoshitada
    The 20th IEEE International Conference on MEMS, Jan. 2007, English, IEEE, Kobe, International conference
    Oral presentation

  • hermal Actuated Multi-Probes Cantilever Array for Scanning Probe Parallel Nano Writing System
    WATANABE Naoki, ISONO Yoshitada, KAKINAGA Takamitsu, NAGAMURA Toshihiko, SASAKI Tohru
    The 20th IEEE International Conference on MEMS, Jan. 2007, English, IEEE, Kobe, International conference
    Oral presentation

  • 非対称四点曲げ試験法に基づいたマイクロシリコン構造体のせん断強度評価
    小河 真仁, 磯野 吉正
    第50回日本学術会議材料工学連合講演会, Dec. 2006, Japanese, 日本学術会議, 京都市, Domestic conference
    Oral presentation

  • マイクロシリコン構造体の完全両振り曲げ疲労試験の確立
    坂本 雄一, 磯野 吉正
    第50回日本学術会議材料工学連合講演会, Dec. 2006, Japanese, 日本学術会議, 京都市, Domestic conference
    Oral presentation

  • MEMS技術で作製した静電駆動型ナノ引張試験デバイスによるカーボンナノワイヤの機械・電気特性評価
    木内 万里夫, 磯野 吉正, 松井 真二, 中松 健一郎
    第50回日本学術会議材料工学連合講演会, Dec. 2006, Japanese, 日本学術会議, 京都市, Domestic conference
    Oral presentation

  • マイクロ・ナノマシン設計・開発のための実験力学とナノ微細加工技術
    磯野 吉正
    平成18年度マイクロ・ナノ融合加工技術研究会第3回例会, Nov. 2006, Japanese, 京都府中小企業技術センター, 京都市, Domestic conference
    [Invited]
    Invited oral presentation

  • Mechanical and Electrical Characteristics of FIB Deposited Carbon Nanowire Using Electrostatic Actuated NAno Tensile Testing Device
    KIUCHI Mario, ISONO Yoshitada, MATSUI Shinji, NAKAMATSU Kenichiro
    The 23rd Sensor Symposium on Sensors, Micromachines and Applied Systems, Oct. 2006, Japanese, IEEJ, Takamatsu, Domestic conference
    Oral presentation

  • Establishment of Probe Nano Writing Technique Using EB Resist And Application to Nano Device
    ONODA Masahiro, TANAKA Bungo, MATSUZUKA Naoki, ISONO Yoshitada
    The 23rd Sensor Symposium on Sensors, Micromachines and Applied Systems, Oct. 2006, Japanese, IEEJ, Takamatsu, Domestic conference
    Oral presentation

  • Development of Individually Driving Multi-probes Array for Parallel Nano Writing System
    WATANABE Naoki, ISONO Yoshitada, KAKINAGA Takamitsu, NAGAMURA Toshihiko, SASAKI Tohru
    The 23rd Sensor Symposium on Sensors, Micromachines and Applied Systems, Oct. 2006, Japanese, IEEJ, Takamatsu, Domestic conference
    Oral presentation

  • New Experimental Techniques of Nanofabrication and Nanomechanics based on MEMS
    ISONO Yoshitada
    The Third International Conference on Multiscale Materials Modeling, Sep. 2006, English, Fraunhofer Institute and University of Freiburg, Freiburg, Germany, International conference
    [Invited]
    Invited oral presentation

  • New Approach to Experimental Nanomechanics Using MEMS Technology
    ISONO Yoshitada
    International Conference on SOLID STATE DEVICES AND MATERIALS, Sep. 2006, English, The Japan Society of Applied Physics, Yokohama, Japan, International conference
    [Invited]
    Invited oral presentation

  • Silicon Anisotropic Wet Etching simulation Using Molecular Dynamics
    URUSHIHARA Naoki, KAKINAGA Takamitsu, TABATA Osamu, ISONO Yoshitada
    The Conference on Computational Engineering and Science, Jun. 2006, Japanese, JSCES, 吹田市, Domestic conference
    Oral presentation

  • Development of Electrostatic Actuated Nano Tensile Testing Device for Mechanical and Electrical Characteristics of FIB Deposited Carbon Nanowire
    KIUCHI Mario, MATSUI Shinji, ISONO Yoshitada
    MRS Spring Meeting, Apr. 2006, English, Materials Research Society, San Francisco, USA, International conference
    Oral presentation

  • MEMS技術を利用した実験力学の新展開
    磯野 吉正
    第148回X線材料強度部門委員会研究討論会資料, Feb. 2006, Japanese, 日本材料学会X線材料強度部門委員会, 京都市, Domestic conference
    [Invited]
    Invited oral presentation

  • ナノデバイス創製を支えるナノ加工とナノ実験力学の新展開
    磯野 吉正
    日立ナノテクフォーラム, Dec. 2005, Japanese, 日立, 豊中市, Domestic conference
    [Invited]
    Invited oral presentation

  • ナノデバイス創製を支えるナノ実験力学の展開
    磯野 吉正
    ナノテクシンポジウム~NEMS創出を目指して~, Jul. 2005, Japanese, 社団法人電気学会センサ・マイクロマシンE部門, 草津市, Domestic conference
    [Invited]
    Invited oral presentation

  • Scanning Probe Parallel Nanolithography Using Multi-Probes Cantilever Array for Silicon Nanodevices
    ISONO YOSHITADA
    Proc. of The 13th International Conference on Solid-State Sensors,Actuators and Microsystems (Transducers’05), 2005, English, International conference
    Oral presentation

  • New Fatigue Damage Evaluation of MEMS Materials under Tension-Compression Cyclic Loading
    ISONO YOSHITADA
    Proc. of The 18th IEEE International Conference on MEMS 2005, 2005, English, International conference
    Poster presentation

  • Mechanical Characteristics of FIB Deposited Carbon Nanowire by Electrostatic Actuated Nano Tensile Testing Devices (EANAT)
    ISONO YOSHITADA
    Proc. of The 18th IEEE International Conference on MEMS 2005, 2005, English, International conference
    Oral presentation

  • Mechanical and Electrical Properties Evaluation of Carbon Nanowire Using Electrostatic Actuated Nano Tensile Testing Devices (EANAT)
    ISONO YOSHITADA
    Proc. of The 5th IEEE Conference on Nanotechnology (IEEE-NANO), 2005, English, International conference
    Oral presentation

  • Effect of Gas Flow Ratio in PE-CVD on Elastic Properties of Sub-Micron Thick Silicon Nitride Films for MEMS
    Proc. of The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’05), 2005

  • MEMS構造設計のためのマイクロ・ナノ材料評価技術
    磯野 吉正
    第9回関西大学先端科学技術シンポジウム, Jan. 2005, Japanese, 関西大学, 吹田市, Domestic conference
    [Invited]
    Invited oral presentation

  • Micro/Nano Materials Testing for Reliable Design of MEMS/NEMS
    ISONO Yoshitada
    The 2004 IEEE International Symposium on Micro-Nano Mechatronics and Human Science, Nov. 2004, English, IEEE, Nagoya, Japan, International conference
    [Invited]
    Invited oral presentation

  • Mechanical Characterization of Micro/Nano Materials for Design of MEMS
    ISONO Yoshitada
    The 1st International Symposium for Nanoscale Mechatronics & Manufacturing, Feb. 2004, English, Center for Nanoscale Mechatronics & Manufacturing, Ministry of Science & Technology in Korea, Seoul, Korea, International conference
    [Invited]
    Invited oral presentation

  • Tensile And Creep Characteristics of UV-LIGA Nickel Structures for Design of Micro Connector
    ISONO YOSHITADA
    Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2004, 2004, English, International conference
    Oral presentation

  • Mechanical Characterization of Micro/Nano Materials for Design of MEMS
    ISONO YOSHITADA
    Proc. of The 1st International Symposium for Nanoscale Mechatronics & Manufacturing, 2004, English, International conference
    [Invited]
    Invited oral presentation

  • Improved Potential Function for Molecular Dynamics Simulation of Si Wet Etching
    ISONO YOSHITADA
    Proc. of Workshop on Physical Chemistry of Wet Etching of Silicon (PCWES2004), 2004, English, International conference
    Oral presentation

  • High-Cycle Fatigue Damage Evaluation for Micro-Nanoscale Single Crystal Silicon under Bending and Tensile Stressing
    ISONO YOSHITADA
    Proc. of The 17th IEEE International Conference on MEMS 2004, 2004, English, International conference
    Poster presentation

  • Development of Full-Reversed Bending Fatigue Tester Based on AFM Technique for Cyclic Damage Evaluation of MEMS
    ISONO YOSHITADA
    Final Program and Abstract on Asian Pacific Conference for Fracture and Strength ’04, 2004, English, International conference
    Oral presentation

  • Scanning Probe Nanolithography Using Self-Assembled Monolayer for Fabrication of Single Electron Transistors
    ISONO YOSHITADA
    Proc. of The 12th International Conference on Solid-State Sensors and Actuators, 2003, English, International conference
    Oral presentation

  • High-Cycle Fatigue Test of Nanoscale Si and SiO2 Wires Based on AFM Technique
    ISONO YOSHITADA
    Proc. of The 16th IEEE International Conference on MEMS 2003, 2003, English, International conference
    Poster presentation

  • Elevated Temperature Tensile/Creep Test of UV-LIGA Nickel Thin Film for Design of High-Density Micro Connector
    ISONO YOSHITADA
    Proc. of The 12th International Conference on Solid-State Sensors and Actuators, 2003, English, International conference
    Poster presentation

  • Chemo-Mechanical Actuator Using Self-Oscillating Gel for Artificial Cilia
    ISONO YOSHITADA
    Proc. of The 16th IEEE International Conference on MEMS 2003, 2003, English, International conference
    Oral presentation

  • AFM Tensile Test of Sub-Micron Thick DLC Film for Surface Modification in MEMS
    ISONO YOSHITADA
    Proc. of International Conference on Advanced Technology in Experimental Mechanics 2003, 2003, English, International conference
    Oral presentation

  • Simulation of Anisotropic Chemical Etching of Single Crystalline Silicon using Cellular-Automata
    ISONO YOSHITADA
    Workshop on Physical Chemistry of Wet Etching of Silicon (PCWES2002), 2002, English, International conference
    Oral presentation

  • Quasi-static/Cyclic Loading Tests of Nanometric SiO2 Wires Using AFM technique for NEMS Designs
    ISONO YOSHITADA
    Proc. of The 2002 2nd IEEE Conference on Nanotechnology Nano2002, 2002, English, International conference
    Oral presentation

  • Mechanical Characterization of Sub-micrometer Thick DLC Films by AFM Tensile Testing for Surface Modification in MEMS
    ISONO YOSHITADA
    Proc. of The 15th IEEE International Conference on MEMS 2002, 2002, English, International conference
    Poster presentation

  • MEMSのためのマイクロ・ナノスケール材料強度評価
    磯野 吉正
    2001年度年次大会先端技術フォーラム, Sep. 2001, Japanese, JSME, 福井市, Domestic conference
    [Invited]
    Invited oral presentation

  • Size Effect on Mechanical Properties of Nano-scale Single Crystal Silicon at Elevated Temperatures
    ISONO YOSHITADA
    Proc. of The International Symposia on Material Science for the 21 Century, 2001, English, International conference
    Poster presentation

  • Plastic Behavior of Nano-Scale Silicon Structure at Intermediate Temperatures
    ISONO YOSHITADA
    Proc. of The 10th International Conference on Fracture, 2001, English, International conference
    Oral presentation

  • Fabrication of a Micro Needle for a Trace Blood Test
    ISONO YOSHITADA
    Proc. of The 11th International Conference on Solid-State Sensors and Actuators, 2001, English, International conference
    Oral presentation

  • Evaluation of Mechanical Properties of Si(001) and SiO2 Nanobeams Using an Atomic Force Microscope
    ISONO YOSHITADA
    Abstract of Tokyo-2001 Conference on Scanning Probe Microscopy, 2001, English, International conference
    Oral presentation

  • AFM Bending Testing of Nanometric Single Crystal Silicon Wire at Intermediate Temperatures for MEMS
    ISONO YOSHITADA
    Proc. of The 14th IEEE International Conference on MEMS 2001, 2001, English, International conference
    Poster presentation

  • Nano-Scale Bending Test for Si Beams for MEMS
    ISONO YOSHITADA
    Proc. of The 13th IEEE International Conference on MEMS 2000, 2000, English, International conference
    Poster presentation

  • Effect of Microstructure on Mechanical and Thermal Properties of Diamond-Like Carbon Thin Film
    ISONO YOSHITADA
    Proc. of The Eighth International Conference on the Mechanical Behavior of Materials, 1999, English, International conference
    Oral presentation

  • Rapid Prototyping –Its New Possibility of Manufacturing of Grinding Wheel－
    ISONO YOSHITADA
    Proc. ASPE 1998 Annual Meeting, 1998, English, International conference
    Poster presentation

  • Rapid Prototyping ?Its New Possibility of Manufacturing of Grinding Wheel－
    ISONO YOSHITADA
    Proc. ASPE 1998 Annual Meeting, 1998, English, International conference
    [Invited]
    Poster presentation

  • Atomic Scale Cutting Process －3D-MD Analyses and SPM observation－
    ISONO YOSHITADA
    Proc. ASPE Annual Meeting, 1998, English, International conference
    Oral presentation

  • 光励起ナノギャップ電極を用いたDNA オリゴマーの光トラップおよび1 分子検出
    森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正
    第36回「センサ・マイクロマシンと応用システム」シンポジウム, Japanese

■ Affiliated Academic Society
  • 日本材料学会

  • 電気学会

  • IEEE

  • 日本機械学会

■ Research Themes
  • 表面ポテンシャル変調を考慮した半導体ナノ細線の弾性歪み誘起電気伝導特性の解明
    磯野 吉正, 菅野 公二
    日本学術振興会, 科学研究費助成事業, 基盤研究(B), 神戸大学, 01 Apr. 2021 - 31 Mar. 2024

  • Sugano Koji
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, 01 Apr. 2018 - 31 Mar. 2021
    This study reports the detection and the identification of a single base from a single DNA oligomer by surface-enhanced Raman spectroscopy (SERS) using a gold nanoparticle dimer. The gold nanoparticle dimer structure was fabricated by a self-assembling process using a nanotrench. A Raman spectrum derived from an 8-chain DNA oligomer with one adenine and seven cytosines was obtained. It was confirmed that a single DNA oligomer was detected from a single gold nanoparticle dimer. It indicates that a single adenine was detected. In addition, only the adenine peak without the cytosine peak was observed, indicating the possibility of spatial resolution with a single DNA base.
    Competitive research funding

  • Isono Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, 01 Apr. 2018 - 31 Mar. 2021, Principal investigator
    In order to clarify the effect of surface potential on the piezoresistive effect of SiC nanowires (NWs), FET-type bending test devices including single SiCNW wrapped by SiO2 or Al2O3 dielectric materials were fabricated, and the gauge factor of SiCNWs was evaluated by varying the gate voltage under bending straining. The FET characteristics in the unstrained state showed n-type electron transport characteristics when the SiO2 shell with a positive fixed oxide charge was used as the dielectric, and p-type characteristics when the Al2O3 shell with a negative fixed oxide charge was used. In the resistance change rate of SiCNW under bending straining, the SiO2-coated NW showed a negative gauge factor such as n-type semiconductors, while Al2O3-coated NW had a positive gauge factor. Furthermore, the gauge factors changed significantly with the increase or decrease of the gate voltage.
    Competitive research funding

  • 向井 敏司, 磯野 吉正, 福本 巧, 池尾 直子, 上杉 晃生
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A), Grant-in-Aid for Scientific Research (A), Kobe University, 01 Apr. 2017 - 31 Mar. 2021
    生体内分解性インプラントは経時に伴い体内で分解されるため、抜去手術を必要としないデバイスとして注目されている。本研究ではインプラントの分解に伴う力学的強度をリアルタイムでモニタリングできるシステムの構築を目標としている。平成30年度には、第一原理計算に基づく分解性マグネシウム合金の最適組成設計およびヘテロ構造の形成を通じた強靱化に関する研究を継続して実施した。また、蒸着による検力センサーの実装試行および分解性を評価するための研究を推進した。 分解性マグネシウム合金の最適組成設計については、カルシウムならびに生体為害性が低い元素を第三元素として添加した場合の強度および変形能に及ぼす効果を第一原理計算により予測した。ここでは、溶質元素および原子数； Ca: 1, 第三元素X (Li, K, Sr, Ba, Zn, Mn, Mo, Zr, Cu, Ag, Si, Nd, Gd): 1を設定した。また、粒界モデルには{11-21}や{11-24}など複数種の対応粒界を選定し、第一原理計算により粒界エネルギーが高い粒界構造を決定した。次に、置換元素の偏析エネルギーを計算し、安定な原子配置を決定した。その後、各合金の粒界凝集エネルギーを算出し、破壊し難い合金元素種を決定した。計算により選定した合金を鋳造により試作した後に、強ひずみ加工を施すことにより、強靱化した細線材料を作製した。 センサーの作製については、電子ビーム(EB)蒸着およびスパッタリングの二通りの手法により実施した。ここでは、検力センサーのパターンを形成する方法およびセンサー膜中の不純物が分解速度に及ぼす影響を評価した。擬似体液にハンクス液を用いて試験体を浸漬し、経時に伴う体積減少を確認した。また、検力センサーを実装した試験体に曲げ応力を負荷し、センサーの出力について測定することにより、検力性能を検証した。
    Competitive research funding

  • 磯野 吉正
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Challenging Research (Exploratory), Challenging Research (Exploratory), Kobe University, 29 Jun. 2018 - 31 Mar. 2020, Principal investigator
    研究の第一年度は、主としてALD装置によるSiNWへのAl2O3被覆絶縁層の形成技術の確立、およびMEMS技術を用いたSiNW群の熱電変換特性評価デバイスの開発研究に取り組んだ。前者においては、SiNWへの被覆には成功したものの、最適条件を抽出するに至っていない。今年度は、薄膜形成中の基板温度制御を高精度に実施できるように、装置を改良する予定である。一方、後者においては、解析研究と実験研究を実施した。先ず解析研究では、SiNW群を用いた熱電変換デバイスに関する熱－電気等価回路モデルを作成し、解析によって熱電変換出力のSiNW密度依存性を解明した。これにより、デバイス開発に必要なSiNW群の密度情報を得ることができた。実験研究においては、触媒用金ナノ粒子のトレンチ側壁への選択的配置の実現、マイクロトレンチ間でのVLS成長SiNW群の架橋、およびTEOSを原料としたSiO2絶縁膜の被覆形成に成功し、SiNW群を用いた熱電変換特性評価デバイスを試作開発することができた。本年度は、このデバイスを用いて、架橋SiNW群のI-V特性評価、ゼーベック電圧の計測を実施した。I-V評価では、金ナノ粒子－Si境界でのショットキー障壁に起因した非線形性が確認された。また、ゼーベック電圧の計測では、温度増加に伴う同電圧増加が確認できた。ただし、ゼーベック電圧は約～35 μVと解析で予想される値より非常に小さくなった。今後、より大きなゼーベック電圧出力を得るために、SiNW群にマイクロヒーターからの熱を効率よく伝えられるように、デバイスに断熱構造を適用する必要があると考えられる。また、今後はデバイス構造およびプロセスフローの再検討を行うとともに、SiNW群に大きい温度差を付与できるヒーター構造を実現していく予定である。
    Competitive research funding

  • Isono Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research, Grant-in-Aid for Challenging Exploratory Research, Kobe University, 01 Apr. 2016 - 31 Mar. 2018, Principal investigator
    This research has developed a high temperature punch creep forming technique combined with a diffusion process of dopant for a downsizing of 3-axis piezoresistive tactile sensor made of Si film. The punch creep forming for micron-thick Si films was able to realize large out-of-plane deformation in a small area. This research has also estimated the creep coefficient and the creep exponent used in the creep constitutive equation for the Si films by backward analysis. The obtained parameters were quite different from those of bulk Si. As a result, the 3D formed piezoresistive tiny tactile sensor with a diameter of 0.32mm as its sensing area was designed by finite element analyses (FEA) using the creep parameters. Finally, we have succeeded in fabricating the tactile sensor by the punch creep forming. Here, the effect of the creep forming on the resistivity was little. Sensitivities in the horizontal and vertical directions of the tactile sensor roughly agreed with predicted values in FEA.
    Competitive research funding

  • Isono Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, 01 Apr. 2015 - 31 Mar. 2018, Principal investigator
    3C-SiCNWs are one of promising piezoresistive elements used in harsh environmental MEMS/NEMS applications, because of its high dielectric breakdown strength and excellent temperature/chemical stabilities. Especially, 3C-SiCNW wrapped by SiO2 shell is directly effective for fabrication of vertical structure FETs and FET-based mechanical sensors. This research clarified mechanical properties and piezoresistivity of 3C-SiCNWs wrapped with SiO2 (core/shell silicon carbide nanowires: C/S-SiCNWs) for harsh environmental MEMS/NEMS applications, using the MEMS-based nanotensile testing device. The tensile strengths for 3C-SiCNWs without SiO2 shell, and C/S-SiCNWs showed huge values of 22.4 GPa and 7.3 GPa on average, respectively. The gauge factor of the 3C-SiCNW without SiO2 shell showed -17.2 at 0.022 ε. Thus, the C/S-SiCNW has behaved as an n-type semiconductor, and it is useful as structural materials and piezoresistive elements in harsh environmental MEMS.
    Competitive research funding

  • ISONO Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Exploratory Research, Grant-in-Aid for Challenging Exploratory Research, Kobe University, 01 Apr. 2013 - 31 Mar. 2015, Principal investigator
    This research has developed a growth process of silicon nanowires (SiNWs), which is one of promising materials as a thermoelectric conversion element, using monosilane gas with an aid of gold catalyst particles contained in ferritin molecules. The measuring device of Seebeck coefficient, thermal conductivity and specific resistance of individual SiNWs was also designed in order to evaluate their performance of thermoelectric conversion. The adsorption of ferritin molecules was not uniform on a Si substrate, which led to the variation of growth location of SiNWs. However, the direct adsorption of gold catalyst nanoparticles produced their high density and uniformity on the substrate, which achieved a mass growth of SiNWs. The shape and dimensions of the measuring device were determined on a basis of finite element analyses. This device has a structure to absorb the device deformation produced by its thermal expansion in the deformation of suspensions settled in the device.
    Competitive research funding

  • ISONO Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, 01 Apr. 2012 - 31 Mar. 2015, Principal investigator
    The strain-induced silicon nanowires (SiNWs) will be effective for high-sensitive piezoresistance elements used in MEMS force sensors due to their electronic energy band structural features under mechanical strain. This research examined the piezoresistive effect of individual SiNWs under uniaxial tensile strain using the MEMS-based nanotensile testing device. The SiNWs in directions of <111> and <112> were grown on the testing device by the VLS technique. The SiNWs were tensioned using the device and simultaneously their I-V characteristics were measured. The resistance change ratio of strain-induced SiNWs of <111> and <112> directions have reached -80% and -35% at 0.03 strain, respective. The gauge factors for SiNWs of <111> and <112> also showed -170.7 at 0.002 strain and -128.9 at 0.001 strain, respectively, which were larger than unknown values for n-type bulk silicon. These results are extremely important to nanomechanical force sensors.
    Competitive research funding

  • KINOSHITA Hiroshi, ISONO Yoshimasa
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Grant-in-Aid for Scientific Research (C), 2010 - 2012
    Radio-frequency microelectromechanical systems (RF MEMS) switches have potentially superior electrical properties. There are problems with the electrical contacts: The mechanical relay switches in RF MEMS switches are microsized, and so the contact electrodes must be considerably smaller (less than 100 μm2) . In order to solve the problem, we used carbon nanotube (CNT) films as contact materials under micro loads. Although CNT films have high contact resistances, Au film depositions on CNT films and horizontal alignment of CNTs decrease contact resistances.
    Competitive research funding

  • 二国間交流「ナノ物性評価MEMSデバイスによる半導体ナノワイヤの応力誘起電子伝導の解明」
    磯野 吉正
    二国間交流事業（オーストリアとの共同研究）, 2012, Principal investigator
    Competitive research funding

  • 二国間交流「ナノ物性評価MEMSデバイスによる半導体ナノワイヤの応力誘起電子伝導の解明」
    磯野 吉正
    二国間交流事業（オーストリアとの共同研究）, 2011, Principal investigator
    Competitive research funding

  • MEMSにおける形状計測法に関する標準化
    磯野 吉正
    国際標準共同研究開発事業, 2011, Principal investigator
    Competitive research funding

  • ISONO Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, 2008 - 2010, Principal investigator
    This research developed the in situ scanning electron microscopy (SEM) nanomaterial testing system to reveal mechanical & electrical properties of carbon nanotubes (CNTs) for developing novel nano mechanical sensors. The in situ SEM testing system is constituted of Electrostatically Actuated NAno Tensile testing devices (EANATs) and the nano probe manipulation system. The EANATs can measure uniaxial tensile elongation of nanomaterials by the capacitance sensor integrated into the laver motion amplification system on the EANATs. The sensing resolution was 0.93 nm. The 51 nm-diametric multiwalled CNT prepared by the thermal CVD were tested on the EANATs. The stress-strain relation obtained in the test clarified the fracture mechanism of the CNT. In the fracture process of the CNT, a couple of outer shells of CNT have broken at the first step and the other inside core of the CNT followed the outer shells to failure. The Young's modulus of the CNT was about 600 GPa, which was roughly the same as previously reported values.
    Competitive research funding

  • Mechanical And Electrical Characterization for Piezo-resistive Nanowires Using MEMS/NEMS Technology
    ISONO Yoshiatda, SUGIYAMA Susumu
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Ritsumeikan University, 2004 - 2006
    Electrostatic actuated nano tensile testing devices (EANATs) have been developed and a methodology proposed for quasi-static uniaxial tensile testing of FIB deposited carbon nanowires using EANATs. The EANATs were composed of a specimen part, actuator part and a measurement part. The measurement part functions to amplify the lever motion that measures the tensile load and displacement of the nanowires. Experiments involved the use of the measurement part in conjunction with a CCD camera system and a block matching image analysis, and resulted in the EANATs achieving the minimum resolutions in tensile load and displacement of 123 nN and 0.29 nm, respectively. Accurate tensile load-displacement curves were obtained for nanowires with diameters ranging from 90 nm. to 150 nm using the EANATs. Experimental averages for Young's modulus and fracture stress of the nanowires were 59.9 GPa and 4.3 GPa, respectively, although the Young's modulus exhibited the scatter in absolute values ranging from 42.6 GPa to 80.7 GPa. The scatter in Young's modulus could have been caused by the different deposition condition for each nanowire. FE-SEM observations revealed that nonlinear deformation behavior was attributable to nanometric contraction produced just before failure of the nanowires. Experimental results have demonstrated that FIB-CVD deposited carbon nanowires would be effective for nano-mechanical components in NEMS. However, use of the nanowires as a nano-component with electrical functions can be determined after further investigations of electrical properties for the nanowires have been performed

  • Development of Elevated Temperature Fatigue Testing Technique for Micro Components used in Micro Power Generating Systems
    LEE Yeonkyeon, ISONO Yoshitada, TORIYAMA Toshiyuki
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Grant-in-Aid for Scientific Research (C), Ritsumeikan University, 2004 - 2005
    Single crystal silicon (SCS) micro components used in MEMS often suffer from cyclic fatigue damage due to their fluctuating motion. Evaluating fatigue damage as well as quasi-static mechanical properties of micro SCS structures is essential for safe operation and life extension of MEMS. The authors have so far carried out high cyclic fatigue tests of microscale SCS specimens under uniaxial tensile and one-directional bending stressing at elevated temperatures. Here, the applicable parameter to predict fatigue lives of SCS was proposed on a broad-range of specimen size from nanoscale to microscale. However, SCS components in MEMS would undergo not only tensile stress but also compressive stress. For example, components used in silicon based power MEMS, such as micro turbo machinery and micro reciprocating engine operating at high temperatures ; usually receive tension/compression fatigue damage with lower strain rate attributed to cyclic thermal hysteresis at the start/stop of the devices. Optical micro switches will be also subject to tension-compression cyclic loading in a full-reversed bending deformation. In order to establish a reliable design criterion for silicon-based MEMS, new damage evaluation technique under cyclic tensile/compressive loads is required. This research developed a full-reversed bending fatigue tester that can apply cyclic tensile/compressive loads to a microscale SCS specimen using twin thick-cantilevers. A novel full-reversed bending fatigue tester was developed for cyclic fatigue damage evaluation of MEMS materials. This paper focuses on ; 1)the design of the micro fatigue tester ; 2)establishment of the bending fatigue testing procedure ; and 3)revealing fatigue lives of microscale single crystal silicon (SCS) specimens. In fatigue testing, an SCS specimen was reciprocated between the twin thick-cantilevers to induce tensile and compressive stresses at both fixed ends of the specimen, respectively. The twin cantilevers played two roles ; one is as an indenter for bending and the other as a detector of cyclic loads applied to a specimen. The bending loads were measured by the deflection of the twin cantilevers using a laser reflection system based on AFM technique. Quasi-static bending tests of micro SCS specimens demonstrated the measurement accuracy of bending force and reliability of the displacement control systems of the tester. We succeeded the full-reversed cyclic bending tests, whereby the elastic stress-strain hysteresis loops of micro SCS specimen was obtained. This research will propose an effective parameter to predict fatigue lives of microscale SCS without respect to test conditions.

  • Non-local Stress Analysis of Heterogeneous Media by Image-based. Mesh Superposition Method and Its Verification
    TAKANO Naoki, ZAKO Masaru, KURASHIKI Tetsusei, ISONO Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), 2002 - 2004
    By combining the orginal Finite Element Mesh Superposition Method and the Image-based Modeling technology with high-resolution X-ray CT system, a novel "Image-based Mesh Superposition Meth" has been proposed. The proposed method can solve such non-local stress problems as interface problems, locally apppearing yielding zone or damaged zone and problems with high strain gradient. Hence, this method can overcome the problems to which the current multi-scale computational methods can not be applied. The high-resolution X-ray CT used in this study can provide the CT images with 2.6μm resolution. The numerical model for finite element analysis is automatically generated using the voxel finite elements. To solve the very large-scale algebraic equations generated by this image-based modeling technique, an element-by-element iterative solver and the out-of-core skyline method with renumbering by RCM method are used. To determine the microstructure model, a morphology analysis methodology has also been proposed. The macroscopic model is generated using the homogenized (averaged) mechanical properties calculated by the asymptotic homogenization theory. The microscopic stress is calculated by the original finite element mesh superposition method. On a standard personal computer, a three-dimensional non-local problem with approximately 100,000 voxel elements is solvable. The developed computational method has been applied to real porous ceramics. The predicted homogenized properties of porous alumina with needle-like pores have been verified through comparison with experimentally measured values. The error was only 1%. To verify the accuracy of the microscopic stress calculated by the mesh superposition method, two-dimensional analysis has been carried out and compared with conventional finite element analysis with fine mesh. For a two-dimensional interface crack problem of dissimilar porous materials, very good coincidence was obtained between the proposed and reference analyses. To visualize the calculated three-dimensional distribution of the microscopic stresses, original software named V-SEM (Visualization and Stress Evaluation of material Microstructures) has been developed especially designed for the image-based multi-scale analysis. It is helpful to evaluate the microscopic stress quantitatively by plotting the histogram.

  • Evaluation of Mechanical Properties for Nanometric Silicon Wire Used for Single Electron
    ISONO Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Ritsumeikan University, 2001 - 2003
    This research focuses on revealing specimen size and temperature effects on mechanical properties of nanometric single crystal silicon (SCS) wires used for single electron devices. Mechanical properties of the nanometric SCS wires were characterized by bending tests with an atomic force microscope (AFM). The fixed-fixed SCS wires with widths from 200 nm to 800 nm and a thickness of 255 nm were fabricated on a silicon diaphragm by means of field-enhanced anodization with AFM and anisotropic wet etching. The AFM bending tests of the SCS wires were carried out at temperatures ranging from 295 K to 573 K in high vacuum. The tensile tesiting device including an electrostatic actuator and nanometric SCS wire was also designed. The nanometric SCS wires fractured in a brittle manner at room temperature, whereas they deformed plastically above 373 K. Young's modulus of the wires in the <110> direction on the (111) surface at temperature ranging from 295 K to 573 K averaged from 170 GPa to 159 GPa, respectively, but had no specimen size effect. However, the specimen size produced a large effect on the fracture strength since the fracture strength of the 200 nm-wide wires ranged from 17.8 GPa to 15.9 GPa, which were 1.5 times larger than that of the 800 nm-wide wires. Plastic flow of the nanometric SCS wires appeared in force-displacement curves at 373 K, which was caused by high shear stress acting on the wires. Slip lines comprised of edge dislocations responsible for the plastic flow was observed by AFM and SEM techniques. The slip line density of the nanometric wires was 100 times larger than that of the micrometer scale specimen, which meant the specimen size had a large influence on the plastic deformation behavior. The edge dislocation model newly proposed in this research was able to rationalize that the specimen size effect on the plastic deformation behavior at elevated temperature was determined by the correlation between the specimen size and the activation Gibbs free energy. Finally, the electrostatic actuator on the tensile testing device, developed here, gave a useful performance in the nanoscale tensile testing.

  • 3次元微細加工技術を用いた自励振動高分子ゲル繊毛アクチュエータに関する基礎研究
    田畑 修, 磯野 吉正
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research on Priority Areas, Grant-in-Aid for Scientific Research on Priority Areas, Ritsumeikan University, 2001 - 2002
    外部からの制御信号がなくても,心臓のように一定リズムで自発的に動作する高分子ゲル製アクチュエータを実現し,生体との親和性の高いケモメカニカルシステムを構築することが本研究の最終目標である.第1ステップとして,繊毛運動をするケモメカニカルアクチュエータの実現可能性を検討している.材料にはルテニウム錯体[Ru(bpy)_3]を共重合させたN-イソプロピルアクリルアミド(N-IPAAm)自励振動ゲルを用いた.自励振動ゲル内ではBZ反応が発生し,一定条件下において自発的なリズムで膨潤収縮を繰り返す特性を示す. シンクロトロンから放射されるX線を利用したゲルのマイクロ成型加工技術を用いて自励振動ゲルの表面に繊毛状突起のマイクロ構造を形成した人工繊毛を実現した.人工繊毛は底部直径100μm,高さ300μmの円錐台形状構造が250μmピッチでアレイ状に配置された構造である.ゲル中の反応波の伝播に伴う繊毛状突起先端部の挙動を,動画解析処理を用いて測定すると共に,有限要素法(FEM)を用いたシミュレーション結果により解析した.BZ反応によるゲルの膨潤・収縮のFEM解析は,繊毛状突起モデルに初期条件として熱膨張係数と温度場およびヤング率の測定結果を与えて行った.測定により突起先端の楕円軌跡動作が明らかになり,FEM解析により突起先端の楕円軌跡動作にはゲル基部の膨潤・収縮が大きく関与していることが明らかとなった.

  • Mechanical Characterization of Ni-Based Alloy Thin Film by SPM Tensile Testing
    ISONO Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Grant-in-Aid for Scientific Research (C), Ritsumeikan University, 2001 - 2002
    This research investigated mechanical characteristics of micro scale single crystal silicon (SCS) and UV-LIGA Nickel (Ni) films used for micro electromechanical systems (MEMS). Compact tensile tester operated in Scanning Probe Microscope (SPM) was developed for accurate evaluation of Young's modulus, tensile strain, and strength of microscale SCS and UV-LIGA Ni specimens. SCS specimens with nominal dimensions of 20 pm in thickness, 50 p.m in width, and 600 pm in length were prepared by a conventional photolithography and etching processes. UV-LIGA Ni specimens, with a thickness of 15 pm, a width of 50 pm, and a length of 600 p.m in nominal dimensions, were also fabricated by electroplating using a UV thick photoresist mold. All specimens have line patterns on their specimen gauge section to measure axial elongation under tensile stressing. The SCS specimens showed linear stress-strain relation and brittle fracture, whereas the UV-LIGA Ni specimens produced elastic-inelastic deformation behavior.Young's modulus of SCS and UV-LIGA Ni specimens obtained from tensile tests averaged 169.2 GPa and 183.6 GPa, respectively, which closed to those of the bulk materials. However, ultimate tensile strength of both materials showed larger value than that in bulk, 1.47 GPa for SCS and 0.98 GPa for Ni specimens. Yield stress and breaking elongation of UV-LIGA Ni specimens were also quite different from those of buLk Ni. Mechanical properties of the UV-LIGA Ni specimens were also studied at elevated temperatures to propose a simple constitutive equation on the assumption that the total strain increment was a linear superposition of elastic, plastic and creep strain increments. An optimum design of the micro connector by finite element analyses has been performed using the constitutive equations. Finally, magnetic domain pattern of permalloy thin films, which were know to be Ni-based alloy, was measured by magnetic force microscope (MEM) to reveal the effect of film thickness on the width of domain walls. Domain walls increased with a reduction of film thickness, which was caused by the transition of domain walls from Block type to Cross-tie type.

  • New development of compact tensile tester with scanning probe microscope for micro-scale specimen
    TANAKA Takeshi, ISONO Yoshitada
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Grant-in-Aid for Scientific Research (C), Ritsumeikan University, 1999 - 2000
    This research describes a micro-scale tensile test with a scanning probe microscope (SPM) for micro-scale materials used in electronic and MEMS devices. Three kinds of materials, which are single crystal silicon (Si), diamond like carbon and permalloy thin films, was used here. The film specimens were fabricated by a micro machining process technique. A compact tensile tester including a smaller sized piezoelectric actuator was also newly developed, and the tester was built in the SPM.It has been so far difficult to measure strain of micro-scale specimen during a tensile test because of the shorter gage length of specimen. In this research, the SPM was used as an extensometer of micro-scale specimens with a resolution on the order of 1 nanometer, so that strain was obtained in the course of tests. Young's modulus of micro-scale Si specimen measured by the SPM ranged from 157 GPa to 166 GPa, which was similar to that of millimeter scale Si. Furthermore, the Young's modulus of Si recalculated by fitting the SPM data to a spline function showed 170 GPa, which was in agreement with that of bulk sized Si in [110] direction. The micro-scale specimen produced an increase of the tensile strength since the strength of micro-scale Si specimen showed 0.9-1.2 GPa that was 2-3 times larger than that of bulk sized Si. Scanning electron microscopic observations also revealed micro-scale Si specimen fractured brittle manner in room temperature. So, the specimen size effect on tensile strength would have been caused by a reduction of the number of cracks in specimen with decreasing the specimen size. This research also carried out tensile tests of DLC and permalloy thin films deposited on the micro-scale Si specimen. However, an accurate stress-strain curve of DLC and permalloy films was not obtained since the film specimen did not fractured at the gage part of specimen. Further experiments are needed to reveal mechanical properties of DLC and permalloy films.

  • Investigation of phase Transformation and Tougning Mechanism of Zirconla/Metal Functional Matrix by Grinding
    ISONO Yoshitada, AMEYAMA Kei
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Grant-in-Aid for Scientific Research (C), Ritsumeikan University, 1995 - 1996
    The functional matrix is the most miracle composite as the future industrial materials. But, there are only a few data in the manufacturing process. Here, the grinding characteristics are investigated for the new product of zirconia/nickel composite. Especiaaly, the influences to its strength characteristics of these composites by the toughening mechanism and surface characteristics induced by grinding are cleared. In zirconia/nickel composite, the bending strength increase with the large constituent rates of zirconia. Because the particle size of nickel is larger than that of zirconia, the crack transmitted in nickel particle on the fracture. Then, the toughening may be due to crack transmission by a lot of zirconia particles. The monoclinic phase increase with the increase of nickel contents. In cooling process of composites, the martensite transformation is induced by the compressive stress of zirconia by the large shrinkage of nickel. The surface roughness and the monoclinic phase on the ground surface increase with the large grits sizes of diamond abrasive grain. The increment rate of monoclinic phase decreases with the large contents of zirconia. Furthermore, in the rich zirconia composite, the bending strength and the monoclinic phase increase with the large size of abrasive grains. On the other hand, the surface roughness increase with the low wheel speed. The monoclinic phase and the bending strength increase with the high wheel speed. This is due to the increase of martensite transformation by the impact force in the high wheel speed. On the contrary, in over 50% nickel composites, the monoclinic phase decrease and the bending strength increase with the high wheel speed in the composites over 50% nickel. The residual stress is measured on the polished sample after grinding with SD140/170 wheel. The part of zirconia is filled by the residual compressive residual stress. These residual stresses and the monoclinic phase increase with the large centents of nickel. But, the 100% nickel reside the tensile residual stress in it. This is due to the martensite transformation on the ground surface. In other word, the volume expansion by the phase transformation of zirconia induced the compressive residual stress in nickel.

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