Research activity information

• Mar. 2024 応用物理学会 第15回集積化MEMSシンポジウム, 優秀論文賞, MEMS振動発電素子の発電特性に対する位相検出電極の影響

  本間浩章, 水野裕登, 年吉洋


• Feb. 2023 Editors, Sensors and Materials, Best S&M Young Researcher Paper Award 2022, Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks

  Hiroaki Honma


• Nov. 2022 電気学会センサ・マイクロマシン部門 第３９回「センサ・マイクロマシンと応用システム」シンポジウム論文委員会, 電気学会・第３９回「センサ・マイクロマシンと応用システム」シンポジウム 優秀技術論文賞, カリウムイオンエレクトレット製デバイス量産化のための長期信頼性技術

  三屋裕幸, 芦澤久幸, 下村典子, 石黒巧真, 本間浩章, 橋口 原, 年吉 洋


• Mar. 2022 応用物理学会・集積化ＭＥＭＳ技術研究会, 応用物理学会 第１３回 集積化ＭＥＭＳシンポジウム 優秀論文賞, エレクトレット帯電／陽極接合同時プロセスによるＭＥＭＳ型振動発電素子

  本間浩章, 池野 翔, 年吉 洋


• Nov. 2021 電気学会センサ・マイクロマシン部門 第３８回「センサ・マイクロマシンと応用システム」シンポジウム論文委員会, 第３８回センサ・マイクロマシンと応用システムシンポジウム 優秀技術論文賞, ＭＥＭＳ振動発電型イベントドリブンセンサを用いた橋梁の低消費異常周波数監視システム

  三屋裕幸, 芦澤久幸, 橋本勝文, 張凱淳, 下村典子, 門間達希, 本間浩章, 橋口 原, 塩谷智基, 年吉 洋


• Oct. 2020 応用物理学会第12回集積化MEMSシンポジウム選考委員会, 研究奨励賞, ダブルデッキ構造とジャンパ配線を一体化したエレクトレットMEMS振動発電素子

  本間 浩章


• Oct. 2020 電気学会・第３７回「センサ・マイクロマシンと応用システム」シンポジウム, 優秀技術論文賞, 「ＭＥＭＳ振動エナジーハーベスタの実機における発電量最大化技術」

  三屋裕幸, 芦澤久幸, 下村典子, 本間浩章, 橋口 原, 年吉 洋


• Apr. 2020 電気学会, IEEJ Excellent Presentation Award, 「1.3ｍＷ級ＭＥＭＳ環境振動発電素子とＩｏＴ応用大容量キャパシタへの高速充電」

  Hiroaki Honma


• Mar. 2020 集積化MEMS技術研究会, 第11回集積化MEMSシンポジウム 優秀論文賞, 「ダブルデッキ構造によるＭＥＭＳ振動発電素子の小型化」

  本間浩章, 年吉 洋


• Nov. 2019 第36回「センサ・マイクロマシンと応用システム」シンポジウム, 五十嵐賞, 「1.3ｍＷ級ＭＥＭＳ環境振動発電素子とＩｏＴ応用大容量キャパシタへの高速充電」

  本間 浩章

  IRI


• Nov. 2019 第36回「センサ・マイクロマシンと応用システム」シンポジウム, 優秀技術論文賞, 「エネルギー回収効率９２％のＭＥＭＳ振動エナジーハーベスタ」

  三屋裕幸, 芦澤久幸, 本間浩章, 橋口 原, 年吉 洋


• Jul. 2019 フジサンケイビジネスアイ（日本工業新聞社）先端技術大賞表彰制度委員会, 第33回 独創性を拓く先端技術大賞＜社会人部門＞経済産業大臣賞

  本間 浩章


• Nov. 2018 第35回「センサ・マイクロマシンと応用システム」シンポジウム, 優秀ポスター発表賞, 「高パワー密度（３１ｍＷ／ｃｍ３／Ｇ２）を実現したＭＥＭＳ環境振動発電素子とそのＩｏＴ応用」

  本間浩章, 山田駿介, 三屋裕幸, 橋口 原, 年吉 洋


• Sep. 2018 応用物理学会集積化MEMS技術研究会、第２回台湾-日本国際交流シンポジウム, 優秀ポスター賞, Power Density Enhancement of Electret Based Energy Harvester with Symmetric Comb-Electrode Structure

  Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, Hiroshi Toshiyoshi


• Mar. 2018 応用物理学会・第９回集積化ＭＥＭＳシンポジウム, 優秀論文賞, 「左右対称構造により静電拘束力を抑制した低Ｇ用のＭＥＭＳ振動発電素子」

  本間浩章, 三屋裕幸, 橋口 原, 藤田博之, 年吉 洋


• Nov. 2017 電気学会・第３４回「センサ・マイクロマシンと応用システム」シンポジウム, 優秀ポスター発表賞, 左右対称エレクトレットくし歯電極による広帯域振動エナジーハーベスタ応用

  三屋 裕幸, 芦澤 久幸, 穴井 大輔, 橋口 原, 本間 浩章, 藤田 博之, 年吉 洋


• Oct. 2016 電気学会・第３３回「センサ・マイクロマシンと応用システム」シンポジウム, 優秀平戸市長賞, 「インパルス振動に特化したコインサイズエナジーハーベスタ」

  三屋裕幸, 芦澤久幸, 橋口 原, 本間浩章, 藤田博之, 年吉 洋


• Jun. 2012 電子情報通信学会電子デバイス研究会, 論文発表奨励賞

  本間 浩章


• Mar. 2012 第3回集積化MEMSワークショップ, 研究奨励賞

  本間 浩章

• MEMS Electrostatic Energy Harvester Developed by Simultaneous Process for Anodic Bonding and Electret Charging

  Hiroaki Honma, Sho Ikeno, Hiroshi Toshiyoshi

  Lead, MYU K.K., Jun. 2023, Sensors and Materials, 35(6) (6), 1941 - 1941

  [Refereed]

  Scientific journal


• Double-Deck MEMS Electrostatic Vibrational Energy Harvester with Airborne Interconnection

  Hiroaki Honma, Hiroshi Toshiyoshi

  Lowering internal impedance, i.e., stray capacitance and resistance, is essential to enhance the output power of microelectromechanical system (MEMS) vibrational energy harvesters particularly when the structure is made of a silicon-on-insulator (SOI) wafer which has a distributed stray capacitance across the buried oxide (BOX) layer. Instead of using silicon as a material for electrical interconnection, we used an out-of-plane aluminum bonding wire to complete the on-chip electrical interconnection between the contact pads on the chip frame and the suspended movable electrodes. Compared with the conventional design using silicon-based interconnections, the maximum deliverable power has been enhanced almost six-fold because of the reduced stray capacitance between the SOI layer and the substrate, as well as reduced internal electrical resistance. The mechanical stability of the bonded wire during the excitation vibration has also been experimentally confirmed. A typical power density of 763 µW/cm³ is obtained when excited by 0.5 G (1 G = 9.8 m/s²) sinusoidal vibrations at 157 Hz.

  The Institute of Electrical Engineers of Japan, Sep. 2022, IEEJ Transactions on Sensors and Micromachines, 142(9) (9), 215 - 219, English

  [Refereed]


• Low-Power Frequency Monitoring System for Bridge Using MEMS Vibrational-Energy Harvesting Sensor

  Hiroyuki Mitsuya, Katsufumi Hashimoto, Kai-Chun Chang, Hisayuki Ashizawa, Noriko Shimomura, Tatsuki Momma, Hiroaki Honma, Gen Hashiguchi, Hiroshi Toshiyoshi, Tomoki Shiotani

  Institute of Electrical Engineers of Japan (IEE Japan), Jul. 2022, IEEJ Transactions on Sensors and Micromachines, 142(7) (7), 139 - 146

  Scientific journal


• Bandwidth Broadening of MEMS Vibration Energy Harvesters by Voltage-boost Rectifier Circuit

  Yukiya Tohyama, Hiroaki Honma, Hiroshi Toshiyoshi, Daisuke Yamane

  MYU K.K., May 2022, Sensors and Materials, 34(5) (5), 1889 - 1889, English

  [Refereed]

  Scientific journal


• Power Generation Demonstration of Electrostatic Vibrational Energy Harvester with Comb Electrodes and Suspensions Located in Upper and Lower Decks

  Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, Hiroshi Toshiyoshi

  In this paper, a vibrational energy harvester formed in a double-deck structure is presented. Comb electrodes covered with an electret skin are located in the active layer of a silicon on insulator (SOI) wafer, and suspensions are formed in the handle layer, thereby reducing the footprint to 62% of that of the previous model. For electrical interconnection between the SOI and handle layers, part of the SOI layer is formed into a cantilever that is designed to adhere to the substrate. When the device is mechanically excited by sinusoidal acceleration of 0.18 G (1 G = 9.8 m/s(2)), it generates a power of 13.2 mu W, corresponding to a normalized power density (NPD) of 1.23 mW/cm(3)/G(2).

  Lead, MYU K.K., Apr. 2022, Sensors and Materials, 34(4) (4), 1527 - 1527, English

  [Refereed]

  Scientific journal


• Improvement of Potassium-Ion SiO2Electret Potential by Controlling Flowrate in Oxidation Process

  Refaldi I.D. Putra, Takahiro Ozawa, Hiroaki Honma, Katsuyuki Fukutani, Hiroshi Toshiyoshi

  Potassium-ion silicon electret (K-SiO2) is a promising material for electrostatic type vibrational energy harvesting device enabled by micro-electro-mechanical system (VEH-MEMS). The power generation of VEH-MEMS can be enhanced by increasing the potential of electret. In this work, we report an improvement of 49.3% in potential of K-SiO2 electret thin film compared to the existing method. This is achieved by controlling the feed gas flowrate during wet oxidation process and applying vacuum annealing before charging process.

  2022, 2022 21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2022, 282 - 285

  International conference proceedings


• Power Enhancement of MEMS Vibrational Electrostatic Energy Harvester by Stray Capacitance Reduction

  Hiroaki Honma, Yukiya Tohyama, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, Hiroshi Toshiyoshi

  We report a design method to enhance the output power of vibrational microelectromechanical system (MEMS) electrostatic energy harvesters by reducing the reactive power that does not contribute to the net output. The mechanism of enhancing the active current while reducing the reactive current is analytically studied using an equivalent circuit model of electret-based velocity-damped resonant-generator. Reduction of the internal parasitic capacitance associated to the contact pads and electrical interconnections significantly improves the power factor and increases the deliverable power. The design strategy is applied to an actual device that produces 1.3 mW from the vibrations of 0.65 G (1 G = 9.8 m s(-2)) at 158 Hz, suggesting a 2.9-fold enhancement of output power by increasing the buried oxide layer thickness from 1 mu m to 3 mu m.

  Lead, IOP Publishing, Oct. 2021, Journal of Micromechanics and Microengineering, 31(12) (12), English

  [Refereed]

  Scientific journal


• A Method to Optimize the Output Power of MEMS Vibrational Energy Harvester

  Mitsuya Hiroyuki, Ashizawa Hisayuki, Shimomura Noriko, Honma Hiroaki, Hashiguchi Gen, Toshiyoshi Hiroshi

  A MEMS vibrational energy harvester is developed as a power source for infrastructures monitoring systems. The output power is maximized by appropriately choosing the load resistance in accordance with the vibration conditions of the vibration source. Output power of more than 500 µW is obtained from the vibrations caused by a vacuum pump used in a factory.

  The Institute of Electrical Engineers of Japan, 2021, IEEJ Transactions on Sensors and Micromachines, 141(7) (7), 245 - 253, Japanese


• Energy Harvesting from Non-Stational Environmental Vibrations using a Voltage-Boost Rectifier Circuit

  Tohyama Yukiya, Honma Hiroaki, Sekiya Hidehiko, Toshiyoshi Hiroshi, Yamane Daisuke

  This paper presents an energy harvesting technique that generates effective DC power from non-stationary weak environmental vibrations. We employ a voltage-boost rectifier (VBR) circuit utilizing small output from a vibrational energy harvester under non-stationary vibrations, which cannot be utilized by conventional rectifiers. A VBR circuit is fabricated by the complementary metal-oxide-semiconductor (CMOS) technology and packaged as a chip. The VBR chip is combined with an electret-based MEMS vibrational energy harvester and experimentally evaluated under non-stationary vibration. Measurement results show that the proposed system can deliver an effective DC voltage over 5.6 V from non-stationary vibrations (0.3 m/s²_RMS) while a conventional diode rectifier delivered 0.3 V or lower.

  Institute of Electrical Engineers of Japan, Oct. 2020, IEEJ Transactions on Sensors and Micromachines, 37(7) (7), 5p - 232, Japanese


• Triboelectric Nanogenerator with Pyramidal Microstructure Array Fabricated by 3D Lithography at Contact Interface

  Yanagita Kosuke, Iida Taiki, Honma Hiroaki, Hashiguchi Gen, Toshiyoshi Hiroshi, Suzuki Takaaki

  We propose a triboelectric nanogenerator with pyramidal microstructure array fabricated by 3D lithography at contact interface. Since the actual contact area of the periodic pyramidal structure is relatively easy to predict, we evaluated the relationship between the size of the pyramidal microstructure at the contact interface and the power generation performance in a vertical contact-separation mode.

  Institute of Electrical Engineers of Japan, Oct. 2020, IEEJ Transactions on Sensors and Micromachines, 37(7) (7), 5p - 259, Japanese


• Equivalent Circuit Model for MEMS Vibrational Energy Harvester Compatible with Sinusoidal and Nonsinusoidal Vibrations

  Hiroaki Honma, Yukiya Tohyama, Sho Ikeno, Hiroshi Toshiyoshi

  We build an equivalent Simulation Program with Integrated Circuit Emphasis (SPICE) model for a vibrational energy harvester comprising comb electrodes coated with an electret film that is used to convert the vibrational kinetic energy into electrical output power by electrostatic induction. In the assembled module, sinusoidal and nonsinusoidal vibrations are imported into the nonlinear current sources as an inertial force, and the power-generating performances are simulated. The nonsinusoidal waves observed in an actual environment (highway duct) are used as an input sample. By quantitatively comparing the simulation and experimental results, we verify the applicability of the equivalent module for various vibrations. When the device is excited by sinusoidal vibration, the maximum output power is calculated to be 71 mu W at 0.044 G (1 G = 9.8 m/s(2)), which is close to the experimental result of the actual device, 68 mu W at 0.045 G. Furthermore, when importing a nonsinusoidal vibration, the two timings at the highest generating peak are obtained in accordance with the moment of resonance, and the amplitudes are experimentally and analytically obtained to be 0.80 and 0.63 V, respectively.

  MYU, SCIENTIFIC PUBLISHING DIVISION, Jul. 2020, Sensors and Materials, 32(7) (7), 2475 - 2492, English

  [Refereed]

  Scientific journal


• 環境振動MEMS発電素子とIoT無線センサ応用 (特集 超音波等を適用したプラントの保守検査(1))

  年吉 洋, 遠山 幸也, 本間 浩章, 三屋 裕幸, 橋口 原

  日本工業出版, May 2020, 超音波techno, 32(3) (3), 33 - 37, Japanese

  [Refereed]


• A Method to Determine the Electret Charge Potential of MEMS Vibrational Energy Harvester Using Pure-White Noise

  Hiroyuki Mitsuya, Hisayuki Ashizawa, Noriko Shimomura, Hiroaki Homma, Gen Hashiguchi, Hiroshi Toshiyoshi

  © 1988-2012 IEEE. A high-speed measurement method has been developed to electrically determine the potential voltage of the permanent charge or electret formed in a MEMS (microelectromechanical systems) vibrational energy harvester. While the conventional admittance method requires long time to observe the waveforms of the output power in time domain that diminishes when the built-in electret potential is compensated by an external voltage, this work proposes a new method to uniquely and promptly determine the electret potential by using the FFT (fast Fourier transform) analysis on the vibrational energy harvester excited by the white-noise voltage; the resonant peak in the frequency domain diminishes when the electret potential is compensated by the applied external bias voltage. White noise has been used in conventional method to measure the frequency response of devices of linear characteristics. However, due to the randomness of the input signal, random noise is inherently introduced to the measurement result, which urges us to repeat the measurement and to perform time-averaging to smooth out the noise. Therefore we used a newly developed white noise so-called 'pure' white noise, which has a totally flat power spectrum, as it is synthesized from waveforms of a constant magnitude and random phases. We compute the inverse Fourier transform of such pure-white noises to instantly obtain the power spectrum without using mathematical averaging, and thus the throughput of measurement is enhanced ten-times faster.

  May 2020, IEEE Transactions on Semiconductor Manufacturing, 33(2) (2), 180 - 186

  [Refereed]

  Scientific journal


• ＩｏＴセンサを駆動するＭＥＭＳ振動エナジーハーベスタ

  三屋裕幸, 芦澤久幸, 橋口 原, 本間浩章, 年吉 洋

  日本工業出版, Apr. 2020, クリーンテクノロジー, 67 - 72


• Electrostatic Vibrational MEMS Energy Harvester with Thin Film Electrets

  TOSHIYOSHI Hiroshi, HONMA Hiroaki, MITSUYA Hiroyuki, HASHIGUCHI Gen

  Electret or permanent electrical charge is used as a part of mechano-electric energy conversion system for vibrational energy harvesting device. Microscopic capacitors are produced by silicon micromachining or MEMS (microelectromechanical systems) fabrication process, and the surfaces are turned into impurity-rich silicon oxide, which is later processed to make an electret by displacing the impurity ions by the same mechanism as the anodic bonding. The built-in potential of the electret is used to produce electrical current through the electrostatic induction when the movable electrode is periodically shaken by the external vibrations. In this article, the fabrication processes for the electret as well as the MEMS vibrational energy harvester are discussed. The fundamental characteristics of the energy harvesters are reported, along with a demonstration result as an autonomous powerpack for an IoT (internet-of-things) type wireless sensor node.

  The Japan Society of Vacuum and Surface Science, 2020, Vacuum and Surface Science, 63(5) (5), 223 - 228, Japanese

  [Refereed]


• A power-density-enhanced MEMS electrostatic energy harvester with symmetrized high-aspect ratio comb electrodes

  Honma Hiroaki, Tohyama Yukiya, Mitsuya Hiroyuki, Hashiguchi Gen, Fujita Hiroyuki, Toshiyoshi Hiroshi

  In this paper, we experimentally demonstrate a new approach to improve the output power of electrostatic energy harvester with an electret skin. A symmetric three-ports comb-electrode mechanism is used to reduce the binding electrostatic force, thereby allowing a smooth mechanical motion of the suspended electrodes of a high-aspect ratio in a small acceleration range. Given the same device footprint, two energy harvesters having different aspect ratios are prepared to compare the power generation performances. The output power is increased 6.4 times by increasing the aspect-ratio from the 7.1 to 33.3. At the same time, the volumetric power density is also improved from 62.5 mu W cm(-3) to 270.2 mu W cm(-3). These results suggest a possibility to further enhance the aspect ratio to shorten the charge time of a large storage capacitor for autonomous internet of things wireless sensor node.

  IOP PUBLISHING LTD, Aug. 2019, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 29(8) (8), English

  [Refereed]

  Scientific journal


• Analytical Model for MEMS Electret Energy Harvester with Long-stroke Tip-sliding Electrodes

  Yukiya Tohyama, Hiroaki Honma, Brieux Durand, Tatsuhiko Sugiyama, Gen Hashiguchi, Hiroshi Toshiyoshi

  We develop an equivalent circuit model for a MEMS vibrational energy harvester that uses electrets or permanent electrical charges to generate electrostatic induction currents from mechanical vibrations. An electrode pair of periodically arranged comblike fingers is electrically biased by the built-in potential of an electret, and the distribution of electrostatically induced charges is altered by the relative mechanical motion of the electrodes. The electrostatic force as well as the induction charges are described as a function of the boundary condition and implemented into a multiphysics equivalent-circuit model by using the nonlinear current sources of the simulation software LTspice. As a practical solution for avoiding computational error, we have eliminated the use of polygonal approximations for the conditional analytical model and newly introduced a geometrical modulation function based on sigmoidal functions, by which the analytical model has become mathematically smooth and twice-differentiable with respect to the displacement. The short-circuit waveforms of vibrational energy harvesting are reproduced by simulation and are in good agreement with the experimental results.

  MYU, SCIENTIFIC PUBLISHING DIVISION, 2019, SENSORS AND MATERIALS, 31(9) (9), 2779 - 2802, English

  [Refereed]

  Scientific journal


• MEMS vibrational energy harvesters

  Hiroshi Toshiyoshi, Suna Ju, Hiroaki Honma, Chang-Hyeon Ji, Hiroyuki Fujita

  In this paper, we look into the fundamental mechanism to retrieve the power from physical vibrations by using microelectromechanical systems (MEMS) energy harvesters. An analytical model is presented for the velocity-damped resonant generator (VDRG) that delivers electrical power through the power enhancement mechanism using the mechanical resonance of a suspended mass. Deliverable power is also analytically discussed with respect to the theoretical limit, and a view to understand the VDRG behaviors is presented in association with the impedance matching condition and the quality factors. Mechano-electric power conversions including electrostatic induction, electromagnetic induction, and piezoelectric effect are discussed to study the scaling effect. Recent examples of MEMS VDRGs are reviewed and evaluated in terms of the power density.[GRAPHICS]

  TAYLOR & FRANCIS LTD, Jan. 2019, SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS, 20(1) (1), 124 - 143, English

  [Refereed]


• Improvement of energy conversion effectiveness and maximum output power of electrostatic induction-type MEMS energy harvesters by using symmetric comb-electrode structures

  H. Honma, H. Mitsuya, G. Hashiguchi, H. Fujita, H. Toshiyoshi

  We introduce symmetric comb-electrode structures for the electrostatic vibrational MEMS energy harvester to lower the electrostatic constraint force attributed to the built-in electret potential, thereby allowing the harvester device to operate in a small acceleration range of 0.05 g or lower (1 g = 9.8 m s-2). Given the same device structure, two different potentials for the electret are tested to experimentally confirm that the output induction current is enhanced 4.2 times by increasing the electret potential from -60 V to -250 V. At the same time, the harvester effectiveness has been improved to as high as 93%. The device is used to swiftly charge a 470 F storage capacitor to 3.3 V in 120 s from small sinusoidal vibrations of 0.6 g at 124 Hz.

  Institute of Physics Publishing, Apr. 2018, Journal of Micromechanics and Microengineering, 28(6) (6), English

  [Refereed]

  Scientific journal


• Development of a Cantilever-Type Electrostatic Energy Harvester and Its Charging Characteristics on a Highway Viaduct

  Hideaki Koga, Hiroyuki Mitsuya, Hiroaki Honma, Hiroyuki Fujita, Hiroshi Toshiyoshi, Gen Hashiguchi

  We have developed a micro-electro-mechanical systems ( MEMS) electrostatic vibratory power generator with over 100 mu w(RMS) of (root-mean-square) output electric power under 0.03 G(RMS) (G: the acceleration of gravity) accelerations. The device is made of a silicon-on-insulator (SOI) wafer and is fabricated by silicon micromachining technology. An electret built-in potential is given to the device by electrothermal polarization in silicon oxide using potassium ions. The force factor, which is defined by a proportional coefficient of the output current with respect to the vibration velocity, is 2.34 x 10 (4) C/ m; this large value allows the developed vibration power generator to have a very high power efficiency of 80.7%. We have also demonstrated a charging experiment by using an environmental acceleration waveform with an average amplitude of about 0.03 GRMS taken at a viaduct of a highway, and we obtained 4.8 mJ of electric energy stored in a 44 mu F capacitor in 90 min.

  MDPI AG, Oct. 2017, MICROMACHINES, 8(10) (10), English

  [Refereed]

  Scientific journal


• Nano-optomechanical characterization of surface-plasmon-based tunable filter integrated with comb-drive actuator

  H. Honma, M. Mitsudome, M. Ishida, K. Sawada, K. Takahashi

  We report a tunable plasmonic color filter consisting of a metamaterial periodic grating and microelectromechanical systems (MEMS) actuator. An aluminum subwavelength grating is integrated with electrostatic comb-drive actuators to expand the metal subwavelength period, which allows continuous control of the excitation wavelength of surface plasmons (SPs). We develop a batch fabrication process by employing a liftoff technique using an electron beam resist altered by the electron dose depending on different aspect ratios (length/width) for various components such as the subwavelength grating, nanohinge flexural suspensions, and comb fingers. We successfully demonstrate a continuous shift in the excitation wavelength over the 514-635 nm range by nanopitch expansion. The design margin of the grating period for SP excitation is evaluated by comparing the experimental pitch variation and theoretically calculated values. The resonance frequency of the tunable filter is optically measured to be approximately 10 kHz. The optically and mechanically obtained values agree well with the theory of electrostatic actuation and finite-difference time-domain simulation.

  IOP PUBLISHING LTD, Mar. 2017, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 27(3) (3), English

  [Refereed]

  Scientific journal


• Fabrication of free-standing subwavelength metal-insulator-metal gratings using high-aspect-ratio nanoimprint techniques

  Hiroaki Honma, Masato Mitsudome, Shintaro Itoh, Makoto Ishida, Kazuaki Sawada, Kazuhiro Takahashi

  In this paper, we report on the construction of a free-standing metal-insulator-metal (MIM) subwavelength grating by nanoimprint and lift-off techniques, which can be used as a plasmonic color filter for imaging a multicolor spectrum. The free-standing subwavelength grating was designed to be composed of Al (50 nm)-SiO2 (150 nm)-Al (50 nm) layers, and the thickness of the SiO2 layer determined the wavelength selectivity for the color filter. The residual-free nanoimprint with an aspect ratio of 6 : 1 was applied in the lift-off process to the formation of MIM gratings. We successfully developed subwavelength MIM gratings with heights of more than 200 nm. We also demonstrated the fabrication of a free-standing MIM grating without lateral stiction, which was expected to improve the wavelength selectivity of a free-standing plasmonic color filter. (C) 2016 The Japan Society of Applied Physics

  IOP PUBLISHING LTD, Jun. 2016, JAPANESE JOURNAL OF APPLIED PHYSICS, 55(6) (6), English

  [Refereed]

  Scientific journal


• Continuous control of surface-plasmon excitation wavelengths using nanomechanically stretched subwavelength grating

  Hiroaki Honma, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada

  We report a new method for continuously controlling surface-plasmon (SP) excitation wavelengths using a nanomechanically stretched metal subwavelength grating. An aluminum subwavelength grating is integrated with electrostatic comb-drive actuators to expand the metal subwavelength period, which allows continuous control of the dependent excitation wavelength. We successfully demonstrated that the excitation wavelength over the 542-668 nm range varies continuously with the square of the applied voltage, which agrees well with the theory of electrostatic actuation. This new modulation method can provide the functions of readjustment and continuous tuning for SP-based devices. (C) 2016 The Japan Society of Applied Physics

  IOP PUBLISHING LTD, Feb. 2016, APPLIED PHYSICS EXPRESS, 9(2) (2), English

  [Refereed]

  Scientific journal


• Fabrication of a thin plasmonic color sheet embedded with Al subwavelength gratings in parylene.

  Hayato Kumagai, Hiroaki Honma, Makoto Ishida, Kazuaki Sawada, Kazuhiro Takahashi

  In this study, we developed a thin plasmonic color sheet (TPCS) embedded with Al subwavelength gratings for use in flexible optical transmission filters, and experimentally demonstrated its transmission characteristics. Al subwavelength gratings were formed in a freestanding thin poly-para-xylylene (parylene-N) film less than 1-mu m thick by using electron beam (EB) direct writing and sacrificial etching. The fabricated TPCS contained Al subwavelength gratings with periods ranging from 400 nm to 600 nm, and succeeded in shifting the transmission peak wavelength from 510 nm to 650 nm in the visible range. The freestanding thin parylene-N film deposited by room-temperature chemical vapor deposition provided enough flatness to the TPCS with a height difference of 900 nm in a whole filter area, resulting in uniform transmission spectra. The experimentally obtained peak shift dependent on the grating period agreed well with theoretical calculation results. (C) 2016 Elsevier B.V. All rights reserved.

  ELSEVIER SCIENCE BV, 2016, Displays, 45(50) (50), 63 - 69, English

  [Refereed]

  Scientific journal


• A Frequency-Independent Vibrational Energy Harvester using Symmetrically Charged Comb-Drive Electrodes with Heavily Doped Ion Electrets

  H. Mitsuya, H. Ashizawa, K. Ishibashi, H. Homma, M. Ataka, G. Hashiguchi, H. Fujita, H. Toshiyoshi

  An energy harvester has been developed to efficiently earn energy from both cyclic and impulse vibrations by using a symmetric pair of comb-electrodes that are heavily doped with potassium-ions to form electrets. By equalizing the electromechanical forces on the opposing comb-drives, energy conversion efficiency is enhanced for both impulses and broad-frequency harmonic vibrations.

  IOP PUBLISHING LTD, 2016, 16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016), 773, English

  International conference proceedings


• Free-standing aluminium nanowire arrays for high-transmission plasmonic color filters

  Hiroaki Honma, Kazuhiro Takahashi, Masashi Fukuhara, Makoto Ishida, Kazuaki Sawada

  Presented is a fabrication process for the transmission of red-green-blue (RGB) colour filters based on surface plasmons (SPs) using aluminium (Al) nanowire arrays patterned through electron-beam lithography and the lift-off technique. An array of Al nanowires was deployed over a through hole formed by sacrificial silicon etching. The period of the Al nanowire arrays is the dominant structural parameter in determining the transmission peak position of SPs for a given material configuration. The Al nanowire arrays are designed with the same Al wire width under the assumption of operation using a microelectromechanical systems (MEMS) comb-drive actuator for the realisation of an RGB tunable colour filter. The peak wavelength of the transmitted light was red-shifted by increasing the period of the Al nanowire arrays from 450 to 600 nm, and RGB colours were demonstrated. A black pixel was produced using the 400 nm pitch Al nanowire array. The maximum measured transmittance of the peak wavelength was 56%. In addition, the number of nanowires sufficient for low-power operation by a MEMS comb-drive actuator was investigated and sufficient transmission light intensity was obtained from the pixel size of 10 mu m(2), including 20 Al nanowires.

  INST ENGINEERING TECHNOLOGY-IET, Dec. 2014, MICRO & NANO LETTERS, 9(12) (12), 891 - 895, English

  [Refereed]

  Scientific journal


• Mems mixer as an example of a novel construction method of microfluidics by discrete microparts

  Y. Murakami, K. Araki, R. Ohashi, H. Honma, N. Misawa, K. Takahashi, K. Sawada, M. Ishida

  This paper describes a novel approach to construct and/or functionalize a microfluidic chip with discrete microparts that are microfabricated small enough to place them in a microchannel. A preliminary demonstration was shown as a passive mixer. Microparts of several hundred micrometers were fabricated by double-sided etching with ICP RIE. The parts were manually placed in a typical Y-shaped PDMS microchannel. Fluorescence observation revealed that the constructed microfluidics had the same mixing ability as a fully silicon MEMS mixer. The configuration that is unattainable by the normal preassembled structure can also be fabricated. (C) 2014 Elsevier B.V. All rights reserved.

  ELSEVIER SCIENCE SA, Apr. 2014, SENSORS AND ACTUATORS B-CHEMICAL, 194, 528 - 533, English

  [Refereed]

  Scientific journal


• A Low-Voltage and High Uniformity Nano-Electro-Mechanical System Tunable Color Filter Based on Subwavelength Grating

  Hiroaki Honma, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada

  This paper reports on the construction of a nano-electro-mechanical system (NEMS) tunable color filter based on a subwavelength grating with high color uniformity and a low drive voltage. We recently proposed a ground-voltage-ground (GVG)-type tunable color filter with a parallel-plate actuator with three pairs of electrodes to decrease the crosstalk due to the electrostatic attractive force between each pair of actuators. Our finite element method (FEM) simulation results indicate that the drive voltage is decreased by 10 V, as compared to that of the previously reported GV type. The proposed structure was fabricated using a silicon-on-insulator (SOI) wafer. The color tuning capability of the device was demonstrated by applying a drive voltage of 6.7 V. The reflected light intensity was decreased by 34% at a wavelength of 680 nm. Color uniformity was also obtained in the filter area by reducing the variation of the displacement on the one-dimensional actuator arrays. (C) 2012 The Japan Society of Applied Physics

  JAPAN SOC APPLIED PHYSICS, Nov. 2012, JAPANESE JOURNAL OF APPLIED PHYSICS, 51(11) (11), English

  [Refereed]

  Scientific journal

• Low-Power Frequency Monitoring System for Bridge using MEMS Vibrational-Energy Harvesting Sensor

  Hiroyuki Mitsuya, Katsufumi Hashimoto, Kai-Chun Chang, Hisayuki Ashizawa, Hiroaki Honma, Gen Hashiguchi, Hiroshi Toshiyoshi, Tomoki Shiotani

  Nov. 2023, in Proc. Innovative Non-Destructive Testing for Civil Engineers (INDTCE) and 4th International Workshop on Self-Healing & Intelligent Materials (SHIM)

  [Invited]


• FREQUENCY TRACKING OF VIBRATIONAL ENERGY HARVESTER USING PHASE-LOCKED LOOP (PLL)

  Yuto Akai, Hiroaki Honma, Hiroshi Toshiyoshi

  Jun. 2023, in Proc. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), 284 - 287


• A MEMS VIBRATIONAL ENERGY HARVESTER CAPABLE OF RESTLESS CHARGING CAPACITOR FROM RANDOM VIBRATIONS

  Hiroaki Honma, Yukiya Tohyama, Hiroshi Toshiyoshi

  Lead, Jun. 2023, in Proc. 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), 1252 - 1255


• Bandwidth Extension for MEMS Vibrational Energy Harvester using High-Voltage Electret

  Hiroaki Honma, Yukiya Tohyama, Hiroshi Toshiyoshi

  May 2023, in Proc. Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2023)


• Characterization of Resonance Sensor Integrated in MEMS Vibrational Energy Harvester

  Hiroaki Honma, Yuto Akai, Hiroshi Toshiyoshi

  May 2023, in Proc. Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP 2023)


• MACHINE LEARNING-BASED EXPERIMENT PLANNING OF POTASSIUM-ION SiO2 ELECTRET FORMING

  Refaldi I.D. Putra, Hiroaki Honma, Hiroshi Toshiyoshi

  Aug. 2022, in Proc. 2022 JSME-IIP/ASME-ISPS Joint International Conference on Micromechatronics for Information and Precision Equipment (MIPE2022), C1-2-01(3P)


• Autonomous IoT wireless sensor node driven by 1 mW MEMS electrostatic energy harvester

  Hiroaki Honma, Shunsuke Yamada, Hiroshi Toshiyoshi

  Lead, Aug. 2022, in Proc. 2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2022), C1-2-02(3P)


• 国際会議報告：The 20th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2021 Virtual) 報告

  浩章 本間

  Lead, Institute of Electrical Engineers of Japan (IEE Japan), 01 Jun. 2022, IEEJ Transactions on Sensors and Micromachines, 142(6) (6), NL6_1 - NL6_1


• Vibrational MEMS Energy Harvester Capable of Monitoring Phase State Variables

  Yuto Akai, Hiroaki Honma, Hiroshi Toshiyoshi

  May 2022, in Proc. Asia-Pacific Conference of Transducers and Micro-Nano Technology 2022 (APCOT 2022)


• Demonstration of production of pull-in cancellation voltage generated by electret-based vibrational energy harvester and Cockcroft-Walton voltage multiplier

  Hiroaki Honma, Shota Harada, Hiroshi Toshiyoshi

  Apr. 2022, Proc. 17th IEEE International Conference on Nano/Micro Engineerred & Molecular Systems (IEEE-NEMS 2022), 253 - 256


• POWER-HARVESTING FLEXIBLE PRINTED CIRCUIT BOARD WITH BUILT-IN MECHANICAL METAMATERIAL

  Mikito Kitazawa, Vivek A. Menon, Hiroaki Honma, Gen Hashiguchi, Hiroshi Toshiyoshi, Takaaki Suzuki

  In this paper, we propose a vibration energy harvester (VEH) based on a flexible printed circuit (FPC) capable of power generation using a polymer-based piezoelectric material, and designed a metamaterial elastic layer suitable for the VEH-FPC, which is both an FPC and a VEH. As a result of FEM analysis, we were able to reduce the resonance frequency by 20% and increase the power generation by 1.8 times compared to the conventional solid elastic structure while suppressing the stress generated at the sensor junction.

  IEEE, Jan. 2022, Proc 35th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2022), 616 - 619, English


• Temperature-tolerant electret material for MEMS vibrational energy harvester

  Hiroyuki Mitsuya, Hisayuki Ashizawa, Noriko Shimomura, Takuma Ishiguro, Hiroaki Honma, Gen hashiguchi, Hiroshi Toshiyoshi

  Dec. 2021, in Proc. Materials Research Meeting (MRM 2021)


• VIBRATIONAL ENERGY HARVESTER MADE BY SIMULTANEOUS PROCESS FOR ANODIC BONDING AND ELECTRET CHARGING

  Hiroaki Honma, Sho Ikeno, Hiroshi Toshiyoshi

  Lead, Sep. 2021, in Proc. 2020 International Conference on Solid State Devices and Materials (SSDM 2021)


• A SHORT-STROKE ELECTROSTSTIC VIBRATIONAL ENERGY HARVESTER WITH EXTENDED BANDWIDTH AND SENSITIVITY

  Hiroaki Honma, Yukiya Tohyama, Hiroshi Toshiyoshi

  A design strategy is presented to simultaneously enhance the bandwidth and the sensitivity of electrostatic vibrational energy harvester without excessively depending on the velocity amplification through mechanical resonance. Instead, the new design uses comb electrodes of very short-stroke that are finished with an extremely high density electret film, thereby enhancing the mechano-electric power conversion efficiency, leading to a 3.6-fold expansion of frequency bandwidth from 18 Hz to 64 Hz around a center frequency of around 100 Hz when the electret potential is 1.5-fold enhanced from -200 V to -300 V. Normalized power density as large as 700 mu W/cm(3)/G(2) is confirmed.

  Lead, IEEE, Jun. 2021, in Proc. 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021), 132 - 135, English


• Energy Harvesting from Non-Stationary Vibrations Using a Low-Threshold Voltage-Boost Rectifier Circuit

  遠山幸也, 本間浩章, 関屋英彦, 年吉洋, 山根大輔

  2021, 電気学会論文誌 E, 141(7) (7)


• Triboelectric Nanogenerator with Microstructure Fabricated by 3D Lithography at Contact Interface

  柳田幸祐, 飯田泰基, 本間浩章, 橋口原, 年吉洋, 鈴木孝明

  2021, 電気学会論文誌 E, 141(7) (7)


• A new improvement approach for output power of electret based MEMS energy harvester by optimal impedance

  本間 浩章, 年吉 洋

  Institute of Electrical Engineers of Japan, 26 Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese


• Experimental verification of automatic recovery from pull-in phenomenon in electrostatic MEMS energy harvester

  原田 翔太, 本間 浩章, 年吉 洋

  Institute of Electrical Engineers of Japan, 26 Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 4p, Japanese


• Electret vibrational energy harvester combined with double-deck structures and airborne electrical interconnection

  本間 浩章, 年吉 洋

  Institute of Electrical Engineers of Japan, 26 Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese


• MEMS electret energy harvester for IoT

  本間 浩章

  Institute of Electrical Engineers of Japan, 26 Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese


• A Method to Optimize the Output Power of MEMS Vibrational Energy Harvester

  Hiroyuki Mitsuya, Hisayuki Ashizawa, Noriko Shimomura, Hiroaki Honma, Gen Hashiguchi, Hiroshi Toshiyoshi

  Institute of Electrical Engineers of Japan, 26 Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese


• Enlargement of Frequency Bandwidth of Vibrational MEMS Energy Harvester by High Density Electrets

  Hiroaki Honma, Yukiya Tohyama, Hiroyuki Mitsuya, Hisayuki Ashizawa, Hiroshi Toshiyoshi

  Lead, Sep. 2020, in Proc. 2020 International Conference on Solid State Devices and Materials (SSDM 2020)


• Bandwidth enhancement of vibrational energy harvesters using a threshold-compensated voltage-boost rectifier

  遠山 幸也, 本間 浩章, 年吉 洋, 山根 大輔

  電気学会, 06 Jul. 2020, 電気学会研究会資料. MSS, 2020(20) (20), 53 - 56, Japanese


• Triboelectric Nanogenerator with pyramidal microstructure array at contact interface

  柳田 幸祐, 飯田 泰基, 本間 浩章, 橋口 原, 年吉 洋, 鈴木 孝明

  電気学会, 06 Jul. 2020, 電気学会研究会資料. MSS, 2020(20) (20), 57 - 60, Japanese


• Development of a Power Generation Flexible Printed Circuit Board Using Polymer Piezoelectric Material

  KITAZAWA Mikito, HONMA Hiroaki, KURIYAMA Nobuaki, HASHIGUCHI Gen, TOSHIYOSHI Hiroshi, SUZUKI Takaaki

  In this study, the power generation function is effectively added to a printed circuit board which occupies a large area in the Internet of Things (IoT) components. We propose power generation flexible printed circuits (FPCs) capable of mounting MEMS sensors, and developed FPCs for performing power generation by vibration and the sensor measurement simultaneously. By wire bonding, MEMS sensors were mounted on the FPC consisting of a piezoelectric polymer vibration energy harvester, an insulating film, and electrical printed circuits. As a result of experiments and finite element analysis, the power generation characteristics of the proposed FPC were controlled by the mounting position of the MEMS sensors on the FPC.

  The Japan Society of Mechanical Engineers, 2020, The Proceedings of Mechanical Engineering Congress, Japan, 2020, J22203, Japanese


• A Power Generation Flexible Printed Circuit Board with Mechanical Metamaterial Structure

  Kitazawa Mikito, Honma Hiroaki, hashiguchi Gen, Toshiyoshi Hiroshi, Suzuki Takaaki

  In this study, we propose a power generation flexible printed circuit (FPC) using polymer piezoelectric material. For the the power supply for IoT (Internet of Things) devices, the area of the printed circuit board that occupies a large area in the IoT components is effectively used, and the power generation function is added to the printed circuit board. In particular, We evaluated the vibration and power generation characteristics when the mechanical metamaterial structure was incorporated into the elastic layer of the printed circuit board. As a result of FEM analysis, the proposed vibration energy harvesting FPC incorporates a mechanical metamaterial structure, which reduces the resonance frequency by 12% and improves the power generation by 2.9 times in comparison to a flat plate structure.

  The Japan Society of Mechanical Engineers, 2020, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2020, 27P3 - MN3-5, Japanese


• Development of an Interposer with Frequency Conversion Function Using Bistable Structure for a Vibration Energy Harvester

  Ichige Ryo, Ueno Hidetaka, Honma Hiroaki, Hashiguchi Gen, Toshiyoshi Hiroshi, Suzuki Takaaki

  In this study, we propose an interposer with frequency conversion function using bistable structure for a vibration energy harvester (VEH). The bistable structure consists of a buckling beam having a two dimensional structure. Therefore, the proposed device has high compatibility with the micro electro mechanical systems (MEMS) process and it is easily miniaturized, integrated, and mass-produced. Vibration analysis using the finite element method (FEM) and vibration tests using prototype device were performed to evaluate the vibration behavior and the frequency conversion characteristics. As a result of the experiments and calculations, it is possible to generate an acceleration higher than the input acceleration, which suggested a design guideline for interposer of the VEH.

  The Japan Society of Mechanical Engineers, 2020, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2020, 26P3 - MN2-3, Japanese


• A Paradoxical Approach to Enhance the Output Power of Vibrational Energy Harvester beyond the Impedance Matching Conditions

  Hiroaki Honma, Yukiya Tohyama, Hiroshi Toshiyoshi

  © 2020 IEEE. The classical circuit theory tells us that the output from a power generator is maximized when a load resistance is set to match with the internal impedance of the power source. It is also believed that there exists one and only one impedance matching condition for a given power source system. In this paper, however, we discover another optimal condition that arises particularly when the mechano-electric conversion efficiency is enhanced in the electret based vibrational energy harvesting device. Such a condition is found to deliver more power than the conventional matching conditions do. In other words, the impedance matching condition is not a unique solution for the system but it changes with the excitation amplitude to the energy harvester.

  IEEE, Jan. 2020, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2020-January, 594 - 597, English


• Low-voltage-driven electrostatic microspeakers with potassium-ion-electrets

  C. Sano, V. Menon, H. Honma, G. Hashiguchi, H. Toshiyoshi

  © Published under licence by IOP Publishing Ltd. Electrostatic microactuators require external DC biasing in order to achieve the widest possible range of displacements for a given AC input. This report proposes a novel microspeaker structure that utilizes a potassium-ion-electret to reduce the need for such DC voltage application. Electrets exhibiting quasi-permanent charges enable large fixed voltages to be integrated directly within the MEMS structure, acting as an ersatz DC bias. Prototype devices were fabricated and characterized to approximate the effects of electret incorporation on the device performance.

  04 Dec. 2019, Journal of Physics: Conference Series, 1407(1) (1)


• A Voltage-Boost Rectifier Circuit for Energy Harvesting from Environmental Vibrations

  Y. Tohyama, H. Honma, N. Ishihara, H. Sekiya, H. Toshiyoshi, D. Yamane

  © Published under licence by IOP Publishing Ltd. We propose a VBR (voltage-boost rectifier) circuit based on the 0.18-μm Si CMOS (complementary metal oxide semiconductor) technology, which is designed for vibrational energy harvesters utilizing environmental vibrations. The VBR employs a single-end Dickson type charge-pump topology, and the circuit would be realized as a monolithic chip. The evaluation results obtained by multi-physics simulations on a circuit simulator reveal that the proposed circuit can deliver boosted DC voltage from the input of sub-threshold AC voltage.

  04 Dec. 2019, Journal of Physics: Conference Series, 1407(1) (1)


• A Resonance-Maintaining Circuit for High-Efficiency Electret-based MEMS Vibrational Energy Harvesters

  H. Mitsuya, H. Ashizawa, M. Morita, H. Homma, G. Hashiguchi, H. Toshiyoshi

  © Published under licence by IOP Publishing Ltd. We have developed a high-efficiency MEMS vibrational energy harvester with a resonance-maintaining circuit. Of particular note, the circuit is capable of both (1) rectifying the output to compensate for the electret bias voltage in the harvester and (2) avoiding electromechanical feedback by maintaining a relatively stable apparent load and resonance state. These improvements to the control circuitry allow the energy harvester to achieve useable energy outputs of over 500μW with highly efficient energy conversion ratios (79%).

  04 Dec. 2019, Journal of Physics: Conference Series, 1407(1) (1)


• A 1.3mW Electrostatic Vibrational Energy Harvester and Charging of Large Storage Capacitance for IoT Applications

  本間 浩章, 年吉 洋

  Institute of Electrical Engineers of Japan, 19 Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 6p, Japanese


• Method verification of reducing parasitic capacitance for MEMS vibration energy harvester

  池野 翔, 本間 浩章, 遠山 幸也, 年吉 洋

  Institute of Electrical Engineers of Japan, 19 Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 5p, Japanese


• Miniaturization of MEMS Electrostatic Vibration Energy Harvester using Double-Deck Structure

  本間 浩章, 年吉 洋

  Institute of Electrical Engineers of Japan, 19 Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 5p, Japanese


• An Electrostatic Vibrational MEMS Energy Harvester of Large Power Recovery Effectiveness over 92%

  Hiroyuki Mitsuya, Hisayuki Ashizawa, Hiroaki Honma, Gen Hashiguchi, Hiroshi Toshiyoshi

  The power-recovery effectiveness of our MEMS vibrational energy harvester has been improved to 92% of the theoretical limit by increasing the mechanical Q-factor through vacuum packaging and by enhancing the mechano-electric power conversion through a high-density electret.

  Institute of Electrical Engineers of Japan, 19 Nov. 2019, SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP 2019), 36, 4p, Japanese


• Improvement of output of electrostatic MEMS energy harvesters by using high electret potential

  本間浩章, 遠山幸也, 年吉洋

  電気学会, 01 Jul. 2019, 電気学会研究会資料, 2019(11) (11), 61 - 65, Japanese


• Bandwidth Enhancement of Vibrational Energy Harvesters by A Voltage-Boost Rectifier Circuit

  Yukiya Tohyama, Hiroaki Honma, Noboru Ishihara, Hiroshi Toshiyoshi, Daisuke Yamane

  © 2019 IEEE. This paper reports a bandwidth enhancement technique using a voltage-boost rectifier (VBR) circuit for vibrational energy harvesters (VEHs). Unlike existing methods that focus on mechanical structures for resonance or tuning circuits, we employ the VBR circuit that rectifies and boosts small output AC voltages of VEHs (Vpp < 1 V) at low frequency (< 1 kHz) to a DC voltage of effective level for the operation of the subsequent circuitry. The developed VBR circuit is experimentally evaluated with a MEMS electret VEH. Compared with conventional diode rectifies, the developed circuit has nearly threefold bandwidth for both 1.0-V and 3.3-V DC outputs with the minimum excitation acceleration of 1 mG (G = 9.8 m/s2).

  IEEE, 01 Jun. 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 1463 - 1466, English


• A 1.3 Milliwatts Electrostatic Vibrational Energy Harvester with Minimal Reactive Power through Reduced Internal Stray Capacitances

  Hiroaki Honma, Yukiya Tohyama, Hiroshi Toshiyoshi

  © 2019 IEEE. This paper reports on a methodology to enhance the output power of vibrational MEMS energy harvesters by reducing the reactive power. An SOI wafer with a relatively thick BOX layer is used to reduce the internal stray capacitance, thereby reducing the reactive power. The active power is 2.4-fold improved by increasing the BOX layer from 1 μm to 3 μm, resulting in a power enhancement to 1.3 mW, without changing the device design or footprint.

  IEEE, 01 Jun. 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 362 - 365, English


• A method to determine the electret charge potential of MEMS vibrational energy harvester using pure white noise

  Hiroyuki Mitsuya, Hisayuki Ashizawa, Hiroaki Homma, Gen Hashiguchi, Hiroshi Toshiyoshi

  © 2019 IEEE. A high-throughput measurement method is developed to determine the electrical potential of electret embedded in a MEMS vibrational energy harvester. When a electret device is electrically excited with white noise voltage, the mechanical resonance disappears from the real-time FFT analysis when the superposed dc bias voltage compensates the electret potential, by which the magnitude of the electret potential is known.

  Mar. 2019, IEEE International Conference on Microelectronic Test Structures, 2019-March, 171 - 174

  [Refereed]


• MEMSエレクトレット振動発電デバイスの産業化

  三屋裕幸, 芦澤久幸, 本間浩章, 藤田博之, 橋口原, 年吉洋

  25 Feb. 2019, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 66th, ROMBUNNO.11a‐W242‐7, Japanese


• A MEMS VIBRATORY ENERGY HARVESTER CHARGED BY AN OFF-CHIP ELECTRET

  Daisuke Yamane, Hiroaki Honma, Hiroshi Toshiyoshi

  This paper reports a MEMS vibratory energy harvester using an off-chip electret source. The proposed device allows, for the first time, to physically separate MEMS tunable capacitors and electret charge source in a MEMS electret energy harvester, which enables us to enhance the design and fabrication flexibility of both MEMS structures and electret. A proof-of-concept device is fabricated, and its performance is experimentally evaluated. The results confirm the energy harvesting operation of the proposed device architecture.

  IEEE, 2019, 2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1025 - 1028, English


• A DOUBLE-DECK STRUCTURED MEMS ELECTROSTATIC VIBRATIONAL ENERGY HARVESTER FOR MINIMAL FOOTPRINT

  Hiroaki Honma, Hiroshi Toshiyoshi

  This paper presents electrostatic vibrational energy harvesters which use double-deck structures for minimal footprint. The double-deck structure allocates the suspensions and the comb-electrodes in different layers of an SOI wafer. For electrical interconnection between the both layers, a stiction bar is used to bring the SOI structure to the same potential as the substrate. With an input acceleration of 0.18 G at 521 Hz, output power of 13.2 mu W is obtained from the double-deck type, where the chip size of the equivalent device performance is reduced to 62% of the previous models.

  IEEE, Jan. 2019, 2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1017 - 1020, English


• A Power-Density-Enhanced MEMS Electrostatic Energy Harvester with Symmetrized High-Aspect Ratio Comb Electrodes

  H. Honma, H. Mitsuya, G. Hashiguchi, H. Fujita, H. Toshiyoshi

  Dec. 2018, International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2018)


• 高パワー密度(31mW/cm³/G²)を実現したMEMS環境振動発電素子とそのIoT応用

  本間 浩章, 山田 駿介, 三屋 裕幸, 橋口 原, 年吉 洋

  Institute of Electrical Engineers of Japan, 30 Oct. 2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 4p, Japanese


• An Equivalent Circuit Simulation of MEMS Vibrational Energy Harvester using Measured Random Environmental Vibrations

  遠山 幸也, 本間 浩章, 年吉 洋

  Institute of Electrical Engineers of Japan, 30 Oct. 2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 5p, Japanese


• A 3-way pushable electret-based energy harvester fabricated with 3d-printing and PDMS molding

  Y. F. Chen, H. Honma, H. Toshiyoshi

  © Published under licence by IOP Publishing Ltd. An energy harvester device is developed with a PDMS chamber that contains upper and bottom electrodes (Al foil and electret) to form an air-dielectric variable capacitor, which can be pushed in three different manners to generate power through the up-and-down motion of the PDMS membrane. The 3-way mechanisms are experimentally compared.

  26 Jul. 2018, Journal of Physics: Conference Series, 1052


• Power Density Enhancement of Electret Based Energy Harvester with Symmetric Comb-Electrode Structure

  H. Honma, H. Mitsuya, G. Hashiguchi, H. Fujita, H. Toshiyoshi

  Jun. 2018, Taiwan-Japan Joint Symposium (co-organized with the 2018 International Conference on Smart Sensors (ICSS 2018)


• 共振維持回路による高効率MEMS振動エナジーハーベスタ

  三屋裕幸, 芦澤久幸, 森田將裕, 本間浩章, 橋口原, 年吉洋

  2018, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 35th


• IMPROVEMENT OF EFFECTIVENESS AND OUTPUT OF ELECTRET ENERGY HARVESTER BY SYMMETRIC COMB-DRIVE STRUCTURES

  H. Honma, H. Mitsuya, G. Hashiguchi, H. Fujita, H. Toshiyoshi

  Nov. 2017, Power MEMS 2017


• A Wide-band Vibrational Energy Harvester Using Symmetrical Comb-Drives Coupled with Heavily Charged Electret

  三屋裕幸, 芦澤久幸, 穴井大輔, 橋口原, 本間浩章, 藤田博之, 年吉洋

  Institute of Electrical Engineers of Japan, 31 Oct. 2017, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 34, 1 - 5, Japanese


• Energy harvester based on three-port comb-drive mechanism for suppressing electrostatic constraint force

  本間浩章, 三屋裕幸, 橋口原, 藤田博之, 年吉洋

  Institute of Electrical Engineers of Japan, 31 Oct. 2017, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 34, 4p, Japanese


• A three-ports structure for electrostatic energy-harvester to lower constraint force and to enhance fast storage

  Hiroaki Honma, Hiroyuki Mitsuya, Gen Hashiguchi, Hiroyuki Fujita, Hiroshi Toshiyoshi

  In this paper, we discuss on a new method to increase the output current of energy-harvesting device by using a symmetric three-ports electrostatic comb-drive mechanism that enables fast charging of battery. A symmetric electrodes layout is used to reduce the binding electrostatic force that constraints the movable electrodes, thereby allowing a formation of a high electret potential without electrostatic collapse. The output short-circuit current is increased by 2.8 times by increasing the electret potential from the -120 V to -300 V. At the same time, the output impedance is also decreased 5 MΩ. The lowered constraint force enables energy harvester operation at a low acceleration range of 0.1 G or less.

  Institute of Electrical and Electronics Engineers Inc., 26 Jul. 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, 2167 - 2170, English


• Design and fabrication of a high-power energy harvester based on a three-ports comb drive mechanism for large displacement

  H. Honma, H. Fujita, H. Toshiyoshi, H. Mitsuya, H. Ashizawa, G. Hashiguchi

  This paper presents a high-power energy-harvesting device based on a three-ports electrostatic comb-drive mechanism. A symmetric electrodes structure is used to reduce the binding electrostatic force, thereby allowing large displacement of the oscillator mass at a low acceleration. With an acceleration of 0.27 G at 125 Hz, output power of 150.3 μW was obtained, where mechanical stroke of over 209 μm was confirmed by using a high-speed camera.

  Institute of Electrical and Electronics Engineers Inc., 18 Jul. 2017, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017, English


• A broad-band vibrational energy harvester utilizing symmetrical comb-drives coupled with strong charged electret

  H. Mitsuya, H. Ashizawa, D. Anai, G. Hashiguchi, H. Homma, H. Fujita, H. Toshiyoshi

  We have developed a broad-band vibrational energy harvester by utilizing symmetrical comb-drive electrodes that were coated with solid-ion electrets made of potassium-doped thermal silicon oxide film. The device was sealed in a vacuum package for high energy conversion to eliminate mechanical losses. With this device, we capture vibrations of any frequency as well as of impulse motions for power generation.

  Institute of Electrical and Electronics Engineers Inc., 18 Jul. 2017, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2017, English


• Power management system of a MEMS vibrational energy harvesting sensor node under low vibration conditions

  Wenjun Zhao, Hiroaki Homma, Hiroshi Toshiyoshi

  This paper presents a power management system of self-supplied wireless sensor node based on MEMS electret vibrational energy harvester. The storage and control policy of the management circuit is optimized for small ambient excitation conditions to reduce power dissipation and avoid failure in wireless data transmissions. Live acceleration data collected from a bridge as well as simulation results were used to confirm the feasibility of the proposed circuit operating in real case low vibration environment.

  IEEE, 2017, 2017 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP 2017), English


• Impulse-Excited Energy Harvester based on Potassium-Ion-Electret

  三屋裕幸, 芦澤久幸, 橋口原, 本間浩章, 藤田博之, 年吉洋

  Institute of Electrical Engineers of Japan, 02 Oct. 2016, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 33, 1 - 5, Japanese


• A tunable plasmonic color filter by nanomechanical stretch using MEMS electrostatic actuator

  M. Mitsudome, H. Honma, K. Sawada, K. Takahashi

  This paper reports an evaluation of electromechanical properties of the tunable plasmonic color filter by means of a nanomechanical in-plane motion of free-standing AI subwavelength grating. The maximum 707 nm pitch expansion was obtained at an applied voltage of 60 V, which provides a continuous peak shift of transmitted light. The frequency response was achieved up to 1 kHz.

  Institute of Electrical Engineers of Japan, 02 Oct. 2016, 2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 33, 1 - 5, Japanese


• Fabrication of a thin plasmonic color sheet embedded with Al subwavelength gratings in parylene

  熊谷隼人, 本間浩章, 本間浩章, 石田誠, 石田誠, 澤田和明, 澤田和明, 高橋一浩

  電子情報通信学会, 19 May 2016, 電子情報通信学会技術研究報告, 116(48) (48), 29 - 34, Japanese


• MEMS技術による表面プラズモン異常透過現象の励起波長連続可変制御

  本間浩章, 本間浩章, 高橋一浩, 石田誠, 澤田和明

  03 Mar. 2016, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 63rd, ROMBUNNO.20P-S622-1, Japanese


• ナノインプリント技術を用いた金属‐誘電体‐金属サブ波長格子の製作

  満留将人, 本間浩章, 本間浩章, 伊藤伸太郎, 石田誠, 澤田和明, 高橋一浩

  03 Mar. 2016, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 63rd, ROMBUNNO.19P-S423-1, Japanese


• MEMS静電アクチュエータを用いたナノ機械伸縮による可変プラズモニックカラーフィルタ

  満留将人, 本間浩章, 澤田和明, 高橋一浩

  2016, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 33rd, ROMBUNNO.25pm4‐PS‐112, Japanese


• Fabrication of plasmonic color sheet using metal nano periodic structures

  熊谷隼人, 本間浩章, 石田誠, 澤田和明, 高橋一浩

  電子情報通信学会, 03 Aug. 2015, 電子情報通信学会技術研究報告, 115(170) (170), 11 - 13, Japanese


• Fabrication of surface-plasmon-based tunable color filter using electrostatic comb-drive actuator

  本間浩章, 高橋一浩, 石田誠, 澤田和明

  03 Jul. 2015, 電気学会マイクロマシン・センサシステム研究会資料, MSS-15(15-34) (15-34), 55 - 59, Japanese


• FABRICATION OF TUNABLE PLASMONIC COLOR FILTER USING AL SUBWAVELENGTH GRATING INTEGRATED WITH ELECTROSTATIC COMB-DRIVE ACTUATOR

  H. Honma, K. Takahashi, M. Ishida, K. Sawada

  This paper presents a surface-plasmons-based tunable color filter using aluminum (Al) subwavelength grating operated by an electrostatic comb-drive actuator. We also fabricate the actuator integrated with an Al hinge and a stretchable parylene-C hinge that are used to constantly change the period of the Al subwavelength grating. Freestanding Al subwavelength grating with 450 nm pitch performed extraordinary optical transmission at 450 nm wavelength by TM-polarized light. We obtained a 225 nm displacement of the actuator having the stretchable hinges by applied voltage of 45 V, and a 750 nm displacement of the actuator having the Al hinges by applied voltage of 12 V.

  IEEE, 2015, 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2053 - 2056, English


• Fabrication of transmission color filter based on surface plasmon using aluminum nanowire array and investigation of tunable color filter

  本間 浩章, 高橋 一浩, 石田 誠

  Institute of Electrical Engineers of Japan, 20 Oct. 2014, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 31, 1 - 6, Japanese


• アルミ微細周期構造による表面プラズモンを利用したフレキシブルカラーフィルムの製作

  熊谷隼人, 本間浩章, 高橋一浩, 石田誠, 澤田和明

  01 Sep. 2014, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 75th, ROMBUNNO.18P-A19-5, Japanese


• Fabrication of transmission color filter based on surface plasmon using aluminum nanowire array

  本間浩章, 高橋一浩, 石田誠, 澤田和明

  27 May 2014, 電気学会マイクロマシン・センサシステム研究会資料, MSS-14(1-4.6-23) (1-4.6-23), 93 - 97, Japanese


• INVESTIGATION OF FILTER SIZE AND DUTY RATIO ON TRANSMISSION COLOR FILTER BASED ON SURFACE PLASMONS

  Hiroaki Honma, Kazuhiro Takahashi, Masashi Fukuhara, Makoto Ishida, Kazuaki Sawada

  In this paper, we discuss a minimum filter size and duty ratio (= width/period) of a subwavelength Al grating for a tunable RGB color filter based on surface plasmons. An array of Al gratings was deployed over a through hole by sacrificial release process. The peak wavelength of the transmitted light was red-shifted by increasing the period of the subwavelength grating from 450 nm to 600 nm. We obtained enough transmission light intensity from the 10 mu m square pixel-size including 20 Al nanowires. The noise-level was found to be dependent on the duty ratio and decreased with increase of the duty ratio.

  IEEE, 2014, 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 143 - 144, English


• SURFACE-PLASMON-BASED FLEXIBLE COLOR FILTER USING AL NANOSTRUCTURE ARRAY ON PARYLENE-N THIN FILM

  Hayato Kumagai, Hiroaki Honma, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada

  In this study, we propose a flexible color filter based on surface plasmon using aluminum nanowire and nanodot array. Aluminum subwavelength lattice was formed on a parylene-N film and coated with parylene-N to avoid detachment from the substrate film. Both Al nanowire width of 250 nm and nanodot of 250 nm were successfully fabricated on the thin parylene-N film of 200 nm. Green color from the Al nanowire period of 450 nm was demonstrated.

  IEEE, 2014, 2014 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 17 - 18, English


• ゲル包埋によるディスクリート型MEMS機能構造体の充填法

  荒木慶太, 大橋亮太, 本間浩章, 三澤宣雄, 高橋一浩, 澤田和明, 石田誠, 村上裕二

  05 Dec. 2013, 化学とマイクロ・ナノシステム学会研究会講演要旨集, 28th, 27, Japanese


• SLURRY PACKING PLACEMENT OF MEMS MICROPARTS ASSISTED WITH GEL MICROCAPSULE

  荒木慶太, 大橋亮太, 本間浩章, 三澤宣雄, 高橋一浩, 澤田和明, 石田誠, 村上裕二

  Institute of Electrical Engineers of Japan, 05 Nov. 2013, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 30, 1 - 4, Japanese


• A 3.3 V operated variable transmission optical attenuator based on subwavelength grating

  Hiroaki Honma, Kazuhiro Takahashi, Hiromu Ishii, Makoto Ishida, Kazuaki Sawada

  This paper presents a nanoelectromechanical system (NEMS) variable transmission attenuator based on a gap variable subwavelength grating with a low drive voltage. An array of parallel-plate actuators is deployed over a through hole. The transmitted light intensity decreased from 63.3% to 46.5% with a drive voltage of 3.2 V at a wavelength of 775 nm. © 2013 IEEE.

  Institute of Electrical Engineers of Japan, 05 Nov. 2013, International Conference on Optical MEMS and Nanophotonics, 30, 1 - 5, Japanese


• サブ波長格子を用いた透過型可変減衰器の製作

  本間浩章, 高橋一浩, 石井仁, 石田誠, 澤田和明

  31 Aug. 2013, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 74th, ROMBUNNO.19A-B4-11, Japanese


• ディスクリート型シリコンMEMSミキサの製作と評価

  荒木慶太, 大橋亮太, 本間浩章, 高橋一浩, 澤田和明, 石田誠, 村上裕二

  23 May 2013, 化学とマイクロ・ナノシステム学会研究会講演要旨集, 27th, 15, Japanese


• ディスクリート型微小構造体を用いたマイクロ化学デバイスの新規製作法によるMEMSミキサ

  荒木慶太, 大橋亮太, 本間浩章, 高橋一浩, 澤田和明, 石田誠, 村上裕二

  05 Mar. 2013, 電気学会全国大会講演論文集, 2013(3) (3), 148, Japanese


• Slurry packing placement of MEMS microparts assisted with gel microcapsule

  K. Araki, R. Ohashi, H. Honma, N. Misawa, K. Takahashi, K. Sawada, M. Ishida, Y. Murakami, Y. Murakami

  This paper reports a novel approach to construct and/or functionalize a microfluidic chip with discrete microparts which are microfabricated enough small to place them in a microchannel. Slurry packing method was applied to microparts placement to a certain position of a microchannel. In order to make a Si-MEMS structure suspension, the structure was encapsulated into a microcapsule of agarose gel. After the arrangement of the capsule, the introduction of hot water removed the gel resulting in the placement the structures at the designed position.

  01 Jan. 2013, 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2013, 2, 793 - 795


• MEMS mixer as an example of a novel construction method of microfluidics by discrete microparts

  Y. Murakami, K. Araki, R. Ohashi, H. Honma, K. Takahashi, K. Sawada, M. Ishida

  This paper describes a novel approach to construct and/or functionalize a microfluidic chip with discrete microparts which are microfabricated enough small to place them in a microchannel. Preliminary demonstration was shown as a passive mixer. Microparts of several hundreds micrometers, were fabricated by double sides etching with ICP RIE. The parts were manually placed in a typical Y-shape PDMS microchannel. Fluorescence observation reveals that the constructed microfluidics has the same mixing ability as a fully silicon MEMS mixer. The configuration that is unable by the normal preassembled structure can be also fabricated. © 2013 IEEE.

  2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1958 - 1961, English


• NEMS静電アクチュエータを用いた近赤外可変フィルタの設計

  平尾直也, 本間浩章, 高橋一浩, 石田誠, 澤田和明

  18 Sep. 2012, 電気関係学会東海支部連合大会講演論文集(CD-ROM), 2012, ROMBUNNO.M2-9, Japanese


• A tunable color filter based on sub-wavelength gratings using electrostatic microactuator

  HONMA H., MIYAO H., TAKAHASHI K., ISHIDA M., SAWADA K.

  We have proposed a NEMS (Nano Electro Mechanical Systems) tunable color filter using electrostatic microactuator which can control the guided-mode resonance by tuning periodic structure. The sub-wavelength gratings were fabricated using SOI (Silicon on Insulator) wafer. The free-standing nano periodic structure was successfully developed by wet sacrificial etching using buffered HF and supercritical CO2 drying technique. Color tuning from yellow to green was obtained by drive voltage of 20 V. For low voltage driving, a color filter using another NEMS actuator with three pairs of electrode was also developed. We obtained the reflected light attenuation by 34 % at 680 run wavelength with drive voltage of 6.7 V.

  The Institute of Electronics, Information and Communication Engineers, 10 May 2012, IEICE technical report. Component parts and materials, 112(33) (33), 111 - 115, Japanese


• サブ波長格子を利用した低電圧駆動NEMS可変カラーフィルタの製作

  本間浩章, 高橋一浩, 石田誠, 澤田和明

  29 Feb. 2012, 応用物理学関係連合講演会講演予稿集(CD-ROM), 59th, ROMBUNNO.15P-GP3-7, Japanese


• A low-voltage and high uniformity NEMS tunable color filter based on subwavelength grating

  Hiroaki Honma, Kazuhiro Takahashi, Makoto Ishida, Kazuaki Sawada

  This paper reports a NEMS (Nano Electro Mechanical Syetems) tunable color filter based on subwavelength grating with high color uniformity and low drive voltage. We newly proposed a GVG (Ground-Voltage-Ground) type tunable color filter deployed with a parallel-plate actuator with three pairs of electrode to decrease a crosstalk of an electrostatic attraction force between each actuator. The proposed structure was fabricated using an SOI wafer. The color tuning using was demonstrated by applying the drive voltage of 6.7 V. The reflected light intensity was decreased by 34% at 680 nm wavelength. The color uniformity was also obtained in the filter area by reducing the variation of the displacement on one-dimensional arrayed actuators. © 2012 Materials Research Society.

  2012, Materials Research Society Symposium Proceedings, 1427, 68 - 73, English


• NEMS可変カラーフィルタとLSI駆動回路の集積化

  本間浩章, 宮尾肇, 高橋一浩, 二川雅登, 太齋文博, 石田誠, 澤田和明

  26 Sep. 2011, センサ・マイクロマシンと応用システムシンポジウム(CD-ROM), 28th, ROMBUNNO.A1-3, Japanese


• NEMS tunable color filter using sub-wavelength grating

  HONMA Hiroaki, MIYAO Hajime, TAKAHASHI Kazuhiro, ISHIDA Makoto, SAWADA Kazuaki

  01 Jul. 2011, 電気学会マイクロマシン・センサシステム研究会資料, 2011(1) (1), 21 - 24, Japanese


• Monolithic integration of NEMS tunable color filter and LSI driver circuits

  H. Honma, H. Miyao, K. Takahashi, M. Futagawa, F. Dasai, M. Ishida, K. Sawada

  This paper presents a NEMS (Nano Electro Mechanical System) tunable color filter integrated with MOS driver circuits on an SOI (Silicon on Insulator) wafer. The NEMS electrostatic actuator could be designed a high mechanical resonance frequency with a relatively low drive voltage. The sub-wavelength grating and MOS driver circuits were made in a top and a substrate layer of the SOI wafer, respectively. The tiny anchors and pre-fabricated MOS transistors were covered by parylene N during the sacrificial release process using buffered hydrofluoric acid. Various structural colors depended on the pitch of the sub-wavelength grating were observed from integrated NEMS-LSI chip and NEMS TEG area. The color tuning from yellow to green was demonstrated at 20 V operation. © 2011 IEEE.

  2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2928 - 2931, English

• カリウムイオンエレクトレットを利用した振動エナジーハーベスタ

  本間浩章

  電気学会 電子材料研究会 「エコシステム材料の合成・プロセスと次世代デバイス応用への展開」, Nov. 2024

  [Invited]

  Invited oral presentation


• マイクロマシン/MEMS技術の応用

  本間浩章

  工学研究科 技術室 第169回 技術室研究会, Sep. 2024

  [Invited]


• MEMS技術を利用した振動エナジーハーベスタ

  本間 浩章

  バイオセンサ夏季セミナー2024, Sep. 2024

  [Invited]


• 振動エナジーハーベスタを利用した環境モニタリング

  本間 浩章

  令和6年電気学会 基礎・材料・共通部門大会, Sep. 2024

  [Invited]

  Invited oral presentation


• エレクトレット帯電/陽極接合同時プロセスで作製したMEMS振動発電素子の発電評価

  本間 浩章, 池野 翔, 年吉 洋

  マイクロマシン・センサシステム／バイオ・マイクロシステム研究会, Aug. 2024


• エレクトレットMEMSエナジーハーベスタと応用

  本間浩章

  第１回エッジデバイス・システム技術分科会, Jul. 2024

  [Invited]


• MEMS型エレクトレット振動エナジーハーベスタ

  本間浩章

  第71回応用物理学会春季学術講演会, Mar. 2024

  [Invited]


• カリウムイオンエレクトレットによる振動発電ハーベスタ

  本間浩章

  情報・知能・精密機器部門講演会 IIP2024, Mar. 2024

  [Invited]


• 環境振動から発電するMEMSエナジーハーベスタ

  本間浩章

  有機機能材料のリソグラフィ加工コンソーシアム第50回記念定例会, Dec. 2023

  [Invited]


• MEMS振動発電素子の発電特性に対する位相検出電極の影響

  本間浩章, 水野裕登, 年吉洋

  応用物理学会・第15回集積化MEMSシンポジウム, Nov. 2023


• Electret MEMS Energy Harvester Capable of High-Speed Charging from Random Vibrations

  本間浩章, 遠山幸也, 年吉 洋

  電気学会・第４０回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2023


• Automatic Frequency Tracking of MEMS Vibrational Energy Harvester using PLL Control

  本間浩章, 水野裕登, 年吉 洋

  電気学会・第４０回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2023


• ダブルデッキ構造とジャンパ配線を一体化したエレクトレット型振動発電素子の発電性能評価

  本間浩章, 年吉洋

  電気学会E部門マイクロマシン・センサシステム／バイオ・マイクロシステム合同研究会, Aug. 2023


• 非定常振動から発電するMEMSエナジーハーベスタ

  本間浩章

  第160回 フロンティア材料研究所学術講演会・第 27 回 未来産業技術研究所生体医歯工公開セミナー, Jul. 2023

  [Invited]


• インパルス加振に適した圧電ポリマー振動発電デバイスの開発

  森下浩多, 田中有弥, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  ＩＩＰ２０２３（日本機械学会 情報・知能・精密機器部門講演会）


• １ｍＷ級出力エナジーハーベスタで駆動するＩｏＴ無線センサ端末の動作検証

  本間浩章, 山田駿介, 年吉 洋

  応用物理学会・第１４回集積化ＭＥＭＳシンポジウム


• Effect of H2O and H2 gas to the Lifetime of Vacuum-annealed Potassium-doped SiO2 Electret for MEMS Vibrational Energy Harvester

  プトラ・レファルディ, 小澤孝拓, 本間浩章, 福谷克之, 年吉 洋

  電気学会・第３９回「センサ・マイクロマシンと応用システム」シンポジウム


• 位相情報を同時出力可能なＭＥＭＳ振動発電素子

  赤井裕登, 本間浩章, 年吉 洋

  電気学会第３９回「センサ・マイクロマシンと応用システム」シンポジウム


• エレクトレット振動発電用プルイン自動復旧のための自律昇圧回路

  本間浩章, 原田翔太, 年吉 洋

  電気学会第３９回「センサ・マイクロマシンと応用システム」シンポジウム


• カリウムイオンエレクトレット製デバイス量産化のための長期信頼性技術

  三屋裕幸, 芦澤久幸, 下村典子, 石黒巧真, 本間浩章, 橋口 原, 年吉 洋

  電気学会第３９回「センサ・マイクロマシンと応用システム」シンポジウム


• 圧電ポリマー振動発電デバイスのインパルス加振に対する発電特性

  森下浩多, 田中有弥, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会・第１３回マイクロ・ナノ工学シンポジウム


• MEMS Vibrational Energy Harvester with Potassium-Ion-Electrets for IoT Applications

  Hiroaki Honma

  France-Japan Workshop on Vibration Energy Harvesting, Sep. 2022

  [Invited]


• 圧電ポリマーを用いた発電フレキシブルプリント基板のためのメタマテリアル弾性層の設計

  北澤幹人, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会マイクロ・ナノ工学部門主催第１２回マイクロ・ナノ工学シンポジウム


• 微小入力エネルギに対応したマイクロ界面構造を有するトライボ発電デバイス

  柳田幸祐, 飯田泰基, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会マイクロ・ナノ工学部門主催 第１２回マイクロ・ナノ工学シンポジウム


• ＭＥＭＳ振動発電を用いた低消費異常周波数監視システム

  三屋裕幸, 芦澤久幸, 橋本勝文, 張凱淳, 下村典子, 門間達希, 本間浩章, 橋口 原, 塩谷智基, 年吉 洋

  第３８回電気学会「センサ・マイクロマシンと応用システム」シンポジウム


• 短ストロークエレクトレット櫛歯電極を有する非共振型振動発電素子の非定常振動発電評価

  本間浩章, 年吉 洋

  第３８回電気学会「センサ・マイクロマシンと応用システム」シンポジウム


• エレクトレット帯電／陽極接合同時プロセスによるＭＥＭＳ型振動発電素子

  本間浩章, 池野 翔, 年吉 洋

  応用物理学会・第１３回集積化ＭＥＭＳシンポジウム


• シリコンＭＥＭＳ振動発電から見たポリマー材料の可能性

  本間浩章, 年吉 洋

  日本機械学会年次大会 マイクロ・ナノ部門 先端技術フォーラム, Sep. 2021

  [Invited]

  Invited oral presentation


• IoT向けのMEMS環境振動発電素子

  本間 浩章

  第29回マイクロシステム融合研究会, Mar. 2021

  [Invited]

  Invited oral presentation


• ３Ｄリソグラフィ法により作製したマイクメートルオーダーの界面構造を有するトライボ発電デバイスの開発

  柳田幸祐, 飯田泰基, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会 群馬ブロック 研究・技術交流会, Dec. 2020


• ＭＥＭＳ振動発電デバイスのための周波数変換インターポーザの開発

  市毛 亮, 上野秀貴, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会 群馬ブロック 研究・技術交流会, Dec. 2020


• MEMS vibrational energy harvester for IoT,

  Hiroaki Honma, Hiroshi Toshiyoshi

  Vietnamese Academic Network in Japan Conference 2020 (VANJ 2020), Nov. 2020

  [Invited]

  Invited oral presentation


• メカニカルメタマテリアル構造を有した発電フレキシブルプリント基板

  北澤幹人, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会マイクロ・ナノ工学部門 第１１回マイクロナノ工学シンポジウム, Oct. 2020

  Oral presentation


• ダブルデッキ構造とジャンパ配線を一体化したエレクトレットＭＥＭＳ振動発電素子

  本間浩章, 年吉 洋

  応用物理学会・集積化ＭＥＭＳ技術研究会主催 第１２回集積化ＭＥＭＳシンポジウム, Oct. 2020

  Oral presentation


• エレクトレット型振動発電素子のプルイン自動解除システム構築に向けた検証

  原田翔太, 本間浩章, 年吉 洋

  電気学会・第３７回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020

  Oral presentation


• エレクトレット型振動発電素子の最適インピーダンスによる高出力化新手法

  本間浩章, 年吉 洋

  電気学会・第３７回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020

  Oral presentation


• MEMS electret energy harvester for IoT

  Hiroaki Honma

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020

  [Invited]

  Invited oral presentation


• ３Ｄリソグラフィ法により作製した微細ピラミッドアレイを接触界面に有するトライボ発電デバイス

  柳田幸祐, 飯田泰基, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  電気学会・第３７回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020

  Oral presentation


• 振動発電のための双安定構造を用いた周波数変換インターポーザの開発

  市毛 亮, 上野秀貴, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会マイクロ・ナノ工学部門 第１１回マイクロナノ工学シンポジウム, Oct. 2020

  Oral presentation


• 低閾値整流昇圧回路を用いた非定常環境振動下における振動発電

  遠山幸也, 本間浩章, 石原 昇, 関屋英彦, 年吉 洋, 山根大輔

  電気学会・第３７回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020

  Oral presentation


• ＭＥＭＳ振動エナジーハーベスタの実機における発電量最大化技術

  三屋裕幸, 芦澤久幸, 下村典子, 本間浩章, 橋口 原, 年吉 洋

  電気学会・第３７回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020

  Oral presentation


• ポリマー圧電材料を用いた発電フレキシブルプリント基板の開発

  北澤幹人, 本間浩章, 栗山頌明, 橋口 原, 年吉 洋, 鈴木孝明

  日本機械学会２０２０年度年次大会, Sep. 2020

  Oral presentation


• 接触界面に微細ピラミッド構造配列を有するトライボ発電デバイス

  柳田幸祐, 飯田泰基, 本間浩章, 橋口 原, 年吉 洋, 鈴木孝明

  令和２年度・電気学会Ｅ部門総合研究会, Jul. 2020

  Oral presentation


• 閾値自己補償整流昇圧回路による振動発電素子の実効帯域向上

  遠山幸也, 本間浩章, 年吉 洋, 山根大輔

  令和２年度・電気学会Ｅ部門総合研究会, Jul. 2020

  Oral presentation


• ダブルデッキ構造によるＭＥＭＳ振動発電素子の小型化

  本間浩章, 年吉 洋

  応用物理学会・集積化ＭＥＭＳ技術研究会・第１１回集積化ＭＥＭＳシンポジウム, Nov. 2019

  Oral presentation


• ＭＥＭＳ振動発電素子の浮遊容量削減法の検証

  池野 翔, 本間浩章, 遠山幸也, 年吉 洋

  電気学会・第３６回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）, Nov. 2019

  Poster presentation


• １．３ｍＷ級ＭＥＭＳ環境振動発電素子とＩｏＴ応用大容量キャパシタへの高速充電

  本間浩章, 年吉 洋

  電気学会・第３６回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）, Nov. 2019

  Oral presentation


• エネルギー回収効率９２％のＭＥＭＳ振動エナジーハーベスタ

  三屋裕幸, 芦澤久幸, 本間浩章, 橋口 原, 年吉 洋

  電気学会・第３６回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）, Nov. 2019

  Oral presentation


• エレクトレット電位増強による非定常振動発電特性の向上

  本間浩章, 遠山幸也, 年吉 洋

  電気学会Ｅ部門総合研究会（マイクロマシン・センサシステム研究会, Jul. 2019

  Oral presentation


• IEEE MEMS 2019参加報告 IoT関連（エナジーハーベスタ、バッテリーフリーセンサ）

  Hiroaki Honma

  有機機能材料のリソグラフィ加工コンソーシアム第31回定例会, Mar. 2019

  [Invited]


• IEEE MEMS2019・参加報告 IoT関連（エナジーハーベスタ, バッテリーフリーセンサ）

  本間 浩章

  第31回定例会 有機機能材料のリソグラフィ加工コンソーシアム, Mar. 2019

  [Invited]

  Invited oral presentation


• ＭＥＭＳエレクトレット振動発電デバイスの産業化

  三屋裕幸, 芦澤久幸, 本間浩章, 藤田博之, 橋口 原, 年吉 洋

  第６６回 応用物理学会春季学術講演会, Mar. 2019

  [Invited]

  Invited oral presentation


• 共振維持回路による高効率ＭＥＭＳ振動エナジーハーベスタ

  三屋裕幸, 芦澤久幸, 森田將裕, 本間浩章, 橋口 原, 年吉 洋

  第３５回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）, Nov. 2018

  Poster presentation


• ランダム環境振動加速度波形データを用いた振動発電素子の等価回路挙動解析

  遠山幸也, 本間浩章, 年吉 洋

  第３５回「センサ・マイクロマシンと応用システム」シンポジウム（センサ・マイクロマシン部門大会）, Oct. 2018

  Poster presentation


• 高パワー密度（３１ｍＷ／ｃｍ３／Ｇ２）を実現したＭＥＭＳ環境振動発電素子とそのＩｏＴ応用

  本間浩章, 山田駿介, 三屋裕幸, 橋口 原, 年吉 洋

  Oct. 2018

  Poster presentation


• 左右対称構造により静電拘束力を抑制した低Ｇ用のＭＥＭＳ振動発電素子

  本間浩章, 三屋裕幸, 橋口 原, 藤田博之, 年吉 洋

  応用物理学会 集積化ＭＥＭＳ技術研究会主催 第９回集積化ＭＥＭＳシンポジウム, Oct. 2017

  Oral presentation


• 左右対称エレクトレットくし歯電極による広帯域振動エナジーハーベスタ応用

  三屋裕幸, 芦澤久幸, 穴井大輔, 橋口 原, 本間浩章, 藤田博之, 年吉 洋

  電気学会 第３４回「センサ・マイクロマシンと応用システム」シンポジウム


• インパルス振動に特化したコインサイズエナジーハーベスタ

  三屋裕幸, 芦澤久幸, 橋口 原, 本間浩章, 藤田博之, 年吉 洋

  電気学会・第３３回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016

  Oral presentation


• MEMS技術による表面プラズモン異常透過現象の励起波長連続可変制御

  本間 浩章, 高橋 一浩, 石田 誠, 澤田 和明

  第63回応用物理学会春季学術講演会, Mar. 2016

  Oral presentation


• ナノインプリント技術を用いた金属-誘電体-金属サブ波長格子の製作

  満留 将人, 本間 浩章, 伊藤 伸太郎, 石田 誠, 澤田 和明, 高橋 一浩

  第63回応用物理学会春季学術講演会, Mar. 2016

  Oral presentation


• 金属ナノ周期構造を利用したプラズモニックカラーシートの製作

  熊谷隼人, 本間浩章, 石田誠, 澤田和明, 高橋一浩

  電子情報通信学会, Aug. 2015


• 静電櫛歯アクチュエータを用いた表面プラズモン可変カラーフィルタの製作

  本間浩章, 高橋一浩, 石田誠, 澤田和明

  電気学会マイクロマシン・センサシステム研究会, Jul. 2015


• アルミナノワイヤアレイを用いた表面プラズモンカラーフィルタの製作と可変カラーフィルタへの検討

  本間浩章, 高橋一浩, 石田誠, 澤田和明

  応用物理学会・集積化ＭＥＭＳ技術研究会・第６回集積化ＭＥＭＳシンポジウム, Oct. 2014


• アルミ微細周期構造による表面プラズモンを利用したフレキシブルカラーフィルムの製作

  熊谷隼人, 本間浩章, 高橋一浩, 石田 誠, 澤田和明

  第７５回応用物理学会関係連合講演会, Sep. 2014


• アルミナノワイヤを用いた透過型表面プラズモンカラーフィルタの製作

  本間浩章, 高橋一浩, 石田誠, 澤田和明

  電気学会マイクロマシン・センサシステム研究会, May 2014


• サブ波長格子を用いた３．３ V駆動透過型可変減衰器

  本間浩章, 高橋一浩, 石井仁, 石田誠, 澤田和明

  応用物理学会・集積化ＭＥＭＳ技術研究会・第５回集積化ＭＥＭＳシンポジウム, Nov. 2013


• 微小ゲルカプセルを用いたMEMS構造物のスラリー充填配置

  荒木慶太, 大橋亮太, 本間浩章, 高橋一浩, 澤田和明, 石田 誠, 村上裕二

  電気学会・第３０回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2013


• サブ波長格子を用いた透過型可変減衰器の製作

  本間浩章, 高橋一浩, 石井仁, 石田誠, 澤田和明

  第７４回応用物理学会関係連合講演会, Sep. 2013


• ディスクリート型微小構造体を用いたマイクロ化学デバイスの新規製作法によるＭＥＭＳミキサ

  荒木慶太, 大橋亮太, 本間浩章, 高橋一浩, 澤田和明, 石田 誠, 村上裕二

  電気学会全国大会, Mar. 2013


• ＮＥＭＳ静電アクチュエータを用いた近赤外可変フィルタの設計

  平尾直也, 本間浩章, 高橋一浩, 石田誠, 澤田和明

  電気関係学会東海支部連合大会, Sep. 2012


• 静電マイクロアクチュエータを用いたサブ波長格子可変カラーフィルタ

  本間浩章, 宮尾肇, 高橋一浩, 石田誠, 澤田和明

  電子情報通信学会, May 2012


• サブ波長格子を利用した低電圧駆動ＮＥＭＳ可変カラーフィルタの製作

  本間浩章, 高橋一浩, 石田誠, 澤田和明

  第５９回応用物理学会関係連合講演会, Mar. 2012


• ＮＥＭＳ可変カラーフィルタとＬＳＩ駆動回路の集積化

  本間浩章, 宮尾肇, 高橋一浩, 二川雅登, 太斎文博, 石田誠, 澤田和明

  電気学会・第２８回「センサ・マイクロマシンと応用システム」シンポジウム, Sep. 2011


• サブ波長格子を用いたNEMS可変カラーフィルタの製作

  本間浩章, 宮尾肇, 高橋一浩, 石田誠, 澤田和明

  電気学会マイクロマシン・センサシステム研究会, Jul. 2011

• 集積化MEMS技術研究会


• THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN


• THE JAPAN SOCIETY OF APPLIED PHYSICS


• 日本機械学会

• 共振の自己最適化機能により充電を継続可能なMEMS振動発電

  本間 浩章

  日本学術振興会, 科学研究費助成事業, 基盤研究(B), 神戸大学, Apr. 2024 - Mar. 2027


• 振動発電を用いたイベントドリブン型センサによる工作機械異常振動検出

  公益財団法人 NSKメカトロニクス技術高度化財団, 研究助成, 神戸大学大学院工学研究科 機械工学専攻, Apr. 2024 - Feb. 2026


• 道路環境から常時発電するエナジーハーベスタと設備監視システムへの応用検討

  公益信託NEXCO関係会社高速道路防災対策等に関する支援基金, 研究助成, Kobe University, Apr. 2024 - Mar. 2025, Principal investigator


• エレクトレットにより帯域を拡張するゼロパワー加速度センサの実現

  本間浩章

  公益財団法人 マツダ財団, マツダ研究助成, 神戸大学大学院工学研究科, Sep. 2023 - Mar. 2025


• グラニュールMEMS振動発電（研究領域: リアル空間を強靭にするハードウェアの未来）

  本間浩章

  国立研究開発法人科学技術振興機構, 戦略的創造研究推進事業（ACT-X）, 東京大学 生産技術研究所, Oct. 2022 - Mar. 2025, Principal investigator


• エレクトレット型ゼロパワーMEMS 振動センサ

  神戸大学工学振興会, 研究プロジ ェクト支援事業, Jul. 2023 - Mar. 2024


• Resonant frequency tracking system for MEMS vibrational energy harvesters

  本間 浩章

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Early-Career Scientists, Grant-in-Aid for Early-Career Scientists, The University of Tokyo, 01 Apr. 2021 - 31 Mar. 2023, Principal investigator

  本研究は、環境振動源の周波数変動に連動しMEMS振動発電素子の共振周波数をシフトさせるオートコントロールシステムの実現に挑戦する。特に、外部インピーダンス変化による振動発電素子の共振シフト効果を応用し、外部振動と共振周波数を比較する位相比較器により後段インピーダンスを自動で調整する、発電出力の自動調整システムを実証する。本研究の実現は、共振型振動発電素子の出力性能を維持したまま周波数への過敏さを緩和するため、刻一刻と変わる実環境でも振動発電素子の最大発電性能を発揮し続けることを可能にする。 研究代表者らはこれまでに、櫛歯構造の側面にエレクトレットを形成する技術を用いてエレクトレット型ＭＥＭＳ振動発電素子を実現し、共振時に最大発電電力が1.2ミリワットを超えることを実証した。この発電電力により無線回路を1分以下の間隔で間欠駆動させた。また、外部負荷により共振周波数を調整可能であることも実証している。 本年度は、発電出力と同時にMEMS発電機構の位相をモニタ可能なエレクトレットMEMS型振動発電素子を開発し、共振周波数付近での位相変化を実測することに成功した。櫛歯電極の一部が発電用と位相モニタ用に分離しており互いに影響はしない。さらに、2端子入力EX-OR回路を使った位相比較器を提案しシステム全体の等価回路モデルからその有効性を解析的に検証した。また、システムに必要な部品を選定しブレットボード上に試作を行った。現在、位相モニタ可能な振動発電素子とシステムを一体化し、発電出力の自動調整システム全体の実証実験に取り組んでいる。


• A High-Efficiency MEMS Energy Harvester for Stochastic Environmental Vibrations

  Honma Hiroaki

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Early-Career Scientists, Grant-in-Aid for Early-Career Scientists, The University of Tokyo, 01 Apr. 2019 - 31 Mar. 2021

  A design strategy is presented to simultaneously enhance the bandwidth and the sensitivity of electrostatic vibrational energy harvester without excessively depending on the velocity amplification through mechanical resonance. Instead, the new design uses comb-electrodes of very short-stroke that are finished with an extremely high density electret film, thereby enhancing the mechano-electric power conversion efficiency, leading to a 3.6-fold expansion of frequency bandwidth from 18 Hz to 64 Hz around a center frequency of around 100 Hz when the electret potential is 1.5-fold enhanced from -200 V to -300 V. Normalized power density as large as 0.7 mW/cm3/G2 is confirmed.


• 表面プラズモンを用いた可変カラーフィルタの製作

  本間 浩章

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for JSPS Fellows, Grant-in-Aid for JSPS Fellows, Toyohashi University of Technology, 24 Apr. 2015 - 31 Mar. 2017

  本研究では、金属ナノ格子と周期構造を制御するMEMSアクチュエータの一体化により、表面プラズモン異常透過の励起波長の連続可変制御を達成した。 周期500 nmのアルミ格子と静電アクチュエータを微小バネにより接続し基板貫通孔上に配置した表面プラズモン可変フィルタを設計，製作した。静電アクチュエータに印加される駆動電圧を0 Vから60 Vへ増加させることで、静電アクチュエータの横変位が得られアルミ格子の周期は500 nmから642 nmへ拡張された。これにより、表面プラズモンの励起波長は周期に依存するため可視域において124 nmの連続シフトが得られた。また、可変フィルタからの透過光の色度は、電圧の増加に伴い円を描き色度図上をシフトした。 これらの結果はMEMSアクチュエータによる表面プラズモン励起波長の連続制御に成功したことを示しており，周囲の誘電率を変化させる既存の方法と比較し帯域が広く、100 nm以上の連続シフトを可視域に与えることに成功した。また、色度の変化は透過光の色変化を表しており、可視域の全色を電圧制御により選択的に透過させる機能を持つ可能性を示した。 さらに、彩度向上のため、表面プラズモン異常透過を強める金属と誘電体の中空積層格子をMEMSアクチュエータと一体化した可変プラズモニックカラーフィルタを提案した。予備検討として、アルミとシリコン酸化膜の積層格子を基板貫通孔上に配置した中空プラズモニックカラーフィルタを製作し、励起波長における90%以上の透過率を実現した。 よって、1素子で複数の波長帯域を選択的に透過させる可変プラズモニックカラーフィルタの実現の見通しが立ったと言える．これは、表示素子に限らず1 μm以下の微小領域においてカラースペクトルを得ることも可能になると予想され、バイオ・メディカル分野に新たな知見を与えることが期待できる．

• 環境発電装置

  矢嶋 赳彬, 年吉 洋, 本間 浩章, 遠山 幸也, 三屋 裕幸

  特願2019-116310(P2019-116310), 24 Jun. 2019, 株式会社鷺宮製作所, 特開2021-2963(P2021-2963A), 07 Jan. 2021

  Patent right

  IRI


• 静電型デバイス、静電型デバイス中間体および製造方法

  年吉洋, 本間浩章, 三屋裕幸

  特願2019-106231(P2019-106231), 06 Jun. 2019, 国立大学法人 東京大学, 株式会社鷺宮製作所, 特開2020-202614(P2020-202614A), 17 Dec. 2020

  Patent right

  IRI


• 静電型デバイスおよび静電型デバイス製造方法

  年吉洋, 本間浩章, 三屋裕幸

  特願2019-106230(P2019-106230), 06 Jun. 2019, 国立大学法人 東京大学, 株式会社鷺宮製作所, 特開2020-202613(P2020-202613A), 17 Dec. 2020

  Patent right

  IRI


• 振動発電素子

  年吉 洋, 本間 浩章, 三屋 裕幸

  特願2018-215630(P2018-215630), 16 Nov. 2018, 国立大学法人 東京大学, 株式会社鷺宮製作所, 特開2020-88935(P2020-88935A), 04 Jun. 2020, WO2020-153362, 30 Jul. 2020

  Patent right

  IRI


• 櫛歯型素子の製造方法

  年吉 洋, 本間 浩章, 三屋 裕幸

  特願2018-215631(P2018-215631), 16 Nov. 2018, 国立大学法人 東京大学, 株式会社鷺宮製作所, 特開2020-82223(P2020-82223A), 04 Jun. 2020, 特許第6927530号, 10 Aug. 2021

  Patent right

  IRI


• カラーフィルタならびにこれを使用する発光装置および表示装置

  高橋 一浩, 本間 浩章

  特願2014-106462, 22 May 2014, 国立大学法人豊橋技術科学大学, 特開2015-222331, 10 Dec. 2015, 特許第6598184号, 11 Oct. 2019, 11 Oct. 2019

  Patent right

  IRI


• 振動発電装置

  山根大輔, 石原昇, 年吉 洋, 本間 浩章

  特願2018-130894(P2018-130894), 10 Jul. 2018, 国立大学法人東京工業大学, 国立大学法人 東京大学, 特開2020-010541, 16 Jan. 2020

  Patent right

  IRI


• カラーフィルタならびにこれを使用する発光装置および表示装置

  高橋 一浩, 本間 浩章

  特願2014-106462, 22 May 2014, 国立大学法人豊橋技術科学大学, 特開2015-222331, 10 Dec. 2015

  Patent right

  IRI

• 屋内太陽電池に大差付けた振動発電、無線通信も視野 東大が開発

  日経クロ ステック／日経エレクトロニクス, 21 Jan. 2021, ニュース解説

  Paper


• 振動発電、高出力にー東大など最大１．３ミリワット ＩｏＴ端末向け有望

  化学工業日報, 11 Dec. 2019, 第１面

  Paper

• 「専門高校からの進学」講演会

  「専門高校からの進学」講演会

  神戸市立科学技術高等学校

  13 Nov. 2024 - 13 Nov. 2024

  Others


• 「専門高校からの進学」講演会

  「専門高校からの進学」講演会

  神戸市立科学技術高等学校

  18 Oct. 2023 - 18 Oct. 2023

  Others


• 「課題研究」神戸大学・本間准教授参観

  「課題研究」神戸大学・本間准教授参観

  神戸市立科学技術高等学校

  22 Jun. 2023 - 22 Jun. 2023, 神戸市立科学技術高等学校


• 【動態展示】ＭＥＭＳエナジーハーベスタによる環境振動発電のデモ

  【動態展示】ＭＥＭＳエナジーハーベスタによる環境振動発電のデモ

  ＮＥＤＯ効率的・高速処理を可能とするＡＩチップ・次世代コンピューティングの技術開発・高度なＩｏＴ社会を実現する横断的技術開発ワークショップ★デモセッション～みんなで作る人工知能～

  12 Nov. 2018 - 12 Nov. 2018, 早稲田大学・西早稲田キャンパス６３号館２Ｆ０３〜０５会議室

  Competition etc


• エレクトレット型ＭＥＭＳ振動発電素子の実用化

  エレクトレット型ＭＥＭＳ振動発電素子の実用化

  ＪＳＴ戦略的創造研究推進事業「微小エネルギーを利用した革新的な環境発電技術の創出」公開シンポジウム講演会「ここまで来た！環境発電技術の最前線」

  07 Nov. 2018 - 08 Nov. 2018, 早稲田大学・西早稲田キャンパス６３号館

  Competition etc


• 【動態展示】エレクトレットＭＥＭＳ振動発電

  【動態展示】エレクトレットＭＥＭＳ振動発電

  ＪＳＴ戦略的創造研究推進事業「微小エネルギーを利用した革新的な環境発電技術の創出」様々な環境発電技術が集結！

  07 Nov. 2018 - 08 Nov. 2018, 早稲田大学・西早稲田キャンパス６３号館

  Competition etc


• 【ポスター展示】振動発電素子のエネルギー変換効率モデル

  【ポスター展示】振動発電素子のエネルギー変換効率モデル

  ＪＳＴ戦略的創造研究推進事業「微小エネルギーを利用した革新的な環境発電技術の創出」公開シンポジウム 様々な環境発電技術が集結！

  07 Nov. 2018 - 08 Nov. 2018, 早稲田大学・西早稲田キャンパス６３号館

  Competition etc