Research activity information

• Jan. 2023 The Institute of Electrical Engineers of Japan, Special Issue on World State-of-the-art Research on Sensors and Micromachines Best Paper Award, Fabrication of Tri-Axial MEMS Tactile Sensor for Minimally Invasive Medical Application using Wafer-Level Packaging

  Tomoya Imanishi, Keiju Miyamoto, Shuntaro Higashi, Shunsuke Oki, Akio Uesugi, Koji Sugano, Takanori Aono, Yoshitada Isono


• Apr. 2022 34th International Microprocesses and Nanotechnology Conference (MNC2021), Young Author’s Award, Characterization of nanogap with gold nanoparticle dimer controlled by four-point bending for electrical and optical single molecule measurement

  Yuanzhi Chang, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono


• Nov. 2019 電気学会, 第36回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター発表賞, 光励起ナノギャップ電極を用いたDNAオリゴマーの光トラップおよび1分子検出

  森田明宏, 上杉晃生, 菅野公二, 磯野吉正


• Oct. 2017 電気学会, 第34回「センサ・マイクロマシンと応用システム」シンポジウム 奨励賞, 単一金ナノ粒子二量体を用いた表面増強ラマン分光によるDNAオリゴマー1分子検出

  丸岡 克成, SUGANO KOJI

  Japan society


• Jan. 2017 電気学会, 平成28年電気学会優秀論文発表（IEEJ Excellent Presentation Award）, 金ナノ粒子二量体配列を用いたDNA塩基の高感度・高速表面増強ラマン分光

  池上 晃平, SUGANO KOJI, ISONO YOSHITADA

  Japan society


• Oct. 2016 電気学会, 第33回「センサ・マイクロマシンと応用システム」シンポジウム 優秀技術論文賞, 金ナノロッド構造を用いた光熱変換によるレーザ波長計測マイクロ振動子デバイス

  SUGANO KOJI, 田中 祐樹, 前田 悦男, 米谷 玲皇, ISONO YOSHITADA

  Japan society


• Oct. 2015 電気学会, 第32回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞, 金ナノ粒子二量体配列を用いたDNA 塩基の表面増強ラマン分光

  饗庭 清仁, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA

  Japan society


• Oct. 2015 電気学会, 第32回「センサ・マイクロマシンと応用システム」シンポジウム 奨励賞, 金ナノ粒子直線状配列を用いた表面増強ラマン分光の特性評価

  池上 晃平, 饗庭 清仁, 菅野 公二, 磯野 吉正


• Jan. 2015 電気学会, 平成26年電気学会優秀論文発表（IEEJ Excellent Presentation Award）, 金粒子配列ナノ流路を用いた表面増強ラマン分光分析デバイス

  竹下 俊光, 末國 啓輔, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA

  Japan society


• Oct. 2014 電気学会, 第31回「センサ・マイクロマシンと応用システム」シンポジウム 最優秀技術論文賞, 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光

  SUGANO KOJI, 松井 大門, 土屋 智由, 田畑 修

  Japan society

• Fabrication of Tri-Axial MEMS Tactile Sensor for Minimally Invasive Medical Application using Wafer-Level Packaging

  Tomoya Imanishi, Keiju Miyamoto, Shuntaro Higashi, Shunsuke Oki, Akio Uesugi, Koji Sugano, Takanori Aono, Yoshitada Isono

  Institute of Electrical Engineers of Japan (IEE Japan), Jan. 2023, IEEJ Transactions on Sensors and Micromachines, 143(1) (1), 13 - 18, English

  [Refereed]

  Scientific journal


• Surface-potential-modulated piezoresistive effect of core–shell 3C-SiC nanowires

  Akio Uesugi, Shinya Nakata, Kodai Inoyama, Koji Sugano, Yoshitada Isono

  Abstract The effect of surface potential on the carrier mobility and piezoresistance of core–shell silicon carbide nanowires (SiC NWs) was investigated to realize small and sensitive SiC-microelectromechanical systems sensors. The p-type cubic crystalline SiC (3C-SiC) NWs were synthesized via the vapor–liquid–solid method and coated with silicon dioxide (SiO₂) or aluminum oxide (Al₂O₃) dielectric shells to form core–shell structured NWs with different surface potentials. Four-point bending devices (FBDs) with a field-effect transistor (FET) configuration integrating a single core–shell 3C-SiC NW as the FET channel were fabricated to apply an additional electric field and strain to the core–shell 3C-SiC NWs. The fixed oxide charge densities of the SiO₂ and Al₂O₃ shells showed positive and negative values, respectively, which were equivalent to electric fields of the order of several hundred thousand volt per centimeter in absolute values. In the core–shell 3C-SiC NWs with originally low impurity concentrations, the electric field induced by the fixed oxide charge of the shells can determine not only the electrical conduction but also the charge carriers in the NWs. Bending tests using the FBDs showed that the piezoresistive effect of the SiO₂-coated NW was almost the same as that of the as-grown 3C-SiC NW reported previously, regardless of the gate voltage, whereas that of the Al₂O₃-coated NW was considerably enhanced at negative gate voltages. The enhancement of the piezoresistive effect was attributed to the piezo-pinch effect, which was more pronounced in the NW, where the carrier density at the core–shell interface is enhanced by the electric field of the dielectric.

  IOP Publishing, Sep. 2022, Nanotechnology, 33(50) (50), 505701 - 505701, English

  [Refereed]

  Scientific journal


• Effects of beam length and vibration amplitude on measurement resolution in microresonator-based optical sensing

  Naoki Kondo, Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, Apr. 2022, Microsystem Technologies, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Integration of silicon nanowire bridges in microtrenches with perpendicular bottom-up growth promoted by surface nanoholes

  Akio Uesugi, Shusuke Nishiyori, Tatsuya Nakagami, Koji Sugano, Yoshitada Isono

  Jan. 2022, Japanese Journal of Applied Physics, English

  [Refereed]

  Scientific journal


• Dynamic surface-enhanced Raman spectroscopy of DNA oligomer with a single hotspot of a gold nanoparticle dimer

  Koji Sugano, Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Yoshitada Isono

  2022, Optics Letters, 47(2) (2), 373 - 376, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Spectroscopic measurement of water using an electrostatic transducer with near‐infrared absorber

  Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, Wiley, Dec. 2021, Electronics and Communications in Japan, 104(4) (4), e12340, English

  [Refereed]

  Scientific journal


• Spectroscopic Measurement of Water Using an Electrostatic Transducer with Near-infrared Absorber

  Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, Institute of Electrical Engineers of Japan (IEE Japan), Sep. 2021, IEEJ Transactions on Sensors and Micromachines, 141(9) (9), 321 - 326, Japanese

  [Refereed]

  Scientific journal


• Silicon-coated gold nano diffraction grating structures as plasmonic absorber for short wavelength infrared light

  Tatsuya Tsubota, Naoyuki Arai, Atsuya Harada, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, The Optical Society, Aug. 2021, Journal of the Optical Society of America B, 38(10) (10), 2863 - 2872, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Vapor–liquid–solid growth of silicon nanowires from surface nanoholes formed with metal-assisted chemical etching

  Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono

  IOP Publishing, May 2021, Japanese Journal of Applied Physics, 60(5) (5), 055502 - 055502, English

  [Refereed]

  Scientific journal


• Dynamic electrical measurement of biomolecule behavior via plasmonically-excited nanogap fabricated by electromigration

  Akihiro Morita, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, IOP Publishing, Mar. 2021, Nano Express, 2(1) (1), 010032 - 010032, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Three-axis force sensor miniaturized by 3D microstructuring using high-temperature punch creep-forming process

  Kyosuke Nimura, Kenji Osaka, Kazuma Sawada, Akio Uesugi, Koji Sugano, Yoshitada Isono

  IOP Publishing, Feb. 2021, Journal of Micromechanics and Microengineering, 31(2) (2), 025009 - 025009, English

  [Refereed]

  Scientific journal


• Anomalous Piezoresistive Changes of Core-Shell Structured SIC Nanowires

  Akio Uesugi, Shinya Nakata, Kodai Inoyama, Koji Sugano, Yoshitada Isono

  IEEE, Jan. 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021-January, 848 - 851, English

  [Refereed]

  International conference proceedings


• Detection of wavelength shift of near-infrared laser using mechanical microresonator-based sensor with Si-covered gold nanorods as optical absorber

  Koji Sugano, Yuki Tanaka, Akio Uesugi, Etsuo Maeda, Reo Kometani, Yoshitada Isono

  Elsevier BV, Sep. 2020, Sensors and Actuators A: Physical, 315, 112337 - 112337, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Wavelength-dependent near-infrared microbolometer for short-wavelength infrared light with gold nanowire grating optical absorber

  Tatsuya Tsubota, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, Aug. 2020, Microsystem Technologies, 27(3) (3), 997 - 1005, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Effect of clamped beam pattern on resonant frequency shift of microresonator under near-infrared laser irradiation

  Kohei Takegami, Kota Nakafuji, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, IOP Publishing, Jun. 2020, Japanese Journal of Applied Physics, 59(SI) (SI), SIII04 - SIII04, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Polarization Dependence of Near-infrared Absorption Spectrum of Si-deposited Gold Nano-grating Structures

  Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, Institute of Electrical Engineers of Japan (IEE Japan), Apr. 2020, IEEJ Transactions on Sensors and Micromachines, 140(4) (4), 72 - 78, Japanese

  [Refereed]

  Scientific journal


• SERS Detection of a Single Nucleobase in a DNA Oligomer Using a Gold Nanoparticle Dimer

  Koji Sugano, Katsunari Maruoka, Akio Uesugi, Yoshitada Isono

  IEEE, Jun. 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 979 - 982, English

  [Refereed]

  International conference proceedings


• Manipulation of Biomolecules Into Nanogap by Plasmonic Optical Excitation for Highly Sensitive Biosensing

  Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono

  Corresponding, IEEE, Jun. 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 166 - 169, English

  [Refereed]

  International conference proceedings


• Strain engineering of core–shell silicon carbide nanowires for mechanical and piezoresistive characterizations

  Shinya Nakata, UESUGI Akio, SUGANO KOJI, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, ISONO YOSHITADA

  Apr. 2019, Nanotechnology, 30(26) (26), 265702, English

  [Refereed]

  Scientific journal


• 単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測

  土屋智由, 鈴木淳也, 片岡達哉, 平井義和, 菅野公二, 田畑修

  Mar. 2019, 実験力学, 19(1) (1), 24 - 29, Japanese

  [Refereed]

  Scientific journal


• Nanotemplate-guided self-assembly of gold nanoparticles and its application to plasmonic bio/chemical sensing

  SUGANO KOJI

  Jan. 2018, International Journal of Automation Technology, 12(1) (1), 79 - 86, English

  [Refereed][Invited]

  Scientific journal


• A Novel 3-axis Tiny Tactile Sensor Developed by 3-D Microstructuring using Punch Creep Forming Process

  Kenji Osaka, Satoshi Nakata, Kensuku Yamamoto, Takao Toyoda, Koji Sugano, Yoshitada Isono

  Jan. 2018, The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2018), 1036 - 1039, English

  [Refereed]

  International conference proceedings


• Single-molecule surface-enhanced Raman spectroscopy of 4,4 '-bipyridine on a prefabricated substrate with directionally arrayed gold nanoparticle dimers

  Koji Sugano, Kiyohito Aiba, Kohei Ikegami, Yoshitada Isono

  Jun. 2017, JAPANESE JOURNAL OF APPLIED PHYSICS, 56(6) (6), 06GK01, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• SERS Detection and Analysis of a Single Oligomer using a Single Gold Nanoparticle Dimer

  Katsunari Maruoka, Kohei Ikegami, SUGANO KOJI, ISONO YOSHITADA

  Corresponding, Jun. 2017, The 19th International Conference onSolid-State Sensors, Actuators and Microsystems (Transducers2017), 468 - 471, English

  [Refereed]

  International conference proceedings


• Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device

  Toshiyuki Tsuchiya, SUGANO KOJI, Hideki Takahashi, H. Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata

  Jun. 2017, The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2017), 1245 - 1248, English

  [Refereed]

  International conference proceedings


• Characterization method for relative Raman enhancement for surface-enhanced Raman spectroscopy using gold nanoparticle dimer array

  Koji Sugano, Kohei Ikegami, Yoshitada Isono

  Jun. 2017, JAPANESE JOURNAL OF APPLIED PHYSICS, 56(6) (6), 06GK03, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Surface-Enhanced Raman Spectroscopy Analysis Device with Gold Nanoparticle Arranged Nanochannel

  Toshimitsu Takeshita, Keisuke Suekuni, Kiyohito Aiba, SUGANO KOJI, ISONO YOSHITADA

  Corresponding, Mar. 2017, Electronics and Communications in Japan, 100(4) (4), 33 - 41, English

  [Refereed]

  Scientific journal


• SURFACE-ENHANCED RAMAN SPECTROSCOPY ANALYSIS OF DNA BASES USING ARRAYED AND SINGLE DIMER OF GOLD NANOPARTICLE

  Kohei Ikegami, Koji Sugano, Yoshitada Isono

  Corresponding, 2017, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 408 - 411, English

  [Refereed]

  International conference proceedings


• MICRORESONATOR WITH GOLD NANOROD ARRAY FOR LASER WAVELENGTH MEASUREMENT BY PHOTO-THERMAL CONVERSION

  Koji Sugano, Yuki Tanaka, Etsuo Maeda, Reo Kometani, Yoshitada Isono

  2017, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 159 - 162, English

  [Refereed]

  International conference proceedings


• Fracture behavior of single crystal silicon with thermal oxide layer

  Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata

  Sep. 2016, ENGINEERING FRACTURE MECHANICS, 163, 523 - 532, English

  [Refereed]

  Scientific journal


• Fabrication and characterization of a CNT forest integrated micromechanical resonator for a rarefied gas analyzer in a medium vacuum atmosphere

  Koji Sugano, Ryu Matsumoto, Ryota Tsutsui, Hiroyuki Kishihara, Naoki Matsuzuka, Ichiro Yamashita, Yukiharu Uraoka, Yoshitada Isono

  Institute of Physics Publishing, Jun. 2016, Journal of Micromechanics and Microengineering, 26(7) (7), 075010, English

  [Refereed]

  Scientific journal


• 金ナノ粒子二量体配列を用いたアデニン分子の高感度表面増強ラマン分光検出

  饗庭 清仁, 池上 晃平, 山崎 真之亮, SUGANO KOJI, ISONO YOSHITADA

  Corresponding, Jun. 2016, 電気学会論文誌（センサ・マイクロマシン部門誌）, 136(6) (6), 256 - 260, Japanese

  [Refereed]

  Scientific journal


• Time-Resolved Micro Raman Stress Spectroscopy for Single Crystal Silicon Resonator using MEMS Optical Chopper

  Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, SUGANO KOJI, Osamu Tabata

  Jan. 2016, Journal of Microelectromechanical Systems, 25(1) (1), 188 - 196, English

  [Refereed]

  Scientific journal


• MEMS-BASED MECHANICAL CHACTERIZATION OF CORE-SHELL SILICON CARBIDE NANO WIRES FOR HARSH ENVIRONMENTAL NANONIECHANICAL ELEMENTS

  Shinya Nakata, Koji Sugano, Mario Negri, Francesca Rossi, Giancarlo Salyiati, Alois Lugstein, Yoshitada Isono

  2016, 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 543 - 546, English

  [Refereed]

  International conference proceedings


• Electrical Resistance Characterization of Strain-Induced Multiwalled Carbon Nanotubes Using MEMS-Based Strain Engineering Device

  Kenji Yamauchi, Keisuke Obata, Shinya Nakata, Koji Sugano, Kisaragi Yashiro, Yoshitada Isono

  2016, SENSORS AND MATERIALS, 28(2) (2), 75 - 88, English

  [Refereed]

  Scientific journal


• Single Molecule SERS with Directionally Arrayed Gold Nanoparticle Dimers on Substrate

  K. Sugano

  2016, MICROFABRICATED AND NANOFABRICATED SYSTEMS FOR MEMS/NEMS 12, 75(17) (17), 3 - 10, English

  [Refereed][Invited]

  International conference proceedings


• Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from silicon-on-insulator wafers

  Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Dec. 2015, MICRO & NANO LETTERS, 10(12) (12), 678 - 682, English

  [Refereed]

  Scientific journal


• Fabrication and characterization of chain-like arrangement of gold nanoparticles using nanotemplates

  Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata

  Institute of Electrical Engineers of Japan, Nov. 2015, IEEJ Transactions on Sensors and Micromachines, 135(11) (11), 474 - 475, Japanese

  [Refereed]

  Scientific journal


• 高感度表面増強ラマン分光分析に向けた マイクロ流路内粒子凝集反応解析

  SUGANO KOJI, 片山 拓, 土屋 智由, 田畑 修

  Nov. 2015, 電気学会論文誌（センサ・マイクロマシン部門誌）, 135-E(11) (11), 433 - 438, Japanese

  [Refereed]

  Scientific journal


• ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価

  SUGANO KOJI, 平岡 亮二, 土屋 智由, 田畑 修

  Nov. 2015, 電気学会論文誌（センサ・マイクロマシン部門誌）, 135-E(11) (11), 474 - 475, Japanese

  [Refereed]

  Scientific journal


• High-speed Pulsed Mixing in a Short Distance with High-frequency Switching of Pumping from Three Inlets

  SUGANO KOJI, Akihiro Nakata, Toshiyuki Tsuchiya, Osamu Tabata

  Jul. 2015, Journal of Micromechanics and Microengineering, 25(8) (8), 084003, English

  [Refereed]

  Scientific journal


• Surface-enhanced raman spectroscopy analysis device with gold nanoparticle arranged nanochannel

  Toshimitsu Takeshita, Keisuke Suekuni, Kiyohito Aiba, Koji Sugano, Yoshitada Isono

  Corresponding, Institute of Electrical Engineers of Japan, Jun. 2015, IEEJ Transactions on Sensors and Micromachines, 135(6) (6), 214 - 220, Japanese

  [Refereed]

  Scientific journal


• Surface-Enhanced Raman Spectroscopy using Linearly Arranged Gold Nanoparticles Embedded in Nanochannels

  SUGANO KOJI, Keisuke Suekuni, Toshimitsu Takeshita, Kiyohito Aiba, ISONO YOSHITADA

  A micro/nanofluidic device containing linearly arranged gold nanoparticles embedded in nanochannels was developed for highly sensitive and highly efficient surface-enhanced Raman spectroscopy (SERS). The Si nanochannel array was fabricated using a photolithography-based process. The nanochannel width was controlled from 100 to 400 nm. Synthesized particles of mean diameter 100 nm were arranged linearly in the nanochannels, using a nanotrench-guided self-assembly process. We developed a process for integrating linearly arranged nanoparticles and micro/nanofluidic components. The particle geometry provided significant Raman enhancement. Furthermore, efficient Raman analysis was possible by scanning a laser spot, because the particles were arranged in one direction. The fabricated structures were evaluated for SERS using 4,4′-bipyridine molecules at concentrations of 1 mM and 10 µM. The Raman peaks was obtained from a few hot spots. The Raman spectra showed that the molecule-specific Raman intensities were correlated with the number of hot spots in the nanochannel.

  Institute of Physics, May 2015, Japanese Journal of Applied Physics, 54(6S1) (6S1), 06FL03, English

  [Refereed]

  Scientific journal


• ULTRASENSITIVE SURFACE-ENHANCED RAMAN SPECTROSCOPY USING DIRECTIONALLY ARRAYED GOLD NANOPARTICLE DIMERS

  Koji Sugano, Daimon Matsui, Toshiyuki Tsuchiya, Osamu Tabata

  2015, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 608 - 611, English

  [Refereed]

  International conference proceedings


• ANOMALOUS RESISTANCE CHANGE OF ULTRASTRAINED INDIVIDUAL MWCNT USING MEMS-BASED STRAIN ENGINEERING

  K. Yamauchi, T. Kuno, K. Sugano, Y. Isono

  2015, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 369 - 372, English

  [Refereed]

  International conference proceedings


• Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators

  Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Mar. 2014, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(3) (3), 403 - 411, English

  [Refereed]

  Scientific journal


• Analytical investigation of the feasibility of sacrificial microchannel sealing for Chip-Scale Atomic Magnetometers

  Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Mar. 2014, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20(3) (3), 357 - 365, English

  [Refereed]

  Scientific journal


• FABRICATION OF GOLD NANOPARTICLE-EMBEDDED NANOCHANNELS FOR SURFACE-ENHANCED RAMAN SPECTROSCOPY

  Keisuke Suekuni, Toshimitsu Takeshita, Koji Sugano, Yoshitada Isono

  Corresponding, 2014, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1059 - 1062, English

  [Refereed]

  International conference proceedings


• DIRECT MEASUREMENT OF SHEAR PIEZORESISTANCE COEFFICIENT ON SINGLE CRYSTAL SILICON NANOWIRE BY ASYMMETRICAL FOUR-POINT BENDING TEST

  Taiki Kimura, Naoki Saito, Toshimitsu Takeshita, Koji Sugano, Yoshitada Isono

  2014, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 600 - 603, English

  [Refereed]

  International conference proceedings


• Study on vibration-coupling control of out-of-plane coupled resonator for anti-shock tuning fork gyroscopes

  Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Institute of Electrical Engineers of Japan, 2014, IEEJ Transactions on Sensors and Micromachines, 134(12) (12), 392 - 399, English

  [Refereed]

  Scientific journal


• On-chip Fabrication of Alkali-Metal Vapor Cells utilizing an Alkali-Metal Source Tablet

  Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata

  Sep. 2013, Journal of Micromechanics and Microengineering, 23(11) (11), 115003, English

  [Refereed]

  Scientific journal


• MEMSネガレジストの粗視化分子動力学シミュレーション

  HIRAI Yoshikazu, YAGYU Hiromasa, MAKINO Yoshihide, UESUGI Akio, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  Aug. 2013, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 133(8) (8), 320 - 329, Japanese

  [Refereed]

  Scientific journal


• SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection

  Koji Sugano, Hiroshi Katayama, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

  Jun. 2013, Proceedings of The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2013), 1807 - 1810, English

  [Refereed]

  International conference proceedings


• Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon

  Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Jun. 2013, Proceedings of The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2013), 1946 - 1949, English

  [Refereed]

  International conference proceedings


• Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer

  Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  May 2013, Electronics and Communications in Japan, 96(5) (5), 58 - 66, English

  [Refereed]

  Scientific journal


• DNA origami assembly on patterned silicon by AFM based lithography

  T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata, O. Tabata

  Apr. 2013, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 307 - 310


• Molecular level study of negative thick-film resist in MEMS by employing a coarse-grained molecular dynamics simulation

  Yoshikazu Hirai, Hiromasa Yagyu, Yoshihide Makino, Akio Uesugi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2013, IEEJ Transactions on Sensors and Micromachines, 133(8) (8), 1 - 329, Japanese

  [Refereed]

  Scientific journal


• Effect of surface morphology and crystal orientations on tensile fracture property of (110) single crystal silicon

  Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2013, Nihon Kikai Gakkai Ronbunshu, A Hen/Transactions of the Japan Society of Mechanical Engineers, Part A, 79(804) (804), 1191 - 1200, Japanese

  [Refereed]

  International conference proceedings


• Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics

  Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Sep. 2012, POLYMER, 53(21) (21), 4834 - 4842, English

  [Refereed]

  Scientific journal


• Micromachined Tactile Sensor for Soft-Tissue Compliance Detection

  Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam

  Jun. 2012, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(3) (3), 635 - 645, English

  [Refereed]

  Scientific journal


• Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes

  Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Jun. 2012, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(6) (6), 797 - 803, English

  [Refereed]

  Scientific journal


• Electrostatic Tensile Testing Device With Nanonewton and Nanometer Resolution and Its Application to C-60 Nanowire Testing

  Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata

  Jun. 2012, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(3) (3), 523 - 529, English

  [Refereed]

  Scientific journal


• Mechanical and electrical clamping of DEP assembled SWCNT using electroless gold deposition

  Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Institute of Electrical Engineers of Japan, 2012, IEEJ Transactions on Sensors and Micromachines, 132(5) (5), 108 - 113, English

  [Refereed]

  Scientific journal


• Tensile test on (110) <110> thin film single crystal silicon with different processing conditions

  Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Institute of Electrical Engineers of Japan, 2012, IEEJ Transactions on Sensors and Micromachines, 132(9) (9), 320 - 321, Japanese

  [Refereed]

  Scientific journal


• 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング

  KATAOKA Tatsuya, HIRAI Yoshikazu, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  2012, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 132-E(5) (5), 108 - 113, Japanese

  [Refereed]

  Scientific journal


• 加工条件の異なる(110)<110>単結晶シリコン薄膜の引張試験

  UESUGI Akio, HIRAI Yoshikazu, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  2012, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 132-E(9) (9), 320 - 321, Japanese

  [Refereed]

  Scientific journal


• Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer

  Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2011, IEEJ Transactions on Sensors and Micromachines, 131(7) (7), 251 - 257, Japanese

  [Refereed]

  Scientific journal


• Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique

  K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

  2011, International workshop on micro/nano-engineering, 12, 17 - 18, English

  [Refereed]


• チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術

  TSUJIMOTO Kazuya, HIRAI Yoshikazu, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  2011, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 131-E(7) (7), 251 - 257, English

  [Refereed]

  Scientific journal


• Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer

  Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata

  2011, SENSORS AND MATERIALS, 23(5) (5), 263 - 275, English

  [Refereed]

  Scientific journal


• Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system

  Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata

  Dec. 2010, MICROFLUIDICS AND NANOFLUIDICS, 9(6) (6), 1165 - 1174, English

  [Refereed]

  Scientific journal


• Embedded Microstructure Fabrication Using Developer-Permeability of Semi-Cross-Linked Negative Resist

  Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Oct. 2010, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 19(5) (5), 1058 - 1069, English

  [Refereed]

  Scientific journal


• A three-dimensional microstructuring technique exploiting the positive photoresist property

  Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Jun. 2010, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20(6) (6), 65005 (pp.1 - 13), English

  [Refereed]

  Scientific journal


• Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection

  Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2010, IEEJ Transactions on Sensors and Micromachines, 130(9) (9), 5 - 449, Japanese

  [Refereed]

  Scientific journal


• Mixing speed-and temperature-controlled microreactor for gold nanoparticle synthesis

  Koji Sugano, Yuki Uchida, Toshiyuki Tsuchiya, Osamu Tabata

  2010, IEEJ Transactions on Sensors and Micromachines, 130(7) (7), 5 - 299, Japanese

  [Refereed]

  Scientific journal


• 自己変位検出機能を有する面内2自由度静電櫛歯トランスデューサの等価回路

  TOKUSAKI Hiroyuki, HIRAI Yoshikazu, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  2010, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 130-E(9) (9), 443 - 449, Japanese

  [Refereed]

  Scientific journal


• 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ

  SUGANO Koji, Uchida Yuki, TSUCHIYA Toshiyuki, TABATA Osamu

  2010, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 130-E(7) (7), 292 - 299, Japanese

  [Refereed]

  Scientific journal


• Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating

  Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata

  2010, SENSORS AND MATERIALS, 22(1) (1), 1 - 11, English

  [Refereed]

  Scientific journal


• Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment

  TSUCHIYA Toshiyuki, YAMAJI Yusuke, SUGANO Koji, TABATA Osamu

  2010, Experimental Mechanics, 50(4) (4), 509 - 516, English

  [Refereed]

  Scientific journal


• Free-standing (C60) nanowire fabricated using XeF2 sacrificial dry etching

  Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata

  SPIE, 2009, Journal of Micro/Nanolithography, MEMS, and MOEMS, 8(1) (1), English

  [Refereed]

  Scientific journal


• Micro machined tactile sensor for soft tissue compliance detection

  A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam

  2009, PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 1(1) (1), 84 - +, English

  [Refereed]

  International conference proceedings


• MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity

  Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2009, The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 153 - 154, English

  [Refereed]


• Mechanical calibration of MEMS springs with sub-micro-Newton force resolution

  Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

  May 2008, SENSORS AND ACTUATORS A-PHYSICAL, 143(1) (1), 136 - 142, English

  [Refereed]

  Scientific journal


• 429 Effect of Surface Oxidation on Tensile Strength of Single Crystal Silicon

  TSUCHIYA Toshiyuki, MIYAMOTO Kenji, SUGANO Koji, Tabata Osamu

  This paper reports on the tensile testing of single crystal silicon (SCS), whose specimen surface was intentionally oxidized and the effect of the oxide thickness on the mechanical properties in order to investigate the fatigue fracture mechanism under cyclic loading. SCS specimens were fabricated from silicon-on-insulator (SOI) wafer with 5-μm -thick device layer and oxide layer were grown to the specimens using thermal dry oxidation at 1100℃. The specimen test part was 120 or 600 μm long and 4 μm wide. Quasi-static tensile testing of SCS specimen without oxide layer, with 50, 100, 200-nm-thick oxide was performed. As the results, the fracture origin location changed from the surface of the specimen of SCS without oxide to inside of silicon of oxidized specimen. This change may be caused by the oxidation stress near the interface and formation of oxide precipitation defects in silicon during oxidation.

  The Japan Society of Mechanical Engineers, 2008, The proceedings of the JSME annual meeting, 2008, 157 - 158, Japanese


• 超小型触覚ディスプレイ用垂直駆動SMA 薄膜アクチュエータの設計

  YOSHIKAWA Wataru, SASABE Akio, SUGANO Koji, TSUCHIYA Toshiyuki, ISHIDA Akira, TABATA Osamu

  2008, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 128-E(4) (4), 151 - 160, Japanese

  [Refereed]

  Scientific journal


• Design and simulation of a tactile sensor for soft-tissue compliance detection

  Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam

  2008, IEEJ Transactions on Sensors and Micromachines, 128(5) (5), 186 - 192, English

  [Refereed]

  Scientific journal


• Air damping in a fan-shaped rotational resonator with comb electrodes

  Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara

  2008, IEEJ Transactions on Sensors and Micromachines, 128(5) (5), 203 - 208, English

  [Refereed]

  Scientific journal


• DNA Mediated Sequential Self-assembly of Au Nano-particles

  KUSAKABE Tatsuya, TANEMURA Tomoki, HIGUCHI Yuichi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  The novel sequential self-assembly process applying hybridization of DNA mediated micro/nano components was proposed and its validity was experimentally verified. In the proposed process, characteristic of DNA, such as hybridization specificity of complementary pairs of single-stranded DNA (ssDNA) into a double-stranded DNA (dsDNA), and its dependence on melting temperature T_m, which can be designed by the base-pair sequence and salt-concentration of surrounding media, was utilized to control the self-assembly sequence of a micro/nano components modified by ssDNA. Au nanoparticles with 15nm diameter were used as components and two pairs complementary DNA with different T_m were prepared. The aggregation of Au nano-particles modified by complementary ssDNA was confirmed at different temperatures with decreasing temperature under T_m. The reversibility of this process was also confirmed by increasing temperature.

  The Society of Powder Technology, Japan, 2008, Journal of the Research Association of Powder Technology, Japan, 45(3) (3), 156 - 161, Japanese


• 3310 Design Consideration on Tactile Sensor for Minimal Invasive Surgery

  TAMURA Tomohisa, EL-Bab Ahmed M.R.Fath, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  A design of the micro-scaled tactile sensor which consists of two springs for Minimal Invasive Surgery was investigated. The sensing principle is based on the concept of applying two springs of considerably different stiffness to soft tissue for compliance detection, which reading is independent on the applied displacement between the sensor and tissue. Finite Element Method (FEM) is used to study the effect of tip shape (sphere, cubic) and the distance (0.5, 0.6, 0.7, 0.8mm) between the tips for the sensor with spring constants of 4500N/m and 110N/m under tissue Young's modulus of 0.3, 0.5, 1.0MPa. The results showed the cubic tip shape possesses independent reading on the pushing distance rather than the spherical one. The distance between the two springs of larger than 0.7mm is necessary to avoid the cross-talk effect between two spring behaviors.

  The Japan Society of Mechanical Engineers, 2007, The proceedings of the JSME annual meeting, 2007, 307 - 308, Japanese


• 2837 Development of High-Temperature Thin-Film Tensile Tester

  TSUCHIYA Toshiyuki, IKEDA Teturo, SUGANO Koji, Tabata Osamu

  This paper reports on the development of a new tensile tester operable at 800℃ using infrared heating system for evaluating mechanical properties of thin films at high temperature. Single crystal silicon films of 3μm thick were tested at 600℃. At room temperature, the fracture strength and Young's modulus were 3.33GPa and 163.2GPa, respectively. At 600℃, they were 2.71GPa and 151.8GPa, respectively. When the strain rate was decreased, the stress and stage displacement curves had yield points and the fractured specimens exhibited the slip lines at 600℃.

  The Japan Society of Mechanical Engineers, 2007, The proceedings of the JSME annual meeting, 2007, 729 - 730, Japanese


• Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer

  Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2007, PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 594 - 597, English

  [Refereed]

  International conference proceedings


• 2種類の液滴の界面張力を用いた逐次積層セルフアセンブル

  HIGUCHI Yuichi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  In this paper, a new sequential stacking self-assembly using interfacial tension of two different droplets of TEGDMA (Triethyleneglycol Dimethacrylate) and 42Sn-58Bi solder was proposed. TEGDMA with an additional thermal initiator is liquid at room temperature and hardens by heat. 42Sn-58Bi solder is solid at room temperature and melts at 138 °C. Since interfacial tension of TEGDMA and 42Sn-58Bi solder are selectively utilized by setting the process temperature at room temperature for TEGDMA and 150 °C for 42Sn-58Bi solder, the sequential self-assembly of different components can be realized. The feasibility of the proposed process and alignment accuracy were experimentally examined using 1 mm square silicon chips as test components. The first component assembly on a substrate was carried out at room temperature using TEGDMA as an adhesive agent, and the second component assembly on the assembled component was carried out at 150 °C using 42Sn-58Bi solder as an adhesive agent. Both self-assembly processes were carried out in EG (Ethylene Glycol) solvent with an additional sulfuric acid. It was confirmed that the first and second self-assembly was successfully done at room temperature and at 150 °C, and alignment accuracy of first and second self-assembly were 33 μm and a few μm, respectively.

  The Institute of Electrical Engineers of Japan, 2007, 電気学会論文誌E（センサ・マイクロマシン部門誌）, 127-E(4) (4), 214 - 220, Japanese

  [Refereed]

  Scientific journal


• 5507 Spring constant measurement of MEMS structure using electromagnetic balance

  MIYAMOTO Kenji, JOMORI Tomoya, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  The spring constant of a folded beam structure was directly measured for the calibration of the force-displacement transferring spring in the MEMS tensile testing device for nanoscale materials. The force that can be applied to the spring is up to 100μN, so Thin film tensile tester using electromagnetic balance was adopted. First, we improved the force-measurement resolution of the tensile tester through the review of the stability of the control system, the test environment, the noise in the control current, and the set-up of the testing system. Second, we measured the spring constant with a device containing four folded beams. The spring beams were 2μm width, 5μm thick, and 216μm and 285μm long, whose spring constant are designed to be 0.3N/m and 0.7N/m respectively. The measured values were 0.18N/m and 0.57N/m, which were distinct from the designed values, but close to the modified analytical value in which actual cross section areas were considered.

  The Japan Society of Mechanical Engineers, 2006, The proceedings of the JSME annual meeting, 2006, 299 - 300, Japanese


• Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip

  Hiromasa Yagyu, Koji Sugano, Shigehiko Hayashi, Osamu Tabata

  IOP Publishing, Jun. 2005, Journal of Micromechanics and Microengineering, 15(6) (6), 1236 - 1241, English

  [Refereed]

  Scientific journal


• Reduction of surface roughness and aperture size effect for etching of Si with XeF2

  Koji Sugano, Osamu Tabata

  IOP Publishing, Nov. 2002, Journal of Micromechanics and Microengineering, 12(6) (6), 911 - 916, English

  [Refereed]

  Scientific journal


• Effects of aperture size and pressure on XeF2 etching of silicon

  Koji Sugano, Osamu Tabata

  Springer Science and Business Media LLC, Nov. 2002, Microsystem Technologies, 9(1-2) (1-2), 11 - 16, English

  [Refereed]

  Scientific journal


• Selectivity Control of Mask Material for XeF2 Etching Using UV light Exposure

  Koji Sugano, Osamu Tabata

  2001, IEEJ Transactions on Sensors and Micromachines, 121(12) (12), 647 - 651, English

  [Refereed]

  Scientific journal

• マイクロ振動子のたわみ状態制御による振動型光センサの高感度化—Study on sensitivity improvement of microresonator-based optical sensor by deflection control

  竹上 航平, 近藤 直輝, 上杉 晃生, 菅野 公二, 磯野 吉正

  Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese


• 高温パンチクリープ成形技術を用いた3軸力センサの開発および被覆樹脂の粘弾性特性を考慮したセンサ性能評価—Development of three-axis force sensor by 3D microstructuring using high temperature punch creep forming and sensor performance evaluation considering resin viscoelasticity

  澤田 和磨, 丹村 響介, 大坂 憲司, 上杉 晃生, 菅野 公二, 磯野 吉正

  Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese


• 金ナノ構造を用いた波長依存性を有するSOI型近赤外ボロメータ素子—Study on wavelength-dependent SOI-type near-infrared bolometer element using gold nanostructure

  坪田 達也, 上杉 晃生, 菅野 公二, 磯野 吉正

  Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese


• 金ナノ構造光吸収体集積静電型マイクロ振動子デバイスによる近赤外光強度センサ—Near-infrared light intensity sensing by electrostatic microresonator transducer integrated with gold nanostructure optical absorber

  鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

  Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese


• 近赤外吸収体を有する静電型マイクロ振動子デバイスを用いた水の分光測定—Spectroscopic measurement of water using electrostatic transducer with Near-infrared absorber

  鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

  Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 5p, Japanese


• 金ナノ粒子二量体を用いたナノギャップ電極の作製とその電気的・光学的評価—Fabrication of nanogap electrode based on gold nanoparticle dimer and its electrical and optical evaluation

  住友 孝行, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

  Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese


• 光センシングマイクロ共振デバイスの梁長さおよび振幅が計測分解能に与える影響—Effects of beam length and amplitude on measurement resolution in optical sensing using microresonator

  近藤 直輝, 竹上 航平, 上杉 晃生, 菅野 公二, 磯野 吉正

  Oct. 2020, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 37, 6p, Japanese


• 光励起ナノギャップ電極を用いたDNAオリゴマーの光トラップおよび1分子検出—Optical trapping and single-molecule detection of DNA oligomer using optically-excited nanogap electrodes

  森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

  Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 6p, Japanese


• 架橋成長Siナノワイヤの熱電特性評価に関する研究—Characterization of thermoelectric properties of bridged-grown Si nanowire

  北川 諒, 岸本 卓巳, 小國 凌, 上杉 晃生, 菅野 公二, 磯野 吉正

  Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese


• シリコンマイクロ振動子光センサにおける共振周波数特性の形状依存性—Pattern dependency of resonant frequency response of silicon microresonator for optical sensing

  竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

  Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese


• 金ナノグレーティング構造の光吸収ピーク波長制御による高感度レーザ波長計測マイクロ振動子デバイス—Highly sensitive laser wavelength measurement using microresonator controlling absorption peak of gold nanograting

  竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

  Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese


• コアシェルSiCナノワイヤの電気伝導性に及ぼすシェル表面電位の影響解明—Effect of shell surface potential to electrical properties of core-shell SiC nanowire

  井ノ山 滉大, 仲田 進哉, 上杉 晃生, 菅野 公二, 磯野 吉正

  Nov. 2019, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 36, 4p, Japanese


• Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性—Polarization dependence of near-infrared absorption spectrum of Si-deposited gold nano-grating structures

  新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

  2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 6p, Japanese


• VLS成長SiNW単体に対する熱電変換特性評価—Characterization of thermoelectric properties for VLS-growth SiNWs

  北川 諒, 井本 大暉, 上杉 晃生, 菅野 公二, 磯野 吉正

  2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 5p, Japanese


• Near-infrared optical property of Si-deposited gold nanowire grating structures

  新居 直之, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 31 Oct. 2017, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 34, 6p, Japanese


• Development of tiny MEMS tactile sensor using high temperature creep forming technique

  大坂 憲司, 中田 悟史, 山本 賢祐, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 31 Oct. 2017, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 34, 1 - 5, Japanese


• プラズモニック構造のバイオ・ケミカルセンシング応用

  SUGANO KOJI

  1．はじめに

  化学物質成分分析および生命科学分野において低濃度の物質を高感度に検出・同定する技術が広く期待されている。例えば，水質検査における環境ホルモン等有害物質の検出や農作物の残留農薬検出，空港等でのセキュリティのための危険物質検出等が挙げられる。生命科学分野では，

  The Institute of Electrical Engineers of Japan, Jun. 2017, 電気学会誌, 137(6) (6), 354 - 357, Japanese

  [Refereed][Invited]

  Introduction scientific journal


• Surface-Enhanced Raman Spectroscopy Detection of Adenine Molecule using single Gold Nanoparticle dimer

  丸岡 克成, 池上 晃平, 菅野 公二, 磯野 吉正

  電気学会, 19 Dec. 2016, 電気学会研究会資料. PHS, 2016(58) (58), 43 - 46, Japanese


• Optical Property of Si thin film deposited gold nanowire array

  新居 直之, 城谷 修司, 菅野 公二, 磯野 吉正

  電気学会, 19 Dec. 2016, 電気学会研究会資料. MSS, 2016(27) (27), 1 - 3, Japanese


• Study on High Temperature Creep Deformation of Si Thin Film by Backward Analysis Method for Development of Tactile Sensors

  山本 賢祐, 中田 悟史, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 02 Oct. 2016, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 33, 1 - 4, Japanese


• Evaluation of Piezoresistivity of VLS-Grown Core/Shell-SiC Nanowires Using Electrostatically Actuated Nanotensile Testing Device

  仲田 進哉, 井本 大暉, Rossi Feancesca, Lugstein Alois, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 02 Oct. 2016, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 33, 1 - 4, Japanese


• Highly-Sensitive and Rapid Detection of DNA bases using Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimer Array

  池上 晃平, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 02 Oct. 2016, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 33, 1 - 6, Japanese


• Crystal Orientation Dependency of Strain-Induced Electrical Properties for VLS-Grown Single Crystal Silicon Nanowires

  仲田 進哉, 北田 勇馬, Wagesreither Stefan, Lugstein Alois, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 28 Oct. 2015, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 32, 4p, Japanese


• Surface enhanced Raman spectroscopy of nucleobases using gold nanoparticle dimer array

  饗庭 清仁, 池上 晃平, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 28 Oct. 2015, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 32, 1 - 4, Japanese


• Characterization method of Raman enhancement for surface enhanced Raman spectroscopy using gold nanoparticle dimer array

  池上 晃平, 饗庭 清仁, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 28 Oct. 2015, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 32, 1 - 5, Japanese


• Characterization of surface enhanced Raman spectroscopy with straight arrangement of gold nanoparticles

  池上 晃平, 竹下 俊光, 饗庭 清仁, 菅野 公二, 磯野 吉正

  Institute of Electrical Engineers of Japan, 28 Oct. 2015, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 32, 1 - 5, Japanese


• OS12-2 Evaluation of Piezoresistivity for VLS-Grown Silicon Nanowires Under Enormous Elastic Strain(Mechanical properties of nano- and micro-materials-1,OS12 Mechanical properties of nano- and micro-materials,MICRO AND NANO MECHANICS)

  Nakata Shinya, Kitada Yuma, Wagesreither Stefan, Lugstein Alois, Sugano Koji, Isono Yoshitada

  The Japan Society of Mechanical Engineers, 04 Oct. 2015, Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics, 2015(14) (14), 184 - 184, English


• 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光

  菅野 公二, 松井 大門, 土屋 智由, 田畑 修

  Oct. 2014, 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 20pm1-B1, Japanese


• J2240304 Evaluation of Shear Piezoresistance Coefficient of Silicon Nanowire by Asymmetrical Four Point Bending Test

  TAKESHITA Toshimitsu, KIMURA Taiki, SUGANO Koji, ISONO Yoshitada

  This research evaluated the shear piezoresistance property of p-type single crystal silicon nanowire (SiNW) by the asymmetrical four-point bending (AFPB) testing proposed by the authors. We fabricated the p-type SiNW on the AFPB specimen with "V"-shaped notches (V-notches) made of single crystal silicon. Bending the specimen by the asymmetrical four point-supports, simple shear stress can be produced at the center of the specimen. Consequently, we have succeeded in evaluating the shear piezoresistance coefficient of SiNW directly, which was found to be π_<44>=203.28×10^<-11> Pa^<-1> at an impurity concentration of 4×10^<18> cm^<-3>. This value is 2.1 times larger than that of p-type piezoresistors used in conventional piezoresistance sensors on a micrometer scale. The proposed evaluation technique and obtained result will be effective for design application of high-sensitivity mechanical sensors integrating SiNW piezoresistance elements.

  The Japan Society of Mechanical Engineers, 07 Sep. 2014, Mechanical Engineering Congress, Japan, 2014, "J2240304 - 1"-"J2240304-5", Japanese


• 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価

  菅野公二, 松井大門, 土屋智由, 田畑修

  May 2014, 平成26年度電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会), 電気学会, MSS-14-011, Japanese


• Micro Energy Harvesting Device Using Ferroelectrics as an Electret Material

  菅野 公二

  日本板硝子材料工学助成会, 2014, 財団法人日本板硝子材料工学助成会成果報告書 Nippon Sheet Glass Foundation for Materials Science and Engineering report, (35) (35), 169 - 173, Japanese


• 静電容量型SOI3軸加速度センサの角速度横感度

  中野篤, 平井義和, 菅野公二, 土屋智由, 田畑修

  Nov. 2013, 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 6PM3-PSS-058, Japanese


• (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性

  上杉晃生, 平井義和, 菅野公二, 土屋智由, 田畑修

  Sep. 2013, 日本機械学会2013年度年次大会, 日本機械学会, J211013, Japanese


• 多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工

  鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修

  Sep. 2013, 日本機械学会2013年度年次大会, 日本機械学会, J211017, Japanese


• ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル

  外薗洸佑, 鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修

  Sep. 2013, 日本機械学会2013年度年次大会, 日本機械学会, J211024, Japanese


• 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価

  中野篤, 平井義和, 菅野公二, 土屋智由, 田畑修

  Aug. 2013, Dynamics and Design Conference 2013(D&D2013), 日本機械学会, 講演番号549, Japanese


• Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography

  Y. Kato, Yoshikazu Hirai, F. van Kempen, F. van Keulen, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Apr. 2013, The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, 192 - 193, English


• 節付きBoschプロセスによるシリコン3層構造の作製

  北村彰男, 平井義和, 菅野公二, 土屋智由, 田畑修

  Mar. 2013, 平成25年電気学会全国大会, 191 - 192, Japanese


• グレースケールDMD露光用3次元微細加工プロセスシミュレータ

  加藤義基, 平井義和, Floris van Kempen, Fred van Keulen, 菅野公二, 土屋智由, 田畑修

  Mar. 2013, 平成25年電気学会全国大会, 193 - 194, Japanese


• New fabrication method and evaluation of alkali-metal vapor cells for atomic magnetometer

  辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Institute of Electrical Engineers of Japan, Jan. 2013, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 6p, Japanese


• 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性 (2013年度年次講演会)

  谷山 彰, 小北 雄亮, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Jan. 2013, 日本実験力学会講演論文集, (13) (13), 129 - 131, Japanese

  [Refereed]


• AS-2-9 Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法(AS-2.超小型量子発振器・センサ,シンポジウムセッション)

  辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 藩 和宏, 水谷 夏彦, 田畑 修

  Jan. 2013, 電子情報通信学会ソサイエティ大会講演論文集, 2013, S - 28, Japanese


• Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table

  Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda

  2013, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645 - 648, English

  [Refereed]


• 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析

  柳生 裕聖, 平井 義和, 牧野 圭秀, 菅野 公二, 土屋 智由, 田畑 修

  Oct. 2012, 第29回「センサ・マイクロマシンと応用システム」シンポジウム, 371 - 374, Japanese


• 単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定

  鈴木 淳也, 片岡 達哉, 平井 義和, 菅野 公二, 土屋智由, 田畑 修

  Oct. 2012, 第4回「マイクロ・ナノ工学シンポジウム」, OS7-3-5, Japanese


• 702 Evaluation of Effects of Rotational Motion on Vibration Table in Sensitivity Matrix Calibration of 3-axis Accelerometer

  NAKANO Atsushi, HIRAI Yoshikazu, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu, UMEDA Akira

  The calibration method based on a vector space theory has been proposed for multi-axis accelerometers. In this method, acceleration generated from a 3-DOF vibration table and the output signal from calibration target accelerometers are treated as vector quantities and a calibration result is described as a matrix. This method has many advantages of short measurement time and cross sensitivity evaluation. In order to realize more efficient measurement, a simultaneous calibration technique is required. However, it is supposed that uncontrolled rotational motion of a 3-DOF vibration table generates position dependency on some of the elements of sensitivity matrix. This paper reports the effect of rotational motion on the vibration table in the sensitivity matrix calibration of an SOI capacitive 3-axis accelerometer. In order to clarify the rotation effect on sensitivity, we made a 6-DOF reference sensor in combination of 3 single axis accelerometers and 3 single axis gyros As a result, certain elements of the cross sensitivity show the position dependency at a 150Hz excitation, which could be near the resonant frequency of rotation. This result is explicable by approximate expression of sensitivity calculation.

  The Japan Society of Mechanical Engineers, 18 Sep. 2012, Dynamics & Design Conference, 2012, "702 - 1"-"702-10", Japanese


• Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist

  Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Jul. 2012, The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), ac12000168, English


• Fabrication of nanogap electrodes by gold nanorod growth on substrate

  NISHINO So, SUGANO Koji, HIRAI Yoshikazu, TSUCHIYA Toshiyuki, TABATA Osamu, TAKENAKA Yoshiko

  11 Jun. 2012, 電気学会マイクロマシン・センサシステム研究会資料, MSS-12(1-22) (1-22), 29 - 32, Japanese


• Analysis of aggregation reaction for silver nanoparticle dimers toward highly sensitive SERS

  KATAYAMA Hiroshi, SUGANO Koji, HIRAI Yoshikazu, TSUCHIYA Toshiyuki, TABATA Osamu

  11 Jun. 2012, 電気学会マイクロマシン・センサシステム研究会資料, MSS-12(1-22) (1-22), 33 - 38, Japanese


• Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes

  Praveen Thakur Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Apr. 2012, 2012 MRS Spring Meeting, San Francisco, B7.5, English


• Temperature dependency of DNA origami self-assembly rate

  C. Huang, T. Akishiba, N. Tamura, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Mar. 2012, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 411 - 412, English


• Fabrication of nanogap electrodes by gold nanorod growth on substrate

  S. Nishino, Y. Takenaka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Mar. 2012, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 652 - 653, English


• Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics

  H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Mar. 2012, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 999 - 1000, English


• Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer

  T. Kataoka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Mar. 2012, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 335 - 336, English


• 自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析

  徳崎裕幸, 平井義和, 菅野公二, 田畑 修, 土屋智由

  Mar. 2012, 応用物理学会 第59回 応用物理学関係連合講演会, 0, Japanese


• Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS

  Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata

  2012, IFIP Advances in Information and Communication Technology, 379, 94 - 109, English


• Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application

  Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2012, Materials Research Society Symposium Proceedings, 1415, 59 - 64, English

  [Refereed]


• Are nonlinear resonators suitable for energy harvesting?-Equivalent circuit analysis of nonlinear response of MEMS resonator

  A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya

  2012, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1213 - 1216, English

  [Refereed]


• Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation

  Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata

  2012, 26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 47, 402 - 405, English

  [Refereed]


• HIGH-SPEED PULSED MIXING WITH HIGH-FREQUENCY SWITCHING OF PUMPING FROM THREE MICROPUMPS

  Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

  2012, FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2, 365 - 369, English

  [Refereed]


• Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist

  Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Dec. 2011, Proceedings of International Workshop on Micro/Nano-Engineering, 88


• 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術

  平井義和, 辻本和也, 菅野公二, 土屋智由, 田畑修

  21 Nov. 2011, 電気学会電子回路研究会資料, ECT-11(102-112) (102-112), 7 - 11, Japanese


• 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング

  片岡達也, 平井義和, 菅野公二, 土屋智由, 田畑修

  Sep. 2011, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 107 - 110, Japanese


• MEMS厚膜ネガレジストの粗視化分子動力学モデル

  平井義和, 柳生裕聖, 上杉晃生, 牧野圭秀, 菅野公二, 土屋智由, 田畑修

  Sep. 2011, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 334 - 339, Japanese


• ナノトレンチテンプレートを用いたナノギャップ制御可能なナノ粒子セルフアセンブリ

  菅野公二, 平岡亮二, Martin Klaumnzer, Michael Voigt, Wolfgang Peukert, 土屋智由, 田畑 修

  Sep. 2011, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 149 - 153, Japanese


• ナノギャップ電極の作製に向けた金ナノロッドの基板上成長

  西野聡, 菅野公二, 武仲能子, 田畑修, 土屋智由, 平井義和

  Sep. 2011, 日本化学会第63回コロイドおよび界面化学討論会, 289, Japanese


• エポキシ系ネガレジスト機械的特性の架橋度依存性

  上杉晃生, 牧野圭秀, 柳生裕聖, 平井義和, 菅野公二, 土屋智由, 田畑修

  Sep. 2011, 日本機械学会2011年度年次大会, 2011, J161021, Japanese


• ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用

  辻本和也, 平井義和, 菅野公二, 土屋智由, 田畑修

  Jul. 2011, 関西ワークショップ2011, エレクトロニクス実装学会,, No.11, Japanese


• High-precision and High-yield Self-Assembly of Gold Nanoparticles using Nano-scale Trenches

  SUGANO Koji, HIRAOKA Ryoji, HIRAI Yoshikazu, TSUCHIYA Toshiyuki, TABATA Osamu

  01 Jul. 2011, 電気学会マイクロマシン・センサシステム研究会資料, MSS-11(1-7.9-12.14-21) (1-7.9-12.14-21), 83 - 86, Japanese


• Synthesis of Gold Nanoparticle using High-speed Pulsed Mixing Microfluidic Device

  SUGANO Koji, YOSHIMUNE Hideaki, NAKATA Akihiro, HIRAI Yoshikazu, TSUCHIYA Toshiyuki, TABATA Osamu

  01 Jul. 2011, 電気学会マイクロマシン・センサシステム研究会資料, MSS-11(1-7.9-12.14-21) (1-7.9-12.14-21), 73 - 78, Japanese


• Equivalent Circuit Analysis of Nonlinearity Response in Electrostatic Comb Resonator

  KITAMURA Akio, HIRAI Yoshikazu, SUGANO Kouji, TSUCHIYA Toshiyuki, TABATA Osamu

  01 Jul. 2011, 電気学会マイクロマシン・センサシステム研究会資料, MSS-11(1-7.9-12.14-21) (1-7.9-12.14-21), 31 - 36, Japanese


• 電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析

  北村 彰男, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Jun. 2011, 平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, 31 - 36, Japanese


• Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane

  平井 義和, 上杉 晃生, 牧野 圭秀, 柳生 裕聖, 菅野 公二, 土屋 智由, 田畑 修

  Jun. 2011, The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63, 62 - 63, English

  [Refereed]


• 高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成

  吉宗 秀晃, 中田 哲博, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2011, 平成23年電気学会全国大会, 186 - 187, Japanese


• Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity

  Thakur,Praveen Singh, 菅野 公二, 土屋 智由, 田畑 修

  Feb. 2011, The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems,, pp. 1297-1300, 1297 - 1300, English

  [Refereed]


• Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS

  Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata

  2011, 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208 - 213, English

  [Refereed]


• Epoxy-based permeable membrane fabrication for 3D microfluidic device

  Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184 - 187, English

  [Refereed]


• Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection

  Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241 - 1245, English

  [Refereed]


• SACRIFICIAL MICROCHANNEL SEALING BY GLASS-FRIT REFLOW FOR CHIP SCALE ATOMIC MAGNETOMETER

  K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

  2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 368 - 371, English

  [Refereed]


• LOCAL STRESS ANALYSIS OF SINGLE CRYSTALLINE SILICON RESONATOR USING MICRO RAMAN SPECTROSCOPY

  A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya

  2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449 - 452, English

  [Refereed]


• Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics

  Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata

  2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706 - 2709, English

  [Refereed]


• High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis

  K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata

  2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773 - 1776, English

  [Refereed]


• Analysis of acceleration sensitivity in MEMS tuning fork gyroscope

  Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2006 - 2009, English

  [Refereed]


• Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template

  K. Sugano, R. Hiraoka, T. Tsuchiya, O. Tabata, M. Klaumunzer, M. Voigt, W. Peukert

  2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2570 - 2573, English

  [Refereed]


• High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels

  Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

  2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75 - 78, English

  [Refereed]


• Modal harmonie simulation of decoupled resonators for developing MEMS tuning fork gyroeope with low acceleration sensitivity

  Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuehiya, Osamu Tabata

  2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1250 - 1253, English

  [Refereed]


• Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope

  Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2011, EUROSENSORS XXV, 25, 623 - 626, English


• Configurable assembly of DNA origami on MEMS by microfluidic device

  C. Huang, T. Saeki, M. Endo, H. Sugiyama, C.-H. Weng, G.-B. Lee, K. Sugano, T. Tsuchiya, O. Tabata

  2011, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 197 - 200, English

  [Refereed]


• Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly

  Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata

  Nov. 2010, Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology, 99, English


• MNM-3A-4 Crystallographic anisotropy analysis in fracture of micro-sized (110) single crystal silicon using Weibull statistics

  Wakita Taku, Hirai Yoshikazu, Sugano Koji, Tabata Osamu, Ikehara Tsuyoshi, Tsuchiya Toshiyuki

  Uniaxial tensile testing for single crystal silicon (SCS) films was conducted to investigate the fracture mechanism of silicon. The loading axis of the SCS specimens had three main crystallographic orientations, that is <100>, <110>, and <111>, fabricated from one (110) silicon-on-insulator wafer. The dimensions of specimen test part were 10 μm wide, 5 μm thick, and 120 μm long having 1 μm-depth notch at the center. The measured average fracture force of <100>, <110>, and <111> specimens was 44.2, 53.5, and 45.8 mN, respectively. The difference in fracture force between <110> and <111> specimens was well elucidated with the normal stress for (111) cleavage plane using Weibull statistics considering the stress distribution on notch surface and existence of multiple cleavage planes in SCS.

  The Japan Society of Mechanical Engineers, 12 Oct. 2010, 日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 2nd(2) (2), 149 - 150, Japanese


• MNM-P11-3 Performance analysis of vibrating gyroscope using equivalent circuit of electrostatic comb transducer with built-in displacement detection

  TOKUSAKI Hiroyuki, HIRAI Yoshikazu, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  This paper reports transient analysis in self-induced oscillation of vibrating gyroscope by using the novel electrical equivalent circuit of electrostatic comb transducer. The equivalent circuit with built-in displacement detection can analyze dc operating points which depends on external parameters like springs, bias voltage and force. By using the proposed equivalent circuit, we estimated the bias voltage dependency of oscillation risetime and voltage amplitude. By comparing the analysis and measurement of start-up response of SOG (silicon-on-glass) gyroscope, we showed the proposed equivalent circuit facilitate designing and estimate gyroscope performance.

  The Japan Society of Mechanical Engineers, 12 Oct. 2010, マイクロ・ナノ工学シンポジウム, 2010(2) (2), 141 - 142, Japanese


• チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術

  辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Oct. 2010, 第27回「センサ・マイクロマシンと応用システム」シンポジウム, 656 - 661, Japanese


• T0302-1-1 Crystal anisotropy on fracture behavior of (110) single-crystal silicon on tensile testing

  Wakita Taku, Hirai Yoshikazu, Sugano Koji, Tabata Osamu, Tsuchiya Toshiyuki, Ikehara Tsuyoshi

  In this paper, we report on uniaxial tensile tests for single crystal silicon (SCS) specimens having three different crystallographic orientations such as <100>, <110>, and <111> in loading axes, to evaluate the crystal anisotropy on the fracture behavior. The specimens were fabricated on the same (110) silicon on insulator(SOI) wafer. The test parts were 10μm wide, 5μm thick, and 120μm long and they have 1μm-depth notch at the center. The fracture force of <100>, <110>, and <111> specimens were 45.1, 55.9, and 45.5 mN, respectively. The fracture surface of <111> and <110> specimens were mostly in (111) plane.

  The Japan Society of Mechanical Engineers, 04 Sep. 2010, The proceedings of the JSME annual meeting, 2010(Vol.8) (Vol.8), 243 - 244, Japanese


• T0302-2-2 Local stress analysis of single-crystalline resonator using micro Raman spectroscopy

  TANIYAMA Akira, HIRAI Yoshikazu, SUGANO Koji, TABATA Osamu, IKEHARA Tsuyoshi, TSUCHIYA Toshiyuki

  This paper describes a method for analyzing local stress in resonating single-crystal silicon (SCS) microstructures using micro Raman spectroscopy. The support beams of fan-shaped resonators with five different crystallographic orientations are used as specimens. The beam dimensions are same, which are 30μm long, 10μm wide and 5μm thick and it has a 4-μm-deep notch in its center. Raman spectra at the notch tips were measured during resonant vibrations. The observed spectra are broadened by stress oscillation. These spectra broadening are theoretically analyzed by time integration of no-stress spectra with stress distribution analysis using finite element method. The analyzed and measured spectra of the (100) Si specimens showed good agreement, which indicates the validity of this stress measurement method.

  The Japan Society of Mechanical Engineers, 04 Sep. 2010, The proceedings of the JSME annual meeting, 2010(Vol.8) (Vol.8), 255 - 256, Japanese


• 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析

  谷山 彰, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由

  Sep. 2010, 日本機械学会2010年度年次大会, 0, Japanese


• Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell

  Kazuya,Tsujimoto, Yoshikazu,Hirai, 菅野 公二, Tsuchiya, Toshiyuki, Tabata, Osamu

  Jul. 2010, The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211, 211, English

  [Refereed]


• High-Speed Mixing of Two Solutions using Alternate Pulsed Flow from Three Inlets Microchannels

  SUGANO Koji, NAKATA Akihiro, HIRAI Yoshikazu, TSUCHIYA Toshiyuki, TABATA Osamu

  17 Jun. 2010, 電気学会マイクロマシン・センサシステム研究会資料, MSS-10(1-6.8-16.18-30) (1-6.8-16.18-30), 139 - 144, Japanese


• Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment

  T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata

  Apr. 2010, EXPERIMENTAL MECHANICS, 50(4) (4), 509 - 516, English


• 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価

  脇田拓, 菅野公二, 土屋智由, 田畑修, 池原 毅

  Mar. 2010, 第1回マイクロ・ナノ工学シンポジウム,, pp. 39-40, 39 - 40, Japanese

  [Refereed]


• DNA-grafted-polymer mediated self-assembly of micro components

  G. Lopez, T. Tanemura, R. Sato, T. Saeki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda

  Jan. 2010, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245 - 249, English

  [Refereed]


• DNA Mediated self-assembly of micro-scale components and sites

  R. Sato, T. Tanemura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

  2010, 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11 - 12, English

  [Refereed]


• Embedded Double-Layered Microchannel Fabrication for Microfluidic Devices Using Developer Permeability of Negative Thick-Film Resists

  Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata

  2010, EUROSENSORS XXIV CONFERENCE, 5, 854 - 857, English

  [Refereed]


• New compensation technique for the soft tissue stiffness measurements using two sensor probes configuration

  A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam

  2010, EUROSENSORS XXIV CONFERENCE, 5, 1304 - 1307, English

  [Refereed]


• マイクロリアクタによる金ナノ粒子合成技術を紹介します

  菅野公二, 土屋 智由, 田畑 修

  Oct. 2009, APPIE 産学官連携フェア2009, 0, Japanese


• ナノ粒子を所望のパターンに配列する

  菅野公二, 平岡亮二, 土屋 智由, 田畑 修

  Oct. 2009, APPIE 産学官連携フェア2009, 0, Japanese


• 厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法

  平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Oct. 2009, 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, 533 - 538, Japanese

  [Refereed]


• 十字型混合流路による2液脈動混合の高速化

  中田 哲博, 菅野 公二, 土屋 智由, 田畑 修

  Oct. 2009, 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 483-486, 483 - 486, Japanese

  [Refereed]


• 自己変位検出機能を有する面内2自由度静電櫛歯電極の等価回路

  徳崎裕幸, 菅野公二, 土屋智由, 田畑 修

  Oct. 2009, 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 518-523, 518 - 523, Japanese

  [Refereed]


• T0302-2-3 Electrical equivalent circuit model of comb transducers valid for DC operating point analysis

  TOKUSAKI Hiroyuki, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  This paper reports an electrical equivalent circuit model for describing in-plane two degree-of-freedom comb transducers. The proposed model is valid for any external parameters by building dummy spring into mis model to detect a mechanical displacement. As a result, we can analyze dc operating points by the model so that we need not to change the parameters of the model on changing the connected electrical and mechanical components, such as a dc bias, external force, and the stiffness of a spring. This model was adapted to a resonator and a frequency characteristic of 2DOF comb transducers was well represented by the model.

  The Japan Society of Mechanical Engineers, 12 Sep. 2009, The proceedings of the JSME annual meeting, 2009(8) (8), 69 - 70, Japanese


• 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ

  菅野公二, 内田雄喜, 平井義和, 土屋智由, 田畑修

  23 Jul. 2009, 電気学会マイクロマシン・センサシステム研究会資料, MSS-09(1-13) (1-13), 7 - 12, Japanese


• 平成21年度電気学会センサ・マイクロマシン部門総合研究会

  菅野公二, 内田雄喜, 平井 義和, 土屋 智由, 田畑 修

  Jul. 2009, 平成21年度電気学会センサ・マイクロマシン部門総合研究会, 7 - 12, Japanese


• Report on "First International Conference on Application of Intelligent Particles and Sensors in Environmental and Process Engineering"

  SUGANO Koji

  10 May 2009, 粉体工学会誌, 46(5) (5), 385 - 386, Japanese


• Design and Fabrication of a Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes

  Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata

  May 2009, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4(3) (3), 345 - 351, English


• Modeling of Self-face-alignment Process Using Contact Potential Difference

  佐藤 亮, 種村 友貴, Guillermo,Lopez Hinojosa, Mohammed,Serry ElSayed Ahmed, 菅野 公二, 土屋 智由, 田畑 修

  Apr. 2009, International Conference on Electronics Packaging (ICEP2009),, pp. 959-962, 959 - 962, English

  [Refereed]


• Fabrication of Large-scale Nanoparticle Array Using Combination of Self-Assembly and 2-step Transfer

  SUGANO K, OZAKI T, TSUCHIYA T, TABATA O

  Apr. 2009, Int Conf Electron Packag, 2009, 409 - 412, English

  [Refereed]


• 静電容量型ＭＥＭＳデバイスを用いたカーボンナノ材料引張試験

  浦靖武, 菅野公二, 土屋智由, 田畑修

  17 Mar. 2009, 電気学会全国大会講演論文集, 2009(3) (3), 182 - 183, Japanese

  [Refereed]


• Capacitive micromachined ultrasonic transducers with novel membrane design

  M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

  2009, PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 1(1) (1), 389 - 392, English


• Tensile testing of fullerene nano wire using electrostatic MEMS device

  Yasutake Ura, K. Sugano, T. Tsuchiya, O. Tabata

  2009, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2062 - 2065, English

  [Refereed]


• Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist

  Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

  2009, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616 - 1619, English

  [Refereed]


• SEQUENTIAL AND SELECTIVE SELF-ASSEMBLY OF MICRO COMPONENTS BY DNA GRAFTED POLYMER

  T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda

  2009, IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 184 - 187, English

  [Refereed]


• Free-standing C(60) nanowire fabricated using XeF(2) sacrificial dry etching

  Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata

  Jan. 2009, JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 8(1) (1), English


• Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique

  HIRAI Yoshikazu, INAMOTO Yoshiteru, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  22 Oct. 2008, Proc Sens Symp Sens Micromachines Appl Syst, 25th, 15 - 20, English

  [Refereed]


• Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannnel

  中田 哲博, 田中 伸治, 菅野 公二, 土屋 智由, 田畑 修

  Oct. 2008, The 12th International Conference on Miniturized Systems for Chemistry and Life Sciences,, pp. 730-732, 730 - 732, English

  [Refereed]


• 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property

  Yoshikazu, Hirai, Sugano, Kouji, Tsuchiya, Toshiyuki, Tabata, Osamu

  Sep. 2008, The 22nd international conference EUROSENSORS (EUROSENSORS XXII),, pp. 1559-1602, 1559 - 1602, English

  [Refereed]


• バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路

  中田哲博, 田中伸治, 菅野公二, 土屋智由, 田畑修

  02 Aug. 2008, 日本機械学会年次大会講演論文集, 2008(Vol.8) (Vol.8), 23 - 24, Japanese

  [Refereed]


• 単結晶シリコン引張試験における表面酸化の影響評価

  土屋 智由, 宮本 憲治, 菅野 公二, 田畑 修

  Aug. 2008, 日本機械学会2008年度年次大会,8, pp. 157-158, 8, 157 - 158, Japanese

  [Refereed]


• セルフアセンブルによるマイクロ/ナノコンポーネントのMEMSへの集積化

  佐藤 亮, 種村 友貴, 菅野 公二, 土屋 智由, 田畑 修

  Jul. 2008, エレクトロニクス実装学会関西ワークショップ2008, 0, Japanese


• ポジ型厚膜レジストの溶解速度の露光波長依存性と３次元加工への応用

  平井義和, 菅野公二, 土屋智由, 田畑修

  12 Jun. 2008, 電気学会マイクロマシン・センサシステム研究会資料, MSS-08(1-21) (1-21), 1 - 6, Japanese

  [Refereed]


• 電気等価回路モデルによる高周波駆動バルブレス圧電マイクロポンプの特性解析

  菅野 公二, 田中 伸治, 土屋 智由, 田畑 修

  Jun. 2008, 平成20年度電気学会センサ・マイクロマシン部門総合研究会, 61 - 66, Japanese


• Design of a soft X-ray source with periodic microstructure using resonance transition radiation for tabletop synchrotron

  Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata

  May 2008, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3(3) (3), 268 - 273, English


• Mechanical calibration of MEMS springs with sub-micro-Newton force resolution

  Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

  May 2008, SENSORS AND ACTUATORS A-PHYSICAL, 143(1) (1), 136 - 142, English


• Contact Potential Difference for Face Alignment of Submillimeter Components with Chemical Reaction Kinetics

  T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Karl F Bhringer

  Apr. 2008, FNANO2008, 0, English


• 2122 Self-Assembly Process using Electrostatic Adhesion Energy By Contact Electrification and its Modeling

  Sato Ryo, TANEMURA Tomoki, HIGUCHI Yuichi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  Novel self-assembly process using electrostatic adhesion energy induced by contact electrification phenomenon was proposed and its analytical formulation was performed for the first time. The contact electrification, which is observed when two different metals, such as platinum (Pt) - Silver (Ag) are contacted, was utilized to align a face of a component on a substrate. First, two types of 1 mm square silicon components with thickness of 0.5 mm coated with Pt or Ag and R substrate were prepared. Adhesion energies for two different metal pairs (Pt-Ag and Pt-Pt) were measured by measuring the vibration energy to separate the components from the vibrating substrate. The experimental results indicated the adhesion energy between Pt-Pt was 0.57 nJ, and Pt-Ag was 1.4 nJ on an average. Next, the face alignment experiment was carried out by vibrating the substrate on which 20 components with thickness of 0.2 mm were placed. The front and back face of the components were coated with R and Ag, respectively and they were split into half of R face up and the other half of Ag face up. We could get 83 % components were aligned as R face up. Finally, modeling of the proposed self-assembly process was performed based on the concept of chemical reaction formula. The forward and reverse reaction rates of the face alignment process were determined by fitting the foumula to the experimental data.

  The Japan Society of Mechanical Engineers, 17 Mar. 2008, Conference on Information, Intelligence and Precision Equipment : IIP, 2008, 271 - 274, Japanese


• 2121 Manipulation system for nano / micro components integration via transportation and self-assembly

  HIGUCHI Yuichi, KUSAKABE Tatsuya, TANEMURA Tomoki, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  We developed, for the first time, the manipulation system based on optoelectronic tweezers (OET) which manipulates multiple nano/micro components on an arbitrary substrate with concurrent observation of the component motion. It uses CdS as a photoconductive film. Since CdS transmits red light and absorbs blue light, red light is utilized for the observation and blue light is utilized for the manipulation. The photoconductive electrode substrate which generates the nonuniform electric field for the component manipulation using dielectrophoresis consists of CdS on comb ITO electrode. Using the substrate, it was successfully demonstrated to manipulate a silica particle. Light projected CdS/ITO area had the higher electric field and repelled silica particle. By appling 10 V at 100 kHz, manipulation force of 0.6 pN was induced and manipulated silica particle speed was about 7 μm/s.

  The Japan Society of Mechanical Engineers, 17 Mar. 2008, Conference on Information, Intelligence and Precision Equipment : IIP, 2008, 269 - 270, Japanese


• 微小コンポーネントの接触帯電によるセルフフェースアライメントプロセスのモデリング

  佐藤 亮, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2008, 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0, Japanese


• 任意基板への微小要素の集積化のためのマニピュレーションシステム

  樋口 雄一, 日下部 達哉, 種村 友貴, 佐藤 亮, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2008, 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0, Japanese


• 櫛歯型垂直変位電極を用いた基板面内軸回転検出振動型SOI ジャイロスコープ

  濱口 裕之, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2008, 電気学会全国大会,3, pp. 195-196, 3, 195 - 196, Japanese

  [Refereed]


• レジスト現像特性の露光波長依存性を応用した厚膜レジストの３次元微細加工技術

  平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2008, 電気学会全国大会,3, pp. 138-139, 3, 138 - 139, Japanese

  [Refereed]


• Y-AXIS VIBRATING SOI GYROSCOPE USING VERTICAL COMB ELECTRODES

  H. Hamaguchi, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2008, The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 0, English


• Effect of surface oxide layer on mechanical properties of single crystalline silicon

  Kenji Miyamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2008, MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 1052, 53 - 58, English

  [Refereed]


• Contact potential difference for sequential assembly and face alignment of submillimeter components

  T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata

  2008, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1056 - 1059, English

  [Refereed]


• DNA mediated sequential self-assembly of nano/micro components

  T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata

  2008, MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052 - 1055, English

  [Refereed]


• Gold nanoparticle patterning by self-assembly and transfer for LSPR based sensing

  T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata

  2008, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1048 - 1051, English

  [Refereed]


• Manipulation system for nano/micro components integration via transportation and self-assembly

  Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata

  2008, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 836 - 839, English

  [Refereed]


• Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching

  T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata

  2008, MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689 - 692, English

  [Refereed]


• Design construction of beam structured vertical drive SMA thin film actuator for small tactile display

  Wataru Yoshikawa, Akio Sasabe, Kouji Sugano, Toshiyuki Tsuchiya, Akira Ishida, Osamu Tabata

  2008, IEEJ Transactions on Sensors and Micromachines, 128(4) (4), 6 - 160, Japanese


• Design and simulation of a tactile sensor for soft-tissue compliance detection

  Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam

  2008, IEEJ Transactions on Sensors and Micromachines, 128(5) (5), 186 - 192, English


• Air damping in a fan-shaped rotational resonator with comb electrodes

  Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara

  2008, IEEJ Transactions on Sensors and Micromachines, 128(5) (5), 203 - 208, English


• Effect of surface oxidation on mechanical properties of single crystalline silicon

  MIYAMOTO Kenji, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  16 Oct. 2007, Proc Sens Symp Sens Micromachines Appl Syst, 24th, 165 - 168, English

  [Refereed]


• 3313 Self-Assembly Using Electrostatic Adhesion Energy By Contact Electrification

  TANEMURA Tomoki, KUSAKABE Tatsuya, HIGUCHI Yuichi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  Novel self-assembly process using electrostatic adhesion energy induced by contact electrification phenomenon is proposed for the first time. The contact electrification, which is observed when two different metals, such as platinum (Pt)-Silver (Ag) are contacted, was utilized to align a face of a component on a substrate. Two types of 1mm square silicon components with thickness of 0.5mm coated with Pt or Ag and Pt substrate were prepared. Adhesion energies for two different metal pairs (Pt-Ag and Pt-Pt) were measured by measuring the vibration energy to separate the components from the vibrating substrate. The experimental results indicated the adhesion energy between Pt-Pt was 0.57nJ, and Pt-Ag was 1.4nJ on an average. Secondly, the face alignment experiment was carried out by vibrating the substrate on which 20 components with thickness of 0.2mm were placed. The front and back face of the components were coated with Pt and Ag, respectively and they were split into half of Pt face up and the other half of Ag face up. Finally, we could get 83% components were aligned as Pt face up.

  The Japan Society of Mechanical Engineers, Sep. 2007, The proceedings of the JSME annual meeting, 2007, 313 - 314, Japanese


• 低侵襲触覚センサーの構造設計

  田村 智久, ファス エルバブアハメッド, 菅野 公二, 土屋 智由, 田畑 修

  Sep. 2007, 日本機械学会2007年度年次大会, 307 - 308, Japanese


• 移動マスクUV露光法によるポジ型厚幕レジストの3次元加工と形状シミュレーション技術

  平井 義和, 稲本 好輝, 菅野 公二, 土屋 智由, 田畑 修

  Sep. 2007, 日本機械学会2007年度年次大会, 303 - 304, Japanese


• ナノテンプレートを用いたセルフアセンブルによる粒子パターン形成

  尾崎 貴志, 菅野 公二, 土屋 智由, 田畑 修

  Aug. 2007, 粉体工学会第43回夏期シンポジウム, 52 - 53, Japanese


• DNAの選択性およい温度特性を利用したAuナノ微粒子のセルフアセンブル

  日下部 達哉, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由

  Aug. 2007, 粉体工学会第43回夏期シンポジウム,, pp. 19-20, 19 - 20, Japanese

  [Refereed]


• Flow Analysis of Valveless Piezoelectric Micropump with Electrical Equivalent Circuit Model and Its Experimental Validation

  TANAKA Shinji, ICHIHASHI Osamu, TSUCHIYA Toshiyuki, TABATA Osamu

  Jul. 2007, 電気学会総合研究会, 2007(1) (1), 79 - 84, Japanese


• Development profile simulation tool adopting Fast Marching Method for the Moving-mask UV lithography method

  HIRAI Yoshikazu, INAMOTO Yoshiteru, TSUCHIYA Toshiyuki, TABATA Osamu

  Jul. 2007, 電気学会総合研究会, 2007(1) (1), 19 - 24, Japanese


• マイクロ流体デバイスを用いた混合速度制御による金ナノ粒子作製

  菅野 公二, 田中 伸治, 市橋 治, 土屋 智由, 田畑 修

  Jun. 2007, 化学とマイクロシステム, 0, Japanese


• Versatile method of submicroparticle pattern formation using self-assembly and two-step transfer

  Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Jun. 2007, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16(3) (3), 746 - 752, English


• 1119 Tensile Testing of Carbon Nano Materials using Electrostatic MEMS Device

  JOMORI Tomoya, MIYAMOTO Kenji, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  A new on-chip tensile testing device using electrostatic actuation and detection was designed and fabricated from an SOI wafer to evaluate the mechanical properties of carbon nano materials such as carbon nano-tubes and fullerenes. In this device, force is generated by electrostatic comb drive actuator and tensile force on specimen is measured as the deformation of force-measuring spring. The specimen elongation and the spring deformation are detected as capacitance changes. As a result of design, we predicted high resolution of elongation and tensile force, which are 1nm and 1nN respectively. In order to assemble carbon nano-material on this device, a new technique for fabricating a free-standing fullerene nano-wire was proposed. This wire was fabricated using electron beam writing and sacrificial dry etching. By irradiated vacuum-deposited fullerene thin film with electron beam, polymerized fullerene nano-wires were patterned. Then, the doubly-supported beam structure of the fullerene nano-wire was obtained by sacrificial dry etching using XeF_2 gas.

  The Japan Society of Mechanical Engineers, 19 Mar. 2007, Conference on Information, Intelligence and Precision Equipment : IIP, 2007, 66 - 69, Japanese


• 移動マスクUV露光法による埋め込み型流路の作製

  稲本 好輝, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2007, 平成19年，電気学会全国大会, 181 - 182, Japanese


• DNA修飾した微小コンポーネントのシーケンシャルセルフアセンブリ

  日下部達哉, 菅野公二, 土屋 智由, 田畑 修

  Mar. 2007, 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82 - 83, Japanese


• EB描画によるナノパターンを用いたナノ粒子アセンブル

  菅野 公二, 尾崎 貴志, 土屋 智由, 田畑 修

  Mar. 2007, 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82 - 83, Japanese


• 静電容量型MEMS デバイスを用いたカーボンナノ材料引張試験

  城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2007, 日本機械学会情報・知能・精密機器部門講演会, 0, Japanese


• Moving mask UV lithography for three-dimensional structuring

  Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Feb. 2007, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 17(2) (2), 199 - 206, English


• Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments

  Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya

  2007, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 267 - 270, English

  [Refereed]


• Mechanical calibration of MEMS spring with 0.1-mu N force resolution

  Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

  2007, PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 21 - 24, English

  [Refereed]


• Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron

  Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata

  2007, AIP Conference Proceedings, 902, 121 - 124, English

  [Refereed]


• Tensile testing of single crystal silicon thin films at 800 degrees C using IR heating

  T. Ikeda, K. Sugano, T. Tsuchiya, O. Tabata

  2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 571 - 574, English

  [Refereed]


• Analysis of valveless piezoelectric micropump using electrical equivalent circuit model

  S. Tanaka, O. Ichihashi, K. Sugano, T. Tsuchiya, O. Tabata

  2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2183 - 2186, English

  [Refereed]


• Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring

  Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata

  2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 545 - 548, English

  [Refereed]


• A differential caeacitive three-axis SOI accelerometer using vertical comb electrodes

  H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata

  2007, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 1483 - 1486, English

  [Refereed]


• Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives

  Yuichi Higuchi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  2007, 6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 128 - +, English

  [Refereed]


• Sequential Stacking Self-Assembly using Interfacial Tension of Two Different Droplets

  Higuchi Yuichi, Sugano Koji, Tsuchiya Toshiyuki, Tabata Osamu

  In this paper, a new sequential stacking self-assembly using interfacial tension of two different droplets of TEGDMA (Triethyleneglycol Dimethacrylate) and 42Sn-58Bi solder was proposed. TEGDMA with an additional thermal initiator is liquid at room temperature and hardens by heat. 42Sn-58Bi solder is solid at room temperature and melts at 138 °C. Since interfacial tension of TEGDMA and 42Sn-58Bi solder are selectively utilized by setting the process temperature at room temperature for TEGDMA and 150 °C for 42Sn-58Bi solder, the sequential self-assembly of different components can be realized. The feasibility of the proposed process and alignment accuracy were experimentally examined using 1 mm square silicon chips as test components. The first component assembly on a substrate was carried out at room temperature using TEGDMA as an adhesive agent, and the second component assembly on the assembled component was carried out at 150 °C using 42Sn-58Bi solder as an adhesive agent. Both self-assembly processes were carried out in EG (Ethylene Glycol) solvent with an additional sulfuric acid. It was confirmed that the first and second self-assembly was successfully done at room temperature and at 150 °C, and alignment accuracy of first and second self-assembly were 33 μm and a few μm, respectively.

  The Institute of Electrical Engineers of Japan, 2007, The Journal of the Institute of Electrical Engineers of Japan, 127(4) (4), 214 - 220, Japanese


• 単層カーボンナノチューブ引張試験のための静電容量型MEMS デバイスの構造設計

  城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修

  Dec. 2006, 第50回日本学術会議材料工学連合講演会, 0, Japanese


• 高温薄膜引張試験機の試作および単結晶シリコン薄膜の物性評価

  池田 哲郎, 菅野 公二, 土屋 智由, 田畑 修

  Dec. 2006, 第50回日本学術会議材料工学連合講演会, 0, Japanese


• Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing

  OZAKI Takashi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  05 Oct. 2006, Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 19 - 22, English

  [Refereed]


• A differential capacitive three-axis SOI accelerometer using vertical comb electrodes

  HAMAGUCHI Hiroyuki, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  05 Oct. 2006, Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 471 - 476, English

  [Refereed]


• 移動マスクUV露光法による厚膜レジストの三次元微細加工技術

  平井 義和, Inamoto, 菅野 公二, 土屋 智由, 田畑 修

  Oct. 2006, Proceedings of the 23rd Sensor Symposium, 471 - 476, Japanese


• 電磁式天秤を用いたマイクロ構造のバネ定数測定

  宮本 憲治, 城森 知也, 菅野 公二, 土屋 智由, 田畑 修

  Sep. 2006, 日本機械学会2006年年次大会, 0, Japanese


• 薄膜材料の高温引張試験に関する基礎検討

  池田哲郎, 菅野公二, 土屋 智由, 田畑 修

  May 2006, 電気学会E部門総合研究会, MSS-06-18, 83 - 87, Japanese


• 単結晶シリコン薄膜の環境制御引張疲労試験

  山地 祐輔, 菅野 公二, 土屋 智由, 田畑 修

  Mar. 2006, 電気学会全国大会, 3, 198 - 199, Japanese


• Vertical drive micro actuator using SMA thin film for a smart button

  W Yoshikawa, A Sasabe, K Sugano, T Tsuchiya, O Tabata, A Ishida

  2006, MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 734 - 737, English

  [Refereed]


• Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps

  K. Sugano, H. Yamada, O. Ichihashi, T. Tsuchiya, O. Tabata

  2006, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2006, 546 - 549, English

  [Refereed]


• Tensile-Mode Fatigue Test of Single Crystal Silicon Thin Films Using Electrostatic Grip

  Yusuke Yamaji, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Oct. 2005, PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 311 - 315, English


• Gold Nanoparticles Synthesis With Pulsed Mixing Method

  Hideo Yamada, Osamu Ichihashi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

  Oct. 2005, PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 329 - 332, English


• Particle Adhesion Forces Measurements in Solutions for Particle Assemble

  ICHIHASHI Osamu, LEE JooWon, ISII Masahiro, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

  Jun. 2005, 電気学会E部門総合研究会, 2005(21) (21), 57 - 62, Japanese


• Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip

  H Yagyu, K Sugano, S Hayashi, O Tabata

  Jun. 2005, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 15(6) (6), 1236 - 1241, English


• Fabrication of Silicon Mold for Hot Embossing using ICP-RIE

  ONO Yasukazu, SUGANO Koji, TABATA Osamu

  10 Mar. 2005, 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2005(1) (1), 49 - 54, Japanese


• Simulation of Surface Roughness in Si Etching with XeF

  Koji Sugano, Osamu Tabata

  Jul. 2004, Asia-Pacific Conference of Transducers and Micro-Nano Technology, 547 - 552, English


• Simulation of Surface Roughness in Si Etching with XeF2

  Koji Sugano, Osamu Tabata

  2004, 第21回「センサ・マイクロマシンと応用システム」シンポジウム, 483 - 488, Japanese


• マイクロブラストを用いたμ-TASガラスチップの作製

  楠原賢治, 菅野公二, 田畑 修, 柳生裕聖

  2004, 電気学会E部門総合研究会, 75 - 80, Japanese


• Rapid prototyping of glass chip with micro-powder blasting using nano-particles dispersed polymer

  H Yagyu, K Sugano, S Hayashi, O Tabata

  2004, MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 697 - 700, English

  [Refereed]


• マイクロマシニングを用いた軟Ｘ線遷移放射ターゲット

  菅野 公二, 田畑 修, 辻 慎史, 豊杉 典生, 山田 廣成

  2003, 電気学会研究会資料，マイクロマシン・センサシステム研究会, MSS-03-35, 35 - 39, Japanese


• Reduction in surface roughness and aperture size effect for XeF2 etching of Si

  K. Sugano, O. Tabata

  2003, Proceedings of SPIE - The International Society for Optical Engineering, 4979, 62 - 69, English

  [Refereed]


• Reduction of surface roughness and aperture size effect for etching of Si with XeF2

  K. Sugano, O. Tabata

  Nov. 2002, Journal of Micromechanics and Microengineering, 12(6) (6), 911 - 916, English


• Effects of aperture size and pressure on XeF2 etching of silicon

  K Sugano, O Tabata

  Nov. 2002, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 9(1-2) (1-2), 11 - 16, English


• Techniques for reduction in surface roughness and aperture size effect for XeF2 etching of Si

  K Sugano, O Tabata

  2002, MHS2002: PROCEEDINGS OF THE 2002 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 47 - 52, English


• XeF2 を用いたSi エッチングにおける表面粗さと加工深さの制御

  菅野 公二, 田畑 修

  2002, 第19回「センサ・マイクロマシンと応用システム」シンポジウム, 303 - 308, Japanese


• XeF2エッチングにおけるエッチング特性と紫外線照射によるマスク材のエッチレート制御

  菅野 公二, 田畑 修

  2001, マイクロマシニング研究会, 0, Japanese


• Etching rate control of mask material for XeF2 etching using UV exposure

  Koji Sugano, Osamu Tabata

  2001, Proceedings of SPIE-The International Society for Optical Engineering, 4557, 18 - 23, English

  [Refereed]


• Selectivity Control of Mask Material for XeF2 Etching Using UV light Exposure

  2001, 電気学会センサ・マイクロマシン準部門論文誌, Vol.121-E, No.12, pp.327-332


• Selectivity Control of Mask Material for XeF2 Etching Using UV light Exposure

  2001, 電気学会センサ・マイクロマシン準部門論文誌, Vol.121-E, No.12, pp.327-332


• Effects of etching pressure and aperture width on Si etching with XeF₂

  K. Sugano, O. Tabata

  2000, Proceedings of the International Symposium on Micro Machine and Human Science, 89 - 94, English

  [Refereed]


• Study on XeF₂ pulse etching using wagon wheel pattern

  Koji Sugano, Osamu Tabata

  1999, Proceedings of the International Symposium on Micro Machine and Human Science, 163 - 167, English

  [Refereed]

• 静電型マイクロ振動子トランスデューサを用いたシリコン近赤外光強度センサ

  中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

  第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2020, Japanese

  Poster presentation


• Electrical and Optical Characterization of Nanogap Electrodes with an Assembled Gold Nanoparticle Chain

  Takayuki Sumitomo, Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono

  33rd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2020, English

  Oral presentation


• Growth Direction of VLS Silicon Nanowires with Surface Nanoholes Formed Using MACE

  Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono

  33rd International Microprocesses and Nanotechnology Conference (MNC2020), Nov. 2020, English

  Oral presentation


• マイクロ振動子のたわみ制御による振動型光センサの高感度化

  竹上 航平, 新居 直之, 上杉 晃生, 菅野, 磯野 吉正

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  Oral presentation


• ⾦ナノ構造光吸収体集積静電型マイクロ振動⼦デバイスによる近⾚外光強度センシング

  鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  Poster presentation


• 光センシングマイクロ共振デバイスの梁長さおよび振幅が計測分解能に与える影響

  近藤 直輝, 竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  Oral presentation


• 高温パンチクリープ成形技術を用いた3軸力覚センサの開発および被覆樹脂の粘弾性特性を考慮したセンサ性能評価

  澤田 和磨, 丹村 響介, 大坂 憲司, 上杉 晃生, 菅野 公二, 磯野 吉正

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  Oral presentation


• 金ナノ構造を用いた波長依存性を有するSOI型近赤外ボロメータ素子

  坪田 達也, 上杉 晃生, 菅野 公二, 磯野 吉正

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  Oral presentation


• 金ナノ粒子二量体を用いたナノギャップ電極の作製とその電気的・光学的評価

  住友 孝行, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  Oral presentation


• 近赤外吸収体を有する静電型マイクロ振動子デバイスを用いた水の分光測定

  鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

  第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese

  Oral presentation


• シリコンマイクロ振動子光センサにおける共振周波数特性の形状依存性

  竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

  第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  Poster presentation


• 架橋成長Si ナノワイヤの熱電特性評価に関する研究

  北川 諒, 岸本 卓巳, 小國 凌, 上杉 晃生, 菅野 公二, 磯野 吉正

  第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  Poster presentation


• コアシェルSiC ナノワイヤの電気伝導性に及ぼすシェル表面電位

  井ノ山 滉大, 仲田 進哉, 上杉 晃生, 菅野 公二, 磯野 吉正

  第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  Poster presentation


• 金ナノグレーティング構造の光吸収ピーク波長制御による高感度レーザ波長計測マイクロ振動子デバイス

  竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

  第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  Poster presentation


• 光励起ナノギャップ電極を用いたDNA オリゴマーの光トラップおよび1 分子検出

  森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

  第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  Oral presentation


• 金ナノ粒子二量体表面増強ラマン分光によるDNA オリゴマーの1 塩基検出

  金谷 恭臣, 丸岡 克成, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

  第36回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2019, Japanese

  Poster presentation


• Evaluation of Thermoelectric Properties of VLS-Grown Bridged Si Nanowire

  Akio Uesugi, Ryo Kitagawa, Ryo Oguni, Koji Sugano, Yoshitada Isono

  32nd International Microprocesses and Nanotechnology Conference (MNC2019), Oct. 2019, English

  Poster presentation


• Near-Infrared Light Absorbers Using Si-Deposited Gold Nanowire Grating Structures

  Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

  32nd International Microprocesses and Nanotechnology Conference (MNC2019), Oct. 2019, English

  Poster presentation


• Effect of The Numbers of Beams and Corners on Resonant Frequency Response of Silicon Microresonator to Near-Infrared-Light Irradiation for Optical Sensing

  Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

  32nd International Microprocesses and Nanotechnology Conference (MNC2019), Oct. 2019, English

  Poster presentation


• Effect of Gold Nanoparticle Diameter on Raman Intensity of DNA Oligomers toward Single Nucleobase Detection

  Keji Murotani, Katsunari Maruoka, Akio Uesugi, Koji Sugano, Yoshitada Isono

  32nd International Microprocesses and Nanotechnology Conference (MNC2019), Oct. 2019, English

  Oral presentation


• Microresonator-Based Photodetector of Near-Infrared Light Using Electrostatic Transducers

  Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono

  32nd International Microprocesses and Nanotechnology Conference (MNC2019), Oct. 2019, English

  Oral presentation


• Single-molecule Surface Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimer

  Koji Sugano

  2019 International Conference on Optical MEMS and Nanophotonics (IEEE OMN 2019), Aug. 2019, English

  [Invited]

  Invited oral presentation


• Surface-Enhanced Raman Spectroscopy of DNA with Single-Molecule Sensitivity Using Gold Nanoparticle Dimer

  Koji Sugano

  The 19th IEEE International Conference on Nanotechnology (IEEE-NANO2019), Jul. 2019, English

  [Invited]

  Invited oral presentation


• SERS detection of a single nucleobase in a DNA oligomer using gold nanoparticle dimer

  Koji Sugano, Katsunari Maruoka, Akio Uesugi, Yoshitada Isono

  The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2019), Jun. 2019, English

  Poster presentation


• Manipulation of biomolecules into nanogap by plasmonic optical excitation for highly sensitive biosensing

  Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono

  The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2019), Jun. 2019, English

  Oral presentation


• Surface-Enhanced Raman Spectroscopy of DNA Bases Using Gold Nanoparticle Dimer Array

  Katsunari Maruoka, Kohei Ikegami, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA

  31st International Microprocesses and Nanotechnology Conference (MNC2018), Nov. 2018, English, International conference

  Poster presentation


• Development of 3D Formed Tactile Sensor by High Temperature Punch Creep Forming Technique

  Kyosuke Nimura, Kenji Osaka, Takao Toyoda, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA

  31st International Microprocesses and Nanotechnology Conference (MNC2018), Nov. 2018, English, International conference

  Oral presentation


• VLS成長SiNW単体に対する熱電変換特性評価

  北川 諒, 井本 大暉, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA

  第35回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2018, Japanese, Domestic conference

  Poster presentation


• Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性

  新居 直之, UESUGI Akio, SUGANO KOJI, ISONO YOSHITADA

  第35回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2018, Japanese, Domestic conference

  Poster presentation


• 単結晶シリコン薄膜の高温パンチクリープ成形による極小3軸力覚センサの開発

  丹村 響介, 大坂 憲司, 豊田 崇夫, SUGANO KOJI, ISONO YOSHITADA

  日本材料学会マルチスケール材料力学シンポジウム, May 2018, Japanese, Domestic conference

  Oral presentation


• A Novel 3-axis Tiny Tactile Sensor Developed by 3-D Microstructuring Using Punch Creep Forming Process

  Kenji Osaka, Satoshi Nakata, kensuke Yamamoto, Takao Toyoda, SUGANO KOJI, ISONO YOSHITADA

  The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2018), Jan. 2018, English, International conference

  Poster presentation


• Surface-Enhanced Raman Spectroscopy of Adenine Molecule Using Single Dimer of Gold Nanoparticles

  Katsunari Maruoka, Kohei Ikegami, SUGANO KOJI, ISONO YOSHITADA

  30th International Microprocesses and Nanotechnology Conference (MNC2017), Nov. 2017, English, International conference

  Poster presentation


• Laser Wavelength Measurement Using Gold Nanoparticle Aggregate Integrated Microresonator

  SUGANO KOJI, Shuji Joya, Naoyuki Arai, Yuki Tanaka, Etsuo Maeda, Reo Kometani, ISONO YOSHITADA

  30th International Microprocesses and Nanotechnology Conference (MNC2017), Nov. 2017, English, International conference

  Oral presentation


• 単一金ナノ粒子二量体を用いた表面増強ラマン分光によるDNAオリゴマー1分子検出

  丸岡 克成, SUGANO KOJI, ISONO YOSHITADA

  第34回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2017, Japanese, Domestic conference

  Oral presentation


• 高温クリープ立体成形技術による極小MEMS触覚センサの開発研究

  大坂 憲司, 中田 悟史, 山本 賢祐, SUGANO KOJI, ISONO YOSHITADA

  第34回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2017, Japanese, Domestic conference

  Poster presentation


• Si薄膜被覆金ナノワイヤグレーティング構造の近赤外域光学特性評価

  新居 直之, SUGANO KOJI, ISONO YOSHITADA

  第34回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2017, Japanese, Domestic conference

  Poster presentation


• Evaluation of mechano-electric properties for VLS-grown core/shell silicon carbide nanowires

  Shinya Nakata, Daiki Imoto, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA

  14th International Conference on Fracture, Jun. 2017, English, International conference

  Oral presentation


• VLS成長Core/Shell-SiCナノワイヤのピエゾ抵抗効果に及ぼすSiO2被覆の影響

  仲田 進哉, SUGANO KOJI, ISONO YOSHITADA

  日本材料学会マルチスケール材料力学シンポジウム, May 2017, Japanese, Domestic conference

  Poster presentation


• ボトムアップナノ構造形成技術とバイオ・ケミカルセンサへの応用

  SUGANO KOJI

  平成29年電気学会全国大会, Mar. 2017, Japanese, Domestic conference

  [Invited]

  Invited oral presentation


• 単一金ナノ粒子二量体を用いたアデニンの表面増強ラマン分光検出

  丸岡 克成, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA

  フィジカルセンサ/マイクロマシン・センサシステム合同研究会, Dec. 2016, Japanese, Domestic conference

  Oral presentation


• Si薄膜被覆金ナノワイヤアレイ構造の光学特性評価

  新居 直之, 城谷 修司, SUGANO KOJI, ISONO YOSHITADA

  フィジカルセンサ/マイクロマシン・センサシステム合同研究会, Dec. 2016, Japanese, ，城谷修司，菅野公二，磯野吉正, Domestic conference

  Oral presentation


• Piezoresistance effect of VLS-synthesized core/shell-SiC nanowires

  Shinya Nakata, Daiki Imoto, SUGANO KOJI, Francesca Rossi, Alois Lugstein, ISONO YOSHITADA

  International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference

  Poster presentation


• Near Infrared Optical Absorption Property of Gold Nanoparticle Aggregates for Laser Wavelength Measurement

  Shuji Joya, Naoyuki Arai, Yuki Tanaka, SUGANO KOJI, ISONO YOSHITADA

  International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference

  Poster presentation


• High temperature creep forming technique of single crystal silicon thin film for 3D MEMS tactile sensors

  Kensuke Yamamoto, Satoshi Nakata, SUGANO KOJI, ISONO YOSHITADA

  International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference

  Poster presentation


• Highly-Sensitive and Rapid Detection of DNA bases using Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimer Array

  Kohei Ikegami, SUGANO KOJI, ISONO YOSHITADA

  International Symposium on Micro-Nano Science and Technology2016, Dec. 2016, English, International conference

  Poster presentation


• Single-Molecule Surface-Enhanced Raman Spectroscopy of 4,4'-bipyridine on Fabricated Substrates with Directionally Arrayed Gold Nanoparticle Dimers

  SUGANO KOJI, Kiyohito Aiba, Kohei Ikegami, ISONO YOSHITADA

  29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference

  Oral presentation


• Optimization of Gold Nanorod Array Structure on Microresonator for Resonant-Based Laser Wavelength Measurement Using Photothermal Conversion

  SUGANO KOJI, Yuki Tanaka, Etsuo Maeda, Reo Kometani, ISONO YOSHITADA

  29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference

  Oral presentation


• Mechanical Characterization of VLS-Grown Core-Shell SiC Nanowires for Nanomechanical Sensors

  Shinya Nakata, SUGANO KOJI, Francesca Rossi, Giancarlo Salyiati, Alois Lugstein, Yoshitada Isono

  29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference

  Oral presentation


• Characterization Method of Relative Raman Enhancement for Surface Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimer Array

  Kohei Ikegami, SUGANO KOJI, ISONO YOSHITADA

  29th International Microprocesses and Nanotechnology Conference (MNC2016), Nov. 2016, English, International conference

  Oral presentation


• 金ナノ粒子二量体配列を用いたDNA塩基の高感度・高速表面増強ラマン分光

  池上 晃平, SUGANO KOJI, ISONO YOSHITADA

  第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference

  Oral presentation


• 金ナノロッド構造を用いた光熱変換によるレーザ光波長計測マイクロ振動子デバイス

  SUGANO KOJI, 田中 祐樹, 前田 悦男, 米谷 玲皇, ISONO YOSHITADA

  第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference

  Oral presentation


• 逆解析手法による単結晶Si薄膜の高温クリープ特性解明と触覚センサ開発への応用

  山本 賢祐, 中田 悟史, SUGANO KOJI, ISONO YOSHITADA

  第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference

  Oral presentation


• 逆解析による単結晶Si薄膜の三次元高温クリープ成形加工技術の確立

  山本 賢祐, 中田 悟史, SUGANO KOJI, ISONO YOSHITADA

  日本機械学会 M&M2016材料力学カンファレンス, Oct. 2016, Japanese, Domestic conference

  Oral presentation


• VLSボトムアップ成長Core/Shell-SiCナノワイヤのMEMS援用ピエゾ抵抗特性評価

  仲田 進哉, 井本 大暉, Feancesca Rossi, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA

  第33回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2016, Japanese, Domestic conference

  Oral presentation


• Single Molecule SERS with Directionally Arrayed Gold Nanoparticle Dimers on Substrate

  SUGANO KOJI

  Pacific Rim Meeting on Electrochemical and Solid-state Science 2016 (PRiME2016), Oct. 2016, English, International conference

  [Invited]

  Invited oral presentation


• 逆解析手法による単結晶シリコン薄膜の高温クリープ三次元成形加工技術の確立

  山本 賢祐, 中田 悟史, SUGANO KOJI, ISONO YOSHITADA

  マルチスケール材料力学シンポジウム, May 2016, Japanese, Domestic conference

  Poster presentation


• 3C-SiCNWのMEMS援用Elastic Strain Engineering研究 －ピエゾ抵抗効果の実験解明

  仲田 進哉, 井本 大暉, SUGANO KOJI, ISONO YOSHITADA

  マルチスケール材料力学シンポジウム, May 2016, Japanese, Domestic conference

  Oral presentation


• Plasmonic Nanostructure based on Self-Assembled Gold Nanoparticles for Highly Sensitive Surface-Enhanced Raman Spectroscopy

  SUGANO KOJI

  The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS2016), Apr. 2016, English, International conference

  [Invited]

  Invited oral presentation


• Fabrication and Characterization of CNT Forest Integrated Micromechanical Resonator for Rarefied Gas Sensor

  SUGANO KOJI, Ryu Matsumoto, Ryota Tsutsui, Hiroyuki Kishihara, Naoki Matsuzuka, ISONO YOSHITADA

  The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Apr. 2016, English, International conference

  Oral presentation


• Crystal Orientation Dependence of Piezoresistivity for VLS-Grown Single Crystal Silicon Nanowires

  Shinya Nakata, Yuma Kitada, Stefan Wagesreither, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA

  The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Apr. 2016, English, International conference

  Oral presentation


• Gold Nanoparticle Synthesis Using High-Speed Pulsed Mixing Microfluidic Device

  SUGANO KOJI, Ayumi Maedomari, Yuki Tanaka, ISONO YOSHITADA

  28th International Microprocesses and Nanotechnology Conference (MNC2015), Nov. 2015, English, International conference

  Poster presentation


• 金ナノ粒子二量体配列を用いた表面増強ラマン分光におけるラマン増強度評価法

  池上 晃平, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA

  第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference

  Oral presentation


• 金ナノ粒子二量体配列を用いたDNA塩基の表面増強ラマン分光

  饗庭 清仁, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA

  第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference

  Poster presentation


• 金ナノ粒子二量体配列における表面増強ラマン分光1分子検出特性

  饗庭 清仁, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA

  第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference

  Oral presentation


• 金ナノ粒子直線状配列を用いた表面増強ラマン分光の特性評価

  池上 晃平, 竹下 俊光, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA

  第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference

  Oral presentation


• VLS成長シリコンナノワイヤの歪み誘起電気伝導特性の結晶方位依存性

  仲田 進哉, 北田 勇馬, Stefan Wagesreither, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA

  第32回「センサ・マイクロマシン と応用システム」シンポジウム, Oct. 2015, Japanese, Domestic conference

  Oral presentation


• Evaluation of Piezoresistivity for VLS-Grown Silicon NanowiresUnder Enormous Elastic Strain

  Sinya Nakata, Yuma Kitada, Stefan Wagesreither, Alois Lugstein, SUGANO KOJI, ISONO YOSHITADA

  International Conference on Advanced Technology in Experimental Mechanics 2015 (ATEM'15), Oct. 2015, English, International conference

  Oral presentation


• 直線状金ナノ粒子配列の表面増強ラマン分光特性

  竹下 俊光, 池上 晃平, SUGANO KOJI, ISONO YOSHITADA

  平成27年度電気学会マイクロマシン・センサシステム部門総合研究会, Jul. 2015, Japanese, Domestic conference

  Oral presentation


• Surface-Enhanced Raman Spectroscopy Analysis Using Micro/Nanofluidic Devices with Gold Nanoparticle-Embedded Nanochannels

  SUGANO KOJI, Keisuke Suekuni, Toshimitsu Takeshita, ISONO YOSHITADA

  27th International Microprocesses and Nanotechnology Conference (MNC2014), Nov. 2014, English, Fukuoka, Japan, International conference

  Oral presentation


• Highly-sensitive Surface-Enhanced Raman Spectroscopy with Directionally-Arrayed Gold Nanoparticle Dimers

  SUGANO KOJI, Daimon Matsui, Toshiyuki Tsuchiya, Osamu Tabata

  27th International Microprocesses and Nanotechnology Conference (MNC2014), Nov. 2014, English, Fukuoka, Japan, International conference

  Poster presentation


• 半導体ナノワイヤ物性評価のためのMEMS-Based Strain Engineering

  北田 勇真, 川瀬 真也, SUGANO KOJI, Stefan Wagesreither, Alois Lugstein, ISONO YOSHITADA

  第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014, Japanese, Domestic conference

  Poster presentation


• 金粒子配列ナノ流路を用いた表面増強ラマン分光分析デバイス

  竹下 俊光, 末國 啓輔, 饗庭 清仁, SUGANO KOJI, ISONO YOSHITADA

  第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光

  SUGANO KOJI, 松井 大門, 土屋 智由, 田畑 修

  第31回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• MEMS デバイスによる多層カーボンナノチューブの層間すべり変形機構の解明

  竹下 俊光, 木村 大気, SUGANO KOJI, ISONO YOSHITADA

  日本機械学会2014年度年次大会, Sep. 2014, Japanese, Domestic conference

  Oral presentation


• Surface-Enhanced Raman Spectroscopy for Molecular Trace Analysis using Directionally-Arranged Gold Nanoparticles

  SUGANO KOJI

  2014 International Symposium of Materials on Regenerative Medicine (2014 ISOMRM), Aug. 2014, English, Tao-Yuan, Taiwan, International conference

  [Invited]

  Invited oral presentation


• 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価

  SUGANO KOJI, 松井 大門, 土屋 智由, 田畑 修

  平成26年度電気学会マイクロマシン・センサシステム部門総合研究会, May 2014, Japanese, 東京大学，東京, Domestic conference

  Oral presentation


• 表面増強ラマン分光法のための金粒子配列ナノチャンネルの作製

  末國 啓輔, 竹下 俊光, SUGANO KOJI, ISONO YOSHITADA

  第30回「センサ・マイクロマシンと応用システム」シンポジウム, Nov. 2013, Japanese, 仙台, Domestic conference

  Poster presentation


• Development of MWCNT Embedded Micromechanical Resonator Working as rarefied Gas Sensor

  松本 竜, 岸原 宏幸, SUGANO KOJI, 花崎 逸雄, 山下 一郎, 浦岡 行治, ISONO YOSHITADA

  応用物理学会 関西支部第2回講演会, Oct. 2013, Japanese, 奈良, Domestic conference

  Poster presentation


• 多段 ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工

  鈴木 淳也, 平井 義和, SUGANO KOJI, 土屋 智由, 田畑 修

  日本機械学会 2013年度年次大会, Sep. 2013, Japanese, 岡山, Domestic conference

  Oral presentation


• ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル

  外薗 洸佑, 鈴木 淳也, 平井 義和, SUGANO KOJI, 土屋 智由, 田畑 修

  日本機械学会 2013年度年次大会, Sep. 2013, Japanese, 岡山, Domestic conference

  Oral presentation


• MWCNT-Embedded MEMS Resonator Fabricated by Bio-MEMS Compatible Process for Rarefied Gas Sensing

  SUGANO KOJI, Ryu Matsumoto, Yukiharu Uraoka, Ichiro Yamashita, Yoshitada Isono

  2013 JSAP-MRS Joint Symposia, Sep. 2013, English, Kyoto, International conference

  Oral presentation


• Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法

  辻本 和也, 平井 義和, SUGANO KOJI, 土屋 智由, 藩 和宏, 水谷 夏彦, 田畑 修

  電子情報通信学会 ソサイエティ大会, Sep. 2013, Japanese, 福岡, Domestic conference

  Oral presentation


• (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性

  上杉 晃生, 平井 義和, SUGANO KOJI, 土屋 智由, 田畑 修

  日本機械学会 2013年度年次大会, Sep. 2013, Japanese, 岡山, Domestic conference

  Oral presentation


• 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価

  中野 篤, 平井 義和, SUGANO KOJI, 土屋 智由, 田畑 修, 梅田 章

  日本機械学会 Dynamics and Design Conference 2013 (第13回「運動と振動の制御」シンポジウム), Aug. 2013, Japanese, 福岡, Domestic conference

  Oral presentation


• Fractography Analysis of Tensile Tested (110) Silicon Prepared by Different Surface Morphology and Crystal Orientations

  Akio Uesugi, Yoshikazu Hirai, SUGANO KOJI, Toshiyuki Tsuchiya, Osamu Tabata

  ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK2013), Jul. 2013, English, Burlingame, USA, International conference

  Oral presentation


• Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography

  Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, SUGANO KOJI, Toshiyuki Tsuchiya, Osamu Tabata

  ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK2013), Apr. 2013, English, Berlin, Germany, International conference

  Oral presentation

• The Society of Powder Technilogy, Japan


• The Japan Society of Mechanical Engineers


• Japan Institute of Electronics Packaging


• The Institute of Electrical Engineers of Japan


• IEEE(The Institute of Electrical and Electronics Engineers)


• 粉体工学会


• (社)日本機械学会


• エレクトロニクス実装学会


• 電気学会


• IEEE

• Micro/Nano Fusion Process based Nanopore Sensing Device for Optical and Electrical Combined Detection

  田畑 修, 菅野 公二, 山下 直輝, 川合 健太郎

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Apr. 2019 - Mar. 2022, Coinvestigator


• Next generation DNA sequencing using surface-enhanced Raman spectroscopy

  菅野 公二, 磯野 吉正

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, Apr. 2018 - Mar. 2021, Principal investigator

  本申請課題では，従来のナノポアなど電気的検出法による次世代DNAシーケンシング技術より高い信頼性を有する新規な技術として，分子識別能力に優れた表面増強ラマン分光（SERS：Surface Enhanced Raman Spectroscopy）によるDNAシーケンシングを提案し，その基盤技術の確立を目的としている。この研究により，メチル化など異常修飾を含めた塩基配列を識別可能なDNAシーケンシング技術が期待される。平成30年度では以下の項目を明らかにすることを目的としてSERSおよび電気的手法によるDNAオリゴマー検出実験を行った。 (1)DNA断片における1塩基検出感度・1塩基空間分解能の実現と諸特性・現象の理解 単一金ナノ粒子二量体を用いてDNAオリゴマーのSERS計測を行った。単一の金ナノ粒子二量体のナノギャップ部分は単一のDNAオリゴマーのみ侵入可能な空間であり，本実験でDNAオリゴマー内容物のラマンピークが観測されることで単一DNAオリゴマーの検出が確認できる。CCCCACCCのDNAオリゴマー内にある種類の塩基（アデニン）が1つのみ含まれる配列にてSERS計測を行った結果，アデニンの明確なラマンピークが検出された。これにより，DNAオリゴマー内の1分子塩基感度の検出・同定が可能であることを実証した。 (2)巨大電磁場増強場におけるDNA断片挙動の理解とマニピュレーション技術の確立 トップダウン加工でナノギャップ電極を形成し，ナノギャップ（巨大電磁場増強場）におけるDNA断片の挙動を電気的計測により調べた。レーザ照射による電磁場増強によって大きな電場勾配が発生するためDNAオリゴマーに誘電泳動力が働くと考えられる。これまでにレーザ照射することでナノギャップ間に電流シグナルが得られた。この結果によりレーザ照射により分子がナノギャップに引き寄せられていることが考えられる。


• Effect of Surface Potential on Piezoresistivity for Semi-conductive Nanowires

  磯野 吉正, 菅野 公二

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, Apr. 2018 - Mar. 2021, Coinvestigator


• Establishment of fundamental technology for nanopore sensing device based on opto-electro detection principle by fusion process of MEMS and DNA

  TABATA OSAMU

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kyoto University, Apr. 2016 - Mar. 2019, Coinvestigator

  Highly sensitive detection of single molecule was successfully demonstrated which is based on surface enhanced Raman scattering principle using gold nanoparticle (GNP) dimer. The dimer is fabricated by sacrificial DNA origami technology using 30 nm GNPs. The detection and identification of single DNA oligomer and single Adenine base was successfully achieved using single GNP dimer. Immobilization of a DNA origami nanostructure at a specific position of a substrate were successfully demonstrated. Using He ion beam technique, a Graphene nano pore with diameter of 1.5 to 2 nm, optimumized size for DNA base detection, was fabricated with good reproducibility. It was demonstrated that the DNA sensing based on ion current measurement principle was succeeded using the fabricated Graphene nano pore. Through the project, fundamental technology for nano pore sensing device based on opto-electro detection principle was established.


• Multi-components chemical analysis using surface-enhanced Raman spectroscopy with single-molecule sensitivity

  Sugano Koji

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Grant-in-Aid for Scientific Research (C), Kobe University, Oct. 2015 - Mar. 2018, Principal investigator

  The purpose of this project was to develop the analytical method for multi-component identification of molecules based on surface-enhanced Raman spectroscopy using a gold nanoparticle dimer with single molecule sensitivity. Due to the Raman enhancing hotspot with 1 nm nanogap in the single dimer, for the first time, the single oligomer detection and analysis was demonstrated. The dimer identified the several bases and backbone components of the single DNA oligomer. The dynamics of the single oligomer could be analyzed. The oligomer was trapped and stayed at the nanogap hotspot, and fluctuated with rotation.


• Evaluation of Piezoresistivity for Semi-conductive Nanowires by MEMS-based Strain Engineering

  Isono Yoshitada

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Kobe University, Apr. 2015 - Mar. 2018, Coinvestigator

  3C-SiCNWs are one of promising piezoresistive elements used in harsh environmental MEMS/NEMS applications, because of its high dielectric breakdown strength and excellent temperature/chemical stabilities. Especially, 3C-SiCNW wrapped by SiO2 shell is directly effective for fabrication of vertical structure FETs and FET-based mechanical sensors. This research clarified mechanical properties and piezoresistivity of 3C-SiCNWs wrapped with SiO2 (core/shell silicon carbide nanowires: C/S-SiCNWs) for harsh environmental MEMS/NEMS applications, using the MEMS-based nanotensile testing device. The tensile strengths for 3C-SiCNWs without SiO2 shell, and C/S-SiCNWs showed huge values of 22.4 GPa and 7.3 GPa on average, respectively. The gauge factor of the 3C-SiCNW without SiO2 shell showed -17.2 at 0.022 ε. Thus, the C/S-SiCNW has behaved as an n-type semiconductor, and it is useful as structural materials and piezoresistive elements in harsh environmental MEMS.


• Surface-enhanced Raman spectroscopy using single molecule bridged gold nanoparticle dimers

  SUGANO Koji

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C), Grant-in-Aid for Scientific Research (C), Apr. 2012 - Mar. 2015, Principal investigator

  A gold particle dimer shows huge electromagnetic enhancement when particle connection direction is matched to polarization direction of incident light. In this study the dimers were arrayed by the nanotrench-guided self-assembly for generating huge total Raman enhancement. The fabricated structures were characterized for Surface-Enhanced Raman Spectroscopy (SERS) depending on polarization angle to particle connection direction. The Raman intensity increased with decreasing the angle. Since electromagnetic interaction between dimers has large effect on Raman enhancement, the distance between dimers were optimized. The distance of 100 nm between dimers showed the highest Raman intensity. The optimized structure detected 4,4'-bipyridine molecules at the concentration of 10 pM. The detection for 100 nM solution was possible at the integration time of 0.2 s. This developed SERS substrate is expected to be applied to various trace analysis with high sensitivity and short detection time.


• A-STEP「金ナノ粒子二量体配列基板を用いた高感度・高信頼性表面増強ラマン分光技術の開発」

  菅野 公二

  科学技術振興機構, 研究成果最適展開支援プログラム フィージビリティスタディステージ 探索タイプ, 2015, Principal investigator

  Competitive research funding


• A-STEP「金ナノ粒子二量体配列基板を用いた高感度・高信頼性表面増強ラマン分光技術の開発」

  菅野 公二

  研究成果最適展開支援プログラム フィージビリティスタディステージ 探索タイプ, 2014, Principal investigator

  Competitive research funding


• Nanogap-controllable Arrangement of nanoparticles

  SUGANO Koji

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B), Grant-in-Aid for Young Scientists (B), Kyoto University, 2010 - 2011, Principal investigator

  I developed the highly-precise arrangement technique of nanoparticles, which can control the nanoscale gap between two particles from 10 to 60 nm, by Template-Assisted Self-Assembly using the nanoscale template trenches. In this study, by solving the problem of electrostatic repulsive force between particles by the addition of electrolyte, I achieved high assembly yield of around 90% for the gap-controllable nanoparticles dimer.


• マイクロチップを用いた脈動混合による単分散金ナノ粒子創製

  菅野 公二

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B), Grant-in-Aid for Young Scientists (B), Kyoto University, 2006 - 2007, Principal investigator

  金ナノ粒子の局所プラズモン共鳴(LPR)や表面増強ラマン散乱(SERS)を用いた化学分析の高感度化を実現するために,最も大きな電場増強を示す粒子径60nmで粒子径分布の小さな金ナノ粒子を還元法により作製することを目的とした.そのため,マイクロポンプと混合用マイクロ流路を用いた脈動混合を2液に適用した.この手法により迅速な2液混合を行い,小さな粒子径分布の金ナノ粒子を作製する.研究成果を以下に示す. (1)脈動混合法の混合速度評価: 蛍光顕微鏡を用いて蛍光色素と純水の2液が混合する様子を観察し,混合速度を計算した.その結果,最短で95msecの混合が可能であり,混合速度をマイクロポンプの切替周波数により制御できることがわかった. (2)ポリマーマイクロ流路の設計・製作: ポリマー製の最適な混合流路形状を設計するために,流路内圧による流路変形を考慮することができる新しい電気等価回路解析モデルを構築した.このモデルにより,流路形状による流量や流れの応答性を正確に解析することができる. (3)脈動混合を用いた金ナノ粒子作製と粒子生成メカニズムの考察: 脈動混合により混合速度を制御し金ナノ粒子を作製した.(1)での混合速度と生成した粒子の粒子径・粒子径分布の関係から生成メカニズムについて考察を行った. (4)化学分析への応用の検討: LSPもしくはSERSを用いた化学分析に応用するために,金ナノ粒子の電場増強と消失スペクトルを有限差分領域法(FDTD)を用いて計算し,最適な構造を導出した.


• 異種材料微粒子アセンブル技術による卓上型シンクロトロンのための軟X線源の開発

  菅野 公二

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B), Grant-in-Aid for Young Scientists (B), Kyoto University, 2004 - 2005, Principal investigator

  本研究では新規な微粒子のアセンブル技術を用いて卓上型シンクロトロン用の軟X線源構造を作製することを目的とした.本年度は1)理論計算による軟X線源構造の設計と2)軟X線源の中の微細構造を実現する粒子アセンブル技術の開発を行った. 1)理論計算による軟X線源構造の設計 理論計算によって軟X線放射に必要な膜厚と間隔を求めることができる.その際に,膜厚と間隔の誤差が放射強度に与える影響を計算した.その結果,使用する軟X線放射の角度によって誤差の影響が変わった.41mradの放射角度を使用する場合,寸法誤差による放射強度の減少を10%に抑えるためには約0.2μmの寸法誤差まで許容することが明らかになった. 2)粒子アセンブル技術 軟X線源実現のために膜厚の間隔を上記で求めた許容誤差範囲に抑えることが重要である.そのため,膜厚間に支柱を設けるための微粒子アセンブル技術を開発した.微粒子として直径500nmのポリスチレン粒子を用いた.支柱となる微粒子を所望の形状にパターン化するために,a)微細溝を有するテンプレート基板へのセルフアセンブル技術とb)アセンブルによって形成したパターンのターゲット基板への転写技術を実現した.a)ではテンプレート基板上のコロイド溶液を乾燥させ,メニスカスの後退速度を制御することで,微細溝への高収率なアセンブルが可能となった.b)では自己組織化膜を用いて基板の撥水性を変えることで,粒子と基板間の付着力を制御した.これらの結果により所望の粒子パターンを得ることができ,軟X線源のための支柱構造が実現される.