Research activity information

• Oct. 2019 経済産業省, 国際標準化貢献者表彰（産業技術環境局長表彰）

  神野伊策


• Mar. 2019 日本機械学会 情報知能精密機器部門, 2018 Information, Intelligence and Precision Equipment Division Award, 機械工学

  KANNO ISAKU

  Japan society


• 2019 International Electrotechinical Commission (IEC), 1906 Award

  Isaku Kanno


• 2018 電気学会センサ・マイクロマシン部門, 優秀ポスター発表賞, 第35回「センサ・マイクロマシンと応用システムシンポジウム」発表題目：機械的ストレス下における植物の根系発達過程の解析手法

  HIDA HIROTAKA, 西脇 大維, KANNO ISAKU, 野田口 理孝

  Japan society


• 2017 日本機械学会, 日本機械学会フェロー, 日本機械学会フェロー

  KANNO ISAKU

  International society


• 2006 日本AEM学会, 日本AEM学会 論文賞, 圧電アクチュエータを用いた進行波型バルブレスマイクロポンプの開発

  KANNO ISAKU

  論文賞

  International academic award


• Oct. 2003 Microsystem Technologies, Microsystem Technologies: Best Poster Award, Low-Voltage actuation of RF-MEMS switch using Piezoelectric PZT thin films

  KANNO ISAKU

  Best Poster Award

  International society

• Microstructure and electrical properties of (1-x)(K0.5Na0.5)NbO3-xBiFeO3 solid solution piezoelectric thin film deposited by RF magnetron sputtering

  Jingwei He, Sang Hyo Kweon, Hongbo Cheng, Jun Ouyang, Isaku Kanno

  May 2025, Ceramics International

  Scientific journal


• Electrical Generator Design for Darrieus-Type Wave Energy Converter

  Patrick Bach, Tsumoru Shintake, Hideki Takebe, Jun Fujita, Toshio Shindou, Kazuaki Uchibori, Masayuki Shimizu, Hiroyasu Ochiai, Yoshiharu Yoshimura, Isaku Kanno

  Feb. 2025, Journal of Ocean Engineering and Technology

  Scientific journal


• In-situ study on piezoelectric responses of sol-gel derived epitaxial Pb[Zr,Ti]O3 thin films on Si substrate

  Sang Hyo Kweon, Yuichi Kanayama, Goon Tan, Tomoyuki Koganezawa, Isaku Kanno

  Corresponding, Elsevier BV, Jun. 2024, Journal of the European Ceramic Society, 44(6) (6), 3887 - 3894

  Scientific journal


• Disruption of polar order in lead zirconate titanate by composition-modulated artificial superlattice

  Yukio Sato, Goki Kimura, Sang Hyo Kweon, Goon Tan, Isaku Kanno

  Abstract Lead zirconate titanate (Pb (Zr_x, Ti_1−x)O₃: PZT) is a well-known ferroelectric compound, in which long-range polar order is usually developed. In the present study, it was clarified by distortion-corrected atomic-scale scanning transmission electron microscopy imaging that long-range polar order is disrupted in PZT by utilizing composition-modulated superlattice. Shape of unit cell was unusual both in the Pb(Zr_0.65Ti_0.35)O₃ (PZT65) and Pb(Zr_0.30Ti_0.70)O₃ (PZT30) layers, which was due to mutual in-plane lattice constraint. By taking account of this, first-principles calculations clarified that multiple directions can be energetically favorable for lead-ion displacement, which explains a reason why long-range polar order was disrupted.

  Springer Science and Business Media LLC, May 2024, Journal of Materials Science, 59(19) (19), 8134 - 8146

  Scientific journal


• A wafer-level characterization method of thin film transverse piezoelectric coefficient evaluation

  Isaku Kanno

  2024, Sensors and Actuators A: Physical

  Scientific journal


• Deformable mirror driven by piezoelectric thin film based on multi-electrode array

  Isaku Kanno

  2024, Sensors and Actuators A: Physical

  Scientific journal


• Ferroelectricity of Ce–Mn substituted ZnO thin films

  Rei Ogawa, Atsuhiro Tamai, Kiyotaka Tanaka, Hideaki Adachi, Isaku Kanno

  Abstract In this study, we introduced Ce and Mn as new substitution elements to develop ferroelectricity in wurtzite-type ZnO thin films on Pt/Ti/SiO₂/Si. By substituting (Ce,Mn) for Zn, we observed a decrease in the c/a ratio, which reached its minimum value of 1.582. The relative permittivity increased from 12 to 20 with increasing (Ce,Mn) concentration (2%–15%), while the dielectric loss remained low at about 0.01. The Zn(Ce,Mn)O thin films exhibited clear ferroelectric behavior with a remanent polarization of more than 80 μC cm⁻² and a coercive field of about 2.5 MV cm⁻¹.

  IOP Publishing, Dec. 2023, Japanese Journal of Applied Physics, 63(1) (1), 010902 - 010902

  Scientific journal


• Compositional Modification of Epitaxial Pb(Zr,Ti)O₃ Thin Films for High‐Performance Piezoelectric Energy Harvesters

  Sang Hyo Kweon, Eun‐Ji Kim, Goon Tan, Isaku Kanno

  Abstract In this study, Piezoelectric energy harvesters (PEHs) are fabricated based on epitaxial Pb(Zr,Ti)O₃ (PZT) thin films deposited by an RF magnetron sputtering with varied Zr/[Zr+Ti] ratio. For a compatibility with micro‐electromechanical systems, the epitaxial PZT thin films are deposited on Si substrates (PZT/Si). The morphotropic phase boundary (MPB) are formed in the compositional range of 0.44 ≤ Zr/[Zr+Ti] ≤ 0.51 of the epitaxial PZT/Si, which is far broader than that of the bulk PZT. Meanwhile, effective transverse piezoelectric coefficient (|e_31,f|) values are evaluated by the direct and converse piezoelectric effects using the unimorph cantilever method. Among the compositions, the rhombohedral‐dominant MPB (MPB‐R) of Zr/[Zr+Ti] = 0.51 exhibits a direct |e_31,f| of 10.1 C m⁻² and a relative permittivity (ε_r) of 285, leading to the maximum figure of merit of 40 GPa in this study. On the other hand, the maximum converse |e_31,f| of 14.0 C m⁻² is measured from the tetragonal‐dominant MPB (MPB‐T) of Zr/[Zr+Ti] = 0.44. At a resonance frequency, the MPB‐T presents a high output power density of 301.5 µW⁻¹/(cm² g²) under an acceleration of 3 m⁻¹ s⁻², which is very promising for the high‐performance PEH applications.

  Wiley, Oct. 2023, Advanced Materials Interfaces, 11(2) (2)

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Low‐Power and Fast‐Response Limiting Current‐Type Oxygen Microsensor with a Wide Range Oxygen Concentration

  Shunsuke Akasaka, Isaku Kanno

  In this study, we fabricated limiting current‐type oxygen microsensors capable of sensing a wide range of oxygen concentrations. The oxygen microsensors consist of yttria‐stabilized zirconia thin films on spiral Ta₂O₅ diffusion layers and high‐temperature micro‐hotplates. At temperatures above 575 °C, we observed a clear limiting current that increased proportionally with oxygen concentration between 0.4% and 94%. This wide‐range linearity is attributed to the Knudsen diffusion of the oxygen gas passing through the small gap in the spiral Ta₂O₅ diffusion layer. © 2023 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

  Wiley, Oct. 2023, IEEJ Transactions on Electrical and Electronic Engineering, 19(5) (5), 796 - 799

  Scientific journal


• Transparent $$\mathrm{Pb}\left(\mathrm{Zr},\mathrm{Ti}\right){\mathrm{O } }_{3}\left[\mathrm{PZT}\right]$$ thin films on indium tin oxide-coated glass

  Athul Pradeep, V Priyadarsini, V Kumar, Takumi Nishikado, Yuichi Kanayama, Isaku Kanno

  Springer Science and Business Media LLC, Oct. 2023, Bulletin of Materials Science, 46(4) (4)

  Scientific journal


• Piezoelectric MEMS-based physical reservoir computing system without time-delayed feedback

  Takeshi Yoshimura, Taiki Haga, Norifumi Fujimura, Kensuke Kanda, Isaku Kanno

  Abstract In this study, a physical reservoir computing system, a hardware-implemented neural network, was demonstrated using a piezoelectric MEMS resonator. The transient response of the resonator was used to incorporate short-term memory characteristics into the system, eliminating commonly used time-delayed feedback. In addition, the short-term memory characteristics were improved by introducing a delayed signal using a capacitance-resistor series circuit. A Pb(Zr,Ti)O₃-based piezoelectric MEMS resonator with a resonance frequency of 193.2 Hz was employed as an actual node, and computational performance was evaluated using a virtual node method. Benchmark tests using random binary data indicated that the system exhibited short-term memory characteristics for two previous data and nonlinearity. To obtain this level of performance, the data bit period must be longer than the time constant of the transient response of the resonator. These outcomes suggest the feasibility of MEMS sensors with machine-learning capability.

  IOP Publishing, Aug. 2023, Japanese Journal of Applied Physics, 62(SM) (SM), SM1013 - SM1013

  Scientific journal


• Improvement of piezoelectric properties of epitaxial (K,Na)NbO₃ thin films grown on Si substrates

  Kiyotaka Tanaka, Rei Ogawa, Sang Hyo Kweon, Goon Tan, Isaku Kanno

  Abstract Lead-free epitaxial (K_0.47Na_0.53)NbO₃ (KNN) thin films were fabricated on (001)SrRuO₃/Pt/ZrO₂/Si substrates by RF magnetron sputtering at 650 °C and were post-annealed at the same 650 °C by a rapid thermal annealing (RTA) process. The crystal structure of epitaxial KNN thin films were changed by RTA, i.e. the lattice parameter c in the out-of-plane direction decreased instead of an increase of the parameter a in the in-plane direction. The displacement–electric field curve of the RTA-annealed KNN thin films was symmetrical and the shift of the polarization reversal field was smaller than in the KNN thin films annealed by a conventional furnace. This means that RTA is effective in compensating for oxygen vacancies as well as suppressing the generation of A-site vacancies at the interface between the thin film and the substrate. The converse piezoelectric coefficient ∣e_31,f∣ of the epitaxial KNN/Si unimorph cantilever was found to improve by up to 7.7 C m⁻² due to the decrease in defect density resulting from RTA.

  IOP Publishing, Jul. 2023, Japanese Journal of Applied Physics, 62(SM) (SM), SM1010 - SM1010

  Scientific journal


• Improvement of a haptic feedback using Pb(Zr,Ti)O3 thin films on German silver foils

  Patrick Bach, Sang-Hyo Kweon, Hirotaka Hida, Isaku Kanno

  Springer Science and Business Media LLC, Jun. 2023, Microsystem Technologies, 29(8) (8), 1181 - 1188

  Scientific journal


• Improved piezoelectric properties through manganese-doping in phase coexistence region in lead strontium zirconate titanate (PSZT) thin films

  V. Priyadarsini, Athul Pradeep, P. J. Jumana, Isaku Kanno, V. Kumar

  In the quaternary system PbTiO3-PbZrO3-SrTiO3-SrZrO3, compositions that lie close to the antiferroelectric tetragonal and ferroelectric rhombohedral (AFET-FER) phase boundary have potential applications in micro-actuators. However, in thin films, this phase boundary is reported to shift significantly to the zirconium-rich region. Hence, it is necessary to seek alternative approaches to stabilize the tetragonal AFE phase in such compositions. Therefore, this study explores the effect of B-site Mn3+-doping on their structure. Dielectric, ferroelectric, and piezoelectric characteristics of such thin films have been compared with those with increasing Zr/Ti ratios to understand the efficacy of this approach. Transverse piezoelectric coefficient, e31,f, and bipolar strain are found to be higher in Mn3+-doped thin films. Furthermore, large strains and e31,f in thin films have been correlated with structural modifications revealed by systematic Raman spectroscopic investigations.

  AIP Publishing, Apr. 2023, Journal of Applied Physics, 133(16) (16)

  Scientific journal


• Excellent Uniformity and Properties of Micro-Meter Thick Lead Zirconate Titanate Coatings with Rapid Thermal Annealing

  Youcao Ma, Jian Song, Yuyao Zhao, Kiyotaka Tanaka, Shijunbo Wu, Chao Dong, Xubo Wang, Isaku Kanno, Jun Ouyang, Jia Zhou, Yue Liu

  Lead zirconate titanate (PZT) films have shown great potential in piezoelectric micro-electronic-mechanical system (piezo-MEMS) owing to their strong piezoelectric response. However, the fabrication of PZT films on wafer-level suffers with achieving excellent uniformity and properties. Here, we successfully prepared perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation on 3-inch silicon wafers, by introducing a rapid thermal annealing (RTA) process. Compared to films without RTA treatment, these films exhibit (001) crystallographic orientation at certain composition that expecting morphotropic phase boundary. Furthermore, dielectric, ferroelectric and piezoelectric properties on different positions only fluctuate within 5%. The relatively dielectric constant, loss, remnant polarization and transverse piezoelectric coefficient are 850, 0.1, 38 μC/cm2 and −10 C/m2, respectively. Both uniformity and properties have reached the requirement for the design and fabrication of piezo-MEMS devices. This broadens the design and fabrication criteria for piezo-MEMS, particularly for piezoelectric micromachined ultrasonic transducers.

  MDPI AG, Apr. 2023, Materials, 16(8) (8), 3185 - 3185

  Scientific journal


• Internal stress effects on the piezoelectric properties of Pb(Zr,Ti)O3 superlattice thin films grown on Si substrates

  Goki Kimura, Sang-Hyo Kweon, Kiyotaka Tanaka, Yukio Sato, Isaku Kanno

  Mar. 2023, Applied Physics Letters, 122(12) (12), 122902-1 - 122902-6, English

  [Refereed]

  Scientific journal


• Piezoelectric thin films for MEMS

  Isaku Kanno, Jun Ouyang, Jun Akedo, Takeshi Yoshimura, Barbara Malic, Paul Muralt

  Feb. 2023, APPLIED PHYSICS LETTERS, 122(9) (9), English


• Piezoelectric properties of epitaxial Pb(Zr,Ti)O3 thin films grown on Si substrates by the sol-gel method

  Goon Tan, Sang-Hyo Kweon, Isaku Kanno

  Jan. 2023, THIN SOLID FILMS, 764, English

  Scientific journal


• Annealing effects on epitaxial (K,Na)NbO3 thin films grown on Si substrates

  Kiyotaka Tanaka, Rei Ogawa, Sang Hyo Kweon, Goon Tan, Isaku Kanno

  Nov. 2022, JAPANESE JOURNAL OF APPLIED PHYSICS, 61(SN) (SN), English

  Scientific journal


• In situ high-temperature X-ray diffraction measurements of Pb(Zr0.58Ti0.42)O3 epitaxial thin films grown on Si substrates

  Goki Kimura, Sang Hyo Kweon, Kiyotaka Tanaka, Goon Tan, Tomoyuki Koganezawa, Isaku Kanno

  Corresponding, Nov. 2022, Japanese Journal of Applied Physics, 61(SN) (SN), English

  [Refereed]

  Scientific journal


• Crystal structure and piezoelectric properties of lead-free epitaxial (K,Na)NbO3thin films grown on Si substrates

  Kiyotaka Tanaka, Yoshiyuki Kawata, Sang Hyo Kweon, Goon Tan, Takeshi Yoshimura, Isaku Kanno

  Oct. 2022, Applied Physics Letters, 121(17) (17), English

  Scientific journal


• High output performance of piezoelectric energy harvesters using epitaxial Pb(Zr, Ti)O₃ thin film grown on Si substrate

  Eun-Ji Kim, Sang-Hyo Kweon, Sahn Nahm, Yukio Sato, Goon Tan, Isaku Kanno

  Corresponding, Oct. 2022, Applied Physics Letters, 121(16) (16), 161901 - 161901, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Piezoelectric Properties of {110}-Oriented A-Site Sr-Substituted Pb(Zr0.80Ti0.20)O-3 Thin Films

  V. Priyadarsini, Athul Pradeep, P. J. Jumana, A. Choudhary, V. Kumar, Takumi Nishikado, Kouta Onishi, Isaku Kanno

  Oct. 2022, INTEGRATED FERROELECTRICS, 230(1) (1), 163 - 170, English

  Scientific journal


• High performance LaNiO3-buffered, (001)-oriented PZT piezoelectric films integrated on (111) Si

  Yingying Wang, Jun Ouyang, Hongbo Cheng, Yushu Shi, Takumi Nishikado, Isaku Kanno

  Oct. 2022, APPLIED PHYSICS LETTERS, 121(18) (18), English

  Scientific journal


• Highly (00l)-textured BiFeO3 thick films integrated on stainless steel foils with an optimized piezoelectric performance

  Jing Yan, Hanfei Zhu, Jun Ouyang, Isaku Kanno, Peng Yan, Yingying Wang, Kouta Onishi, Takumi Nishikado

  Jul. 2022, JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 42(8) (8), 3454 - 3462, English

  Scientific journal


• Bias-free Photo-electrochemical Water Splitting Driven by Large Photopotential of Epitaxial (Pb,La)TiO3 Ferroelectric Thin Films

  Sang Hyo Kweon, Yusuke Kamada, Takashi Harada, Shuji Nakanishi, Yoshiharu Mukouyama, Isaku Kanno

  Feb. 2022, ACS APPLIED ENERGY MATERIALS, 5(2) (2), 2606 - 2612, English

  Scientific journal


• Oxygen and Humidity Sensing Property of a Limiting Current-Type Thin-Film YSZ-Based Sensor on a Micro-Hotplate

  Shunsuke Akasaka, Isaku Kanno

  2022, 2022 IEEE SENSORS, English

  International conference proceedings


• Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients

  Genki Jikyo, Kouta Onishi, Takumi Nishikado, Isaku Kanno, Kensuke Kanda

  Corresponding, AIP Publishing, Aug. 2021, Journal of Applied Physics, 130(7) (7), 074101 - 074101

  [Refereed]

  Scientific journal


• Transparent piezoelectric thin-film devices: Pb(Zr, Ti)O3 thin films on glass substrates

  Kazuki Ueda, Sang-Hyo Kweon, Hirotaka Hida, Yoshiharu Mukouyama, Isaku Kanno

  Corresponding, Elsevier BV, Aug. 2021, Sensors and Actuators A: Physical, 327, 112786 - 112786

  Scientific journal


• Finger flexion power generators made of piezoelectric lead zirconate titanate thin films on stainless steel foils

  Ryo Harada, Naoya Iwamoto, Sang-Hyo Kweon, Toshihito Umegaki, Isaku Kanno

  Corresponding, Elsevier BV, May 2021, Sensors and Actuators A: Physical, 322, 112617 - 112617

  Scientific journal


• Method for Analyzing an Infection Process of Plant-parasitic Nematodes Using a Microfluidic Device

  Hirotaka Hida, Rika Ebara, Shumpei Hayashi, Isaku Kanno, Chihiro Furumizu, Shinichiro Sawa

  Institute of Electrical Engineers of Japan (IEE Japan), May 2021, IEEJ Transactions on Sensors and Micromachines, 141(5) (5), 141 - 146

  Scientific journal


• Design, fabrication and evaluation of piezoelectric speaker

  YOSHIDA Junnosuke, BACH Patrick, KANNO Isaku, HIDA Hirotaka

  In this study, we designed, fabricated and evaluated a piezoelectric thin-film loudspeaker. To enhance the acoustic output in the low frequency range, the device design was optimized by finite element analysis. The prototype speaker was fabricated using the piezoelectric PZT thin film deposited on a stainless steel substrate using RF magnetron sputtering. The vibration displacement and output sound pressure of the completed device were measured as a function of frequency. The measured SPL increased in proportion to the frequency below the resonance. Above the resonance frequency, the SPL was constant independent of frequency. It achieved a sound pressure level of 65 dB at the resonance frequency of 726 Hz. SPL was calculated from the displacement and we confirmed that the calculated results of the frequency response of SPL were in good agreement with the measurement results.

  The Japan Society of Mechanical Engineers, 2021, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2021, IIP1A3-1, Japanese


• Limiting current type yttria-stabilized zirconia thin-film oxygen sensor with spiral Ta2O5 gas diffusion layer

  Shunsuke Akasaka, Yurina Amamoto, Hiroyuki Yuji, Isaku Kanno

  Elsevier BV, Jan. 2021, Sensors and Actuators B: Chemical, 327, 128932 - 128932

  Scientific journal


• Piezoelectric PZT thin-film transformers with a ring–dot structure

  Sang-Hyo Kweon, Kazuki Tani, Kensuke Kanda, Sahn Nahm, Isaku Kanno

  Corresponding, IOP Publishing, Nov. 2020, Japanese Journal of Applied Physics, 59(SP) (SP), SPPD09 - SPPD09

  Scientific journal


• An evaluation method for direct piezoelectric coefficients of thin films using both-ends-hinge-supported unimoprh beams

  Toshihito Umegaki, Genki Jikyo, Isaku Kanno

  Corresponding, IOP Publishing, Nov. 2020, Japanese Journal of Applied Physics, 59(SP) (SP), SPPB04 - SPPB04

  [Refereed]

  Scientific journal


• Deposition of Pb(Zr, Ti)O₃ thin films on glass substrate

  Ueda Kazuki, Hida Hirotaka, Kanno Isaku

  The Japan Society of Applied Physics, Aug. 2020, JSAP Annual Meetings Extended Abstracts, 2020.2, 878 - 878, Japanese


• In Situ XRD Observation of Crystal Deformation of Piezoelectric (K,Na)NbO3 Thin Films

  Goon Tan, Sang Hyo Kweon, Kenji Shibata, Tomoaki Yamada, Isaku Kanno

  American Chemical Society (ACS), Jul. 2020, ACS Applied Electronic Materials, 2(7) (7), 2084 - 2089

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Flexible piezoelectric energy harvesters of PZT thin films

  HARADA Ryo, UMEGAKI Toshihito, HIDA Hirotaka, KANNO Isaku

  Interest in energy harvesters has grown rapidly over the last decade. In this study, we fabricate and evaluate piezoelectric energy harvesters (PEH) fabricated from Pb(ZrTi)O3 (PZT) thin films on stainless steel foils. The PZT thin films were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by RF-magnetron sputtering. Parallel and series connection of eachPEH enabled the output power increase as high as turning on a LED.

  The Japan Society of Mechanical Engineers, 2020, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2020, 2A06, Japanese


• Deposition and performance of all solid-state thin-film lithium-ion batteries composed of amorphous Si/LiPON/VO-LiPO multilayers

  Shogo Kanazawa, Tomoaki Baba, Kotaro Yoneda, Minoru Mizuhata, Isaku Kanno

  Corresponding, 2020, Thin Solid Films, 697, 137840, English

  [Refereed]

  Scientific journal


• Equivalent circuit model of piezoelectric vibration energy harvesters composed of trapezoidal unimorph cantilevers

  Toshihito Umegaki, Takashi Ito, Goon Tan, Isaku Kanno

  Institute of Physics Publishing, Dec. 2019, Journal of Physics: Conference Series, 1407(1) (1), English

  International conference proceedings


• Influence of Zr/Sn ratio on the Transverse Piezoelectric Coefficient in Lanthanum-Doped Lead Zirconate Titanate Stannate Thin Films

  S. Laxmi Priya, V. Kumar, Isaku Kanno

  Taylor and Francis Ltd., Sep. 2019, Integrated Ferroelectrics, 201(1) (1), 86 - 93, English

  Scientific journal


• 有機強誘電体薄膜を利用した圧電振動発電

  堀家 匠平, 小柴 康子, 福島 達也, 神野 伊策, 石田 謙司

  May 2019, ケミカルエンジニヤリング, 64(5) (5), 335 - 342, Japanese


• Structural optimization of piezoelectric thin-film vibration energy harvesters based on electric equivalent circuit model

  Toshihito Umegaki, Isaku Kanno

  Elsevier, Feb. 2019, Nanoscale Ferroelectric-Multiferroic Materials for Energy Harvesting Applications, 161 - 179, English

  In book


• Fabrication of piezoelectric PZT thin-film MEMS speaker

  Tsuji Yuta, Sanghyo Kweon, Hida Hirotaka, Kanno Isaku

  In this study, we fabricated the piezoelectric microelectromechanical systems (MEMS) speakers with Pb(Zr,Ti)O₃ (PZT) thin films. In order to improve the performance of piezoelectric speakers, we fabricated the 2 mm square MEMS speaker with a diaphragm structure of PZT/Si and photosensitive polyimide. The optimal structure was investigated by finite element method (FEM) simulation. The 2 μm thick PZT thin films were deposited on SOI wafers by radio frequency (RF) magnetron sputtering, and microfabricated into unimorph diaphragm. We measured the vibration amplitude of the piezoelectric MEMS speakers as a function of frequency. We confirmed that the resonance frequency was 25.6 kHz that is out of audible range. In addition, the speaker could generate large sound pressure level (SPL) of 82 dB at 6 V_pp.

  The Japan Society of Mechanical Engineers, 2019, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019.10, 19pm5PN312, Japanese


• Design, fabrication and evaluation of PZT piezoelectric thin-film transformer

  Tani Kazuki, SangHyo Kweon, Hida Hirotaka, Kanno Isaku

  In this research, we designed, fabricated and evaluated a PZT thin-film piezoelectric MEMS transformer. First, the disk-shaped device with the ring-dot structure was designed using Finite Element Method (FEM) analysis. At this time, since the piezoelectric transformer is driven in resonance, we confirmed resonance frequency and vibration mode of the transformer. Next, a PZT thin film was deposited on a silicon on insulator (SOI) substrate using RF magnetron sputtering method, and then microfabricated into a piezoelectric transformer. Finally, we measured the impedance and transformation properties of the piezoelectric MEMS transformer. The resonance frequency was observed at 4.57 MHz, and the transformation ratio was found to be about 0.3.

  The Japan Society of Mechanical Engineers, 2019, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019.10, 19pm5PN318, Japanese


• Ultrahigh temperature platinum microheater encapsulated by reduced-TiO2 barrier layer

  Shunsuke Akasaka, Encho Boku, Yurina Amamoto, Hiroyuki Yuji, KANNO ISAKU

  2019, Sensors and Actuators A: Physical, 296, 286 - 291, English

  [Refereed]

  Scientific journal


• Crystallographic contributions to piezoelectric properties in PZT thin films

  Goon Tan, Kazuki Maruyama, Yuya Kanamitsu, Shintaro Nishioka, Tomoatsu Ozaki, Toshihito Umegaki, Hirotaka Hida, KANNO ISAKU

  Corresponding, 2019, Scientific Reports, 9, 7309, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• High flexible piezoelectric PZT thin films deposited on stainless steel mesh

  T. Nishi, T. Ito, T. Umegaki, I. Kanno

  Institute of Physics Publishing, Jul. 2018, Journal of Physics: Conference Series, 1052(1) (1), English

  International conference proceedings


• Multilayer piezoelectric MEMS energy harvester based on longitudinal effect

  R. Nakanishi, K. Kanda, T. Fujita, I. Kanno, K. Maenaka

  Jul. 2018, Journal of Physics: Conference Series, 1052


• Development of Piezoelectric Vibration Energy Harvesters for Battery-less Smart Shoes

  Hidenori KATSUMURA, Toshihiro KONISHI, Hidenori OKUMURA, Takafumi FUKUI, Makoto KATSU, Tsutomu TERADA, Toshihito UMEGAKI, Isaku KANNO

  Jul. 2018, Journal of Physics: Conference Series, 1052(1) (1), 1 - 4, English, International magazine

  [Refereed]

  Scientific journal


• The Piezoelectric PZT Thin Films Deposited on Metal Substrates

  T Ito, T Nishi, T Umegaki, H Hida, I Kanno

  Jul. 2018, Journal of Physics: Conference Series, 1052(1) (1), 012094, English

  [Refereed]

  International conference proceedings


• Orientation Dependence of Power Generation on Piezoelectric Energy Harvesting Using Stretched Ferroelectric Polymer Films

  KOBAYASHI AKIKO, KOSHIBA YASUKO, UENO YOSHIKAZU, KAJIHARA TADAO, TSUJIURA YUICHI, MORIMOTO MASAHIRO, HORIKE SHOHEI, FUKUSHIMA TATSUYA, KANNO ISAKU, ISHIDA KENJI

  Jul. 2018, Journal of Physics: Conf. Series, 1052, 012112 - 1-4, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Transverse piezoelectric properties of {110}-oriented PLZT thin films

  Priya, Kumar, Teramoto, KANNO ISAKU

  2018, Integrated Ferroelectrics, 192, 113 - 120, English

  [Refereed]

  Scientific journal


• Numerical designs of piezoelectric thin-film vibration energy harvesters

  Toshihito Umegaki, Takashi Ito, Takahito Nishi, Goon Tan, KANNO ISAKU

  2018, Japanese Journal of Applied Physics, 57, 11UD06, English

  [Refereed]

  Scientific journal


• Immediate elimination of injured white matter tissue achieves a rapid axonal growth across the severed spinal cord in adult rats

  Takeshi Nishio, Hiroshi Fujiwara, Isaku Kanno

  2018, Neuroscience Research, [kuid20190610.xls]論文!E2, [kuid20190610.xls]論文!G2, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

  KANNO ISAKU

  2018, Japanese Journal of Applied Physics, 57, 040101, English

  [Refereed][Invited]


• IoT電源としての振動発電技術

  KANNO ISAKU, 谷 弘詞, 橋口 原

  2018, 日本機械学会誌, 121(12) (12), 22 - 25, Japanese

  [Refereed][Invited]


• Development of Piezoelectric Vibration Energy Harvesters for Batteryless Smart Shoes

  KATSUMURA Hidenori, KONISHI Toshihiro, OKUMURA Hidenori, FUKUI Takafumi, KATSU Makoto, TERADA Tsutomu, UMEGAKI Toshihito, KANNO Isaku

  Nov. 2017, The 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2017), 271 - 274, English

  [Refereed]

  International conference proceedings


• ON-CHIP MECHANICAL STRESS TEST ON PLANT ROOT GROWTH

  Dai Nishiwaki, Hirotaka Hida, Isaku Kanno, Michitaka Notaguchi

  Oct. 2017, The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017), English

  [Refereed]

  International conference proceedings


• METHODS FOR PHYSHICAL CHARACTERIZATION OF GROWING PLANT ROOTS

  Hirotaka Hida, Katsuya Ozoe, Isaku Kanno, Michitaka Notaguchi

  Oct. 2017, The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017), English

  [Refereed]

  International conference proceedings


• Piezoelectric characterization of Pb(Zr,Ti)O-3 thin films deposited on metal foil substrates by dip coating

  Hirotaka Hida, Tomohiro Hamamura, Takahito Nishi, Goon Tan, Toshihito Umegaki, Isaku Kanno

  Oct. 2017, JAPANESE JOURNAL OF APPLIED PHYSICS, 56(10) (10), 10PF08, English

  [Refereed]

  Scientific journal


• Probing domain switching dynamics in ferroelectric thick films by small field e(31,f) piezoelectric measurement

  Hongbo Cheng, Jun Ouyang, Isaku Kanno

  Jul. 2017, APPLIED PHYSICS LETTERS, 111(2) (2), English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Airflow energy harvester of piezoelectric thin-film bimorph using self-excited vibration

  Yuichi Tsujiura, Eisaku Suwa, Takahito Nishi, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno

  Jul. 2017, SENSORS AND ACTUATORS A-PHYSICAL, 261, 295 - 301, English

  [Refereed]

  Scientific journal


• Fabrication of PZT Thin Film on Stainless Steel Foil by Dip-coating Method

  Hamamura Tomohiro, Hida Hirotaka, kanno isaku

  The Japan Society of Applied Physics, Mar. 2017, JSAP Annual Meetings Extended Abstracts, 2017.1, 1271 - 1271, Japanese


• Fabrication of microfluidic device for multi-channel patch clamp

  Aoki Takashi, Hida Hirotaka, Kanno Isaku, Maturana Andres

  This paper presents a novel microfluidic device for high throughput ion-channel analysis. To analyze the electrophysiological properties of cells efficiently, we designed the electrically independent microchannels on the microfluidic device. The microfluidic device is composed of a silicon-on-insulator (SOI) layer having the trap holes with 9 or 12 μm diameter, poly-dimethylsiloxane (PDMS) microchannel chips and glass substrate with Pt electrodes. We successfully trapped the multiple cells on one device without damage by applying negative pressure to the microchannels with a syringe pump. Finally, we confirmed that the each trap hole was strongly sealed with the cell by measuring the electrical impedance, which was more than 1 GΩ, namely gigaseal.

  The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017.8, PN-27, Japanese


• Fabrication of PZT thin-film bimorphs for MEMS microphone

  Fukumoto Naoki, Hida Hirotaka, Kanno Isaku

  In this study, we fabricated the microelectromechanical systems (MEMS) microphones composed of piezoelectric Pb(Zr,Ti)O₃ (PZT) thin-film bimorphs. To improve the sensitivity of the piezoelectric MEMS microphone, we designed the PZT bimorph cantilevers by using a finite element method (FEM) simulation. The dimensions of the PZT bimorphs are 1000 μm in width and 280 μm in length. The two layers of 1-μm-thick PZT thin films were deposited on Si substrates by radio frequency (RF) magnetron sputtering and formed into the cantilevers by dry etching. To evaluate the frequency responses, we measured the vibration amplitude of the PZT bimorphs oscillated by applying the negative AC voltage. The piezoelectric microphone was demonstrated by detecting the output signal owing to the direct piezoelectric effect when the sound pressure was applied. We confirmed that the output signal of the piezoelectric microphone was proportionally increased by increasing the applied sound pressure.

  The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017.8, PN-97, Japanese


• Fabrication of PZT thin film actuator for Insect scale robot

  NISHIMURA Nozomu, HIDA Hirotaka, KANNO Isaku

  Recently, development of insect scale robots has been attracting attention. These robots are expected to be used for inspection or sensing in narrow and danger places where human cannot enter. In this study, we fabricated and evaluated piezoelectric thin film actuators intended for flapping wing insect scale robot. We firstly report a FEM analysis results of piezoelectric PZT thin-film actuators. To verify this analysis results, we deposited PZT thin films on micro-fabricated stainless steel substrates and evaluated their crystal structure, electrical properties, and piezoelectric properties of PZT thin films. X-ray diffraction measurements reveal that the PZT thin films have a polycrystalline perovskite structure. The relative dielectric constant of the PZT thin films was 240. FEM analysis results are in good agreement with the resonant frequency. The angular displacement are less than 1° in all measurement points driven by resonant frequency (5V_pp, 2.095 and 2.257 kHz).

  The Japan Society of Mechanical Engineers, 2017, The Proceedings of Mechanical Engineering Congress, Japan, 2017, G1600102, Japanese


• Fabrication of PZT thin-film micropump driven with low voltage

  Hida Hirotaka, Kanno Isaku

  We fabricated a new diaphragm micropump composed of the piezoelectric Pb(Zr,Ti)O₃ (PZT) thin films on the stainless-steel (SS) foil substrates to reduce the driving voltage. To miniaturize and simplify the micropump structure, the diaphragm and microchannel with diffusers were monolithically formed on the 30-μm-thick SS substrates by photolithography and wet etching. We directly deposited the 1-μm-thick PZT thin films on the SS diaphragm by dip coating with a sol-gel solution. To evaluate the driving characteristics of the fabricated micropump, the SS diaphragm was actuated by applying AC voltage to the PZT thin films. The displacement of the 9-μm-thick SS diaphragm was 1.7 μm with 10 V_pp-driving voltage at 1 Hz.

  The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017.8, PN-8, Japanese


• Fabrication of solid state thin-film Li-ion battery

  BABA Tomoaki, NAKAYAMA Tappei, HIDA Hirotaka, KANNO Isaku

  Lithium ion batteries are widely used in a variety of portable products because of their high energy density. Recently solid-state lithium ion batteries have been studied to solve the safety issue of liquid electrolyte. In order to realize solid state thin film batteries, we prepared electrode thin films by RF magnetron sputtering on Pt/Ti/Si substrates. In this study, LiCoO₂(LCO) cathode thin films were deposited. After annealing at 620°C, clear diffraction of (003) and (101) orientation was detected in XRD measurements. Si anode, Cyclic voltammgram showed oxidation and reduction peaks at 0.6 V, 0.01 V, respectively. We also measured the capacity of the Si thin film by the discharge-charge curves. The discharge-charge capacity of 660 μAh/(cm²・μm) and 609 μAh/(cm²・μm) could be obtained for the Si anode thin films, respectively.

  The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2017, I - 1, Japanese


• Fabrication and evaluation of a piezoelectric energy harvester

  ITO Takashi, NISHI Takahito, UMEGAKI Toshihito, HIDA Hirotaka, KANNO Isaku

  This paper describes piezoelectric vibration energy harvester (PVEH). The PVEH was fabricated from Pb(ZrTi)O₃ (PZT) thin films which were deposited onto (Pb,La)TiO₃/Pt/Ti-coated stainless steel substrate by rf-magnetron sputtering. We measured output power of the PVEH as well as theoretical calculation. The output power showed maximum at the calculated optimal load resistance of 73.2 kΩ, where the output power was 1.0 μW. For the purpose of predicting output power, we tried to derive electromechanical coupling coefficient. Applying an equivalent circuit model of the energy harvester, we succeeded in deriving electromechanical coupling coefficient.

  The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2017, I - 2, Japanese


• Piezoelectric vibration energy harvesters with stretched and multistacked organic ferroelectric films

  Tadao Kajihara, Yoshikazu Ueno, Yuichi Tsujiura, Yasuko Koshiba, Masahiro Morimoto, KANNO ISAKU, Kenji Ishida

  2017, Japanese Journal of Applied Physics, 56(4) (4), 04CL04, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• Electromechanical properties of BaTiO3-xBaSnO(3) thin films prepared via combinatorial sputtering

  Hongbo Cheng, Hirotaka Hida, Jun Ouyang, Isaku Kanno

  Jan. 2017, CERAMICS INTERNATIONAL, 43(1) (1), 1597 - 1601, English

  [Refereed]

  Scientific journal


• Vibration energy harvester with piezoelectric properties using polyurea thin films

  Masahiro Morimoto, Yuichi Tsujiura, Yasuko Koshiba, Isaku Kanno, Kenji Ishida

  2017, MOLECULAR CRYSTALS AND LIQUID CRYSTALS, 653(1) (1), 188 - 193, English

  [Refereed]

  Scientific journal


• 圧電薄膜アクチュエータ

  KANNO ISAKU

  表面技術協会, 2017, 表面技術, 68(7) (7), 387 - 391, Japanese

  [Refereed][Invited]


• Composition dependence of transverse piezoelectric properties of preferentially {110}-oriented (1-x) PIN-x PT thin films

  S. Laxmi Priya, V. Kumar, Shogo Nishio, Isaku Kanno

  Dec. 2016, JOURNAL OF ALLOYS AND COMPOUNDS, 688(PB) (PB), 863 - 867, English

  [Refereed]

  Scientific journal


• Precise piezoelectric characterization of Pb(Hf,Ti)O-3 thin films deposited by combinatorial sputtering

  Shogo Nishio, Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno

  Oct. 2016, THIN SOLID FILMS, 616, 444 - 448, English

  [Refereed]

  Scientific journal


• ANALYTICAL METHODS OF ROOT GROWTH BEHAVIOR USING AN ARTIFICIAL SOIL DEVICE

  HIDA HIROTAKA, Dai Nishiwaki, Michitaka Notaguchi, Isaku Kanno

  Oct. 2016, Proc. of 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2016), English

  [Refereed]

  International conference proceedings


• Evaluation of photovoltaic effect using KNN thin film.

  Oochi Yuhei, Hida Hirotaka, Kanno Isaku

  The Japan Society of Applied Physics, Sep. 2016, JSAP Annual Meetings Extended Abstracts, 2016.2, 1236 - 1236, Japanese


• Fabrication of piezoelectric multilayer thin-film actuators

  Fumiya Kurokawa, Masaya Kishimoto, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno

  Jun. 2016, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1275 - 1283, English

  [Refereed][Invited]

  Scientific journal


• Simple millimeter-scale robot using Pb(Zr, Ti) piezoelectric thin film actuator on titanium substrate

  Hirotaka Hida, Yuki Morita, Fumiya Kurokawa, Yuichi Tsujiura, Isaku Kanno

  Jun. 2016, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1429 - 1436, English

  [Refereed]

  Scientific journal


• Fabrication of piezoelectric multilayer thin-film actuators

  Fumiya Kurokawa, Masaya Kishimoto, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno

  Jun. 2016, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1275 - 1283, English

  [Refereed]

  Scientific journal


• FABRICATION OF FORCE SENSOR FOR STUDYING SEED GERMINATION OF PLANTS

  HIDA HIROTAKA, Shimpei Fujimoto, Tetsuya Higashiyama, Michitaka Notaguchi, Isaku Kanno

  Jun. 2016, Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), English

  [Refereed]

  International conference proceedings


• 圧電MEMSの基礎技術と応用展開

  KANNO ISAKU

  応用物理学会, Mar. 2016, 応用物理, 85(3) (3), 207, Japanese

  [Refereed][Invited]


• Characterization of Cylindrical Type MEMS Gyroscope Using Piezoelectric Thin-film Resonator

  HIDA Hirotaka, FUJIWARA Kosuke, KANNO Isaku

  In this study, we fabricated a microelectromechanical systems (MEMS) cylindrical gyroscope integrated with piezoelectric thin-film for sensing/driving elements. The cylindrical gyroscope has several advantages: (1) the sensitivity can be improved due to the high Q-factor. (2) we can eliminate an initial output signal from the sensing electrodes. We characterized the resonant characteristics of the cylindrical gyroscope in wine-glass mode and the Q-factor was 723 at 36.13 kHz under atmospheric pressure. In addition, we experimentally confirmed that the mechanical vibration of the gyroscope can be measured by detecting the electrical signal due to the piezoelectric effect of Pb(Zr,Ti)O₃ (PZT).

  The Japan Society of Mechanical Engineers, 2016, The Proceedings of Mechanical Engineering Congress, Japan, 2016, J2230103, Japanese


• Shoe-mounted vibration energy harvester of PZT piezoelectric thin films on metal foils

  T. Nishi, T. Ito, H. Hida, I. Kanno

  2016, 16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016), 773, English

  [Refereed]

  International conference proceedings


• Improved transverse piezoelectric properties in {110}-oriented B-site acceptor doped PLZT (8/65/35) thin films

  S. Laxmi Priya, V. Kumar, Shogo Nishio, Isaku Kanno

  2016, INTEGRATED FERROELECTRICS, 176(1) (1), 210 - 219, English

  [Refereed]

  Scientific journal


• 振動エネルギーによる環境発電（振動発電）

  KANNO ISAKU

  表面技術協会, 2016, 表面技術, 67(7) (7), 348 - 352, Japanese

  [Refereed][Invited]


• 金属基板上圧電薄膜による振動発電技術

  KANNO ISAKU

  2016, 日本電子材料技術協会会報, 47, 26 - 29, Japanese

  [Refereed][Invited]


• Development of on-chip physical characterization method for root growth

  HIDA HIROTAKA, Katsuya Ozoe, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi

  Nov. 2015, Proceedings of The 8th Plant Biomechanics International Conference, English

  [Refereed]

  International conference proceedings


• Comparison of effective transverse piezoelectric coefficients e(31,f) of Pb(Zr,Ti)O-3 thin films between direct and converse piezoelectric effects

  Yuichi Tsujiura, Saneyuki Kawabe, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno

  Oct. 2015, JAPANESE JOURNAL OF APPLIED PHYSICS, 54(10) (10), 1 - 10, English

  [Refereed]

  Scientific journal


• METHODS OF PLANT ROOT CHARACTERIZATION UNDER VARIABLE ENVIRONMENTAL CONDITIONS TOWARD IMPROVING CROP PRODUCTIVITY

  Katsuya Ozoe, Hirotaka Hida, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi

  Oct. 2015, Proceedings of 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2015), English

  [Refereed]

  International conference proceedings


• Compositional dependence of Ba(Zr0.2Ti0.8)O-3-(Ba0.7Ca0.3)TiO3 piezoelectric thin films prepared by combinatorial sputtering

  Fumiya Kurokawa, Akira Mori, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno

  Aug. 2015, THIN SOLID FILMS, 588, 34 - 38, English

  [Refereed]

  Scientific journal


• Reliability of vibration energy harvesters of PZT thin films on stainless steel cantilevers

  Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, HIDA HIROTAKA, Isaku Kanno

  Jun. 2015, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), English

  [Refereed]

  International conference proceedings


• Fabrication of piezoelectric multilayer thin-film actuators

  Fumiya Kurokawa, M. Kishimotoi, Atsuro Sadanda, Yuichi Tsujiura, HIDA HIROTAKA, Isaku Kanno

  Jun. 2015, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), English

  [Refereed]

  International conference proceedings


• Development of simple microrobot using piezoelectric thin film actuator on metal substrate

  HIDA HIROTAKA, Yuki Moritai, Fumiya Kurokawa, Atsuro Sadanda, Yuichi Tsujiura, Isaku Kanno

  Jun. 2015, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), English

  [Refereed]

  International conference proceedings


• Multilayer La-modified PbTiO3 capacitors via RF magnetron sputtering

  Fumiya Kurokawa, Yuji Imamiya, Hirotaka Hida, Isaku Kanno

  May 2015, JOURNAL OF MATERIALS SCIENCE, 50(10) (10), 3631 - 3637, English

  [Refereed]

  Scientific journal


• Transverse piezoelectric properties of {100} - Oriented PLZT[x/65/35] thin films

  S. Laxmi Priya, V. Kumar, Fumiya Kurokawa, Isaku Kanno

  Feb. 2015, MATERIALS CHEMISTRY AND PHYSICS, 151, 308 - 311, English

  [Refereed]

  Scientific journal


• Piezoelectric MEMS for energy harvesting

  Isaku Kanno

  2015, 15TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2015), 660, English

  [Refereed]

  International conference proceedings


• Fabrication of high-efficiency piezoelectric energy harvesters of epitaxial Pb(Zr,Ti)O3 thin films by laser lift-off

  Eisaku Suwa, Hirotaka Hida, KANNO ISAKU

  2015, Energy Harvesting and Systems, 3, 61, English

  [Refereed]

  Scientific journal


• HIGH-PRODUCTIVE FABRICATION METHOD OF FLEXIBLE PIEZOELECTRIC SUBSTRATE

  Hirotaka Hida, Shun Yagami, Akira Sakurai, Isaku Kanno

  2015, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 28th Vol.1, 377 - 380, English

  [Refereed]

  International conference proceedings


• EARLY CHARACTERIZATION METHOD OF PLANT ROOT ADAPTABILITY TO SOIL ENVIRONMENTS

  Katsuya Ozoe, Hirotaka Hida, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi

  2015, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 28th Vol.2, 702 - 705, English

  [Refereed]

  International conference proceedings


• UV-LIGHT DRIVEN PIEZOELECTRIC THIN-FILM ACTUATORS

  F. Kurokawa, Y. Oochi, A. Sadanda, Y. Tsujiura, H. Hida, I. Kanno

  2015, 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 973 - 976, English

  [Refereed]

  International conference proceedings


• MEMS Applications in Agriculture

  H. Hida, H. Nishiyama, S. Sawa, M. Notaguchi, H. Arata, T. Higashiyama, I. Kanno

  Dec. 2014, Proc. of The International Conference on Small Science (ICSS 2014), English

  [Refereed][Invited]

  International conference proceedings


• Power generation reliability of PZT thin films on stainless-steel cantilevers

  Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno

  Oct. 2014, Proc. of the 4th International Workshop on Piezoelectric MEMS, English

  [Refereed]

  International conference proceedings


• HIGH-THROUGHPUT CHEMOTAXIS ASSAY OF PLANT-PARASITIC NEMATODE TOWARD GREEN AGRICULTURE

  H. Hida, M. Matsumura, I. Kanno, H. Nishiyama, S. Sawa, T. Higashiyama, H. Arata

  Oct. 2014, Proc. of 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2014), 276 - 278, English

  [Refereed]

  International conference proceedings


• Compositional dependence of (1-x)Ba(Zr0.2Ti0.8)O3-x(Ba0.7Ca0.3)TiO3 piezoelectric thin films prepared by combinatorial sputtering

  Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno

  Oct. 2014, Proc. of the 4th International Workshop on Piezoelectric MEMS, English

  [Refereed]

  International conference proceedings


• Compositional dependence of Pb(Mg

  Kurokawa Fumiya, Tsujiura Yuichi, Hida Hirotaka, Kanno Isaku

  We evaluated the compositional dependence of Pb(Mg1/3,Nb2/3)O3–PbTiO3(PMN–PT) polycrystalline thin films by combinatorial sputtering. We prepared compositional gradient (1 − x)PMN–xPT polycrystalline thin films with preferential orientation along the 〈001〉 direction in the composition range of x = 0–0.62. We determined that the morphotropic phase boundary (MPB) composition of PMN–PT polycrystalline thin film existed at around x = 0.35, from the X-ray diffraction (XRD) measurements. The maximum value of relative dielectric constants (εr= 1498) was obtained at approximately x = 0.23. On the other hand, the piezoelectric coefficients (|e31,f| = 14.1 C/m²) peaked at the determined MPB composition of x = 0.35. From the results of the compositional dependence of dielectric and piezoelectric characteristics, the FOM ([Formula: see text]) of the PMN–PT (x = 0.35) thin film reached 21 GPa, which is much higher than that of the other polycrystalline piezoelectric thin films. These results suggest that PMN–PT (x = 0.35) thin film is a promising material for high-efficiency piezoelectric MEMS energy harvesters.

  Institute of Physics, Sep. 2014, Jpn. J. Appl. Phys., 53(9) (9), 09PA06, English


• Compositional dependence of Pb(Mg-1/3,Nb-2/3)O-3-PbTiO3 piezoelectric thin films by combinatorial sputtering

  Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno

  Sep. 2014, JAPANESE JOURNAL OF APPLIED PHYSICS, 53(9) (9), 1 - 9, English

  [Refereed]

  Scientific journal


• Measurement of Transverse Piezoelectric Coefficient e31,f of Pb(Zr,Ti)O3 Thin Film with Stripe Electrodes

  Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno

  Aug. 2014, Proc. of the 10th Japan-Korea Conference on Ferroelectrics, English

  [Refereed]

  International conference proceedings


• Fabrication of Multi-layered PZT Piezoelectric Thin Film

  Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno

  Aug. 2014, Proc. of the 10th Japan-Korea Conference on Ferroelectrics, English

  [Refereed]

  International conference proceedings


• Direct patterning method of sol-gel PZT films by using removable microchannel chip

  Hida Hirotaka, Yagami Shun, Kanno Isaku

  The Japan Society of Applied Physics, Mar. 2014, JSAP Annual Meetings Extended Abstracts, 2014.1, 141 - 141, Japanese


• MEMS Vibration Energy Harvesting Technologies

  KANNO Isaku

  Institute of Systems, Control and Information Engineers, 2014, Systems, control and information, 58(11) (11), 443 - 448, Japanese


• Reliability of vibration energy harvesters of metal-based PZT thin films

  Y. Tsujiura, E. Suwa, F. Kurokawa, H. Hida, I. Kanno

  2014, 14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014), 557(1) (1), English

  [Refereed]

  International conference proceedings


• On-chip Force Measurement System for Investigating Plant-root Growth

  Hirotaka Hida, Katsuya Ozoe, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi

  2014, 2014 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), English

  [Refereed]

  International conference proceedings


• Airflow energy harvesters of metal-based PZT thin films by self-excited vibration

  E. Suwa, Y. Tsujiura, F. Kurokawa, H. Hida, I. Kanno

  2014, 14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014), 557(1) (1), English

  [Refereed]

  International conference proceedings


• Lead-free piezoelectric MEMS energy harvesters of (K,Na)NbO3 thin films on stainless steel cantilevers

  Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka Hida, Kazufumi Suenaga, Kenji Shibata, Isaku Kanno

  Sep. 2013, Japanese Journal of Applied Physics, 52(9) (9), 1 - 9, English

  [Refereed]

  Scientific journal


• 圧電薄膜を用いた振動発電素子技術

  KANNO ISAKU

  日本セラミックス協会, Jul. 2013, セラミックス, 48(7) (7), 542 - 545, Japanese

  [Invited]


• Theoretical analysis of MEMS energy harvesters of piezoelectric thin films on metal cantilevers

  Tsujiura Yuichi, Suwa Eisaku, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku

  カンチレバーを機械要素とする圧電薄膜エナジーハーベスターの振動発電特性は，圧電特性だけでなく，共振周波数や振動Q値など素子の振動特性にも依存する．そこで，本研究ではエナジーハーベスターの発電性能と，素子形状及び基板材料との関係を明らかにすることを目的として，異なる金属材料を基板とするPZT薄膜エナジーハーベスターを作製し，振動発電評価を行った．

  The Japan Society for Precision Engineering, 2013, Proceedings of JSPE Semestrial Meeting, 2013, 505 - 506, Japanese


• Colocalization of Quantum Dots by Reactive Molecules Carried by Motor Proteins on Polarized Microtubule Arrays

  Kazuya Fujimoto, Masuto Kitamura, Masatoshi Yokokawa, Isaku Kanno, Hidetoshi Kotera, Ryuji Yokokawa

  Jan. 2013, ACS NANO, 7(1) (1), 447 - 455, English

  [Refereed]

  Scientific journal


• Precise measurement of the transverse piezoelectric coefficient for thin films on anisotropic substrate

  Doo-Man Chun, Masashi Sato, Isaku Kanno

  Jan. 2013, JOURNAL OF APPLIED PHYSICS, 113(4) (4), English

  [Refereed]

  Scientific journal


• Microfabrication of lead-free (K, Na)NbO3 piezoelectric thin films by dry etching

  F. Kurokawa, R. Yokokawa, H. Kotera, F. Horikiri, K. Shibata, M. Sato, H. Hida, I. Kanno

  2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1051 - 1054, English

  [Refereed]

  International conference proceedings


• Lead-free piezoelectric MEMS energy harvesters of stainless steel cantilevers

  Y. Tsujiura, E. Suwa, H. Hida, K. Suenaga, K. Shibata, I. Kanno

  2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 474 - 477, English

  [Refereed]

  International conference proceedings


• Modeling of Metal-based Piezoelectric MEMS Energy Harvesters

  Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno

  2013, 2013 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), English

  [Refereed]

  International conference proceedings


• Design of MEMS cylindrical gyroscope integrated with piezoelectric thin film

  Kosuke Fujiwara, Hirotaka Hida, Isaku Kanno

  IEEE Computer Society, 2013, 2013 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, English

  [Refereed]

  International conference proceedings


• Micro fabrication of lead-free (K, Na) NbO3 piezoelectric thin films by dry etching

  F. Kurokawa, R. Yokokawa, H. Kotera, F. Horikiri, K. Shibata, T. Mishima, M. Sato, I. Kanno

  Dec. 2012, MICRO & NANO LETTERS, 7(12) (12), 1223 - 1225, English

  [Refereed]

  Scientific journal


• Piezoelectric MEMS for energy harvesting

  Sang-Gook Kim, Shashank Priya, Isaku Kanno

  Nov. 2012, MRS BULLETIN, 37(11) (11), 1039 - 1050, English

  [Refereed][Invited]

  Scientific journal


• Perfusable multi-scale channels fabricated by integration of nanoimprint lighography (NIL) and UV lithography (UVL)

  Gaku Isobe, Isaku Kanno, Hidetoshi Kotera, Ryuji Yokokawa

  Oct. 2012, MICROELECTRONIC ENGINEERING, 98, 58 - 63, English

  [Refereed]

  Scientific journal


• Composition Dependence of Piezoelectric Properties of Pb(Zr, Ti)O-3 Films Prepared by Combinatorial Sputtering

  Kohei Tomioka, Fumiya Kurokawa, Ryuji Yokokawa, Hidetoshi Kotera, Kazuhiko Adachi, Isaku Kanno

  Sep. 2012, JAPANESE JOURNAL OF APPLIED PHYSICS, 51(9) (9), 1 - 9, English

  [Refereed]

  Scientific journal


• Integrated blood cell counting device using a hydrophobic surface treatment

  Y. Noda, M. Hanafusa, A. Yamamoto, M. Ijuin, M. Hori, T. Osumi, T. Suzuki, I. Kanno, H. Kotera

  Aug. 2012, SENSORS AND ACTUATORS B-CHEMICAL, 171, 1321 - 1326, English

  [Refereed]

  Scientific journal


• A perfusable microfluidic device with on-chip total internal reflection fluorescence microscopy (TIRFM) for in situ and real-time monitoring of live cells

  Ryuji Yokokawa, Yuko Kitazawa, Kyohei Terao, Atsuhito Okonogi, Isaku Kanno, Hidetoshi Kotera

  Aug. 2012, BIOMEDICAL MICRODEVICES, 14(4) (4), 791 - 797, English

  [Refereed]

  Scientific journal


• Nano-particle deposition system (NPDS): Low energy solvent-free dry spray process for direct patterning of metals and ceramics at room temperature

  Doo-Man Chun, Jung-Oh Choi, Caroline Sunyong Lee, Isaku Kanno, Hidetoshi Kotera, Sung-Hoon Ahn

  Jul. 2012, INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, 13(7) (7), 1107 - 1112, English

  [Refereed]

  Scientific journal


• Dry Etching of Lead-Free (K,Na)NbO3 Piezoelectric Films by Ar/C4F8 Plasma

  Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Kazutoshi Watanabe, Akira Nomoto, Tomoyoshi Mishima, Fumiya Kurokawa, Isaku Kanno

  Jul. 2012, JAPANESE JOURNAL OF APPLIED PHYSICS, 51(7) (7), 1 - 76202, English

  [Refereed]

  Scientific journal


• Power-generation performance of lead-free (K,Na)NbO3 piezoelectric thin-film energy harvesters

  Isaku Kanno, Tomoharu Ichida, Kazuhiko Adachi, Hidetoshi Kotera, Kenji Shibata, Tomoyoshi Mishima

  Jun. 2012, SENSORS AND ACTUATORS A-PHYSICAL, 179, 132 - 136, English

  [Refereed]

  Scientific journal


• Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O-3 thin film on titanium substrate

  Shuhei Matsushita, Isaku Kanno, Kazuhiko Adachi, Ryuji Yokokawa, Hidetoshi Kotera

  Jun. 2012, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18(6) (6), 765 - 771, English

  [Refereed]

  Scientific journal


• Influence of lithium doping on the structural and electrical characteristics of ZnO thin films

  T. Anto Johny, Viswanathan Kumar, Hideyuki Imai, Isaku Kanno

  Jun. 2012, THIN SOLID FILMS, 520(17) (17), 5797 - 5800, English

  [Refereed]

  Scientific journal


• Thin-Film Piezoelectric Materials For a Better Energy Harvesting MEMS

  Kiyotaka Wasa, Tomoaki Matsushima, Hideaki Adachi, Isaku Kanno, Hidetoshi Kotera

  Apr. 2012, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21(2) (2), 451 - 457, English

  [Refereed]

  Scientific journal


• Deposition of PZT thin films with {001}, {110}, and {111} crystallographic orientations and their transverse piezoelectric characteristics

  D. Ambika, V. Kumar, K. Tomioka, Isaku Kanno

  Apr. 2012, Advanced Materials Letters, 3(2) (2), 102 - 106, English

  [Refereed]

  Scientific journal


• Sputtering deposition of lead-free piezoelectric (K,Na)NbO3 thin films

  P. Ratanapreechachai, I. Kanno, M. Sato

  2012, PROCEEDINGS OF THE 2012 FIFTH INTERNATIONAL CONFERENCE ON EMERGING TRENDS IN ENGINEERING AND TECHNOLOGY (ICETET 2012), 44 - 47, English

  [Refereed]

  International conference proceedings


• スパッタリング法によるKNN 系非鉛強誘電体薄膜の作製とその加工技術

  堀切 文正, 柴田 憲治, 末永 和史, 渡辺 和俊, 野本 明, 野口 将希, 三島 友義, 黒川 文弥, Kanno Isaku

  2012, セラミックス, 47, Japanese

  [Refereed][Invited]

  Scientific journal


• Nano-particle deposition system (NPDS): Low energy solvent-free dry spray process for direct patterning of metals and ceramics at room temperature

  Doo-Man Chun, Jung-Oh Choi, Caroline Sunyong Lee, Isaku Kanno, Hidetoshi Kotera, Sung-Hoon Ahn

  2012, International Journal of Precision Engineering and Manufacturing, 13(7) (7), 1107 - 1112, English

  [Refereed]

  Scientific journal


• Highly Polarized Single-c-Domain Single-Crystal Pb(Mn,Nb)O-3-PZT Thin Films

  Kiyotaka Wasa, Hideaki Adachi, Ken Nishida, Takashi Yamamoto, Tomoaki Matsushima, Isaku Kanno, Hidetoshi Kotera

  Jan. 2012, IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 59(1) (1), 6 - 13, English

  [Refereed]

  Scientific journal


• Measuring the force of adhesion between multiple kinesins and a microtubule using the fluid force produced by microfluidic flow

  Ryuji Yokokawa, Yusuke Sakai, Atsuhito Okonogi, Isaku Kanno, Hidetoshi Kotera

  Nov. 2011, MICROFLUIDICS AND NANOFLUIDICS, 11(5) (5), 519 - 527, English

  [Refereed]

  Scientific journal


• Piezoelectric properties of microfabricated (K,Na)NbO3 thin films

  Yu Wakasa, Isaku Kanno, Ryuji Yokokawa, Hidetoshi Kotera, Kenji Shibata, Tomoyoshi Mishima

  Nov. 2011, SENSORS AND ACTUATORS A-PHYSICAL, 171(2) (2), 223 - 227, English

  [Refereed]

  Scientific journal


• Polystyrene microdispenser for blood tests using hydrophobic passive valve

  Y. Noda, T. Suzuki, I. Kanno, M. Hanafusa, A. Yamamoto, M. Ijuin, M. Hori, T. Osumi, H. Kotera

  Oct. 2011, SENSORS AND ACTUATORS A-PHYSICAL, 169(2) (2), 274 - 281, English

  [Refereed]

  Scientific journal


• Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering

  Yuji Imamiya, Isaku Kanno, Ryuji Yokokawa, Hidetoshi Kotera

  Sep. 2011, JAPANESE JOURNAL OF APPLIED PHYSICS, 50(9) (9), 1 - 9, English

  [Refereed]

  Scientific journal


• 機能性薄膜のマイクロデバイス応用--圧電薄膜を用いたMEMSデバイス

  神野 伊策, 小寺 秀俊

  養賢堂, Jun. 2011, 機械の研究, 63(6) (6), 459 - 466, Japanese


• Development of piezoelectric MEMS deformable mirror

  Masashi Sato, Shogo Tsuda, Isaku Kanno, Hidetoshi Kotera, Osamu Tabata

  Jun. 2011, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 17(5-7) (5-7), 931 - 935, English

  [Refereed]

  Scientific journal


• High-efficiency piezoelectric energy harvesters of c-axis-oriented epitaxial PZT films transferred onto stainless steel cantilevers

  Keiji Morimoto, Isaku Kanno, Kiyotaka Wasa, Hidetoshi Kotera

  Sep. 2010, SENSORS AND ACTUATORS A-PHYSICAL, 163(1) (1), 428 - 432, English

  [Refereed]

  Scientific journal


• J0207-2-1 Heterotypic cell positioning using electroosmotic flow and observation of cell-cell interactions

  KITAZAWA Yuko, TERAO Kyohei, YOKOKAWA Ryuji, OKONOGI Atsuhito, KANNO Isaku, KOTERA Hidetoshi

  This paper presents a novel technique of positioning heterotypic cells using electroosmotic flow (EOF). Positioning heterotypic cells is a key technique toward the development of single cell analysis. Several techniques for positioning cells have been developed, such as using dielectrophoresis and physical trapping in microchannel. These techniques, however, require additional methods for subsequent biological experiments after arraying cells. In this study, we demonstrated the positioning of two kinds of cells at designated pocket-like microstructures. In this method, cells were positioned using multi-directional EOF in open-to-air flow chamber which would allow easy handling for further biological experiments. After positioning heterotypic cells, we cultivated them and observed cell-cell interactions via gap junctions by the transfer of a fluorescent dye.

  The Japan Society of Mechanical Engineers, 2010, The proceedings of the JSME annual meeting, 2010, 239 - 240, Japanese


• J0207-1-6 Bi-directional transport of motor protein by electrophoresis

  Kotake Hiroki, Yokokawa Ryuji, Kanno Isaku, Kotera Hidetoshi

  Recently, motor protein such as kinesin or dynein has been used as a nano actuator. Previous works have achieved the control of the movement of microtubules (MT) and the transport of molecular cargo. However, the movement of microtubules was led by minus-end because only kinesin was used as an actuator. In this paper, we patterned motor proteins selectively by surface modification and control the location of microtubules by electrophoresis. Selective patterning of motor proteins and actively control of the MT location enables MTs to move with minus-end and plus-end as leading heads by kinesin and dynein motors.

  The Japan Society of Mechanical Engineers, 2010, The proceedings of the JSME annual meeting, 2010, 135 - 136, Japanese


• Development of Complex Micro-structures with Inclined Rotated UV Lithography

  HIRAMARU Daisuke, SUZUKI Hiroyuki, KANNO Isaku, KOTERA Hidetoshi, SUZUKI Takaaki, Daisuke HIRAMARU, Hiroyuki SUZUKI, Isaku KANNO, Hidetoshi KOTERA, Takaaki SUZUKI

  Fabrication method of complex 3D structures becomes more important for improvement of soft-MEMS. Then, we propose a new fabrication method that can fabricate complex 3D micro-structures by the inclined rotated UV lithography with an optional fixed mask. A simulation method of the proposed lithography was developed on the basis of electromagnetic theory to calculate fabricated structures in order to assist design of the main and the optional masks. The validity of the proposed lithography and the simulation method were confirmed by demonstrations of the comparison of complex 3D structures between fabricated structures and simulated ones. The proposed method shows the potential to fabricate novel micro-structures and to improve the performance of micro-devices.

  日本AEM学会, 2010, Journal of the Japan Society of Applied Electromagnetics and Mechanics, 18(4) (4), 377 - 382, Japanese


• Sol-gel deposition and piezoelectric properties of {110}-oriented Pb(Zr0.52Ti0.48)O-3 thin films

  D. Ambika, Viswanathan Kumar, Hideyuki Imai, Isaku Kanno

  Jan. 2010, APPLIED PHYSICS LETTERS, 96(3) (3), 31909, English

  [Refereed]

  Scientific journal


• Orientation Dependence of Transverse Piezoelectric Properties of Epitaxial BaTiO3 Films

  Hideyuki Imai, Isaku Kanno, Ryuji Yokokawa, Kiyotaka Wasa, Hidetoshi Kotera

  2010, JAPANESE JOURNAL OF APPLIED PHYSICS, 49(9) (9), 1 - 9, English

  [Refereed]

  Scientific journal


• Orientation Dependence of Shear Mode Piezoelectric Properties of Epitaxial Pb(Zr-x,Ti1-x)O-3 Thin Films

  Kenji Akama, Isaku Kanno, Ryuji Yokokawa, Kiyotaka Wasa, Hidetoshi Kotera

  2010, JAPANESE JOURNAL OF APPLIED PHYSICS, 49(9) (9), 1 - 9, English

  [Refereed]

  Scientific journal


• Evaluation of Intrinsic Shear Piezoelectric Coefficient d(15) of c-Axis Oriented Pb(Zr,Ti)O-3 Films

  Isaku Kanno, Kenji Akama, Kiyotaka Wasa, Hidetoshi Kotera

  Sep. 2009, APPLIED PHYSICS EXPRESS, 2(9) (9), pp.091402, English

  [Refereed]

  Scientific journal


• Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr, Ti)O-3 Thin Films on Titanium Substrates

  Kensuke Kanda, Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa

  Jun. 2009, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 18(3) (3), 610 - 615, English

  [Refereed]

  Scientific journal


• Development of liquid pumping devices using vibrating microchannel walls

  Junya Ogawa, Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa, Takaaki Suzuki

  Jun. 2009, SENSORS AND ACTUATORS A-PHYSICAL, 152(2) (2), 211 - 218, English

  [Refereed]

  Scientific journal


• High coupling piezoelectric thin films of Pb(Zr,Ti)O-3-based ternary perovskite compounds for GHz-range film bulk acoustic resonators

  N. Yamauchi, T. Shirai, T. Yoshihara, Y. Hayasaki, T. Ueda, T. Matsushima, K. Wasa, I. Kanno, H. Kotera

  Apr. 2009, APPLIED PHYSICS LETTERS, 94(17) (17), 172903, English

  [Refereed]

  Scientific journal


• Assembly-free 3-D microfabrication process using single-mask multidirectional photolithography

  T. Suzuki, H. Yamamoto, I. Kanno, M. Washizu, H. Kotera

  2009, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1900 - 1903, English

  [Refereed]

  International conference proceedings


• 積層型圧電アクチュエータを用いた進行波型マイクロポンプによる流体輸送制御

  KANNO ISAKU

  2009, 日本AEM学会誌, Vol.17.(No.2) (No.2), pp.253 - 258, Japanese

  [Refereed]

  Scientific journal


• 回転傾斜露光法による複雑マイクロ構造作製とバイオデバイスへの応用

  KANNO ISAKU

  Fabrication of complex 3D structures becomes more important for improvement of soft-MEMS. Then, we propose the new fabrication method that can fabricate complex 3D structures with inclined rotated UV lithography on only one process. The simulation of the proposed method was developed to calculate the fabricated structures to assist design of masks. The validity of the method and the simulation were confirmed by demonstration of fabrication of the complex 3D structures and by similarity between fabricated structures and simulated ones. In addition, to indicate the availability of fabricated complex structures, the fabricated structures were applied to the FISH (Fluorescence In Situ Hybridization) process that is the method of observation for chromosomes. In this study, the proposed method showed the potential to fabricate the novel structures and to improve the performance of micro-device.

  日本AEM学会, 2009, 日本AEM学会誌, Vol.17.(No.2) (No.2), pp.274 - 278, Japanese

  [Refereed]

  Scientific journal


• Effects of fluid dynamic stress on fracturing of cell-aggregated tissue during purification for islets of Langerhans transplantation

  KANNO ISAKU

  2009, Journal of Physics D: Applied Physics, Vol.141., pp.115507, English

  [Refereed]

  Scientific journal


• Crystalline Structure of Highly Piezoelectric (K,Na)NbO3 Films Deposited by RF Magnetron Sputtering

  Kenji Shibata, Fumihito Oka, Akira Nomoto, Tomoyoshi Mishima, Isaku Kanno

  Dec. 2008, JAPANESE JOURNAL OF APPLIED PHYSICS, 47(12) (12), 8909 - 8913, English

  [Refereed]

  Scientific journal


• Fabrication and transverse piezoelectric characteristics of PZT thick-film actuators on alumina substrates

  K. Sivanandan, Asha T. Achuthan, V. Kumar, Isaku Kanno

  Nov. 2008, SENSORS AND ACTUATORS A-PHYSICAL, 148(1) (1), 134 - 137, English

  [Refereed]

  Scientific journal


• Development of a micro actuator driven by piezoelectric thin film for RF-MEMS switches( on 16th MAGADA Conference)

  SUZUKI Takaaki, TAZAWA Yoshiro, KANNO Isaku, KOTERA Hidetoshi, Takaaki SUZUKI, Yoshiro TAZAWA, Isaku KANNO, Hidetoshi KOTERA

  A piezoelectric RF-MEMS switch driven by PZT thin films was investigated for low-voltage actuation. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111) Pt/Ti/Si substrates by RF-sputtering. In the previous paper, the cantilever type actuators composed of PZT thin films and Cr elastic layers have been successively fabricated as unimorph structure, but large initial bending arose due to the residual stress in the PZT and Cr layers. In this paper, we optimized the deposition condition for Cr elastic layer in order to reduce the initial bending. Then, new structures of piezoelectric actuators having cantilever and four edges supported beam types were fabricated, and evaluated for the driving property. The deflection of cantilever and four edges supported beam type actuators applied the voltage of 5V were 2.6μm and 1.3μm, respectively. As a result, it is confirmed that the proposed actuators can be adopted for RF-MEMS switches with low-voltage actuation.

  日本AEM学会, Jun. 2008, Journal of the Japan Society of Applied Electromagnetics and Mechanics, 16(2) (2), 82 - 87, Japanese

  [Refereed]


• Modal analysis for externally driven micropump and additional mass effect of water

  Kensuke Kanda, Satoshi Ishikawa, Junya Ogawa, Takaaki Suzuki, Isaku Kanno, Hidetoshi Kotera

  Jun. 2008, JAPANESE JOURNAL OF APPLIED PHYSICS, 47(6) (6), 5226 - 5230, English

  [Refereed]

  Scientific journal


• Development of 4 GHz bulk acoustic wave resonators by sputtered Pb(Mn,Nb)O3-Pb(Zr,Ti)O3 Thin Films

  N. Yamauchi, T. Shirai, T. Yoshihara, Y. Hayasaki, T. Matsushima, I. Kanno, K. Wasa

  2008, Proceedings - IEEE Ultrasonics Symposium, 1920 - 1923, English

  [Refereed]

  International conference proceedings


• 309 High-density piezoelectric MEMS deformable mirror for adaptive optics

  TSUDA Shogo, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Piezoelectric MEMS deformable mirror resolution is studied for an adaptive optics device. In previous study, we have developed the piezoelectric MEMS deformable mirrors which have 19 actuator away. To improve the resolution of the deformable mirror, we designed hexagonal 61-element actuator array. In order to reduce the dead space for the lead lines between the actuators, they were prepared on the polyimide insulating layer. The displacement of each actuator was measured by using a lasor Doppler vibrometer and we confirmed a relatively large displacement of more than 1pm by applying a voltage of 10Vpp. Furthermore, we measured the relationship input voltage and displacement and fabricated DMs actuated linearly when applied -20〜20Vpp.

  The Japan Society of Mechanical Engineers, 2008, The proceedings of the JSME annual meeting, 2008, 17 - 18, Japanese


• 310 Characterization of Liquid Pumping Devices by Vibration of Channel Wall Composed of Piezoelectric Thin Film

  OGAWA Junya, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  In this paper, we propose and study innovative liquid pimping devices for microfluidic systems such as pTAS. In our study, microchaimels with vibrating wall were fabricated on silicon on insulator (SOI). The vibrating wall was composed of piezoelectric PZT thin films deposited on the microchannel wall. The microchannel can transport liquid by traveling wave induced on channel wall by applying sinusoidal voltages to each patterned top electrodes with different phase. The active microchannel of 200μm wide was fabricated by the deep reactive ion etching(DRIE) process. The displacement profiles of the vibrating wall and frequency response were measured by a laser Doppler vibrometer. We examined the difference of the characteristics that were the to the effect of the structure of channel wall.

  The Japan Society of Mechanical Engineers, 2008, The proceedings of the JSME annual meeting, 2008, 19 - 20, Japanese


• 鈴木孝明，田澤慶朗，神野伊策，小寺秀俊

  KANNO ISAKU

  2008, 日本AEM学会誌, Vol.16.(No.2) (No.2), pp.82 - 87, Japanese

  [Refereed]

  Scientific journal


• Piezoelectric properties of (K,Na)NbO3 films deposited by RF magnetron sputtering

  Kenji Shibata, Furnihito Oka, Akio Ohishi, Tornoyoshi Mishima, Isaku Kanno

  Jan. 2008, APPLIED PHYSICS EXPRESS, 1(1) (1), 1 - 11501, English

  [Refereed]

  Scientific journal


• Piezoelectric properties of (K,Na)NbO3 thin films deposited on (001)SrRuO3/Pt/MgO substrates

  Isaku Kanno, Takuya Mino, Shuichiro Kuwajima, Takaaki Suzuki, Hidetoshi Kotera, Kiyotaka Wasa

  Dec. 2007, IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 54(12) (12), 2562 - 2566, English

  [Refereed]

  Scientific journal


• Piezoelectric properties of epitaxial NaNbO3 thin films deposited on (001)SrRuO3/Pt/MgO substrates

  Takuya Mino, Shuichiro Kuwajima, Takaaki Suzuki, Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa

  Oct. 2007, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 46(10B) (10B), 6960 - 6963, English

  [Refereed]

  Scientific journal


• Single-step replicable microfluidic check valve for rectifying and sensing low Reynolds number flow

  J. Loverich, I. Kanno, H. Kotera

  Aug. 2007, MICROFLUIDICS AND NANOFLUIDICS, 3(4) (4), 427 - 435, English

  [Refereed]

  Scientific journal


• Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films

  Isaku Kanno, Yoshiro Tazawa, Takaaki Suzuki, Hidetoshi Kotera

  May 2007, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 13(8-10) (8-10), 825 - 829, English

  [Refereed]

  Scientific journal


• Micro cell encapsulation and its hydrogel-beads production using microfluidic device

  Hirofumi Shintaku, Takeo Kuwabara, Satoyuki Kawano, Takaaki Suzuki, Isaku Kanno, Hidetoshi Kotera

  May 2007, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 13(8-10) (8-10), 951 - 958, English

  [Refereed]

  Scientific journal


• Development of a micro biochip integrated traveling wave micropumps and surface plasmon resonance imaging sensors

  Takaaki Suzuki, Yuji Teramura, Hidetoshi Hata, Koki Inokuma, Isaku Kanno, Hiroo Iwata, Hidetoshi Kotera

  May 2007, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 13(8-10) (8-10), 1391 - 1396, English

  [Refereed]

  Scientific journal


• Development of deformable mirror composed of piezoelectric thin films for adaptive optics

  Isaku Kanno, Takaaki Kunisawa, Takaaki Suzuki, Hidetoshi Kotera

  Mar. 2007, IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 13(2) (2), 155 - 161, English

  [Refereed]

  Scientific journal


• Improving the performance of a traveling wave micropump for fluid transport in Micro Total Analysis Systems

  Takaaki Suzuki, Isaku Kanno, Hidetoshi Hata, Hirofumi Shintaku, Satoyuki Kawano, Hidetoshi Kotera

  2007, COMPLEX MEDICAL ENGINEERING, 3 - +, English

  [Refereed]

  International conference proceedings


• 低電圧駆動型指向性可変ミリ波アンテナのための基礎的研究（誘電体の局所温度場を制御するマイクロヒータ）

  KANNO ISAKU

  2007, 日本AEM学会誌, Vol.15.(No.2) (No.2), pp.70 - 75, Japanese

  [Refereed]

  Scientific journal


• MEMS deformable mirrors for adaptive optics actuated by piezoelectric PZT films

  Isaku Kanno, Takaaki Kunisawa, Takaaki Suzuki, Hidetoshi Kotera

  2007, IEEJ Transactions on Sensors and Micromachines, 127(12) (12), 1 - 523, Japanese

  [Refereed]

  Scientific journal


• Fabrication of single crystal PZT thin films on glass substrates

  Kenichiro Terada, Takaaki Suzuki, Isaku Kanno, Hidetoshi Kotera

  Jan. 2007, VACUUM, 81(5) (5), 571 - 578, English

  [Refereed]

  Scientific journal


• Compound two-dimensional thermo-elastic and thermodynamic analysis for c-axis-oriented epitaxial lead titanate thin films

  M. A. Hassan, I. Kanno, H. Kotera

  Nov. 2006, VACUUM, 81(4) (4), 459 - 465, English

  [Refereed]

  Scientific journal


• Electric field-induced strain of PbZrO3 films

  Isaku Kanno, Takashi Inoue, Takaaki Suzuki, Hidetoshi Kotera, Kiyotaka Wasa

  Sep. 2006, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 45(9B) (9B), 7258 - 7261, English

  [Refereed]

  Scientific journal


• Growth and structure of heteroepitaxial lead titanate thin films constrained by miscut strontium titanate substrates

  Yoko Ichikawa, Toshiyuki Matsunaga, Molisen Hassan, Isaku Kanno, Takaaki Suzuki, Kiyotaka Wasa

  May 2006, JOURNAL OF MATERIALS RESEARCH, 21(5) (5), 1261 - 1268, English

  [Refereed]

  Scientific journal


• Heteroepitaxial growth of stress free single crystal perovskite thin films

  K. Wasa, S. H. Seo, D. Y. Noh, I. Kanno, T. Suzuki

  Apr. 2006, SURFACE REVIEW AND LETTERS, 13(2-3) (2-3), 167 - 172, English

  [Refereed]

  Scientific journal


• Electromechanical coupling factors of single-domain 0.67Pb(Mg1/3Nb2/3)O-3-0.33 PbTiO3 single-crystal thin films

  K Wasa, S Ito, K Nakamura, T Matsunaga, Kanno, I, T Suzuki, H Okino, T Yamamoto, SH Seo, DY Noh

  Mar. 2006, APPLIED PHYSICS LETTERS, 88(12) (12), pp.122903, English

  [Refereed]

  Scientific journal


• Structure and Electromechanical Properties of Quenched PMN-PT Single Crystal Thin Films

  KANNO ISAKU

  2006, Advances in Science and Technology, Vol.45., pp.1212 - 1217, English

  [Refereed]

  Scientific journal


• Concepts for a new class of all-polymer micropumps

  Jacob J. Loverich, Isaku Kanno, Hidetoshi Kotera

  2006, LAB ON A CHIP, 6(9) (9), 1147 - 1154, English

  [Refereed]

  Scientific journal


• Characterization of Pb(Zr,Ti)O-3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications

  T Suzuki, Kanno, I, JJ Loverich, H Kotera, K Wasa

  Jan. 2006, SENSORS AND ACTUATORS A-PHYSICAL, 125(2) (2), 382 - 386, English

  [Refereed]

  Scientific journal


• Intrinsic crystalline structure of epitaxial Pb(Zr,Ti)O-3 thin films

  Kanno, I, H Kotera, T Matsunaga, K Wasa

  Apr. 2005, JOURNAL OF APPLIED PHYSICS, 97(7) (7), pp. 074101, English

  [Refereed]

  Scientific journal


• Experimental and theoretical investigations of delamination at free edge of interface between piezoelectric thin films on a substrate

  F Shang, T Kitamura, H Hirakata, Kanno, I, H Kotera, K Terada

  Mar. 2005, INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 42(5-6) (5-6), 1729 - 1741, English

  [Refereed]

  Scientific journal


• Development of peristaltic soft micropump driven by electrostatic actuator

  T Suzuki, Kanno, I, S Yakushiji, S Kawano, H Kotera

  2005, MICRO TOTAL ANALYSIS SYSTEMS 2004, VOL 2, (297) (297), 13 - 15, English

  [Refereed]

  International conference proceedings


• Transfer method of Pb(Zr, Ti) O3 epitaxial thin flms onto glass substrates and evaluation of their dielectric properies

  Kenichiro Terada, Takaaki Suzuki, Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa

  Vacuum Society of Japan, 2005, Shinku/Journal of the Vacuum Society of Japan, 48(3) (3), 133 - 135, Japanese

  [Refereed]

  Scientific journal


• Development of Valveless Micropump Piezoelectrically Driven by Traveling Wave

  T. Suzuki, H. Hata, H. Shintaku, I. Kanno, H. Kotera

  2005, Journal of the Japan Society of Applied Electromagnetics, vol. 13, pp. 310-315, English

  [Refereed]


• 圧電アクチュエータを用いた進行波型バルブレスマイクロポンプの開発

  KANNO ISAKU

  2005, 日本AEM学会誌, Vol.13.(No.4) (No.4), pp.310 - 315, Japanese

  [Refereed]

  Scientific journal


• μTAS用パッシブミキサーにおける流体混合と物質移動特性

  KANNO ISAKU

  2005, 日本機械学会論文集B, 71(701) (701), 111 - 116, Japanese

  [Refereed]

  Scientific journal


• Development of atomization method in microchannel and its basic characteristics

  Hirofumi Shintaku, Satoyuki Kawano, Takaaki Suzuki, Isaku Kanno, Hidetoshi Kotera

  Japan Society of Mechanical Engineers, 2005, Nihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B, 71(708) (708), 2007 - 2012, Japanese

  [Refereed]

  Scientific journal


• Structure and ferroelectric properties of single crystal PMNT thin films

  K Wasa, Kanno, I, T Suzuki, SH Seo, DY Noh, H Okino, T Yamamoto

  2005, INTEGRATED FERROELECTRICS, 70, 131 - 140, English

  [Refereed]

  Scientific journal


• Structure and dielectric properties of heteroepitaxial PMNT thin films

  K Wasa, Kanno, I, S Seo, D Noh, T Matsunaga, H Okino, T Yamamoto

  2005, FERROELECTRICS, 328, 69 - 77, English

  [Refereed]

  Scientific journal


• Characterization of transverse piezoelectric properties of c-axis oriented PbTiO3 thin films

  Kanno, I, S Kogure, D Tabata, K Nakano, T Suzuki, H Kotera, K Wasa

  2005, FERROELECTRICS, 327, 91 - 95, English

  [Refereed]

  Scientific journal


• Pulsed laser deposition of high-quality (K,Na)NbO3 thin films on SrTiO3 substrate using high-density ceramic targets

  T Saito, T Wada, H Adachi, Kanno, I

  Sep. 2004, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 43(9B) (9B), 6627 - 6631, English

  [Refereed]

  Scientific journal


• Thermodynamic study of c-axis-oriented epitaxial Pb(Zr, Ti)O3 thin films

  Isaku Kanno, Yu Yokoyama, Kotera Hidetoshi, Kiyotaka Wasa

  Feb. 2004, Physical Review B - Condensed Matter and Materials Physics, 69(6) (6), English

  [Refereed]

  Scientific journal


• Thermodynamic study of c-axis-oriented epitaxial Pb(Zr,Ti)O-3 thin films

  Kanno, I, Y Yokoyama, H Kotera, K Wasa

  Feb. 2004, PHYSICAL REVIEW B, 69(6) (6), pp.64103, English

  [Refereed]

  Scientific journal


• Micro liquid mixing using pulsating flow at extremely low Reynolds numbers

  SHINTAKU Hirofumi, KAWANO Satoyuki, KANNO Isaku, KOTERA Hidetoshi

  Mixing of samples and reagents in microchannels is a key technology in realizing a μTAS. Turbulence is not practically attainable in micro-scale since Reynolds number is extremely low. Therefore, introducing oscillations or electrical force to disturb liquid flow is necessary to enhance the mixing in microchannels. Some researchers reported mixing method by the use of time pulsating cross-flow into main channel. In those systems, complex actuators are necessary and the efficiency is not so high due to the difficulties in the optimization. In this paper, we present a simple mixing method using an asymmetric pulsating flow.

  The Japan Society of Mechanical Engineers, 2004, The proceedings of the JSME annual meeting, 2004, 67 - 68, Japanese


• Structure and ferroelectric properties of sputtered PMNT thin films

  K Wasa, Kanno, I, T Suzuki, SH Seo, DY Noh, H Okino, T Yamamoto

  2004, 2004 14th IEEE International Symposium on Applications of Ferroelectrics-ISAF-04, 11 - 16, English

  [Refereed]

  International conference proceedings


• Low-Voltage Actuation of RF-MEMS Switch Using Piezoelectric PZT Thin-Films

  KANNO ISAKU

  2004, Produktion von Leiterplatten Und Systemen, Vol.6.(No.3.) (No.3.), pp457 - 459, English

  [Refereed]

  Scientific journal


• Measurement of transverse piezoelectric properties of PZT thin films

  Kanno, I, H Kotera, K Wasa

  Oct. 2003, SENSORS AND ACTUATORS A-PHYSICAL, 107(1) (1), 68 - 74, English

  [Refereed]

  Scientific journal


• Crystallographic characterization of epitaxial Pb(Zr,Ti)O-3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering

  Kanno, I, H Kotera, K Wasa, T Matsunaga, T Kamada, R Takayama

  Apr. 2003, JOURNAL OF APPLIED PHYSICS, 93(7) (7), 4091 - 4096, English

  [Refereed]

  Scientific journal


• Anomalous cystalline structure of epitaxial Pb(Zr,Ti)O-3 films grown on (100)Pt/(100)MgO by RF-magnetron sputtering

  Kanno, I, H Kotera, K Wasa, T Matsunaga, T Kamada, R Takayama

  Apr. 2003, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 42, S1317 - S1321, English

  [Refereed]

  Scientific journal


• Structure and dielectric properties of heteroepitaxial PMNT thin films

  K Wasa, Kanno, I, SH Seo, DY Noh, H Okino, T Yamamoto

  2003, INTEGRATED FERROELECTRICS, 55, 781 - 793, English

  [Refereed]

  Scientific journal


• DLC・ダイヤモンド薄膜のMEMSおよびμ-TASへの応用

  KANNO ISAKU

  オ-ム社, 2003, New Diamond, Vol. 19.(No.2) (No.2), pp.29 - 14, Japanese

  [Invited]

  Scientific journal


• Structural investigation of Pb-y(Zr0.57Ti0.43)(2-y)O-3 films deposited on Pt(001)/MgO(001) substrates by rf sputtering

  T Matsunaga, T Hosokawa, Y Umetani, R Takayama, Kanno, I

  Aug. 2002, PHYSICAL REVIEW B, 66(6) (6), pp. 064102, English

  [Refereed]

  Scientific journal


• Development of Micomixer Based on Instability of Interface Between Two Immiscble Liquids（jointly worked）

  KANNO ISAKU

  2002, Micro Total Analysis Systems 2002, No. 1,, pp. 88 - 90, English

  [Refereed]

  Scientific journal


• Bi-directional Valve-less Micropumu using Piezoelectric Micro-array Actuators（jointly worked）

  KANNO ISAKU

  2002, Micro Total Analysis Systems 2002, No.1,, pp. 148 - 150, English

  [Refereed]

  Scientific journal


• Piezoelectric Properties of Pzt Thin Film

  T. Hirasawa, T. Yamamoto, I. Kanno, H. Torii, S. Shima, R. Takayama, H. Kotera

  2001, The Society of Materials Science, B, pp. 193-196, English

  [Refereed]


• A study of controlling of dielectric properties of Pb(Zr, Ti)O3 thin film

  Taku Hirasawa, Toshihiro Yamamoto, Hidetoshi Kotera, Susumu Shima, Isaku Kanno, Hideo Torii, Ryoichi Takayama

  2000, IEEJ Transactions on Sensors and Micromachines, 120(12) (12), 559 - 564, English

  [Refereed]

  Scientific journal


• A study of controlling of dielectric properties of Pb(Zr, Ti)O3 thin film

  Taku Hirasawa, Toshihiro Yamamoto, Hidetoshi Kotera, Susumu Shima, Isaku Kanno, Hideo Torii, Ryoichi Takayama

  2000, IEEJ Transactions on Sensors and Micromachines, 120(12) (12), 559 - 564, English

  [Refereed]

  Scientific journal


• Characterization and aging response of the d(31) piezoelectric coefficient of lead zirconate titanate thin films

  JF Shepard, F Chu, Kanno, I, S Trolier-McKinstry

  May 1999, JOURNAL OF APPLIED PHYSICS, 85(9) (9), 6711 - 6716, English

  [Refereed]

  Scientific journal


• Piezoelectric Property of CVD ZnO Film for Pressure Micro Sensor（jointly worked）

  KANNO ISAKU

  1999, Advances in Information Storage Systems, Vol.10, pp.347 - 355, English

  [Refereed]

  Scientific journal


• Interfacial structure and ferroelectric properties of PZT/SrRuO3 heterostructures on MISCUT (001)SrTiO3

  K Wasa, Y Ichikawa, H Adachi, Kanno, I, K Setsune, DG Schlom, S Trolier-McKinstry, Q Gan, CB Eom

  1999, INTEGRATED FERROELECTRICS, 26(1-4) (1-4), 741 - 748, English

  [Refereed]

  Scientific journal


• Piezoelectric characteristics of c-axis oriented Pb(Zr,Ti)O-3 thin films

  Kanno, I, S Fujii, T Kamada, R Takayama

  Feb. 1998, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 32, S1481 - S1484, English

  [Refereed]

  Scientific journal


• Continuous single crystal PbTiO3 thin films epitaxially grown on miscut (001)SrTiO3

  K Wasa, Y Haneda, T Satoh, H Adachi, Kanno, I, K Setsune, DG Schlom, S Trolier-McKinstry, CB Eom

  Feb. 1998, JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 32, S1344 - S1348, English

  [Refereed]

  Scientific journal


• Basic sputtering process and ferroelectric properties of single-domain single-crystal thin films of PbTiO3

  K Wasa, Y Haneda, T Sato, H Adachi, Kanno, I, DG Schlom, ST Trolier-McKinstry, Q Gan, CB Eom

  1998, INTEGRATED FERROELECTRICS, 21(1-4) (1-4), 451 - 460, English

  [Refereed]

  Scientific journal


• Preparation of c-axis oriented Pb(Zr, Ti)O-3 thin films by RF-magnetron sputtering and their dielectric and piezoelectric properties

  S Fujii, Kanno, I, T Kamada, R Takayama

  Sep. 1997, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 36(9B) (9B), 6065 - 6068, English

  [Refereed]

  Scientific journal


• High-energy ion beam analysis of ferroelectric thin films

  M Watamori, S Honda, O Kubo, Kanno, I, T Hirao, K Sasabe, K Oura

  Jun. 1997, APPLIED SURFACE SCIENCE, 117, 453 - 458, English

  [Refereed]

  Scientific journal


• Piezoelectric properties of c-axis oriented Pb(Zr,Ti)O-3 thin films

  Kanno, I, S Fujii, T Kamada, R Takayama

  Mar. 1997, APPLIED PHYSICS LETTERS, 70(11) (11), 1378 - 1380, English

  [Refereed]

  Scientific journal


• Processing and characterization of ferroelectric thin films by multi-ion-beam sputtering

  Kanno, I, S Hayashi, R Takayama, H Sakakima, T Hirao

  May 1996, NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 112(1-4) (1-4), 125 - 128, English

  [Refereed]

  Scientific journal


• Superlattices of PbZrO3 and PbTiO3 prepared by multi-ion-beam sputtering

  Kanno, I, S Hayashi, R Takayama, T Hirao

  Jan. 1996, APPLIED PHYSICS LETTERS, 68(3) (3), 328 - 330, English

  [Refereed]

  Scientific journal


• PREPARATION OF PB-BASED FERROELECTRIC THIN-FILMS AT ROOM-TEMPERATURE USING EXCIMER-LASER-ASSISTED MULTI-ION-BEAM SPUTTERING

  KANNO, I, S HAYASHI, R TAKAYAMA, H SAKAKIMA, T HIRAO

  Sep. 1995, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 34(9B) (9B), 5211 - 5215, English

  [Refereed]

  Scientific journal


• ANTIFERROELECTRIC PBZRO3 THIN-FILMS PREPARED BY MULTI-ION-BEAM SPUTTERING

  KANNO, I, S HAYASHI, M KITAGAWA, R TAKAYAMA, T HIRAO

  Jan. 1995, APPLIED PHYSICS LETTERS, 66(2) (2), 145 - 147, English

  [Refereed]

  Scientific journal


• CHARACTERIZATION OF PB(ZR, TI)O-3 THIN-FILMS PREPARED BY MULTI-ION-BEAM SPUTTERING

  KANNO, I, S HAYASHI, T KAMADA, M KITAGAWA, T HIRAO

  Jan. 1994, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 33(1B) (1B), 574 - 577, English

  [Refereed]

  Scientific journal


• LOW-TEMPERATURE PREPARATION OF PB(ZR, TI)O3 THIN-FILMS ON (PB, LA)TIO3 BUFFER LAYER BY MULTI-ION-BEAM SPUTTERING

  KANNO, I, S HAYASHI, T KAMADA, M KITAGAWA, T HIRAO

  Sep. 1993, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 32(9B) (9B), 4057 - 4060, English

  [Refereed]

  Scientific journal


• FERROELECTRIC PBTIO3 THIN-FILMS PREPARED BY MULTI-ION-BEAM SPUTTER AND ION-ASSISTED DEPOSITION

  KANNO, I, T KAMADA, S HAYASHI, M KITAGAWA, T HIRAO

  Jul. 1993, JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 32(7A) (7A), L950 - L953, English

  [Refereed]

  Scientific journal


• TRIBOLOGICAL PROPERTIES OF ALUMINUM MODIFIED WITH NITROGEN ION-IMPLANTATION AND PLASMA TREATMENT

  KANNO, I, K NOMOTO, S NISHIJIMA, T NISHIURA, T OKADA, K KATAGIRI, H MORI, K IWAMOTO

  Jul. 1991, NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 59(60) (60), 920 - 924, English

  [Refereed]

  Scientific journal

• Evaluation of crystal structures and piezoelectric properties of epitaxial Pb(Zr,Ti)O₃ thin films grown on Si substrates

  TAN G., KIM Eun-Ji, KWEON Sang-Hyo, 小金澤智之, 神野伊策

  2020, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 67th


• 有機圧電エナジーハーベスターにおける振動発電特性の膜厚依存性

  小林晃子, 堀家匠平, 小柴康子, 福島達也, 神野伊策, 石田謙司

  25 Feb. 2019, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 66th, ROMBUNNO.9a‐PA2‐29, Japanese

  Summary national conference


• フッ素系高分子圧電体を用いたユニモルフカンチレバー型振動発電デバイスの特性評価

  小柴康子, 小林晃子, 堀家匠平, 堀家匠平, 福島達也, 神野伊策, 石田謙司

  2019, フッ素化学討論会講演要旨集, 42nd


• 機械的ストレス下における植物の根系発達過程の解析手法—Analytical method for developmental process of growing root systems under mechanical stress

  肥田 博隆, 西脇 大維, 神野 伊策, 野田口 理孝

  [東京] : Institute of Electrical Engineers of Japan, 2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 4p, Japanese


• Pb(Zr,Ti)O₃薄膜の電圧印加結晶構造変化の組成依存性

  譚ゴオン, 丸山和樹, 金光勇弥, 西岡慎太郎, 逢坂広己, 小金澤智之, 梅垣俊仁, 神野伊策

  2018, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 65th


• Pb(Zr,Ti)O₃圧電薄膜の逆圧電効果による結晶構造変化のその場観察

  TAN Goon, 丸山和樹, 金光勇弥, 西岡慎太郎, 小金澤智之, 梅垣俊仁, 肥田博隆, 神野伊策

  2017, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 78th


• 30pm1-E-4 Fabrication and Characterization of Insect-scale Piezoelectric Thin-film Robots

  Iwasaki Takumi, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku

  This paper describes the fabrication and characterization on insect-scale piezoelectric thin-film robots. Recently, many insect-scale robots are being developed for medical and engineering field. However, they need a power source and are expensive due to complex structures. In this study, we fabricated an insect-scale robot driven at low voltage and characterized them. We deposited PZT thin films on cantilever-shaped stainless steel (SUS304) substrates, and assembled them into a three-leg insect-scale robot. From experimental results, a robot with no load moved at 2.25 mm/s by applying 13 V_ unipolar square-wave voltage at 190 Hz. In contrast, a robot with 72.8 mg mass moved at 3.03 mm/s by applying 20 V_ voltage at 156 Hz. We successfully realized an insect-scale piezoelectric thin-film robot driven at low voltage.

  The Japan Society of Mechanical Engineers, 21 Oct. 2015, マイクロ・ナノ工学シンポジウム, 2015(7) (7), "30pm1 - E-4-1"-"30pm1-E-4-2", Japanese


• 2A2-R08 Development of soft actuators using transferred piezoelectric thin films

  HIDA Hirotaka, SAKURAI Akira, TSUJIURA Yuichi, KUROKAWA Fumiya, KANNO Isaku

  We developed novel soft actuators using piezoelectric thin films. To realize low-cost fabrication method, we also developed a new transfer technique of piezoelectric thin films, which was deposited on temporary stainless steel substrate, to PDMS substrate by using wet etching process. By characterizing crystal structure and driving performance as actuators, we experimentally clarified that transferred Pb(Zr,Ti)O_3 (PZT) thin films have piezoelectric properties. This method might allow us to develop novel MEMS (micro-electro-mechanical systems) devices such as artificial muscle at low-cost fabrication in future.

  The Japan Society of Mechanical Engineers, 17 May 2015, ロボティクス・メカトロニクス講演会講演概要集, 2015, "2A2 - R08(1)"-"2A2-R08(2)", Japanese


• スパッタ法を用いたLi₄Ti₅O₁₂薄膜の作製とその評価

  岡本一真, 黒川文弥, 肥田博隆, 神野伊策, 水畑穣

  2015, セラミックス基礎科学討論会講演要旨集, 53rd


• 22am2-E3 Reliability of metal-based PZT thin-film energy harvesters

  Tsujiura Yuichi, Kurokawa Fumiya, Suwa Eisaku, Hida Hirotaka, Kanno Isaku

  This paper describes the reliability of vibration energy harvesters of metal-based Pb(Zr,Ti)O_3 (PZT) thin films. Metal foil cantilevers have attracted attention to improve the lifetime of vibration energy harvesters because of their strong fracture strength. However, the long-term reliability of vibration energy harvesters has not been investigated intensively. In this study, we fabricated the PZT thin-film vibration energy harvesters based on metal foil cantilevers (length: 10 mm, width: 2.5 mm, thickness: 30 μm) and measured their output power for one thousand minutes. From the experimental results, we confirmed that the vibration energy harvester showed quite low degradation of approximately 0.31% by every decade on a logarithmic time scale at the acceleration of 1 m/s^2. On the other hand, we could not demonstrate the precise relationship between the output power and excitation acceleration because of the variation in measured data.

  The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "22am2 - E3-1"-"22am2-E3-2", Japanese


• 22am2-E1 Fabrication and evaluation of self-excited vibration energy harvesters of PZT thin films using air flow

  Suwa Eisaku, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku

  We fabricated self-excited vibration energy harvesters of Pb(Zr, Ti)O_3 (PZT) thin films using air flow. To generate a large self-excited vibration, we use 30-μm-thickness stainless steel (SS304) foils as base substrates of PZT thin films. The PZT thin films were deposited directly by rf-magnetron sputtering. To compensate the initial bending of PZT/SS304 substrates due to the thermal stress, we deposited the counter PZT thin films on the backside of SS304 substrates. When the angle of attack was 30°, the energy harvester generated the self-excited vibration above the wind speed of 8 m/s, and the output power reached 19 μW at the wind speed of 12 m/s.

  The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "22am2 - E1-1"-"22am2-E1-2", Japanese


• 20pm1-E3 Fabrication of millimeter-scale robot with piezoelectric thin film actuator on metal substrate

  Morita Yuki, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku

  We fabricated the millimeter-scale robot by metal-based PZT thin-film actuator. PZT thin films were directly deposited on 50-μm-thick Ti substrates by rf-magnetron sputtering. Piezoelectric actuators have simple structure and drive by low voltage. Therefore, in recent year, the robot using piezoelectric materials have been studied. However, piezoelectric actuators cannot generate a large displacement. In this study, we fabricated the millimeter-scale robot(7.5×2.5 cm^2) actuated using resonance since the largest displacement can be generated at the resonance. The movement of the robot depends on the angle between front and rear legs θ and the frequency f of the applied voltage. Under the condition of θ = 123° and f = 10.6 kHz, the robot moved forward at a speed of 6.74 cm/s. On the other hand, under the condition of θ = 123° and f = 5.4 kHz, the robot moved backward at a speed of 1.21 cm/s.

  The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - E3-1"-"20pm1-E3-2", Japanese


• 20pm1-F3 Reliability of PZT thin films for piezoelectric MEMS

  Kanno Isaku

  Piezoelectric thin films have attracted attention for MEMS applications. In addition to the deposition of the high-quality piezoelectric thin films, establishment of the measurement technique of the piezoelectric properties, including the evaluation of the reliability, is strongly demanded. In this presentation, we will discuss the characteristics of the proper and inverse piezoelectricity of the thin films, and related properties of the reliability.

  The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - F3-1"-"20pm1-F3-2", Japanese


• 21am2-A8 Transfer process of piezoelectric thin films onto PDMS substrate by using wet etching

  Hida Hirotaka, Yagami Shun, Suwa Eisaku, Kurokawa Fumiya, Tsujiura Yuichi, Kanno Isaku

  This paper reports a simple and high-productive fabrication method of flexible piezoelectric substrate. To realize low-cost fabrication method, we developed a novel transfer technique of piezoelectric thin films onto PDMS substrate based on metal wet etching process. We experimentally clarified that transferred Pb(Zr,Ti)O3 (PZT) thin films by using our developed method have piezoelectric property. This method might allow us to develop novel MEMS (micro-electro-mechanical systems) devices such as wearable sensors and flexible energy harvesters at low-cost fabrication.

  The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "21am2 - A8-1"-"21am2-A8-2", Japanese


• 20pm1-E2 Evaluation of transverse piezoelectric coefficient e_<31,f> of PZT thin films from direct/inverse piezoelectric effects

  Kawabe Saneyuki, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku

  We evaluated the transverse piezoelectric coefficient e_<31,f> of Pb(Zr,Ti)O_3 (PZT) thin films from direct and inverse piezoelectric effects using cantilever methods. The PZT/Si unimorph cantilevers (length: 17.8 mm, width: 2.0 mm, thickness: 628 μm) were fabricated by depositing the PZT thin films and the stripe-shaped Pt top electrodes on Pt/Ti/Si substrates by rf-magnetron sputtering. From the e_<31,f> measurement, we confirmed that e_<31,f> largely depended on frequency in both direct and inverse effects. In cases where evaluated from direct piezoelectric effect, e_<31,f> was independent of position and size of electrode and input displacement, and calculated to be -6 C/m^2 above 20 Hz. On the other hand, e_<31,f> evaluated from inverse piezoelectric effect increased with applied voltage, and calculated to be as high as -12 C/m^2 below 500 Hz.

  The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - E2-1"-"20pm1-E2-2", Japanese


• スパッタ法を用いたLi₄Ti₅O₁₂薄膜の作製とその評価

  岡本一真, 黒川文弥, 肥田博隆, 神野伊策, 水畑穣

  2014, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 61st


• ポリ尿素薄膜を用いた焦電・圧電特性および振動発電評価

  森本勝大, 辻浦裕一, 小柴康子, 三崎雅裕, 神野伊策, 石田謙司

  2014, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 75th


• 6AM2-A-8 PZT multilayer thin films actuator fabricated by sputtering

  Kishimoto Masaya, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku

  We fabricated multilayer ceramic actuator (MLCA) composed of piezoelectric layers with SrRuO_3 (SRO) internal electrodes by single sputtering deposition. We deposited approximately 500-nm-thick Pb(Zr,Ti)O_3 (PZT) layers on SiO_2/Si substrates through a movable shadow mask. The separated internal SRO electrodes are prepared by sliding the shadow mask and multilayered PZT thin films are deposited on a Si substrate with external electrodes on both sides of the PZT films. The PZT layers of MLCA have perovskite structure. The MLCA with five PZT layers have high-dielectric properties; a relative electric coefficient of approximately 1100 regardless of the number of PZT layers. The piezoelectric displacement of Si cantilever with MLCA increased with the number of PZT layers.

  The Japan Society of Mechanical Engineers, 04 Nov. 2013, マイクロ・ナノ工学シンポジウム, 2013(5) (5), 107 - 108, Japanese


• 5PM1-C-6 MicroChannel device for behavior analysis of plant-parasitic nematode : verification of channel standard and concentration distribution in channel

  Hida Hirotaka, Nishiyama Hidetaka, Sawa Shinichiro, Kanno Isaku, Higashiyama Tetsuya, Arata Hideyuki

  We present a novel method for chemotaxis assay of plant-parasitic nematode, Meloidogyne incognita by using a PDMS (polydimethylsiloxane) microchannel device. For allowing the nematodes to swim in a simple microchannel, we also developed a protocol by loading an agarose gel into microchannel with power-free pumping method. A 5-μm-wide microchannel array, which is narrower than the body width of the nematodes, can efficiently confine the nematodes in analyzed area. We numerically evaluated the chemical concentration distribution in developed microchannel and successfully related the time-dependent chemical condition to the behavior of nematodes.

  一般社団法人日本機械学会, 04 Nov. 2013, マイクロ・ナノ工学シンポジウム, 2013(5) (5), 35 - 36, Japanese


• J212011 Compositional dependence of PMN-PT thin films prepared by combinatorial sputtering

  KUROKAWA F, TSUJIURA Y, TOMIOKA K, HIDA H, KANNO I

  In this study, we deposited Pb(Mg_<1/3>Nb_<2/3>)03-PbTi03 (PMN-PT) thin films on PbTiO_3/Pt/Ti/Si substrates by combinatorial sputtering to optimize the composition ratio of PMN-PT thin films. Compositional gradient PMN-PT thin films were deposited by multi target co-sputtering, namely combinatorial sputtering, and pyrocholre-free PMN-PT thin films with rondom orientation were prepared on PbTiO_3/Pt/Ti/Si substrates. PT compositional ratio is ranging from 0.25 to 0.57, which coverd MPB composition of bulk PMN-PT ceramics (PT = 0.33). We confirmed that relative dielectric constants increase with decreasing PT ratio in PMN-PT films. On the other hand, the PMN-PT thin films showed the maximum piezoelectric coefficients|e_<31,f>| = 7〜8 C/m^2 around PMN-0.45PT, which is shifted from MPB composition of PMN-PT bulk ceramics.

  The Japan Society of Mechanical Engineers, 08 Sep. 2013, Mechanical Engineering Congress, Japan, 2013, "J212011 - 1"-"J212011-4", Japanese


• J161013 Piezoelectric thin-film MEMS energy harvesters of stainless steel cantilevers

  TSUJIURA Yuichi, SUWA Eisaku, KUROKAWA Fumiya, HIDA Hirotaka, KANNO Isaku

  We developed piezoelectric thin-film MEMS energy harvesters using stainless steel (SUS430) cantilevers to improve fracture toughness as well as to lower the resonant frequency. The large fracture toughness of SUS430 cantilevers overcomes the breakdown of the cantilevers and ensures the long lifetime of the energy harvesters. To simplify the fabrication process, the piezoelectric Pb(Zr,Ti)O_3 (PZT) thin film was directly deposited on the microfabricated SUS430 cantilevers with a 30-μm-thick beam and a tip mass by rf-magnetron sputtering. The X-ray diffraction (XRD) measurement revealed that the PZT thin film has perovskite structure with random orientations. The relative dielectric constant ε_r and the transverse piezoelectric coefficient е_<31,f> were respectively evaluated to be 325 and -4.0 C/m^2, which indicates the figure of merit (FOM) of 0.049. From the evaluation of power generation performance for the PZT thin-film energy harvester (beam length: 5.5 mm, width: 5.0 mm, mass length: 2.0 mm), its maximum output power was 6.8 μW (power density: 1.7 μW/mm^3) under conditions of 367 Hz and 10 m/s^2.

  The Japan Society of Mechanical Engineers, 08 Sep. 2013, Mechanical Engineering Congress, Japan, 2013, "J161013 - 1"-"J161013-5", Japanese


• E-2-2 Study on high efficiency piezoelectric vibration energy harvester of epitaxial PZT thin films

  SUWA Eisaku, TSUJIURA Yuichi, KANNO Isaku

  We fabricated piezoelectric energy harvesters composed of c-axis oriented Pb(Zr,Ti)O_3 (PZT) thin films transferred onto stainless steel substrates.In order to improve resonance frequency,we designed a cantilever with a tip mass.PZT thin firms were epitaxially grown on MgO substrates using rf-magnetoron sputtering and transferred onto stainless steel substrate by eximer laser liftoff.Transferred PZT thin firms had a low dielectric constant (ε_r=340) and high piezoelectric coefficient(e_<31.1>=-4.76 C/m^2).The energy harvester had a resonance frequency of 143.2 Hz.At the optimal load resistance of 90 kΩ and resonance frequency of 143.2 Hz, theenergy harvester generated output power of 2.02μW at an acceleration of 1m/s^2 and 49μW at acceleration of 7.5 m/s^2.

  The Japan Society of Mechanical Engineers, 20 Mar. 2013, Conference on Information, Intelligence and Precision Equipment : IIP, 2013, 46 - 49, Japanese


• E-2-1 Development of MEMS gyrosensors using PZT thin films on metal cantilevers

  FUJIWARA Kosuke, Kanno Isaku

  We developed piezoelectric MEMS gyrosensors composed of PZT thin films. The PZT thin films were directly deposited on the microfabricated metal cantilevers by RF sputtering method.To evaluate basic performance of the gyrosensor,we measured resonance frequency of horizontal and vertical directions.We clearly observed horizontal and vertical resonances at 48.46kHz and 28.77 kHz respectively.Then we calculated the sensitivity analytically.

  The Japan Society of Mechanical Engineers, 20 Mar. 2013, Conference on Information, Intelligence and Precision Equipment : IIP, 2013, 43 - 45, Japanese


• E-1-4 Microfabrication of lead-free(K,Na)NbO_3 piezoelectric thin film

  Kurokawa Fumiya, Yokokawa Ryuji, Kotera Hidetoshi, Sato Masashi, Shibata Kenji, Kanno Isaku

  In this study,we developed microfabrication process of lead-free sodium potassium niobate [(K,Na)NbO_3,KNN]thin films by dry etching.We deposited KNN thin films on Si substrate and evaluated its etching characteristics.We found that Ar/C_4F_8 plasma dry etching was effective for high etching rate 63 nm/min of KNN as well as excellent selectivity of KNN and Cr metal mask 5.7.We conducted fabrication of Pt/KNN/Pt unimorph microcantilevers through KNN etching process.We could fabricate micro-cantilevers without initial deflection and they show high piezoelectric coefficients d_31=110 pm/V.These results suggest that Ar/C_4F_8 plasma dry etching enable to apply for various lead-free piezoelectric MEMS fabrication processes.

  The Japan Society of Mechanical Engineers, 20 Mar. 2013, Conference on Information, Intelligence and Precision Equipment : IIP, 2013, 40 - 42, Japanese


• Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS: Second Edition

  Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera

  Elsevier Inc., 20 Nov. 2012, Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS: Second Edition, 1 - 644, English

  Others


• OS4-1-1 Piezoelectric energy harvesters of PZT films deposited on stainless steel

  Tsujiura Yuichi, Adachi Kazuhiko, Kanno Isaku

  We fabricated piezoelectric MEMS energy harvesters of PZT thin films on the microfabricated stainless steel cantilevers. The 2.5-μm-thick PZT thin films were directly deposited by RF-magnetron sputtering. Direct deposition of PZT thin films can reduces the complexity of the fabrication process of the piezoelectric MEMS energy harvesters. Furthermore, because of strong fracture toughness of stainless steel, the thickness of the cantilevers could be as thin as 30 μm. We confirmed strong diffraction peaks corresponding to pervskite PZT without a pyrochlore phase by XRD, which indicates that the polycrystalline PZT films with pervskite structures were grown on stainless steel cantilevers. We evaluated the power generation performance of the unimorph cantilever (7.5 mm-long, 5.0 mm-wide) with the tip mass of 2.5×10^<-5> kg. The averaged output power reached 6.0 μW at 10 m/s^2 and a low resonant frequency of 367 Hz.

  The Japan Society of Mechanical Engineers, 21 Oct. 2012, マイクロ・ナノ工学シンポジウム, 2012(4) (4), 91 - 92, Japanese


• P-OS4-2 Fabrication and characterization of lead-free piezoelectric thin films

  Ratanapreechachai P., Kanno I.

  We fabricated composition gradient sodium potassium niobate [(K,Na)NbO_3, KNN] thin films on (111)Pt/Ti/SiO_2/Si by multi-target RF magnetron sputtering to optimize KNN film composition by combinatorial method. We successfully obtained c-axis oriented KNN thin films with perovskite structure on 6-inch Si wafers. The KNN film composition was measured by energy dispersive x-ray spectroscopy (EDX) and we confirmed composition gradient of K/(K+Na) ratio of the KNN thin film on Si wafer along with the line between KNbO_3 and NaNbO_3 targets. This result indicates that the combinatorial sputtering is useful for precise optimization of the deposition condition and film composition of the lead-free KNN thin films.

  The Japan Society of Mechanical Engineers, 21 Oct. 2012, マイクロ・ナノ工学シンポジウム, 2012(4) (4), 273 - 274, English


• OS7-3-6 Piezoelectric properties of PMN-PT thin films prepared by RF magnetron sputtering

  Tomioka Kohei, Yokokawa Ryuji, Kotera Hidetoshi, Kanno Isaku

  We evaluated compositional dependence of piezoelectric and dielectric properties of Pb(Mg_<1/3>Nb_<2/3>)_<1-x>Ti_x(O_3(PMN-PT) films by using combinatorial sputtering method. Compositional gradient PMN-PT films were deposited on Pt/Ti/Si substrates by using multi-target sputtering. Piezoelectric and dielectric properties of PMN-PT films were evaluated as a function of composition x in Pb(Mg_<1/3>Nb_<2/3>)_<1-x>Ti_xO_3. Relative dielectric constant and remnant polarization (P_r) increased with decreasing PT ratio.

  The Japan Society of Mechanical Engineers, 21 Oct. 2012, マイクロ・ナノ工学シンポジウム, 2012(4) (4), 63 - 64, Japanese


• Integrated Microfluidic Device for Molecular Transport by Kinesin-Microtubule System

  Tsubasa Ikeuchi, Isaku Kanno, Ryuji Yokokawa, Hidetoshi Kotera

  27 Dec. 2011, International Workshop on Micro/Nano engineering, English

  [Refereed]


• Fabrication of Multi-scale Channels Applicable to Bio-assays

  Gaku Isobe, Isaku Kanno, Ryuji Yokokawa, Hidetoshi Kotera

  27 Dec. 2011, International Workshop on Micro/Nano engineering, English

  [Refereed]


• Multilayer Thin-Film Ceramics Fabricated by RF Magnetron Sputtering

  Yuji Imamiya, Isaku Kanno, Ryuji Yokokawa, Hidetoshi Kotera

  27 Dec. 2011, International Workshop on Micro/Nano engineering, English

  [Refereed]


• 3-7 Characterization of vibration energy harvesters composed of piezoelectric thin films

  Kanno Isaku, Kotera Hidetoshi, Shibata Kenji, Mishima Tomoyoshi

  We fabricated piezoelectric vibration energy harvesters composed of PZT and lead-free KNN thin films on Si cantilevers and characterized the output voltage and power of those piezoelectric films. Both of the PZT and KNN films were deposited on Pt-coated Si substrates by rf-magnetron sputtering. The harvesters had a simple unimorph cantilever structure with the almost same dimensions, and the characteristics of power generation were examined. When we applied the acceleration of 10m/s^2 on the PZT and KNN energy harvesters, they generated the output power of 1.11 and 1.01μW at the resonant frequency under 10m/s^2, indicating lead-free KNN films are comparable to PZT films for the performance for power generation.

  The Japan Society of Mechanical Engineers, 25 Sep. 2011, マイクロ・ナノ工学シンポジウム, 2011(3) (3), 35 - 36, Japanese


• MP-50 Piezoelectric MEMS Scanner Mirrors Using PZT Thin Films on Titanium Substrates

  Matsushita Shuhei, Kanno Isaku, Yokokawa Ryuji, Kotera Hidetoshi

  We have developed Ti-based piezoelectric MEMS scanner mirrors driven by PZT thin films. The 2μm-thick PZT thin films were directly deposited on 50μm-thick Ti substrates by RF-magnetron sputtering. The Ti substrates were preliminary microfabricated into the shape of the horizontal scanner by wet etching, therefore we could fabricate piezoelectric microactuators without photolithographic process. We could confirm strong diffraction peaks corresponding to perovskite PZT without a pyrochlore phase by XRD, which indicates that the polycrystalline PZT films with perovskite structures were grown on Ti substrates. We achieved a mechanical tilt angle of 10.0° at resonant frequency of 23.7kHz by driving voltage of 10V_. These horizontal scanning properties would be applicable for the laser displays.

  The Japan Society of Mechanical Engineers, 25 Sep. 2011, マイクロ・ナノ工学シンポジウム, 2011(3) (3), 167 - 168, Japanese


• MP-14 Microfabricate lead-free KNN piezoelectric thin films

  Kurokawa Fumiya, Kanno Isaku, Yokokawa Ryuji, Kotera Hidetoshi, Horikiri Fumimasa, Shibata Kenji, Mishima Tomoyoshi

  We conducted inductively coupled plasma reactive ion etching (ICP-RIE) for sodium-potassium niobate (KNN) thin films by Ar/ C_4F_8 mixture gas in order to develop lead-free piezoelectric MEMS devices. We prepared Cr metal masks on KNN thin films deposited on Si substrate. The etching rate of the KNN films was about 63nm/min, which is about third times faster than Ar dry etching. The ferroelectric properties of KNN thin films were not changed by etching process. This result suggests that the lead-free piezoelectric MEMS devices can be fabricated by dry etching of KNN thin films without damage to the KNN films.

  The Japan Society of Mechanical Engineers, 25 Sep. 2011, マイクロ・ナノ工学シンポジウム, 2011(3) (3), 95 - 96, Japanese


• J161041 Etching characteristics of (K,Na)Nb03 piezoelectric films

  HOIKIRI Fumimasa, SHIBATA Kenji, SUENAGA Kazufumi, WATANABE Kazutoshi, NOMOTO Akira, MISHIMA Tomoyoshi, KANNO Isaku

  It was investigated that the etching characteristics of lead-free (K,Na)Nb03 (KNN) thin films by the ICP-RIE (Inductive Coupled Plasma ・Reactive Ion Etching) with Ar-C4F8 mixture for the reactive gas. The Ar-C4F8 mixing ratio fixed 10:1, and the chamber pressure was 0.5Pa during the etching. The KNN etching depth has linear relationship as the function of the etching time. The etching rate increased with increasing the antenna power and the bias power. The antenna and the bias dependence of the etching rate show good linearity. These linear relationships indicate the good controllability of the etching. The KNN/Pt selectivity increased with increasing antenna power and decreasing bias power. Thus, the high KNN etching rate was obtained at high antenna power and high bias power condition. The high KNN/Pt selectivity was obtained at high antenna power and low bias power condition. The maximum KNN etching rate and KNN/Pt selectivity were 371.6nm/min. and 85.8, respectively. These results are comparable to that of the conventional piezoelectric PZT films.

  The Japan Society of Mechanical Engineers, 11 Sep. 2011, Mechanical Engineering Congress, Japan, 2011, "J161041 - 1"-"J161041-3", Japanese


• Parallel Microtuble Array with Defined Polarity by Nanotracks and Selective Microtuble Immobilization

  R. Yokokawa, M. Kitamura, M. Yokokawa, I. Kanno, H. Kotera

  25 Apr. 2011, 2011 MRS Spring Meeting and Exhibit, pp. AA5.1, San Francisco, USA,, English

  [Refereed]


• Experimental and Numerical Analysis of Polar Oriented Microtubule Array in Nanotracks

  R. Yokokawa, M. Kitamura, M. Yokokawa, I. Kanno, H. Kotera

  15 Apr. 2011, 8th Annual Conference on Foundations of Nanoscience (FNANO11), pp. 44-45, Snowbird, USA, English

  [Refereed]


• D-2-1 Fabrication of Sub-micrometer Channels for Bio-assay Perfusion Device by Integrating Nanoimprint Lithography and UV Lithography

  Isobe Gaku, Yokokawa Ryuji, Kanno Isaku, Kotera Hidetoshi

  Recently, micro/nano fabrication techniques are applied to bio-assay for detailed biochemical analysis. For example, studies about single molecule enzymology by femtoliter PDMS chambers and real-time imaging of single molecule fluorescence in quartz nano wells are reported. But, these conventional devices for nano-bio assays have difficulties in perfusing solutions in nano structures, so we developed a simple fabrication process of sub-microchannel and microchannel by integrating nanoimprint lithography and UV lithography. The fabricated device consists of sub-microchannel array and two microchannels. These microchannels are used as inlet or outlet of sub-microchannel to deliver solutions. We achieved water injection and solution exchange in 2-μm channels. Water injection pressure was 100 kPa for 1-μm channels and 120 kPa for 2-μm channnels.

  The Japan Society of Mechanical Engineers, 18 Mar. 2011, Conference on Information, Intelligence and Precision Equipment : IIP, 2011, 28 - 29, Japanese


• D-1-4 Piezoelectric MEMS Scanner Mirrors Composed of PZT Thin Films on Metal-based Substrates

  MATSUSHITA Shuhei, KANNO Isaku, YOKOKAWA Ryuji, Kotera Hidetoshi

  In this study, we have developed metal-based MEMS scanner mirrors driven by PZT piezoelectric thin films not only to simplify fabrication process but also to improve fracture toughness of the micro-actuators. The 2 μm-thick PZT thin films were directly deposited on preliminarily microfabricated metal-based substrates of titanium or stainless steel by RF-magnetron sputtering. We could achieve a large mechanical angle tilt of 6.21° at high resonant frequency of 35.02 kHz by low application voltage of 10V_. Use of microfabricated metal-based substrates for the PZT deposition enables simpler process and stronger toughness of scanner mirrors compared with the conventional Si-based ones.

  The Japan Society of Mechanical Engineers, 18 Mar. 2011, Conference on Information, Intelligence and Precision Equipment : IIP, 2011, 20 - 25, Japanese


• SELECTIVE KINESIN AND DYNEIN IMMOBILIZATON AND ELECTRICAL MICROTUBULE MANIPULATION FOR BIDIRECTIONAL MICROTUBULE MOTILITY

  Hiroki Kotake, Ryuji Yokokawa, Isaku Kanno, Hidetoshi Kotera

  2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 24th Vol.2, 1373 - 1376, English


• PIEZOELECTRIC MEMS DEFORMABLE MIRRORS WITH HIGH-DENSITY ACTUATOR ARRAY

  M. Sato, I. Kanno, H. Kotera, O. Tabata

  2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 24th Vol.2, 1265 - 1268, English


• Multilayer Thin-Film Capacitors Fabricated by Radio-Frequency Magnetron Sputtering

  Yuji Imamiya, Ryuji Yokokawa, Isaku Kanno, Hidetoshi Kotera

  2011, 2011 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF/PFM) AND 2011 INTERNATIONAL SYMPOSIUM ON PIEZORESPONSE FORCE MICROSCOPY AND NANOSCALE PHENOMENA IN POLAR MATERIALS, English


• Development of Miniaturized Piezoelectric Energy Harvesters

  Junya Ogawa, Norihiro Yamauchi, Koji Goto, Tomoaki Matsushima, Koichi Aizawa, Isaku Kanno, Hidetoshi Kotera

  2011, IDW'11: PROCEEDINGS OF THE 18TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3, 2, 1227 - 1230, English


• Shear piezoelectric coefficient d(15) of c-axis oriented epitaxial Pb(Zr,Ti)O-3 films

  Isaku Kanno, Kenji Akama, Ryuji Yokokawa, Hidetoshi Kotera

  2011, 2011 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF/PFM) AND 2011 INTERNATIONAL SYMPOSIUM ON PIEZORESPONSE FORCE MICROSCOPY AND NANOSCALE PHENOMENA IN POLAR MATERIALS, English

  [Refereed]


• NUMBER OF KINESIN MOLECULES INVOLVED IN A BEAD TRANSPORT MEASURED BY MICROFLUIDICS AND MECHANICAL MODELING

  R. Yokokawa, Y. Sakai, A. Okonogi, I. Kanno, H. Kotera

  2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1365 - 1368, English


• REAL-TIME MONITORING OF CA(2+) CONCENTRATION IN PANCREATIC BETA CELLS BY A MICROFLUIDIC DEVICE INTEGRATED WITH TOTAL INTERNAL REFLECTION (TIR)-BASED CHIP

  Yuko Kitazawa, Ryuji Yokokawa, Kyohei Terao, Atsuhito Okonogi, Dzung Viet Dao, Susumu Sugiyama, Isaku Kanno, Hidetoshi Kotera

  2011, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 956 - 959, English

  [Refereed]


• Force measurement and modeling for motor proteins between microsphere and microfluidic channel surface

  Ryuji Yokokawa, Ryuji Yokokawa, Yusuke Sakai, Atsuhito Okonogi, Isaku Kanno, Hidetoshi Kotera

  01 Dec. 2010, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, 1, 372 - 374


• MNM-5B-1 Piezoelectric energy harvesters of PZT films deposited on Ti cantilevers

  Sagawa Koji, Kanno Isaku, Kotera Hidetoshi

  We fabricated piezoelectric energy harvesters of PZT thin films on Ti cantilevers. The PZT films were directly deposited on Pt-coated Ti substrates using rf-magnetron sputtering. Although the harvester had a simple cantilever structure without seismic mass, the resonant frequency was as low as 272 Hz because of its thin Ti thickness of 50 μm. Output power had a peak at optimal load resistance of 19 kΩ. When we applied the acceleration of 50 m/s^2 on the harvester, it could generate electric power of 15.7 μW at the resonant frequency without serious damage to PZT/Ti harvesters.

  The Japan Society of Mechanical Engineers, 12 Oct. 2010, マイクロ・ナノ工学シンポジウム, 2010(2) (2), 207 - 208, Japanese


• MNM-3B-3 Development of piezoelectric MEMS deformable mirror with high-density actuator array

  SATO Masashi, KANNO Isaku, KOTERA Hidetoshi

  This paper reports on a piezoelectric micro-electro-mechanical systems (MEMS) deformable mirrors with high-density actuator array for low-voltage and high-resolution retinal imaging with adaptive optics. The deformable mirror was composed of unimorh structure of piezoelectric zirconate titanate (PZT) thin film deposited on Pt-coated silicon on insulator (SOI) substrate and a diaphragm of 10 mm in diameter formed by backside-etching the Si handle wafer. 61 hexagonal electrodes were laid out on the PZT thin film for the high-density actuator array. In order to reduce the dead space for the lead lines between the electrodes and connecting pads, a polyimide layer with through holes on the electrodes was patterned as an electrical insulator. To confirm the application feasibility of the fabricated DMs, the displacement profile of the actuators were measured by a laser Doppler vibrometer. Independent applications of voltages on individual actuators were confirmed.

  The Japan Society of Mechanical Engineers, 12 Oct. 2010, マイクロ・ナノ工学シンポジウム, 2010(2) (2), 161 - 162, Japanese


• MNM-1A-2 Statistical Estimation for Structures of Protein Monolayer by Specular and Off-Specular X-ray Reflectivity Measurement

  Gohda K., Yokokawa R., Kuwajima S., Kanno I., Iwata H., Kotera H.

  The purpose of this study is to investigate conformations of antibodies immobilized on three kinds of solid surfaces modified with APTES, AEAPTES or GA and their antigen-binding affinities. In the recent developments in biosensors, although the geometric structure of antibodies determines their sensitivity, few studies have focused on their conformations and its effect on their antigen-binding capacity due to a lack of applicable analysis techniques. In this work, specular and off-specular X-ray reflectivity measurement were employed, which enables us to analyze vertical and lateral multilayer structure. The results showed that the antigen-binding affinity on GA was highest among antibodies immobilized on three modified surfaces, although their conformations were almost the same as 'flat-on' analyzed by specular X-ray reflectivity. In contrast, lateral layer structure analysis by off-specular reflection revealed that protein layer on GA before antigen-binding had a relatively-long lateral correlation length and a low fractal dimension which would cause the reduction of steric hindrance for antigens' access to binding sites of antibodies.

  The Japan Society of Mechanical Engineers, 12 Oct. 2010, マイクロ・ナノ工学シンポジウム, 2010(2) (2), 17 - 18, Japanese


• T1601-1-4 Fabrication of piezoelectric cantilever-shaped actuators with lead-free KNbO_3-NaNbO_3 thin films

  WAKASA Yu, YOKOKAWA Ryuji, KANNO Isaku, KOTERA Hidetoshi, SHIBATA Kenji

  We propose a new micro-fabrication process of piezoelectric MEMS actuators composed of lead-free KNbO_3-NaNbO_3 (KNN) thin films. The micro-cantilevers were fabricated on silicon on insulator(SOI) substrates, and successively the KNN thin films were directly deposited on them by rf-sputtering. Thus, piezoelectric unimorph micro-cantilevers of lead-free KNN films could be prepared without microfabrication of the KNN films. The dielectric properties of KNN thin films on micro-cantilevers were as good as those on the substrate. When we applied voltage of 20V, we could obtain relatively large tip displacement of up to 5.8μm and the average piezoelectric constant d_<31> was calculated to be -47.4pm/V. This fabrication process is useful for various applications of MEMS devices with new functional materials such as lead-free piezoelectric KNN films.

  一般社団法人日本機械学会, 04 Sep. 2010, 年次大会講演論文集 : JSME annual meeting, 2010(8) (8), 193 - 194, Japanese


• Heterotypic cell positioning using electroosmotic flow and observation of cell-cell interactions in open-access flow chamber

  KITAZAWA Yuko, TERAO Kyohei, YOKOKAWA Ryuji, OKONOGI Atsuhito, KANNO Isaku, KOTERA Hidetoshi

  18 Jun. 2010, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2010(7) (7), 27 - 32, Japanese


• Directional control of gliding microtubules by selectively patterned motor proteins

  KOTAKE Hiroki, YOKOKAWA Ryuji, KANNO Isaku, KOTERA Hidetoshi

  18 Jun. 2010, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2010(7) (7), 57 - 61, Japanese


• B-4 Fabrication of optical communication device with piezoelectric micro mirror array

  WAKASA Yu, KANNO Isaku, KOTERA Hidetoshi

  We studied a new fabrication process for a micro mirror array device with piezoelectric unimorph actuators and simulated its actuation. In this fabrication process, piezoelectric thin film (PZT ; Pb(Zr,Ti)O_3) is deposited on SOI substrate by sputtering after actuator parts are released by BHF wet etching. Therefore, patterning or etching piezoelectric layer is not necessary, which means that proposed fabrication process can apply to various piezoelectric devices. Furthermore, we confirmed the actuation of proposed micro mirrors by FEM simulation.

  一般社団法人日本機械学会, 16 Mar. 2010, Conference on Information, Intelligence and Precision Equipment : IIP, 2010(0) (0), 73 - 74, Japanese


• High Performance 4 GHz FBAR Prepared by Pb(Mn,Nb)O-3-Pb(Zr,Ti)O-3 Sputtered Thin Films

  T. Matsushima, N. Yamauchi, T. Shirai, T. Yoshihara, Y. Hayasaki, T. Ueda, I. Kanno, K. Wasa, H. Kotera

  2010, 2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, 248 - 251, English


• Ternary Perovskite Thin Films For Energy Harvesting MEMS

  Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera

  2010, 2010 IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS (ISAF), English


• Structure and ferroelectric properties of sputtered Pb(Mn, Nb)O 3-PZT thin films

  K. Wasa, K. Kawano, H. Adachi, T. Matsushima, K. Nishida, T. Yamamoto, I. Kanno, H. Kotera

  2010, Proceedings - IEEE Ultrasonics Symposium, 2010 Vol.1, 80 - 85, English


• Development of Hybrid Bio-Device with Self-Organized Huvec Vessels and Artificial Micro-Channels,

  D. Hiramaru, H. Senzai, A. Okonogi, K. Terao, T. Miura, T. Suzuki, I. Kanno, H. Kotera

  2010, The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, pp. 154A-B, Perth, Australia, 8th July,, English

  [Refereed]


• Surface Modification of Polystyrene by Peo/Ppo Block Copolymer Pluronic to Prevent Blood Adhesion,

  Y. Noda, T. Suzuki, A. Okonogi, I. Kanno, H. Kotera

  2010, The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, pp. 128, Perth, Australia, 7th July,, English

  [Refereed]


• High Efficiency Energy Harvester of Transferred Epitaxial PZT Films on Stainless Steel Sheets

  I. Kanno, K. Morimoto, R. Yokokawa, K. Wasa, H. Kotera, N. Yamauchi, J. Ogawa, T. Matsushima, K. Aizawa

  2010, MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 152 - 155, English


• M5-3 Fabrication of PZT thin-film actuator by surface-machining process (M5 Actuator and Physical Sensor)

  Wakasa Yu, Kanno Isaku, Kotera Hidetoshi

  Micro-cantilevers with piezoelectric lead zirconate titanate (PZT) thin film have been widely investigated for various MEMS applications. However, most of them are fabricated by bulk micromachine techniques in silicon on insulator substrate. On the other hand, if micro-cantilevers could be fabricated by surface micromachine techniques, it is advantageous to arrange them in the high density array. In this study, we suggested a new simple process for fabricating PZT unimorph cantilevers by surface micromachining process. Through this process, we fabricated micro actuators with PZT thin films deposited using rf magnetron sputtering. Dielectric loss of PZT thin films are 0.02-0.06, and piezoelectric constant d_<31> calculated from measured displacement of cantilevers was -72.6 pm/V The proposed piezoelectric actuator fabrication process can be applied to various MEMS devices.

  一般社団法人日本機械学会, 15 Oct. 2009, マイクロ・ナノ工学シンポジウム, 2009(1) (1), 87 - 88, Japanese


• T1601-1-3 Development of piezoelectric MEMS deformable mirrors and their application for adaptive optics

  KANNO Isaku, Tsuda Shogo, KOTERA Hidetoshi

  Piezoelectric MEMS deformable mirrors have been developed for high resolution retina imaging using adaptive optics. For the low voltage drive, piezoelectric PZT thin films-were used to actuate the mirror surface. In this study, we fabricated hexagonal 61-element actuator array to enhance the performance of image correction. In order to reduce the dead space for the lead lines between the actuators, the polyimide insulating layer was coated on the surface of the PZT actuators and lead lines were prepared with the connection to each element. The displacement of each actuator was measured by using a lasor Doppler vibrometer and we confirmed a relatively large displacement of more than 1μm by applying a voltage of lOVpp. Furthermore, we measured the relationship input voltage and displacement and fabricated DMs actuated linearly when applied -20〜20Vpp.

  一般社団法人日本機械学会, 12 Sep. 2009, 年次大会講演論文集 : JSME annual meeting, 2009(8) (8), 237 - 238, Japanese


• T1601-2-1 Development of piezoelectric MEMS deformable mirrors and their application for adaptive optics

  HIRAMARU Daisuke, SENZAI Hiroyuki, OKONOGI Atsuhito, TERO Kyohei, MIURA Takashi, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  We propose a novel concept that self-organized vasculature integrates artificial orifices on a microfluidic device using inducible protein VEGF (Vascular Endothelial Growth Factor) for fluid induction into vasculature. Micro gel beads containing VEGF immobilized on orifices, it is able to induce angiogenesis to orifices on embedded channels. Endothelial cells (HUVEC) characteristically organize vasculature by themselves in collagen gel and grow along the VEGF concentration gradient. HUVEC were cultured on the device for a day in collagen gel and vasculature was forming on orifices by self-organized. And angiogenetic effect was evaluated quantitatively.

  一般社団法人日本機械学会, 12 Sep. 2009, 年次大会講演論文集 : JSME annual meeting, 2009(8) (8), 245 - 246, Japanese


• MCH-01 DEVELOPMENT OF A NOVEL METHOD FOR STRETCHING DNA FIBERS ON MICROBRIDGES FABRICATED BY SINGLE-MASK INCLINED UV LITHOGRAPHY(Micro/Nanomechatronics I,Technical Program of Oral Presentations)

  HIRAMARU Daisuke, SUZUKI Takaaki, FUKE Ariko, SUZUKI Hiroyuki, KANNO Isaku, KOTERA Hidetoshi

  In this paper, we proposed the novel method for manipulating DNA fibers on microbridges fabricated by the single mask UV lithography process. Chromosomes were stretched and immobilized on microbridges by the centrifugal force, and the chromosomes could be individually accessible platforms for DNA fiber applications. It was confirmed the validity of the proposed method by applying suspended chromosomes to the FISH analysis.

  The Japan Society of Mechanical Engineers, 17 Jun. 2009, Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE, 2009, 325 - 326, English


• P-MCH-04 Piezoelectric micropumping system using PZT thin films(Micro/Nanomechatronics,Technical Program of Poster Session)

  Kanno Isaku, Ogawa Junya, Kotera Hidetoshi

  In this paper, we propose innovative valveless pumping devices for microfluidic systems. The liquid in the microchannel was transported by generating a traveling wave on the channel wall, which was composed of a piezoelectric Pb(Zr,Ti)O_3 (PZT) thin film actuator array. The PZT thin films were deposited on the silicon-on-insulator (SOI) substrates where microchannels, 200 and 500μm wide, were fabricated. The maximum displacements of the 200 and 500μm wide filled channels at 10 V_ were about 61 and 219 nm, respectively. By generating a traveling wave on the channel wall, clear liquid flow could be induced with a mean flow velocity of about 118 and 172μm/s for the 200 and 500μm wide channels, respectively.

  The Japan Society of Mechanical Engineers, 17 Jun. 2009, Proceedings of ... JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment : IIP/ISPS joint MIPE, 2009, 387 - 388, English


• Streching method for DNA fibers using multi ringed microbridges

  Takaaki Suzuki, Daisuke Hiramaru, Ariko Fuke, Isaku Kanno, Hidetoshi Kotera

  01 Jan. 2009, Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 1073 - 1075


• Three dimentional multi-layered flow generator

  Takaaki Suzuki, Yoshinori Hagio, Daisuke Hiramaru, Kyohei Terao, Atsuhito Okonogi, Isaku Kanno, Hidetoshi Kotera

  01 Jan. 2009, Proceedings of Conference, MicroTAS 2009 - The 13th International Conference on Miniaturized Systems for Chemistry and Life Sciences, 52 - 54


• Microstructure and Piezoelectric Properties of PZT-based Ternary Perovskite Pb(Mn,Nb)O-3-PZT Thin Films

  K. Wasa, N. Yamauchi, T. Shirai, T. Ueda, T. Matsushima, K. Nishida, T. Yamamoto, I. Kanno, H. Kotera

  2009, ISAF: 2009 18TH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, 189 - +, English


• Single-Mask Multidirectional Photolithography with Multiple Resist Coat for Multi-Layered Microfluidic Networks,

  T. Suzuki, Y. Hirabayashi, K. Terao, I. Kanno, M. Washizu, H. Kotera

  2009, 2009 International Conference on Microtechnologies in Medicine and Biology [MMB2009], pp. 52-53, Quebec, CANADA, Apr, 01-03,, English

  [Refereed]


• 多成分PZT系薄膜の作製と圧電特性

  KANNO ISAKU

  日本工業出版, 2009, 超音波テクノ, Vol.21.(No.5.) (No.5.), pp39 - 43, Japanese

  [Invited]

  Introduction commerce magazine


• 318 Micromixer Utilizing Mass Distributed Structure

  KANDA Kensuke, Noda Yuichiro, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  A novel concept of a liquid transport technique utilizing frequency modulation and local resonance oscillation is proposed and it is applied to a micromixer. Meta-structure distributing local masses for generating local resonant oscillation is developed. Vibration of the meta-structure with sweeping frequency produces changes in the positions with large oscillation amplitude. This complex structural oscillation makes eddy-like disturbance of flow in a microchamber, and it produces high mixing efficiency. Using this technique produced a mixing index of 0.92 with the volumetric flowrate of 1 μL/min, while it was 0.49 for a conventional technique employing a vibration at a fixed frequency.

  一般社団法人日本機械学会, 02 Aug. 2008, 年次大会講演論文集 : JSME annual meeting, 2008(8) (8), 35 - 36, Japanese


• 319 Fluid introduction into vasculature using MEMS device

  SENZAI Hiroyuki, HIRAMARU Daisuke, MIURA Takashi, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Recently, studies of positional relationships of cells are seemed to be very important for cell biology. We proposed a novel concept that self-organized vasculatum integrates artificial orifices on a device by VEGF (Vascular Endothelial Growth Factor), and a method of uniformly plating HUVEC (Human Umbilical Vein Endothelial Cells) for efficient vasculature integration. Sucking and clamping of Alginate Calcium gel beads containing VEGF, it is able to induce angiogenesis to orifices on embedded channels. Endothelial cells characteristically organize vasculature by themselves in collagen gel and grow along the VEGF concentration gradient. HUVEC were cultured on device for about 7 days in the collagen gel and artificial vasculature mere immobilized on orifices by self-organized. And viscosity control of the suspension mixed with HUVEC, collagen gel and medium at low temperature made HUVEC uniformly-plated.

  一般社団法人日本機械学会, 02 Aug. 2008, 年次大会講演論文集 : JSME annual meeting, 2008(8) (8), 37 - 38, Japanese


• 質量分布型マイクロミキサー

  神田健介, 野田雄一郎, 鈴木孝明, 神野伊策, 小寺秀俊

  02 Aug. 2008, 日本機械学会年次大会講演論文集, 2008(Vol.8) (Vol.8), 35 - 36, Japanese


• 2106 Development of Liquid Pumping Devices by Vibration of Channel Wall Composed of Piezoelectric Thin Film

  OGAWA Junya, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  In this paper, we propose innovative liquid pumping devices for μTAS. In this system, microchannels were fabricated in silicon substrates of silicon on insulator(SOI). The vibrating wall was composed of piezoelectric PZT thin films deposited on the Si device layer of the microchannel. The active microchannel can transport liquid by traveling wave induced on the surface of the piezoelectric vibrating channel by applying sinusoidal voltages to each patterned top electrodes with different phase. The active microchannel of 200μm wide was fabricated by the deep reactive ion etching(DRIE) process. The displacement profiles of the vibrating wall and frequency response were measured by a laser Doppler vibrometer. Maximum displacement was about 50nm at the applied voltage of 1kHz and 20Vpp. Mean flow velocity of about 16μm/s at primary resonance point of 573kHz and 32μm/s at secondary resonance point of 859kHz were achieved at 20Vpp. Because of the simple structure without valves and diffuser, it is suitable for the integration into μTAS devices.

  一般社団法人日本機械学会, 17 Mar. 2008, Conference on Information, Intelligence and Precision Equipment : IIP, 2008(0) (0), 225 - 227, Japanese


• 2107 High-resolution Piezoelectric Deformable Mirror for Adaptive Optics

  TSUDA Shogo, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Piezoelectric MEMS deformable mirror resolution is studied for an adaptive optics device. In previous study, we have developed the piezoelectric MEMS deformable mirrors which have 19 actuator away. To improve the resolution of the deformable mirror, we designed the best electrode size to deflect 5μm when applied 10Vpp. Then, we compared 61CH electrodes with 91CH electrodes in terms of Zernike generation. Zernike polynomials are used to evaluate the mirror surface, and the control system is based on the influence functions for generating Zernike modes. As a result of simulation, we proposed 61CH hexagonal electrodes. The displacement profiles measurements by a laser Doppler vibrometer showed that the each actuator generated displacement of 1.0μm〜1.3μm at 10V. Furthermore we calculated residual RMS of Zernike modes(〜27th) of fabricated deformable mirror.

  一般社団法人日本機械学会, 17 Mar. 2008, Conference on Information, Intelligence and Precision Equipment : IIP, 2008(0) (0), 228 - 231, Japanese


• 2110 Angiogenesis induced by vascular endothelial growth factor on MEMS device

  SENZAI Hiroyuki, HIRAMARU Daisuke, MIURA Takashi, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Recently, studies of positional relationships of cells are seemed to be very important for cell biology. We proposed a novel concept that self-organized vasculature integrates artificial orifices on a device by VEGF (Vascular Endothelial Growth Factor). Sucking and clamping of Alginate Calcium gel beads containing VEGF, it is able to induce angjogenesis to orifices on embedded channels. Endothelial cells have a characteristic property that they organize vasculature by themselves in collagen gel and grow along the VEGF concentration gradient. HUVEC (Human Umbilical Vein Endothelial Cells) were cultured on device for about 7 days in the collagen gel and artificial vasculature were immobilized on orifices by self-organized.

  一般社団法人日本機械学会, 17 Mar. 2008, Conference on Information, Intelligence and Precision Equipment : IIP, 2008(0) (0), 236 - 237, Japanese


• Novel Micromixer Utilizing Frequency Mode Modulation on Meta-Structure,

  K. Kanda, Y. Noda, T. Suzuki, I. Kanno, H. Kotera

  01 Jan. 2008, The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences [MicroTAS2008], pp. 1387-1389, San Diego, USA, Oct,12-16,, 1387 - 1389, English


• Assembly-Free Microfabrication Process for Multi-Layered Microfluidic Networks Using Single-Mask Multidirectional Photolithography,

  T. Suzuki, Y. Hirabayashi, I. Kanno, M. Washizu, H. Kotera

  01 Jan. 2008, The 12th International Conference on Miniaturized Systems for Chemistry and Life Sciences [MicroTAS2008], pp. 363-365, San Diego, USA, Oct,12-16,, 363 - 365, English


• Thin Films of PZT-based Ternary Perovskite Compounds for MEMS

  K. Wasa, I. Kanno, H. Kotera, N. Yamauchi, T. Matsushima

  2008, 2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008 Vol.1, 213 - +, English


• High-density Piezoelectric Actuator Array for MEMS Deformable Mirrors Composed of PZT Thin Films

  Isaku Kanno, Shogo Tsuda, Hidetoshi Kotera

  2008, 2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 132 - 133, English


• 補償光学用高解像度圧電MEMSミラーに関する研究

  津田 奨悟, 鈴木 孝明, 神野 伊策, 小寺 秀俊

  2008, 日本機械学会年次大会講演論文集 ,2008/8/2,8,17-18, Japanese


• 圧電薄膜を用いた流路壁面振動送液デバイスの特性評価

  小川 純矢, 鈴木 孝明, 神野 伊策, 小寺 秀俊

  2008, 日本機械学会年次大会講演論文集 ,2008/8/2,8,19-20, Japanese


• MEMSデバイスを利用した血管構造への流体導入に関する研究

  千歳 裕之, 平丸 大介, 三浦 岳, 鈴木 孝明, 神野 伊策, 小寺 秀俊

  2008, 日本機械学会年次大会講演論文集 ,2008/8/2,8,37-38, Japanese


• Development of Rapid Fiber-Fish Process with Micro-Bridges Fabricated by Inclined Uv Lithography,

  D. Hiramaru, T. Suzuki, A. Fuke, I. Kanno, H. Kotera

  2008, International Symposium on Microchemistry and Microsystems 2008 [ISMM2008], pp. 30, Kyoto, JAPAN, Dec,7,, English

  [Refereed]


• 圧電薄膜によるMEMSデバイス応用

  KANNO ISAKU

  2008, 化学工業, Vol.59.(No.8.) (No.8.), pp608 - 613, Japanese

  [Invited]

  Introduction commerce magazine


• Piezoelectric PZT thin films and their applications in MEMS

  KANNO Isaku

  07 Dec. 2007, 電気学会研究会資料. PHS, フィジカルセンサ研究会, 2007(35) (35), 23 - 27, Japanese


• 3320 Study on cell separation method using ultrasonic radiation pressure

  Hirabayashi Yasutoshi, Shintaku Hirofumi, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  This paper describes a method for cell sorting using ultrasonic radiation pressure. In previous research literature, we proposed resin-based device that was superior to silicon-based device in the points of optical transparency and simple process. In this paper, we studied some phenomena different from the silicon device. The sound wave reflectivity of SU-8 is smaller than that of silicon. So first, we verified the influence of the wall using PDMS microchannel which had small reflectivity of sound wave. Then we verified the influence of whole device resonance frequency.

  一般社団法人日本機械学会, 07 Sep. 2007, 年次大会講演論文集 : JSME annual meeting, 2007(7) (7), 327 - 328, Japanese


• 3316 Development of MEMS device integrating the vasculature using the self-organization

  HIRAMARU Daisuke, MIURA Takashi, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Recently, studies of positional relationships of cells are seemed to be very important for cell biology. We proposed a novel concept that self-organized vasculature integrate artificial orifices on a device. Using SIMPLE (Single Mask inclined Photo-Lithography Exposure) process, it is easy to fabricate embedded channels with orifices. Endothelial cells have a characteristic property that they organize vasculature by their selves in collagen gel. HUVEC (Human Umbilical Vein Endothelial Cells) are cultured on device for about 10 days in matrigel and artificial vasculature were immobilized on orifices by self-organized.

  一般社団法人日本機械学会, 07 Sep. 2007, 年次大会講演論文集 : JSME annual meeting, 2007(7) (7), 319 - 320, Japanese


• 3304 Designing piezoelectric deformable mirror by using FEM simulation

  TSUDA Shogo, KUNISAWA Takaaki, KUWAJIMA Syuuichiro, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Piezoelectric deformable mirror for adaptive optics is studied as an adaptive optics device. We have studied the piezoelectric mirror which have 19 upper electrodes. To improve the accuracy of the deformable mirror, we designed two upper electrode types, hexagonal electrodes 37ch and coaxial electrodes 35ch. To compare two electrode types, we calculated deflection of the designed mirrors by using Finite Element Method analysis simulation software, MSC. Marc. Zernike polynomials are used to evaluate the mirror surface, and the control system is based on the influence functions for generating Zernike modes. To compared with three electrodes types, 37ch, 35ch and 19ch, the residual RMS of hexagonal electrodes 37ch was the smallest, less than 0.005μm.

  一般社団法人日本機械学会, 07 Sep. 2007, 年次大会講演論文集 : JSME annual meeting, 2007(7) (7), 295 - 296, Japanese


• 3302 Development of a Piezoelectric Active Microchannel for Fluid Transportation in MicroTAS

  OGAWA Junya, SUZUKI Takaaki, KANDA Kensuke, KANNO Isaku, KOTERA Hidetoshi

  In this paper, we propose an innovative fluid transport system for μTAS. In this system, microchannels fabricated on silicon chips have active wall of a piezoelectric thin film directly deposited by sputtering on the outside of the microchannels. The active microchannel can transport the fluid by traveling wave induced on the surface of the piezoelectric moving wall by applying sinusoidal voltages to each patterned top electrode with different phase. Since the active microchannel was fabricated by micromachining process and has simple structure without valves and diffuser, it can be applied to μTAS without occupied area. The fluid transport system can be driven by low electric voltage, and integrated with intricate network design.

  The Japan Society of Mechanical Engineers, 07 Sep. 2007, The proceedings of the JSME annual meeting, 2007(Vol.7) (Vol.7), 291 - 292, Japanese


• 3315 Evaluation of oscillating characteristics for external-driving micropump

  KANDA Kensuke, ISHIKAWA Satoshi, OGAWA Junya, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  To evaluate the influence of miniaturization on resonance characteristics of extertnally driven micropumps, the modal analyses for systems consisted of an actuator and microchannel including water was carried out. Scale factor defined in this paper quantified the influence of miniaturizing. When a cantilever-typed actuator was miniaturized, it became clear that the oscillation at a high resonant frequency negatively influence on the pump performance (especially when the scale factor is larger than 100 m-1). The influence of additional mass effect of water was negligible for the scale range in this study. When thin-film actuator was used, negative effect observed in cantilever actuator was not emerged. However, additional mass effect of water produced up to a 67% decrease in resonant frequency. We pointed out the necessity to take the additional mass effect of water into consideration when pump is designed.

  The Japan Society of Mechanical Engineers, 07 Sep. 2007, The proceedings of the JSME annual meeting, 2007(Vol.7) (Vol.7), 317 - 318, Japanese


• 3319 Evaluation of cells cultured on orifice structures of cell trapping chip

  SHIMUTA Kouhei, SUZUKI Takaaki, OKONOGI Atsuhito, KANNO Isaku, KOTERA Hidetoshi

  For analysis of cell-cell interactions, we have proposed a microchip fabricated by SIngle-Mask inclined UV Photo Lithography for Embedded network (SIMPLE process). The microchip is made of thick negative photoresist SU-8. In this study, we carried out the toxicity and proliferative tests of SU-8 to pancreatic islet β cell, MIN6. Then, the validity of the proposed device was confirmed by a suction test for MIN6 cells using the fabricated device.

  The Japan Society of Mechanical Engineers, 07 Sep. 2007, The proceedings of the JSME annual meeting, 2007(Vol.7) (Vol.7), 325 - 326, Japanese


• 1101 MicroTAS including micropumps actuated by dielectric elastomer

  KANDA Kensuke, KAWANO Keiko, KUWAJIMA Shuichiro, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Loverich et al. have reported a micropump by dielectric elastomer actuation (DEA). The micropump has been fabricated everything from polymer, and achieved highly efficient and low-cost. A microfluidic chip incorporating the DEA micropumps is designed and fabricated in this paper. Assuming an analytical system that should transport sequentially and independently three liquids, the micro fluidic chip was designed. The microfluidic chip consists of three DEA micropumps and check valves. Fabricated microfluidic system performed independent motion of DEA and fluid control. It is possible to transport fluids without mixing. Actual analysis using the chip is future works.

  一般社団法人日本機械学会, 19 Mar. 2007, Conference on Information, Intelligence and Precision Equipment : IIP, 2007(0) (0), 4 - 6, Japanese


• 1102 Cell culture on cell analysis chip fabricated by single-inclined UV lithography

  SHIMUTA Kouhei, SUZUKI Takaaki, OKONOGI Atsunito, KANNO Isaku, KOTERA Hidetoshi

  Recently, many single-cell analysis systems have been proposed for electroporation and patch clamp. We have proposed a microchip fabricated by the SIngle-Mask inclined UV PhotoLithography for Embedded network (SIMPLE process). The microchip fabricated by SIMPLE process is made of thick negative photoresist SU-8. In this study, we carried out the toxicity and proliferative tests of SU-8 to living cells. Then, we tried to improve cell adhesiveness of substrates by coating poly-L-lysine.

  一般社団法人日本機械学会, 19 Mar. 2007, Conference on Information, Intelligence and Precision Equipment : IIP, 2007(0) (0), 7 - 8, Japanese


• 1103 Development of resin-based cell separation chip using ultrasonic radiation force

  Hirabayashi Yasutoshi, Shintaku Hirofumi, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  This paper describes a resin-based device to separate living cells using ultrasonic standing wave (USW). Heretofore silicon is used for USW device structure because it has high reflection property and vertical wall can be fabricated by wet etching. But the resin-based device is needed for the permeation property and simple fabrication process. First, we fabricated the SU-8 resist microchannel by photolithographic method in order to obtain the vertical side walls. Then we carried out cell sorting test using the 1μm beads. As a result, we observed the micro beads moving to acoustic nodes and different phenomenon for the silicon structure device.

  一般社団法人日本機械学会, 19 Mar. 2007, Conference on Information, Intelligence and Precision Equipment : IIP, 2007(0) (0), 9 - 12, Japanese


• 3317 Flow field near-textured-wall of the micro channel

  SHIOTA Atsushi, TSUMORI Fujio, KOTERA Hidetoshi, KANNO Isaku

  Drag reduction of laminar flow in microchannel is very important for μ-TAS (Micro Total Analysis Systems). Ceramic substrates which consist of alumina particles have rough surface and it is used as a mold to fabricate PDMS rectangular channel with textured wall. Roughness of the wall is depended on diameter of alumina particles. Velocity profile of laminar flow in a textured channel is measured by micro PIV. The measurements reveal that reduction in textured channel can be achieved relative to the classical smooth channel Stokes flow.

  The Japan Society of Mechanical Engineers, 2007, The proceedings of the JSME annual meeting, 2007(0) (0), 321 - 322, Japanese


• High throughput cell electroporation array fabricated by single-mask inclined UV lithography exposure and oxygen plasma etching

  Takaaki Suzuki, Hideo Yamamoto, Masataka Ohoka, Atsuhito Okonogi, Hiroyuki Kabata, Isaku Kanno, Masao Washizu, Hidetoshi Kotera

  2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 687 - 690, English


• Thermal driven metastructural reconfigurable mllimeter wave antenna

  K. Sakiyama, I. Kanno, T. Suzuki, T. Murayama, D. Hiramaru, H. Kotera

  2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 667 - 670, English


• Scale-effects on oscillation characteristics of externally driven micropump

  K. Kanda, S. Ishikawa, J. Ogawa, T. Suzuki, I. Kanno, H. Kotera

  2007, MICROPROCESSES AND NANOTECHNOLOGY 2007, DIGEST OF PAPERS, 342 - +, English


• Piezoelectric properties of (K, Na)NbO(3) thin films deposited on (001)SrRuO(3)/Pt/MgO substrates

  Takuya Mino, Shuichiro Kuwajima, Takaaki Suzuki, Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa

  2007, 2007 SIXTEENTH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 627 - 630, English


• Genetic Extended-fiber Network (GEN) stretched over microbridges fabricated by Single-Mask inclined UV lithography

  Takaaki Suzuki, Daisuke Hiramaru, Ariko Fuke, Isaku Kanno, Hiroyuki Kabata, Hidetoshi Kotera

  2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2163 - 2166, English


• A Piezoelectric Active Microchannel for Fluid Transport in Microtas,

  T. Suzuki, I. Kanno, J. Ogawa, K. Kanda, H. Kotera

  2007, The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2007), pp. 1498-1500, Paris, France, Oct,7-11,, 1498 - 1500, English

  [Refereed]


• A Low-Damage Cell Trapping Array Fabricated by Single-Mask Multidirectional Photolithography with Equivalent Circuit Analysis,

  T. Suzuki, H. Yamamoto, M. Ohoka, I. Kanno, M. Washizu, H. Kotera

  2007, The 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2007), pp. 1765-1767, Paris, France, Oct,7-11,, 1765 - 1767, English

  [Refereed]


• 強誘電体薄膜のMEMS応用

  KANNO ISAKU

  2007, セラミックス, Vol.42.(No.3.) (No.3.), pp181 - 187, Japanese

  [Refereed]

  Introduction scientific journal


• 806 Atomization Method of Polymer Gel Using Microchannel(2)

  KUWABARA Takeo, SHINTAKU Hirofumi, KAWANO Satoyuki, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Gel beads containing cells for immunoisolation should be small, monodisperse and spherical enough to ensure the reproducivility of diffusion of nutrients and hormone and to improve biocompatibility. In this paper, we present a new method to generate cell encapsulated micro gel beads for cell transplants. Using water-in-oil (W/O) emulsification and droplet coalescence in a microchannel, presented method generated smaller (less than 300μm in diameter) and more monodisperse gel beads compared to conventional methods. We report the relationships between flow rate and some essential dimensions for cell transplants such as gel beads diameter and circularity.

  The Japan Society of Mechanical Engineers, 28 Oct. 2006, Fluids engineering conference ..., 2006, "806 - 1"-"806-4", Japanese


• 804 Development of a single cell electroporation chip using single mask inclined UV lithography(2)

  Suzuki Takaaki, Yamamoto Hideo, Ohoka Masataka, Kanno Isaku, Washizu Masao

  A novel single-mask fabrication method for high-density arrayed micro-orifices and embedded microchannels is proposed for single cell analysis. The process is based on inclined UV lithography to expose a single layered photoresist (SU-8) coated on a patterned mask. Long embedded microchannels with a length/width ratio as high as 1000 can be fabricated by the proposed process. We prepared SU-8 structure with arrayed micro-orifices and embedded microchannels, and carried out an electroporation test with mouse erythroleukemia (MEL) cells to confirm the validity of the proposed system. Nuclear transport factor importinss was fed to the cellular interior by applying the low pulsed voltage.

  一般社団法人日本機械学会, 28 Oct. 2006, Fluids engineering conference ..., 2006(0) (0), "804 - 1"-"804-4", Japanese


• 820 Fracture of living cells in the cell separation process(2)

  Shintaku Hirofumi, Kawano Satoyuki, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  In this paper, we propose a fracture model of islets in a shear flow to evaluate the mechanical damage of islets. The fracture model was developed using the relationship between surface area increase and strain energy induced into the islet through the fracture. The islet diameter reduction during the purification process was predicted using the fracture model and numerical calculation using computational fluid dynamics. Comparing experimental and numerical results in terms of the islet size reduction, it is confirmed that the fluid dynamical stress during the islet purification damages islets.

  一般社団法人日本機械学会, 28 Oct. 2006, Fluids engineering conference ..., 2006(0) (0), "820 - 1"-"820-4", Japanese


• 745 Evaluation of dynamic damage on islets during purification process

  SHINTAKU Hirofumi, OKITSU Teru, MATSUMOTO Shinichi, KAWANO Satoyuki, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  In this paper, we investigated the effect of the fluid dynamical stress on islets during islet purification process. Firstly, we developed a fracture model of islets in a shear flow by the fracture test using a cylindrical viscometer. Secondary, we conducted the numerical calculation to estimate the fluid dynamical stress and strain energy during islet purification process. Finally we predicted the islet size reduction during islet purification using the fracture model and the numerical results. Comparing experimental data and numerical result in terms of the islet size reduction, it is confirmed that the fluid dynamical stress during the islet purification damages islets.

  一般社団法人日本機械学会, 15 Sep. 2006, 年次大会講演論文集 : JSME annual meeting, 2006(5) (5), 289 - 290, Japanese


• 5504 Single-MASK Inclined UV Lithography for Cell Analysis on a Microchip

  Yamamoto Hideo, Suzuki Takaaki, Ohoka Masataka, Okonogi Atsuhito, Kabata Hiroyuki, Kanno Isaku, Washizu Masao, Kotera Hidetoshi

  A novel single-mask fabrication method for high-density arrayed micro-orifices and microchannels is proposed and applied for electroporation. The process is based on inclined UV lithography to expose a single layered photoresist (SU-8) coated on a patterned mask. To fabricate the proposed feature precisely, we investigated the inclined angle on exposure process and developing distance of microchannels as a function of time. Using the process, we prepared SU-8 structure with arrayed micro-orifices and microchannels, and carried out electroporation test with MEL cells to confirm the validity of the proposed system. Nuclear transport factor CFP-importinβ was fed to the cellular interior by applying the low pulsed voltage.

  一般社団法人日本機械学会, 15 Sep. 2006, 年次大会講演論文集 : JSME annual meeting, 2006(7) (7), 293 - 294, Japanese


• 5515 Development of Micro Gel Beads Generation for Cell Transplants

  Kuwabara Takeo, Shintaku Hirofumi, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  In this paper, a new method to generate cell encapsulated micro Ca-alginate gel beads for cell transplants is presented. Alginate gel beads for immunoisolation should be small, monodisperse and spherical enough to ensure the reproducivility of diffusion of nutrients and hormone and to improve biocompatibility. By using water-in-oil (W/O) emulsification and droplet coalescence in micro fluidic channel, smaller (less than 300μm) and more monodisperse gel beads were obtained compared to conventional methods. We report the relationship of flow rate and some essential dimensions for cell transplants such as gel beads diameter and circularity.

  一般社団法人日本機械学会, 15 Sep. 2006, 年次大会講演論文集 : JSME annual meeting, 2006(7) (7), 315 - 316, Japanese


• 5518 Piezoelectric RF-MEMS switches using X type connectors

  Tazawa Yoshiro, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  We have developed piezoelectric RF-MEMS switch using PZT thin films for low-voltage actuation. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111) Pt/Ti/Si substrates by RF-sputtering. The cantilever type actuators composed of PZT thin films and Cr elastic layers were successively fabricated as unimorph structure, but large initial bending arises because of residual stress in the PZT and Cr layers. We optimized the design of the actuators to satisfy flat structure as well as large deflection, and we adopted X type connectors in the middle of the beam. According to FEM simulation (MARC2005) results, the deflection of the optimized actuators composed X type connectors was as high as 3.2μm at a relatively small voltage of 5V. Their resonant frequency was 14.6kHz and larger than cantilever type actuator's one. However, the deflection of the actuators was as high as 400nm at 5V, and the actuators geometry cause the degradation of the deflection characteristic.

  一般社団法人日本機械学会, 15 Sep. 2006, 年次大会講演論文集 : JSME annual meeting, 2006(7) (7), 321 - 322, Japanese


• 5506 Development of temperature gradient generator in local field

  Hirmaru Daisuke, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  A precise control of various fields is required on local field. The thermal field, that is one of the most general fields, is commonly used, but it is difficult to precise control of the thermal field in local field, because of very small thermal capacity of the micro device. Then, we propose the device for larger thermal gradient and fast response, which has great heat liberation and small heat transfer coefficient. Using MEMS process, this device has TaN heat wear on 6μm SiO_2 membrane. In the experiment, our device achieved the fast response unless 0.2s and thermal gradient over 20℃ between the interval of 250μm.

  The Japan Society of Mechanical Engineers, 15 Sep. 2006, The proceedings of the JSME annual meeting, 2006(Vol.7) (Vol.7), 297 - 298, Japanese


• 5517 Deformable MEMS mirror using piezoelectric thin film for adaptive optics

  KUNISAWA Takaaki, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  We fabricated a deformable MEMS mirror for adaptive optics. A PZT (Pb (Zr, Ti) O_3) thin film was grown on a (111) Pt/Ti/SOI substrate by RF-sputtering. The Si substrate was etched out up to the buried oxide layer to fabricate a circular membrane. We optimized the design of the upper electrodes using numerical analysis. The size of diaphragm is 15mm in diameter and 22μm thick. Mirror surface whose active area is 8mm in diameter was prepared on the exposed buried oxide layer. We calculated influence function for generating Zernike modes, and observed the deformation of the mirror using a laser Doppler vibrometer. The measurements revealed that the Zernike modes to 7^ terms were generated within the residual of 10〜20%.

  The Japan Society of Mechanical Engineers, 15 Sep. 2006, The proceedings of the JSME annual meeting, 2006(Vol.7) (Vol.7), 319 - 320, Japanese


• 5510 Development of density dependent cell sorter using ultrasonic standing wave

  Hirabayashi Yasutoshi, Shintaku Hirofumi, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  This paper describes a method to separate living cells using ultrasonic standing wave by density difference. Particles in ultrasonic standing wave field are subjected to acoustic force toward the direction corresponding to particles density and compressibility. We fabricated the SU-8 resist microchannel by novel photolithographic method in order to obtain the vertical side walls. We carried out cell sorting test system using the micro beads with diameter of 1μm. As a result, we observed the micro beads moving to acoustic nodes and antinodes by acoustic force in the flowing low or high density medium.

  The Japan Society of Mechanical Engineers, 15 Sep. 2006, The proceedings of the JSME annual meeting, 2006(Vol.7) (Vol.7), 305 - 306, Japanese


• Analysis of shear stress on the living tissue in microchannels

  SHINTAKU Hirofumi, OKITSU Teru, KAWANO Satoyuki, SUZUKI Takaaki, KANNO Isaku, KANI Kohei, HORINAKA Junichi, TAKIGAWA Toshikazu, MATSUMOTO Shinichi, KOTERA Hidetoshi

  15 May 2006, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2006(1) (1), 11 - 14, Japanese


• Deformable MEMS Mirror using a Piezoelectric Thin Film for Adaptive Optics

  KUNISAWA Takaaki, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  15 May 2006, 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, MSS-06(1-27) (1-27), 105 - 108, Japanese


• Single-MASK傾斜リソグラフィを用いた単一細胞機能計測アレイの開発

  山本英郎, 鈴木孝明, 大岡正孝, 小此木孝仁, 加畑博幸, 神野伊策, 鷲津正夫, 小寺秀俊

  2006, 化学とマイクロ・ナノシステム研究会講演要旨集, 13th


• A Low Temperature Bonding Technique for Microfluidic Chip Fabrication Using Soft-Cure Su-8 Sheet,

  H. Shintaku, Y. Hirabayashi, T. Okitsu, S. Kawano, T. Suzuki, I. Kanno, H. Kotera

  01 Jan. 2006, Proceedings of Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2006), pp. 681-683, Tokyo, Japan, Nov,5-9,, 681 - 683, English


• Fast Pulsatile Flow Included in Net Continuous Flow Generated by a Traveling Wave Micropump,

  T. Suzuki, H. Hata, I. Kanno, S. Kawano, H. Kotera

  01 Jan. 2006, Proceedings of Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2006), pp. 1498-1500, Tokyo, Japan, Nov,5-9,, 131 - 133, English


• High Throughput Electroporation Microchip Fabricated by Single-Mask Inclined Uv Lithography,

  T. Suzuki, H. Yamamoto, M. Ohoka, A. Okonogi, H. Kabata, I. Kanno, M. Washizu, H. Kotera

  01 Jan. 2006, Proceedings of Tenth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2006), pp. 131-133, Tokyo, Japan, Nov,5-9,, 1498 - 1500, English


• Rapid fabrication process for high aspect-ratio embedded microchannels with orifices using a single SU-8 layer on a mask

  T Suzuki, T Tokuda, H Yamamoto, M Ohoka, Kanno, I, M Washizu, A Kotera

  2006, MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 346 - 349, English


• Development of biosensor chip for clinical diagnosis using surface plasmon resonance imaging with multi-microchannels

  T. Suzuki, Y. Teramura, K. Inokuma, I. Kanno, H. Iwata, H. Kotera

  2006, 2006 INTERNATIONAL CONFERENCE ON MICROTECHNOLOGIES IN MEDICINE AND BIOLOGY, 116 - +, English


• マイクロゲルビーズ生成法の開発

  桑原 健雄, 新宅 博文, 鈴木 孝明, 神野 伊策, 小寺 秀俊

  2006, 日本機械学会年次大会講演論文集 ,2006/9/15,7,315-316, Japanese


• マイクロチャネルを用いた機能性高分子ゲルの微粒化(2)

  桑原 健雄, 新宅 博文, 川野 聡恭, 鈴木 孝明, 神野 伊策, 小寺 秀俊

  2006, 流体工学部門講演会講演論文集,一般社団法人日本機械学会,2006/10/28,,806-1-806-4, Japanese


• Piezoelectric Deformable Mems Mirror for Adaptive Optics Composed of Pzt Thin Films on Soi,

  I. Kanno, T. Kunisawa, T. Suzuki, K. Wasa, H. Kotera

  2006, The 17th International symposium on integrated ferroelectrics (ISIF2006), pp. 7A-469-C, Hawaii, USA, Apr,23,, English

  [Refereed]


• Piezoelectric Microactuators Composed of Pzt Thin Films on Si Substrates,

  I. Kanno, Y. Tazawa, T. Kunisawa, T. Suzuki, H. Kotera

  2006, 2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006), pp. S15_02, Santa Clara, USA, Jun,21-23,, English

  [Refereed]


• Piezoelectric Rf-Mems Switches Using Pzt Thin Films,

  I. Kanno, Y. Tazawa, T. Suzuki, H. Kotera

  2006, 2006 International Meeting for Future of Electron Devices, Kansai, pp. D-2, Kyoto, Japan, Apr,26,, English

  [Refereed]


• Multi-Functional Cell Mapping Device,

  H. Kotera, N. Fujiwara, H. Yamamoto, T. Suzuki, M. Hassan, I. Kanno

  2006, Asia-Pacific Conference of Transducers and Micro-Nano Technology 2006 (APCOT2006), pp. 95-BMFS-A0399, Singapore, Jun,25-28,, English

  [Refereed]


• Tissue Encapsulation with Thin Hydrogel Membrame Using Micro-Emulsification System,

  H. Shintaku, T. Kuwabara, T. Suzuki, I. Kanno, H. Kotera, S. Kawano

  2006, 2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006), pp. S11_04, Santa Clara, USA, Jun,21-23,, English

  [Refereed]


• 109 Visualization Method for Cylindrical Droplet Formation in Microchannel

  Shintaku Hirofumi, Kawano Satoyuki, Kuwabara Takeo, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  A novel cell encapsulation method in microchannel was studied. We used W/O emulsion in the rectangle microchannel fabricated by soft MEMS process. The cell encapsulation process and internal flow of the droplet were visualized. The velocity of the droplet and the cell were measured by the use of the digital image processing. Simple model for prediction of the all velocity was proposed. The theoretical result agreed well with the experimental data.

  一般社団法人日本機械学会, 18 Sep. 2005, 年次大会講演論文集 : JSME annual meeting, 2005(2) (2), 17 - 18, Japanese


• 1256 Preparation and Evaluation of Cell Aggregates for Tissue Regeneration

  KACHI Naoyoshi, KOTERA Hidetoshi, KANNO Isaku, HATA Hidetoshi, ITO Shinichi, TOMITA Naohide

  Micro-folding culture system is proposed where cells are cultivated on micropatterned substrates. The substrates have a number of pits with diameter of 100, 150 and 200μm, and has low cell-adhesiveness surface. Mesenchymal stem cells (MSCs) were seeded onto the patterned substrates at a density of 1.1×10^5 cells/cm^2. Aggregates of the MSCs were formed in the pits within 48 hours. Diameter of the aggregates and movement of aggregates had positive and negative correlation with diameter of pits respectively. There is a possibility that some function of aggregate can be controlled by the micro-folding culture.

  一般社団法人日本機械学会, 18 Sep. 2005, 年次大会講演論文集 : JSME annual meeting, 2005(6) (6), 123 - 124, Japanese


• 2402 Deformable MEMS mirror using PZT thin film for adaptive optics

  KUNISAWA Takaaki, INOUE Takashi, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  We fabricated a deformable MEMS (Micro Electro Mechanical System) mirror for adaptive optics. PZT (Pb(Zr,Ti)O_3) thin films were grown on the (111) Pt/Ti/SOI substrate by RF-sputtering. Then Al was evaporated on PZT and patterned as eight separated upper electrodes. The size of mirror is 8mm in diameter and 12μm thick. The deflection of the mirror was 110nm at 10V, and it's proportional to applied voltage. To increase the deflection of the mirror, we optimized the electrodes structure by FE-Analysis. The optimize mirror with new electrodes achieved 13.6μm deflection at 10V.

  一般社団法人日本機械学会, 18 Sep. 2005, 年次大会講演論文集 : JSME annual meeting, 2005(7) (7), 117 - 118, Japanese


• 2404 Development of fixed-fixed beam type RF-MEMS switches using the piezoelectric thin film

  Tazawa Yoshiro, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  We have developed piezoelectric RF-MEMS switches using PZT thin films for low-voltage actuation. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111) Pt/Ti/Si substrates by RF-sputtering. The cantilever and double supported beam type actuators, composed of PZT thin films and Cr/Al elastic layers, were successively fabricated as unimorph structure. The deflection of the actuators was measured using a Laser Doppler Vibrometer and we observed the largest displacement of cantilever type actuator was 1μm and one of the double supported beam type actuator was 100nm at a relatively small voltage of 5V. Initial bending of the double supported beam type actuator caused by residual stress in the PZT and Cr/Al layers had smaller than one of cantilever type actuator, however the displacement magnitude of the double supported beam type actuator enough for switching couldn't obtain. We optimized the design of the actuator by FEM analysis. Fig.2 Fabrication process of PZT micro-actuator

  The Japan Society of Mechanical Engineers, 18 Sep. 2005, The proceedings of the JSME annual meeting, 2005(7) (7), 121 - 122, Japanese


• 2407 Measurement of mechanical properties of a single myocyte using MEMS technique

  Fujiwara Noritsugu, Yamamoto Hideo, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  We study on the measurement of mechanical properties of a living cardiac myocyte. Micro mechanical sensors were made of PDMS using MEMS technique. The device consists of micro posts which work as vertical cantilevers measuring local contractile forces of a single myocyte. The generated force is calculated from the displacement of the top of the post. We also propose the device with through holes on the micro channel to apply negative pressure to the cell. And this device has additional capability to measure the cell responses to the physical and chemical effects simultaneously with molecular localization in the cell. This approach has the potential to measure the physiological properties of a single myocyte to develop a bio-simulator model.

  The Japan Society of Mechanical Engineers, 18 Sep. 2005, The proceedings of the JSME annual meeting, 2005(Vol.7) (Vol.7), 127 - 128, Japanese


• 259 Development of PZT/SUS unimorph microactuator and its application for traveling wave micropump

  SUZUKI Takaaki, NAGAO Taka, HATA Hidetoshi, SHINTAKU Hirofumi, KANNO Isaku, KOTERA Hidetoshi

  The traveling wave micropump with a thin flow layer is suitable for particle separation and quantification without valves, heat and strong electric field. We have proposed a traveling wave micropump driven by the traveling wave, and demonstrated high efficiency. In this paper, we fabricated a traveling wave micropump composed of flexible microchannel wall made of Polydimethylsiloxane (PDMS) with piezoelectric thin-film unimorph actuators. The piezoelectric thin films were deposited directly on cantilever-shaped stainless steel (SUS) substrates using rfagnetron sputtering technique. The active motion of the particles in the fluid was confirmed by the actuation of the microchannel wall by the piezoelectric actuators.

  一般社団法人日本機械学会, 22 Aug. 2005, Dynamics & Design Conference, 2005(0) (0), "259 - 1"-"259-4", Japanese


• Development of PZT Thin-Film / SUS Unimorph actuators and Application to Micropumps

  NAGAO Taka, HATA Hidetoshi, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  22 Jun. 2005, 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, MSS-05(21-44) (21-44), 63 - 66, Japanese


• Development of mechanical sensor for measuring contractile force of a single myocyte

  FUJIWARA Noritsugu, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  22 Jun. 2005, 電気学会研究会資料. BMS, バイオ・マイクロシステム研究会 = The papers of Technical Meeting on Bio Micro Systems, IEE Japan, 2005(1) (1), 9 - 12, Japanese


• Computer aided design of microatomizer for μTAS applications

  SHINTAKU Hirofumi, KAWANO Satoyuki, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  22 Jun. 2005, 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, MSS-05(21-44) (21-44), 67 - 70, Japanese


• 1104 Micro-actuator using piezoelectric PZT thin films deposited on Si substrates

  ENDO Hironobu, TAZAWA Yoshiro, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  We have developed micro-piezoelectric actuators using PZT thin films. PZT thin films with composition of Zr/Ti=53/47 were grown on the (111)Pt/Ti/Si substrates by rf-sputtering. Micro-cantilevers, composed of PZT thin films and Cr elastic layers, were successively fabricated as unimorph actuators with a length of 500um and width of 90μm. The tip deflection of the cantilevers was measured using a Laser Doppler Vibrometer and we observed piezoelectric vibration level as high as 0.62μm at a relatively small voltage of 5.0V. However, the micro-cantilevers had large initial bending because of residual stress in the PZT and Cr layers.

  一般社団法人日本機械学会, 21 Mar. 2005, Conference on Information, Intelligence and Precision Equipment : IIP, 2005(0) (0), 40 - 41, Japanese


• 1115 Beam steerable leaky wave antenna for millimeter wave applications

  MURAYAMA Takuya, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  This paper presents a directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is carried out by changing the dielectric constant of ferroelectric film. The ferroelectric film is composed of lanthanum modified lead titanate (PLT) and deposited on micro strip line by RF sputtering. The dielectric constant of PLT has temperature dependence, so by using heater elements we can change the dielectric constant of PLT film. Heater elements are laid out beside micro strip line. By switching heater element the dielectric constant is periodically changed, and the characteristic of antenna will be reconfigured. As a first step, we analyzed two kind of antenna device by using FDTD (Finite Difference Time Domain) method, and fabricated them. And we developed a new numerical analysis program using CIP (Cubic Interpolated Peudo-Particle Scheme) method.

  一般社団法人日本機械学会, 21 Mar. 2005, Conference on Information, Intelligence and Precision Equipment : IIP, 2005(0) (0), 82 - 83, Japanese


• 1117 Measurement of electrophysiological properties of a single cell using MEMS device

  TOKUDA Takashi, FUJIWARA Noritsugu, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Patient-tailored treatments become possible by simulating behavior of organs, which is affected by the change of the environment such as dispensing of drugs. For example, it is necessary to detail the electrical and mechanical properties of a single living cell to build simulation model of heart. This paper proposes a novel planar patch-clamp device integrating electrode, micro-channel and micro-hole.

  一般社団法人日本機械学会, 21 Mar. 2005, Conference on Information, Intelligence and Precision Equipment : IIP, 2005(0) (0), 86 - 87, Japanese


• 2506 Development of measuring system for contraction characteristics of a single cardiac myocyte

  Fujiwara Noritsugu, Suzuki Takaaki, Kanno Isaku, Kotera Hidetoshi

  This paper is a study on the measurement of mechanical properties of a living cardiac myocyte. We propose micro mechanical sensors made of PDMS using soft lithography technique. The device consists of micro columns arrays and work as vertical cantilevers measuring local forces of a myocyte. The generated force derives from the displacement of the top of column. This approach has the potential to measure 2-dimensional mechanical properties of a single myocyte to develop a viscoelastic constitutive equation for a bio-simulator model.

  一般社団法人日本機械学会, 21 Mar. 2005, Conference on Information, Intelligence and Precision Equipment : IIP, 2005(0) (0), 345 - 346, Japanese


• 1118 Components dependence of (Pb,La)(Zr,Sn,Ti)O_3 thin films Prepared by magnetron sputtering

  TABATA Daiki, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi, WASA Kiyotaka

  The electrical properties and phase transition behavior of (Pb,La)(Zr,Sn,Ti)O_3 (PLZST) thin films prepared on (100)Pt/(100)MgO substrates by RF-magnetron spattering and investigated by X-ray diffraction, relative dielectric constant and P-E hysteresis loops. From X-ray diffraction all PLZST thin films are polycrystalline. With an increase in composition Ti, electrically field-induced AFE-FE switching field(E_) is depressed. But Polarization of ferroelectric state are almost equal. These indicate PLZST components is better around boundary between AFE_T and F_R for micro actuator.

  The Japan Society of Mechanical Engineers, 21 Mar. 2005, Conference on Information, Intelligence and Precision Equipment : IIP, 2005, 88 - 89, Japanese


• 1119 Development of micro atomizer and its computer aided design

  SHINTAKU Hirofumi, KAWANO Satoyuki, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  Cylindrical droplet formation in a W/O (water in oil) system of microchannel was analyzed experimentally and theoretically. The microchannel shape was modified to generate smaller droplet based on theoretical model. Numerical and experimental investigations were carried out with the novel microchannel. It is found that generated droplet was almost the spherical shape, since the diameter was smaller enough than the depth of microchannel. The results indicated that 3-dimensional and more precise theoretical model should be applied to realize the smaller droplet generation.

  The Japan Society of Mechanical Engineers, 21 Mar. 2005, Conference on Information, Intelligence and Precision Equipment : IIP, 2005, 90 - 92, Japanese


• 1111 The fabrication and the application of valveless micropump driven by traveling wave

  HATA Hidetoshi, SUZUKI Takaaki, KANNO Isaku, KOTERAK Hidetoshi

  Micropumps are one of the most important microfluidic components in Micro Total Analysis System (μTAS). We have developed a valveless micropump driven by traveling wave, and obtained high energy efficiency. In this paper, the valveless micropump was fabricated by the microfabricatin technique to verify the validity of the pumping principle. The micropump was composed of flexible walls of a microchannel with piezoelectric bimorph cantilevers. Traveling wave was induced on the surface of the microchannel by applying sinusoidal voltages to each piezoelectric cantilever with the different phase, and the peristaltic motion of the channel wall transports the fluid. The fluid flow of the proposed micropump was measured using Micro particle Image Verocimetry (MicroPIV). The traveling wave micropump driven by the piezoelectric actuators is a simple structure without valves and a low cost disposable device.

  The Japan Society of Mechanical Engineers, 21 Mar. 2005, Conference on Information, Intelligence and Precision Equipment : IIP, 2005, 64 - 65, Japanese


• 914 Transfer method of PZT epitaxial thin films onto glass substrates and evaluation of their dielectric properties

  TERADA Kenichiro, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi, WASA Kiyotaka

  We have successfully transferred epitaxial single crystal PZT thin films from MgO substrates onto glass substrates by using micro fabrication process. The internal compressive stress of about 200MPa in the epitaxial PZT thin films was released after the transference. The relative dielectric constant of the PZT thin films increased from 239.4 to 332.9 after the transference with a small decrease of polarization. The crystallinity and crystal orientation of the PZT thin films on the glass substrates were the same to those of epitaxial virgin PZT thin films on the MgO substrates. The transfer process is useful for a fabrication of PZT thin film MEMS devices on any substrates.

  一般社団法人日本機械学会, 18 Mar. 2005, 関西支部講演会講演論文集, 2005(80) (80), "9 - 27"-"9-28", Japanese


• 923 Reconfigurable leaky wave antenna using change of dielectric constant

  MURAYAMA Takuya, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  This paper presents a directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is carried out by changing the dielectric constant of ferroelectric film. The ferroelectric film is composed of lanthanum modified lead titanate (PLT) and deposited on micro strip line by RF sputtering. The dielectric constant of PLT has temperature dependence, so by using heater elements we can change the dielectric constant of PLT film. Heater elements are laid out beside micro strip line. By switching heater element the dielectric constant is periodically changed, and the characteristic of antenna will be reconfigured. As a first step, we analyzed two kind of antenna device by using FDTD(Finite Difference Time Domain) method, and fabricated them. And we developed a new numerical analysis program using CIP(Cubic Interpolated Peudo-Particle Scheme) method.

  一般社団法人日本機械学会, 18 Mar. 2005, 関西支部講演会講演論文集, 2005(80) (80), "9 - 45"-"9-46", Japanese


• A New Autonomous Implantable Micro Power Supply Using Bone Strain-Based Piezoelectric Energy Harvesting

  J. J. Loverich, I. Kanno, H. Kotera

  01 Jan. 2005, Micro Total Analysis Systems 2005, pp. 433-435, 1, 433 - 435, English


• Dielectrophoretic Electrode Array for Optimum Cell Flow in Pressure Driven Flow

  H. Shintaku, S. Kawano, T. Suzuki, I. Kanno, H. Kotera

  01 Jan. 2005, Proceedings of Ninth International Conference on Miniaturized Systems for Chemistry and Life Massachusetts, USA, Oct,9-13,, 1, 1075 - 1077, English


• Visualization and Optimization for Fluid Flow of Traveling Wave Micropump Using Micropiv and Numerical Simulation,

  T. Suzuki, H. Hata, H. Shintaku, I. Kanno, S. Kawano, H. Kotera

  01 Jan. 2005, Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences (microTAS2005), pp. 1108-1110, Boston Marriott Copley Place, Boston, Massachusetts, USA,Oct,9-13,, 1, 1108 - 1110, English


• Single-Mask Fabrication Process for High Aspect-Ratio Embedded Microchannels with Openings,

  T. Suzuki, T. Tokuda, N. Fujiwara, H. Yamamoto, I. Kanno, M. Washizu, H. Kotera

  01 Jan. 2005, Ninth International Conference on Miniaturized Systems for Chemistry and Life Sciences(microTAS2005), pp. 1183-1185, Boston Marriott Copley Place, Boston, Massachusetts, USA,Oct,9-13,, 1, 1183 - 1185, English


• Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films

  H Kotera, Kanno, I, T Inoue, T Suzuki

  2005, IEEE/LEOS Optical MEMs 2005: International Conference on Optical MEMs and Their Applications, 31 - 32, English


• Development of piezoelectric RF-MEMS switch driven by low operating voltage

  Isaku Kanno, Takaaki Suzuki, Hironobu Endo, Hidetoshi Kotera

  2005, Advances in Electronic Packaging 2005, Pts A-C, PART C, 2033 - 2036, English


• Piezoelectric micro-actuators for RF-MEMS switches

  Kanno, I, H Endo, T Suzuki, H Kotera

  2005, 2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, 2005, 797 - 798, English


• MicroTAS用マイクロアトマイザの特性解析

  新宅 博文, 川野 聡恭, 鈴木 孝明, 神野 伊策, 小寺 秀俊

  2005, 関西支部講演会講演論文集,一般社団法人日本機械学会,2005/3/18,80,11-35-11-36, Japanese


• A Novel High Energy Density Dielectric Elastomer Actuator for Micro Anaysis Systems,

  J. J. Loverich, I. Kanno, H. Kotera

  2005, Micro Total Analysis Systems 2005, pp. 160-162, English

  [Refereed]


• Preparation of Pb(Zr,Ti)O3 Thin Films with Graded Composition Profiles by Rf-Sputtering,

  K. Nakano, T. Suzuki, I. Kanno, H. Kotera, K. Wasa

  2005, Transactions of the Materials Research Society of Japan (MRS-J), pp. 19-22,, English

  [Refereed]


• Improvement on Pump Performance of Traveling Wave Micropump for Fluid Transportation in Microchannel,

  T. Suzuki, I. Kanno, H. Hata, H. Shintaku, S. Kawano, H. Kotera

  2005, The First International Conference on Complex Medical Engineering-CME2005, pp. 103-106,Kagawa International Conference Hall, Takamatsu, Japan, May,15-18,, English

  [Refereed]


• Development of Thin Film Valveless Micropump Driven by Traveling Wave

  Suzuki Takaaki, Yakushiji Shunsuke, Kanno Isaku, Kawano Satoyuki, Kotera Hidetoshi

  Micropumps play a significant role in fluid transportation system of μ-TAS. We propose a peristaltic micropump system composed of a microchannel made of silicon rubber. Bottom surface of the microchannel is deformed by the electrostatic attraction between upper and lower electrodes made of copper thin films. Since the pump has simple structure using the electrostatic thin film actuators without valves, the fabrication process is also as simple as just stacking organic films or layer on PMMA substrate. The micropump is suitable for low-cost disposable applications. We could observe clear deflection of the channel wall which is proportional to the a square of the applied voltage. In addition, we confirmed active motion of microbeads in the fluid by the peristaltic actuation of electrostatic force.

  The Japan Society of Mechanical Engineers, 04 Sep. 2004, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 357 - 358, Japanese


• Piezoelectric properties of PZT thin films deposited on SUS substrates

  KANNO Isaku, Suzuki Takaaki, KOTERA Hidetoshi

  Piezoelectric thin films have attracted considerable attention in micro-electromechanical systems. In this study, PZT thin films were deposited directly on Pt-coated SUS substrates using RF magnetron sputtering technique. SUS plate has high mechanical strength and stability, which are suitable properties as a substrate for the deposition of a piezoelectric film rather than a conventional substrate such as Si. The x-ray diffraction measurements revealed that the PZT thin films show polycrystalline structure with a perovskite strucure. Piezoelectric vibration of PZT/SUS unimorph cantilevers was clearly observed and the piezoelectric constant e_<31> of the films was calculated to be -1.6 C/m^2.

  一般社団法人日本機械学会, 04 Sep. 2004, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 355 - 356, Japanese


• Characterization of RF-MEMS switch using PZT thin films

  ENDO Hironobu, SUZUKI Takaaki, KANNO Isaku, KOTERA Hidetoshi

  We aim for the realization of a low-voltage RF-MEMS switch. The switches, we fabricated, consist of unimorph micro-cantilevers using piezoelectric PZT thin films. The PZT thin films are deposited on Si substrate by RF sputtering. The cantilevers can be deflected by applying voltage between upper and lower electrodes, and can cause short-circuit transmission line and ground (off-state). Dimension of the cantilever is 500μm in length, 70μm in width, and 3.1μm in thickness. We were able to obtain the deflection of 0.8μm at the voltage of 10V. We established the fabrication process of RF-MEMS switch using PZT thin films on Si substrate.

  一般社団法人日本機械学会, 04 Sep. 2004, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 359 - 360, Japanese


• Reconfigurable leaky wave antenna using change of dielectric constant

  MURAYAMA Takuya, KANNO Isaku, KOTERA Hidetoshi

  This paper presents a directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is carried out by changing the dielectric constant of ferroelectric film. The ferroelectric film is composed of lanthanum modified lead titanate (PLT) and deposited on micro strip line by RF sputtering. The dielectric constant of PLT has temperature dependence, so by using heater elements we can change the dielectric constant of PLT film. Heater elements are laid out beside micro strip line. By switching heater element the dielectric constant is periodically changed, and the characteristic of antenna will be reconfigured. As a first step, we analyzed two kind of antenna device by using FDTD(Finite Difference Time Domain) method, and fabricated them.

  一般社団法人日本機械学会, 04 Sep. 2004, 年次大会講演論文集 : JSME annual meeting, 2004(7) (7), 361 - 362, Japanese


• Optimization of droplet generating method in a microchannel based on instability theory

  SHINTAKU Hirofumi, KAWANO Satoyuki, YAMAJI Yusuke, KANNO Isaku, KOTERA Hidetoshi

  Picoliter-sized water droplets are generated for liquid metering system of μTAS using liquid-liquid interface. The dynamics of interfacial wave between two immiscible liquids has an important roll in this system, e.g., controlling droplets size. In this paper, the fluid dynamical study based on the interfacial instability theory is carried out. Comparing experimental and theoretical results, the validity of theoretical approach is discussed in detail.

  一般社団法人日本機械学会, 04 Sep. 2004, 年次大会講演論文集 : JSME annual meeting, 2004(2) (2), 69 - 70, Japanese


• Measurement of electrical and mechanical properties of a living cardiac myocyte using MEMS device

  TOKUDA Takashi, HUJIWARA Noritsugu, KANNO Isaku, KOTERA Hidetoshi

  Patient-tailored treatments become possible by simulating behavior of organs, which is affected by the change of the environment such as dispensing of drugs. For example, it is necessary to detail the electrical and mechanical properties of a single living cell to build simulation model of heart. In this paper, we fabricated two kinds of device for cardiac myocyte, the one is for patch-clamp recording and the other is to measure 2-dimensional mechanical forces.

  The Japan Society of Mechanical Engineers, 04 Sep. 2004, The proceedings of the JSME annual meeting, 2004(Vol.5) (Vol.5), 341 - 342, Japanese


• Epitaxial growth of (K, Na)NbO_3 thin films deposited on (100)SrTiO_3 substrate by PLD

  SAITO Takehisa, WADA Takahiro, ADACHI Hideaki, KANNO Isaku

  KNbO_3, (K_<0.5>Na_<0.5>)NbO_3 and NaNbO_3 thin films were deposited on (100) SrTiO_3(STO) substrate by Pulsed Laser Deposition (PLD). The obtained (K,Na)NbO_3 films were epitaxially grown on (100)SrTiO_3 with an orientation relationship as (K,Na)NbO_3(001)_∥STO(001) and (K,Na)NbO_3[100]_∥STO[100]. The smoothness of the film surface is improved with the increase of the Na content.

  The Japanese Association for Crystal Growth (JACG), 25 Aug. 2004, Journal of the Japanese Association of Crystal Growth, 31(3) (3), 234 - 234, Japanese


• Thermodynamic study of c-axis-oriented epitaxial Pb(Zr,Ti)O3 thin films

  Isaku Kanno, Yu Yokoyama, Hidetoshi Kotera, Kiyotaka Wasa

  01 Feb. 2004, Physical Review B - Condensed Matter and Materials Physics, 69, 641031 - 641037


• 進行波を用いた薄膜バルブレスマイクロポンプの開発

  鈴木 孝明, 藥師寺 俊輔, 神野 伊策, 川野 聡恭, 小寺 秀俊

  2004, 日本機械学会年次大会講演論文集 ,2004/9/4,7,357-358, Japanese


• 極低レイノルズ数流れにおける脈動を用いた混合法

  新宅 博文, 川野 聡恭, 神野 伊策, 小寺 秀俊

  2004, 日本機械学会年次大会講演論文集 ,2004/9/4,2,67-68, Japanese


• A Novel Micro Device for Measuring the Electromechanical Properties of a Single Myocyte,

  M. Hassan, N. Fujiwara, I. Kanno, H. Kotera, M. Washizu

  2004, Micro Total Analysis Systems 2004, pp. 439-441, English

  [Refereed]


• Characterization of Transverse Piezoelectric Properties of Pzt Thin Films for Micro-Actuator Applications,

  I. Kanno, T. Suzuki, H. Kotera, K. Wasa

  2004, The 5th Korea-Japan Conference on Ferroelectrics (Invite), pp. 191, English

  [Refereed]


• Preparation and Characterization of Pb(Zr, Ti)O3 Thin Films Deposited on Sus Substrates by RF Magnetron Sputtering,

  T. Suzuki, I. Kanno, K. Wasa, H. Kotera

  2004, The 5th Korea-Japan Conference on Ferroelectricity, pp. 85, The Hoam Convention Center, Seoul National University, Seoul, Korea, Aug,18-21, English

  [Refereed]


• High-Efficient Micropump with Geometry Optimization of Microchannel Using Computational Fluid Dynamics,

  T. Suzuki, S. Kawano, I. Kanno, H. Shintaku, S. Yakushiji, H. Kotera

  2004, 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences(microTAS2004), pp. 234-236, Malmo Exhibition and Convention Center, Malmo, Sweden,Sep,26-30, English

  [Refereed]


• RF-MEMSの設計・製造技術

  KANNO ISAKU

  The Japan Society for Precision Engineering, 2004, 精密工学会誌, 70(9) (9), 1146 - 1149, Japanese

  [Invited]

  Introduction scientific journal


• Computer aided design of passive mixer for μTAS

  SHINTAKU Hirofumi, KAWANO Satoyuki, KANNO Isaku, KOTERA Hidetoshi

  Miniaturized biochemical analysis systems, so-called a μTAS, have gained considerable interest for research and development in new-bio-engineering. However, there is a difficulty in mixing fluids in the micro device because of extremely low Reynolds number. So, to develop an effective micromixer which can fully perform at low Reynolds number flow is important to realize integrated μTAS. In our previous experiment based on flow visualization technique, it was found that the diffusion phenomena of two species must play an important role in mixing process in such a creeping flow. The effect of diffusion should be investigated in detail to evaluate the performance of passive mixer. In this paper, we make a numerical study on the suitable flow condition for μTAS and the diffusion characteristics of passive mixer by means of curvilinear coordinate transformation technique.

  一般社団法人日本機械学会, 05 Aug. 2003, 年次大会講演論文集 : JSME annual meeting, 2003(5) (5), 325 - 326, Japanese


• MEMS Switch using Piezoelectric PZT thin films

  ENDO Hironobu, KANNO Isaku, KOTERA Hidetoshi

  The paper presents the possibility of a low-voltage micro-switch for RF application. The switches, we fabricated, consist of micro-cantilevers using piezoelectric PZT thin films with the length of 300μm and the width of 50μm. The cantilevers are actuated as unimorph actuators that can be deflected by applying voltage between upper and lower electrodes. We could obtain large deflection of 4.3μm even at the low voltage of 6.0V, which is well compatible with conventional IC drivers. This result indicates that the RF-MEMS switch using piezoelectric PZT thin films is much advantageous to the low voltage switching devices compared with conventionally proposed electrostatic ones.

  一般社団法人日本機械学会, 05 Aug. 2003, 年次大会講演論文集 : JSME annual meeting, 2003(7) (7), 221 - 222, Japanese


• Fabrication of Micro Actuator using piezoelectric thin films

  TERADA Kenichiro, KANNO Isaku, KOTERA Hidetoshi

  In this paper we propose hybrid piezoelectric materials composed of thin film PZT on organic layer. It is well-known that the PZT film shows excellent piezoelectric properties and is easy for microfabrication as MEMS devices. However deposition of PZT films need high process temperature as high as 500℃ which makes it difficult to integrate them on flexible organic materials. In this study we prepared PZT films on epitaxial MgO substrates in advance, and then they were glued onto adhesive polyimide layer. Finally the MgO substrates were etched away and the PZT films combined with the polyimide layer could be obtained as the hybrid materials. We have fabricated microactuators for micropumps using this film. The PZT films on the polyimide layer were integrated on Si substrates with microchannel and pressure cavities, and piezoelectric actuation was evaluated using laser Doppler displacement meter. We have observed clear piezoelectric displacement as high as 250nm at 10V, indicating the hybrid piezoelectric materials is useful for the MEMS applications.

  一般社団法人日本機械学会, 05 Aug. 2003, 年次大会講演論文集 : JSME annual meeting, 2003(7) (7), 225 - 226, Japanese


• Development of Frequency and Directivity Reconfigurable Millimeter Wave Antenna

  FUKUDA Yoshihisa, SAKIYAMA Kazuyuki, KANNO Isaku, KOTERA Hidetoshi

  This paper presents a frequency and directivity reconfigurable antenna for millimeter-wave communication. Reconfiguration is achieved by actuating conductor matrix element with micro actuator. The conductor matrix elements are arranged in the upper conductor layer and the lower conductor layer. If a distance between the upper and the lower conductor elements is short enough, the separated conductor elements act as continuous antenna line. By actuating the conductor elements, the electrically connected antenna line is easily disconnected. Consequently, the shape of antenna is reconfigured fitting to wavelength and receiving/radiating wave direction. As a first step, we have fabricated a millimeter antenna device and measured its characteristic. We have confirmed the characteristic radiation of the millimeter wave antenna, indicating this structure is effective to control the path of millimeter current.

  The Japan Society of Mechanical Engineers, 05 Aug. 2003, The proceedings of the JSME annual meeting, 2003(Vol.7) (Vol.7), 213 - 214, Japanese


• Study of piezoelectric valveless micropump driven by surface traveling waves

  YAKUSHIJI Shunsuke, KANNO Isaku, KAWANO Satoyuki, KOTERA Hidetoshi

  一般社団法人日本機械学会, 20 Jan. 2003, バイオエンジニアリング講演会講演論文集, 2003(15) (15), 229 - 230, Japanese


• A passive micromixer based on instability theory of interfacial wave growth

  SHINTAKU Hirofumi, KAWANO Satoyuki, KANNO Isaku, KOTERA Hidetoshi

  一般社団法人日本機械学会, 20 Jan. 2003, バイオエンジニアリング講演会講演論文集, 2003(15) (15), 231 - 232, Japanese


• Characterization of Transverse Piezoelectric Properties of Epitaxial Pb(Zr,Ti)O3 Thin Films

  I. Kanno, H. Kotera, K. Wasa

  2003, 4th Asian Meeting on Ferroelectrics (AFM-4), pp. 51, English

  [Refereed]


• Characterization of Piezoelectric Micropump Driven by Traveling Waves Isaku Kanno, Satoyuki Kawano, Shunsuke Yakushiji, Hidetoshi Kotera,

  I. Kanno, S. Kawano, S. Yakushiji, H. Kotera

  2003, Micro Total Analysis Systems 2003, pp. 997-1000, English

  [Refereed]


• Kelvin-Helmholtz Instability Theory in Development of Microfluidic Mixing System,

  S. Kawano, H. Shintaku, I. Kanno, H. Kotera

  2003, Micro System Technologies, pp. 571-573, English

  [Refereed]


• Frequency and Directivity Reconfigurable Antenna for Millimeter-Wave

  S. Kawano, H. Shintaku, I. Kanno, H. Kotera

  2003, Micro System Technologies, pp. 526-528,, English

  [Refereed]


• Crack Initiation at Free Edge of Interface between Piezoelectric Thin Films on a Substrate

  F. Shang, T. Kitamura, H. Hirakata, I. Kanno, H. Kotera, K. Terada

  2003, The 5th Euromech Solid Mechanics Conference, pp., English

  [Refereed]


• Micro cantilever actuator using ZnO thin film

  KOTERA Hidetoshi, MORIYAMA Yoshiya, KANNO Isaku, TAKAYAMA Ryouichi, SHIMA Susumu

  23 Oct. 1998, シンポジウム電磁力関連のダイナミックス講演論文集, 10, 483 - 486, Japanese


• ミスカットSrTiO3基板上のPbTiO3スパッタ薄膜の構造と薄膜成長機構－ミスカット角度の薄膜構造への影響－

  KANNO ISAKU

  日本表面科学会, 1998, 表面科学, 19(7) (7), 463 - 468, Japanese

  [Refereed]

  Introduction scientific journal

• Nanostructures in Ferroelectric Films for Energy Applications - Domains, Grains, Interfaces and Engineering Methods -

  Jun Oyang, KANNO ISAKU

  Others, Elsevier, 2019, English, Chap_8: "Fundamentals of piezoelectric thin films for microelectromechanical systems"

  Scholarly book


• Nanoscale Ferroelectric-Multiferroic Materials for Energy Harvesting Applications

  Hideo Kimura, Toshihito Umegaki, KANNO ISAKU

  Others, Elsevier, 2019, English, Chap9 "Structural optimization of piezoelectric thin-film vibration energy harvesters based on electric equivalent circuit model"

  Scholarly book


• 高分子圧電材料と無機圧電セラミックスの基礎から応用

  田實佳郎, KANNO ISAKU

  Others, シーエムシー出版, 2014, Japanese, 第4章 圧電セラミックスの薄膜化と圧電特性測定技術

  Scholarly book


• MEMS Fundamental Technology and Applications

  V. Choudhary, K. Iniewski, Kanno Isaku

  Others, CRC Press, 2013, English

  Scholarly book


• Energy Harvesting with Functional Materials and Microsystems

  M. Bhaskaran, S. Sriram, K. Iniewski, KANNO ISAKU

  Others, CRC Press, 2013, English, Chap 8"Piezoelectric Thin Films and Their Application to Vibration Energy Harvesters"

  Scholarly book


• 環境発電ハンドブック

  Suzuki Yuji, Kanno Isaku, 他

  Others, NTS, 2012, Japanese

  Scholarly book


• Integrated Microsystems

  Iniewski K, Kanno Isaku

  Others, CRC press, 2012, English

  Scholarly book

• Piezoelectric MEMS as a Micro-Power Source

  Isaku Kanno

  IEEE IFCS ISAF 2020, Jul. 2020

  [Invited]

  Keynote oral presentation


• Piezoelectric PZT Thin-Film Transformer with a Ring-Dot Structure

  Sanghyo Kweon, Kazuki Tani, Isaku Kanno

  第37回強誘電体会議, May 2020

  Oral presentation


• 両端支持ユニモルフ梁を用いた薄膜の正圧電係数の評価方法

  梅垣俊仁, 治京元気, 神野伊策

  第37回強誘電体会議, May 2020

  Oral presentation


• Si 基板上エピタキシャル(K, Na)NbO3薄膜の結晶構造および圧電特性の組成依存性

  蔡 慶政, 藤田 卓也, 譚 賡, 神野 伊策

  第67回応用物理学会春季学術講演会, Mar. 2020

  Oral presentation


• Si基板上エピタキシャルPb(Zr,Ti)O3薄膜の結晶構造と圧電特性の評価

  譚 ゴオン, Kim Eun-Ji, Kweon Sang-Hyo, 小金澤 智之, 神野 伊策

  第67回応用物理学会春季学術講演会, Mar. 2020

  Oral presentation


• 高温 Pt マイクロヒーターの開発

  天本 百合奈, 赤坂 俊輔, 神野 伊策

  第67回応用物理学会春季学術講演会, Mar. 2020

  Oral presentation


• Piezoelectric PZT thin-film transformers with a ring-dot structure

  SangHyo Kweon, Kazuki Tani, Isaku Kanno

  第67回応用物理学会春季学術講演会, Mar. 2020

  Poster presentation


• スパッタ法による積層誘電体薄膜作製技術

  神野 伊策

  第67回応用物理学会春季学術講演会, Mar. 2020

  Invited oral presentation


• 全固体リチウムイオン薄膜電池の多層化

  米田 宏太朗, 金澤 翔吾, 吉田 将康, 神野 伊策

  第67回応用物理学会春季学術講演会, Mar. 2020

  Oral presentation


• 圧電薄膜を用いた圧電トランスの設計、試作および評価

  谷 和樹, Kweon SangHyo, 神野 伊策, 肥田 博隆

  第10回 マイクロ・ナノ工学シンポジウム, Nov. 2019

  Poster presentation


• SSPDの高性能化に向けたNbTiN薄膜の成膜条件の検討

  藤井 勇磨, 知名 史博, 薮野 正裕, 寺井 弘高, 神野 伊策, 三木 茂人

  第80回応用物理学会秋季学術講演会, Sep. 2019

  Oral presentation


• Si基板上のエピタキシャル(K,Na)NbO3薄膜の結晶構造および圧電特性の評価

  譚 ゴオン, 藤田 卓也, Kweon, Sang Hyo, 小金澤 智之, 神野 伊策

  第80回応用物理学会秋季学術講演会, Sep. 2019

  Oral presentation


• (K, Na)NbO3薄膜への添加物効果

  藤田 卓也, 譚 賡, 神野 伊策

  第80回応用物理学会秋季学術講演会, Sep. 2019

  Oral presentation


• RFスパッタリング装置を用いたガラス基板上へのPZT薄膜成膜

  上田 一貴, 神野 伊策

  第80回応用物理学会秋季学術講演会, Sep. 2019

  Poster presentation


• 圧電薄膜を用いた振動発電技術

  神野伊策

  第83回半導体・集積回路技術シンポジウム, Aug. 2019

  Invited oral presentation


• シンクロトロン放射光X線回折を用いたエピタキシャルPZT薄膜の微視的圧電特性組成依存性評価

  譚 賡, 神野伊策

  強誘電体応用会議2019, May 2019

  Oral presentation


• Correlation of vibration generator characterization and thickness of organic piezoelectric energy harvesters

  KOBAYASHI AKIKO, HORIKE SHOHEI, KOSHIBA YASUKO, FUKUSHIMA TATSUYA, KANNO ISAKU, ISHIDA KENJI

  第66回応用物理学会春季学術講演会, Mar. 2019, Japanese, 応用物理学会, 東京都, Domestic conference

  Poster presentation


• 圧電薄膜を用いた振動発電素子開発

  KANNO ISAKU

  IIP2019 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2019, Japanese, 東洋大学, Domestic conference

  [Invited]

  Invited oral presentation


• 圧電薄膜を用いた振動発電技術

  KANNO ISAKU

  第66回応用物理学会春季学術講演会, Mar. 2019, Japanese, 東京工業大学, Domestic conference

  [Invited]

  Invited oral presentation


• V2O5正極を用いた全固体リチウムイオン薄膜電池の作製

  KANNO ISAKU, 金澤翔吾, 馬場 友章

  第66回応用物理学会春季学術講演会, Mar. 2019, Japanese, 東京工業大学, Domestic conference

  Oral presentation


• (K, Na)NbO3薄膜へのドーピング効果

  KANNO ISAKU, 譚 ゴオン, 藤田 卓也, 西岡 慎太郎

  第66回応用物理学会春季学術講演会, Mar. 2019, Japanese, 東京工業大学, Domestic conference

  Oral presentation


• マイクロフォースセンサを用いた根の機械的性質の解析

  HIDA HIROTAKA, 伊黒 大祐, KANNO ISAKU, 野田口 理孝

  IIP2019 情報・知能・精密機器部門（IIP部門）講演会, 2019, Japanese, Domestic conference

  Oral presentation


• Equivalent circuit model of piezoelectric vibration energy harvesters composed of trapezoidal unimorph cantilevers

  Umegaki, Takashi Ito, 譚 ゴオン, Isaku Kanno

  PowerMEMS2018, Dec. 2018, English, FL, USA, International conference

  Poster presentation


• Sputtering deposition of piezoelectric PZT thin films for MEMS applications

  Isaku Kanno

  71th ICAT, Oct. 2018, English, Penn State, USA, International conference

  [Invited]

  Invited oral presentation


• 電圧印加における非鉛(K,Na)NbO3薄膜の結晶構造変化その場観察

  KANNO ISAKU, 譚 ゴオン, 西岡 慎太郎, 小金澤 智之, 梅垣 俊仁

  第79回応用物理学会秋季学術講演会, Sep. 2018, Japanese, 名古屋国際会議場, Domestic conference

  Oral presentation


• 圧電薄膜技術：基礎研究から実用化まで

  KANNO ISAKU

  2018年度日本機械学会年次大会, Sep. 2018, Japanese, 関西大学, Domestic conference

  Keynote oral presentation


• Vibration generator characterization of unimorph cantilever organic piezoelectric films

  KOBAYASHI AKIKO, HORIKE SHOHEI, KOSHIBA YASUKO, FUKUSHIMA TATSUYA, KANNO ISAKU, ISHIDA KENJI

  第79回応用物理学会秋季学術講演会, Sep. 2018, Japanese, 応用物理学会, 名古屋市, Domestic conference

  Poster presentation


• V2O5正極を用いた全固体リチウムイオン薄膜電池の作製

  KANNO ISAKU, 馬場 友章, 金澤 翔吾

  第79回応用物理学会秋季学術講演会, Sep. 2018, Japanese, 名古屋国際会議場, Domestic conference

  Oral presentation


• PZT thin-film Piezoelectric Vibration Energy Harvesters

  Isaku Kanno

  The 10th Japan-China Symposium on Ferroelectric Materials and Their Applications (JCFMA10), Sep. 2018, English, Inuyama, Japan, International conference

  [Invited]

  Invited oral presentation


• Pb(Zr,Ti)O3圧電薄膜の正圧電特性の温度依存性に関する研究

  KANNO ISAKU, 譚 ゴオン, 梅垣 俊仁, 金光 勇弥

  第79回応用物理学会秋季学術講演会, Sep. 2018, Japanese, 名古屋国際会議場, Domestic conference

  Oral presentation


• In-situ synchrotron diffraction study of epitaxial and polycrystalline Pb(Zr,Ti)O3 thin filmsunder an applied electric field

  Umegaki, Kohei Issiki, Isaku Kanno

  The 10th Japan-China Symposium on Ferroelectric Materials and Their Applications (JCFMA10), Sep. 2018, English, Kobe, Japan, International conference

  Poster presentation


• Doping effect of lead-free K0.5Na0.5NbO3 thin films by multi-target RF-magnetron sputtering

  Shintaro Nishioka, 譚 ゴオン, Umegaki, Isaku Kanno

  IWPMA2018, Sep. 2018, English, Kobe, Japan, International conference

  Oral presentation


• (K,Na)NbO3および(Pb,La)TiO3薄膜を用いた光起電力特性評価

  KANNO ISAKU, 逢坂 広己, 向山 義治

  第79回応用物理学会秋季学術講演会, Sep. 2018, Japanese, 名古屋国際会議場, Domestic conference

  Oral presentation


• Numerical Designs of Thin-Film-Formed Piezoelectric Vibration Energy Harvesters

  Umegaki, 伊藤 喬, T. Nishi, 譚 ゴオン, Isaku Kanno

  2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP2018), May 2018, English, Hiroshima, Japan, International conference

  Oral presentation


• Direct Observation of Inverse Piezoelectric Effect of Pb(Zr,Ti)O3 Thin Films Using Synchrotron X-ray Diffraction

  譚 ゴオン, 丸山 和樹, 金光 勇弥, 西岡 慎太郎, 逢坂 広己, T. Koganezawa, Umegaki, Isaku Kanno

  2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP2018), May 2018, English, Hiroshima, Japan, International conference

  Oral presentation


• A Newly Developed High Performance PZT Thin Films by Using Sputtering and Sol-Gel Hybrid Method for Piezo-MEMS Device

  T. Date, K. Nomura, Y. Fujimori, T. Nagahata, Isaku Kanno

  2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP2018), May 2018, English, Hiroshima, Japan, International conference

  Oral presentation


• ナノエネルギ―技術への期待と展望

  KANNO ISAKU

  日本学術振興会 薄膜第131委員会 第283回委員会・第289回研究会, Apr. 2018, Japanese, 京都テルサ, Domestic conference

  [Invited]

  Invited oral presentation


• 等価回路モデルを用いた圧電薄膜振動発電素子の設計と評価

  KANNO ISAKU, 梅垣俊仁, 伊藤喬, 西崇仁, 譚 ゴオン

  IIP2018 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2018, Japanese, 東洋大学, Domestic conference

  Oral presentation


• V2O5正極を用いた全固体薄膜リチウムイオン電池の作製とその評価

  KANNO ISAKU, 金澤翔吾, 馬場友章, 肥田博隆

  IIP2018 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2018, Japanese, 東洋大学, Domestic conference

  Oral presentation


• Pb(Zr,Ti)O3薄膜の電圧印加結晶構造変化の組成依存性

  KANNO ISAKU, 譚 ゴオン, 丸山 和樹, 金光 勇弥, 西岡 慎太郎, 逢坂 広己, 小金澤 智

  第65回応用物理学会春季学術講演会, Mar. 2018, Japanese, 早稲田大学, Domestic conference

  Oral presentation


• 機械的ストレス下における植物の根系発達過程の解析手法

  HIDA HIROTAKA, 西脇 大維, KANNO ISAKU, 野田口 理孝

  電気学会センサ・マイクロマシン部門 部門大会 第35回「センサ・マイクロマシンと応用システムシンポジウム」, 2018, Japanese, Domestic conference

  Poster presentation


• マイクロフォースセンサを用いた根の成長挙動解析

  伊黒 大祐, HIDA HIROTAKA, 尾添 克哉, KANNO ISAKU, 野田口 理孝

  日本機械学会2018年度年次大会, 2018, Japanese, Domestic conference

  Oral presentation


• マイクロピラーアレイを用いた根の機械的ストレス応答の解析

  HIDA HIROTAKA, 西脇 大維, KANNO ISAKU, 野田口 理孝

  日本機械学会2018年度年次大会, 2018, Japanese, Domestic conference

  Oral presentation


• In-situ observation of crystallographic deformation of Pb(Zr,Ti)O3 thin films by synchrotron x-ray diffraction

  譚 ゴオン, 丸山 和樹, 金光 勇弥, 西岡 慎太郎, T. Koganezawa, Isaku Kanno

  6th International Workshop on Piezoelectric MEMS (PiezoMEMS2018), Jan. 2018, English, Orlando, FL, International conference

  Poster presentation


• THE PIEZOELECTRIC PZT THIN FILMS DEPOSITED ON METAL SUBSTRATES

  Takashi Ito, Takahito Nishi, Toshihito Umegaki, 肥田 博隆, Isaku Kanno

  PowerMEMS2017, Nov. 2017, English, Kanazawa, Japan, International conference

  Poster presentation


• Orientation Dependence of Power Generation on Piezoelectric Energy Harvesting Using Stretched Ferroelectric Polymer Films

  KOBAYASHI AKIKO, KOSHIBA YASUKO, UENO YOSHIKAZU, KAJIHARA TADAO, TSUJIURA YUICHI, MORIMOTO MASAHIRO, HORIKE SYOHEI, FUKUSHIMA TATSUYA, KANNO ISAKU, ISHIDA KENJI

  The 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications （Power MEMS 2017), Nov. 2017, English, 日本機械学会, 金沢市, International conference

  Poster presentation


• MULTILAYER PIEZOELECTRIC MEMS ENERGY HARVESTER BASED ON LONGITUDINAL EFFECT

  R. Nakanishi, 藤田 卓也, Isaku Kanno, K. Maenaka

  PowerMEMS2017, Nov. 2017, English, Kanazawa, Japan, International conference

  Oral presentation


• IEZOELECTRIC PZT THIN FILMS DEPOSITED ON STAINLESS STEEL MESH

  Takahito Nishi, Takashi Ito, Toshihito Umegaki, Isaku Kanno

  PowerMEMS2017, Nov. 2017, English, Kanazawa, Japan, International conference

  Oral presentation


• DEVELOPMENT OF PIEZOELECTRIC VIBRATION ENERGY HARVESTERS FOR BATTERY-LESS SMART SHOES

  H. Katsumura, T. Konishi, H. Okumura, T. Fukui, M. Katsu, T. Terada, Umegaki Toshihito, Isaku Kanno

  PowerMEMS2017, Nov. 2017, English, Kanazawa, Japan, International conference

  Poster presentation


• Piezoelectric Vibration Energy Harvesters with Organic Ferroelectric Films

  ISHIDA KENJI, KANNO ISAKU

  第78回応用物理学会秋季学術講演会, Sep. 2017, Japanese, 応用物理学会, 福岡市, Domestic conference

  [Invited]

  Invited oral presentation


• 圧電薄膜とMEMSデバイス応用

  KANNO ISAKU

  日本セラミックス協会 第30回秋季シンポジウム, Sep. 2017, Japanese, 神戸大学, Domestic conference

  [Invited]

  Invited oral presentation


• シューズ埋め込み型圧電振動発電素子の作製・評価

  KANNO ISAKU, 西崇 仁, 伊藤 喬, 梅垣 俊仁, 肥田 博隆

  2017年度日本機械学会年次大会, Sep. 2017, Japanese, 埼玉大学, Domestic conference

  Oral presentation


• インセクトスケールロボットを目的とした圧電薄膜アクチュエータの作製

  KANNO ISAKU, 西村 望, 肥田 博隆

  017年度日本機械学会年次大会, Sep. 2017, Japanese, 埼玉大学, Domestic conference

  Oral presentation


• Pb(Zr,Ti)O3圧電薄膜の電気的信頼性評価に関する研究

  KANNO ISAKU, 金光 勇弥, 譚 ゴオン, 梅垣 俊仁, 肥田 博隆

  第78回応用物理学会秋季学術講演会, Sep. 2017, Japanese, 福岡国際会議場, Domestic conference

  Oral presentation


• Pb(Zr,Ti)O3圧電薄膜の逆圧電効果による結晶構造変化のその場観察

  KANNO ISAKU, 譚 ゴオン, 丸山 和樹, 金光 勇弥, 西岡 慎太郎, 小金澤 智之, 梅垣 俊仁, 小金澤 智之, 梅垣 俊仁, 肥田 博隆

  福岡国際会議場, Sep. 2017, Japanese, Domestic conference

  Oral presentation


• Measurement of piezoelectric characteristics of thin films

  KANNO ISAKU

  International workshop on piezoelectric materials and applications (IWPMA2017), Sep. 2017, English, Virginia, International conference

  [Invited]

  Invited oral presentation


• 圧電薄膜を利用した振動発電

  KANNO ISAKU

  応用物理学会 薄膜・表面分科会 セミナー, Jul. 2017, Japanese, 産総研 臨海副都心センター, Domestic conference

  [Invited]

  Invited oral presentation


• ディップコート法による金属箔上へのPZT薄膜の作製と評価

  KANNO ISAKU, 濱村朋広, 肥田博隆

  強誘電体応用会議, Jun. 2017, Japanese, 京都, Domestic conference

  Oral presentation


• Evaluation of piezoelectric characteristics of thin films for MEMS applications

  KANNO ISAKU

  8th International Conference on Electroceramics (ICE2017), May 2017, English, Nagoya, International conference

  [Invited]

  Invited oral presentation


• 薄膜型全固体リチウムイオン電池の作製と評価

  KANNO ISAKU, 馬場 友章, 肥田 博隆

  IIP2017 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2017, Japanese, 東洋大学 白山キャンパス, Domestic conference

  Oral presentation


• ディップコート法によるステンレス箔上へのPZT薄膜の作製

  KANNO ISAKU, 濱村 朋広, 肥田 博隆

  第64回応用物理学会春季学術講演会, Mar. 2017, Japanese, パシフィコ横浜, Domestic conference

  Oral presentation


• PZT薄膜を用いた圧電型エナジーハーベスターの作製と評価

  KANNO ISAKU, 伊藤 喬, 西 崇仁, 肥田 博隆

  IIP2017 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2017, Japanese, 東洋大学 白山キャンパス, Domestic conference

  Oral presentation


• Pb(Zr,Ti)O3薄膜の斜め成膜およびその特性評価に関する研究

  KANNO ISAKU, 丸山 和樹, 肥田 博隆, 寺元 卓也

  第64回応用物理学会春季学術講演会, Mar. 2017, Japanese, パシフィコ横浜, Domestic conference

  Oral presentation


• Design and characterization of cantilever-type piezoelectric MEMS microphones

  KANNO ISAKU, Shota Nakagawa, Hirotaka Hida

  International Symposium on Micro-Nano Science and Technology 2016, Dec. 2016, English, Tokyo, International conference

  Oral presentation


• 根の成長パターン解析を目的としたマイクロピ ラーデバイスの開発

  西脇 大維, HIDA HIROTAKA, 東山 哲也, 野田口 理孝, 神野 伊策

  日本機械学会 2016年度年次大会, Sep. 2016, Japanese, Domestic conference

  Oral presentation


• 圧電薄膜振動子を用いたシリンダー型 MEMS ジャイロスコープの特性評価

  HIDA HIROTAKA, 富士原 孝裕, 神野 伊策

  日本機械学会 2016年度年次大会, Sep. 2016, Japanese, Domestic conference

  Oral presentation


• Shoe-mounted vibration energy harvester of PZT piezoelectric thin films on metal foils

  KANNO ISAKU, Takahito Nishi, Takashi Ito, Hirotaka Hida

  The 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2016), Sep. 2016, English, Pari, France, International conference

  Oral presentation


• Piezoelectric Thin Films on Metal Substrates for Flexible and Robust Energy Harvesting

  KANNO ISAKU

  11th Energy harvesting workshop, Sep. 2016, English, Arlington, Virginia, USA, International conference

  [Invited]

  Invited oral presentation


• Measurement method of transverse piezoelectric properties of thin films

  KANNO ISAKU

  第8回日中強誘電体応用会議, Sep. 2016, English, 筑波, International conference

  [Invited]

  Invited oral presentation


• KNN 薄膜を用いた光起電力特性評価

  大地 優平, HIDA HIROTAKA, 神野 伊策

  第77回応用物理学会秋季学術講演会, Sep. 2016, Japanese, 朱鷺メッセ, Domestic conference

  Poster presentation


• Compositional dependence of BaTiO3-xBaSnO3 piezoelectric thin films prepared by combinatorial sputtering

  KANNO ISAKU, Hongbo Cheng, Takuya Teramot, Hirotaka Hida, Jun Ouyang

  第8回日中強誘電体応用会議, Sep. 2016, English, 筑波, International conference

  Oral presentation


• Compositional dependence of BaTiO3-xBaSnO3 piezoelectric thin films prepared by combinatorial sputtering

  Hongbo Cheng, Takuya Teramoto, HIDA HIROTAKA, Isaku Kanno, Jun Ouyang

  第77回応用物理学会秋季学術講演会, Sep. 2016, English, 朱鷺メッセ, Domestic conference

  Oral presentation


• Sputtering deposition of piezoelectric thin films

  KANNO ISAKU

  the 13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016, Aug. 2016, English, Jeju, Korea, International conference

  [Invited]

  Invited oral presentation


• Multilayer piezoelectric thin films

  KANNO ISAKU

  5th International Workshop on Piezoelectric MEMS, May 2016, English, Grenoble, France, International conference

  [Invited]

  Invited oral presentation


• 薄膜材料の正・逆圧電特性評価

  KANNO ISAKU, Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka Hida

  第63回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference

  Oral presentation


• 積層圧電薄膜の作製およびその実効的圧電特性評価

  KANNO ISAKU, Hirotaka Hida, Ryosuke Yamamoto, Fumiya Kurokawa, Yuichi Tsujiura, Natumi Makimoto, Ken Kobayasi

  第66回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference

  Oral presentation


• コンビナトリアルスパッタ法を用いたPMN-PZ-PT薄膜の組成依存性評価

  KANNO ISAKU, Hirotaka Hida, Yuichi Tsujiura, Fumiya Kurokawa, Takuya Teramoto

  第64回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference

  Oral presentation


• PZT圧電薄膜の正圧電特性経時変化

  KANNO ISAKU, Hirotaka Hida, Fumiya Kurokawa, Yuichi Tsujiura, Takahito Nish

  第65回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference

  Oral presentation


• 圧電MEMSとエナジーハーベスティング応用

  KANNO ISAKU

  第20回 関西大学先端科学技術シンポジウム, Jan. 2016, Japanese, 吹田市, Domestic conference

  [Invited]

  Invited oral presentation


• PIEZOELECTRIC MEMS FOR ENERGY HARVESTING

  KANNO ISAKU

  "The 15th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2015) Journal of Physics: Conference Series", Dec. 2015, English, Boston, USA, International conference

  Oral presentation


• オンチップ力計測手法による根の成長メカニズム解析

  尾添 克哉, HIDA HIROTAKA, 神野 伊策, 東山 哲也, 野田口 理孝

  化学とマイクロ・ナノシステム学会第32回研究会, Nov. 2015, Japanese, Domestic conference

  Poster presentation


• 圧電薄膜アクチュエータを用いたインセクトスケール圧電ロボットの作製と評価

  Takumi Iwasaki, Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka, Hida, Isaku Kanno

  第 7 回マイクロ・ナノ工学シンポジウム, Oct. 2015, Japanese, 新潟県, Domestic conference

  Oral presentation


• ステンレス基板上PZT薄膜の光誘起ひずみ効果

  KANNO ISAKU, Atsuro Sadand, Yuhei Och, Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida

  第76回応用物理学会秋季学術講演会, Sep. 2015, Japanese, 名古屋, Domestic conference

  Oral presentation


• Self-excited vibration energy harvesters of PZT thin films on stainless-steel cantilevers by airflow

  Isaku Kanno, Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka, Hida

  10th Energy Harvesting Workshop, Sep. 2015, English, Virginia, USA, International conference

  Oral presentation


• Pb(Hf,Ti)O3薄膜の作製と組成依存性評価

  KANNO ISAKU, Shogo Nishio, Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida

  第76回応用物理学会秋季学術講演会, Sep. 2015, Japanese, 名古屋市, Domestic conference

  Oral presentation


• Piezoelectric thin films for MEMS

  KANNO ISAKU

  the 7th China-Japan Symposium on Ferroelectric Materials and Their Applications, Aug. 2015, English, Beijin, China, International conference

  Oral presentation


• Reliability of vibration energy harvesters of PZT thin films on stainless steel cantilevers

  Isaku Kanno, Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka Hida

  2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, Jun. 2015, English, Kobe, International conference

  Oral presentation


• Development of simple microrob ot using piezoelectric thin film actuator on metal substrate

  Isaku Kanno, Hirotaka Hida, Yuki Morita, Fumiya Kurokawa, Yuichi Tsujiura

  2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, Jun. 2015, English, Kobe, International conference

  Oral presentation


• 正・逆圧電効果によるPZT薄膜の圧電定数e31,fの測定

  KANNO ISAKU, Yuichi Tsujiura, Saneyuki Kawabe, Fumiya Kurokawa, Hirotaka Hida

  強誘電体応用会議, May 2015, Japanese, 京都市, Domestic conference

  Oral presentation


• 圧電薄膜のMEMS応用

  KANNO ISAKU

  強誘電体応用会議, May 2015, Japanese, 京都市, Domestic conference

  Oral presentation


• 自励振動を利用した圧電薄膜気流振動発電素子

  TSUJIURA Yuichi, SUWA Eisaku, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  第62回応用物理学会春季学術講演会, Mar. 2015, Japanese, Domestic conference

  Oral presentation


• UV-LED光駆動の圧電薄膜アクチュエータの作製

  KUROKAWA Fumiya, OHCHI Yuhei, SADANDA Atsuro, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku

  第62回応用物理学会春季学術講演会, Mar. 2015, Japanese, Domestic conference

  Oral presentation


• Piezoelectric vibration energy harvesters with stretched and multi-stacked organic ferroelectric films

  KAJIHARA TADAO, YOSHIKAZU UENO, TSUJIURA YUICHI, KOSHIBA YASUKO, MISAKI MASAHIRO, KANNO ISAKU, ISHIDA KENJI

  Fourth International Conference on Multifunctional, Hybrid and Nanomaterials (Hybrid Materials 2015), Mar. 2015, English, Spain, International conference

  Poster presentation


• Pb(Hf,Ti)O3薄膜の作製と圧電特性評価

  NISHIO Shogo, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  第62回応用物理学会春季学術講演会, Mar. 2015, Japanese, Domestic conference

  Oral presentation


• 自励振動を利用した圧電薄膜気流発電素子

  SUWA Eisakui, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  平成26年度応用物理学会関西支部第3回講演会, Feb. 2015, Japanese, Domestic conference

  Oral presentation


• UV-LED光駆動圧電薄膜アクチュエータの作製

  KUROKAWA Fumiya, Ohchi Yuhei, SADANDA Atsuro, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku

  平成26年度応用物理学会関西支部第3回講演会, Feb. 2015, Japanese, Domestic conference

  Oral presentation


• 積層圧電薄膜を用いた高効率MEMSアクチュエータの開発

  KUROKAWA Fumiya, KISHIMOTO Shinya, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku

  第53回セラミックス基礎科学討論会, Jan. 2015, Japanese, Domestic conference

  Oral presentation


• スパッタ法を用いたLi4Ti5O12薄膜の作製とその評価

  OKAMOTO Kazuma, KUROKAWA Fumiya, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku, MIZUHATA Minoru

  第53回セラミックス基礎科学討論会, Jan. 2015, Japanese, Domestic conference

  Oral presentation


• 正・逆圧電効果による PZT 薄膜の圧電定数 e31,f の評価

  KAWABE Saneyuki, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• 金属基板上圧電薄膜アクチュエータを用いたミリメータスケールロボットの作製

  MORITA Yuki, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• 金属基板上 PZT 薄膜を用いた振動発電素子の信頼性評価に関する研究

  TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• 金属基板上 PZT 薄膜を用いた自励振動発電素子の評価

  SUWA Eisakui, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• ウエットエッチングによる圧電薄膜の PDMS 基板上への転写技術

  HIROTAKA Hida, YAGAMI Shuni, SUWA Eisaku, TSUJIURA Yuichi, KUROKAWA Fumiya, KANNO Isaku

  第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• PZT 圧電薄膜および圧電 MEMS デバイスの信頼性評価

  KANNO Isaku, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida

  第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference

  Oral presentation


• Correlation of vibration generator characterization and molecular orientation of organic piezoelectric energy harvesters

  梶原 忠夫, 上野 慶和, 辻浦 裕一, KOSHIBA YASUKO, MISAKI MASAHIRO, KANNO ISAKU, ISHIDA KENJI

  2014年秋季第76回応用物理学会学術講演会, Sep. 2014, Japanese, 応用物理学会, 札幌市, Domestic conference

  Oral presentation


• Pyro-, Piezoelectric and Power Generation Properties of Polyurea Thin Films

  森本 勝大, 辻浦 裕一, KOSHIBA YASUKO, MISAKI MASAHIRO, KANNO ISAKU, ISHIDA KENJI

  2014年秋季第77回応用物理学会学術講演会, Sep. 2014, Japanese, 応用物理学会, 札幌市, Domestic conference

  Oral presentation


• コンビナトリアルスパッタ法による BZT-BCT 圧電薄膜の組成依存性評価

  KUROKAWA Fumiya, MORI Akira, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku

  2014年 第75回応用物理学会秋季学術講演会, Sep. 2014, Japanese, Domestic conference

  Oral presentation


• High-throughput Chemotaxis Assay of Plant-parasitic Nematode by Using a Microchannel Device

  H. Hida, M. Matsumura, I. Kanno, H. Nishiyama, S. Sawa, T. Higashiyama, H. Arata

  International ERATO Higashiyama Live-Holonics Symposium 2014 "Plant Live-Cell Imaging and Microdevices", Sep. 2014, English, International conference

  Poster presentation


• Vibration power generation and anisotropic piezoelectric effect of uniaxially-stretched ferroelectric polymer films.

  梶原 忠夫, 上野 慶和, 辻浦 裕一, KOSHIBA YASUKO, MISAKI MASAHIRO, KANNO ISAKU, ISHIDA KENJI

  第60回高分子研究発表会(神戸）, Jul. 2014, Japanese, 神戸市, Domestic conference

  Oral presentation


• 有機圧電型エナジーハーベスターの特性評価

  梶原 忠夫, 上野 慶和, 辻浦 裕一, KOSHIBA YASUKO, MISAKI MASAHIRO, KANNO ISAKU, ISHIDA KENJI

  応用物理学会関西支部平成26年第1回講演会, Jun. 2014, Japanese, 京都市, Domestic conference

  Poster presentation


• 植物寄生性センチュウのハイスループット化学走性分析用デバイス

  HIDA HIROTAKA, 松村 匡隆, ISAKU KANNO, 西山 英孝, 澤 進一郎, 東山 哲也, 新田 英之

  化学とマイクロ・ナノシステム学会 第29回研究会, May 2014, Japanese, 日本女子大学 目白キャンパス, Domestic conference

  Poster presentation


• コンビナトリアルスパッタ法による PMN-PT 圧電薄膜の組成依存性評価

  KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku

  第31回強誘電体応用会議, May 2014, Japanese, Domestic conference

  Oral presentation


• 着脱式マイクロ流路チップを用いたゾル-ゲル法によるPZT薄膜の直接パターニング技術

  HIDA HIROTAKA, YAGAMI SHUN, KANNO ISAKU

  第61回応用物理学会春季学術講演会, Mar. 2014, Japanese, Domestic conference

  Oral presentation


• スパッタ法を用いた Li4Ti5O12薄膜の作製とその評価

  OKAMOTO KAZUMA, KUROKAWA FUMIYA, HIDA HIROTAKA, KANNO ISAKU, MIZUHATA MINORU

  第61回応用物理学会春季学術講演会, Mar. 2014, Japanese, Domestic conference

  Oral presentation


• コンビナトリアル成膜によるPLZT薄膜の組成依存性評価

  NISHIO SHOGO, KUROKAWA FUMIYA, HIDA HIROTAKA, KANNO ISAKU

  第61回応用物理学会春季学術講演会, Mar. 2014, Japanese, Domestic conference

  Oral presentation


• 植物寄生性センチュウの行動分析用マイクロ流路デバイス:流路規格および流路内物質濃度分布の検証

  肥田 博隆, 西山 英孝, 澤 進一郎, 神野 伊策, 東山 哲也, 新田 英之

  第5回 マイクロ・ナノ工学シンポジウム, Nov. 2013, Japanese, 日本機械学会マイクロ・ナノ工学部門, 仙台国際センター(仙台市), Domestic conference

  Oral presentation


• スパッタ法で作製したPZT薄膜積層アクチュエータ

  岸本 真哉, 辻浦 裕一, 黒川 文弥, 肥田 博隆, 神野 伊策

  第5回 マイクロ・ナノ工学シンポジウム, Nov. 2013, Japanese, 仙台国際センター(仙台市), Domestic conference

  Oral presentation


• ステンレス基板上圧電薄膜を用いた MEMS エナジ ーハーベスター

  辻浦 裕一, 諏訪 英作, 肥田 博隆, 末永 和史, 柴田 憲治, 神野 伊策

  日本機械学会 2013 年度年次大会, Sep. 2013, Japanese, 岡山大学津島キャンパス(岡山市), Domestic conference

  Oral presentation


• コンビナトリアル成膜法による PMN-PT薄膜の組成依存性評価

  黒川 文弥, 冨岡 宏平, 肥田 博隆, 神野 伊策

  日本機械学会 2013 年度年次大会, Sep. 2013, Japanese, 岡山大学津島キャンパス(岡山市), Domestic conference

  Oral presentation


• Piezoelectric thin films

  Kanno Isaku

  IEEE 2013 Joint UFFC, EFTF, and PFM Symposium, Jul. 2013, English, IEEE, プラハ, International conference

  Public discourse


• Composition depndence of PMN-PT thin films prepared by combinatorial sputtering

  Kurokawa Fumiya, Tomioka Kohei, Hida Hirotaka, Kanno Isaku

  IEEE 2013 Joint UFFC, EFTF, and PFM Symposium, Jul. 2013, English, IEEE, プラハ, International conference

  Poster presentation


• ステンレス基板上非鉛KNN薄膜を用いたMEMSエナジーハーベスター

  Tsujiura Yuichi, Siwa Eisaku, Suenaga Kazushi, Shibata Kenji, Kanno Isaku

  第３０回強誘電体応用会議, May 2013, Japanese, 京都市, Domestic conference

  Oral presentation


• Piezoelectric MEMS of lead-free KNN thin films

  Kanno Isaku

  3rdInternational PiezoMEMS Workshop, Apr. 2013, English, ワシントンDC, International conference

  [Invited]

  Invited oral presentation


• 非鉛圧電薄膜(K,Na)NbO3の微細加工技術

  Kurokawa Fumiya, Yokokawa Ryuji, Kotera Hidetoshi, Sato Masashi, Shibata Kenji, Kanno Isaku

  IIP2013情報・知能・精密機器部門講演会, Mar. 2013, Japanese, 日本機械学会, 東京, Domestic conference

  Oral presentation


• 金属基板上PZT薄膜を利用したジャイロセンサーの開発に関する研究

  fujihara takahiro, Kanno Isaku

  IIP2013情報・知能・精密機器部門講演会, Mar. 2013, Japanese, 日本機械学会, 東京, Domestic conference

  Oral presentation


• シリコン基板上に作製したPZT薄膜積層アクチュエータ

  Kisimoto Sinya, Kurokawa Fumiya, Kanno Isaku

  応用物理学会春季学術講演, Mar. 2013, Japanese, 応用物理学会, 東京, Domestic conference

  Oral presentation


• コンビナトリアル成膜によるBZT-BCT薄膜の組成依存性評価

  Mori Akira, Kurokawa Fumiya, Kanno Isaku

  応用物理学会春季学術講演, Mar. 2013, Japanese, 応用物理学会, 東京, Domestic conference

  Oral presentation


• エピタキシャルPZT薄膜を用いた高効率圧電型振動発電素子に関する研究

  suwa eisaku, Tsujiura Yuichi, Kanno Isaku

  IIP2013情報・知能・精密機器部門講演会, Mar. 2013, Japanese, 日本機械学会, 東京, Domestic conference

  Oral presentation


• PIEZOELECTRIC MEMS ENERGY HARVESTERS OF PZT THIN FILMS ON STAINLESS STEEL CANTILEVERS

  Tsujiura Yuichi, Kanno Isaku

  he 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2012), Dec. 2012, English, Atranta, USA, International conference

  Poster presentation


• シリコン基板上に作製したPZT薄膜積層アクチュエータ

  Kisimoto Sinya, Kanno Isaku

  第53回真空に関する連合講演会, Nov. 2012, Japanese, 日本真空学会, 甲南大学ポートアイランドキャンパス, Domestic conference

  Oral presentation


• コンビナトリアル成膜法によるBZT-BCT非鉛圧電薄膜の作製と圧電特性評価

  Mori Akira, Kanno Isaku

  第53回真空に関する連合講演会, Nov. 2012, Japanese, 日本真空学会, 甲南大学ポートアイランドキャンパス, Domestic conference

  Oral presentation


• Fabrication and characterization of lead-free piezoelectric thin films

  Patpicha Ratanapreechachai, Kanno Isaku

  International Conference on Emerging Trends in Engineering & Technology (ICETET-12), Nov. 2012, English, IEEE, 姫路, International conference

  Oral presentation


• 金属基板を用いたPZT圧電薄膜エナジーハーベスト

  Tsujiura Yuichi, Kanno Isaku

  第4回マイクロ・ナノ工学シンポジウム, Oct. 2012, Japanese, 日本機械学会, 北九州, Domestic conference

  Oral presentation


• RFマグネトロンスパッタ法によるPMN－PT薄膜の圧電特性

  Tomioka Kohei, Yokokawa Ryuji, Kotera Hidetoshi, Kanno Isaku

  第4回マイクロ・ナノ工学シンポジウム, Oct. 2012, Japanese, 日本機械学会, 北九州, Domestic conference

  Oral presentation


• MEMS Energy Harvesters of Piezoelectric Thin Films

  Kanno Isaku

  2012 IEEE Nanotechnology Material and Devices Conference (IEEE-NMDC 2012), Oct. 2012, English, IEEE, Hawaii, USA, International conference

  [Invited]

  Invited oral presentation


• Fabrication and characterization of lead-free piezoelectri thin films

  Patpicha Ratanapreechachai, Kanno Isaku

  第4回マイクロ・ナノ工学シンポジウム, Oct. 2012, English, 日本機械学会, 北九州, Domestic conference

  Poster presentation


• 非鉛圧電薄膜(K,Na)NbO3を用いたMEMSデバイス作製及び評価

  Kurokawa Fumiya, Kanno Isaku, Yokokawa Ryuji, Kotera Hidetoshi, Horikiri F, Shibata K, Mishima T

  2012年秋季 第73回応用物理学会学術講演会, Sep. 2012, Japanese, 応用物理学会, 愛媛大学・松山大学, Domestic conference

  Oral presentation


• PZT圧電薄膜を用いた振動発電素子

  Kanno Isaku

  日本学術振興会第161委員会第78回研究会 「エネルギーハーベスト」, Sep. 2012, Japanese, 日本学術振興会, 名古屋大学, Domestic conference

  [Invited]

  Nominated symposium


• Piezoelectric Energy Harvesters of Lead-Free (K, Na)NbO3 Thin Films

  Kanno Isaku

  CMOS Emerging Technologies 2012, Jul. 2012, English, Vancouver, Canada, International conference

  Oral presentation


• Microfabrication of Lead-Free (Ka,Na)NbO3 Piezoelectric Thin Films by Dry Etching

  Kurokawa Fumiya, Kanno Isaku, Yokokawa Ryuji, Kotera Hidetoshi, Horikiri F, Shibata K, Mishima T

  Nano Technologies, Jul. 2012, English, Nanjin, Chaina, International conference

  [Invited]

  Oral presentation


• Microfabrication of Lead-Free (Ka,Na)NbO3 Piezoelectric Thin Films by Dry Etching

  Kurokawa Fumiya, Kanno Isaku, Yokokawa Ryuji, Kotera Hidetoshi, Horikiri F, Shibata K, Mishima T

  6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, Jul. 2012, English, Nanjin, Chaina, International conference

  Oral presentation


• Compositional Dependence of Piezoelectric PZT Films by Combinatorial Sputtering

  Tomioka Kohei, Kanno Isaku, Kotera Hidetoshi

  International Symposium on Integrated Functionalities 2012 (ISIF2012), Jun. 2012, English, Hong Kong, International conference

  Oral presentation


• 圧電薄膜とMEMS応用

  Kanno Isaku

  第29回強誘電体応用会議(FMA29), May 2012, Japanese, 京都市, Domestic conference

  [Invited]

  Invited oral presentation


• コンビナトリアル成膜によるPZT圧電薄膜の組成依存性評価

  Tomioka Kohei, Yokokawa Ryuji, Kotera Hidetoshi, Kanno Isaku

  第29回強誘電体応用会議(FMA29), May 2012, Japanese, 京都市, Domestic conference

  Oral presentation


• Multilayer Thin‐Film Capacitors Fabricated by Radio-Frequency Magnetron Sputtering

  Imamiya Y, Yokokawa R, Kanno Isaku, Kotera H

  20th IEEE International Symposium on Applications of Ferroelectrics (ISAF) and International Symposium on Piezoresponse Force Microscopy on Nanoscale Phenomena in Polar Materials (PFM), ISAF-PFM-2011, Jul. 2011, English, IEEE, Vancouver, Canada, International conference

  Poster presentation

• The Dielectric Society of Japan


• 日本機械学会


• 応用物理学会

• 産業技術研究助成事業 「超格子圧電薄膜材料の開発とマイクロマシンデバイスへの応用」

  2002


• Industrial Technology Research Grant Program "Development of piezoelectric films with super structures and their application for MEMS"

  2002

• Development of a living cell-cell battery inspired by electric fishes

  MATURANA ANDRES, 肥田 博隆, 神野 伊策

  日本学術振興会, 科学研究費助成事業, 挑戦的研究(萌芽), 名古屋大学, 30 Jun. 2022 - 31 Mar. 2025


• 【CREST】高効率非鉛圧電薄膜発電システムの実証展開

  神野伊策

  国立研究開発法人科学技術振興機構, 戦略的創造研究推進事業（CREST）, Apr. 2020 - Mar. 2023, Principal investigator


• 薄膜構造制御による新規圧電マイクロデバイス創成に関する研究

  神野 伊策

  科学研究費補助金／基盤研究(B), Apr. 2017 - Mar. 2021, Principal investigator

  Competitive research funding


• 【CREST】分極制御非鉛圧電薄膜による高効率MEMS振動発電素子の創製

  神野 伊策

  国立研究開発法人科学技術振興機構, 戦略的創造研究推進事業（CREST）, 2016 - Mar. 2020, Principal investigator

  Competitive research funding


• スポーツを対象としたウェアラブル圧電型振動発電モジュールの開発

  神野 伊策

  科学技術振興機構(JST), 研究成果展開事業 研究成果最適展開支援プログラム 戦略テーマ重点タイプ, 2016, Principal investigator

  Competitive research funding


• A-STEP「高密度・高品質積層誘電体デバイスの開発」

  神野 伊策

  研究成果最適展開支援プログラム フィージビリティスタディステージ 探索タイプ, 2012, Principal investigator

  Competitive research funding


• A-STEP「高効率・高信頼性圧電MEMS振動発電素子の開発」

  神野 伊策

  研究成果最適展開支援プログラム フィージビリティスタディステージ 探索タイプ, 2012, Principal investigator

  Competitive research funding


• 分極制御による薄膜材料の多元的圧電特性評価技術の開発

  神野 伊策

  科学研究費補助金／基盤研究(C), 2011, Principal investigator

  Competitive research funding


• A-STEP「高密度・高品質積層誘電体デバイスの開発」

  神野 伊策

  研究成果最適展開支援プログラム フィージビリティスタディステージ 探索タイプ, 2011, Principal investigator

  Competitive research funding

• 圧電薄膜、圧電薄膜の製造方法、圧電薄膜付き基板、圧電アクチュエータ、圧電センサ、インクジェットヘッドおよびインクジェットプリンタ

  KANNO ISAKU, HIDA HIROTAKA

  特願2015-033682, 24 Feb. 2015, 大学長, 特許6468881, 18 Dec. 2018

  Patent right


• 誘電体薄膜構造物

  特許第3138128号

  Patent right


• 誘電体薄膜の製造方法

  特許第3224293号

  Patent right


• 圧電素子及びその製造方法並びにそれを用いたインクジェットヘッド及びその製造方法

  特許第3202006号

  Patent right


• 圧電アクチュエータ、インクジェットヘッド及びインクジェット式記録装置

  特許第3202012号

  Patent right


• 圧電アクチュエータおよびその製造方法

  特許第3104550号

  Patent right


• インクジェットヘッド及びその製造方法並びにインクジェット式記録装置

  特許第3238674号

  Patent right


• インクジェットヘッド及びその製造方法

  特許第3241334号

  Patent right