Research activity information

• Jun. 2026 工作機械技術振興財団, 工作機械技術振興賞・奨励賞, CMPプロセスにおけるウェハ面内の摩擦係数分布を考慮した材料除去レート分布の高精度推定

  広野翔,鈴木教和,三谷千紘,佐藤拓実,平野航大


• Sep. 2025 精密工学会, 精密工学会誌インパクト賞, 切削加工におけるびびり振動（前編）

  鈴木教和


• Dec. 2024 一般財団法人 FA財団, Parameter identification for linear model of the milling process using spindle speed variation

  Kazuki Takahei, Satoshi Miwa, Eiji Shamoto, Norikazu Suzuki


• Nov. 2024 The 26th International Symposium on Advances in Abrasive Technology (ISAAT2024), Excellent Paper Award, Development of a process model of micro-nano patterns toward a novel model-based process control in chemical mechanical polishing

  Taku Ishihara, Norikazu Suzuki


• Nov. 2024 The 19th International Machine Tool Engineers' Conference (IMEC2024), Excellent Poster Award, Non-contact monitoring of cutting process using machining sound measurement

  Nichika Masaki, Tomotaka Suzuki, Yukio Takahashi, Ilia Radchenco, Norikazu Suzuki


• Oct. 2024 The 20th International Conference on Precision Engineering (ICPE2024), ICPE2024 Outstanding Paper Award, Development of simulation technique for milling process superimposing oscillation on the feed motion

  Yutaro Kawana, Kazuki Takahei, Burak Sencer, Norikazu Suzuki


• Mar. 2024 The Japan Society for Precision Engineering, JSPE Best Paper Award, Parameter identification for linear model of the milling process using spindle speed variation

  Kazuki Takahei, Satoshi Miwa, Eiji Shamoto, Norikazu Suzuki

  IRI


• Nov. 2022 The 19th International Machine Tool Engineers' Conference, Excellent Poster Award, A novel method of model parameter identification for highly-accurate milling simulation

  Norikazu Suzuki, Hideyuki Fujii, Yukio Takahashi


• 13 Nov. 2019 ASPEN2019, Best Paper Award

  S. Yamato, K. Nakanishi, N. Suzuki, Y. Kakinuma

  ASPEN2019@Shimane

  International society


• 27 Sep. 2019 CJUMP2019, Excellent Paper Award

  J. Zhang, N. Suzuki, E. Shamoto, J. Zhang, X. Chen, J. Xiao, W. Bai, J. Xu

  15th CJUMP

  International society


• 15 Nov. 2017 日本機械学会, 優秀講演論文表彰

  K. Takahei, T. Fujita, R. Ikeda, N. Suzuki, S. Ohno, E. Shamoto

  LEM21 2017@Hiroshima

  International society


• 18 Dec. 2016 計測自動制御学会, SI2016優秀講演賞, CNCの内部情報を利用した柔軟な機械構造を伴うエンドミルプロセスのモデルベースパラメータ同定

  池田遼輔, 鈴木教和, 社本英二

  Japan society


• 20 Nov. 2016 IMEC，日工会, Excellent Poster Award （優秀ポスター賞）, モデルベースシミュレーションを利用した知的切削プロセス同定技術の開発

  鈴木教和, 池田遼輔, 社本英二

  第17回国際工作機械技術者会議ポスターセッション

  International society


• 22 Oct. 2016 日本機械学会, 部門一般表彰優秀講演論文表彰, 推定切削力を応用した不等ピッチターニングによるびびり振動抑制

  門田崇志, 山田雄基, 中西賢一, 橘純司, 吉岡勇人, 鈴木教和, 柿沼康弘

  A07

  Japan society


• 12 Dec. 2014 FA財団, 論文賞 （一般財団法人 FA財団）

  Eiji Shamoto, Tatsuya Mori, Burak Sencer, Norikazu Suzuki, Rei Hino

  "Precision Engineering, Volume 37, Issue 3, July 2013, Pages 580-589"

  Publisher


• 15 Nov. 2014 日本機械学会, 部門一般表彰優秀講演論文表彰, 楕円振動切削における振幅変調法を利用した焼入れ鋼のナノ精度微細加工

  鈴木教和, 張建国, 社本英二

  B11

  Japan society


• 19 Mar. 2014 精密工学会, 2013年度精密工学会論文賞

  E. Shamoto, T. Mori, B. Sencer, N. Suzuki, R. Hino

  "Precision Engineering: Vol. 37, No. 3"

  Official journal


• 19 Mar. 2014 精密工学会, 2013年度精密工学会沼田記念論文賞, 研磨パッドの微細凹凸接触を考慮したCMPプロセスのEHL解析

  橋本洋平, 鈴木教和, 浅羽正和, 樋野励, 社本英二

  精密工学会誌 79巻1号

  Official journal


• 03 Nov. 2012 IMEC，日工会, Best Poster Award, びびり振動に対する動剛性無限大化を実現する革新的中ぐり工具の設計

  N. Suzuki, R. Watanabe, K. Nishimura, E. Shamoto

  第15回国際工作機械技術者会議ポスターセッション

  International society


• 12 Jun. 2012 工作機械技術振興財団, 工作機械技術振興賞・論文賞

  鈴木 教和, 横井 秀郎, 社本 英二

  "Precision Engineering, Vol.35, No.1"


• 15 Mar. 2012 精密工学会, 精密工学会沼田記念論文賞, 切りくずの連続処理と引張り切削に関する研究－すくい面形状による切りくず制御の試み－

  社本英二, 安田浩一朗, 青木友弥, 鈴木教和, 小出富夫

  "精密工学会誌 Vol.77,No.5, pp.520-524, (2011)"

  Official journal


• 10 Jan. 2012 Hot Article Award Analytical Sciences

  T. Yasui, Y. Omoto, K. Osato, N. Kaji, N. Suzuki, T. Naito, Y. Okamoto, M. Tokehi, E. Shamoto, Y. Baba

  "Analytical Sciences, 28(1), pp.57-59, (2012)"

  Official journal


• 30 Oct. 2008 森精機製作所, 第5回切削加工ドリームコンテスト アカデミック部門：金賞, 焼入れ鋼の超精密微細3次元彫画

  鈴木教和, 横井秀郎, 橋本洋平, 布目清成, 社本英二

  名古屋大学 大学院 工学研究科 機械理工学専攻 超精密工学研究グループ

  Others


• 30 May 2008 マザック財団, 優秀論文表彰 （財団法人 マザック財団）

  鈴木教和

  "Annals of the CIRP, Vol.56/1, pp.127-130, (2007) N. Suzuki, M. Haritani, J. Yang, R. Hino, E. Shamoto"

  Publisher


• 13 Sep. 2007 精密工学会, 2007年度（第27回）精密工学会技術賞, 高硬度材の超精密・微細加工用楕円振動切削装置の開発

  浜田晴司, 上山崇, 鈴木教和, 社本英二

  Official journal


• 23 Mar. 2007 ベストプレゼンテーション賞, 超音波楕円振動切削によるタングステン合金の超精密微細加工（第2報）

  鈴木教和

  2007年度精密工学会 春季大会学術講演会

  Japan society


• 09 Nov. 2005 MHS2005, Best Paper Award in 2005 International Symposium on Micro-NanoMechatronics and Human Science(MHS2005), A New Method to Machine Sculptured Surfaces by Applying Ultrasonic Elliptical Vibration Cutting

  Eiji Shamoto, Norikazu Suzuki, Rei Hino, Eiji Tsuchiya, Yasunori Hori, Hiroshi Inagaki, Kiyoshi Yoshino

  "Proceedings of the 2005 International Symposium on MHS, pp.91-96, (2005)"

  International society


• 20 Jun. 2005 工作機械技術振興財団, 第26次 工作機械技術振興賞 奨励賞, CMPにおける研磨レート解析に関する研究

  鈴木教和, 橋本洋平, 長谷部貴士, 社本英二

  日本機械学会東海学生会 第36回学生員卒業研究発表講演会講演論文集，p249-250

  Publisher


• Mar. 2004 精密工学会, 2003年精密工学会賞, 機械式円振動発生機構を利用した楕円振動切削加工機の開発

  社本英二, 宋詠燦, 吉田秀樹, 鈴木教和, 森脇俊道, 幸田盛堂, 山西哲司

  精密工学会誌，69巻4号，pp.542-548，(2003)

  Official journal


• Mar. 2002 精密工学会, 2001年精密工学会賞, 楕円振動切削加工法 (第4報)－工具振動システムの開発と超精密切削への応用

  社本英二, 鈴木教和, 森脇俊道, 直井嘉和

  精密工学会誌，67巻11号，pp.1871-1877，(2001)

  Official journal


• Mar. 1998 日本機械学会, ベストプレゼンテーション賞, 楕円振動切削加工法による自由曲面の創成

  鈴木教和

  日本機械学会1998年関西学生会卒業研究発表講演会

  Japan society

• Simultaneous identification of milling and structural dynamics parameters under stable cutting using table-side disturbance forces

  Koki Matsubara, Hideyuki Fujii, Yasuhiro Imabeppu, Naruhiro Irino, Norikazu Suzuki

  Elsevier BV, May 2026, CIRP Annals, 75(1) (1), 485 - 489, English

  [Refereed]

  Scientific journal

  Link to Kobe Univ. Repository (Kernel)


• ESTIMATION OF HARDNESS AND RESIDUAL STRESS OF MACHINED SURFACES USING IN-PROCESS DATA OBTAINED FROM TURNING OPERATIONS

  Kazunori Kohara, Yukio Takahashi, Norikazu Suzuki

  Dec. 2025, MM SCIENCE JOURNAL, 2025, 9083 - 9087, English

  [Refereed]

  Scientific journal


• ADAPTIVE TOOL ECCENTRICITY COMPENSATION USING MACHINE TOOL FEED DRIVES

  Kaan Bahtiyar, Levent Bozcu, Seyed Mahmood Shantiaeezade, Burak Sencer, Ryosuke Ikeda, Norikazu Suzuki

  Last, Dec. 2025, MM SCIENCE JOURNAL, 2025, 9103 - 9107, English

  [Refereed]

  Scientific journal


• FORCE ESTIMATION MODEL AND PARAMETER IDENTIFICATION IN END MILLING PROCESS WITH CORNER EDGE DAMAGE

  Koki Matsubara, Norikazu Suzuki

  Dec. 2025, MM SCIENCE JOURNAL, 2025, 9078 - 9082, English

  [Refereed]

  Scientific journal


• Development of Model-Based Robot Polishing System: Measurement and Compensation for Robot Stiffness Distribution

  Michio Uneda, Kotaro Totsuka, Takamasa Yamamoto, Norikazu Suzuki

  Last, Sep. 2025, INTERNATIONAL JOURNAL OF AUTOMATION TECHNOLOGY, 19(5) (5), 921 - 929, English

  [Refereed]

  Scientific journal


• Low frequency feed modulation assisted milling for chatter avoidance

  Yutaro Kawana, Seyed Mahmood Shantiaeezade, Burak Sencer, Ryosuke Ikeda, Norikazu Suzuki

  Last, May 2025, CIRP ANNALS-MANUFACTURING TECHNOLOGY, 74(1) (1), 535 - 539, English

  [Refereed]

  Scientific journal


• Improvement of surface quality in simultaneous machining of multiple workpieces on a single machine

  Yuta Shinba, Naruhiro Irino, Yasuhiro Imabeppu, Erhan Budak, Norikazu Suzuki, Atsuo Kishimoto

  Elsevier BV, 2024, CIRP Annals, 73(1) (1), 305 - 308, English

  [Refereed]

  Scientific journal


• Real-time prediction of material removal rate for advanced process control of chemical mechanical polishing

  K. Hirano, T. Sato, N. Suzuki

  Elsevier BV, 2024, CIRP Annals, 73(1) (1), 269 - 272, English

  [Refereed]

  Scientific journal


• Influence of vibration conditions on tool life in low-frequency vibration cutting of difficult-to-cut materials

  Yukio TAKAHASHI, Takuma MATSUNAGA, Genki MURATA, Hiroto TERATANI, Norikazu SUZUKI

  Last, Japan Society of Mechanical Engineers, 2024, Journal of Advanced Mechanical Design, Systems, and Manufacturing, 18(4) (4), JAMDSM0050 - JAMDSM0050, English

  [Refereed]

  Scientific journal


• Estimation of Hardness and Residual Stress on End-Milled Surfaces Using Linear Regression Model

  Hideyuki Fujii, Yukio Takahashi, Jiei Hodohara, Norikazu Suzuki, Yuki Yamada, Yasuhiro Imabeppu, Naruhiro Irino

  This study presents a novel method for estimating the surface integrity of end-milled workpieces. It is well known that the mechanical properties of machined surfaces in cutting affect the quality of the final product. In particular, hardness and residual stress often require strict control; however, nondestructive inspection remains a challenge. This study proposes a method to estimate the hardness and residual stress of end-milled surfaces by analyzing cutting forces and images of the tool during machining to obtain approximate temperature and stress distributions. These state quantities are highly correlated with the dislocation density and its distribution on the machined surface, which in turn is strongly correlated with residual stress and surface hardness. Despite this strong correlation, few research studies have been conducted on the topic. In the proposed method, cutting forces, measured by a dynamometer, are analyzed to estimate the specific cutting forces and edge force coefficients. Simultaneously, the flank wear width is recorded using an image-based on-machine measuring device installed in the machine tool. From this information, the average stresses at the primary and tertiary cutting zones are estimated, while the cutting temperature in the primary cutting zone is roughly estimated by considering the traditional shear-angle prediction theory. Using these estimations, hardness and residual stress are calculated based on a simple linear regression model. Parameter identification for the model is performed based on measured hardness and residual stress in end-milling experiments. The model was validated against experimental measurements, which showed that the proposed method can accurately estimate hardness and residual stress, although it was observed that the selection of explanatory variables has a significant effect on accuracy.

  Corresponding, Fuji Technology Press Ltd., Nov. 2023, International Journal of Automation Technology, 17(6) (6), 564 - 574

  [Refereed]

  Scientific journal


• Machine tool calibration: Measurement, modeling, and compensation of machine tool errors

  Wei Gao, Soichi Ibaraki, M. Alkan Donmez, Daisuke Kono, J.R.R. Mayer, Yuan-Liu Chen, Károly Szipka, Andreas Archenti, Jean-Marc Linares, Norikazu Suzuki

  Elsevier BV, Apr. 2023, International Journal of Machine Tools and Manufacture, 187, 104017 - 104017, English, Co-authored internationally

  [Refereed]

  Scientific journal


• Novel method to visualize Preston’s coefficient distribution for chemical mechanical polishing process

  Yohei Hashimoto, Tatsuaki Furumoto, Takumi Sato, Norikazu Suzuki, Hozumi Yasuda, Satoru Yamaki, Yoshihiro Mochizuki

  Oct. 2022, Japanese Journal of Applied Physics, 61, 116502, English

  [Refereed]

  Scientific journal


• Parameter Identification for Linear Model of the Milling Process Using Spindle Speed Variation

  K. Takahei, S. Miwa, E. Shamoto, N. Suzuki

  Sep. 2022, Precision Engineering, 78(1) (1), in press, English

  [Refereed]

  Scientific journal


• Identification of the Model Parameter for Milling Process Simulation with Sensor-integrated Disturbance Observer

  K. Takahei, N. Suzuki, E. Shamoto

  Corresponding, Aug. 2022, Precision Engineering, 78(1) (1), 146 - 162, English

  [Refereed]

  Scientific journal


• Process state estimation in Chemical Mechanical Polishing (CMP) by inverse analysis of in-process data

  N. Suzuki, R. Yamaguchi, Y. Hashimoto, H. Yasuda, S. Yamaki, Y. Mochizuki

  Jul. 2022, CIRP Annals - Manufacturing Technology, 71(1) (1), 273 - 276, English

  [Refereed]

  Scientific journal


• Vibration analysis and cutting simulation of structural nonlinearity for machine tool

  Naruhiro Irino, Yasuhiro Imabeppu, Yosuke Higuchi, Yuta Shinba, Kengo Kawai, Norikazu Suzuki, Junichi Kaneko, Yasuhiro Kakinuma, Masahiko Mori

  Elsevier BV, Jun. 2021, CIRP Annals, 70(1) (1), 317 - 320, English

  [Refereed]

  Scientific journal


• Dynamic contour error compensation in micro/nano machining of hardened steel by applying elliptical vibration sculpturing method

  Jianguo Zhang, Norikazu Suzuki, Eiji Shamoto, Jianfeng Xu

  Apr. 2021, Precision Engineering, 71(1) (1), 250 - 262, English, Co-authored internationally

  [Refereed]

  Scientific journal


• Development of Automatic Chatter Suppression System in Parallel Milling by Real-Time Spindle Speed Control with Observer-Based Chatter Monitoring

  Shuntaro Yamato, Kenichi Nakanishi, Norikazu Suzuki, Yasuhiro Kakinuma

  Jan. 2021, International Journal of Precision Engineering and Manufacturing, 22(1) (1), 227 - 240, English

  [Refereed]

  Scientific journal


• Time domain simulation of dynamic corner milling process considering chatter vibration with finite amplitude

  Norikazu Suzuki, Hiroki Hayashi, Eiji Shamoto, Naruhiro Irino, Yasuhiro Imabeppu

  American Society of Mechanical Engineers, 2021, Proceedings of the ASME 2021 16th International Manufacturing Science and Engineering Conference, MSEC 2021, 1, English

  [Refereed]

  International conference proceedings


• Influence of flank texture patterns on suppression of chatter vibration and flank adhesion in turning operation

  Wataru Takahashi, Tomoki Nakanomiya, Norikazu Suzuki, Eiji Shamoto

  Corresponding, Dec. 2020, Precision Engineering, 68(1) (1), 262 - 272, English

  [Refereed]

  Scientific journal


• Development of a novel boring tool with anisotropic dynamic stiffness to avoid chatter vibration in cutting Part 2: Analytical and experimental verification of the proposed method

  Wataru Takahashi, Norikazu Suzuki, Eiji Shamoto

  Corresponding, Nov. 2020, Precision Engineering, 68(1) (1), 20 - 34, English

  [Refereed]

  Scientific journal


• Development of a novel boring tool with anisotropic dynamic stiffness to avoid chatter vibration in cutting Part 1: Design of anisotropic structure to attain infinite dynamic stiffness

  Wataru Takahashi, Norikazu Suzuki, Eiji Shamoto

  Corresponding, Nov. 2020, Precision Engineering, 68(1) (1), 57 - 71, English

  [Refereed]

  Scientific journal


• Experimental verification of design methodology for chatter suppression in tool swing–assisted parallel turning

  Shuntaro Yamato, Kenichi Nakanishi, Norikazu Suzuki, Yasuhiro Kakinuma

  Aug. 2020, The International Journal of Advanced Manufacturing Technology, 110(1) (1), 1759 - 1771, English

  [Refereed]

  Scientific journal


• Flank face texture design to suppress chatter vibration in cutting

  Norikazu Suzuki, Wataru Takahashi, H. Igeta, Tomoki Nakanomiya

  May 2020, CIRP Annals - Manufacturing Technology, 69(1) (1), 93 - 96, English

  [Refereed]

  Scientific journal


• Chatter stability prediction of cutting process with process damping utilizing finite element analysis

  Norikazu Suzuki, Tomoki Nakanomiya, Eiji Shamoto

  American Society of Mechanical Engineers, 2020, JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020, English

  [Refereed]

  International conference proceedings


• Material removal efficiency improvement by orientation control of CMP pad surface asperities

  Norikazu Suzuki, Hirotaka Misono, Eiji Shamoto, Yohei Hashimoto, Hozumi Yasuda, Yoshinobu Mochizuki

  Nov. 2019, Precision Engineering, 62(1) (1), 83 - 88, English

  [Refereed]

  Scientific journal


• Enhancement of cutting force observer by identification of position and force-amplitude dependent model parameters

  Akihiro Sugiyama, Shuntaro Yamato, Norikazu Suzuki, Naruhiro Irino, Yasuhiro Imabeppu, Yasuhiro Kakinuma

  Jul. 2019, The International Journal of Advanced Manufacturing Technology, 104(1) (1), 3589 - 3605, English

  [Refereed]

  Scientific journal


• Frictional properties of surface textures fabricated on hardened steel by elliptical vibration diamond cutting

  Jianguo Zhang, Junjie Zhang, Andreas Rosenkranz, Norikazu Suzuki, Eiji Shamoto

  Jun. 2019, Precision Engineering, 59(1) (1), 66 - 72, English, Co-authored internationally

  [Refereed]

  Scientific journal


• Chatter suppression in parallel turning assisted with tool swing motion provided by feed system

  Shuntaro Yamato, Toshiki Okuma, Kenichi Nakanishi, Junji Tachibana, Norikazu Suzuki, Yasuhiro Kakinuma

  Parallel turning technology has been attracting attention as an important technology to enhance the productivity of multitasking machine tools. To maximize the productivity advantage of parallel turning, chatter avoidance or suppression is one of the most noteworthy concerns. In this study, a novel chatter suppression technique using tool swing motion is provided by a feed drive system. The optimal design methodology of the tool swing motion for effective chatter suppression is also introduced based on its analogy with the spindle speed variation technique under the shared-surface parallel turning and rigid-tool and flexible-workpiece assumptions. The proposed method was evaluated with regard to the chatter stabilizing performance and workpiece runout as compared to conventional equal pitch turning and unequal pitch turning for chatter suppression. As a result, the proposed tool swing parallel turning exhibited a high chatter stabilizing performance without eccentricity of the workpiece and enhanced surface quality, although particular swing marks were left on the machined surface.

  Fuji Technology Press Ltd., Jan. 2019, International Journal of Automation Technology, 13(1) (1), 80 - 91, English

  [Refereed]

  Scientific journal


• Advanced applications of elliptical vibration cutting in micro/nanomachining of difficult-to-cut materials

  Jianguo Zhang, Norikazu Suzuki, Eiji Shamoto

  Springer International Publishing, 2019, Springer Tracts in Mechanical Engineering, 167 - 200, English

  In book


• Enhancement of sensor-less cutting force estimation by tuning of observer parameters from cutting test

  Shuntaro Yamato, Yasuhiro Imabeppu, Naruhiro Irino, Norikazu Suzuki, Yasuhiro Kakinuma

  Elsevier BV, 2019, Procedia Manufacturing, 41, 272 - 279

  [Refereed]

  International conference proceedings


• Integrated in-process chatter monitoring and automatic suppression with adaptive pitch control in parallel turning

  Yamato Shuntaro, Yamada Yuki, Nakanishi Kenichi, Suzuki Norikazu, Yoshioka Hayato, Kakinuma Yasuhiro

  Sep. 2018, ADVANCES IN MANUFACTURING, 6(3) (3), 291 - 300

  [Refereed]

  Scientific journal


• Chatter Avoidance in Parallel Turning with Unequal Pitch Angle Using Observer-Based Cutting Force Estimation

  Shinya Sakata, Takashi Kadota, Yuki Yamada, Kenichi Nakanishi, Hayato Yoshioka, Norikazu Suzuki, Yasuhiro Kakinuma

  Apr. 2018, Journal of Manufacturing Science and Engineering, Transactions of the ASME, 140(4) (4), English

  [Refereed]

  Scientific journal


• Development of a milling technology with SPRT for Ni-base super alloy

  Kato Yuya, Suzuki Norikazu, Shamoto Eiji, Naiki Yukio, Takagi Yuji

  <p>Ni基耐熱合金に対して従動式ロータリ機構を備えたミーリング工具による正面フライスを実施し，その実用性について検討を行った．実験の結果，回転運動を伴わない通常切削に対して約12倍の工具寿命延長効果が確認された．また，切削シミュレーションを援用したプロセスの見える化技術を開発し，その分析を行った．諸検討により，ランピング加工においてランピング角の制約が厳しいことが明らかとなり，その解決手法を提案した．</p>

  The Japan Society for Precision Engineering, 2018, Proceedings of JSPE Semestrial Meeting, 2018, 321 - 322, Japanese


• Primary study on post-processing technology utilizing machining process for additive manufacturing

  Ohba Takayuki, Suzuki Norikazu, Shamoto Eiji

  <p>3Dプリンタの普及に伴い，3次元積層造形構造の利用が急速に進められている．造形技術が急速に発展した一方で，その表面に形成される積層段差の後処理技術に関しては，自動化技術が確立されていない．本研究では，3次元積層造形構造の表面除去加工における自動化技術について検討を行った．汎用工作機械に，柔軟な治具をかいして工作物を固定し，研削と研磨による定圧加工を行うことで，自動化の可能性があることを明らかにした．</p>

  The Japan Society for Precision Engineering, 2018, Proceedings of JSPE Semestrial Meeting, 2018, 491 - 492, Japanese


• Improvement of material removal efficiency by optimization of anisotropic contact of pad asperities

  Norikazu Suzuki, Shingo Oshika, Hirotaka Misono, Yohei Hashimoto, Hozumi Yasuda, Yoshihiro Mochizuki

  VDE Verlag GmbH, 2017, ICPT 2017 - International Conference on Planarization/CMP Technology, 95 - 99, English

  International conference proceedings


• 切削加工におけるびびり振動の安定性を向上するロバストな再生振動相殺技術（キーノートスピーチ）

  鈴木 教和

  切削加工における高能率化を実現する上でびびり振動対策は極めて重要である．不等ピッチ・不等リード工具は，不安定化を引き起こす再生振動の抑制に効果的に利用することができる．本稿では，びびり振動の周波数および軸方向切込み条件に対して高いロバスト性を満たす，実用的な工具設計理論を紹介する．さらに，再生効果抑制理論を応用したインデクサブルカッタの設計法およびパラレールターニングの研究事例を紹介する．

  公益社団法人 精密工学会, 2017, 精密工学会学術講演会講演論文集, 2017, 37 - 38, Japanese


• Intelligent identification of milling process by utilizing disturbance force estimation based on multi-inertial model of ball-screw drive system and cutting simulation

  Ohno Shoya, Suzuki Norikazu, Shamoto Eiji, Ikeda Ryosuke, Takahei Kazuki, Fujita Tomoya

  モデルベースシミュレーションを利用して，構造物の動特性や切削プロセスのパラメータを同定する手法が提案されている．本稿では，ボールねじ駆動系の多慣性モデルを考慮したCNC工作機械の外乱オブザーバを検討した．これをすでに提案されているプロセス同定システムに適用し，汎用的な工作機械を対象とした知的同定の実行可能性について検討を行った．検証実験の結果，ミリングプロセスの同定を概ね実現し得ることを確認した．

  The Japan Society for Precision Engineering, 2017, Proceedings of JSPE Semestrial Meeting, 2017, 59 - 60, Japanese


• Textures on flank face to attainchatter suppression in cutting

  Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

  切削加工においては，低速度条件でびびり振動の安定性が向上することが知られている．これはプロセスダンピングと呼ばれる工具逃げ面と被削材が接触して振動を減衰する現象が発現するためである．本研究では，プロセスダンピングを効果的に利用することが可能な逃げ面テクスチャを提案する．切削シミュレーションに基づく簡易的な形状設計手法について解説するとともに，検証実験を通じて提案手法の効果を明らかにする．

  The Japan Society for Precision Engineering, 2017, Proceedings of JSPE Semestrial Meeting, 2017, 989 - 990, Japanese


• Intelligent process identification by utilizing disturbance force estimation and cutting simulation in milling process

  Ikeda Ryosuke, Suzuki Norikazu, Shamoto Eiji

  著者らは，モデルベースシミュレーションを利用して，構造物の動特性や切削プロセスを代表するパラメータの新しい同定手法を提案している．本稿では，一般的なミリング様式のプロセスをモデル化し，構造物の動的挙動と加工プロセスを推定する時間領域シミュレータを開発した．さらに，パラメータ同定アルゴリズムを考案した．シミュレーションによる検証を通じて，提案手法により知的なプロセス同定を実現し得ることを確認した．

  The Japan Society for Precision Engineering, 2017, Proceedings of JSPE Semestrial Meeting, 2017, 919 - 920, Japanese


• Suppression of chatter vibration using parallel turning assisted with swing motion

  OKUMA Toshiki, SAKATA Shinya, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, SUZUKI Norikazu, KAKINUMA Yasuhiro

  Multi-tasking machine tools attract attention, because they can perform highly efficient machining by using multiple tools. Parallel turning with two tools can realize high material removal rate and the productivity is remarkably improved when appropriate cutting condition is selected. On the other hand, compared to turning with a single tool, the stability of the process reduces, and chatter vibration tends to occur. Chatter vibration does not only limit productivity but also cause poor surface and dimensional accuracy. In this research, to suppress chatter vibration in parallel turning, we propose swing motion assisted parallel turning with an optimum amplitude ratio, calculated from chatter frequency and spindle speed. The proposed method aims to suppress chatter vibration by giving variations in phase delay due to high speed swing of tool. Chatter frequency is measured from estimated cutting force applying disturbance observer. The result of swing motion assisted turning test indicates that chatter vibration can be suppressed by dynamically changing cutting point based on the optimum amplitude ratio.

  The Japan Society of Mechanical Engineers, 2017, The Proceedings of Mechanical Engineering Congress, Japan, 2017(0) (0), S1330101, Japanese


• Influence of clearance angle on micro/nano structure fabrication in elliptical vibration cutting of hardened steel

  Jianguo Zhang, Norikazu Suzuki, Yilong Wang, Eiji Shamoto

  Inderscience Enterprises Ltd., 2017, International Journal of Nanomanufacturing, 13(4) (4), 351 - 361, English

  [Refereed]

  Scientific journal


• Prediction of polishing pressure distribution in CMP process with airbag type wafer carrier

  N. Suzuki, Y. Hashimoto, H. Yasuda, S. Yamaki, Y. Mochizuki

  Elsevier USA, 2017, CIRP Annals - Manufacturing Technology, 66(1) (1), 329 - 332, English

  [Refereed]

  Scientific journal


• CHATTER SUPPRESSION IN PARALLEL TURNING WITH UNEQUAL PITCH USING OBSERVER BASED CUTTING FORCE ESTIMATION

  Shinya Sakata, Takashi Kadota, Yuki Yamada, Kenichi Nakanishi, Hayato Yoshioka, Norikazu Suzuki, Yasuhiro Kakinuma

  2017, PROCEEDINGS OF THE ASME 12TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE - 2017, VOL 3, English

  [Refereed]

  International conference proceedings


• DESIGN OF ANISOTROPIC BORING TOOLS WITH L/D=10 FOR CHATTER FREE CUTTING

  Wataru Takahashi, Norikazu Suzuki, Eiji Shamoto

  2017, PROCEEDINGS OF THE ASME 12TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE - 2017, VOL 3, English

  [Refereed]

  International conference proceedings


• Development of a high-performance chip-guiding turning process-tool design and chip flow control

  Tomoya Aoki, Burak Sencer, Eiji Shamoto, Norikazu Suzuki, Tomio Koide

  Jul. 2016, INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 85(1-4) (1-4), 791 - 805, English

  [Refereed]

  Scientific journal


• Analysis of dynamic material properties based on asperity model of polishing pad surfaces

  Oshika Shingo, Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

  研磨パッド表面に存在する凹凸構造は研磨効率に直接的に影響するため，その分析は研磨メカニズムを理解する上で重要である．本研究では，研磨パッドの表面アスペリティを楕円球と楕円錐の集合体としてモデル化し，状測定結果から研磨に作用すると考えられる箇所の形状パラメータを同定する手法を考案した．さらに，弾性変形を仮定した力学モデルを定式化し，動的圧縮試験の結果から，材料物性パラメータについて分析を行った．

  The Japan Society for Precision Engineering, 2016, Proceedings of JSPE Semestrial Meeting, 2016, 215 - 216, Japanese


• A novel in-situ observation of local polishing efficiency by utilizing heat measurement

  Misono Hirotaka, Suzuki Norikazu, Oshika Shingo, Shamoto Eiji

  研磨プロセスのミクロな材料除去メカニズムを説明可能な理論は確立されていない．これが研磨効率の推定を困難にし，効率的なプロセス開発の妨げとなっている．本研究では，研磨効率のその場観察手法を提案する．材料除去に起因する赤外線をウェハ越しに観察することで，研磨中の局所的な材料除去の発生個所を特定する．表面凹凸が制御された織布パッドによる検証実験を実施し，ミクロな材料除去メカニズムについて考察を行った．

  The Japan Society for Precision Engineering, 2016, Proceedings of JSPE Semestrial Meeting, 2016, 219 - 220, Japanese


• Primitive study on cutting force model considering chatter vibration with finite vibration amplitude

  Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

  低切削速度条件ではプロセスダンピングという現象が発現してびびり振動の安定性が向上する．多くのモデルが提案されてきたが，その現象の詳細なメカニズムは不明であり，切削力モデルも検証されていない．そこで，本研究では，低速領域でびびり振動が発生する場合の切削現象について検討を行う．有限の振動変位を持つびびり振動が発生する場合の新しい切削力モデルを提案し，有限要素解析による検討を通じてその検証を行う．

  The Japan Society for Precision Engineering, 2016, Proceedings of JSPE Semestrial Meeting, 2016, 377 - 378, Japanese


• Semidiscrete time domain solution of cutting process using variable helix end mills

  Ishiguro Rikiya, Suzuki Norikazu, Shamoto Eiji

  不等リードエンドミルを用いて浅切込み加工を行う場合に，びびり振動を効果的に抑制することができる．しかし，このプロセスでは切削の断続性に起因して，高精度な安定性解析が難しいことが知られている．このような時間遅れを伴う常微分方程式の解法としてSemidiscrete method（SD法）が提案されている．本研究では，不等リードエンドミルを用いるプロセスに対応したSD法を提案し，先行研究の解析モデルとの比較による検証を行った．

  The Japan Society for Precision Engineering, 2016, Proceedings of JSPE Semestrial Meeting, 2016, 651 - 652, Japanese


• Model-based process identification by utilizing disturbance force estimation against servo system and cutting simulation

  Ikeda Ryousuke, Suzuki Norikazu, Shamoto Eiji

  本研究では，外乱力の推定結果に基づいてモデルベースで動的切削プロセスのパラメータ同定を行う新しい手法を提案する．まず，加工に用いる機械構造の動剛性モデルと再生効果を含めた切削プロセスモデル，および各モデルに基づく時間領域シミュレータを開発する．加工中にCNC制御系に作用する外乱力の推定値から，逆解析を行うことでプロセスモデルのパラメータ同定を行う．断続切削実験により，提案手法の実現可能性を確認する．

  The Japan Society for Precision Engineering, 2016, Proceedings of JSPE Semestrial Meeting, 2016, 763 - 764, Japanese


• Development of a milling cutter with SPRT for difficult-to-cut materials machining

  KATO Yuya, SUZUKI Norikazu, SHAMOTO Eiji, NAIKI Yukio, TAKAGI Yuji

  <p>In order to improve milling performance of difficult-to-cut materials, a unique milling cutter with SPRT (Self-Propelled-Rotary-Tool) was developed. Use of slide bearings enables a compact SPRT mechanism, while influence of bearing friction becomes not negligible. To attain self-revolution of a circular insert regardless of the bearing friction, the cutter geometry was optimized. Through face milling experiments of Inconel 718, superior tool wear resistance was verified as compared to the conventional milling without insert rotation. Analytical result of the measured cutting forces also indicated interesting phenomena in SPRT milling.</p>

  The Japan Society of Mechanical Engineers, 2016, The Proceedings of The Manufacturing & Machine Tool Conference, 2016, Japanese


• Suppression of chatter vibration by unequal pitch turning applying estimated cutting force

  KADOTA Takashi, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, YOSHIOKA Hayato, SUZUKI Norikazu, KAKINUMA Yasuhiro

  Multi-tasking machine tool with multi-turret is attracting a great deal of attention, which can offer higher efficiency and higher accuracy. However, chatter vibration generated during parallel turning with two tools might be one of the bottlenecks for higher material removal rate. To suppress chatter vibration, we proposed unequal pitch turning method in this research. In this method, the upper tool was properly controlled based on optimum pitch angle calculated from spindle speed and chatter frequency. Chatter frequency was identified from estimated cutting force by disturbance observer. From the result of parallel turning test, it is clear that chatter vibration can be suppressed by controlling the upper tool based on optimum pitch angle.

  The Japan Society of Mechanical Engineers, 2016, The Proceedings of The Manufacturing & Machine Tool Conference, 2016(0) (0), A07, Japanese


• Design of irregular pitch end mills to attain robust suppression of regenerative chatter

  N. Suzuki, R. Ishiguro, T. Kojima

  Elsevier USA, 2016, CIRP Annals - Manufacturing Technology, 65(1) (1), 129 - 132, English

  [Refereed]

  Scientific journal


• PRIMITIVE STUDY ON MODEL-BASED PROCESS IDENTIFICATION BY UTILIZING FORCE ESTIMATION TECHNIQUES

  Norikazu Suzuki, Ryosuke Ikeda, Eiji Shamoto

  2016, PROCEEDINGS OF THE ASME 11TH INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE, 2016, VOL 2, English

  [Refereed]

  International conference proceedings


• Mechanics of Chip-Guiding Cutting with Grooved Tools

  AOKI Tomoya, SENCER Burak, SUZUKI Norikazu, KOIDE Tomio, SHAMOTO Eiji

  The mechanics of &ldquo;chip-guiding cutting&rdquo; with grooved tools are investigated in the present study. The chip-guiding cutting has been proposed by the authors to realize continuous chip disposal. It has been clarified in the previous study that chips can be guided successfully into desired directions with the grooved round-nose tools, but the mechanics of the new cutting process with the guide grooves has not been clarified. Fundamental chip-guiding cutting experiments are carried out with grooved straight-edge tools in this study. An analytical model for the chip-guiding cutting process is developed. Effects of the chip-guiding on the process parameters such as cutting forces are investigated accurately by the proposed model and validated by cutting experiment. Both experimental and analytical results unveil that chip flow direction can be controlled by chip-guiding forces generated by the side-walls of the groove structure engraved on the rake face. It is shown that as the chip flow direction can be altered to the various guide directions from the original one, and the proposed model predicts that as the guiding force increases, shear angle decreases and thus resultant cutting force is increased only slightly. Therefore, when the guide direction is not dramatically different from the original chip flow direction, the resultant cutting force is not increased significantly, which make the process favorable. These results support the fact that proposed model captures the critical cutting mechanics accurately.

  The Japan Society for Precision Engineering, 2016, Journal of the Japan Society for Precision Engineering, 82(1) (1), 75 - 81, Japanese

  [Refereed]

  Scientific journal


• S1330102 Experimental Verification of Design Theory for End mills to Attain Robust Chatter Suppression

  ISHIGURO Rikiya, SUZUKI Norikazu, SHAMOTO Eiji

  Chatter vibration in milling often results in poor surface finish and rapid tool wear, consequently limiting productivity. It is known that regenerative effect, which causes chatter vibration, can be suppressed by utilizing irregular pitch cutters. In order to attain robust regeneration suppression for arbitrary chatter frequency, the authors have proposed a novel design theory of irregular pitch cutters. The fundamental mechanism of it is the simultaneous suppression of multi-mode regenerations. In the present study, the effect on chatter suppression has been verified through a series of end milling experiment. Analytical and experimental results indicated that the chatter stability is effectively increased by utilizing the irregular pitch cutter designed by the proposed theory.

  The Japan Society of Mechanical Engineers, 2015, The Proceedings of Mechanical Engineering Congress, Japan, 2015, _S1330102 - -_S1330102-, Japanese


• Analysis on surface-asperity structure of polishing pad and investigation on its mechanical model

  Hashimoto Yohei, Oshika Shingo, Suzuki Norikazu, Shamoto Eiji

  研磨加工において，研磨パッド表面に存在する突起の構造とその微視的な変形挙動は，加工メカニズムを考察する上で重要となる．本研究では，レーザ顕微鏡を用いて研磨に使用した研磨パッド表面形状の評価観察を行い，突起構造の分析とモデル化について検討した．そして，突起構造の変形挙動を表現する新しい力学モデルの検討を行った．

  The Japan Society for Precision Engineering, 2015, Proceedings of JSPE Semestrial Meeting, 2015, 541 - 542, Japanese


• A new estimation method of transfer function of mechanical structures by utilizing internal information of CNC

  Ikeda Ryousuke, Suzuki Norikazu, Sano Kenji, Shamoto Eiji

  機械構造の振動モデルを仮定し，切削力モデルと外乱オブザーバ技術を利用して切削力と外乱力を推定することで，工作機械の制御ループ外に存在する機械構造の伝達関数をCNCの内部情報のみから推定する新しい手法を提案する．剛性が低くなるように設計したツールホルダを超精密工作機械のテーブルに固定して断続的な旋削実験を行い，提案手法により周波数伝達関数の計測とモーダルパラメータの推定が可能であることを確認した．

  The Japan Society for Precision Engineering, 2015, Proceedings of JSPE Semestrial Meeting, 2015, 261 - 262, Japanese


• Ultra-precision nano-structure fabrication by amplitude control sculpturing method in elliptical vibration cutting

  Jianguo Zhang, Norikazu Suzuki, Yilong Wang, Eiji Shamoto

  Corresponding, Jan. 2015, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 39, 86 - 99, English

  [Refereed]

  Scientific journal


• A NEW CONTACT MODEL OF PAD SURFACE ASPERITIES UTILIZING MEASURED GEOMETRICAL FEATURES

  Yohei Hashimoto, Shingo Oshika, Norikazu Suzuki, Eiji Shamoto

  2015, 2015 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT), English

  [Refereed]

  International conference proceedings


• Fundamental investigation of ultra-precision ductile machining of tungsten carbide by applying elliptical vibration cutting with single crystal diamond

  Jianguo Zhang, Norikazu Suzuki, Yilong Wang, Eiji Shamoto

  Corresponding, Nov. 2014, JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 214(11) (11), 2644 - 2659, English

  [Refereed]

  Scientific journal


• Primary study on nonlinear viscoelasticity measurement of chemical mechanical polishing pads by applying on-machine compression test

  Norikazu Suzuki, Akimitsu Kato, Masakazu Asaba, Eiji Shamoto

  May 2014, JAPANESE JOURNAL OF APPLIED PHYSICS, 53(5) (5), English

  [Refereed]

  Scientific journal


• High Efficiency Elliptical Vibration Cutting of Steel using Large Nose Radius Single Crystal Diamond Tool

  Wang Yilong, Suzuki Norikazu, Shamoto Eiji

  Thus far, Elliptical Vibration Cutting has shown its superior machining performance in steel machining by using which the diamond tool life can be significantly improved. However, this machining technology is currently limited to the relatively small-size workpiece machining due to the small feed rates. If it is used to machine large-size steel workpiece, the machining time and cumulative cutting distance (or tool wear) will be remarkably increased which in turn dramatically increase the machining cost and cycle time. In order to apply this emerging machining technology effectively in industrial application, Elliptical Vibration Cutting with large nose radius single crystal diamond tool was proposed in this paper. However, the minimum uncut chip thickness (under which the material is not sheared but ploughed), that due to the presence of the tool edge radius becomes a major challenge when the large nose radius diamond tool is employed. Therefore, the influence of the minimum uncut chip thickness on material removal behavior during diamond machining needs to be understood and implemented in models. In this paper a simple but practical analytical model was developed for the optimizat

  The Japan Society for Precision Engineering, 2014, Proceedings of JSPE Semestrial Meeting, 2014, 1021 - 1022, Japanese


• Influence of process damping on chatter stability in turning operations

  Uchiyama Daisuke, Suzuki Norikazu, Shamoto Eiji

  低切削速度領域においてプロセスダンピングと呼ばれる現象が発現し，びびり振動の安定性が向上することが知られている．多くの解析モデルがすでに提案されているのに対し，実験的なプロセスの評価は十分になされていない．本研究では，端面旋削実験により切削プロセスに対するプロセスダンピングの影響について評価を行う．さらに，材料物性と工具形状に基づきプロセスダンピングの影響を定量化する新しい解析モデルを提案する．

  The Japan Society for Precision Engineering, 2014, Proceedings of JSPE Semestrial Meeting, 2014, 753 - 754, Japanese


• Influence of various modelling on prediction accuracy in polishing pressure simulation

  Hashimoto Yohei, Suzuki Norikazu, Shen Yue, Shamoto Eiji

  著者らはこれまでに，CMPプロセスに対する研磨パッドの粘性特性と研磨パッド表面の凹凸形状による非線形弾性特性を考慮した解析手法を開発している．本報では，ジンバル方式の研磨ヘッド構造を利用するCMPプロセスを対象とした検討により，各種物性や形状のモデル化が研磨圧力シミュレーションの結果に与える影響について明らかにする．さらに，実験結果と比較することにより解析精度を検証する．

  The Japan Society for Precision Engineering, 2014, Proceedings of JSPE Semestrial Meeting, 2014, 35 - 36, Japanese


• Tool failure mechanism in high-speed ceramic milling of super alloys

  Suzuki Norikazu, Enmei Risa, Hashimoto Yohei, Shamoto Eiji, Hatano Yuki

  航空機部品等に用いる耐熱合金の加工では，セラミック工具を用いた高速ミーリングによる高能率加工が利用されている．しかし，工具損耗が激しく寿命が短いという問題があり，その改善が要求されている．本研究では，インコネル718の加工で摩耗した工具形状を評価し，これを考慮した切削力モデルを考案した．さらに，切削力測定結果との比較により工具表面に生じる応力場を推定し，特徴的な工具損耗メカニズムについて考察を行った．

  The Japan Society for Precision Engineering, 2014, Proceedings of JSPE Semestrial Meeting, 2014, 555 - 556, Japanese


• Force prediction in cutting operations with self-propelled rotary tools considering bearing friction

  Norikazu Suzuki, Toru Suzuki, Ran An, Kota Ukai, Eiji Shamoto, Yu Hasegawa, Nobukazu Horiike

  2014, 6TH CIRP INTERNATIONAL CONFERENCE ON HIGH PERFORMANCE CUTTING (HPC2014), 14, 125 - 129, English

  [Refereed]

  International conference proceedings


• Analytical Investigation on Polishing Pressure Distribution by Utilizing Three-Dimensional Process Simulation

  Yohei Hashimoto, Norikazu Suzuki, Akimitsu Kato, Masakazu Asaba, Eiji Shamoto, Hozumi Yasuda, Satoru Yamaki

  2014, 2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT), 32 - 34, English

  [Refereed]

  International conference proceedings


• Tool Failure Mechanism in High-Speed Milling of Inconel 718 by Use of Ceramic Tools.

  Norikazu Suzuki, Risa Enmei, Yohei Hashimoto, Eiji Shamoto, Yuki Hatano

  Fuji Technology Press, 2014, IJAT, 8(6) (6), 837 - 846, English

  [Refereed]


• Suppression of regenerative chatter vibration in multiple milling utilizing speed difference method - Analysis of double-sided milling and its generalization to multiple milling operations

  Eiji Shamoto, Tatsuya Mori, Burak Sencer, Norikazu Suzuki, Rei Hino

  Jul. 2013, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 37(3) (3), 580 - 589, English

  [Refereed]

  Scientific journal


• Design of variable helix cutters to suppress regeneration in end milling operations

  Suzuki Norikazu, Kojima Takuya, Shamoto Eiji

  切削加工において再生効果は自励びびり振動の安定性に大きく影響する．不等リードエンドミルはびびり振動の周波数や主軸回転数などの変化に対してロバストに再生効果を抑制することができる特徴を持つ．しかし，最適な工具形状を設計しなければ優れた抑制効果を実現することはできない．本研究では，再生効果の影響をロバストに抑制することのできる不等リードエンドミルの工具形状の新しい設計手法を提案する．

  The Japan Society for Precision Engineering, 2013, Proceedings of JSPE Semestrial Meeting, 2013, 463 - 464, Japanese


• EHL analysis of CMP process with airbag type polishing head

  Asaba Masakazu, Suzuki Norikazu, Shamoto Eiji, Yasuda Hozumi, Yamaki Satoru

  半導体CMPの量産工程で一般に用いられるエアーバッグ研磨ヘッド構造を考慮したCMPプロセスのEHL解析モデルを開発した．本研究では，研磨ヘッドの構造として，リテーナリングやメンブレンゴムを考慮するとともに，ウェハ等との接触問題を考慮する．また，ALE有限要素法を適用することで動的な問題を取り扱うとともに，研磨パッドの非線形粘弾性を同時に考慮することで，従来不可能であった実用的な研磨プロセスの解析の実現に挑戦する．

  The Japan Society for Precision Engineering, 2013, Proceedings of JSPE Semestrial Meeting, 2013, 645 - 646, Japanese


• Modeling and controller design of gantry type stage for suppressing torsional vibration of machine tools with low base stiffness

  Ishizaki Kosuke, Sencer Burak, Suzuki Norikazu, Shamoto Eji

  ベースの剛性不足に起因して機械構造全体で生じる低周波振動により，工作機械の制御系の性能が低下する問題がある．本研究では，問題となりやすいベースのねじり振動モードの影響を考慮したガントリーテーブルの制御システムをモデル化する．そして，ベースのねじれ振動を抑制する新しい補償器とその設計手法を提案する．実機を用いて検証を行い，提案手法によってねじり振動が効果的に抑制されることを確認した．

  The Japan Society for Precision Engineering, 2013, Proceedings of JSPE Semestrial Meeting, 2013, 817 - 818, Japanese


• Non-Contact On-Machine Measurement of Turning Accuracy by Utilizing Image Sensor - Development of measurement method for workpiece diameter -

  Asari Naohiro, Suzuki Norikazu, Shamoto Eiji

  従来，旋削加工の高精度化のため，各種機上計測手法が実用に供されている．しかし，これらの従来手法では，工作物への接触や計測装置の大きさによって計測範囲や形状に制約が多い．そこで本研究では，工具をイメージセンサに取り換えて工作物を回転し，加工面の移動距離と回転角度から直径を計測することで，制約の少ない機上計測手法を提案・開発する．本報では，提案手法とその画像処理方法，計測の繰返し性等について報告する．

  The Japan Society for Precision Engineering, 2013, Proceedings of JSPE Semestrial Meeting, 2013, 905 - 906, Japanese


• Investigation on machining performance of amplitude control sculpturing method in elliptical vibration cutting

  J. Zhang, N. Suzuki, E. Shamoto

  Elsevier B.V., 2013, Procedia CIRP, 8, 328 - 333, English

  [Refereed]

  International conference proceedings


• Analysis of three-dimensional cutting process with thin shear plane model

  Eiji Shamoto, Masahiro Kato, Norikazu Suzuki, Rei Hino

  2013, Journal of Manufacturing Science and Engineering, Transactions of the ASME, 135(4) (4), English

  [Refereed]

  Scientific journal


• A novel design method of variable helix cutters to attain robust regeneration suppression

  Kojima Takuya, Norikazu Suzuki, Rei Hino, Eiji Shamoto

  2013, 14TH CIRP CONFERENCE ON MODELING OF MACHINING OPERATIONS (CIRP CMMO), 8, 363 - 367, English

  [Refereed]

  International conference proceedings


• Elasto Hydrodynamic Lubrication Analysis of CMP Process with Consideration of Micro Asperity Contact of Polishing Pad

  HASHIMOTO Yohei, SUZUKI Norikazu, ASABA Masakazu, HINO Rei, SHAMOTO Eiji

  A soft EHL analysis model of Chemical Mechanical Polishing (CMP) is developed in the present study. Since a surface of a polishing pad is filled with micro asperities due to conditioning, the polishing pad deforms in a nonlinear manner by contacting to a wafer. A viscosity of the polishing pad also affects stress concentration beneath the edge of the wafer. In order to take into account both effects, damping behavior of the polishing pad and macroscopic characteristics of the polishing pad asperity deformation are considered at the same time in the proposed analysis. Based on the traditional contact model, i.e., Greenwood-Williamson model, nonlinear elasticity of the surface asperity layer of the polishing pad is formulated, and Arbitrary Lagrangian-Eulerian (ALE) method is applied to deal with dynamic structure analysis. A series of three-dimensional EHL analysis was conducted using the proposed model. Effects of viscosity of the polishing pad and the nonlinear elasticity caused by the polishing pad asperities on distributions of contact stress and fluid pressure were examined. Analytical results indicated that both distributions greatly depend on the viscosity and the nonlinear elasticity of the polishing pad, and thus the consideration of nonlinear viscoelastic behavior in the pad-wafer contact is important to predict the polishing pressure distribution, especially beneath wafer leading edge.

  The Japan Society for Precision Engineering, 2013, Journal of the Japan Society for Precision Engineering, 79(1) (1), 73 - 80, Japanese

  [Refereed]


• Identification of transfer function by inverse analysis of self-excited chatter vibration in milling operations

  Norikazu Suzuki, Yusuke Kurata, Takashi Kato, Rei Hino, Eiji Shamoto

  Oct. 2012, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 36(4) (4), 568 - 575, English

  [Refereed]

  Scientific journal


• Identification of nonlinear viscoelasticity of polishing pad using an on-machine compression tester

  Norikazu Suzuki, Masakazu Asaba, Yohei Hashimoto, Eiji Shamoto

  VDE Verlag GmbH, 2012, ICPT 2012 - International Conference on Planarization/CMP Technology, Proceedings, 217 - 221, English

  International conference proceedings


• EHL Analysis of CMP process with consideration of dynamic contact problem of polishing pad with surface asperities

  鈴木 教和, 橋本 洋平, 浅羽 正和

  砥粒加工学会, 2012, 砥粒加工学会学術講演会講演論文集 ABTEC, 12 - 15, Japanese


• Study on Fluid Bearing Utilizing Traveling Waves:-Development of Modular Piezoelectric Traveling-Wave Actuator and Precision Slider-

  Komatsu Hiroki, Kato Takashi, Sencer Burak, Suzuki Norikazu, Shamoto Eiji

  本研究では，進行波を利用した新たな非接触流体軸受を提案している．本軸受は，軸受面上に発生させた進行波によって軸受中心に向かう力を流体に与えることで，軸受隙間内の圧力を上昇させ非接触支持を実現する．本報では，装置の製作性と性能を向上させるためにモジュール化した進行波圧電アクチュエータを開発し，そのアクチュエータを用いた軸受の開発・評価を行う．また本軸受を用いた精密スライダの開発を目指す．

  The Japan Society for Precision Engineering, 2012, Proceedings of JSPE Semestrial Meeting, 2012, 1129 - 1130, Japanese


• Novel Design Method of Irregular Pitch Tools for Simultaneous Suppression of Multi-Mode Regenerations

  Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

  切削加工における自励びびり振動は再生効果に強く依存する．不等ピッチ工具を用いて再生効果を抑制することで安定限界を効果的に向上することもできるが，その効果はピッチ角の設計に依存する．本研究では，エンドミル加工における再生効果の新しい定量化手法を提案するとともに，共振周波数の異なる複数の振動モードが存在する際に，それらの振動モードに対して同時に再生効果を打ち消す新しいピッチ角の設計手法を提案する．

  The Japan Society for Precision Engineering, 2012, Proceedings of JSPE Semestrial Meeting, 2012, 181 - 182, Japanese


• Study on Milling of Difficult-to-Cut Materials with Self-Propelled Rotary Tools

  An Ran, Suzuki Norikazu, Shamoto Eiji, Ukai Kota, Hasegawa Yu, Yoshida Hiroyuki, Ishikawa Yoichi, Yamada Sachio

  インコネル等に代表される難削材の切削加工では，工具摩耗の抑制にロータリ切削が効果的であることが知られている．本研究では，傾斜切削理論に基づいたロータリ切削機構のモデル化を行う．さらに，その切削機構の特徴を示すとともに基礎的なロータリ切削実験による検証を行う．さらに，従動式ロータリ機構を適用したロータリミリング工具を試作し，インコネル718のロータリミリングにおける工具摩耗抑制効果について評価を行う．

  The Japan Society for Precision Engineering, 2012, Proceedings of JSPE Semestrial Meeting, 2012, 239 - 240, Japanese


• Study on Avoidance of Regenerative Chatter Vibration by Tool Path/Posture Optimization:- Proposal of Concept and Application to Turning Process -

  Shamoto Eiji, Fujimaki Shunsuke, Suzuki Norikazu

  本研究では，工具軌跡／姿勢を最適化することで再生型びびり振動を回避する新たな手法を提案する．びびり振動安定性が主軸回転数や切込み量等の切削条件に依存することはよく知られているが，工具軌跡にも依存することはあまり知られていない．本稿では，旋削加工を例に，工具形状や切込み量，送り量を考慮した上で工具軌跡／姿勢を最適化するための簡易指標を示し，その指標の有用性を解析及び実験的に検証する．

  The Japan Society for Precision Engineering, 2012, Proceedings of JSPE Semestrial Meeting, 2012, 345 - 346, Japanese


• A novel tool path/posture optimization concept to avoid chatter vibration in machining - Proposed concept and its verification in turning

  Eiji Shamoto, Shunsuke Fujimaki, Burak Sencer, Norikazu Suzuki, Takashi Kato, Rei Hino

  2012, CIRP ANNALS-MANUFACTURING TECHNOLOGY, 61(1) (1), 331 - 334, English

  [Refereed]

  Scientific journal


• Influence of material composition on ductile machining of tungsten carbide in elliptical vibration cutting

  Jianguo Zhang, Norikazu Suzuki, Takashi Kato, Rei Hino, Eiji Shamoto

  2012, EMERGING TECHNOLOGY IN PRECISION ENGINEERING XIV, 523-524, 113 - 118, English

  [Refereed]

  International conference proceedings


• Development of novel anisotropic boring tool for chatter suppression

  Norikazu Suzuki, Kohei Nishimura, Ryo Watanabe, Takashi Kato, Eiji Shamoto

  2012, FIFTH CIRP CONFERENCE ON HIGH PERFORMANCE CUTTING 2012, 1, 56 - 59, English

  [Refereed]

  International conference proceedings


• A Novel Design Method of Irregular Pitch Cutters to Attain Simultaneous Suppression of Multi-Mode Regenerations

  Norikazu Suzuki, Takuya Kojima, Rei Hino, Eiji Shamoto

  2012, 3RD CIRP CONFERENCE ON PROCESS MACHINE INTERACTIONS, 4, 98 - 102, English

  [Refereed]

  International conference proceedings


• Confocal Microscopic Evaluation of Mixing Performance for Three-Dimensional Microfluidic Mixer

  Takao Yasui, Yusuke Omoto, Keiko Osato, Noritada Kaji, Norikazu Suzuki, Toyohiro Naito, Yukihiro Okamoto, Manabu Tokeshi, Eiji Shamoto, Yoshinobu Baba

  Jan. 2012, ANALYTICAL SCIENCES, 28(1) (1), 57 - 59, English

  [Refereed]

  Scientific journal


• Development of Mass-Producible Rapid Mixer Based on Baker's Transformation

  SHAMOTO Eiji, KATO Takashi, SUZUKI Norikazu

  We developed a new passive-type lamination mixer for high viscosity fluid with a low Reynolds number, based on the baker's transformation (BT). BT is the best transformation for mixing fluids of laminar flow. However, there was difficulty in mass-producing the BT structure especially for micro devices like MicroTAS, Lab-on-a-Chip and Micro-Reactors, because conventional BT mixers require three-dimensional (3D) piping structures. We have successfully developed the easy-to-massproduce BT mixer by changing that concept of 3D piping structures to 3D channel structures. The 3D channel structures are not easy to produce by photolithography unlike the conventional mixers, while they can be easily mass-produced by molding once their 3D molds are produced. In this report, we newly developed a miniature scale BT mixer to meet the needs for mixing high viscosity fluids in food processing, resin blending, etc. An experiment for mixing different colored hardening silicone elastomers was performed by using the prototype mixer made of aluminum alloy, and the good BT mixing result was obtained, with observing several cross sectional patterns. The numerical fluid analysis also gave similar results of the patterns to those observed in the experiment.

  The Japan Society of Mechanical Engineers, 2012, TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series B, 78(788) (788), 762 - 768, Japanese

  [Refereed]

  Scientific journal


• Investigation of tool wear suppression in ultraprecision diamond machining of die steel

  Yilong Wang, Norikazu Suzuki, Eiji Shamoto, Qingliang Zhao

  Corresponding, Oct. 2011, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 35(4) (4), 677 - 685, English

  [Refereed]

  Scientific journal


• Study on Tool Damage in High-speed Ceramic Milling of Superalloys:Effects of Dynamic Stiffness of Mechanical Structure and Cutting Conditions

  Eto Jun, Suzuki Norikazu, Shamoto Eiji, Yoshida Hiroyuki

  航空機エンジン部品等に用いられる超耐熱合金インコネル718の加工では，従来の超硬工具による低速加工に置き換わり，セラミック工具を用いた高速ミリングによる高能率加工が普及してきている．しかし，工具損耗が極めて激しいため，工具寿命の改善が必要とされている．本研究では，工具損耗に影響を与える因子として機械構造の動剛性や加工条件に着目し，各条件が工具損耗に与える影響について実験に基づいた基礎検討を行った．

  The Japan Society for Precision Engineering, 2011, Proceedings of JSPE Semestrial Meeting, 2011, 231 - 232


• Identification of nonlinear viscoelasticity of polishing pad using a compression tester

  Suzuki Norikazu, Asaba Masakazu, Hashimoto Yohei, Shamoto Eiji

  CMPに用いられる研磨パッドの圧縮試験を行い，その非線形弾性特性および比例減衰係数の同定を試みた．粘性特性を精度よく同定するには，高ひずみ速度で圧縮試験を行う必要があるため，本研究では，VCM（ボイスコイルモータ）を用いた圧縮試験装置を開発した．さらに，古典的な力学モデルに基づいて研磨パッド表面層のモデル化を行い，実験結果と比較することでその凹凸パラメータを同定し，研磨圧力の解析に適用した．

  The Japan Society for Precision Engineering, 2011, Proceedings of JSPE Semestrial Meeting, 2011, 161 - 162


• Chatter Suppression in Cutting with Irregular Pitch / Variable Helix End mills:Effect of Radial Depth of Cut on Chatter Stability

  Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

  不等ピッチ/リードエンドミルは自励びびり振動の発生原因である再生効果を抑制し得るが，条件によっては効果的に自励びびり振動を抑制し得ないこともある．本研究では，Multi-Frequencyモデルを用いて，これらの工具を用いた場合の安定限界に対する半径方向切込みの影響について検討した．解析の結果，切込みが浅くモードカップリングが生じにくい条件で自励びびり振動を効果的に抑制し得ることを確認した．

  The Japan Society for Precision Engineering, 2011, Proceedings of JSPE Semestrial Meeting, 2011, 315 - 316


• Control of chip flow with guide grooves for continuous chip disposal and chip-pulling turning

  E. Shamoto, T. Aoki, B. Sencer, N. Suzuki, R. Hino, T. Koide

  2011, CIRP ANNALS-MANUFACTURING TECHNOLOGY, 60(1) (1), 125 - 128, English

  [Refereed]

  Scientific journal


• Micro/nano sculpturing of hardened steel by controlling vibration amplitude in elliptical vibration cutting

  Norikazu Suzuki, Hideo Yokoi, Eiji Shamoto

  Jan. 2011, PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 35(1) (1), 44 - 50, English

  [Refereed]

  Scientific journal


• Microfluidic baker's transformation device for three-dimensional rapid mixing

  Takao Yasui, Yusuke Omoto, Keiko Osato, Noritada Kaji, Norikazu Suzuki, Toyohiro Naito, Masaki Watanabe, Yukihiro Okamoto, Manabu Tokeshi, Eiji Shamoto, Yoshinobu Baba

  2011, LAB ON A CHIP, 11(19) (19), 3356 - 3360, English

  [Refereed]

  Scientific journal


• Chatter Stability Limits in End Milling with Anisotropic Flexible Tools

  KURATA Yusuke, SUZUKI Norikazu, HINO Rei, SHAMOTO Eiji

  Self-excited chatter vibration in end milling is caused by the regeneration and mode coupling mechanisms. In order to avoid chatter vibration, both mechanisms need to be investigated. Past researches have shown that the mode coupling effect in end milling can be suppressed by using cutting tools with anisotropic dynamic characteristics. However, it is difficult to apply previously developed analytical models for predicting the chatter stability limits in end milling with the anisotropic tools. Hence, suitable conditions for chatter suppression and the overall phenomena have not been clarified thoroughly yet. This paper proposes a new analytical model to predict chatter stability limits in end milling with tools that have anisotropic transfer functions. The model considers the anisotropic tool to vibrate steadily in a rotating coordinate system rather than in an inertial coordinate system. The cutting process is formulated in this rotating coordinate system, and variation in the transfer function of the anisotropic tool with respect to the spindle speed is considered. Fundamental cutting tests have been conducted to verify the proposed model. Experimentally identified stability limits agreed closely with the predictions. Furthermore, analytical investigations have shown that the transfer function of the cutting tool changes considerably with the spindle speed. This affects the chatter stability prediction significantly. Using the proposed model, it is concluded that higher stability limits can be achieved only at low spindle speed conditions by using anisotropic tools. However, the number of flutes on the tool is limited to be less than three, and they need to be arranged at suitable positions. The effect of the cutter helix also needs to be negligible.

  The Japan Society for Precision Engineering, 2011, Journal of the Japan Society for Precision Engineering, 77(1) (1), 97 - 104, Japanese

  [Refereed]

  Scientific journal


• Studies on Continuous Chip Disposal and Chip-Pulling Cutting

  SHAMOTO Eiji, YASUDA Koichiro, AOKI Tomoya, SUZUKI Norikazu, KOIDE Tomio

  Chips are generally assisted to curl and then broken into pieces by chip breakers. This conventional concept sometimes fails especially when the workpiece is highly ductile or the chip is thin and flexible. Contrary to this conventional method, a new concept of continuous chip disposal is proposed in the present research, where the chip is controlled not to curl and guided to a chip disposer. The key to this concept is chip control to suppress the curl and to guide the chip to desired direction. The continuous chip disposal can also be combined easily with chip-pulling cutting. It is known that the cutting process is improved drastically by pulling the chip, i.e. cutting force, energy and heat are all reduced remarkably. Therefore, new chip control methods are developed as basic technologies to realize the continuous disposal and the chip-pulling. A chip control method is proposed to suppress the up-curl by convex tool geometry, i.e. curved rake face with inverse curvature to the up-curl. Tools with the inversely curved rake faces are developed, and it is confirmed that the up-curl can be suppressed at a certain inverse curvature. Another chip control method is proposed to suppress the side-curl and to control the chip flow direction at the same time by forming guide grooves on the rake face. The tools with the guide grooves and a guide tunnel are developed, and it is demonstrated that the chip can be guided successfully along the guide grooves into the guide tunnel over a fairly wide range of conditions.

  The Japan Society for Precision Engineering, 2011, Journal of the Japan Society for Precision Engineering, 77(5) (5), 520 - 524, Japanese

  [Refereed]


• Dynamic Finite Element Analysis of Contact Stress in CMP Process

  HASHIMOTO Yohei, SUZUKI Norikazu, HINO Rei, SHAMOTO Eiji

  A dynamic analysis model of CMP process is developed by utilizing a finite element method in the present study. By considering relative motion of a wafer and a polishing pad in a steady-state process, a nonlinear equation of motion is derived based on Arbitrary Lagrangian-Eulerian (ALE) method in the proposed model. Since the dynamic CMP process in the steady-state can be treated as a static problem in an ALE coordinate system, computation time can be reduced significantly and meshing procedure can be simplified as compared with conventional dynamic structural analysis, i.e., time history response analysis. As a result, practical large scale problems can be solved accurately with consideration of the dynamic structural behavior. Two-dimensional structural analysis was carried out by applying the proposed model, and it was verified that the computation time can be reduced significantly as compared with the conventional analysis. Effects of viscosity of the polishing pad on polishing pressure distribution were examined, and it was clarified that stress concentration beneath the leading edge of the wafer greatly depends on the viscosity of the polishing pad, i.e., the consideration of dynamic viscoelastic behavior of the polishing pad is important to predict the polishing pressure distribution. The proposed model was subsequently applied to three-dimensional analysis of CMP process, and reasonable polishing pressure distribution, which was similar to that in the two-dimensional analysis, was derived successfully.

  The Japan Society for Precision Engineering, 2011, Journal of the Japan Society for Precision Engineering, 77(5) (5), 513 - 519, Japanese

  [Refereed]

  Scientific journal


• E04 Development of Control System for Optimizing Cutting Conditions

  UENO Hiroshi, ANDO Tomoharu, SENDA Harumitsu, SUZUKI Norikazu, SHAMOTO Eiji

  The chatter vibration excited during machining process deteriorates quality of workpiece surfaces, and accelerates tool wear. In addition, it often takes long time to find chatter-free cutting conditions. Therefore, a new control system is developed in the present research for searching the optimum spindle speed at which chatter stability is maximized. The developed system detects the chatter vibration that occurs during machining process using a vibration sensor, and then optimizes the spindle speed automatically in real time. This report presents an overview and an application of the developed system.

  The Japan Society of Mechanical Engineers, 2010, The Proceedings of The Manufacturing & Machine Tool Conference, 2010, 273 - 274, Japanese


• Stability of self-excited chatter vibration in boring operation with irregular pitch cutters

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  適切な不等ピッチ工具を利用することにより，自励びびり振動の発生原因となる再生効果を抑制し得ることが知られている．本研究ではボーリング加工を対象とし，不等ピッチ工具による自励びびり振動の抑制効果について検討を行う．まず，解析モデルを構築し実験的に検証を行った．さらに，モードカップリングの影響が小さい条件では効果的に抑制されるのに対し，大きい条件ではむしろ不安定になることを確認した．

  The Japan Society for Precision Engineering, 2010, Proceedings of JSPE Semestrial Meeting, 2010, 351 - 352


• Proposal of Multi-Stage Vibration Air Bearing

  Shamoto Eiji, Komatsu Hiroki, Yamaji Fumie, Owaki Yoshihiro, Suzuki Norikazu

  本研究では，まず，狭いすき間で振動する軸受面に，外部から気体を吸込んで圧力増加する現象が存在することを見出した．これを多段にして複数回の圧力増加を繰返し，より高圧を発生する新しい軸受として，多段振動気体軸受を提案する．さらに本報では，試作開発した本軸受装置の測定と，軸受隙間内気体の有限要素モデルによる解析により，軸受性能について検討した結果について報告する．

  The Japan Society for Precision Engineering, 2010, Proceedings of JSPE Semestrial Meeting, 2010, 661 - 662


• Chatter Stability in Turning and Milling with in Process Identified Process Damping

  Yusuke Kurata, S. Doruk Merdol, Yusuf Altintas, Norikazu Suzuki, Eiji Shamoto

  2010, JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING, 4(6) (6), 1107 - 1118, English

  [Refereed]

  Scientific journal


• Effect of Cross Transfer Function on Chatter Stability in Plunge Cutting

  Norikazu Suzuki, Kohei Nishimura, Eiji Shamoto, Kiyoshi Yoshino

  2010, JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING, 4(5) (5), 883 - 891, English

  [Refereed]

  Scientific journal


• FE Analysis of One-Directional and Elliptical Vibration Cutting Processes.

  Saeid Amini, Eiji Shamoto, Norikazu Suzuki, Mohammad, Javad Nategh

  2010, IJAT, 4(3) (3), 252 - 258

  [Refereed]


• 530 High-accuracy analysis of polishing pressure in CMP process

  SUZUKI Norikazu, HASHIMOTO Yohei, SHAMOTO Eiji

  The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By applying to the three dimensional (3D) coupled fluid-structure analysis of the CMP process, the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Consequently, the analytical results of polishing pressure and fluid pressure distributions considerably depend on the damping property too. The fluid pressure measuring experiment was also carried out, and it is confirmed that the feature of the measured fluid pressure distribution agrees with that simulated by developed CMP process analytical model.

  The Japan Society of Mechanical Engineers, 2009, The Proceedings of the Materials and processing conference, 2009, _530 - 1_-_530-2_, Japanese


• 164 Development of 200 kHz elliptical vibration tool

  Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

  The Japan Society of Mechanical Engineers, 2009, The Proceedings of Conference of Tokai Branch, 2009, 57 - 58, Japanese


• High Accuracy Analysis of Regenerative Chatter Vibration with Process Damping:Identification of process damping parameter by inverse analysis of chatter vibration

  Kurata Yusuke, Merdol S. Doruk, Altintas Yusuf, Suzuki Norikazu, Shamoto Eiji

  切削加工において，低速領域ではプロセスダンピングの影響によりびびり振動が発生しにくいことが知られている．これを考慮した簡易的な解析モデルが考案されているが，従来手法はその影響を考慮するための変数の同定精度が低く，高精度な解析が難しいという問題があった．これに対し，本研究ではびびり振動の逆解析を利用した変数の新しい同定手法を考案し，高精度な安定限界解析が可能であることを実験的に確認した．

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 645 - 646


• Development of Sub-MHz Elliptical Vibration Tool

  Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

  振動切削では，超音波領域の振動を用いて断続的な加工を行うことによりなどさまざまな優れた効果が得られることが知られている．一般に20～40kHz程度の周波数が利用されるが，それ以上の高周波振動を利用した場合にどのような効果が得られかについては詳しく検討されていない．そこで，本研究では従来と比べて1桁程度周波数の高いサブMHzの楕円振動工具を試作し，その加工特性について評価を行った．

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 49 - 50


• Development of Sculptured Surface Machining Technology for Hardened Steel by Utilizing Two-degree-of-freedom Elliptical Vibration Tool

  Suzuki Norikazu, Yokoi Hideo, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

  インサート工具の突き出し長さが大きく，傾斜した方向に軸振動を発生する自由曲面加工用の2自由度超音波楕円振動工具を開発した．さらに，焼入れ鋼の溝加工実験に適用し，びびり振動の発生メカニズムについて考察を行うとともに，安定限界向上の可能性について検討を行った．その結果，インサート工具の形状を非対称にすることでモードカップリング型のびびり振動が抑制され，安定限界切込みが増大することを確認した．

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 47 - 48


• Measurement of Fluid Pressure Distribution in CMP Process

  Suzuki Norikazu, Adachi Yosuke, Hashimoto Yohei, Suzuki Ko

  CMPプロセスでは，ウェハと研磨パッド間が潤滑状態となり，流体圧力が生じることが知られている．しかし，研磨パッドや研磨ヘッドは回転運動を行うため，その界面の流体圧力の測定は難しい．本研究では，無線通信により流体圧力を遠隔計測する装置を試作し，ウェハ－研磨パッド間の流体圧力の計測実験を行った．さらに，著者らが開発しているCMPプロセス解析との比較を行った．

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 321 - 322


• A Three Dimensional Coupled Fluid-Structure Analysis for CMP Process:Consideration on Damping Effect of Polishing Pad

  Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

  The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By extending to the three dimensional (3D) analysis and applying to the coupled fluid-structure analysis of the CMP process, the accurate CMP process model, which can consider the nonlinear dynamic motion, the damping effects and the stress concentration simultaneously, was developed in the present research. It was applied to the 3D CMP process analysis, and the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Thus, there is a possibility that the developed model can estimate the polishing stress and fluid pressure distributions of the CMP process accurately.

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 315 - 316


• Simultaneous face milling of two sides of plates with high accuracy and high efficiency:Suppression of regenerative chatter vibration by speed difference between two spindles

  Shamoto Eiji, Nishimura Kohei, Kurata Yusuke, Suzuki Norikazu, Mori Tatsuya

  板材の加工は裏面をマグネットにより固定し，表面をフライス加工する方法が一般的である．しかし，二面を片面ずつ切削するために効率が低く，また弾性変形させた状態で切削することにより加工精度も低いことが問題となっている．これに対し，著者らは両面同時フライス加工法を採用し，それに伴う板材の剛性低下や複数主軸の同時使用に起因する再生型びびり振動を，左右主軸に回転数差を設けることにより抑制する手法を考案した．

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 577 - 578


• Nonlinearity compensation for piezoelectric actuators based on non-creep line:Study on effects of driving speed and preload

  Shinoda Morio, Shamoto Eiji, Suzuki Norikazu, Tsukamoto Go, Yamauchi Akira

  圧電素子は高剛性、高分解能、高速応答性といった長所を持つため、位置決め装置のアクチュエータとして利用される。しかし、ヒステリシス、クリープといった非線形性を持つため位置決め性能が低下する。そこで本研究では、クリープの生じない変位と電圧の関係（非クリープ線）の発見に基づき、非線形性を補償するようにオープンループで位置決めを行う方法を開発している。本報では駆動速度、プリロードの影響について報告する。

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 631 - 632


• Development of fluidic mixer with high productivity and mixing rate by applying principle of baker′s transformation

  Omoto Yusuke, Suzuki Norikazu, Shamoto Eiji

  従来提案されているマイクロミキサは主に半導体プロセスにより作成される．振動装置などの特殊な機構を必要とする場合も多い．これに対し著者らは，金型により量産成形することができ，かつ特殊な機構を必要としない高効率マイクロミキサを考案した．本発表では，考案したミキサについて流体解析と模型実験を行い，ともにおおむね目的とする流体の挙動が確認されたことについて述べる．

  The Japan Society for Precision Engineering, 2009, Proceedings of JSPE Semestrial Meeting, 2009, 795 - 796


• Chatter suppression in milling with anisotropic tools

  Yusuke Kurata, Norikazu Suzuki, Rei Hino, Eiji Shamoto

  2009, 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science, 547 - 552, English

  [Refereed]

  International conference proceedings


• Development of elliptical vibration cutting technology and its application to ultraprecision / Micro machining of hard / Brittle materials

  E. Shamoto, N. Suzuki

  2009, Advanced Materials Research, 69-70, 133 - 137, English

  [Refereed]

  International conference proceedings


• Comprehensive Study on Milling Conditions to Avoid Forced / Self-Excited Chatter Vibrations

  SUZUKI Norikazu, IKADA Tsutomu, HINO Rei, SHAMOTO Eiji

  Chatter vibrations limit machining productivity and sometimes result in reduction of tool life in the end-milling process. There are two major types of chatter vibrations, i.e., forced and self-excited types. Their generation mechanics are different, and thus their characteristics and strategies to avoid them are also different. It is, therefore, needed in practice to understand their relationship and to select efficient milling conditions to stabilize the process for the self-excited chatter vibration and to minimize the forced chatter vibration at the same time. However, most of past research works have been focused only on the self-excited chatter vibration, and detailed analysis of the forced chatter vibration and its relationship to the self-excited chatter vibration can not be found in the literature. Thus, an analytical model of the end milling process with the forced chatter vibration is developed and verified experimentally. Then, the characteristics of the forced type and its relationship to the self-excited type are clarified, and the milling conditions to avoid the both types are clarified by utilizing the analytical model developed here and the model of the self-excited type developed in the past research.

  The Japan Society for Precision Engineering, 2009, Journal of the Japan Society for Precision Engineering, 75(7) (7), 908 - 914, Japanese

  [Refereed]

  Scientific journal


• Study on Re-entrant Flowshop Scheduling Problem(2nd report) : Proposal of Heuristic Scheduling Method

  HINO Rei, UEKAWA Daisuke, MORIKAWA Masanori, SUZUKI Norikazu, SHAMOTO Eiji

  Two new heuristic procedures for re-entrant flow shop scheduling problem are proposed to plan a feasible production schedule in industrial manufacturing factories. Each job is assigned to one of idle periods within a limited time on a cyclic Gantt chart. One heuristic procedure is for an assignment of a target job on the machine while an adequate the idle time is remained for undecided jobs. Another heuristic procedure is based on solutions for two classical optimization problems, or a job assignment problem and a knapsack problem. The starting time of the target job is optimally determined at each step in the scheduling. The results indicate that the proposed procedures give a good schedule in comparison with the optimal schedule derived theoretically. The Calculation times are also evaluated and verified a validity of the use in actual manufacturing factories.

  The Japan Society for Precision Engineering, Nov. 2008, Journal of the Japan Society of Precision Engineering, 74(11) (11), 1225 - 1230, Japanese

  [Refereed]

  Scientific journal


• Study on Re-entrant Flowshop Scheduling Problem (1st report) : Optimization by Mathematical Programming

  HINO Rei, UEKAWA Daisuke, MORIKAWA Masanori, SUZUKI Norikazu, SHAMOTO Eiji

  A new theoretical formulation for re-entrant flow shop scheduling problem is derived to plan an optimum production schedule by mixed integer programming. Flow time, which is an index of the evaluation of the planned schedule, is minimized to decrease amount of work-in-process. Cycle time, which is another important index, is determined by the total load time on a bottleneck machine to manufacture the products at the highest productivity. Both objective function and constraint conditions are described in linear expressions and a general optimization tool is adopted to solve the formulated scheduling problems. Another objective function is also introduced in order to shorten the time for the optimization. Computational scheduling results obtained by the optimization are evaluated and discussed in the present paper.

  The Japan Society for Precision Engineering, Oct. 2008, Journal of the Japan Society of Precision Engineering, 74(10) (10), 1119 - 1124, Japanese

  [Refereed]

  Scientific journal


• Elliptical vibration cutting of hard mold materials

  Eiji Shamoto, Norikazu Suzuki

  Optical Society of America (OSA), 2008, Optics InfoBase Conference Papers, English

  International conference proceedings


• 657 Study on restraint of creep of piezoelectric actuator

  TSUKAMOTO Go, SUZUKI Norikazu, SHINODA Morio, SHAMOTO Eiji

  The Japan Society of Mechanical Engineers, 2008, The Proceedings of Conference of Tokai Branch, 2008, 435 - 436, Japanese


• 256 Effect of off-diagonal elements in a transfer function on stability limits of regenerative chatter vibration in plunge cutting

  SUZUKI Norikazu, NISHIMURA Kohei, KURATA Yusuke, SHAMOTO Eiji

  The Japan Society of Mechanical Engineers, 2008, The Proceedings of Conference of Tokai Branch, 2008, 139 - 140, Japanese


• Experimental/Analytical Evaluation of Fluid Bearing Utilizing Traveling Waves

  Owaki Yoshihiro, Yamaji Fumie, Suzuki Norikazu, Syamoto Eiji

  本研究では進行波を利用した新しい流体軸受を提案している．本軸受では圧電素子を用いて軸受面に進行波を発生し，軸受面中心に向かう力を流体に与えることで軸受面下の圧力を上昇させ，非接触の支持を実現する．本報では本軸受の試作機に対する測定と既に構築している本軸受の軸受隙間の有限要素モデルによる解析により，本原理による軸受としての性能について検討する．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 937 - 938


• A Coupled Fluid-Structure Analysis for CMP Process:Construction of A Method for Dynamic Structural Analysis -

  Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

  CMPにおける従来のウェハ－研磨パッド間の接触応力解析においては，動的な解析モデルを扱う際に解析精度が低くなるという問題があった．これに対し，動的なプロセスを準静的に扱う構造解析モデルを考案し，動的接触応力解析の高精度化・高速化について検討を行った．その結果，提案手法を用いることにより，ウェハエッジ部における応力集中などの従来困難であった解析の精度が向上し，解析時間が大幅に短縮されることを確認した．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 853 - 854


• Regenerative effect and mode-coupling in self-excited chatter vibration

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  回転工具を用いる加工では，一般に再生効果とモードカップリングの影響が混在した自励型びびり振動が発生するが，通常これらの影響はほとんど区別されることはない．これに対し，本研究ではボーリング加工を対象として，再生効果とモードカップリングの影響を切り分けた実験条件において安定限界解析の比較を行った．その結果，それぞれの影響が小さくなる条件において安定限界が最も大きくなることを確認した．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 295 - 296


• FEM simulation of Elliptical Vibration Cutting

  Amini Saeid, Suzuki Norikazu, Shamoto Eiji

  Ultrasonic vibration cutting processes are modeled and simulated in the present research, utilizing MSC-Marc FEM software. The vibration is applied to the cutting tool in one or two directions denoted by vibration cutting (VC) and elliptical vibration cutting (EVC), respectively. The cutting forces and the stresses developed within the workpiece during the vibration cutting processes are estimated and compared with those in the conventional cutting (CC) process. The influence of various parameters such as speed ratio and amplitude are subsequently investigated. It is partially concluded that though the cutting force fluctuates periodically in VC and EVC, its average value changes from CC to VC and EVC in descending order. The cutting force decreases with a rise in the speed ratio in EVC and does not change in VC.

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 125 - 126


• Ultra-precision micro machining of hard material by applying elliptical vibration cutting:Proposal of texturing method by high-speed amplitude control

  Suzuki Norikazu, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

  楕円振動切削では，切込方向の振動振幅を能動的に制御することによって切込み深さに変動を与えることができる．本研究では，この特徴に基づき，振動振幅制御を利用した高硬度材の超精密微細テクスチャ加工技術を提案する．振動振幅を高速制御することが可能な約40kHzの楕円振動制御装置を用いて，焼入れ鋼のテクスチャ加工実験を行った．基礎的な溝加工実験の結果，良好な超精密微細加工を実現できることを確認した．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 127 - 128


• Improvement of Load Characteristics of 3 DOF Ultrasonic Elliptical Vibration Tool

  Suzuki Norikazu, Yokoi Hideo, Syamoto Eiji

  著者らは楕円振動切削を利用した焼入れ鋼の自由曲面加工法を提案し，これを実現するための3自由度超音波楕円振動工具を開発している．従来の振動工具においては，大きな切削負荷が生じた際に振動軌跡が乱れて仕上げ面性状の劣化や工具の欠損を引き起こす問題があった．そこで，本研究では振動子に取り付けるシャンク形状の変更による負荷特性の改善を検討した．その結果，大幅に負荷特性を改善し得ることを確認した．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 123 - 124


• Ultra-precision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (3rd Report):Study on extending tool life

  Suzuki Norikazu, Ebata Yusuke, Shamoto Eiji

  新しいガラス成型用金型材料として期待されているタングステン合金の超音波楕円振動切削においては，従来の研究によってダイヤモンド工具の急激な摩耗が仕上げ面性状の劣化を引き起こし問題となることが明らかになっている．本研究ではこの摩耗メカニズムに着目し，工具形状や結晶方位などの変更による工具寿命の延長について検討を行う．さらに，各種工具を用いた寿命試験により，その効果について検証を行った．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 1043 - 1044


• Inverse identification of a transfer function with experimental results in end milling

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  エンドミル加工のびびり振動の安定限界解析には伝達関数が必要となるが，小型もしくは複雑形状の機械構造や，回転中に伝達特性の変化する機械構造がびびり振動する場合には，伝達関数の高精度測定が難しいという問題がある．そこで，従来の伝達関数測定手法と異なり，加工実験中に計測されるびびり振動の周波数と実際の安定限界切込みから伝達関数を逆同定する手法を考案した．そして，加工実験により考案手法の検証を行った．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 69 - 70


• Effect of cross-terms in a transfer function on stabilitiy limits of regenerative chatter vibration:Study on plunge cuting

  Suzuki Norikazu, Nishimura Kohei, Shamoto Eiji, Yoshino Kiyoshi

  切削加工におけるびびり振動の安定限界に対して，機械構造の伝達特性におけるクロス項が与える影響について検討した研究はこれまでになく，ほとんどの場合には考慮すらされることがない．これに対し本研究では，びびり振動の安定限界に対して伝達特性のクロス項が与える影響について，その本質的な意味を明らかにするとともに，突切り切削を対象としてクロス項を考慮した再生型びびり振動の安定限界解析手法を提案する．

  The Japan Society for Precision Engineering, 2008, Proceedings of JSPE Semestrial Meeting, 2008, 71 - 72


• Analysis of 3D elliptical vibration cutting with thin shear plane model

  E. Shamoto, N. Suzuki, R. Hino

  2008, CIRP ANNALS-MANUFACTURING TECHNOLOGY, 57(1) (1), 57 - 60, English

  [Refereed]

  Scientific journal


• A new method to control work-in-process inventory for high manufacturing productivity

  Rei Hino, Norikazu Suzuki, Eiji Shamoto

  2008, MANUFACTURING SYSTEMS AND TECHNOLOGIES FOR THE NEW FRONTIER, 221 - 224, English

  [Refereed]

  International conference proceedings


• Job Shop Scheduling Focusing on Role of Buffers : 2nd Report, Feasibility Judgement by Utilizing Graph

  HINO Rei, KODAMA Yusuke, SUZUKI Norikazu, SHAMOTO Eiji

  A scheduling problem is formulated focusing on jobs stored in production resources in the present paper. In a production system with finite buffer capacity, the job are stored in not only buffers but also production resources such as machine tools and assembly robots. Therefore, successive jobs cannot be processed by the resources until the previous jobs are removed from them. In such a scheduling problem, certain processing orders of jobs are infeasible because start times and release times of the jobs can not be determined. The graph representation method for conventional scheduling problems is extended in order to judge feasibility of the present schedules, in which the jobs stored in the resources are taken into account. A local searching method is applied to improve the schedules of the production systems with finite buffer capacity. It gives an appropriate schedule in combination with the dispatching procedure proposed in the first report.

  The Japan Society of Mechanical Engineers, Nov. 2007, Transactions of the Japan Society of Mechanical Engineers C, 73(735) (735), 3084 - 3091, Japanese

  [Refereed]

  Scientific journal


• Study on Production Scheduling with Consideration of Synchronized Operations by Multiple Resources

  HINO Rei, KOBAYASHI Yasuhiko, SUZUKI Norikazu, SHAMOTO Eiji

  This study deals with scheduling problems with consideration of synchronized operations by multiple production resources. Transfer of a material between a machine tool and a conveying device by a human operator is a typical example of the synchronized operations. When the synchronized operations are taken into consideration, it is necessary to check conflicts between the resources before an appropriate job is assigned by Earliest Starting Time rule, which is one of the popular dispatching rules. A new sequence is proposed in the present paper to check the conflicts. Feasible scheduling with the consideration of synchronized operations is realized by combining the proposed sequence with a conventional dispatching rule. Computational scheduling results are shown in order to verify the effectiveness of the selecting sequences proposed here. Computational scheduling is carried out, and the results show that a practical production schedule can be planned without any conflicts by the proposed sequence, despite complex constraints due to the consideration of synchronized operations. Furthermore, a blocked status of the machine tool, the conveying device and the buffer appears on the Gantt chart unlike the conventional scheduling methods.

  The Japan Society for Precision Engineering, Jul. 2007, Journal of the Japan Society of Precision Engineering, 73(7) (7), 834 - 839, Japanese

  [Refereed]

  Scientific journal


• Ultraprecision Machining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting

  SUZUKI Norikazu, YAN Zhenmin, HARITANI Makoto, YANG Ji-bin, HAMADA Seiji, HINO Rei, SHAMOTO Eiji

  'Ultrasonic elliptical vibration cutting' technology is applied in the present research to ultraprecision machining of tungsten alloy, which is expected as a material of molds for glass parts instead of sintered tungsten carbide or CVD-silicon carbide. It is confirmed that ulptraprecision grooving of the tungsten alloy cannot be realized by the ordinary cutting. On the other hand, it can be realized by the elliptical vibration cutting at a cutting depth of less than 0.8 μm. Effects of the cutting distance on the cutting force and the surface roughness are also clarified, and it is found that surface roughness of less than 100 nm Rz can be attained up to a cutting distance of 35 m. Practical molds of the tungsten alloy for spherical glass lenses and a glass prism are successfully machined by the elliptical vibration cutting.

  The Japan Society for Precision Engineering, Mar. 2007, Journal of the Japan Society of Precision Engineering, 73(3) (3), 360 - 366, Japanese

  [Refereed]

  Scientific journal


• Sculptured Surface Machining of Die Steel by Applying Elliptical Vibration Cutting (2nd Report) : Development of 3 DOF Ultrasonic Elliptical Vibration Tool

  SUZUKI Norikazu, HINO Rei, TSUCHIYA Eiji, SHAMOTO Eiji

  A new ultrasonic elliptical vibration tool is developed in the present research to realize sculptured surface machining of die steel by applying "elliptical vibration cutting". The new vibration tool is designed to have three degree-of-freedom (3 DOF), so that it is suitable to machine the three-dimensional sculptured surfaces. The 3 DOF ultrasonic elliptical vibration tool generates an arbitrary ultrasonic elliptical vibration in the three-dimensional space by combining two directional bending vibrations and a longitudinal vibration. It is excited by piezoelectric actuators at 34.4kHz, which is an average resonant frequency of the three vibrations. The developed vibration tool is attached to the 4 axis precision machine tool developed in the previous report, and mirror surfaces of hardened steel are obtained successfully by the proposed method.

  Lead, The Japan Society for Precision Engineering, Jan. 2007, Journal of the Japan Society of Precision Engineering, 73(1) (1), 117 - 123, Japanese

  [Refereed]

  Scientific journal


• Development of 3 DOF ultrasonic elliptical vibration system for elliptical vibration cutting

  Norikazu Suzuki, Rei Hino, Eiji Shamoto

  2007, Proceedings - ASPE Spring Topical Meeting on Vibration Assisted Machining Technology, ASPE 2007, 40, 15 - 20, English

  International conference proceedings


• Simulation of elliptical vibration cutting process with thin shear plane model

  Eiji Shamoto, Norikazu Suzuki, Rei Hino

  2007, Proceedings - ASPE Spring Topical Meeting on Vibration Assisted Machining Technology, ASPE 2007, 40, 64 - 69, English

  International conference proceedings


• Micromixer based on baker's transformation

  Keiko Osato, Manabu Tokeshi, Noritada Kaji, Yusuke Omoto, Norikazu Suzuki, Yasuhiko Sakai, Eiji Shamoto, Yoshinobu Baba

  2007, Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007, 309 - 311

  International conference proceedings


• A Coupled Fluid-Structure Analysis for CMP Process:Effects of material properties of polishing pad and wafer shape

  Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

  CMPプロセスでは，研磨に使用する材料の形状や機械特性が研磨特性に大きく影響することが経験的に知られている．著者らは，複雑なCMPプロセスのメカニズムの解明を目的とし，これまでに流体－構造連成解析を利用したCMPプロセスの解析手法について検討を行っている．本稿では，本解析手法を利用し，研磨パッドの材質やウェハ形状などの各種パラメータが研磨特性に及ぼす影響について評価を行った結果について報告する．

  The Japan Society for Precision Engineering, 2007, Proceedings of JSPE Semestrial Meeting, 2007, 1017 - 1018


• Proposal of parabolic vibration cutting method

  Shamoto Eiji, Suzuki Norikazu, Kikuchi Kaname, Tsuchiya Eiji, Hamada Seiji

  本研究では新しい振動切削加工法として，放物線振動切削加工法を提案する。本手法では工具刃先を切削方向に放物線軌跡で超音波振動させながら加工を行うことにより、間欠切削と引き切りの効果を同時に得るとともに、切れ刃方向の力が反転し相殺するため，実質的に著しい切削抵抗の低減が期待される。本報では、超音波放物線振動子を開発し，通常切削および従来振動切削と本手法の基礎的な比較実験を行った結果について報告する。

  The Japan Society for Precision Engineering, 2007, Proceedings of JSPE Semestrial Meeting, 2007, 433 - 434


• Analysis of Stability Limits for Forced Chatter Vibration in End-Milling

  Suzuki Norikazu, Ikada Tsutomu, Kurata Yusuke, Shamoto Eiji

  びびり振動を抑制・回避するためには，安定限界解析手法を利用した適切な加工条件の選択や構造の改善が有効となる．これに対し，本研究では，強制型びびり振動を引き起こす主要因となる切削力の周期変動を考慮した，エンドミル加工における強制型びびり振動の安定限界解析手法を考案した．さらに，エンドミル加工による検証実験を行い，本解析手法により強制型びびり振動の安定限界を高精度に予測し得ることを確認した．

  The Japan Society for Precision Engineering, 2007, Proceedings of JSPE Semestrial Meeting, 2007, 569 - 570


• Chatter Stability Limits in End-Milling with Anisotropic Flexible Tools:Experimental verification of proposed analytical model

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  従来のエンドミル加工におけるびびり振動安定限界解析では，空間に固定された座標系内で構造物の伝達関数を定義し，固定座標系内で一定の振動が生じることを前提としている．これに対して著者らは，低剛性の回転工具に，その工具に固定された座標系内で一定の振動が発生する場合に対応した安定限界解析モデルを構築している．本研究では，異方性を持つエンドミル工具を用いた切削実験を行い，本手法の有効性について検証を行った．

  The Japan Society for Precision Engineering, 2007, Proceedings of JSPE Semestrial Meeting, 2007, 571 - 572


• Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (2nd Report)

  Suzuki Norikazu, Haritani Makoto, Shamoto Eiji

  Elliptical vibration cutting is applied to ultra-precision machining of tungsten alloy molds for optical glass parts in the present research. The tungsten alloy is expected as a new mold material instead of conventional ones such as sintered tungsten carbide and CVD-silicon carbide. Ultra-precision molds of the tungsten alloy for a prism, a small spherical lens and an array of micro V-grooves were machined by the elliptical vibration cutting. It is confirmed that surface roughness of less than 100 nmRz and desired shape can be attained. They were applied to glass molding of borosilicate glass BK7 without any coatings, and it is found that accurate transcript with no adhesion can be achieved successfully.

  The Japan Society for Precision Engineering, 2007, Proceedings of JSPE Semestrial Meeting, 2007, 681 - 682


• Elliptical vibration cutting of tungsten alloy molds for optical glass parts

  N. Suzuki, M. Haritani, J. Yang, R. Hino, E. Shamoto

  2007, CIRP ANNALS-MANUFACTURING TECHNOLOGY, 56(1) (1), 127 - 130, English

  [Refereed]

  Scientific journal


• Experimental verification of CMP process analysis

  Yohei Hashimoto, Norikazu Suzuki, Rei Hino, Eiji Shamoto

  2007, 2007 INTERNATIONAL SYMPOSIUM ON MICRO-NANO MECHATRONICS AND HUMAN SCIENCE, VOLS 1 AND 2, 592 - 597, English

  [Refereed]

  International conference proceedings


• Proposal of a New Fluid Bearing Utilizing Traveling Waves

  SHAMOTO Eiji, SUZUKI Norikazu, UEDA Hirotoshi, HINO Rei

  A new non-contact fluid bearing, which utilizes traveling waves, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the waves traveling radially on the bearing surface. Conventional hydrostatic bearings utilize externally compressed fluid, which requires plumbing and large facilities. The proposed bearing realizes non-contact precision motion without those facilities, and furthermore it has a capability to electrically control the bearing force or clearance. A prototype air bearing was developed on the basis of the proposed principle by utilizing piezo-electric actuators. Its non-contact smooth motion was confirmed, and its basic performance is clarified experimentally in terms of stiffness, bearing clearance, load capacity, pressure distribution of the air film, etc.

  The Japan Society for Precision Engineering, Dec. 2006, Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers, 72(12) (12), 1483 - 1488, Japanese

  [Refereed]

  Scientific journal


• Sculptured Surface Machining of Die Steel by Applying Elliptical Vibration Cutting (1st Report) : Proposal of a New Machining Method and Development of 4-Axis Controlled Precision Machine Tool

  SHAMOTO Eiji, SUZUKI Norikazu, TSUCHIYA Eiji, HORI Yasunori, INAGAKI Hiroshi, YOSHINO Kiyoshi

  New machining method and system are developed in the present research to realize sculptured surface machining of die steel by applying "elliptical vibration cutting". The present report presents the new machining method, and a 4-axis controlled precision machine tool and special CAM software for the proposed method. It is expected that shape accuracy, tool life, machining efficiency and energy consumption are all improved by the proposed method as compared with the conventional ball end milling. The prototype machine tool is developed by employing an air spindle driven directly by a coreless servo mortar, precision ball screws and precision linear roller guides. The CAM software is developed by utilizing a commercial main processor and developing a new post processor to generate tool paths for the 4-axis controlled motion. A new 3-DOF elliptical vibration system, which is required to complete the present technology, and application to hard materials will be presented in the next reports. It is confirmed in the present report that mirror surface machining of aluminum alloy can be realized by applying the proposed machining method and the developed machine tool and CAM software.

  The Japan Society for Precision Engineering, Sep. 2006, Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers, 72(9) (9), 1139 - 1145, Japanese

  [Refereed]

  Scientific journal


• Ultraprecision Cutting of Sintered Tungsten Carbide by Applying Elliptical Vibration Cutting : Study on Ductile Cutting Mechanics

  SUZUKI Norikazu, HINO Rei, MASUDA Shinsuke, SHAMOTO Eiji

  Sintered tungsten carbide is machined in ductile mode by applying "elliptical vibration cutting", and the mechanics of the ductile mode cutting are investigated in the present research. Grooving experiments of the sintered tungsten carbide are carried out at low vibration frequency so that the vibration cutting process can be monitored easily. The groove machined by the elliptical vibration cutting is smooth without any visible fractures, while those machined by the conventional linear vibration cutting and the ordinary cutting are rough with numerous micro fractures. It is considered that the difference is caused by reduction of thickness of workpiece material cut in each cycle of the elliptical vibration. The same difference is confirmed at ultrasonic frequency, and it is also clarified that high quality surfaces are obtained when the vertical amplitude of the elliptical vibration is lower than 0.5 μm_<0-p>, which corresponds to grain size of the sintered tungsten carbide. Based on these fundamental results, the ultrasonic elliptical vibration cutting is applied to ultraprecision planing of the sintered tungsten carbide, and ultraprecision machining with surface roughness of less than 50 nm Rz is realized, although the tool life is relatively short.

  The Japan Society for Precision Engineering, Apr. 2006, Journal of the Japan Society for Precision Engineering. Supplement. Contributed papers, 72(4) (4), 539 - 545, Japanese

  [Refereed]

  Scientific journal


• 125 Analysis of CMP process in mixed lubrication : Experimental verification of analytical model in terms of friction resistance

  SUZUKI Norikazu, HASHIMOTO Yohei, HAYASHI Masayuki, SHAMOTO Eiji

  An analytical approach to estimate the coefficient of friction (COF) in chemical mechanical polishing (CMP) process in mixed lubrication is developed in the present research. The Stribeck curve is calculated by experimental and analytical results of friction resistances. An analytical model, which can predict the distribution of contact stress and fluid pressure under the condition of nonuniform velocity distribution by utilizing the Stribeck curve, is developed. Polishing experiments are carried out for the verification of the model in terms of the friction resistance. It is confirmed that the effect of the wafer rotational speed on the friction resistance can be predicted successfully by the developed analytical model.

  The Japan Society of Mechanical Engineers, 2006, The Proceedings of The Manufacturing & Machine Tool Conference, 2006(6) (6), 225 - 226, Japanese


• 508 Development of Ultraprecision Alignment Device with High Load Capacity Driven by Means of Walking Drive

  SHAMOTO Eiji, TSUKAMOTO Go, SUZUKI Norikazu, KATO Akio

  This paper presents a new ultraprecision alignment device with high load capacity, which is targeted for ultraprecision bonding in a vacuum. The ultraprecision bonding is recently needed for emerging production technologies such as nanoimprint, MEMS and WOW. The device is driven by 'Walking Drive', which is an unique driving method to realize ultraprecision positioning with long stroke by utilizing piezoelectric actuators. The method is suitable for high load capacity and the ultraprecision positioning in a vacuum. Mechanical parts of the device are designed by utilizing FEM analysis, so that the device has a high load capacity of greater than 1 ton. It is confirmed experimentally that the developed alignment system has the high load capacity and also fine positioning resolution of less than 10nm.

  The Japan Society of Mechanical Engineers, 2006, The Proceedings of The Manufacturing & Machine Tool Conference, 2006, 79 - 80, Japanese


• Ductile Machining of Single Crystal Germanium by Applying Elliptical Vibration Cutting

  Suzuki Norikazu, Yan Xhen, Shamoto Eiji, Hirahara Yasuhiro, Masuda Tadashi

  &prime;Ultrasonic elliptical vibration cutting&prime; technology is applied in the present research to ultraprecision machining of single crystal germanium, which is an excellent substrate material for optical devices. Micro grooving experiments are carried out on (100), (110) and (111) faces of the single crystal germanium to clarify the basic effects of the elliptical vibration on the ductile micro machining. It is confirmed that a groove formed in <011> direction on the (111) surface is filled with asperities at a depth of 0.19 um due to cleavage fractures in the ordinary cutting. While a smooth mirror surface is obtained by the elliptical vibration cutting at a depth of cut of less than 1.04 um in same direction. These experimental results indicate that the critical depth of cut is increased at a specific orientation angle by applying the elliptical vibration cutting. However critical depths of cut depend on cutting directions and crystal orientations. We also clarified that the critical depth of cut can be increased at the lower cutting speed.

  The Japan Society for Precision Engineering, 2006, Proceedings of JSPE Semestrial Meeting, 2006, 785 - 786


• Analysis of CMP process in boundary lubrication

  Suzuki Norikazu, Hashimoto Yohei, Hayashi Masayuki, Shamoto Eiji

  Polishing experiments are carried out in the present research in order to verify an analytical model for a simulation of Chemical Mechanical Polishing (CMP) process. A three-dimensional finite element analysis of CMP process, which considers the boundary lubrication between a wafer and a polishing pad, is utilized to predict a friction resistance. Additionally, the friction forces are measured in the polishing experiments by force sensors built into the experimental setup. It is conformed that the predictions of friction resistance directions fit experimental results. These results indicate that the friction resistance direction depends on the ratio of the wafer to the polishing pad rotation speeds.

  The Japan Society for Precision Engineering, 2006, Proceedings of JSPE Semestrial Meeting, 2006, 517 - 518


• Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting

  Suzuki Norikazu, Shamoto Eiji, Haritani Makoto, Yan Sekihin, Ootsuki Masato, Hamada Seiji

  &prime;Ultrasonic elliptical vibration cutting&prime; technology is applied in the present research to ultraprecision machining of Tungsten alloy, which is expected as a material of molds for glass parts instead of sintered tungsten carbide. It is confirmed that ulptraprecision grooving cannot be realized by the ordinary cutting. On the other hand, it can be realized by the elliptical vibration cutting at a cutting depth of less than 1 um. Effects of the cutting distance on the cutting force and the roughness are also clarified, and it is found that surface roughness of less than 100 nm Rz can be realized up to a cutting distance of 35 m. Practical molds for spherical glass lenses and a glass prism are successfully machined.

  The Japan Society for Precision Engineering, 2006, Proceedings of JSPE Semestrial Meeting, 2006, 1031 - 1032


• A new fluid bearing utilizing traveling waves

  E. Shamoto, N. Suzuki, A. Hamaguchi

  Elsevier USA, 2006, CIRP Annals - Manufacturing Technology, 55(1) (1), 411 - 414, English

  [Refereed]

  Scientific journal


• Ultraprecision micro-machining of single crystal germanium by applying elliptical vibration cutting

  Norikazu Suzuki, Zhenmin Yan, Rei Hino, Eiji Shamoto, Yasuhiro Hirahara, Tadashi Masuda

  2006, 2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE, 41 - +, English

  [Refereed]

  International conference proceedings


• Development of a New Fluid Bearing Utilizing Surface Tension

  Shamoto Eiji, Komura Takamichi, Suzuki Norikazu

  A prototype slider is developed in the present research by utilizing a new fluid bearing proposed in the previous research. The moving part is supported with a thin fluid film held on the bearing surface by surface tension. Conventional hydrostatic sliders utilize externally compressed fluid, which requires some cost and large facilities and causes micro vibrations by ripple of the fluid pressure. The non&ndash;contact precision slider is realized without the large facilities by utilizing the proposed bearing, and it has high load capacity and enough rigidity for the simple structure. The prototype slider is fabricated by utilizing a water film and a guide rail of polished glass, and its resistance force against the feed motion is investigated here.

  The Japan Society for Precision Engineering, 2005, Proceedings of JSPE Semestrial Meeting, 2005, 875 - 876


• Sculptured Surface Machining by Applying Ultrasonic Elliptical Vibration Cutting

  Shamoto Eiji, Suzuki Norikazu, Tsuchiya Eiji, Hori Yasunori, Inagaki Hiroshi, Yoshino Kiyoshi

  A new machining method is proposed to obtain precise sculptured surfaces by applying &Prime;elliptical vibration cutting&Prime;. A 4&ndash;axis controlled precision machine tool, which consists of an air spindle and precision elements, is developed. 4&ndash;axis control tool paths for machining sculptured surfaces are also generated by utilizing commercial CAM software and a special post processor. It is confirmed that mirror surface machining of hardened die steel can be realized by integrating the precision machine tool, the special CAM system and the 3 DOF vibration system developed in the previous research.

  The Japan Society for Precision Engineering, 2005, Proceedings of JSPE Semestrial Meeting, 2005, 73 - 74


• Analysis of distribution of material removal rate in CMP process

  Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

  本研究では、CMPプロセスにおいて実用的な解を与える研磨レート分布解析手法の確立を目指している。本報では、基礎的なCMPプロセスの解析モデルを構築し、有限要素解析を利用してウェハ&ndash;研磨パッド間の流体圧力分布及び接触応力分布の解析を行うと同時に、研磨レート分布の推定を行った。さらに酸化膜CMPにおける基礎的な研磨実験を行い、研磨条件がCMPプロセスに及ぼす影響について検証を行った。

  The Japan Society for Precision Engineering, 2005, Proceedings of JSPE Semestrial Meeting, 2005, 277 - 278


• Study on three dimensional cutting mechanics

  Shamoto Eiji, Suzuki Norikazu, Kato Masahiro

  An analytical model of three dimensional cutting process with two cutting edges is presented without relying on empirical rules in the present research. The shear deformation zone is simplified to a thin shear plane, and Krystof&prime;s maximum shear stress model and Merchant&prime;s minimum energy model for the orthogonal cutting process are extended to the three dimensional cutting process to predict the shear direction. The three dimensional cutting parameters including cutting forces and chip flow direction are computed with the developed model, and it is confirmed that the computed chip flow direction agrees roughly with Colwell&prime;s empirical law of chip flow.

  The Japan Society for Precision Engineering, 2005, Proceedings of JSPE Semestrial Meeting, 2005, 1067 - 1068


• Development of Fluid Bearing Utilizing Traveling Wave

  Shamoto Eiji, Suzuki Norikazu, Hamaguchi Akihide, Nunome Kiyonari

  A new non-contact fluid bearing, which utilizes traveling wave, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the wave traveling on the bearing surface. Conventional fluid bearings utilize externally compressed fluid, which requires some cost and large facilities. The proposed bearing realizes non-contact precision tables without the large facilities, and furthermore it has a capability to electrically control the bearing force and moment. A prototype device is developed on the basis of the proposed principle, and its non-contact smooth motion has been observed.

  The Japan Society for Precision Engineering, 2005, Proceedings of JSPE Semestrial Meeting, 2005, 658 - 658


• A new method to machine sculptured surfaces by applying ultrasonic elliptical vibration cutting

  Eiji Shamoto, Norikazu Suzuki, Rei Hino, Eiji Tsuchiya, Yasunori Hori, Hiroshi Inagaki, Kiyoshi Yoshino

  2005, Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr, 2005, 84 - 89, English

  [Refereed]

  International conference proceedings


• Development of 3 DOF ultrasonic vibration tool for elliptical vibration cutting of sculptured surfaces

  E. Shamoto, N. Suzuki, E. Tsuchiya, Y. Hori, H. Inagaki, K. Yoshino

  Hallwag Publishing Ltd, 2005, CIRP Annals - Manufacturing Technology, 54(1) (1), 321 - 324, English

  [Refereed]

  Scientific journal


• Cutting process control by applying elliptical vibration cutting.

  社本 英二, 鈴木 教和, 加藤 晃央, 柳田 和彦

  著者らが考案している楕円振動切削加工法では、背分力をゼロもしくは反転させることが可能である。また、振動軌跡における振動振幅や位相差などの各振動パラメータを変化させることにより、切削プロセスを意図的に変化させることができる。本研究では、振動振幅や位相差を変化させることにより切削力を制御する切削プロセス制御システムの開発を行った.さらに切削実験を行い、開発した制御システムの有効性を検討した。

  The Japan Society for Precision Engineering, 2004, Proceedings of JSPE Semestrial Meeting, 2004, 427 - 427


• Development of 3 DOF ultrasonic vibration control system to realize elliptical vibration cutting of free-form surface

  Suzuki Norikazu, Tsuchiya Eiji, Shamoto Eiji

  著者らは楕円振動切削を適用することにより焼入れ鋼金型に対して直接ダイヤモンド鏡面切削を行うことが可能な新しい加工技術の開発を目指している.これまでの研究において,1方向のたて振動と2方向のたわみ振動を同一周波数で発生させることのできる3自由度型の振動工具の開発を行っている.本報では,開発した3自由度型振動工具を安定して制御することが可能な制御システムを設計・試作を行い,その制御特性の評価を行った.

  The Japan Society for Precision Engineering, 2004, Proceedings of JSPE Semestrial Meeting, 2004, 426 - 426


• Ductile mode machining of cemented tungsten carbide by applying Elliptical Vibration Cutting

  Suzuki Norikazu, Masuda Shinsuke, Shamoto Eiji

  微細形状を有するガラス製品の量産を目的とし、超硬合金製金型に対する超精密微細加工の要求が増加している。これに対し、筆者らは楕円振動切削の適用を試み、すでに良好な延性モード加工を行い得ることを確認している。本報では、低周波振動における溝加工実験を行い、楕円振動切削による延性モード加工のメカニズムについて検討を行った。その結果、低周波振動においても延性モード加工行い得ることを確認した.

  The Japan Society for Precision Engineering, 2004, Proceedings of JSPE Semestrial Meeting, 2004, 425 - 425


• Development of 3 DOF vibration system for ultrasonic elliptical vibration cutting

  Shamoto Eiji, Suzuki Norikazu, Nakamura Akihiro

  筆者らは楕円振動切削と呼ぶ加工法を提案し、優れた切削性能を持つことを確認している。実用的な自由曲面を加工するためには多様な加工形状に対応できる振動装置が必要となる。しかし、既に開発している2自由度型超音波楕円振動切削装置では振動子と被削材の干渉により加工形状が制約されてしまう。そこで、任意の面内で楕円振動軌跡を得ることができ、加工形状の制約が少ない3自由度型超音波楕円振動切削装置の開発を行った。

  The Japan Society for Precision Engineering, 2004, Proceedings of JSPE Semestrial Meeting, 2004, 670 - 670


• Analysis of Chatter Stability Limits in End-Milling

  Shamoto Eiji, Suzuki Norikazu, Suzuki Hiromi, Se Gyouken, Inoue Atsushi, Kuroda Motofumi

  エンドミル加工では、加工時に発生するびびり振動により、切削条件が制限されることが多い。このびびり振動を抑制し切削安定限界を上げることは、加工能率の向上へとつながる。本研究では、工具を主体としたびびり振動の発生機構をモデル化し、解析的に求めた切削安定限界と実験値を比較する。また、積極的に安定限界領域を拡大する手法についても検討を行う。

  The Japan Society for Precision Engineering, 2004, Proceedings of JSPE Semestrial Meeting, 2004, 462 - 462


• Proposal of a New Fluid Bearing Utilizing Surface Tension

  Shamoto Eiji, Hashimoto Kento, Suzuki Norikazu

  本研究では、表面張力を利用した新しい流体軸受を考案している。提案する装置では、軸受隙間に水の膜を作り、表面張力によってその状態を維持する。従来の非接触軸受と異なり、外部装置を必要としない単純な構造のため、使用する場所に制限されず、流体の脈動による微振動も無くす事ができる。実際に表面張力によって移動部を浮上させ、滑らかな送り動作が可能である事を確認している。また剛性等の測定も検討している。

  The Japan Society for Precision Engineering, 2004, Proceedings of JSPE Semestrial Meeting, 2004, 384 - 384


• Development of Elliptical Vibration Cutting Machine by Utilizing Mechanical Vibrator

  SHAMOTO Eiji, SONG YoungChan, YOSHIDA Hideki, SUZUKI Norikazu, MORIWAKI Toshimichi, KOHDA Seido, YAMANISHI Tetsuji

  A new "elliptical vibration cutting machine" is fabricated by developing a unique double spindle mechanism, and its basic performance is evaluated in the present research. The developed machine generates circular vibration mechanically by rotating an eccentric sleeve with a built-in motor. The tool spindle is inserted within the rotating sleeve and connected to a servo motor via a flexible coupling. Radius and maximum frequency of the circular vibration are set to 0.5 mm and 167 Hz respectively. The developed machine is evaluated by measuring accuracy and stiffness of the rotating and vibrating spindle. The developed machine is applied here to "elliptical vibration planing" of hardened steel by clamping the tool spindle, though it can also be applied to "elliptical vibration milling" by rotating the inner tool spindle at the same time. The "elliptical vibration planing" is conducted with a CBN tool, and the results show that the present method is better than conventional ball end milling in all aspects of tool life and cost, surface roughness, cutting time and cutting force. Furthermore, a hardened steel mirrow with roughness of about 0.1μm Ra is obtained by the elliptical vibration planing with a single crystal diamond tool.

  The Japan Society for Precision Engineering, Apr. 2003, Journal of the Japan Society of Precision Engineering, 69(4) (4), 542 - 548, Japanese

  [Refereed]

  Scientific journal


• Study on three dimensional cutting mechanics : Machining with two cutting edges

  SHAMOTO Eiji, OYABA Mitsuru, SUZUKI Norikazu

  The Japan Society of Mechanical Engineers, 2003, The Proceedings of Conference of Tokai Branch, 2003, 213 - 214, Japanese


• Ultraprecision Ductile Machining of Single Crystal Materials by Applying Ultrasonic Elliptical Vibration Cutting

  Shamoto Eiji, Suzuki Norikazu, Masuda Shinsuke

  単結晶フッ化カルシウム（CaF2）は切削による延性モード加工が困難であるため，通常はポリシングにより加工されることが多い．本研究では切削性能の向上を目的として考案されている楕円振動切削加工を適用することにより単結晶材料の延性モード切削を試みた．<br>基礎的な溝加工実験により超音波楕円振動付加による影響の評価を行った．その結果，楕円振動切削を用いることで大幅に臨界切込み量が増大することがわかった．

  The Japan Society for Precision Engineering, 2003, Proceedings of JSPE Semestrial Meeting, 2003, 419 - 419


• Ultraprecision micromachining of hardened steel by applying ultrasonic elliptical vibration cutting

  Norikazu Suzuki, Akihiro Nakamura, Eiji Shamoto, Kazuhiro Harada, Makoto Matsuo, Michio Osada

  Institute of Electrical and Electronics Engineers Inc., 2003, MHS 2003 - Proceedings of 2003 International Symposium on Micromechatronics and Human Science, 221 - 226, English

  [Refereed]

  International conference proceedings


• 画像を用いたCMP研磨パッド表面状態の定量的評価方法

  小島 弘之, 鈴木 教和, 廣瀬 丈師, 西口 隆

  CMPプロセスにおける研磨パッドの表面状態は研磨レート等の基本的な研磨特性に大きな影響を与える．研磨パッドの表面状態について，これまで筆者らは表面あらさを用いた評価を試みてきたが，測定箇所の発泡状態等により測定結果が大きくばらつき，研磨特性との相関を明瞭とするために多量の測定を要する問題があった．そこで本研究では，研磨パッドの損耗に伴うパッド表面の平滑化に着目し，研磨パッド表面の画像から平滑化の度合いを算出する簡便な研磨パッド表面状態の評価方法について検討を行った．実験の結果、本測定法は研磨パッドの表面あらさRaによる評価と比較して研磨パッド表面状態を精度良く評価できることが判った．

  The Japan Society for Precision Engineering, Oct. 2002, 精密工学会大会学術講演会講演論文集, 2002(2) (2), 477 - 477, Japanese


• Development of ultrasonic elliptical vibration controller for elliptical vibration cutting

  E. Shamoto, N. Suzuki, T. Moriwaki, Y. Naoi

  Hallwag Publishing Ltd, 2002, CIRP Annals - Manufacturing Technology, 51(1) (1), 327 - 330, English

  [Refereed]

  Scientific journal


• Elliptical Vibration Cutting (4th Report) : Development of Tool Vibration Control System and Its Application to Ultraprecision Cutting

  SHAMOTO Eiji, SUZUKI Norikazu, MORIWAKI Toshimichi, NAOI Yoshikazu

  A new tool vibration system is developed for the ultrasonic elliptical vibration cutting, and it is applied to ultraprecision cutting of hardened steel in the present research. A method and a device to remove crosstalks between the two directional vibrations are developed, so that the two directional vibrations can be controlled independently. Then, a controller is developed to keep the elliptical vibration to have a desired locus, where the amplitudes of the two directional vibrations, phase shift between them are kept to be desired values and the vibration frequency is locked to an average of their resonant frequencies. The developed vibration control system is applied to ultraprecision diamond turning of hardened steel, and an ultraprecise steel mirror with a shape accuracy of about 0.1μm is achieved.

  The Japan Society for Precision Engineering, Nov. 2001, Journal of the Japan Society of Precision Engineering, 67(11) (11), 1871 - 1877, Japanese

  [Refereed]

  Scientific journal


• Study on Ultrasonic Elliptical Vibration Cutting : Development of Vibration Control System and its Application to Machining

  SHAMOTO Eiji, SUZUKI Norikazu, IENAGA Ken, NAOI Yoshikazu, MORIWAKI Toshimichi

  A new system is developed to control the ultrasonic elliptical vibration applied to the cutting tool, and it is applied to the ultraprecision elliptical vibration cutting of hardened stainless steel in the present research. Steady feedback control of the vibration locus is realized by developing a cross talk remover, which eliminates interference between the two directional vibrations. The controller keeps the vibration amplitudes and the phase difference between the two vibrations to be desired values and to chase the average resonant frequency of the vibrations simultaneously. The machining experiments show that shape accuracy and roughness of the finished surface are improved significantly by applying the developed system.

  The Japan Society of Mechanical Engineers, 2000, The Proceedings of The Manufacturing & Machine Tool Conference, 2000, 185 - 186, Japanese

• Implementation of Chatter Suppression Functions in Machine Tools

  Norikazu SUZUKI

  Lead, Japan Society for Precision Engineering, 05 Jun. 2026, Journal of the Japan Society for Precision Engineering, 92(6) (6), 403 - 407, Japanese

  [Refereed][Invited]

  Introduction scientific journal


• 切削加工におけるびびり振動の常識を覆す工具逃げ面のテクスチャ設計

  鈴木教和

  Lead, Oct. 2025, 砥粒加工学会誌, 69(10) (10), 539 - 542, Japanese

  [Invited]

  Introduction scientific journal


• 化学機械研磨における材料除去率のモデルベースシミュレーションとデータ駆動型のリアルタイム推定技術への応用

  鈴木教和

  Lead, May 2025, トライボロジスト, 70(5) (5), 278 - 283, Japanese

  [Refereed][Invited]

  Introduction scientific journal


• 工作機械のインプロセスデータを活用した切削加工デジタルツインと加工面性状の仮想計測

  鈴木教和

  Lead, Nov. 2024, 砥粒加工学会誌, 68(11) (11), 603 - 606, Japanese

  [Invited]

  Introduction scientific journal


• 中央大学 デジタル生産工学研究室

  鈴木教和

  砥粒加工学会, 01 Apr. 2022, 砥粒加工学会誌, 66(4) (4), 202 - 202, Japanese

  [Invited]

  Others


• DX時代の工作機械とスマートファクトリー

  鈴木教和

  日刊工業新聞社, 18 Mar. 2022, 日刊工業新聞, 28 - 28, Japanese

  [Invited]

  Introduction commerce magazine


• 精密工学会アフィリエイト 精密工学会アフィリエイト委員会インタビュー(第1回)

  道畑 正岐, 鈴木 教和, 柿沼 康弘, 伊東 聡, 橋本 洋平, 杉原 達哉

  精密工学会, Apr. 2018, 精密工学会誌 = Journal of the Japan Society for Precision Engineering, 84(4) (4), 331 - 334, Japanese


• Development of a CNC abrasive machining technique for 3D-printed organ models by utilizing a flexible mechanical structure

  大庭孝之, 鈴木教和, 社本英二, 小田昌宏, 森健策, 竹内芳美

  2018, 日本機械学会生産加工・工作機械部門講演会(CD-ROM), 12th


• Development of Accurate Prediction Technology of Material Removal Rate Distribution in Planarization CMP

  SUZUKI Norikazu, HASHIMOTO Yohei

  The Japan Society for Precision Engineering, 2018, Journal of the Japan Society for Precision Engineering, 84(3) (3), 221 - 224, Japanese


• 切削加工の見える化とセンサデータ応用技術 (特集 IoT時代の機械加工の見える化と加工状態モニタリング技術の進化)

  鈴木 教和

  日刊工業出版プロダクション ; 1953-, Jan. 2018, 機械技術 = Mechanical engineering, 66(1) (1), 21 - 24, Japanese


• Chatter Vibration in Cutting

  SUZUKI Norikazu

  Japanese Society of Tribologists, 2016, JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS, 61(7) (7), 457 - 462, Japanese


• 1706Estimation of transfer function of flexible mechanical structures by utilizing cutting force model and observer technique

  SUZUKI Norikazu, IKEDA Ryosuke, SANO Kenji, SHAMOTO Eiji

  This study presents a novel method to estimate transfer function of flexible mechanical structures mounted on a traveling stage by utilizing only internal information of computerized numerical control (CNC) system. Disturbance force input to CNC is estimated by observer technique and cutting force is estimated based on cutting force model. Analyzing both the forces, frequency response function (FRF) of the mechanical structure is estimated by the proposed method. Assuming a simple dynamic model of the mechanical structure, modal parameters representing the dynamic characteristics of the structure are also identified. Experimental results of a face turning test indicated that the transfer function can be estimated accurately by the proposed method.

  The Japan Society of Mechanical Engineers, 18 Oct. 2015, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2015(8) (8), "1706 - 1"-"1706-3", English


• Observer, machine technologies and applied technology utilizing cutting theory for intelligent machine tools and manufacturing

  吉岡 勇人, 柿沼 康弘, 鈴木 教和

  砥粒加工学会, Sep. 2015, 砥粒加工学会誌, 59(9) (9), 502 - 507, Japanese


• Ultra-precision micro machining of sintered tungsten carbide by applying elliptical vibration cutting technology

  鈴木 教和

  砥粒加工学会, Aug. 2015, 砥粒加工学会誌, 59(8) (8), 445 - 448, Japanese


• B11 Micro/nano machining of hardened steel with nano-accuracy by amplitude control sculpturing method in elliptical vibration cutting

  Suzuki Norikazu, Zhang Jianguo, Shamoto Eiji

  This study presents the micro-/nano-structure machining of hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this method, machinable part geometry is essentially restricted by vibration/machining conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, experimental investigations are conducted. By applying the proposed method, highly accurate machining of the sinusoidal sweep structure is attained with a machining error of less than 20 nm. The proposed sculpturing method is subsequently applied to the machining of a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method.

  The Japan Society of Mechanical Engineers, 14 Nov. 2014, The ... Manufacturing & Machine Tool Conference, 2014(10) (10), 85 - 86, Japanese


• 精密工学会アフィリエイト 博士論文 難削材料の楕円振動切削に関する研究

  鈴木 教和

  精密工学会 ; 1986-, May 2013, 精密工学会誌, 79(5) (5), 413 - 418, Japanese


• 切削加工におけるびびり振動の現象理解と安定性解析 (特集 機械加工における｢びびり振動｣と抑制技術)

  鈴木 教和

  日刊工業出版プロダクション ; 1953-, May 2013, 機械技術, 61(5) (5), 14 - 17, Japanese


• 超音波楕円振動切削の基礎と高硬度材料の超精密・微細加工 (特集 超音波振動による超精密・微細加工の実用化技術をさぐる)

  社本 英二, 鈴木 教和

  日刊工業出版プロダクション ; 1953-, Mar. 2013, 機械技術, 61(3) (3), 26 - 29, Japanese


• 精密工学会アフィリエイト アフィリエイト通信 : アフィリエイト留学記 ブリティッシュコロンビア大学での在外研究体験

  鈴木 教和

  精密工学会 ; 1986-, Feb. 2013, 精密工学会誌, 79(2) (2), 154 - 157, Japanese


• Internatioual Conference Report

  鈴木 教和

  The Japan Society for Precision Engineering, 2013, Journal of the Japan Society for Precision Engineering, 79(9) (9), 879 - 879, Japanese


• 第8回国際マイクロ生産技術会議 (ICOMM2013)

  鈴木 教和

  公益社団法人 精密工学会, 2013, 精密工学会誌, 79(6) (6), 571 - 571, Japanese


• Development of Mass-Producible Rapid Mixer Based on Baker’s Transformation

  尾本悠輔, 加藤大香士, 鈴木教和, 安井隆雄, 大里恵子, 加地範匡, 渡慶次学, 馬場嘉信, 酒井康彦, 社本英二

  2012, 日本機械学会論文集 B編(Web), 78(788) (788)


• Preface

  Eiji Shamoto, Norikazu Suzuki, Burak Sencer

  Elsevier B.V., 2012, Procedia CIRP, 4, 1, English


• Gravure & Interview : FUJIMI INCORPORATED

  MORINAGA Hitoshi

  The Japan Society for Precision Engineering, 2012, Journal of the Japan Society for Precision Engineering, 78(11) (11), 919 - 922, Japanese


• 568 Study on Cutting of Difficult-to-Cut Materials with Rotary Tools

  AN Ran, SUZUKI Norikazu, SHAMOTO Eiji, UKAI Kota, YOSHIDA Hiroyuki

  Rotary cutting process is modeled and its cutting performances are discussed in the present study. Actively or passively driven rotary cutting can be equivalent to oblique cutting. Assuming bearing resistance is negligible, passively driven rotary cutting can be further simplified as orthogonal cutting. Rotary milling tool is developed and applied to face milling tests of Inconel 718. Comparing with the conventional milling, experimental results indicated the feasibility of higher performance machining of Inconel 718 by the rotary tool.

  The Japan Society of Mechanical Engineers, 01 Mar. 2011, 東海支部総会講演会講演論文集, 2011(60) (60), "568 - 1"-"568-2", Japanese


• 16・2 切削加工(16.加工学・加工機器,<特集>機械工学年鑑)

  鈴木 教和

  一般社団法人 日本機械学会, 2011, 日本機械学会誌, 114(1113) (1113), 620 - 620, Japanese


• Analysis technology for CMP process

  SUZUKI Norikazu

  砥粒加工学会, 01 Nov. 2010, Journal of the Japan Society for Abrasive Technology, 54(11) (11), 640 - 643, Japanese


• Ultraprecision/micro machining of difficult-to-machine materials by ultrasonic elliptical vibration cutting

  SHAMOTO Eiji, SUZUKI Norikazu

  砥粒加工学会, 01 Nov. 2010, Journal of the Japan Society for Abrasive Technology, 54(11) (11), 636 - 639, Japanese


• 楕円振動切削による超精密微細形状加工 (特集 最先端製品の開発を支える微細精密加工技術)

  社本 英二, 鈴木 教和

  日刊工業出版プロダクション, May 2010, 機械技術, 58(5) (5), 23 - 26, Japanese


• Chatter Vibration in Cutting, Part 1

  SUZUKI Norikazu

  The Japan Society for Precision Engineering, 2010, Journal of the Japan Society for Precision Engineering, 76(3) (3), 280 - 284


• Chatter Vibration in Cutting, Part 2

  SUZUKI Norikazu

  The Japan Society for Precision Engineering, 2010, Journal of the Japan Society for Precision Engineering, 76(4) (4), 404 - 408


• D20 Effect of Cross Transfer Function on Chatter Stability in Plunge Cutting(Analytical advancement of machining process)

  SUZUKI Norikazu, NISHIMURA Kohei, SHAMOTO Eiji, YOSHINO Kiyoshi

  An accurate analytical model for the regenerative chatter vibration in the plunge cutting is proposed in the present research. Effects of the cross transfer function and the cutting force ratio on the chatter stability are considered in the proposed model. Equivalent transfer function is defined, which is useful to understand those effects on the chatter stability. It is verified experimentaly that the chatter stability limits can be predicted accurately by the proposed model as compared with the conventional model.

  The Japan Society of Mechanical Engineers, 01 Dec. 2009, Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, 2009(5) (5), 501 - 505, English


• Ultra-Precision Machining by Applying Elliptical Vibration Cutting

  SUZUKI Norikazu, SHAMOTO Eiji

  The Japan Society of Mechanical Engineers, 2009, Journal of the Society of Mechanical Engineers, 112(1090) (1090), 732 - 733, Japanese


• Ductile machining of tungsten alloy molds for optical glass parts by applying elliptical vibration cutting

  SUZUKI Norikazu, SHAMOTO Eiji

  砥粒加工学会, 01 Nov. 2008, Journal of the Japan Society for Abrasive Technology, 52(11) (11), 630 - 633, Japanese


• 超音波加工 自由曲面金型の鏡面切削を実現する3自由度超音波楕円振動工具の開発

  鈴木 教和, 社本 英二

  日本工業出版, Sep. 2008, 超音波techno, 20(5) (5), 101 - 105, Japanese


• タングステン合金の超音波楕円振動切削--超精密・微細金型の製作と光学ガラスの成形 (特集 さまざまな場面で使用される超音波加工)

  鈴木 教和, 社本 英二

  日本工業出版, Nov. 2007, 超音波techno, 19(6) (6), 20 - 24, Japanese


• 3次元構造を利用したマイクロミキサー

  大里恵子, 渡慶次学, 渡慶次学, 加地範匡, 加地範匡, 尾本悠輔, 鈴木教和, 酒井康彦, 社本英二, 馬場嘉信, 馬場嘉信, 馬場嘉信, 馬場嘉信, 馬場嘉信

  2007, 化学とマイクロ・ナノシステム研究会講演要旨集, 15th


• 超音波加工 超音波楕円振動切削技術の実用化--超音波楕円振動制御システムの開発と超精密切削への適用

  鈴木 教和, 社本 英二

  日本工業出版, Jul. 2006, 超音波techno, 18(4) (4), 87 - 91, Japanese


• Ultraprecision Cutting by Applying Elliptical Vibration(Latest Advances in Ultraprecision Machining Systems)

  SHAMOTO Eiji, SUZUKI Norikazu

  The Japan Society for Precision Engineering, 05 Apr. 2006, Journal of the Japan Society of Precision Engineering, 72(4) (4), 440 - 443, Japanese


• 楕円振動切削による硬脆材料の超精密微細溝加工 (特集 難加工への挑戦--高難易度加工&難削材切削加工技術)

  鈴木 教和, 社本 英二

  日刊工業新聞社, Dec. 2005, 機械技術, 53(12) (12), 24 - 27, Japanese


• 楕円振動切削加工法による超精密・微細金型加工技術 (特集 小物・精密・高付加価値金型の加工技術)

  社本 英二, 鈴木 教和

  日刊工業新聞社, Dec. 2004, 機械技術, 52(13) (13), 23 - 27, Japanese


• 高硬度金型の超精密微細加工を実現する楕円振動切削加工技術の開発 (特集 中小企業が切り拓く先端的型技術--折り返しを迎えた戦略的基盤技術力強化事業) -- (超微細・精密・複雑構造部品成形加工金型技術)

  社本 英二, 鈴木 教和, 浜田 晴司

  日刊工業新聞社, Nov. 2004, 型技術, 19(12) (12), 55 - 58, Japanese


• 画像を用いたCMP研磨パッド表面状態の定量的評価方法

  小島 弘之, 鈴木 教和, 廣瀬 丈師, 西口 隆

  01 Oct. 2002, 精密工学会大会学術講演会講演論文集, 2002(2) (2), 414 - 414, Japanese

• 次世代半導体用の難加工結晶材料のための超精密加工技術 - SiC、GaN、AlN、Ga2O3、ダイヤモンド -

  Joint work, 第7章 加工メカニズム解明に向けた取り組み，第6節 ｐｐ41-50, Apr. 2024, ISBN: 9784905507710


• Advanced applications of elliptical vibration cutting in micro/nanomachining of difficult-to-cut materials in "Simulation and Experiments of Material-Oriented Ultra-Precision Machining"

  Jianguo Zhang, Norikazu Suzuki, Eiji Shamoto

  Contributor, Springer Nature Singapore Pte Ltd., Dec. 2018, 167-200, English

  Scholarly book


• 超音波振動切削 in ”鉄の事典 13.3 切る・削る・接合する 13.3.4.e”

  社本英二, 鈴木教和

  Contributor, 朝倉書店, Dec. 2014, Japanese

  Scholarly book


• Ultrasonic Vibration Diamond Cutting and Ultrasonic Elliptical Vibration Cutting in "Comprehensive Materials Processing"

  Shamoto, E, Suzuki, N

  Contributor, Volume 11: Advanced Machining Technologies, 11.16, Science Direct, 2014, 405-454, English

  Scholarly book


• 超精密楕円振動切削加工法による光学ガラスレンズの金型加工 in "「光学ガラスレンズの設計・成形加工ノウハウ集」 第3章ガラスレンズ金型の加工方法およびコーティング技術 第1節"

  社本英二, 鈴木教和

  Contributor, 技術情報協会, Jan. 2007, 65-76, Japanese, ISBN: 4861041325

  Scholarly book

• A rational-synchronized modulation strategy to improve chatter stability and mitigate tool wear in milling

  Yutaro Kawana, Ryosuke Ikeda, Burak Sencer, Norikazu Suzuki

  the ASME 21th International manufacturing Science and Engineering Conference, MSEC2026, English

  Oral presentation


• Comparative evaluation of linear regression and neural network models for estimating surface hardness and residual stress in turning of carbon steels

  Kazunori Kohara, Yasuhiro Imabeppu, Naruhiro Irino, Norikazu Suzuki

  8th CIRP Conference on Surface Integrity, English

  Oral presentation


• Analysis of force reduction mechanism in ultrasonic assisted grinding by utilizing macro/micro grinding process models

  Masayuki Takahashi, Shun Otaka, Kanta Ogura, Norikazu Suzuki

  the 11th international conference on leading edge manufacturing in 21st century (LEM21), English

  Oral presentation


• Indirect cooling in face milling of SUS304 and SCM440 steels: investigation of cutting temperature and tool wear

  Ilia Radchenko, Norikazu Suzuki, Hiroyuki Sasahara

  the 11th international conference on leading edge manufacturing in 21st century (LEM21), English

  Oral presentation


• Active chatter suppression in milling via feed modulation assistance with integer synchronized control

  Yutaro Kawana, Ryosuke Ikeda, Burak Sencer, Norikazu Suzuki

  the 11th international conference on leading edge manufacturing in 21st century (LEM21), English

  Oral presentation


• Low Frequency Feed Modulation for Tool Eccentricity Cancellation and Chatter Avoidance in Milling

  Seyed Mahmood, Shantiaeezade, Burak Sencer, Ikeda Ryosuke, Norikazu Suzuki

  40th ASPE Annual Meeting, English

  Oral presentation


• ANALYTICAL INVESTIGATION OF RETAINER GROOVE EFFECT ON CONTACT PRESSURE DISTRIBUTION NEAR WAFER EDGE IN CMP

  Yohei Hashimoto, Kansuke Kameyama, Rikuto Endo, Hozumi Yasuda, Norikazu Suzuki

  International Conference on Planarization/CMP Technology ICPT2025, 2025, English

  Poster presentation


• A Novel Quantification Technique of Damaged Pad Surface Asperity for Material Removal Efficiency Evaluation

  Shoyo Kusakari, Masaki Ono, Shun Nishida, Yuki Watanabe, Yohei Hashimoto, Norikazu Suzuki

  International Conference on Planarization/CMP Technology ICPT2025, English

  Oral presentation


• Estimation of hardness and residual stress of machined surfaces using in-process data obtained from turning operations

  Kazunori KOHAR, Yukio TAKAHASHI, Norikazu SUZUKI

  18th International Conference on High Speed Machining, HSM-2025, Oct. 2025, English

  Oral presentation


• Adaptive tool eccentricity compensation using machine tool feed drives

  Kaan Bahtiyar, Levent Bozcu, Seyed Mahmood, Shantiaeezade, Burak Sencer, Ryosuke Ikeda, Norikazu Suzuki

  18th International Conference on High Speed Machining, HSM-2025, English

  Oral presentation


• Force estimation model and parameter identification in end milling process with corner edge damage

  Koki MATSUBARA, Norikazu SUZUKI

  18th International Conference on High Speed Machining, HSM-2025, English

  Oral presentation


• デジタルツイン技術を活用して加工制御の限界に挑む

  鈴木教和

  精密工学会 関西支部 商議員交歓交流会 第69回イブニングセミナー, Jun. 2025, Japanese

  [Invited]

  Public discourse


• Development of a process model of micro-nano patterns toward a novel model-based process control in chemical mechanical polishing

  Taku Ishihara, Norikazu Suzuki

  the 26th International Symposium on Advances in Abrasive Technology (ISAAT2024), Nov. 2024, English

  Oral presentation


• Primary study on micro/nano-scale process simulation for ultrasonic assisted grinding of hard brittle materials

  Shun OTAKA, Masayuki TAKAHASHI, Norikazu SUZUKI

  the 26th International Symposium on Advances in Abrasive Technology (ISAAT2024), Nov. 2024, English

  Poster presentation


• Development of model-based process simulation technique for ultrasonic assisted grinding of quartz glass

  Masayuki TAKAHASHI, Kanta OGURA, Kaima SHIMOMURA, Shun OTAKA, Norikazu SUZUKI

  the 26th International Symposium on Advances in Abrasive Technology (ISAAT2024), Nov. 2024, English

  Oral presentation


• Development of simulation technique for milling process superimposing oscillation on the feed motion

  Yutaro Kawana, Kazuki Takahei, Burak Sencer, Norikazu Suzuki

  The 20th International Conference on Precision Engineering (ICPE2024), Oct. 2024, English

  Oral presentation


• A prediction model of material removal rate distribution considering slurry supply position and relative motion

  Takumi Sato, Yuki Watanabe, Yohei Hashimoto, Norikazu Suzuki

  The International Conference on Planarization Technology (ICPT 2024), Oct. 2024, English

  Poster presentation


• Data driven approach for real-time estimation of material removal rate toward advanced CMP process control

  Kodai Hirano, Yuki Watanabe, Yohei Hashimoto, Norikazu Suzuki

  The International Conference on Planarization Technology (ICPT 2024), Oct. 2024, English

  Poster presentation


• Towards an Advanced Process Control of Chemical Mechanical Polishing Utilizing Physical Model-based Digital Twin

  Norikazu Suzuki

  26th International Symposium on Chemical-Mechanical Planarization (CMP), Aug. 2024, English

  [Invited]

  Invited oral presentation


• DESIGN OF AN ACOUSTIC MEASUREMENT SYSTEM FOR NON-CONTACT DISPLACEMENT ESTIMATION AND ITS EXPERIMENTAL VERIFICATION IN TURNING

  Nichika Masaki, Norikazu Suzuki

  19th International Manufacturing Science and Engineering Conference MSEC2024, Jun. 2024, English

  Oral presentation


• Experimental Verification of Fast Parameter Identification Method Utilizing Instantaneous Spindle Speed Variation in End Milling

  Hideyuki Fujii, Norikazu Suzuki

  The 25th International Symposium on Advances in Abrasive Technology (ISAAT2023), Dec. 2023

  Oral presentation


• Experimental Verification of Model-based CMP Process Simulation Considering Distribution of Material Removal Efficiency

  Kodai Hirano, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

  The 25th International Symposium on Advances in Abrasive Technology (ISAAT2023), Dec. 2023

  Poster presentation


• 精密切削のDX化を支えるデジタルツイン技術の最前線

  鈴木教和

  精密加工研究会 第１１５回例会, Dec. 2023

  [Invited]

  Invited oral presentation


• Simulation of CMP abrasive behavior considering pad surface topography

  Taku Ishihara, Akihito Hashimoto, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

  The International Conference on Planarization Technology (ICPT 2023), Oct. 2023

  Poster presentation


• Surface integrity estimation in end milling by utilizing model-based inverse analysis of cutting force

  Norikazu Suzuki

  International Symposium on Upcoming Prominent Engineering solutions (ISUPEN2023), Sep. 2023

  [Invited]

  Invited oral presentation


• CMP process modeling and its digital twin technology

  Norikazu Suzuki

  CIRP-2023- “MTSM”- 1, Collaborative Working Group on Semiconductor and Microelectronic Manufacturing, Aug. 2023

  Oral presentation


• Influence of Vibration Conditions on Tool Life in Low-Frequency Vibration Cutting of Difficult-to-Cut Materials

  Yukio Takahashi, Genki Murata, Hiroto Teratani, Norikazu Suzuki

  the international Conference on Leading Edge Manufacturing/Materials & Processing (LEM&P 2023), Jun. 2023

  Oral presentation


• Advanced simulation technology for next generation CMP

  Norikazu Suzuki

  The 4th Science Salon - Next Generation Green Power Technology, Mar. 2023, English

  [Invited]

  Invited oral presentation


• Estimation of hardness and residual stress on the end milled surface by linear regression model

  Hideyuki FUJII, Yukio TAKAHASHI, Reo YANO, Norikazu SUZUKI, Yuki YAMADA, Yasuhiro IMABEPPU, Naruhiro IRINO

  Proceedings of 19th International Conference on Precision Engineering (ICPE2022), C307, (Nov. 28 - Dec. 2, 2022, Nara, Japan), Nov. 2022, English

  Oral presentation


• High efficient machining condition prediction model by machine learning of real and simulated cutting data

  Kengo KAWAI, Naruhiro IIRINO, Hajime MIZUYAMA, Atsushi MATSUBARA, Norikazu SUZUKI, Yasuhiro IMABEPPU, Yuta SHINBA

  Proceedings of 19th International Conference on Precision Engineering (ICPE2022), C218, (Nov. 28 - Dec. 2, 2022, Nara, Japan), Nov. 2022, English

  Oral presentation


• Experimental investigation on modified Preston model by utilizing stop polishing method

  Takumi Sato, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

  The International Conference on Planarization Technology (ICPT 2022), Sep. 2022, English

  Oral presentation


• State estimation of CMP process using model-based simulation

  Kodai Hirano, Norikazu Suzuki, Yohei Hashimoto, Satoru Yamaki, Hozumi Yasuda, Yoshihiro Mochizuki

  The International Conference on Planarization Technology (ICPT 2022), Sep. 2022, English

  Oral presentation


• TIME DOMAIN SIMULATION OF TURNING OPERATIONS WITH FLANK TEXTURED TOOL

  Norikazu Suzuki, Tsubasa Fujinaka, Yuya Yokokawa

  The ASME 2022 17th International manufacturing Science and Engineering Conference, MSEC2022, Jun. 2022, English, ASME, Purdue University, Indiana, US, International conference

  Oral presentation


• 切削加工のびびり振動や知能化技術

  鈴木教和

  第8回生産加工部門委員会 「話題提供」, Jan. 2022, Japanese, 自動車技術会 生産加工部門委員会, Domestic conference

  [Invited]

  Invited oral presentation


• Time domain simulation of turning process considering amplitude-dependency in process damping

  Tsubasa Fujinaka, Norikazu Suzuki, Tomoki Nakanomiya, Eiji Shamoto

  The 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century (LEM21), Nov. 2021, English, 日本機械学会, Kitakyushu (on demand), International conference

  Oral presentation


• Analytical study on identification of milling simulation parameters by utilizing spindle speed variation method

  Satoshi MIWA, Norikazu SUZUKI, Kazuki TAKAHEI, Eiji SHAMOTO

  The 10th International Conference on Leading Edge Manufacturing Technologies in 21st Century (LEM21), Nov. 2021, English, 日本機械学会, Kitakyushu (on demand), International conference

  Oral presentation


• びびり振動の解析と抑制

  鈴木教和

  切削加工の基礎・応用・実践講座「難削材加工とデジタル化にむけた切削の基礎から実践まで」 第2回【高能率・高品位加工に向けた切削の応用から実践】, Oct. 2021, Japanese, 精密工学会 切削加工専門委員会, Web, Domestic conference

  [Invited]

  Public discourse


• 研磨プロセスのスマート化を支えるモデルベースシミュレーション

  鈴木教和

  第20回研究会 －研磨のモデリング・シミュレーション・挙動評価と産業展開－, Jul. 2021, Japanese, KENMA研究会, Domestic conference

  [Invited]

  Invited oral presentation


• Time domain simulation of dynamic corner milling process considering chatter vibration with finite amplitude

  Norikazu Suzuki, Hiroki Hayashi, Eiji Shamoto, Naruhiro Irino, Yasuhiro Imabeppu

  The ASME 2021 16th International manufacturing Science and Engineering Conference, MSEC2021, Jun. 2021, English, ASME, on demand, International conference

  Oral presentation


• 動的切削プロセスのモデルベースシミュレーションとびびり振動の回避

  鈴木教和

  令和3年度地区部会大会 第1回研究会「北陸信越支部の大学・公設試験場による新技術発信と精密加工技術の勘どころ」, Jun. 2021, Japanese, 砥粒加工学会 北陸信越地区部会, Domestic conference

  Invited oral presentation


• Development of Cyber-Physical-System for CMP process utilizing model-based simulation

  Norikazu Suzuki

  The 6th Ebara Open Innovation Symposium on CMP, Jun. 2021, Japanese, Ebara Corporation, Domestic conference

  [Invited]

  Invited oral presentation


• Development of a milling technology with SPRT for Ni-base super alloy

  Kato Yuya, Suzuki Norikazu, Shamoto Eiji, Naiki Yukio, Takagi Yuji

  Proceedings of JSPE Semestrial Meeting, 2018, Japanese, The Japan Society for Precision Engineering, <p>Ni基耐熱合金に対して従動式ロータリ機構を備えたミーリング工具による正面フライスを実施し，その実用性について検討を行った．実験の結果，回転運動を伴わない通常切削に対して約12倍の工具寿命延長効果が確認された．また，切削シミュレーションを援用したプロセスの見える化技術を開発し，その分析を行った．諸検討により，ランピング加工においてランピング角の制約が厳しいことが明らかとなり，その解決手法を提案した．</p>


• Primary study on post-processing technology utilizing machining process for additive manufacturing

  Ohba Takayuki, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2018, Japanese, The Japan Society for Precision Engineering, <p>3Dプリンタの普及に伴い，3次元積層造形構造の利用が急速に進められている．造形技術が急速に発展した一方で，その表面に形成される積層段差の後処理技術に関しては，自動化技術が確立されていない．本研究では，3次元積層造形構造の表面除去加工における自動化技術について検討を行った．汎用工作機械に，柔軟な治具をかいして工作物を固定し，研削と研磨による定圧加工を行うことで，自動化の可能性があることを明らかにした．</p>


• Intelligent process identification by utilizing disturbance force estimation and cutting simulation in milling process

  Ikeda Ryosuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2017, Japanese, The Japan Society for Precision Engineering, 著者らは，モデルベースシミュレーションを利用して，構造物の動特性や切削プロセスを代表するパラメータの新しい同定手法を提案している．本稿では，一般的なミリング様式のプロセスをモデル化し，構造物の動的挙動と加工プロセスを推定する時間領域シミュレータを開発した．さらに，パラメータ同定アルゴリズムを考案した．シミュレーションによる検証を通じて，提案手法により知的なプロセス同定を実現し得ることを確認した．


• Textures on flank face to attainchatter suppression in cutting

  Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2017, Japanese, The Japan Society for Precision Engineering, 切削加工においては，低速度条件でびびり振動の安定性が向上することが知られている．これはプロセスダンピングと呼ばれる工具逃げ面と被削材が接触して振動を減衰する現象が発現するためである．本研究では，プロセスダンピングを効果的に利用することが可能な逃げ面テクスチャを提案する．切削シミュレーションに基づく簡易的な形状設計手法について解説するとともに，検証実験を通じて提案手法の効果を明らかにする．


• 切削加工におけるびびり振動の安定性を向上するロバストな再生振動相殺技術（キーノートスピーチ）

  鈴木 教和

  精密工学会学術講演会講演論文集, 2017, Japanese, 公益社団法人 精密工学会, 切削加工における高能率化を実現する上でびびり振動対策は極めて重要である．不等ピッチ・不等リード工具は，不安定化を引き起こす再生振動の抑制に効果的に利用することができる．本稿では，びびり振動の周波数および軸方向切込み条件に対して高いロバスト性を満たす，実用的な工具設計理論を紹介する．さらに，再生効果抑制理論を応用したインデクサブルカッタの設計法およびパラレールターニングの研究事例を紹介する．


• Intelligent identification of milling process by utilizing disturbance force estimation based on multi-inertial model of ball-screw drive system and cutting simulation

  Ohno Shoya, Suzuki Norikazu, Shamoto Eiji, Ikeda Ryosuke, Takahei Kazuki, Fujita Tomoya

  Proceedings of JSPE Semestrial Meeting, 2017, Japanese, The Japan Society for Precision Engineering, モデルベースシミュレーションを利用して，構造物の動特性や切削プロセスのパラメータを同定する手法が提案されている．本稿では，ボールねじ駆動系の多慣性モデルを考慮したCNC工作機械の外乱オブザーバを検討した．これをすでに提案されているプロセス同定システムに適用し，汎用的な工作機械を対象とした知的同定の実行可能性について検討を行った．検証実験の結果，ミリングプロセスの同定を概ね実現し得ることを確認した．


• Suppression of chatter vibration using parallel turning assisted with swing motion

  OKUMA Toshiki, SAKATA Shinya, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, SUZUKI Norikazu, KAKINUMA Yasuhiro

  The Proceedings of Mechanical Engineering Congress, Japan, 2017, Japanese, The Japan Society of Mechanical Engineers, <p>Multi-tasking machine tools attract attention, because they can perform highly efficient machining by using multiple tools. Parallel turning with two tools can realize high material removal rate and the productivity is remarkably improved when appropriate cutting condition is selected. On the other hand, compared to turning with a single tool, the stability of the process reduces, and chatter vibration tends to occur. Chatter vibration does not only limit productivity but also cause poor surface and dimensional accuracy. In this research, to suppress chatter vibration in parallel turning, we propose swing motion assisted parallel turning with an optimum amplitude ratio, calculated from chatter frequency and spindle speed. The proposed method aims to suppress chatter vibration by giving variations in phase delay due to high speed swing of tool. Chatter frequency is measured from estimated cutting force applying disturbance observer. The result of swing motion assisted turning test indicates that chatter vibration can be suppressed by dynamically changing cutting point based on the optimum amplitude ratio.</p>


• Analysis of dynamic material properties based on asperity model of polishing pad surfaces

  Oshika Shingo, Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2016, Japanese, The Japan Society for Precision Engineering, 研磨パッド表面に存在する凹凸構造は研磨効率に直接的に影響するため，その分析は研磨メカニズムを理解する上で重要である．本研究では，研磨パッドの表面アスペリティを楕円球と楕円錐の集合体としてモデル化し，状測定結果から研磨に作用すると考えられる箇所の形状パラメータを同定する手法を考案した．さらに，弾性変形を仮定した力学モデルを定式化し，動的圧縮試験の結果から，材料物性パラメータについて分析を行った．


• A novel in-situ observation of local polishing efficiency by utilizing heat measurement

  Misono Hirotaka, Suzuki Norikazu, Oshika Shingo, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2016, Japanese, The Japan Society for Precision Engineering, 研磨プロセスのミクロな材料除去メカニズムを説明可能な理論は確立されていない．これが研磨効率の推定を困難にし，効率的なプロセス開発の妨げとなっている．本研究では，研磨効率のその場観察手法を提案する．材料除去に起因する赤外線をウェハ越しに観察することで，研磨中の局所的な材料除去の発生個所を特定する．表面凹凸が制御された織布パッドによる検証実験を実施し，ミクロな材料除去メカニズムについて考察を行った．


• Primitive study on cutting force model considering chatter vibration with finite vibration amplitude

  Igeta Hidenori, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2016, Japanese, The Japan Society for Precision Engineering, 低切削速度条件ではプロセスダンピングという現象が発現してびびり振動の安定性が向上する．多くのモデルが提案されてきたが，その現象の詳細なメカニズムは不明であり，切削力モデルも検証されていない．そこで，本研究では，低速領域でびびり振動が発生する場合の切削現象について検討を行う．有限の振動変位を持つびびり振動が発生する場合の新しい切削力モデルを提案し，有限要素解析による検討を通じてその検証を行う．


• Semidiscrete time domain solution of cutting process using variable helix end mills

  Ishiguro Rikiya, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2016, Japanese, The Japan Society for Precision Engineering, 不等リードエンドミルを用いて浅切込み加工を行う場合に，びびり振動を効果的に抑制することができる．しかし，このプロセスでは切削の断続性に起因して，高精度な安定性解析が難しいことが知られている．このような時間遅れを伴う常微分方程式の解法としてSemidiscrete method（SD法）が提案されている．本研究では，不等リードエンドミルを用いるプロセスに対応したSD法を提案し，先行研究の解析モデルとの比較による検証を行った．


• Model-based process identification by utilizing disturbance force estimation against servo system and cutting simulation

  Ikeda Ryousuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2016, Japanese, The Japan Society for Precision Engineering, 本研究では，外乱力の推定結果に基づいてモデルベースで動的切削プロセスのパラメータ同定を行う新しい手法を提案する．まず，加工に用いる機械構造の動剛性モデルと再生効果を含めた切削プロセスモデル，および各モデルに基づく時間領域シミュレータを開発する．加工中にCNC制御系に作用する外乱力の推定値から，逆解析を行うことでプロセスモデルのパラメータ同定を行う．断続切削実験により，提案手法の実現可能性を確認する．


• Suppression of chatter vibration by unequal pitch turning applying estimated cutting force

  KADOTA Takashi, YAMADA Yuki, NAKANISHI Kenichi, TACHIBANA Junji, YOSHIOKA Hayato, SUZUKI Norikazu, KAKINUMA Yasuhiro

  The Proceedings of The Manufacturing & Machine Tool Conference, 2016, Japanese, The Japan Society of Mechanical Engineers, <p>Multi-tasking machine tool with multi-turret is attracting a great deal of attention, which can offer higher efficiency and higher accuracy. However, chatter vibration generated during parallel turning with two tools might be one of the bottlenecks for higher material removal rate. To suppress chatter vibration, we proposed unequal pitch turning method in this research. In this method, the upper tool was properly controlled based on optimum pitch angle calculated from spindle speed and chatter frequency. Chatter frequency was identified from estimated cutting force by disturbance observer. From the result of parallel turning test, it is clear that chatter vibration can be suppressed by controlling the upper tool based on optimum pitch angle.</p>


• Development of a milling cutter with SPRT for difficult-to-cut materials machining

  KATO Yuya, SUZUKI Norikazu, SHAMOTO Eiji, NAIKI Yukio, TAKAGI Yuji

  The Proceedings of The Manufacturing & Machine Tool Conference, 2016, Japanese, The Japan Society of Mechanical Engineers, <p>In order to improve milling performance of difficult-to-cut materials, a unique milling cutter with SPRT (Self-Propelled-Rotary-Tool) was developed. Use of slide bearings enables a compact SPRT mechanism, while influence of bearing friction becomes not negligible. To attain self-revolution of a circular insert regardless of the bearing friction, the cutter geometry was optimized. Through face milling experiments of Inconel 718, superior tool wear resistance was verified as compared to the conventional milling without insert rotation. Analytical result of the measured cutting forces also indicated interesting phenomena in SPRT milling.</p>


• S1330102 Experimental Verification of Design Theory for End mills to Attain Robust Chatter Suppression

  ISHIGURO Rikiya, SUZUKI Norikazu, SHAMOTO Eiji

  The Proceedings of Mechanical Engineering Congress, Japan, 2015, Japanese, The Japan Society of Mechanical Engineers, Chatter vibration in milling often results in poor surface finish and rapid tool wear, consequently limiting productivity. It is known that regenerative effect, which causes chatter vibration, can be suppressed by utilizing irregular pitch cutters. In order to attain robust regeneration suppression for arbitrary chatter frequency, the authors have proposed a novel design theory of irregular pitch cutters. The fundamental mechanism of it is the simultaneous suppression of multi-mode regenerations. In the present study, the effect on chatter suppression has been verified through a series of end milling experiment. Analytical and experimental results indicated that the chatter stability is effectively increased by utilizing the irregular pitch cutter designed by the proposed theory.


• Analysis on surface-asperity structure of polishing pad and investigation on its mechanical model

  Hashimoto Yohei, Oshika Shingo, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2015, Japanese, The Japan Society for Precision Engineering, 研磨加工において，研磨パッド表面に存在する突起の構造とその微視的な変形挙動は，加工メカニズムを考察する上で重要となる．本研究では，レーザ顕微鏡を用いて研磨に使用した研磨パッド表面形状の評価観察を行い，突起構造の分析とモデル化について検討した．そして，突起構造の変形挙動を表現する新しい力学モデルの検討を行った．


• A new estimation method of transfer function of mechanical structures by utilizing internal information of CNC

  Ikeda Ryousuke, Suzuki Norikazu, Sano Kenji, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2015, Japanese, The Japan Society for Precision Engineering, 機械構造の振動モデルを仮定し，切削力モデルと外乱オブザーバ技術を利用して切削力と外乱力を推定することで，工作機械の制御ループ外に存在する機械構造の伝達関数をCNCの内部情報のみから推定する新しい手法を提案する．剛性が低くなるように設計したツールホルダを超精密工作機械のテーブルに固定して断続的な旋削実験を行い，提案手法により周波数伝達関数の計測とモーダルパラメータの推定が可能であることを確認した．


• B11 Micro/nano machining of hardened steel with nano-accuracy by amplitude control sculpturing method in elliptical vibration cutting

  Suzuki Norikazu, Zhang Jianguo, Shamoto Eiji

  The Proceedings of The Manufacturing & Machine Tool Conference, 2014, Japanese, The Japan Society of Mechanical Engineers, This study presents the micro-/nano-structure machining of hardened steel by means of elliptical vibration cutting equipped with the ultra-precision amplitude control sculpturing method. Machining performance of the amplitude control sculpturing method is investigated, and the limitation in nano-scale machining is explored. In this method, machinable part geometry is essentially restricted by vibration/machining conditions and tool geometry. In addition, a considerable error between the amplitude command and the envelope of the tool trajectory is generated when the slope of the machining part geometry becomes steep. To overcome this error, a compensation method for the amplitude control command is proposed. In order to clarify the machining performance of the proposed technology, experimental investigations are conducted. By applying the proposed method, highly accurate machining of the sinusoidal sweep structure is attained with a machining error of less than 20 nm. The proposed sculpturing method is subsequently applied to the machining of a three-dimensional grid surface, which verifies the feasibility of the proposed amplitude control sculpturing method.


• High Efficiency Elliptical Vibration Cutting of Steel using Large Nose Radius Single Crystal Diamond Tool

  Wang Yilong, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2014, Japanese, The Japan Society for Precision Engineering, Thus far, Elliptical Vibration Cutting has shown its superior machining performance in steel machining by using which the diamond tool life can be significantly improved. However, this machining technology is currently limited to the relatively small-size workpiece machining due to the small feed rates. If it is used to machine large-size steel workpiece, the machining time and cumulative cutting distance (or tool wear) will be remarkably increased which in turn dramatically increase the machining cost and cycle time. In order to apply this emerging machining technology effectively in industrial application, Elliptical Vibration Cutting with large nose radius single crystal diamond tool was proposed in this paper. However, the minimum uncut chip thickness (under which the material is not sheared but ploughed), that due to the presence of the tool edge radius becomes a major challenge when the large nose radius diamond tool is employed. Therefore, the influence of the minimum uncut chip thickness on material removal behavior during diamond machining needs to be understood and implemented in models. In this paper a simple but practical analytical model was developed for the optimization of machining conditions to minimize ploughing effect. The analytical model was then validated in a qualitative manner with experimental tests using steel workpieces.


• Influence of process damping on chatter stability in turning operations

  Uchiyama Daisuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2014, Japanese, The Japan Society for Precision Engineering, 低切削速度領域においてプロセスダンピングと呼ばれる現象が発現し，びびり振動の安定性が向上することが知られている．多くの解析モデルがすでに提案されているのに対し，実験的なプロセスの評価は十分になされていない．本研究では，端面旋削実験により切削プロセスに対するプロセスダンピングの影響について評価を行う．さらに，材料物性と工具形状に基づきプロセスダンピングの影響を定量化する新しい解析モデルを提案する．


• Influence of various modelling on prediction accuracy in polishing pressure simulation

  Hashimoto Yohei, Suzuki Norikazu, Shen Yue, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2014, Japanese, The Japan Society for Precision Engineering, 著者らはこれまでに，CMPプロセスに対する研磨パッドの粘性特性と研磨パッド表面の凹凸形状による非線形弾性特性を考慮した解析手法を開発している．本報では，ジンバル方式の研磨ヘッド構造を利用するCMPプロセスを対象とした検討により，各種物性や形状のモデル化が研磨圧力シミュレーションの結果に与える影響について明らかにする．さらに，実験結果と比較することにより解析精度を検証する．


• Tool failure mechanism in high-speed ceramic milling of super alloys

  Suzuki Norikazu, Enmei Risa, Hashimoto Yohei, Shamoto Eiji, Hatano Yuki

  Proceedings of JSPE Semestrial Meeting, 2014, Japanese, The Japan Society for Precision Engineering, 航空機部品等に用いる耐熱合金の加工では，セラミック工具を用いた高速ミーリングによる高能率加工が利用されている．しかし，工具損耗が激しく寿命が短いという問題があり，その改善が要求されている．本研究では，インコネル718の加工で摩耗した工具形状を評価し，これを考慮した切削力モデルを考案した．さらに，切削力測定結果との比較により工具表面に生じる応力場を推定し，特徴的な工具損耗メカニズムについて考察を行った．


• Design of variable helix cutters to suppress regeneration in end milling operations

  Suzuki Norikazu, Kojima Takuya, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2013, Japanese, The Japan Society for Precision Engineering, 切削加工において再生効果は自励びびり振動の安定性に大きく影響する．不等リードエンドミルはびびり振動の周波数や主軸回転数などの変化に対してロバストに再生効果を抑制することができる特徴を持つ．しかし，最適な工具形状を設計しなければ優れた抑制効果を実現することはできない．本研究では，再生効果の影響をロバストに抑制することのできる不等リードエンドミルの工具形状の新しい設計手法を提案する．


• EHL analysis of CMP process with airbag type polishing head

  Asaba Masakazu, Suzuki Norikazu, Shamoto Eiji, Yasuda Hozumi, Yamaki Satoru

  Proceedings of JSPE Semestrial Meeting, 2013, Japanese, The Japan Society for Precision Engineering, 半導体CMPの量産工程で一般に用いられるエアーバッグ研磨ヘッド構造を考慮したCMPプロセスのEHL解析モデルを開発した．本研究では，研磨ヘッドの構造として，リテーナリングやメンブレンゴムを考慮するとともに，ウェハ等との接触問題を考慮する．また，ALE有限要素法を適用することで動的な問題を取り扱うとともに，研磨パッドの非線形粘弾性を同時に考慮することで，従来不可能であった実用的な研磨プロセスの解析の実現に挑戦する．


• Modeling and controller design of gantry type stage for suppressing torsional vibration of machine tools with low base stiffness

  Ishizaki Kosuke, Sencer Burak, Suzuki Norikazu, Shamoto Eji

  Proceedings of JSPE Semestrial Meeting, 2013, Japanese, The Japan Society for Precision Engineering, ベースの剛性不足に起因して機械構造全体で生じる低周波振動により，工作機械の制御系の性能が低下する問題がある．本研究では，問題となりやすいベースのねじり振動モードの影響を考慮したガントリーテーブルの制御システムをモデル化する．そして，ベースのねじれ振動を抑制する新しい補償器とその設計手法を提案する．実機を用いて検証を行い，提案手法によってねじり振動が効果的に抑制されることを確認した．


• Non-Contact On-Machine Measurement of Turning Accuracy by Utilizing Image Sensor - Development of measurement method for workpiece diameter -

  Asari Naohiro, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2013, Japanese, The Japan Society for Precision Engineering, 従来，旋削加工の高精度化のため，各種機上計測手法が実用に供されている．しかし，これらの従来手法では，工作物への接触や計測装置の大きさによって計測範囲や形状に制約が多い．そこで本研究では，工具をイメージセンサに取り換えて工作物を回転し，加工面の移動距離と回転角度から直径を計測することで，制約の少ない機上計測手法を提案・開発する．本報では，提案手法とその画像処理方法，計測の繰返し性等について報告する．


• Study on Milling of Difficult-to-Cut Materials with Self-Propelled Rotary Tools

  An Ran, Suzuki Norikazu, Shamoto Eiji, Ukai Kota, Hasegawa Yu, Yoshida Hiroyuki, Ishikawa Yoichi, Yamada Sachio

  Proceedings of JSPE Semestrial Meeting, 2012, Japanese, The Japan Society for Precision Engineering, インコネル等に代表される難削材の切削加工では，工具摩耗の抑制にロータリ切削が効果的であることが知られている．本研究では，傾斜切削理論に基づいたロータリ切削機構のモデル化を行う．さらに，その切削機構の特徴を示すとともに基礎的なロータリ切削実験による検証を行う．さらに，従動式ロータリ機構を適用したロータリミリング工具を試作し，インコネル718のロータリミリングにおける工具摩耗抑制効果について評価を行う．


• Study on Avoidance of Regenerative Chatter Vibration by Tool Path/Posture Optimization:- Proposal of Concept and Application to Turning Process -

  Shamoto Eiji, Fujimaki Shunsuke, Suzuki Norikazu

  Proceedings of JSPE Semestrial Meeting, 2012, Japanese, The Japan Society for Precision Engineering, 本研究では，工具軌跡／姿勢を最適化することで再生型びびり振動を回避する新たな手法を提案する．びびり振動安定性が主軸回転数や切込み量等の切削条件に依存することはよく知られているが，工具軌跡にも依存することはあまり知られていない．本稿では，旋削加工を例に，工具形状や切込み量，送り量を考慮した上で工具軌跡／姿勢を最適化するための簡易指標を示し，その指標の有用性を解析及び実験的に検証する．


• EHL Analysis of CMP process with consideration of dynamic contact problem of polishing pad with surface asperities

  鈴木 教和, 橋本 洋平, 浅羽 正和

  砥粒加工学会学術講演会講演論文集 ABTEC, 2012, Japanese, 砥粒加工学会


• Study on Fluid Bearing Utilizing Traveling Waves:-Development of Modular Piezoelectric Traveling-Wave Actuator and Precision Slider-

  Komatsu Hiroki, Kato Takashi, Sencer Burak, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2012, Japanese, The Japan Society for Precision Engineering, 本研究では，進行波を利用した新たな非接触流体軸受を提案している．本軸受は，軸受面上に発生させた進行波によって軸受中心に向かう力を流体に与えることで，軸受隙間内の圧力を上昇させ非接触支持を実現する．本報では，装置の製作性と性能を向上させるためにモジュール化した進行波圧電アクチュエータを開発し，そのアクチュエータを用いた軸受の開発・評価を行う．また本軸受を用いた精密スライダの開発を目指す．


• Novel Design Method of Irregular Pitch Tools for Simultaneous Suppression of Multi-Mode Regenerations

  Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2012, Japanese, The Japan Society for Precision Engineering, 切削加工における自励びびり振動は再生効果に強く依存する．不等ピッチ工具を用いて再生効果を抑制することで安定限界を効果的に向上することもできるが，その効果はピッチ角の設計に依存する．本研究では，エンドミル加工における再生効果の新しい定量化手法を提案するとともに，共振周波数の異なる複数の振動モードが存在する際に，それらの振動モードに対して同時に再生効果を打ち消す新しいピッチ角の設計手法を提案する．


• 568 Study on Cutting of Difficult-to-Cut Materials with Rotary Tools

  AN Ran, SUZUKI Norikazu, SHAMOTO Eiji, UKAI Kota, YOSHIDA Hiroyuki

  The Proceedings of Conference of Tokai Branch, 2011, Japanese, The Japan Society of Mechanical Engineers, Rotary cutting process is modeled and its cutting performances are discussed in the present study. Actively or passively driven rotary cutting can be equivalent to oblique cutting. Assuming bearing resistance is negligible, passively driven rotary cutting can be further simplified as orthogonal cutting. Rotary milling tool is developed and applied to face milling tests of Inconel 718. Comparing with the conventional milling, experimental results indicated the feasibility of higher performance machining of Inconel 718 by the rotary tool.


• Chatter Suppression in Cutting with Irregular Pitch / Variable Helix End mills:Effect of Radial Depth of Cut on Chatter Stability

  Kojima Takuya, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2011, The Japan Society for Precision Engineering, 不等ピッチ/リードエンドミルは自励びびり振動の発生原因である再生効果を抑制し得るが，条件によっては効果的に自励びびり振動を抑制し得ないこともある．本研究では，Multi-Frequencyモデルを用いて，これらの工具を用いた場合の安定限界に対する半径方向切込みの影響について検討した．解析の結果，切込みが浅くモードカップリングが生じにくい条件で自励びびり振動を効果的に抑制し得ることを確認した．


• Identification of nonlinear viscoelasticity of polishing pad using a compression tester

  Suzuki Norikazu, Asaba Masakazu, Hashimoto Yohei, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2011, The Japan Society for Precision Engineering, CMPに用いられる研磨パッドの圧縮試験を行い，その非線形弾性特性および比例減衰係数の同定を試みた．粘性特性を精度よく同定するには，高ひずみ速度で圧縮試験を行う必要があるため，本研究では，VCM（ボイスコイルモータ）を用いた圧縮試験装置を開発した．さらに，古典的な力学モデルに基づいて研磨パッド表面層のモデル化を行い，実験結果と比較することでその凹凸パラメータを同定し，研磨圧力の解析に適用した．


• Study on Tool Damage in High-speed Ceramic Milling of Superalloys:Effects of Dynamic Stiffness of Mechanical Structure and Cutting Conditions

  Eto Jun, Suzuki Norikazu, Shamoto Eiji, Yoshida Hiroyuki

  Proceedings of JSPE Semestrial Meeting, 2011, The Japan Society for Precision Engineering, 航空機エンジン部品等に用いられる超耐熱合金インコネル718の加工では，従来の超硬工具による低速加工に置き換わり，セラミック工具を用いた高速ミリングによる高能率加工が普及してきている．しかし，工具損耗が極めて激しいため，工具寿命の改善が必要とされている．本研究では，工具損耗に影響を与える因子として機械構造の動剛性や加工条件に着目し，各条件が工具損耗に与える影響について実験に基づいた基礎検討を行った．


• E04 Development of Control System for Optimizing Cutting Conditions

  UENO Hiroshi, ANDO Tomoharu, SENDA Harumitsu, SUZUKI Norikazu, SHAMOTO Eiji

  The Proceedings of The Manufacturing & Machine Tool Conference, 2010, Japanese, The Japan Society of Mechanical Engineers, The chatter vibration excited during machining process deteriorates quality of workpiece surfaces, and accelerates tool wear. In addition, it often takes long time to find chatter-free cutting conditions. Therefore, a new control system is developed in the present research for searching the optimum spindle speed at which chatter stability is maximized. The developed system detects the chatter vibration that occurs during machining process using a vibration sensor, and then optimizes the spindle speed automatically in real time. This report presents an overview and an application of the developed system.


• Stability of self-excited chatter vibration in boring operation with irregular pitch cutters

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2010, The Japan Society for Precision Engineering, 適切な不等ピッチ工具を利用することにより，自励びびり振動の発生原因となる再生効果を抑制し得ることが知られている．本研究ではボーリング加工を対象とし，不等ピッチ工具による自励びびり振動の抑制効果について検討を行う．まず，解析モデルを構築し実験的に検証を行った．さらに，モードカップリングの影響が小さい条件では効果的に抑制されるのに対し，大きい条件ではむしろ不安定になることを確認した．


• Proposal of Multi-Stage Vibration Air Bearing

  Shamoto Eiji, Komatsu Hiroki, Yamaji Fumie, Owaki Yoshihiro, Suzuki Norikazu

  Proceedings of JSPE Semestrial Meeting, 2010, The Japan Society for Precision Engineering, 本研究では，まず，狭いすき間で振動する軸受面に，外部から気体を吸込んで圧力増加する現象が存在することを見出した．これを多段にして複数回の圧力増加を繰返し，より高圧を発生する新しい軸受として，多段振動気体軸受を提案する．さらに本報では，試作開発した本軸受装置の測定と，軸受隙間内気体の有限要素モデルによる解析により，軸受性能について検討した結果について報告する．


• Simultaneous face milling of two sides of plates with high accuracy and high efficiency:Suppression of regenerative chatter vibration by speed difference between two spindles

  Shamoto Eiji, Nishimura Kohei, Kurata Yusuke, Suzuki Norikazu, Mori Tatsuya

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, 板材の加工は裏面をマグネットにより固定し，表面をフライス加工する方法が一般的である．しかし，二面を片面ずつ切削するために効率が低く，また弾性変形させた状態で切削することにより加工精度も低いことが問題となっている．これに対し，著者らは両面同時フライス加工法を採用し，それに伴う板材の剛性低下や複数主軸の同時使用に起因する再生型びびり振動を，左右主軸に回転数差を設けることにより抑制する手法を考案した．


• Nonlinearity compensation for piezoelectric actuators based on non-creep line:Study on effects of driving speed and preload

  Shinoda Morio, Shamoto Eiji, Suzuki Norikazu, Tsukamoto Go, Yamauchi Akira

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, 圧電素子は高剛性、高分解能、高速応答性といった長所を持つため、位置決め装置のアクチュエータとして利用される。しかし、ヒステリシス、クリープといった非線形性を持つため位置決め性能が低下する。そこで本研究では、クリープの生じない変位と電圧の関係（非クリープ線）の発見に基づき、非線形性を補償するようにオープンループで位置決めを行う方法を開発している。本報では駆動速度、プリロードの影響について報告する。


• Development of fluidic mixer with high productivity and mixing rate by applying principle of baker′s transformation

  Omoto Yusuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, 従来提案されているマイクロミキサは主に半導体プロセスにより作成される．振動装置などの特殊な機構を必要とする場合も多い．これに対し著者らは，金型により量産成形することができ，かつ特殊な機構を必要としない高効率マイクロミキサを考案した．本発表では，考案したミキサについて流体解析と模型実験を行い，ともにおおむね目的とする流体の挙動が確認されたことについて述べる．


• 530 High-accuracy analysis of polishing pressure in CMP process

  SUZUKI Norikazu, HASHIMOTO Yohei, SHAMOTO Eiji

  The Proceedings of the Materials and processing conference, 2009, Japanese, The Japan Society of Mechanical Engineers, The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By applying to the three dimensional (3D) coupled fluid-structure analysis of the CMP process, the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Consequently, the analytical results of polishing pressure and fluid pressure distributions considerably depend on the damping property too. The fluid pressure measuring experiment was also carried out, and it is confirmed that the feature of the measured fluid pressure distribution agrees with that simulated by developed CMP process analytical model.


• 164 Development of 200 kHz elliptical vibration tool

  Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

  The Proceedings of Conference of Tokai Branch, 2009, Japanese, The Japan Society of Mechanical Engineers


• High Accuracy Analysis of Regenerative Chatter Vibration with Process Damping:Identification of process damping parameter by inverse analysis of chatter vibration

  Kurata Yusuke, Merdol S. Doruk, Altintas Yusuf, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, 切削加工において，低速領域ではプロセスダンピングの影響によりびびり振動が発生しにくいことが知られている．これを考慮した簡易的な解析モデルが考案されているが，従来手法はその影響を考慮するための変数の同定精度が低く，高精度な解析が難しいという問題があった．これに対し，本研究ではびびり振動の逆解析を利用した変数の新しい同定手法を考案し，高精度な安定限界解析が可能であることを実験的に確認した．


• Development of Sub-MHz Elliptical Vibration Tool

  Suzuki Norikazu, Maruko Keisuke, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, 振動切削では，超音波領域の振動を用いて断続的な加工を行うことによりなどさまざまな優れた効果が得られることが知られている．一般に20～40kHz程度の周波数が利用されるが，それ以上の高周波振動を利用した場合にどのような効果が得られかについては詳しく検討されていない．そこで，本研究では従来と比べて1桁程度周波数の高いサブMHzの楕円振動工具を試作し，その加工特性について評価を行った．


• Development of Sculptured Surface Machining Technology for Hardened Steel by Utilizing Two-degree-of-freedom Elliptical Vibration Tool

  Suzuki Norikazu, Yokoi Hideo, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, インサート工具の突き出し長さが大きく，傾斜した方向に軸振動を発生する自由曲面加工用の2自由度超音波楕円振動工具を開発した．さらに，焼入れ鋼の溝加工実験に適用し，びびり振動の発生メカニズムについて考察を行うとともに，安定限界向上の可能性について検討を行った．その結果，インサート工具の形状を非対称にすることでモードカップリング型のびびり振動が抑制され，安定限界切込みが増大することを確認した．


• Measurement of Fluid Pressure Distribution in CMP Process

  Suzuki Norikazu, Adachi Yosuke, Hashimoto Yohei, Suzuki Ko

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, CMPプロセスでは，ウェハと研磨パッド間が潤滑状態となり，流体圧力が生じることが知られている．しかし，研磨パッドや研磨ヘッドは回転運動を行うため，その界面の流体圧力の測定は難しい．本研究では，無線通信により流体圧力を遠隔計測する装置を試作し，ウェハ－研磨パッド間の流体圧力の計測実験を行った．さらに，著者らが開発しているCMPプロセス解析との比較を行った．


• A Three Dimensional Coupled Fluid-Structure Analysis for CMP Process:Consideration on Damping Effect of Polishing Pad

  Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2009, The Japan Society for Precision Engineering, The accurate analytical model for the dynamic structure analysis of Chemical Mechanical Polishing (CMP) process has been proposed by the authors. By extending to the three dimensional (3D) analysis and applying to the coupled fluid-structure analysis of the CMP process, the accurate CMP process model, which can consider the nonlinear dynamic motion, the damping effects and the stress concentration simultaneously, was developed in the present research. It was applied to the 3D CMP process analysis, and the effect of the damping property of the polishing pad on the process was investigated. It was confirmed that the stress concentration beneath the leading edge of the wafer changes significantly depending on the consideration of the damping property. Thus, there is a possibility that the developed model can estimate the polishing stress and fluid pressure distributions of the CMP process accurately.


• 256 Effect of off-diagonal elements in a transfer function on stability limits of regenerative chatter vibration in plunge cutting

  SUZUKI Norikazu, NISHIMURA Kohei, KURATA Yusuke, SHAMOTO Eiji

  The Proceedings of Conference of Tokai Branch, 2008, Japanese, The Japan Society of Mechanical Engineers


• Experimental/Analytical Evaluation of Fluid Bearing Utilizing Traveling Waves

  Owaki Yoshihiro, Yamaji Fumie, Suzuki Norikazu, Syamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, 本研究では進行波を利用した新しい流体軸受を提案している．本軸受では圧電素子を用いて軸受面に進行波を発生し，軸受面中心に向かう力を流体に与えることで軸受面下の圧力を上昇させ，非接触の支持を実現する．本報では本軸受の試作機に対する測定と既に構築している本軸受の軸受隙間の有限要素モデルによる解析により，本原理による軸受としての性能について検討する．


• A Coupled Fluid-Structure Analysis for CMP Process:Construction of A Method for Dynamic Structural Analysis -

  Hashimoto Yohei, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, CMPにおける従来のウェハ－研磨パッド間の接触応力解析においては，動的な解析モデルを扱う際に解析精度が低くなるという問題があった．これに対し，動的なプロセスを準静的に扱う構造解析モデルを考案し，動的接触応力解析の高精度化・高速化について検討を行った．その結果，提案手法を用いることにより，ウェハエッジ部における応力集中などの従来困難であった解析の精度が向上し，解析時間が大幅に短縮されることを確認した．


• Regenerative effect and mode-coupling in self-excited chatter vibration

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, 回転工具を用いる加工では，一般に再生効果とモードカップリングの影響が混在した自励型びびり振動が発生するが，通常これらの影響はほとんど区別されることはない．これに対し，本研究ではボーリング加工を対象として，再生効果とモードカップリングの影響を切り分けた実験条件において安定限界解析の比較を行った．その結果，それぞれの影響が小さくなる条件において安定限界が最も大きくなることを確認した．


• FEM simulation of Elliptical Vibration Cutting

  Amini Saeid, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, Ultrasonic vibration cutting processes are modeled and simulated in the present research, utilizing MSC-Marc FEM software. The vibration is applied to the cutting tool in one or two directions denoted by vibration cutting (VC) and elliptical vibration cutting (EVC), respectively. The cutting forces and the stresses developed within the workpiece during the vibration cutting processes are estimated and compared with those in the conventional cutting (CC) process. The influence of various parameters such as speed ratio and amplitude are subsequently investigated. It is partially concluded that though the cutting force fluctuates periodically in VC and EVC, its average value changes from CC to VC and EVC in descending order. The cutting force decreases with a rise in the speed ratio in EVC and does not change in VC.


• Ultra-precision micro machining of hard material by applying elliptical vibration cutting:Proposal of texturing method by high-speed amplitude control

  Suzuki Norikazu, Shamoto Eiji, Hamada Seiji, Ueyama Takashi

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, 楕円振動切削では，切込方向の振動振幅を能動的に制御することによって切込み深さに変動を与えることができる．本研究では，この特徴に基づき，振動振幅制御を利用した高硬度材の超精密微細テクスチャ加工技術を提案する．振動振幅を高速制御することが可能な約40kHzの楕円振動制御装置を用いて，焼入れ鋼のテクスチャ加工実験を行った．基礎的な溝加工実験の結果，良好な超精密微細加工を実現できることを確認した．


• Improvement of Load Characteristics of 3 DOF Ultrasonic Elliptical Vibration Tool

  Suzuki Norikazu, Yokoi Hideo, Syamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, 著者らは楕円振動切削を利用した焼入れ鋼の自由曲面加工法を提案し，これを実現するための3自由度超音波楕円振動工具を開発している．従来の振動工具においては，大きな切削負荷が生じた際に振動軌跡が乱れて仕上げ面性状の劣化や工具の欠損を引き起こす問題があった．そこで，本研究では振動子に取り付けるシャンク形状の変更による負荷特性の改善を検討した．その結果，大幅に負荷特性を改善し得ることを確認した．


• Ultra-precision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (3rd Report):Study on extending tool life

  Suzuki Norikazu, Ebata Yusuke, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, 新しいガラス成型用金型材料として期待されているタングステン合金の超音波楕円振動切削においては，従来の研究によってダイヤモンド工具の急激な摩耗が仕上げ面性状の劣化を引き起こし問題となることが明らかになっている．本研究ではこの摩耗メカニズムに着目し，工具形状や結晶方位などの変更による工具寿命の延長について検討を行う．さらに，各種工具を用いた寿命試験により，その効果について検証を行った．


• Inverse identification of a transfer function with experimental results in end milling

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, エンドミル加工のびびり振動の安定限界解析には伝達関数が必要となるが，小型もしくは複雑形状の機械構造や，回転中に伝達特性の変化する機械構造がびびり振動する場合には，伝達関数の高精度測定が難しいという問題がある．そこで，従来の伝達関数測定手法と異なり，加工実験中に計測されるびびり振動の周波数と実際の安定限界切込みから伝達関数を逆同定する手法を考案した．そして，加工実験により考案手法の検証を行った．


• Effect of cross-terms in a transfer function on stabilitiy limits of regenerative chatter vibration:Study on plunge cuting

  Suzuki Norikazu, Nishimura Kohei, Shamoto Eiji, Yoshino Kiyoshi

  Proceedings of JSPE Semestrial Meeting, 2008, The Japan Society for Precision Engineering, 切削加工におけるびびり振動の安定限界に対して，機械構造の伝達特性におけるクロス項が与える影響について検討した研究はこれまでになく，ほとんどの場合には考慮すらされることがない．これに対し本研究では，びびり振動の安定限界に対して伝達特性のクロス項が与える影響について，その本質的な意味を明らかにするとともに，突切り切削を対象としてクロス項を考慮した再生型びびり振動の安定限界解析手法を提案する．


• 657 Study on restraint of creep of piezoelectric actuator

  TSUKAMOTO Go, SUZUKI Norikazu, SHINODA Morio, SHAMOTO Eiji

  The Proceedings of Conference of Tokai Branch, 2008, Japanese, The Japan Society of Mechanical Engineers


• A Coupled Fluid-Structure Analysis for CMP Process:Effects of material properties of polishing pad and wafer shape

  Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2007, The Japan Society for Precision Engineering, CMPプロセスでは，研磨に使用する材料の形状や機械特性が研磨特性に大きく影響することが経験的に知られている．著者らは，複雑なCMPプロセスのメカニズムの解明を目的とし，これまでに流体－構造連成解析を利用したCMPプロセスの解析手法について検討を行っている．本稿では，本解析手法を利用し，研磨パッドの材質やウェハ形状などの各種パラメータが研磨特性に及ぼす影響について評価を行った結果について報告する．


• Proposal of parabolic vibration cutting method

  Shamoto Eiji, Suzuki Norikazu, Kikuchi Kaname, Tsuchiya Eiji, Hamada Seiji

  Proceedings of JSPE Semestrial Meeting, 2007, The Japan Society for Precision Engineering, 本研究では新しい振動切削加工法として，放物線振動切削加工法を提案する。本手法では工具刃先を切削方向に放物線軌跡で超音波振動させながら加工を行うことにより、間欠切削と引き切りの効果を同時に得るとともに、切れ刃方向の力が反転し相殺するため，実質的に著しい切削抵抗の低減が期待される。本報では、超音波放物線振動子を開発し，通常切削および従来振動切削と本手法の基礎的な比較実験を行った結果について報告する。


• Analysis of Stability Limits for Forced Chatter Vibration in End-Milling

  Suzuki Norikazu, Ikada Tsutomu, Kurata Yusuke, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2007, The Japan Society for Precision Engineering, びびり振動を抑制・回避するためには，安定限界解析手法を利用した適切な加工条件の選択や構造の改善が有効となる．これに対し，本研究では，強制型びびり振動を引き起こす主要因となる切削力の周期変動を考慮した，エンドミル加工における強制型びびり振動の安定限界解析手法を考案した．さらに，エンドミル加工による検証実験を行い，本解析手法により強制型びびり振動の安定限界を高精度に予測し得ることを確認した．


• Chatter Stability Limits in End-Milling with Anisotropic Flexible Tools:Experimental verification of proposed analytical model

  Kurata Yusuke, Suzuki Norikazu, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2007, The Japan Society for Precision Engineering, 従来のエンドミル加工におけるびびり振動安定限界解析では，空間に固定された座標系内で構造物の伝達関数を定義し，固定座標系内で一定の振動が生じることを前提としている．これに対して著者らは，低剛性の回転工具に，その工具に固定された座標系内で一定の振動が発生する場合に対応した安定限界解析モデルを構築している．本研究では，異方性を持つエンドミル工具を用いた切削実験を行い，本手法の有効性について検証を行った．


• Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting (2nd Report)

  Suzuki Norikazu, Haritani Makoto, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2007, The Japan Society for Precision Engineering, Elliptical vibration cutting is applied to ultra-precision machining of tungsten alloy molds for optical glass parts in the present research. The tungsten alloy is expected as a new mold material instead of conventional ones such as sintered tungsten carbide and CVD-silicon carbide. Ultra-precision molds of the tungsten alloy for a prism, a small spherical lens and an array of micro V-grooves were machined by the elliptical vibration cutting. It is confirmed that surface roughness of less than 100 nmRz and desired shape can be attained. They were applied to glass molding of borosilicate glass BK7 without any coatings, and it is found that accurate transcript with no adhesion can be achieved successfully.


• 125 Analysis of CMP process in mixed lubrication : Experimental verification of analytical model in terms of friction resistance

  SUZUKI Norikazu, HASHIMOTO Yohei, HAYASHI Masayuki, SHAMOTO Eiji

  The Proceedings of The Manufacturing & Machine Tool Conference, 2006, Japanese, The Japan Society of Mechanical Engineers, An analytical approach to estimate the coefficient of friction (COF) in chemical mechanical polishing (CMP) process in mixed lubrication is developed in the present research. The Stribeck curve is calculated by experimental and analytical results of friction resistances. An analytical model, which can predict the distribution of contact stress and fluid pressure under the condition of nonuniform velocity distribution by utilizing the Stribeck curve, is developed. Polishing experiments are carried out for the verification of the model in terms of the friction resistance. It is confirmed that the effect of the wafer rotational speed on the friction resistance can be predicted successfully by the developed analytical model.


• 508 Development of Ultraprecision Alignment Device with High Load Capacity Driven by Means of Walking Drive

  SHAMOTO Eiji, TSUKAMOTO Go, SUZUKI Norikazu, KATO Akio

  The Proceedings of The Manufacturing & Machine Tool Conference, 2006, Japanese, The Japan Society of Mechanical Engineers, This paper presents a new ultraprecision alignment device with high load capacity, which is targeted for ultraprecision bonding in a vacuum. The ultraprecision bonding is recently needed for emerging production technologies such as nanoimprint, MEMS and WOW. The device is driven by 'Walking Drive', which is an unique driving method to realize ultraprecision positioning with long stroke by utilizing piezoelectric actuators. The method is suitable for high load capacity and the ultraprecision positioning in a vacuum. Mechanical parts of the device are designed by utilizing FEM analysis, so that the device has a high load capacity of greater than 1 ton. It is confirmed experimentally that the developed alignment system has the high load capacity and also fine positioning resolution of less than 10nm.


• Ductile Machining of Single Crystal Germanium by Applying Elliptical Vibration Cutting

  Suzuki Norikazu, Yan Xhen, Shamoto Eiji, Hirahara Yasuhiro, Masuda Tadashi

  Proceedings of JSPE Semestrial Meeting, 2006, The Japan Society for Precision Engineering, &prime;Ultrasonic elliptical vibration cutting&prime; technology is applied in the present research to ultraprecision machining of single crystal germanium, which is an excellent substrate material for optical devices. Micro grooving experiments are carried out on (100), (110) and (111) faces of the single crystal germanium to clarify the basic effects of the elliptical vibration on the ductile micro machining. It is confirmed that a groove formed in <011> direction on the (111) surface is filled with asperities at a depth of 0.19 um due to cleavage fractures in the ordinary cutting. While a smooth mirror surface is obtained by the elliptical vibration cutting at a depth of cut of less than 1.04 um in same direction. These experimental results indicate that the critical depth of cut is increased at a specific orientation angle by applying the elliptical vibration cutting. However critical depths of cut depend on cutting directions and crystal orientations. We also clarified that the critical depth of cut can be increased at the lower cutting speed.


• Analysis of CMP process in boundary lubrication

  Suzuki Norikazu, Hashimoto Yohei, Hayashi Masayuki, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2006, The Japan Society for Precision Engineering, Polishing experiments are carried out in the present research in order to verify an analytical model for a simulation of Chemical Mechanical Polishing (CMP) process. A three-dimensional finite element analysis of CMP process, which considers the boundary lubrication between a wafer and a polishing pad, is utilized to predict a friction resistance. Additionally, the friction forces are measured in the polishing experiments by force sensors built into the experimental setup. It is conformed that the predictions of friction resistance directions fit experimental results. These results indicate that the friction resistance direction depends on the ratio of the wafer to the polishing pad rotation speeds.


• Ultraprecision Micromachining of Tungsten Alloy by Applying Ultrasonic Elliptical Vibration Cutting

  Suzuki Norikazu, Shamoto Eiji, Haritani Makoto, Yan Sekihin, Ootsuki Masato, Hamada Seiji

  Proceedings of JSPE Semestrial Meeting, 2006, The Japan Society for Precision Engineering, &prime;Ultrasonic elliptical vibration cutting&prime; technology is applied in the present research to ultraprecision machining of Tungsten alloy, which is expected as a material of molds for glass parts instead of sintered tungsten carbide. It is confirmed that ulptraprecision grooving cannot be realized by the ordinary cutting. On the other hand, it can be realized by the elliptical vibration cutting at a cutting depth of less than 1 um. Effects of the cutting distance on the cutting force and the roughness are also clarified, and it is found that surface roughness of less than 100 nm Rz can be realized up to a cutting distance of 35 m. Practical molds for spherical glass lenses and a glass prism are successfully machined.


• Development of a New Fluid Bearing Utilizing Surface Tension

  Shamoto Eiji, Komura Takamichi, Suzuki Norikazu

  Proceedings of JSPE Semestrial Meeting, 2005, The Japan Society for Precision Engineering, A prototype slider is developed in the present research by utilizing a new fluid bearing proposed in the previous research. The moving part is supported with a thin fluid film held on the bearing surface by surface tension. Conventional hydrostatic sliders utilize externally compressed fluid, which requires some cost and large facilities and causes micro vibrations by ripple of the fluid pressure. The non&ndash;contact precision slider is realized without the large facilities by utilizing the proposed bearing, and it has high load capacity and enough rigidity for the simple structure. The prototype slider is fabricated by utilizing a water film and a guide rail of polished glass, and its resistance force against the feed motion is investigated here.


• Sculptured Surface Machining by Applying Ultrasonic Elliptical Vibration Cutting

  Shamoto Eiji, Suzuki Norikazu, Tsuchiya Eiji, Hori Yasunori, Inagaki Hiroshi, Yoshino Kiyoshi

  Proceedings of JSPE Semestrial Meeting, 2005, The Japan Society for Precision Engineering, A new machining method is proposed to obtain precise sculptured surfaces by applying &Prime;elliptical vibration cutting&Prime;. A 4&ndash;axis controlled precision machine tool, which consists of an air spindle and precision elements, is developed. 4&ndash;axis control tool paths for machining sculptured surfaces are also generated by utilizing commercial CAM software and a special post processor. It is confirmed that mirror surface machining of hardened die steel can be realized by integrating the precision machine tool, the special CAM system and the 3 DOF vibration system developed in the previous research.


• Analysis of distribution of material removal rate in CMP process

  Suzuki Norikazu, Hashimoto Yohei, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2005, The Japan Society for Precision Engineering, 本研究では、CMPプロセスにおいて実用的な解を与える研磨レート分布解析手法の確立を目指している。本報では、基礎的なCMPプロセスの解析モデルを構築し、有限要素解析を利用してウェハ&ndash;研磨パッド間の流体圧力分布及び接触応力分布の解析を行うと同時に、研磨レート分布の推定を行った。さらに酸化膜CMPにおける基礎的な研磨実験を行い、研磨条件がCMPプロセスに及ぼす影響について検証を行った。


• Study on three dimensional cutting mechanics

  Shamoto Eiji, Suzuki Norikazu, Kato Masahiro

  Proceedings of JSPE Semestrial Meeting, 2005, The Japan Society for Precision Engineering, An analytical model of three dimensional cutting process with two cutting edges is presented without relying on empirical rules in the present research. The shear deformation zone is simplified to a thin shear plane, and Krystof&prime;s maximum shear stress model and Merchant&prime;s minimum energy model for the orthogonal cutting process are extended to the three dimensional cutting process to predict the shear direction. The three dimensional cutting parameters including cutting forces and chip flow direction are computed with the developed model, and it is confirmed that the computed chip flow direction agrees roughly with Colwell&prime;s empirical law of chip flow.


• Development of Fluid Bearing Utilizing Traveling Wave

  Shamoto Eiji, Suzuki Norikazu, Hamaguchi Akihide, Nunome Kiyonari

  Proceedings of JSPE Semestrial Meeting, 2005, The Japan Society for Precision Engineering, A new non-contact fluid bearing, which utilizes traveling wave, is proposed in the present research. The moving part is supported with a thin fluid film compressed by the wave traveling on the bearing surface. Conventional fluid bearings utilize externally compressed fluid, which requires some cost and large facilities. The proposed bearing realizes non-contact precision tables without the large facilities, and furthermore it has a capability to electrically control the bearing force and moment. A prototype device is developed on the basis of the proposed principle, and its non-contact smooth motion has been observed.


• Cutting process control by applying elliptical vibration cutting.

  社本 英二, 鈴木 教和, 加藤 晃央, 柳田 和彦

  Proceedings of JSPE Semestrial Meeting, 2004, The Japan Society for Precision Engineering, 著者らが考案している楕円振動切削加工法では、背分力をゼロもしくは反転させることが可能である。また、振動軌跡における振動振幅や位相差などの各振動パラメータを変化させることにより、切削プロセスを意図的に変化させることができる。本研究では、振動振幅や位相差を変化させることにより切削力を制御する切削プロセス制御システムの開発を行った.さらに切削実験を行い、開発した制御システムの有効性を検討した。


• Development of 3 DOF ultrasonic vibration control system to realize elliptical vibration cutting of free-form surface

  Suzuki Norikazu, Tsuchiya Eiji, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2004, The Japan Society for Precision Engineering, 著者らは楕円振動切削を適用することにより焼入れ鋼金型に対して直接ダイヤモンド鏡面切削を行うことが可能な新しい加工技術の開発を目指している.これまでの研究において,1方向のたて振動と2方向のたわみ振動を同一周波数で発生させることのできる3自由度型の振動工具の開発を行っている.本報では,開発した3自由度型振動工具を安定して制御することが可能な制御システムを設計・試作を行い,その制御特性の評価を行った.


• Ductile mode machining of cemented tungsten carbide by applying Elliptical Vibration Cutting

  Suzuki Norikazu, Masuda Shinsuke, Shamoto Eiji

  Proceedings of JSPE Semestrial Meeting, 2004, The Japan Society for Precision Engineering, 微細形状を有するガラス製品の量産を目的とし、超硬合金製金型に対する超精密微細加工の要求が増加している。これに対し、筆者らは楕円振動切削の適用を試み、すでに良好な延性モード加工を行い得ることを確認している。本報では、低周波振動における溝加工実験を行い、楕円振動切削による延性モード加工のメカニズムについて検討を行った。その結果、低周波振動においても延性モード加工行い得ることを確認した.


• Development of 3 DOF vibration system for ultrasonic elliptical vibration cutting

  Shamoto Eiji, Suzuki Norikazu, Nakamura Akihiro

  Proceedings of JSPE Semestrial Meeting, 2004, The Japan Society for Precision Engineering, 筆者らは楕円振動切削と呼ぶ加工法を提案し、優れた切削性能を持つことを確認している。実用的な自由曲面を加工するためには多様な加工形状に対応できる振動装置が必要となる。しかし、既に開発している2自由度型超音波楕円振動切削装置では振動子と被削材の干渉により加工形状が制約されてしまう。そこで、任意の面内で楕円振動軌跡を得ることができ、加工形状の制約が少ない3自由度型超音波楕円振動切削装置の開発を行った。


• Analysis of Chatter Stability Limits in End-Milling

  Shamoto Eiji, Suzuki Norikazu, Suzuki Hiromi, Se Gyouken, Inoue Atsushi, Kuroda Motofumi

  Proceedings of JSPE Semestrial Meeting, 2004, The Japan Society for Precision Engineering, エンドミル加工では、加工時に発生するびびり振動により、切削条件が制限されることが多い。このびびり振動を抑制し切削安定限界を上げることは、加工能率の向上へとつながる。本研究では、工具を主体としたびびり振動の発生機構をモデル化し、解析的に求めた切削安定限界と実験値を比較する。また、積極的に安定限界領域を拡大する手法についても検討を行う。


• Proposal of a New Fluid Bearing Utilizing Surface Tension

  Shamoto Eiji, Hashimoto Kento, Suzuki Norikazu

  Proceedings of JSPE Semestrial Meeting, 2004, The Japan Society for Precision Engineering, 本研究では、表面張力を利用した新しい流体軸受を考案している。提案する装置では、軸受隙間に水の膜を作り、表面張力によってその状態を維持する。従来の非接触軸受と異なり、外部装置を必要としない単純な構造のため、使用する場所に制限されず、流体の脈動による微振動も無くす事ができる。実際に表面張力によって移動部を浮上させ、滑らかな送り動作が可能である事を確認している。また剛性等の測定も検討している。


• Study on three dimensional cutting mechanics : Machining with two cutting edges

  SHAMOTO Eiji, OYABA Mitsuru, SUZUKI Norikazu

  The Proceedings of Conference of Tokai Branch, 2003, Japanese, The Japan Society of Mechanical Engineers


• Ultraprecision Ductile Machining of Single Crystal Materials by Applying Ultrasonic Elliptical Vibration Cutting

  Shamoto Eiji, Suzuki Norikazu, Masuda Shinsuke

  Proceedings of JSPE Semestrial Meeting, 2003, The Japan Society for Precision Engineering, 単結晶フッ化カルシウム（CaF2）は切削による延性モード加工が困難であるため，通常はポリシングにより加工されることが多い．本研究では切削性能の向上を目的として考案されている楕円振動切削加工を適用することにより単結晶材料の延性モード切削を試みた．<br>基礎的な溝加工実験により超音波楕円振動付加による影響の評価を行った．その結果，楕円振動切削を用いることで大幅に臨界切込み量が増大することがわかった．


• CMP Pad Surface Analysis with Digital Images

  Kojima Hiroyuki, Suzuki Norikazu, Hirose Takenori, Nishiguchi Takashi

  Proceedings of JSPE Semestrial Meeting, 2002, The Japan Society for Precision Engineering, CMPプロセスにおける研磨パッドの表面状態は研磨レート等の基本的な研磨特性に大きな影響を与える．研磨パッドの表面状態について，これまで筆者らは表面あらさを用いた評価を試みてきたが，測定箇所の発泡状態等により測定結果が大きくばらつき，研磨特性との相関を明瞭とするために多量の測定を要する問題があった．そこで本研究では，研磨パッドの損耗に伴うパッド表面の平滑化に着目し，研磨パッド表面の画像から平滑化の度合いを算出する簡便な研磨パッド表面状態の評価方法について検討を行った．実験の結果、本測定法は研磨パッドの表面あらさRaによる評価と比較して研磨パッド表面状態を精度良く評価できることが判った．


• Study on Ultrasonic Elliptical Vibration Cutting : Development of Vibration Control System and its Application to Machining

  SHAMOTO Eiji, SUZUKI Norikazu, IENAGA Ken, NAOI Yoshikazu, MORIWAKI Toshimichi

  The Proceedings of The Manufacturing & Machine Tool Conference, 2000, Japanese, The Japan Society of Mechanical Engineers, A new system is developed to control the ultrasonic elliptical vibration applied to the cutting tool, and it is applied to the ultraprecision elliptical vibration cutting of hardened stainless steel in the present research. Steady feedback control of the vibration locus is realized by developing a cross talk remover, which eliminates interference between the two directional vibrations. The controller keeps the vibration amplitudes and the phase difference between the two vibrations to be desired values and to chase the average resonant frequency of the vibrations simultaneously. The machining experiments show that shape accuracy and roughness of the finished surface are improved significantly by applying the developed system.

• CIRP

  Mar. 2021 - Present


• The Japan Society of Mechanical Engineers

  2005 - Present


• The Japan Society for Precision Engineering

  2000 - Present


• The Japan Society for Abrasive Technology

  2000 - Present


• 日本設計工学会

  Mar. 2022 - Sep. 2025


• 公益社団法人自動車技術会


• 3rd CIRP conference PMI2012


• International Program Committee of ICPT


• 型技術協会

• アクティブプロセス制御を実現する革新的揺動ミリング加工法の提案

  鈴木 教和

  日本学術振興会, 科学研究費助成事業, 基盤研究(B), 中央大学, Apr. 2025 - Mar. 2028, Principal investigator


• 次世代CMPプロセスを拓くデジタルツイン基盤とサイバーフィジカルシステムの開発

  鈴木 教和

  日本学術振興会, 科学研究費助成事業, 基盤研究(B), 中央大学, 01 Apr. 2022 - 31 Mar. 2025

  提案手法を実現するには，実現象を再現することのできる高精度なモデルと高速高精度な計算アルゴリズムを開発する必要がある．そこで．2023年度は以下の研究を実施した． １．研磨効率の空間分布や動的変化を表現するモデルパラメータの同定技術の開発 2022年度までの成果に基づき，低自由度でパラメトリックに定式化した動的研磨効率分布モデルを提案し，CMP装置の運動を考慮した線形システムの定式化を行った．さらに，CMP装置の内部情報である装置の運動情報とトルク負荷情報を利用して，制約付き最小二乗法によりモデルパラメータを高速高精度同定する手法（BLS法）を開発した．さらに，フルランクを満たしつつウェハとリテーナの摩擦係数を分離して同定する研磨レシピを考案した．検証実験を通じて，各パラメータを適切に同定出来ることを確認した． ２．研磨プロセスの状態量（特に研磨量分布）の推定技術の開発 オブザーバによりリアルタイムで研磨量（分布）を推定する手法を検討した．まず，推定したい時刻の1ステップ前のデータから摩擦係数および研磨レートを推定する逐次法（SLS法）を考案した．次に，正規化したノイズモデルを考慮したカルマンフィルタに依る推定法（KF法）を考案した．検証実験を通じてそれぞれの手法を比較し，提案手法により精度よく研磨レートを推定できることを確認した．一方で，故意に加えた外乱に対して推定精度が低い場合があることも明らかにした．


• Development of Innovative Robot Polishing Technology by Model Based Simulation and Optimization involving AI

  畝田 道雄, 鈴木 教和

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (C), Kanazawa Institute of Technology, 01 Apr. 2022 - 31 Mar. 2025


• 次世代CMPプロセスを拓くデジタルツイン基盤とサイバーフィジカルシステムの開発

  鈴木教和

  日本学術振興会, 科学研究費補助金, 基盤研究（B）, 中央大学, Apr. 2022 - Mar. 2025

  Competitive research funding


• Design of cutting tool flank texture that overturns the conventional limit in chatter stability

  Suzuki Norikazu

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (B), 01 Apr. 2019 - 31 Mar. 2022

  A simulation technique for process damping phenomena in cutting has been developed, as well as a design technique for the flank surface texture of cutting tools that effectively generate process damping. The developed tool exhibits process damping not only at low cutting speed range but also at high cutting speeds without significant adhesion or increased edge force. The flank texture does not cause any critical defects on the flank surface and cut surface, and thus can provide robust vibration damping against vibration frequency. The analysis technique to estimate the process damping coefficient using FEM and the compensation for the effects of tool edge geometry and flank adhesion enable highly accurate estimation of the process damping phenomenon.


• A novel model-based process monitoring for next-generation cutting technology

  Suzuki Norikazu

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Nagoya University, 01 Apr. 2016 - 31 Mar. 2019

  A novel model-based monitoring technology in cutting process is proposed to establish advanced next-generation intelligence technology. In the proposed method, based on theoretical analysis technology of cutting process and measurement / estimation technology of machine tools, a new identification of cutting process parameters and dynamics parameters is automatically made. These parameters are evaluation indices of the machining system. Developed analysis models representing the basic milling process were verified through a series of cutting experiments. Using only the internal information of the CNC, without human manual operations, the parameters are identified. With the identified parameters, tool life and processing accuracy are evaluated. The developed technology is also useful to develop next-generation intelligence technology that automatically estimates process stability.


• Cutter design of irregular pitch / variable helix end mills to increase chatter stability in cutting

  Suzuki Norikazu, SHAMOTO Eiji, Hino Rei

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B), Grant-in-Aid for Scientific Research (B), Nagoya University, 01 Apr. 2013 - 31 Mar. 2016

  It is known that regenerative effect, which causes self-excited chatter vibration, can be suppressed by utilizing irregular pitch / variable helix tools. In order to suppress the regenerative effect sufficiently, a suitable combination of pitch angles needs to be designed. The present study proposes a design method of end mills, which ensures robust suppression of regeneration. Firstly, irregular pitch design for simultaneous suppression of multi-mode regenerations is formulated. In order to quantify the regenerative effect, a parameter named “Regeneration Factor (RF)” is proposed. Minimizing the mean value of the RF within certain frequency range, suppression frequencies are aligned in the proposed method, resulting in robust suppression of regeneration regardless of chatter frequency and/or spindle speed. The design method is extended for variable helix tools. The effect of the proposed method on chatter suppression is verified through a series of experimental investigations.


• 平坦化CMPにおける高精度研磨レート分布推定技術の開発

  鈴木 教和

  科学技術振興機構, 産学が連携した研究開発成果の展開/研究成果展開事業/研究成果最適展開支援プログラム(A-STEP)/探索タイプ, 2012 - 2013

  半導体製造における平坦化CMPの量産プロセスに対して、高精度研磨レート分布推定を実現する解析技術の開発を行った。研究責任者がこれまでに開発してきたCMP解析モデルをさらに発展させ、一般に量産工程で用いられるエアーバッグ方式の研磨ヘッド構造を考慮可能な解析モデルを新たに開発した。さらに、研磨機上で高速圧縮動作が可能な機上圧縮試験装置を開発し、その場測定による研磨パッドの非線形粘弾性同定技術を開発した。得られた非線形粘弾性パラメータを用いて高精度な研磨応力解析を行い、研磨レート分布の推定を実現した。さらに、研磨実験との比較により提案手法の検証を実施した。本開発技術により我が国のCMP技術の研究開発力強化に貢献することが期待される。


• Proposal of novel chatter suppression method by utilizing anisotropic dynamics

  SUZUKI Norikazu

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B), Grant-in-Aid for Young Scientists (B), Nagoya University, 2010 - 2011

  A novel chatter suppression method in boring operation is proposed. The anisotropic boring tool with a step portion and notches on the cylinder periphery is designed, which has anisotropic dynamic characteristics. Since the direct and the cross transfer function components of the proposed tool are designed to cancel out each vibration, the nominal compliance of the boring tool in cutting process can be reduced significantly. Hammering tests of the developed tool clarified that appropriate anisotropic frequency response function is roughly attained by the proposed design. The developed tool was subsequently applied to turning experiments, and it was clarified that the stability limit in the radial depth of cut significantly increases by using the proposed boring tool as compared to the ordinary boring tool.


• マイクロ・ナノ機能性表面の創成加工技術の開発

  鈴木 教和

  科学技術振興機構, 産学が連携した研究開発成果の展開/研究成果展開事業/地域事業/地域イノベーション創出総合支援事業/シーズ発掘試験, 2009 - 2009

  本研究では、難削材料の超精密切削において優れた加工特性を持つ超音波楕円振動切削に対して、振動振幅をマイクロ・ナノメートルオーダで高速制御することにより能動的に切込み量を制御する加工システムの開発を行う。これにより、従来技術では不可能であった難削材料の自由曲面に対する超精密・微細なマイクロ・ナノ機能表面の加工を、高能率で創成することのできる実用的な加工技術の開発を目指す。


• Development of next generation machine tool to enable automatic chatter avoidance

  SUZUKI Norikazu

  Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research Grant-in-Aid for Young Scientists (B), Grant-in-Aid for Young Scientists (B), Nagoya University, 2008 - 2009

  Practical chatter avoidance method for milling is proposed, and the feasibility of development of the next generation machine tools, which is equipped with the automatic chatter avoidance functions, are discussed. In the proposed method, the chatter types are distinguished by measured chatter vibration while machining, then, the suitable chatter avoidance condition is estimated. Consequently, the cutting condition can be improved and optimized by iterating this step. Meanwhile, proposed method do not need either measuring transfer function or sophistication and skills to calculate stability/allowable limits in chatter vibrations, which are required in the conventional methods. It was confirmed that the suitable chatter avoidance conditions can be predicted and optimized by the proposed method.


• 焼結材料の延性モード加工を可能とする超高周波振動切削加工に関する研究

  鈴木 教和

  日本学術振興会, 科学研究費助成事業 若手研究(B), 若手研究(B), 名古屋大学, 2005 - 2006

  本研究では従来より振動切削に用いられている振動周波数(主に20kHz)に対して一桁以上高周波となる数百kHz〜1MHz程度の低振幅振動(0.1〜1μm_)を工具刃先に付加する振動切削加工技術の実現に挑戦する.本年度の研究では,有限要素解析技術を用いて,縦振動とたわみ振動を200kHz以上の高周波で組み合わせることのできる振動工具の設計を行い,試作装置の振動特性について評価を行った.また,別途開発を行ってきた40kHzの振動装置を用いて焼結金属(タングステン合金)に対する加工特性評価実験,および超精密金型の試作を行った.さらに試作した金型を用いてガラス部品の成形試験を行い,本手法の実用性について評価を行った.以下に得られた成果および知見を示す. (1)有限要素解析技術を利用して2次の縦振動と4次のたわみ振動の共振周波数がともに200kHzとなる超音波楕円振動子の設計を行った.実際に振動子の試作を行い振動特性の評価を行った結果,たわみ振動の共振周波数が181kHz,縦振動が208kHzとなり,27kHzのずれが生じることがわかった.また,約200kHz付近で駆動することにより0.1μm_の楕円振動を発生できることを確認した. (2)40kHzの超音波楕円振動装置を用いてタングステン合金の超精密加工実験を行った.近似2次元切削実験の結果,1μm前後の切取り厚さが延性-脆性の臨界条件となり,0.2μmの切取り厚さにおいても連続型の切りくずが生成されることを確認した. (3)上記の振動装置を用いてタングステン合金性の金型を試作し,良好な形状精度と仕上げ面性状を両立できることを確認した.さらに,試作した金型を用いて光学ガラスの成形を行った結果,微細形状が精密に転写され良好なガラス部品を成形可能であることを確認した.


• 楕円振動切削加工法による超硬合金の超精密微細加工

  鈴木 教和

  日本学術振興会, 科学研究費助成事業 若手研究(B), 若手研究(B), 名古屋大学, 2003 - 2004

  本研究課題においては、楕円振動切削加工法および超精密楕円振動制御技術を適用することによって、一般的な切削加工では不可能と考えられる超硬合金のダイヤモンド切削を試みた。本年度は、前年度行った基礎的な検討の結果に基づき、さらに詳細な基本メカニズムの検討および実用的な加工特性の評価を行い、主に以下に示す成果を得た。 (1)工作機械のNC制御を利用した低周波プロセスによる延性モード加工メカニズムの検討 0.1Hz以下の低周波の振動を発生させ、基礎的な溝加工実験を行った結果、楕円振動切削では超音波によるプロセスと同様の延性モード加工が行われることに対して、従来型の振動切削においては通常の切削と同様に脆性モードとなることを確認した。この結果から、楕円振動切削においては振動の各周期ごとに切取られる被削材の厚み(実質的な切取り厚さ)が,特に仕上げ面を生成する振動の下死点付近において微小な値をとることにより,見かけの臨界切込みが増加し延性モード加工が行われるものと考えられる。 (2)平面加工におけるダイヤモンド工具の長寿命化の検討 切削油剤の供給方法の検討として、ミストおよびクーラント液供給において比較を行った結果、その加工特性に大きな違いは無いことがわかった。一方、2種類の楕円振動装置を用いて工具刃先の振動の方向が与える影響について比較した結果、楕円振動の発生する平面が切削方向を含むように設定した場合において、工具寿命が若干向上することを確認した。 (3)楕円振動切削による超精密微細加工実験 実用的な微細金型を想定した、V溝加工実験を行った。その結果、通常の切削においては脆性破壊が生じて鋭利な加工形状を得ることが困難であったことに対し、本手法を適用することにより鋭利な角が得られ、実用的な超硬金型の超精密微細加工を実現し得る可能性があることを確認した。