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HIDA Hirotaka
Graduate School of Engineering / Department of Mechanical Engineering
Associate Professor

Researcher basic information

■ Research Keyword
  • Bio MEMS
  • Micro total analysis sytems
  • Sensors
  • MEMS
  • アクチュエータ
  • センサー
  • MEMS
■ Research Areas
  • Informatics / Mechanics and mechatronics
  • Informatics / Robotics and intelligent systems
■ Committee History
  • Apr. 2021, 日本機械学会 情報・知能・精密機器部門, 幹事
  • Apr. 2019 - Mar. 2021, 日本機械学会 情報・知能・精密部門, 表彰委員幹事
  • Apr. 2020, 電気学会「センサ・マイクロマシンと応用システム」論文委員会, 主査（部門7 バイオマイクロナノシステム）
  • Apr. 2019 - Mar. 2020, 電気学会「センサ・マイクロマシンと応用システム」論文委員会, 副査（部門7 バイオマイクロナノシステム）
  • Mar. 2020, International Conference on Sensors, Systems and Smart Materials(IC-SSSM 2020), International Advisory Committee

Research activity information

■ Award
  • Nov. 2024 日本機械学会マイクロ・ナノ工学部門, 日本機械学会 マイクロ・ナノ工学部門部門一般表彰／若手優秀講演フェロー賞 ファイナリスト
    共同研究・競争的資金等の業績IDIRI

  • Sep. 2020 一般社団法人 電気学会 センサ・マイクロマシン部門, 電気学会 センサ・マイクロマシン部門 総合研究会 優秀論文発表賞, 機械的ストレスが植物寄生性線虫の感染に与える影響の解析
    肥田博隆

  • Nov. 2019 Society of Chemistry and Micro-nano Systems, Best Research Award, マイクロチャンバーを用いた植物寄生性線虫の集団行動の分析
    HIDA Hirotaka, MORI Hitoshi, KANNO Isaku, FURUMIZU Chirhiro, SAWA Shinichiro

  • Mar. 2019 JSME Information, Intelligence and Precision Equipment Division, ベストプレゼンテーション賞, 日本機械学会2018年度年次大会 発表題目「マイクロピラーアレイを用いた根の機械的ストレス応答の解析」
    HIDA HIROTAKA
    Japan society

  • Nov. 2018 電気学会センサ・マイクロマシン部門, 優秀ポスター発表賞, 第35回「センサ・マイクロマシンと応用システムシンポジウム」発表題目：機械的ストレス下における植物の根系発達過程の解析手法
    HIDA HIROTAKA, 西脇 大維, KANNO ISAKU, 野田口 理孝
    Japan society

  • 2010 MHS2010 Best Poster Award

  • 2006 MHS2006 Best Poster Award

■ Paper
  • Jing Li, Michitaka Notaguchi, Isaku Kanno, Hirotaka Hida
    In this study, we present an on‐chip analytical method using a microfluidic device to characterize the mechanical properties in growing roots. Roots are essential organs for plants and grow under heterogeneous conditions in soil. Especially, the mechanical impedance in soil significantly affects root growth. Understanding the mechanical properties of roots and the physical interactions between roots and soil is important in plant science and agriculture. However, an effective method for directly evaluating the mechanical properties of growing roots has not been established. To overcome this technical issue, we developed a polydimethylsiloxane (PDMS) microfluidic device integrated with a cantilevered sensing pillar for measuring the protrusive force generated by the growing roots. Using the developed device, we analyzed the mechanical properties of the roots in a model plant, Arabidopsis thaliana. The root growth behavior and the mechanical interaction with the sensing pillar were recorded using a time‐lapse microscopy system. We successfully quantified the mechanical properties of growing roots including the protrusive force and apparent Young's modulus based on a simple physical model considering the root morphology. © 2025 Institute of Electrical Engineers of Japan and Wiley Periodicals LLC.
    Wiley, May 2025, IEEJ Transactions on Electrical and Electronic Engineering, 20(7) (7), 1134 - 1140, English
    [Refereed]
    Scientific journal

  • Jing Li, Sinichiro Sawa, Isaku Kanno, Hirotaka Hida
    May 2025, Microfluidics and Nanofluidics, 29(31) (31), English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • Patrick Bach, Sang-Hyo Kweon, Hirotaka Hida, Isaku Kanno
    Springer Science and Business Media LLC, Jun. 2023, Microsystem Technologies, 29(8) (8), 1181 - 1188
    Scientific journal

  • Kazuki Ueda, Sang-Hyo Kweon, Hirotaka Hida, Yoshiharu Mukouyama, Isaku Kanno
    Elsevier BV, Aug. 2021, Sensors and Actuators A: Physical, 327, 112786 - 112786
    Scientific journal

  • Hirotaka Hida, Rika Ebara, Shumpei Hayashi, Isaku Kanno, Chihiro Furumizu, Shinichiro Sawa
    Institute of Electrical Engineers of Japan (IEE Japan), May 2021, IEEJ Transactions on Sensors and Micromachines, 141(5) (5), 141 - 146
    Scientific journal

  • HARADA Ryo, UMEGAKI Toshihito, HIDA Hirotaka, KANNO Isaku
    In this study, we fabricate and evaluate piezoelectric energy harvesters (PEH) for the wearable power sources fabricated from Pb(ZrTi)O3 (PZT) thin films on stainless steel foils. The PZT thin films were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by RF-magnetron sputtering. Parallel and series connection of each PEH enabled the increase of output power sufficient for turning on a LED.
    The Japan Society of Mechanical Engineers, 2020, The Proceedings of Mechanical Engineering Congress, Japan, 2020, J22202, Japanese

  • Goon Tan, Kazuki Maruyama, Yuya Kanamitsu, Shintaro Nishioka, Tomoatsu Ozaki, Toshihito Umegaki, Hirotaka Hida, KANNO ISAKU
    2019, Scientific Reports, 9, 7309, English
    [Refereed]
    Scientific journal
    Link to Kobe Univ. Repository (Kernel)

  • T Ito, T Nishi, T Umegaki, H Hida, I Kanno
    Jul. 2018, Journal of Physics: Conference Series, 1052(1) (1), 012094, English
    [Refereed]
    International conference proceedings

  • ON-CHIP MECHANICAL STRESS TEST ON PLANT ROOT GROWTH
    Dai Nishiwaki, Hirotaka Hida, Isaku Kanno, Michitaka Notaguchi
    Oct. 2017, The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017), English
    [Refereed]
    International conference proceedings

  • METHODS FOR PHYSHICAL CHARACTERIZATION OF GROWING PLANT ROOTS
    Hirotaka Hida, Katsuya Ozoe, Isaku Kanno, Michitaka Notaguchi
    Oct. 2017, The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017), English
    [Refereed]
    International conference proceedings

  • Hirotaka Hida, Tomohiro Hamamura, Takahito Nishi, Goon Tan, Toshihito Umegaki, Isaku Kanno
    Oct. 2017, JAPANESE JOURNAL OF APPLIED PHYSICS, 56(10) (10), 10PF08, English
    [Refereed]
    Scientific journal

  • Kanamitsu Yuya, Tan Goon, Umegaki Toshihito, Hida Hirotaka, Kanno Isaku
    The Japan Society of Applied Physics, Aug. 2017, JSAP Annual Meetings Extended Abstracts, 2017.2, 1251 - 1251, Japanese

  • Yuichi Tsujiura, Eisaku Suwa, Takahito Nishi, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno
    Jul. 2017, SENSORS AND ACTUATORS A-PHYSICAL, 261, 295 - 301, English
    [Refereed]
    Scientific journal

  • NISHI Takahito, ITO Takashi, UMEGAKI Toshihito, HIDA Hirotaka, KANNO Isaku
    In this study, we fabricated piezoelectric vibration energy harvesters (PVEHs) composed of PZT thin films on stainless steel foils, and investigated the optimal structures for the high output power aiming for shoe-mounted power generators. The shoe-mounted PVEHs have been thought to be one of the key applications as battery-free wearable systems. As a pre-stage of shoe-mounted PVEHs, we evaluated PVEHs under sinusoidal excitation to optimize the design of the PVEHs. We studied on the theoretical model of PVEHs from electromechanical coupling system to satisfy the required specification. Thinner substrates thickness, longer length and narrower width is preferable for high output with a same size of the mass and electrode area. Theoretical model indicated that the optimal electrode length is two-third of the cantilever length and a PZT thickness is about two-fifth of the substrate thickness. We confirmed the good agreement between theoretical and experimental values.
    The Japan Society of Mechanical Engineers, 2017, The Proceedings of Mechanical Engineering Congress, Japan, 2017, G1600103, Japanese

  • BABA Tomoaki, NAKAYAMA Tappei, HIDA Hirotaka, KANNO Isaku
    Lithium ion batteries are widely used in a variety of portable products because of their high energy density. Recently solid-state lithium ion batteries have been studied to solve the safety issue of liquid electrolyte. In order to realize solid state thin film batteries, we prepared electrode thin films by RF magnetron sputtering on Pt/Ti/Si substrates. In this study, LiCoO2(LCO) cathode thin films were deposited. After annealing at 620°C, clear diffraction of (003) and (101) orientation was detected in XRD measurements. Si anode, Cyclic voltammgram showed oxidation and reduction peaks at 0.6 V, 0.01 V, respectively. We also measured the capacity of the Si thin film by the discharge-charge curves. The discharge-charge capacity of 660 μAh/(cm2・μm) and 609 μAh/(cm2・μm) could be obtained for the Si anode thin films, respectively.
    The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2017, I - 1, Japanese

  • ITO Takashi, NISHI Takahito, UMEGAKI Toshihito, HIDA Hirotaka, KANNO Isaku
    This paper describes piezoelectric vibration energy harvester (PVEH). The PVEH was fabricated from Pb(ZrTi)O3 (PZT) thin films which were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by rf-magnetron sputtering. We measured output power of the PVEH as well as theoretical calculation. The output power showed maximum at the calculated optimal load resistance of 73.2 kΩ, where the output power was 1.0 μW. For the purpose of predicting output power, we tried to derive electromechanical coupling coefficient. Applying an equivalent circuit model of the energy harvester, we succeeded in deriving electromechanical coupling coefficient.
    The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2017, I - 2, Japanese

  • Hongbo Cheng, Hirotaka Hida, Jun Ouyang, Isaku Kanno
    Jan. 2017, CERAMICS INTERNATIONAL, 43(1) (1), 1597 - 1601, English
    [Refereed]
    Scientific journal

  • Shogo Nishio, Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
    Oct. 2016, THIN SOLID FILMS, 616, 444 - 448, English
    [Refereed]
    Scientific journal

  • ANALYTICAL METHODS OF ROOT GROWTH BEHAVIOR USING AN ARTIFICIAL SOIL DEVICE
    HIDA HIROTAKA, Dai Nishiwaki, Michitaka Notaguchi, Isaku Kanno
    Oct. 2016, Proc. of 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2016), English
    [Refereed]
    International conference proceedings

  • Fumiya Kurokawa, Masaya Kishimoto, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
    Jun. 2016, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1275 - 1283, English
    [Refereed][Invited]
    Scientific journal

  • Hirotaka Hida, Yuki Morita, Fumiya Kurokawa, Yuichi Tsujiura, Isaku Kanno
    Jun. 2016, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1429 - 1436, English
    [Refereed]
    Scientific journal

  • Fumiya Kurokawa, Masaya Kishimoto, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
    Jun. 2016, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 22(6) (6), 1275 - 1283, English
    [Refereed]
    Scientific journal

  • FABRICATION OF FORCE SENSOR FOR STUDYING SEED GERMINATION OF PLANTS
    HIDA HIROTAKA, Shimpei Fujimoto, Tetsuya Higashiyama, Michitaka Notaguchi, Isaku Kanno
    Jun. 2016, Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016), English
    [Refereed]
    International conference proceedings

  • T. Nishi, T. Ito, H. Hida, I. Kanno
    2016, 16TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2016), 773, English
    [Refereed]
    International conference proceedings

  • Hirotaka Hida, Hidetaka Nishiyama, Shinichiro Sawa, Tetsuya Higashiyama, Hideyuki Arata
    Dec. 2015, SENSORS AND ACTUATORS B-CHEMICAL, 221, 1483 - 1491, English
    [Refereed]
    Scientific journal

  • Plant-on-a-Chip: Towards Improving Global Crop Productivity
    HIDA HIROTAKA
    Nov. 2015, Proceedings of The 28th International Microprocesses and Nanotechnology Conference, English
    [Refereed][Invited]
    International conference proceedings

  • Development of on-chip physical characterization method for root growth
    HIDA HIROTAKA, Katsuya Ozoe, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi
    Nov. 2015, Proceedings of The 8th Plant Biomechanics International Conference, English
    [Refereed]
    International conference proceedings

  • Yuichi Tsujiura, Saneyuki Kawabe, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno
    Oct. 2015, JAPANESE JOURNAL OF APPLIED PHYSICS, 54(10) (10), 1 - 10, English
    [Refereed]
    Scientific journal

  • METHODS OF PLANT ROOT CHARACTERIZATION UNDER VARIABLE ENVIRONMENTAL CONDITIONS TOWARD IMPROVING CROP PRODUCTIVITY
    Katsuya Ozoe, Hirotaka Hida, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi
    Oct. 2015, Proceedings of 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2015), 206 - 208, English
    [Refereed]
    International conference proceedings

  • Fumiya Kurokawa, Akira Mori, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
    Aug. 2015, THIN SOLID FILMS, 588, 34 - 38, English
    [Refereed]
    Scientific journal

  • Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, HIDA HIROTAKA, Isaku Kanno
    Jun. 2015, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), English
    [Refereed]
    International conference proceedings

  • Fumiya Kurokawa, M. Kishimotoi, Atsuro Sadanda, Yuichi Tsujiura, HIDA HIROTAKA, Isaku Kannno
    Jun. 2015, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), English
    [Refereed]
    International conference proceedings

  • HIDA HIROTAKA, Yuki Moritai, Fumiya Kurokawa, Atsuro Sadanda, Yuichi Tsujiura, Isaku Kannno
    Jun. 2015, Proceedings of 2015 JSME-IIP ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2015), English
    [Refereed]
    International conference proceedings

  • Fumiya Kurokawa, Yuji Imamiya, Hirotaka Hida, Isaku Kanno
    May 2015, JOURNAL OF MATERIALS SCIENCE, 50(10) (10), 3631 - 3637, English
    [Refereed]
    Scientific journal

  • Prem Pal, Miguel A. Gosalvez, Kazuo Sato, H. Hida, Yan Xing
    Institute of Physics Publishing, Apr. 2015, Journal of Micromechanics and Microengineering, 25(4) (4), English
    [Refereed]
    Scientific journal

  • Fabrication of high-efficiency piezoelectric energy harvesters of epitaxial Pb(Zr,Ti)O3 thin films by laser lift-off
    Eisaku Suwa, Hirotaka Hida, KANNO ISAKU
    2015, Energy Harvesting and Systems, 3, 61, English
    [Refereed]
    Scientific journal

  • Hirotaka Hida, Shun Yagami, Akira Sakurai, Isaku Kanno
    2015, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 28th Vol.1, 377 - 380, English
    [Refereed]
    International conference proceedings

  • Katsuya Ozoe, Hirotaka Hida, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi
    2015, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 28th Vol.2, 702 - 705, English
    [Refereed]
    International conference proceedings

  • F. Kurokawa, Y. Oochi, A. Sadanda, Y. Tsujiura, H. Hida, I. Kanno
    2015, 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 973 - 976, English
    [Refereed]
    International conference proceedings

  • Prem Pal, Miguel A. Gosalvez, Kazuo Sato, H. Hida, Yan Xing
    Dec. 2014, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 24(12) (12), 1 - 12, English
    [Refereed]
    Scientific journal

  • MEMS Applications in Agriculture
    H. Hida, H. Nishiyama, S. Sawa, M. Notaguchi, H. Arata, T. Higashiyama, I. Kanno
    Dec. 2014, Proc. of The International Conference on Small Science (ICSS 2014), English
    [Refereed][Invited]
    International conference proceedings

  • Power generation reliability of PZT thin films on stainless-steel cantilevers
    Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno
    Oct. 2014, Proc. of the 4th International Workshop on Piezoelectric MEMS, English
    [Refereed]
    International conference proceedings

  • HIGH-THROUGHPUT CHEMOTAXIS ASSAY OF PLANT-PARASITIC NEMATODE TOWARD GREEN AGRICULTURE
    H. Hida, M. Matsumura, I. Kanno, H. Nishiyama, S. Sawa, T. Higashiyama, H. Arata
    Oct. 2014, Proc. of 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences(MicroTAS 2014), 276 - 278, English
    [Refereed]
    International conference proceedings

  • Compositional dependence of (1-x)Ba(Zr0.2Ti0.8)O3-x(Ba0.7Ca0.3)TiO3 piezoelectric thin films prepared by combinatorial sputtering
    Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
    Oct. 2014, Proc. of the 4th International Workshop on Piezoelectric MEMS, English
    [Refereed]
    International conference proceedings

  • Kurokawa Fumiya, Tsujiura Yuichi, Hida Hirotaka, Kanno Isaku
    We evaluated the compositional dependence of Pb(Mg1/3,Nb2/3)O3–PbTiO3(PMN–PT) polycrystalline thin films by combinatorial sputtering. We prepared compositional gradient (1 − x)PMN–xPT polycrystalline thin films with preferential orientation along the 〈001〉 direction in the composition range of x = 0–0.62. We determined that the morphotropic phase boundary (MPB) composition of PMN–PT polycrystalline thin film existed at around x = 0.35, from the X-ray diffraction (XRD) measurements. The maximum value of relative dielectric constants (εr= 1498) was obtained at approximately x = 0.23. On the other hand, the piezoelectric coefficients (|e31,f| = 14.1 C/m2) peaked at the determined MPB composition of x = 0.35. From the results of the compositional dependence of dielectric and piezoelectric characteristics, the FOM ([Formula: see text]) of the PMN–PT (x = 0.35) thin film reached 21 GPa, which is much higher than that of the other polycrystalline piezoelectric thin films. These results suggest that PMN–PT (x = 0.35) thin film is a promising material for high-efficiency piezoelectric MEMS energy harvesters.
    Institute of Physics, Sep. 2014, Jpn. J. Appl. Phys., 53(9) (9), 09PA06, English

  • Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
    Sep. 2014, JAPANESE JOURNAL OF APPLIED PHYSICS, 53(9) (9), 1 - 9, English
    [Refereed]
    Scientific journal

  • Measurement of Transverse Piezoelectric Coefficient e31,f of Pb(Zr,Ti)O3 Thin Film with Stripe Electrodes
    Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno
    Aug. 2014, Proc. of the 10th Japan-Korea Conference on Ferroelectrics, English
    [Refereed]
    International conference proceedings

  • Fabrication of Multi-layered PZT Piezoelectric Thin Film
    Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida, Isaku Kanno
    Aug. 2014, Proc. of the 10th Japan-Korea Conference on Ferroelectrics, English
    [Refereed]
    International conference proceedings

  • Y. Tsujiura, E. Suwa, F. Kurokawa, H. Hida, I. Kanno
    2014, 14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014), 557(1) (1), English
    [Refereed]
    International conference proceedings

  • Hirotaka Hida, Katsuya Ozoe, Isaku Kanno, Tetsuya Higashiyama, Michitaka Notaguchi
    2014, 2014 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), English
    [Refereed]
    International conference proceedings

  • E. Suwa, Y. Tsujiura, F. Kurokawa, H. Hida, I. Kanno
    2014, 14TH INTERNATIONAL CONFERENCE ON MICRO AND NANOTECHNOLOGY FOR POWER GENERATION AND ENERGY CONVERSION APPLICATIONS (POWERMEMS 2014), 557(1) (1), English
    [Refereed]
    International conference proceedings

  • Takuya SAWADA, Osamu TERASHIMA, Yasuhiko SAKAI, Kouji NAGATA, Mitsuhiro SHIKIDA, HIDA HIROTAKA, Yasumasa ITO
    Nov. 2013, Proceedings of 8th International Symposium on Advanced Science and Technology in Experimental Mechanics, English
    [Refereed]
    International conference proceedings

  • T. A. Phan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano
    American Institute of Physics（AIP）, Oct. 2013, Applied Physics Letters, 103(18) (18), English
    [Refereed]
    Scientific journal

  • ON-CHIP CHEMOTAXIS ASSAY OF PLANT-PARASITIC NEMATODE TOWARDS INCREASING GLOBAL CROP PRODUCTIVITY
    HIDA HIROTAKA, Hidetaka Nishiyama, Shinichiro Sawa, Tetsuya Higashiyama, Hideyuki Arata
    Oct. 2013, Proceedings of The 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2013), 3, 1752 - 1754, English
    [Refereed]
    International conference proceedings

  • Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka Hida, Kazufumi Suenaga, Kenji Shibata, Isaku Kanno
    Sep. 2013, Japanese Journal of Applied Physics, 52(9) (9), 1 - 9, English
    [Refereed]
    Scientific journal

  • Hiroshi Tanaka, Hirotaka Hida, Kazuo Sato
    Springer-Verlag, Jul. 2013, Microsystem Technologies, 19(7) (7), 1065 - 1067, English
    [Refereed]
    Scientific journal

  • Tsujiura Yuichi, Suwa Eisaku, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku
    カンチレバーを機械要素とする圧電薄膜エナジーハーベスターの振動発電特性は，圧電特性だけでなく，共振周波数や振動Q値など素子の振動特性にも依存する．そこで，本研究ではエナジーハーベスターの発電性能と，素子形状及び基板材料との関係を明らかにすることを目的として，異なる金属材料を基板とするPZT薄膜エナジーハーベスターを作製し，振動発電評価を行った．
    The Japan Society for Precision Engineering, 2013, Proceedings of JSPE Semestrial Meeting, 2013, 505 - 506, Japanese

  • F. Kurokawa, R. Yokokawa, H. Kotera, F. Horikiri, K. Shibata, M. Sato, H. Hida, I. Kanno
    2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1051 - 1054, English
    [Refereed]
    International conference proceedings

  • Y. Tsujiura, E. Suwa, H. Hida, K. Suenaga, K. Shibata, I. Kanno
    2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 474 - 477, English
    [Refereed]
    International conference proceedings

  • P. A. Tuan, H. Oguchi, M. Hara, M. Shikida, H. Hida, T. Ando, K. Sato, H. Kuwano
    2013, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1040 - 1043, English
    [Refereed]
    International conference proceedings

  • Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka Hida, Isaku Kanno
    2013, 2013 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), English
    [Refereed]
    International conference proceedings

  • Kosuke Fujiwara, Hirotaka Hida, Isaku Kanno
    IEEE Computer Society, 2013, 2013 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2013, English
    [Refereed]
    International conference proceedings

  • Hirotaka Hida, Hidetaka Nishiyama, Shinichiro Sawa, Tetsuya Higashiyama, Hideyuki Arata
    2013, 2013 INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE (MHS), English
    [Refereed]
    International conference proceedings

  • Takuya Sawada, Osamu Terashima, Yasuhiko Sakai, Kouji Nagata, Mitsuhiro Shikida, Hirotaka Hida, Kazuhiro Onishi, Yasumasa Ito
    2013, ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), 7 B, English
    [Refereed]
    International conference proceedings

  • Masahiro Nakajima, Hirotaka Hida, Yajing Shen, Masaru Kojima, Kazuo Sato, Toshio Fukuda
    2012, Proceedings of the IEEE Conference on Nanotechnology, English
    [Refereed]
    International conference proceedings

  • Prem Pal, Kazuo Sato, Hirotaka Hida
    2012, 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation", 55 - 59, English
    [Refereed]
    International conference proceedings

  • M. A. Gosalvez, Prem Pal, N. Ferrando, H. Hida, K. Sato
    Dec. 2011, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 21(12) (12), English
    [Refereed]
    Scientific journal

  • Kayo Hamaguchi, Hirotaka Hida, Mitsuhiro Shikida, Kazuo Sato
    2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 358 - 361, English
    [Refereed]
    International conference proceedings

  • Prem Pal, K. Sato, M. A. Gosalvez, B. Tang, H. Hida, M. Shikida
    Jan. 2011, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 21(1) (1), English
    [Refereed]
    Scientific journal

  • B. Tang, M. Shikida, K. Sato, P. Pal, H. Amakawa, H. Hida, K. Fukuzawa
    Jun. 2010, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20(6) (6), English
    [Refereed]
    Scientific journal

  • Kazunori Shimizu, Hikaru Sasaki, Hirotaka Hida, Hideaki Fujita, Kei Obinata, Mitsuhiro Shikida, Eiji Nagamori
    Apr. 2010, BIOMEDICAL MICRODEVICES, 12(2) (2), 247 - 252, English
    Scientific journal

  • Jeong Il Lee, Hirotaka Hida, Mitsuhiro Shikida, Kazuo Sato
    2010, 2010 International Symposium on Micro-NanoMechatronics and Human Science: From Micro and Nano Scale Systems to Robotics and Mechatronics Systems, MHS 2010, Micro-Nano GCOE 2010, Bio-Manipulation 2010, 417 - 419, English
    [Refereed]
    International conference proceedings

  • DEVELOPMENT OF PEN-SHAPED PORTABLE BIOCHEMICAL REACTION SYSTEM BASED ON MAGNETIC BEADS HANDLING
    N. Inagaki, H. Hida, M. Shikida, M. Okochi, H. Honda, K. Sato
    2010, MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1091 - 1094, English
    [Refereed]
    International conference proceedings

  • Prem Pal, Kazuo Sato, Miguel A. Gosalvez, Yasuo Kimura, Ken-Ichi Ishibashi, Michio Niwano, Hirotaka Hida, Bin Tang, Shintaro Itoh
    Dec. 2009, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 18(6) (6), 1345 - 1356, English
    Scientific journal

  • Hirotaka Hida, Mitsuhiro Shikida, Kenji Fukuzawa, Shirou Murakami, Kenji Sato, Kazuo Asaumi, Yasuroh Iriye, Kazuo Sato
    May 2009, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4(3) (3), 378 - 385, English
    [Refereed]
    Scientific journal

  • Bin Tang, Miguel A. Gosalvez, Prem Pal, Shintaro Itoh, Hirotaka Hida, Mitsuhiro Shikida, Kazuo Sato
    2009, 20th Anniversary MHS 2009 and Micro-Nano Global COE - 2009 International Symposium on Micro-NanoMechatronics and Human Science, 48 - 52, English
    [Refereed]
    International conference proceedings

  • H. Hida, N. Inagaki, M. Koyama, M. Shikida, K. Sato
    2009, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 386 - 389, English
    [Refereed]
    International conference proceedings

  • P. Pal, K. Sato, H. Hida, M. A. Gosalvez, Y. Kimura, K. Ishibashi, M. Niwano
    2009, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 751 - 754, English
    [Refereed]
    International conference proceedings

  • INTEGRATION OF SKELETAL MUSCLE CELL ONTO SI-MEMS AND ITS GENERATIVE FORCE MEASUREMENT
    K. Shimizu, H. Sasaki, H. Hida, H. Fujita, K. Obinata, M. Shikida, E. Nagamori
    2009, IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 403 - 406, English
    [Refereed]
    International conference proceedings

  • H. Hida, M. Shikida, K. Fukuzawa, S. Murakami, Ke. Sato, K. Asaumi, Y. Iriye, Ka. Sato
    Nov. 2008, SENSORS AND ACTUATORS A-PHYSICAL, 148(1) (1), 311 - 318, English
    Scientific journal

  • H. Hida, M. Shikida, K. Fukuzawa, A. Ono, K. Sato, K. Asaumi, Y. Iriye, T. Muramatsu, Y. Horikawa, K. Sato
    2007, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 4(3) (3), 378 - 385, English
    International conference proceedings

  • Quartz tuning-fork type AFM probe operated in anti-phase vibration mode
    H. Hida, M. Shikida, K. Fukuzawa, A. Ono, K. Sato, K. Asaumi, Y. Iriye, K. Sato
    2006, 2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE, 355 - +, English
    [Refereed]
    International conference proceedings

  • Proposal of new type of micro-machined quartz tuning fork AFM probe
    H Hida, M Shikida, K Fukuzawa, A Ono, O Sato, K Asaumi, Y Iriye, D Cheng, K Sato
    2005, MEMS 2005 MIAMI: TECHNICAL DIGEST, 323 - 326, English
    [Refereed]
    International conference proceedings

  • Fabrication and characterization of AFM probe with crystal-quartz tuning fork structure
    H Hida, M Shikida, K Fukuzawa, A Ono, K Sato, K Asaumi, Y Iriye, D Cheng, K Sato
    2005, Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, 97 - 101, English
    [Refereed]
    International conference proceedings

■ MISC
  • 酵母の個体差の解析を目的とした空圧バルブ付きマイクロ流体デバイスの開発
    藤原稜平, KAHAR Prihardi, 荻野千秋, 神野伊策, 肥田博隆
    2023, 化学とマイクロ・ナノシステム学会研究会講演要旨集(CD-ROM), 48th

  • マイクロデバイス上で植物を理解する—Plant on a chip : MEMS applications in botany—特集 農業用センサーの開発と利用
    肥田 博隆
    東京 : 北隆館, Mar. 2022, アグリバイオ = Agricultural biotechnology, 6(3) (3), 224 - 228, Japanese

  • 酵母の個別解析のためのバルブ付きマイクロ流体デバイスの開発
    矢郷望, KAHAR Prihardi, 荻野千秋, 神野伊策, 肥田博隆
    2022, 化学とマイクロ・ナノシステム学会研究会講演要旨集(CD-ROM), 46th

  • 王 韵書, 林 駿平, 三輪 京子, 肥田 博隆, 藤原 徹
    一般社団法人 日本土壌肥料学会, 03 Sep. 2021, 日本土壌肥料学会講演要旨集, 67, 60 - 60, Japanese

  • YOSHIDA Junnosuke, BACH Patrick, KANNO Isaku, HIDA Hirotaka
    In this study, we designed, fabricated and evaluated a piezoelectric thin-film loudspeaker. To enhance the acoustic output in the low frequency range, the device design was optimized by finite element analysis. The prototype speaker was fabricated using the piezoelectric PZT thin film deposited on a stainless steel substrate using RF magnetron sputtering. The vibration displacement and output sound pressure of the completed device were measured as a function of frequency. The measured SPL increased in proportion to the frequency below the resonance. Above the resonance frequency, the SPL was constant independent of frequency. It achieved a sound pressure level of 65 dB at the resonance frequency of 726 Hz. SPL was calculated from the displacement and we confirmed that the calculated results of the frequency response of SPL were in good agreement with the measurement results.
    The Japan Society of Mechanical Engineers, 2021, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2021, IIP1A3-1, Japanese

  • 林 駿平, 三輪 京子 京子, 肥田 博隆, 藤原 徹
    一般社団法人 日本土壌肥料学会, 01 Sep. 2020, 日本土壌肥料学会講演要旨集, 66, 49 - 49, Japanese

  • 20335 植物の根の力学特性と成長に関する基礎的研究 その1：マイクロピラーを用いたシロイヌナズナの根の力学特性推定法の開発
    藤原 徹, バイヤー マルセル, 肥田 博隆
    日本建築学会, Sep. 2020, 構造I, (2020) (2020), 681 - 684, Japanese

  • Ueda Kazuki, Hida Hirotaka, Kanno Isaku
    The Japan Society of Applied Physics, 26 Aug. 2020, JSAP Annual Meetings Extended Abstracts, 2020.2, 878 - 878, Japanese

  • Flexible PZT thin-film energy harvesters for wearable applications
    原田燎, 梅垣俊仁, 肥田博隆, 神野伊策
    2020, 日本機械学会年次大会講演論文集(CD-ROM), 2020

  • HARADA Ryo, UMEGAKI Toshihito, HIDA Hirotaka, KANNO Isaku
    Interest in energy harvesters has grown rapidly over the last decade. In this study, we fabricate and evaluate piezoelectric energy harvesters (PEH) fabricated from Pb(ZrTi)O3 (PZT) thin films on stainless steel foils. The PZT thin films were deposited onto (Pb,La)TiO3/Pt/Ti-coated stainless steel substrate by RF-magnetron sputtering. Parallel and series connection of eachPEH enabled the output power increase as high as turning on a LED.
    The Japan Society of Mechanical Engineers, 2020, The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP, 2020, 2A06, Japanese

  • Methods for Analyzing Grope Behavior of Plant-parasitic Nematodes Using Microchamber Device
    肥田博隆, 森仁志, 神野伊策, 古水千尋, 澤進一郎
    2020, 化学とマイクロ・ナノシステム, 19(1) (1)

  • Method for analyzing the effect of mechanical stress on infection process of plant-parasitic nematodes
    肥田博隆, 江原りか, 神野伊策, 古水千尋, 澤進一郎
    2020, 電気学会研究会資料, (BMS-20-017-029) (BMS-20-017-029)

  • Plant-on-a-chip：植物はチップに「根差す」か？
    肥田 博隆
    Oct. 2019, 化学とマイクロ・ナノシステム学会誌, 18(2) (2), 20 - 20, Japanese
    [Invited]
    Introduction scientific journal

  • Tsuji Yuta, Sanghyo Kweon, Hida Hirotaka, Kanno Isaku
    In this study, we fabricated the piezoelectric microelectromechanical systems (MEMS) speakers with Pb(Zr,Ti)O3 (PZT) thin films. In order to improve the performance of piezoelectric speakers, we fabricated the 2 mm square MEMS speaker with a diaphragm structure of PZT/Si and photosensitive polyimide. The optimal structure was investigated by finite element method (FEM) simulation. The 2 μm thick PZT thin films were deposited on SOI wafers by radio frequency (RF) magnetron sputtering, and microfabricated into unimorph diaphragm. We measured the vibration amplitude of the piezoelectric MEMS speakers as a function of frequency. We confirmed that the resonance frequency was 25.6 kHz that is out of audible range. In addition, the speaker could generate large sound pressure level (SPL) of 82 dB at 6 Vpp.
    The Japan Society of Mechanical Engineers, 2019, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019.10, 19pm5PN312, Japanese

  • Tani Kazuki, SangHyo Kweon, Hida Hirotaka, Kanno Isaku
    In this research, we designed, fabricated and evaluated a PZT thin-film piezoelectric MEMS transformer. First, the disk-shaped device with the ring-dot structure was designed using Finite Element Method (FEM) analysis. At this time, since the piezoelectric transformer is driven in resonance, we confirmed resonance frequency and vibration mode of the transformer. Next, a PZT thin film was deposited on a silicon on insulator (SOI) substrate using RF magnetron sputtering method, and then microfabricated into a piezoelectric transformer. Finally, we measured the impedance and transformation properties of the piezoelectric MEMS transformer. The resonance frequency was observed at 4.57 MHz, and the transformation ratio was found to be about 0.3.
    The Japan Society of Mechanical Engineers, 2019, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2019.10, 19pm5PN318, Japanese

  • マイクロチャンバーを用いた植物寄生性線虫の集団行動の分析
    肥田博隆, 森仁志, 神野伊策, 古水千尋, 澤進一郎
    2019, 化学とマイクロ・ナノシステム学会研究会講演要旨集, 40th

  • 機械的ストレス下における植物の根系発達過程の解析手法—Analytical method for developmental process of growing root systems under mechanical stress
    肥田 博隆, 西脇 大維, 神野 伊策, 野田口 理孝
    [東京] : Institute of Electrical Engineers of Japan, 2018, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 35, 4p, Japanese

  • Hamamura Tomohiro, Hida Hirotaka, kanno isaku
    The Japan Society of Applied Physics, 01 Mar. 2017, JSAP Annual Meetings Extended Abstracts, 2017.1, 1271 - 1271, Japanese

  • シューズ埋め込み型圧電振動発電素子の作製・評価
    西崇仁, 伊藤喬, 梅垣俊仁, 肥田博隆, 神野伊策
    2017, 日本機械学会年次大会講演論文集(CD-ROM), 2017

  • Pb(Zr,Ti)O3圧電薄膜の電気的信頼性評価に関する研究
    金光勇弥, TAN Goon, 梅垣俊仁, 肥田博隆, 神野伊策
    2017, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 78th

  • Aoki Takashi, Hida Hirotaka, Kanno Isaku, Maturana Andres
    This paper presents a novel microfluidic device for high throughput ion-channel analysis. To analyze the electrophysiological properties of cells efficiently, we designed the electrically independent microchannels on the microfluidic device. The microfluidic device is composed of a silicon-on-insulator (SOI) layer having the trap holes with 9 or 12 μm diameter, poly-dimethylsiloxane (PDMS) microchannel chips and glass substrate with Pt electrodes. We successfully trapped the multiple cells on one device without damage by applying negative pressure to the microchannels with a syringe pump. Finally, we confirmed that the each trap hole was strongly sealed with the cell by measuring the electrical impedance, which was more than 1 GΩ, namely gigaseal.
    The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017.8, PN-27, Japanese

  • Fukumoto Naoki, Hida Hirotaka, Kanno Isaku
    In this study, we fabricated the microelectromechanical systems (MEMS) microphones composed of piezoelectric Pb(Zr,Ti)O3 (PZT) thin-film bimorphs. To improve the sensitivity of the piezoelectric MEMS microphone, we designed the PZT bimorph cantilevers by using a finite element method (FEM) simulation. The dimensions of the PZT bimorphs are 1000 μm in width and 280 μm in length. The two layers of 1-μm-thick PZT thin films were deposited on Si substrates by radio frequency (RF) magnetron sputtering and formed into the cantilevers by dry etching. To evaluate the frequency responses, we measured the vibration amplitude of the PZT bimorphs oscillated by applying the negative AC voltage. The piezoelectric microphone was demonstrated by detecting the output signal owing to the direct piezoelectric effect when the sound pressure was applied. We confirmed that the output signal of the piezoelectric microphone was proportionally increased by increasing the applied sound pressure.
    The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017.8, PN-97, Japanese

  • NISHIMURA Nozomu, HIDA Hirotaka, KANNO Isaku
    Recently, development of insect scale robots has been attracting attention. These robots are expected to be used for inspection or sensing in narrow and danger places where human cannot enter. In this study, we fabricated and evaluated piezoelectric thin film actuators intended for flapping wing insect scale robot. We firstly report a FEM analysis results of piezoelectric PZT thin-film actuators. To verify this analysis results, we deposited PZT thin films on micro-fabricated stainless steel substrates and evaluated their crystal structure, electrical properties, and piezoelectric properties of PZT thin films. X-ray diffraction measurements reveal that the PZT thin films have a polycrystalline perovskite structure. The relative dielectric constant of the PZT thin films was 240. FEM analysis results are in good agreement with the resonant frequency. The angular displacement are less than 1° in all measurement points driven by resonant frequency (5Vpp, 2.095 and 2.257 kHz).
    The Japan Society of Mechanical Engineers, 2017, The Proceedings of Mechanical Engineering Congress, Japan, 2017, G1600102, Japanese

  • Hida Hirotaka, Kanno Isaku
    We fabricated a new diaphragm micropump composed of the piezoelectric Pb(Zr,Ti)O3 (PZT) thin films on the stainless-steel (SS) foil substrates to reduce the driving voltage. To miniaturize and simplify the micropump structure, the diaphragm and microchannel with diffusers were monolithically formed on the 30-μm-thick SS substrates by photolithography and wet etching. We directly deposited the 1-μm-thick PZT thin films on the SS diaphragm by dip coating with a sol-gel solution. To evaluate the driving characteristics of the fabricated micropump, the SS diaphragm was actuated by applying AC voltage to the PZT thin films. The displacement of the 9-μm-thick SS diaphragm was 1.7 μm with 10 Vpp-driving voltage at 1 Hz.
    The Japan Society of Mechanical Engineers, 2017, The Proceedings of the Symposium on Micro-Nano Science and Technology, 2017.8, PN-8, Japanese

  • Pb(Zr,Ti)O3圧電薄膜の逆圧電効果による結晶構造変化のその場観察
    TAN Goon, 丸山和樹, 金光勇弥, 西岡慎太郎, 小金澤智之, 梅垣俊仁, 肥田博隆, 神野伊策
    2017, 応用物理学会秋季学術講演会講演予稿集(CD-ROM), 78th

  • Oochi Yuhei, Hida Hirotaka, Kanno Isaku
    The Japan Society of Applied Physics, 01 Sep. 2016, JSAP Annual Meetings Extended Abstracts, 2016.2, 1236 - 1236, Japanese

  • HIDA Hirotaka, FUJIWARA Kosuke, KANNO Isaku
    In this study, we fabricated a microelectromechanical systems (MEMS) cylindrical gyroscope integrated with piezoelectric thin-film for sensing/driving elements. The cylindrical gyroscope has several advantages: (1) the sensitivity can be improved due to the high Q-factor. (2) we can eliminate an initial output signal from the sensing electrodes. We characterized the resonant characteristics of the cylindrical gyroscope in wine-glass mode and the Q-factor was 723 at 36.13 kHz under atmospheric pressure. In addition, we experimentally confirmed that the mechanical vibration of the gyroscope can be measured by detecting the electrical signal due to the piezoelectric effect of Pb(Zr,Ti)O3 (PZT).
    The Japan Society of Mechanical Engineers, 2016, The Proceedings of Mechanical Engineering Congress, Japan, 2016, J2230103, Japanese

  • 30pm1-E-4 Fabrication and Characterization of Insect-scale Piezoelectric Thin-film Robots
    Iwasaki Takumi, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku
    This paper describes the fabrication and characterization on insect-scale piezoelectric thin-film robots. Recently, many insect-scale robots are being developed for medical and engineering field. However, they need a power source and are expensive due to complex structures. In this study, we fabricated an insect-scale robot driven at low voltage and characterized them. We deposited PZT thin films on cantilever-shaped stainless steel (SUS304) substrates, and assembled them into a three-leg insect-scale robot. From experimental results, a robot with no load moved at 2.25 mm/s by applying 13 V_ unipolar square-wave voltage at 190 Hz. In contrast, a robot with 72.8 mg mass moved at 3.03 mm/s by applying 20 V_ voltage at 156 Hz. We successfully realized an insect-scale piezoelectric thin-film robot driven at low voltage.
    The Japan Society of Mechanical Engineers, 21 Oct. 2015, マイクロ・ナノ工学シンポジウム, 2015(7) (7), "30pm1 - E-4-1"-"30pm1-E-4-2", Japanese

  • 2A2-R08 Development of soft actuators using transferred piezoelectric thin films
    HIDA Hirotaka, SAKURAI Akira, TSUJIURA Yuichi, KUROKAWA Fumiya, KANNO Isaku
    We developed novel soft actuators using piezoelectric thin films. To realize low-cost fabrication method, we also developed a new transfer technique of piezoelectric thin films, which was deposited on temporary stainless steel substrate, to PDMS substrate by using wet etching process. By characterizing crystal structure and driving performance as actuators, we experimentally clarified that transferred Pb(Zr,Ti)O_3 (PZT) thin films have piezoelectric properties. This method might allow us to develop novel MEMS (micro-electro-mechanical systems) devices such as artificial muscle at low-cost fabrication in future.
    The Japan Society of Mechanical Engineers, 17 May 2015, ロボティクス・メカトロニクス講演会講演概要集, 2015, "2A2 - R08(1)"-"2A2-R08(2)", Japanese

  • Prem Pal, Miguel A. Gosalvez, Kazuo Sato, H. Hida, Yan Xing
    Apr. 2015, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 25(4) (4), English
    Others

  • スパッタ法を用いたLi4Ti5O12薄膜の作製とその評価
    岡本一真, 黒川文弥, 肥田博隆, 神野伊策, 水畑穣
    2015, セラミックス基礎科学討論会講演要旨集, 53rd

  • 22am2-E3 Reliability of metal-based PZT thin-film energy harvesters
    Tsujiura Yuichi, Kurokawa Fumiya, Suwa Eisaku, Hida Hirotaka, Kanno Isaku
    This paper describes the reliability of vibration energy harvesters of metal-based Pb(Zr,Ti)O_3 (PZT) thin films. Metal foil cantilevers have attracted attention to improve the lifetime of vibration energy harvesters because of their strong fracture strength. However, the long-term reliability of vibration energy harvesters has not been investigated intensively. In this study, we fabricated the PZT thin-film vibration energy harvesters based on metal foil cantilevers (length: 10 mm, width: 2.5 mm, thickness: 30 μm) and measured their output power for one thousand minutes. From the experimental results, we confirmed that the vibration energy harvester showed quite low degradation of approximately 0.31% by every decade on a logarithmic time scale at the acceleration of 1 m/s^2. On the other hand, we could not demonstrate the precise relationship between the output power and excitation acceleration because of the variation in measured data.
    The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "22am2 - E3-1"-"22am2-E3-2", Japanese

  • 22am2-E1 Fabrication and evaluation of self-excited vibration energy harvesters of PZT thin films using air flow
    Suwa Eisaku, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku
    We fabricated self-excited vibration energy harvesters of Pb(Zr, Ti)O_3 (PZT) thin films using air flow. To generate a large self-excited vibration, we use 30-μm-thickness stainless steel (SS304) foils as base substrates of PZT thin films. The PZT thin films were deposited directly by rf-magnetron sputtering. To compensate the initial bending of PZT/SS304 substrates due to the thermal stress, we deposited the counter PZT thin films on the backside of SS304 substrates. When the angle of attack was 30°, the energy harvester generated the self-excited vibration above the wind speed of 8 m/s, and the output power reached 19 μW at the wind speed of 12 m/s.
    The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "22am2 - E1-1"-"22am2-E1-2", Japanese

  • 20pm1-E3 Fabrication of millimeter-scale robot with piezoelectric thin film actuator on metal substrate
    Morita Yuki, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku
    We fabricated the millimeter-scale robot by metal-based PZT thin-film actuator. PZT thin films were directly deposited on 50-μm-thick Ti substrates by rf-magnetron sputtering. Piezoelectric actuators have simple structure and drive by low voltage. Therefore, in recent year, the robot using piezoelectric materials have been studied. However, piezoelectric actuators cannot generate a large displacement. In this study, we fabricated the millimeter-scale robot(7.5×2.5 cm^2) actuated using resonance since the largest displacement can be generated at the resonance. The movement of the robot depends on the angle between front and rear legs θ and the frequency f of the applied voltage. Under the condition of θ = 123° and f = 10.6 kHz, the robot moved forward at a speed of 6.74 cm/s. On the other hand, under the condition of θ = 123° and f = 5.4 kHz, the robot moved backward at a speed of 1.21 cm/s.
    The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - E3-1"-"20pm1-E3-2", Japanese

  • 21am2-A8 Transfer process of piezoelectric thin films onto PDMS substrate by using wet etching
    Hida Hirotaka, Yagami Shun, Suwa Eisaku, Kurokawa Fumiya, Tsujiura Yuichi, Kanno Isaku
    This paper reports a simple and high-productive fabrication method of flexible piezoelectric substrate. To realize low-cost fabrication method, we developed a novel transfer technique of piezoelectric thin films onto PDMS substrate based on metal wet etching process. We experimentally clarified that transferred Pb(Zr,Ti)O3 (PZT) thin films by using our developed method have piezoelectric property. This method might allow us to develop novel MEMS (micro-electro-mechanical systems) devices such as wearable sensors and flexible energy harvesters at low-cost fabrication.
    The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "21am2 - A8-1"-"21am2-A8-2", Japanese

  • 20pm1-E2 Evaluation of transverse piezoelectric coefficient e_<31,f> of PZT thin films from direct/inverse piezoelectric effects
    Kawabe Saneyuki, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku
    We evaluated the transverse piezoelectric coefficient e_<31,f> of Pb(Zr,Ti)O_3 (PZT) thin films from direct and inverse piezoelectric effects using cantilever methods. The PZT/Si unimorph cantilevers (length: 17.8 mm, width: 2.0 mm, thickness: 628 μm) were fabricated by depositing the PZT thin films and the stripe-shaped Pt top electrodes on Pt/Ti/Si substrates by rf-magnetron sputtering. From the e_<31,f> measurement, we confirmed that e_<31,f> largely depended on frequency in both direct and inverse effects. In cases where evaluated from direct piezoelectric effect, e_<31,f> was independent of position and size of electrode and input displacement, and calculated to be -6 C/m^2 above 20 Hz. On the other hand, e_<31,f> evaluated from inverse piezoelectric effect increased with applied voltage, and calculated to be as high as -12 C/m^2 below 500 Hz.
    The Japan Society of Mechanical Engineers, 20 Oct. 2014, マイクロ・ナノ工学シンポジウム, 2014(6) (6), "20pm1 - E2-1"-"20pm1-E2-2", Japanese

  • 植物寄生性センチュウのハイスループット化学走性分析用デバイス
    肥田博隆, 松村匡隆, 神野伊策, 西山英孝, 澤進一郎, 東山哲也, 新田英之
    22 May 2014, 化学とマイクロ・ナノシステム学会研究会講演要旨集, 29th, 53, Japanese

  • Hida Hirotaka, Yagami Shun, Kanno Isaku
    The Japan Society of Applied Physics, 03 Mar. 2014, JSAP Annual Meetings Extended Abstracts, 2014.1, 141 - 141, Japanese

  • スパッタ法を用いたLi4Ti5O12薄膜の作製とその評価
    岡本一真, 黒川文弥, 肥田博隆, 神野伊策, 水畑穣
    2014, 応用物理学会春季学術講演会講演予稿集(CD-ROM), 61st

  • O. Terashima, T. Sawada, Y. Sakai, K. Nagata, H. Hida, M. Shikida
    To establish a technique to measure the wall shear stress with high accuracy, along with the spatial and temporal resolutions, micro-scale sensors are fabricated and their responses to the wall shear stress are investigated. In this study, two types of micro-scale sensors are fabricated: a hot-film (HF)-type sensor and a floating-element (FE)-type sensor. First, the HF sensor is calibrated using a rotating cylinder. The calibration results show that the heating power of a constant temperature circuit (CTC) increases with the wall shear stress. The relationship between the square of the heating power of CTC (E12) and the wall shear stress to the 1/3 power (τw1/3) becomes linear in the range τw1/3 > 0.35 Pa1/3 as theoretically predicted. Second, the calibration of the FE sensor is performed using the Stokes layer excitation method. The calibration results show that the output voltage of the C-V conversion circuit connected to the FE sensor E2 is almost proportional to the wall shear stress τw as expected in the range τw > 2.5 × 10-4 Pa for 100 Hz stokes layer excitation and τw > 5.0 × 10-4 Pa for that of 200 Hz.
    The Japanese Society for Experimental Mechanics, Dec. 2013, Journal of the Japanese Society for Experimental Mechanics, 13(Special Issue) (Special Issue), S1-S6 - s6, English
    [Refereed]
    Report scientific journal

  • 6AM2-A-8 PZT multilayer thin films actuator fabricated by sputtering
    Kishimoto Masaya, Tsujiura Yuichi, Kurokawa Fumiya, Hida Hirotaka, Kanno Isaku
    We fabricated multilayer ceramic actuator (MLCA) composed of piezoelectric layers with SrRuO_3 (SRO) internal electrodes by single sputtering deposition. We deposited approximately 500-nm-thick Pb(Zr,Ti)O_3 (PZT) layers on SiO_2/Si substrates through a movable shadow mask. The separated internal SRO electrodes are prepared by sliding the shadow mask and multilayered PZT thin films are deposited on a Si substrate with external electrodes on both sides of the PZT films. The PZT layers of MLCA have perovskite structure. The MLCA with five PZT layers have high-dielectric properties; a relative electric coefficient of approximately 1100 regardless of the number of PZT layers. The piezoelectric displacement of Si cantilever with MLCA increased with the number of PZT layers.
    The Japan Society of Mechanical Engineers, 04 Nov. 2013, マイクロ・ナノ工学シンポジウム, 2013(5) (5), 107 - 108, Japanese

  • 5PM1-C-6 MicroChannel device for behavior analysis of plant-parasitic nematode : verification of channel standard and concentration distribution in channel
    Hida Hirotaka, Nishiyama Hidetaka, Sawa Shinichiro, Kanno Isaku, Higashiyama Tetsuya, Arata Hideyuki
    We present a novel method for chemotaxis assay of plant-parasitic nematode, Meloidogyne incognita by using a PDMS (polydimethylsiloxane) microchannel device. For allowing the nematodes to swim in a simple microchannel, we also developed a protocol by loading an agarose gel into microchannel with power-free pumping method. A 5-μm-wide microchannel array, which is narrower than the body width of the nematodes, can efficiently confine the nematodes in analyzed area. We numerically evaluated the chemical concentration distribution in developed microchannel and successfully related the time-dependent chemical condition to the behavior of nematodes.
    一般社団法人日本機械学会, 04 Nov. 2013, マイクロ・ナノ工学シンポジウム, 2013(5) (5), 35 - 36, Japanese

  • J212011 Compositional dependence of PMN-PT thin films prepared by combinatorial sputtering
    KUROKAWA F, TSUJIURA Y, TOMIOKA K, HIDA H, KANNO I
    In this study, we deposited Pb(Mg_<1/3>Nb_<2/3>)03-PbTi03 (PMN-PT) thin films on PbTiO_3/Pt/Ti/Si substrates by combinatorial sputtering to optimize the composition ratio of PMN-PT thin films. Compositional gradient PMN-PT thin films were deposited by multi target co-sputtering, namely combinatorial sputtering, and pyrocholre-free PMN-PT thin films with rondom orientation were prepared on PbTiO_3/Pt/Ti/Si substrates. PT compositional ratio is ranging from 0.25 to 0.57, which coverd MPB composition of bulk PMN-PT ceramics (PT = 0.33). We confirmed that relative dielectric constants increase with decreasing PT ratio in PMN-PT films. On the other hand, the PMN-PT thin films showed the maximum piezoelectric coefficients|e_<31,f>| = 7〜8 C/m^2 around PMN-0.45PT, which is shifted from MPB composition of PMN-PT bulk ceramics.
    The Japan Society of Mechanical Engineers, 08 Sep. 2013, Mechanical Engineering Congress, Japan, 2013, "J212011 - 1"-"J212011-4", Japanese

  • J161013 Piezoelectric thin-film MEMS energy harvesters of stainless steel cantilevers
    TSUJIURA Yuichi, SUWA Eisaku, KUROKAWA Fumiya, HIDA Hirotaka, KANNO Isaku
    We developed piezoelectric thin-film MEMS energy harvesters using stainless steel (SUS430) cantilevers to improve fracture toughness as well as to lower the resonant frequency. The large fracture toughness of SUS430 cantilevers overcomes the breakdown of the cantilevers and ensures the long lifetime of the energy harvesters. To simplify the fabrication process, the piezoelectric Pb(Zr,Ti)O_3 (PZT) thin film was directly deposited on the microfabricated SUS430 cantilevers with a 30-μm-thick beam and a tip mass by rf-magnetron sputtering. The X-ray diffraction (XRD) measurement revealed that the PZT thin film has perovskite structure with random orientations. The relative dielectric constant ε_r and the transverse piezoelectric coefficient е_<31,f> were respectively evaluated to be 325 and -4.0 C/m^2, which indicates the figure of merit (FOM) of 0.049. From the evaluation of power generation performance for the PZT thin-film energy harvester (beam length: 5.5 mm, width: 5.0 mm, mass length: 2.0 mm), its maximum output power was 6.8 μW (power density: 1.7 μW/mm^3) under conditions of 367 Hz and 10 m/s^2.
    The Japan Society of Mechanical Engineers, 08 Sep. 2013, Mechanical Engineering Congress, Japan, 2013, "J161013 - 1"-"J161013-5", Japanese

  • Fe‐B‐Nd‐Nb金属ガラス薄膜の破壊靭性評価
    TUAN P.A, 大口裕之, 原基揚, 式田光宏, 肥田博隆, 安藤妙子, 佐藤一雄, 桑野博喜
    07 Sep. 2013, 日本機械学会年次大会講演論文集(CD-ROM), 2013, ROMBUNNO.J211023, Japanese

  • On the Measurement of Wall Shear Stress with a Micro-Fabricated Hot-Film Sensor
    T. Sawada, O. Terashima, Y. Sakai, K. Nagata, M. Shikida, H. Hida, K. Onishi, Y. Ito
    The 4th International Conference on Jets, Wakes and Separated Flows (The 4th ICJWSF)
    September 17-21, 2013, Nagoya Univ.
    Sep. 2013, Proc. of the 4th International Conference on Jets, Wakes and Separated Flows (The 4th ICJWSF), CD-ROM, ICJWSF2013-1015 (4pages), English
    [Refereed]
    Summary national conference

  • 植物寄生性センチュウの化学走性分析用マイクロ流路デバイス
    肥田博隆, 西山英孝, 澤進一郎, 東山哲也, 新田英之
    23 May 2013, 化学とマイクロ・ナノシステム学会研究会講演要旨集, 27th, 41, Japanese

  • SAWADA Takuya, TERASHIMA Osamu, SAKAI Yasuhiko, NAGATA Koji, HIDA Hirotaka, SHIKIDA Mitsuhiro
    The technique for measuring the wall shear stress accurately is developed with two types of micro-scale sensor fabricated with MEMS technique. One of the sensors is a thermal type sensor which is based on the quantity of heat diffusion from thin hot film (hereafter called "HF sensor"). The other is a floating type sensor which is based on the electric capacity variety by displacement of the floating element (hereafter called "FE sensor"). To calibrate these sensors, two types of calibration instruments are manufactured. One is an instrument which generates the flow by rotating the cylinder above the flat plate (hereafter called "Cylinder instrument"). Another is an instrument which generates the wall shear stress by Stokes Layer using plane acoustic wave is used (hereafter called "Stokes Layer instrument"). The result of HF sensor calibration shows that the sensor output increases with wall shear stress. Moreover, the square of the sensor output voltage is proportional to 1/3 power of wall shear stress on the hot film, which is consistent with the heat transfer theory. The preliminary experiment results of FE sensor indicates that sensor output voltage seems to increase with the wall shear stress.
    The Japan Society of Mechanical Engineers, 2012, The Proceedings of Mechanical Engineering Congress, Japan, 2012(0) (0), _S053073 - 1-_S053073-5, Japanese

  • 肥田 博隆
    一般社団法人 電気学会, 2010, 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）, 130(11) (11), 552 - 552, Japanese

  • 桑野 博喜, 古賀 章浩, 橋口 原, 岡田 亮二, 矢吹 聡一, 兵頭 健生, 式田 光宏, 肥田 博隆, 今本 浩史, 宮島 博志, 川原 伸章
    一般社団法人 日本機械学会, 2010, 年次大会講演資料集, 2010, 251 - 252, Japanese

  • 305 Measurement of active tension generated by cultured skeletal muscle cells by using Bio-MEMS device with micro-cantilever
    SHIMIZU Kazunori, SASAKI Hikaru, HIDA Hirotaka, FUJITA Hideyuki, OBINATA Kei, SHIKIDA Mitsuhiro, NAGAMORI Eiji
    培養により得られた骨格筋細胞の運動性能を詳細に評価するためのデバイス構築を目的とし、マイクロレバー型MEMSを作製した。温度応答性ポリマーPNIPAAmを利用して、マイクロレバー上に骨格筋細胞を橋架け状態に培養する技術を開発した。電気パルス刺激により骨格筋細胞は制御された運動を行い、この出力によってマイクロレバーの先端は変位した。この変位量を顕微鏡から得られた画像を用いて計測し、筋細胞が発した張力を測定した。今回培養した骨格筋細胞1本から得られた最大張力は約1μNであると推定された。
    The Japan Society of Mechanical Engineers, 22 Jan. 2009, バイオエンジニアリング講演会講演論文集, 2008(21) (21), 101 - 102, Japanese

  • H. Hida, M. Shikida, M. Okochi, H. Honda, K. Sato
    2009, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 912 - 915, English

  • Self-vibration and -detection AFM probe by using quartz tuning fork
    HIDA Hirotaka, SHIKIDA Mitsuhiro, FUKUZAWA Kenji, SATO Kenji, ONO Atsushi, ASAUMI Kazuo, IRIYE Yasuroh, SATO Kazuo
    03 Jul. 2007, 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2007(1) (1), 25 - 28, Japanese

  • Design and Fabrication of Non-contact AFM Probe utilizing the Crystal-Quartz Tuning Fork
    HIDA Hirotaka, SHIKIDA Mitsuhiro, FUKUZAWA Kenji, SATO Kenji, ONO Atsushi, ASAUMI Kazuo, IRIYE Yasuroh, CHENG Di, SATO Kazuo
    22 Jun. 2005, 電気学会研究会資料. MSS, マイクロマシン・センサシステム研究会, 2005(21) (21), 35 - 39, Japanese

■ Lectures, oral presentations, etc.
  • On-chip method for characterizing mechanical properties of growing root during bending motion
    Jing Li, Akira Kimura, Isaku Kanno, Hirotaka Hida
    日本機械学会 情報・知能・精密機器部門講演会 (IIP2025), Japanese

  • イネの根の栄養屈性解析用デバイスにおける濃度勾配の広範囲化
    吉長 浩康, 神野 伊策, 肥田 博隆
    化学とマイクロ・ナノシステム学会第50回研究会, Japanese
    Poster presentation

  • 機械ストレスが根の硬さに与える影響のオンチップ解析
    中井 愛乃, 神野 伊策, 肥田 博隆
    化学とマイクロ・ナノシステム学会第50回研究会, Japanese
    Poster presentation

  • 障害物に対する根の成長挙動のオンチップ解析手法
    肥田博隆, 中井愛乃, 李鯨, 神野伊策, 郷達明, 中島敬二
    第15回マイクロ・ナノ工学シンポジウム, Japanese
    Poster presentation

  • On-chip Analytical Method for Investigating Protrusive Forces in Growing Plant Roots
    J. Li, M. Notaguchi, I. Kanno, H. Hida
    The 11th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT2024), Jun. 2024, English
    Poster presentation

  • 重力屈性過程における根の力学的挙動の解析手法
    木村 陽, 李 鯨, 神野 伊策, 肥田 博隆
    化学とマイクロ・ナノシステム学会第49回研究会, Jun. 2024, Japanese

  • 酵母の個別解析のためのバルブ付きマイクロ流体デバイスの開発
    矢郷望, Prihardi Kahar, 荻野千秋, 神野伊策, 肥田博隆
    化学とマイクロ・ナノシステム学会 第46回研究会, Nov. 2022, Japanese
    Poster presentation

  • 機械的抵抗下での根の伸長挙動のオンチップ解析手法
    堀江智貴, 神野伊策, 肥田博隆
    化学とマイクロ・ナノシステム学会 第46回研究会, Nov. 2022, Japanese
    Poster presentation

  • マイクロ流体デバイスを用いたイネの側根の栄養屈性解析
    根本慎司, 山崎清志, Marcel Beier, 藤原徹, 神野伊策, 肥田博隆
    化学とマイクロ・ナノシステム学会 第46回研究会, Nov. 2022, Japanese
    Poster presentation

  • ゲルプレート上のマイクロ流路を用いた化学走性に基づく線虫分離手法
    中田千聖, 澤進一郎, 神野伊策, 肥田博隆
    化学とマイクロ・ナノシステム学会 第46回研究会, Nov. 2022, Japanese
    Poster presentation

  • ON-CHIP METHOD FOR CHARACTERIZING DYNAMIC RESPONSES TO GRAVITY IN GROWING PLANTS
    Hirotaka Hira, Shiho Miyabayashi, Isaku Kanno
    2022 JSME-IIP/ASME-ISPS Joint International Conference on Micromechatronics for Information and Precision Equipment (MIPE2022), Aug. 2022, English
    Oral presentation

  • Applications of Microfluidic device in Plant Biology
    Hirotaka Hida
    5th International Conference on Emerging Electronics, Nov. 2020, English
    [Invited]
    Invited oral presentation

  • 酵母の単離と解析のためのマイクロ流体デバイスの開発
    安田 悠悟, 廣田 智, 荻野 千秋, 神野 伊策, 肥田 博隆
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese
    Oral presentation

  • 植物寄生性線虫の感染プロセスの解析手法
    肥田 博隆, 江原 りか, 神野 伊策, 古水 千尋, 澤 進一郎
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese
    Oral presentation

  • イネの側根の屈性解析システムの開発
    福澤 滉平, 山崎 清志, Marcel Beier, 藤原 徹, 神野 伊策, 肥田 博隆
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese
    Oral presentation

  • 栄養条件が根の機械的性質に及ぼす影響の解析
    林 駿平, Beier Marcel, 三輪 京子, 藤原 徹, 神野 伊策, 肥田 博隆
    第11回マイクロ・ナノ工学シンポジウム, Oct. 2020, Japanese
    Oral presentation

  • ポアメンブレンを用いた植物寄生性線虫の化学走性分析デバイス
    佐古 隆太朗, 澤 進一郎, 古水 千尋, 神野 伊策, 肥田 博隆
    第37回「センサ・マイクロマシンと応用システム」シンポジウム, Oct. 2020, Japanese
    Oral presentation

  • Plant-on-a-chip: Applications of microfluidics in plant biology
    Hirotaka Hida
    The 15th IEEE International Conference on Nano/Micro Engineered & Molecular Systems, Sep. 2020, English
    [Invited]
    Invited oral presentation

  • マイクロピラーとの接触解析による根の機械的性質の推定手法
    林 駿平, Beier Marcel, 三輪 京子, 藤原 徹, 神野 伊策, 肥田 博隆
    日本機械学会2020年度年次大会, Sep. 2020, Japanese
    Oral presentation

  • フレキシブルPZT圧電薄膜を用いたエナジーハーベスタのウ ェアラブル応用
    原田 燎, 梅垣 俊仁, 肥田 博隆, 神野 伊策
    日本機械学会2020年度年次大会, Sep. 2020, Japanese
    Oral presentation

  • 植物の根の力学特性と成長に関する基礎的研究 その 1 マイクロピラーを用いたシロイヌナズナの根の力学特性推 定法の開発
    藤原徹, Marcel BEIER, 肥田博隆
    2020年度日本建築学会大会学術講演会・建築デザイン発表会, Japanese
    Oral presentation

  • 機械的ストレスが植物寄生性線虫の感染に与える影響の解析
    肥田博隆, 江原りか, 神野伊策, 古水千尋, 澤進一郎
    令和2年度センサ・マイクロマシン部門 総合研究会, Jul. 2020, Japanese
    Oral presentation

  • マイクロピラーとの接触解析に基づく根の機械特性の推定
    林 駿平, Beier Marcel, 三輪 京子, 藤原 徹, 神野 伊策, 肥田 博隆
    IIP2020 情報・知能・精密機器部門（IIP部門）講演会, Japanese
    Oral presentation

  • The influence of sucrose on Arabidopsis root diameter and mechanics
    Marcel Pascal Beier, Shumpei Hayashi, Kyoko Miwa, Hirotaka Hida, Toru Fujiwara
    第61回日本植物生理学会年会, English
    Oral presentation

  • マイクロフォースセンサを用いた根の機械的性質の解析
    HIDA HIROTAKA, 伊黒 大祐, KANNO ISAKU, 野田口 理孝
    IIP2019 情報・知能・精密機器部門（IIP部門）講演会, 2019, Japanese, Domestic conference
    Oral presentation

  • V2O5正極を用いた全固体薄膜リチウムイオン電池の作製とその評価
    KANNO ISAKU, 金澤翔吾, 馬場友章, 肥田博隆
    IIP2018 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2018, Japanese, 東洋大学, Domestic conference
    Oral presentation

  • 機械的ストレス下における植物の根系発達過程の解析手法
    HIDA HIROTAKA, 西脇 大維, KANNO ISAKU, 野田口 理孝
    電気学会センサ・マイクロマシン部門 部門大会 第35回「センサ・マイクロマシンと応用システムシンポジウム」, 2018, Japanese, Domestic conference
    Poster presentation

  • マイクロフォースセンサを用いた根の成長挙動解析
    伊黒 大祐, HIDA HIROTAKA, 尾添 克哉, KANNO ISAKU, 野田口 理孝
    日本機械学会2018年度年次大会, 2018, Japanese, Domestic conference
    Oral presentation

  • マイクロピラーアレイを用いた根の機械的ストレス応答の解析
    HIDA HIROTAKA, 西脇 大維, KANNO ISAKU, 野田口 理孝
    日本機械学会2018年度年次大会, 2018, Japanese, Domestic conference
    Oral presentation

  • THE PIEZOELECTRIC PZT THIN FILMS DEPOSITED ON METAL SUBSTRATES
    Takashi Ito, Takahito Nishi, Toshihito Umegaki, 肥田 博隆, Isaku Kanno
    PowerMEMS2017, Nov. 2017, English, Kanazawa, Japan, International conference
    Poster presentation

  • シューズ埋め込み型圧電振動発電素子の作製・評価
    KANNO ISAKU, 西崇 仁, 伊藤 喬, 梅垣 俊仁, 肥田 博隆
    2017年度日本機械学会年次大会, Sep. 2017, Japanese, 埼玉大学, Domestic conference
    Oral presentation

  • インセクトスケールロボットを目的とした圧電薄膜アクチュエータの作製
    KANNO ISAKU, 西村 望, 肥田 博隆
    017年度日本機械学会年次大会, Sep. 2017, Japanese, 埼玉大学, Domestic conference
    Oral presentation

  • Pb(Zr,Ti)O3圧電薄膜の電気的信頼性評価に関する研究
    KANNO ISAKU, 金光 勇弥, 譚 ゴオン, 梅垣 俊仁, 肥田 博隆
    第78回応用物理学会秋季学術講演会, Sep. 2017, Japanese, 福岡国際会議場, Domestic conference
    Oral presentation

  • Pb(Zr,Ti)O3圧電薄膜の逆圧電効果による結晶構造変化のその場観察
    KANNO ISAKU, 譚 ゴオン, 丸山 和樹, 金光 勇弥, 西岡 慎太郎, 小金澤 智之, 梅垣 俊仁, 小金澤 智之, 梅垣 俊仁, 肥田 博隆
    福岡国際会議場, Sep. 2017, Japanese, Domestic conference
    Oral presentation

  • ディップコート法による金属箔上へのPZT薄膜の作製と評価
    KANNO ISAKU, 濱村朋広, 肥田博隆
    強誘電体応用会議, Jun. 2017, Japanese, 京都, Domestic conference
    Oral presentation

  • 薄膜型全固体リチウムイオン電池の作製と評価
    KANNO ISAKU, 馬場 友章, 肥田 博隆
    IIP2017 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2017, Japanese, 東洋大学 白山キャンパス, Domestic conference
    Oral presentation

  • ディップコート法によるステンレス箔上へのPZT薄膜の作製
    KANNO ISAKU, 濱村 朋広, 肥田 博隆
    第64回応用物理学会春季学術講演会, Mar. 2017, Japanese, パシフィコ横浜, Domestic conference
    Oral presentation

  • PZT薄膜を用いた圧電型エナジーハーベスターの作製と評価
    KANNO ISAKU, 伊藤 喬, 西 崇仁, 肥田 博隆
    IIP2017 情報・知能・精密機器部門（IIP部門）講演会, Mar. 2017, Japanese, 東洋大学 白山キャンパス, Domestic conference
    Oral presentation

  • Pb(Zr,Ti)O3薄膜の斜め成膜およびその特性評価に関する研究
    KANNO ISAKU, 丸山 和樹, 肥田 博隆, 寺元 卓也
    第64回応用物理学会春季学術講演会, Mar. 2017, Japanese, パシフィコ横浜, Domestic conference
    Oral presentation

  • Design and characterization of cantilever-type piezoelectric MEMS microphones
    KANNO ISAKU, Shota Nakagawa, Hirotaka Hida
    International Symposium on Micro-Nano Science and Technology 2016, Dec. 2016, English, Tokyo, International conference
    Oral presentation

  • 根の成長パターン解析を目的としたマイクロピ ラーデバイスの開発
    西脇 大維, HIDA HIROTAKA, 東山 哲也, 野田口 理孝, 神野 伊策
    日本機械学会 2016年度年次大会, Sep. 2016, Japanese, Domestic conference
    Oral presentation

  • 圧電薄膜振動子を用いたシリンダー型 MEMS ジャイロスコープの特性評価
    HIDA HIROTAKA, 富士原 孝裕, 神野 伊策
    日本機械学会 2016年度年次大会, Sep. 2016, Japanese, Domestic conference
    Oral presentation

  • Shoe-mounted vibration energy harvester of PZT piezoelectric thin films on metal foils
    KANNO ISAKU, Takahito Nishi, Takashi Ito, Hirotaka Hida
    The 16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS2016), Sep. 2016, English, Pari, France, International conference
    Oral presentation

  • KNN 薄膜を用いた光起電力特性評価
    大地 優平, HIDA HIROTAKA, 神野 伊策
    第77回応用物理学会秋季学術講演会, Sep. 2016, Japanese, 朱鷺メッセ, Domestic conference
    Poster presentation

  • Compositional dependence of BaTiO3-xBaSnO3 piezoelectric thin films prepared by combinatorial sputtering
    KANNO ISAKU, Hongbo Cheng, Takuya Teramot, Hirotaka Hida, Jun Ouyang
    第8回日中強誘電体応用会議, Sep. 2016, English, 筑波, International conference
    Oral presentation

  • Compositional dependence of BaTiO3-xBaSnO3 piezoelectric thin films prepared by combinatorial sputtering
    Hongbo Cheng, Takuya Teramoto, HIDA HIROTAKA, Isaku Kanno, Jun Ouyang
    第77回応用物理学会秋季学術講演会, Sep. 2016, English, 朱鷺メッセ, Domestic conference
    Oral presentation

  • 薄膜材料の正・逆圧電特性評価
    KANNO ISAKU, Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka Hida
    第63回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference
    Oral presentation

  • 積層圧電薄膜の作製およびその実効的圧電特性評価
    KANNO ISAKU, Hirotaka Hida, Ryosuke Yamamoto, Fumiya Kurokawa, Yuichi Tsujiura, Natumi Makimoto, Ken Kobayasi
    第66回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference
    Oral presentation

  • コンビナトリアルスパッタ法を用いたPMN-PZ-PT薄膜の組成依存性評価
    KANNO ISAKU, Hirotaka Hida, Yuichi Tsujiura, Fumiya Kurokawa, Takuya Teramoto
    第64回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference
    Oral presentation

  • PZT圧電薄膜の正圧電特性経時変化
    KANNO ISAKU, Hirotaka Hida, Fumiya Kurokawa, Yuichi Tsujiura, Takahito Nish
    第65回応用物理学会春季学術講演会, Mar. 2016, Japanese, 東京都, Domestic conference
    Oral presentation

  • オンチップ力計測手法による根の成長メカニズム解析
    尾添 克哉, HIDA HIROTAKA, 神野 伊策, 東山 哲也, 野田口 理孝
    化学とマイクロ・ナノシステム学会第32回研究会, Nov. 2015, Japanese, Domestic conference
    Poster presentation

  • 圧電薄膜アクチュエータを用いたインセクトスケール圧電ロボットの作製と評価
    Takumi Iwasaki, Yuichi Tsujiura, Fumiya Kurokawa, Hirotaka, Hida, Isaku Kanno
    第 7 回マイクロ・ナノ工学シンポジウム, Oct. 2015, Japanese, 新潟県, Domestic conference
    Oral presentation

  • ステンレス基板上PZT薄膜の光誘起ひずみ効果
    KANNO ISAKU, Atsuro Sadand, Yuhei Och, Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida
    第76回応用物理学会秋季学術講演会, Sep. 2015, Japanese, 名古屋, Domestic conference
    Oral presentation

  • Self-excited vibration energy harvesters of PZT thin films on stainless-steel cantilevers by airflow
    Isaku Kanno, Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka, Hida
    10th Energy Harvesting Workshop, Sep. 2015, English, Virginia, USA, International conference
    Oral presentation

  • Pb(Hf,Ti)O3薄膜の作製と組成依存性評価
    KANNO ISAKU, Shogo Nishio, Fumiya Kurokawa, Yuichi Tsujiura, Hirotaka Hida
    第76回応用物理学会秋季学術講演会, Sep. 2015, Japanese, 名古屋市, Domestic conference
    Oral presentation

  • Reliability of vibration energy harvesters of PZT thin films on stainless steel cantilevers
    Isaku Kanno, Yuichi Tsujiura, Eisaku Suwa, Fumiya Kurokawa, Hirotaka Hida
    2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, Jun. 2015, English, Kobe, International conference
    Oral presentation

  • Development of simple microrob ot using piezoelectric thin film actuator on metal substrate
    Isaku Kanno, Hirotaka Hida, Yuki Morita, Fumiya Kurokawa, Yuichi Tsujiura
    2015 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, Jun. 2015, English, Kobe, International conference
    Oral presentation

  • 正・逆圧電効果によるPZT薄膜の圧電定数e31,fの測定
    KANNO ISAKU, Yuichi Tsujiura, Saneyuki Kawabe, Fumiya Kurokawa, Hirotaka Hida
    強誘電体応用会議, May 2015, Japanese, 京都市, Domestic conference
    Oral presentation

  • 自励振動を利用した圧電薄膜気流振動発電素子
    TSUJIURA Yuichi, SUWA Eisaku, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    第62回応用物理学会春季学術講演会, Mar. 2015, Japanese, Domestic conference
    Oral presentation

  • UV-LED光駆動の圧電薄膜アクチュエータの作製
    KUROKAWA Fumiya, OHCHI Yuhei, SADANDA Atsuro, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku
    第62回応用物理学会春季学術講演会, Mar. 2015, Japanese, Domestic conference
    Oral presentation

  • Pb(Hf,Ti)O3薄膜の作製と圧電特性評価
    NISHIO Shogo, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    第62回応用物理学会春季学術講演会, Mar. 2015, Japanese, Domestic conference
    Oral presentation

  • 自励振動を利用した圧電薄膜気流発電素子
    SUWA Eisakui, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    平成26年度応用物理学会関西支部第3回講演会, Feb. 2015, Japanese, Domestic conference
    Oral presentation

  • UV-LED光駆動圧電薄膜アクチュエータの作製
    KUROKAWA Fumiya, Ohchi Yuhei, SADANDA Atsuro, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku
    平成26年度応用物理学会関西支部第3回講演会, Feb. 2015, Japanese, Domestic conference
    Oral presentation

  • 積層圧電薄膜を用いた高効率MEMSアクチュエータの開発
    KUROKAWA Fumiya, KISHIMOTO Shinya, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku
    第53回セラミックス基礎科学討論会, Jan. 2015, Japanese, Domestic conference
    Oral presentation

  • スパッタ法を用いたLi4Ti5O12薄膜の作製とその評価
    OKAMOTO Kazuma, KUROKAWA Fumiya, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku, MIZUHATA Minoru
    第53回セラミックス基礎科学討論会, Jan. 2015, Japanese, Domestic conference
    Oral presentation

  • マイクロマシンに『タネ』を蒔く
    HIDA HIROTAKA
    第18回 生物系若手サイエンスセミナー, Dec. 2014, Japanese, Domestic conference
    Public discourse

  • 正・逆圧電効果による PZT 薄膜の圧電定数 e31,f の評価
    KAWABE Saneyuki, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference
    Oral presentation

  • 金属基板上圧電薄膜アクチュエータを用いたミリメータスケールロボットの作製
    MORITA Yuki, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference
    Oral presentation

  • 金属基板上 PZT 薄膜を用いた振動発電素子の信頼性評価に関する研究
    TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference
    Oral presentation

  • 金属基板上 PZT 薄膜を用いた自励振動発電素子の評価
    SUWA Eisakui, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference
    Oral presentation

  • シリコンウェットエッチング 基礎と応用
    HIROTAKA Hida
    MEMS 開発基礎講座, Oct. 2014, Japanese, 日本機械学会マイクロ・ナノ工学部門、電気学会センサ・マイクロマシン部門共催, Domestic conference
    [Invited]
    Nominated symposium

  • ウエットエッチングによる圧電薄膜の PDMS 基板上への転写技術
    HIROTAKA Hida, YAGAMI Shuni, SUWA Eisaku, TSUJIURA Yuichi, KUROKAWA Fumiya, KANNO Isaku
    第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference
    Oral presentation

  • PZT 圧電薄膜および圧電 MEMS デバイスの信頼性評価
    KANNO Isaku, TSUJIURA Yuichi, KUROKAWA Fumiya, HIROTAKA Hida
    第6回マイクロ・ナノ工学シンポジウム, Oct. 2014, Japanese, Domestic conference
    Oral presentation

  • Microchannel network for simple and high-throughput chemotaxis assay of plant-parasitic nematodes
    HIROTAKA Hida
    ERATO東山ライブホロニクスプロジェクトセミナー, Oct. 2014, Japanese, Domestic conference
    [Invited]
    Nominated symposium

  • コンビナトリアルスパッタ法による BZT-BCT 圧電薄膜の組成依存性評価
    KUROKAWA Fumiya, MORI Akira, TSUJIURA Yuichi, HIROTAKA Hida, KANNO Isaku
    2014年 第75回応用物理学会秋季学術講演会, Sep. 2014, Japanese, Domestic conference
    Oral presentation

  • High-throughput Chemotaxis Assay of Plant-parasitic Nematode by Using a Microchannel Device
    H. Hida, M. Matsumura, I. Kanno, H. Nishiyama, S. Sawa, T. Higashiyama, H. Arata
    International ERATO Higashiyama Live-Holonics Symposium 2014 "Plant Live-Cell Imaging and Microdevices", Sep. 2014, English, International conference
    Poster presentation

  • 植物寄生性センチュウのハイスループット化学走性分析用デバイス
    HIDA HIROTAKA, 松村 匡隆, ISAKU KANNO, 西山 英孝, 澤 進一郎, 東山 哲也, 新田 英之
    化学とマイクロ・ナノシステム学会 第29回研究会, May 2014, Japanese, 日本女子大学 目白キャンパス, Domestic conference
    Poster presentation

  • コンビナトリアルスパッタ法による PMN-PT 圧電薄膜の組成依存性評価
    KUROKAWA Fumiya, HIROTAKA Hida, KANNO Isaku
    第31回強誘電体応用会議, May 2014, Japanese, Domestic conference
    Oral presentation

  • 着脱式マイクロ流路チップを用いたゾル-ゲル法によるPZT薄膜の直接パターニング技術
    HIDA HIROTAKA, YAGAMI SHUN, KANNO ISAKU
    第61回応用物理学会春季学術講演会, Mar. 2014, Japanese, Domestic conference
    Oral presentation

  • スパッタ法を用いた Li4Ti5O12薄膜の作製とその評価
    OKAMOTO KAZUMA, KUROKAWA FUMIYA, HIDA HIROTAKA, KANNO ISAKU, MIZUHATA MINORU
    第61回応用物理学会春季学術講演会, Mar. 2014, Japanese, Domestic conference
    Oral presentation

  • コンビナトリアル成膜によるPLZT薄膜の組成依存性評価
    NISHIO SHOGO, KUROKAWA FUMIYA, HIDA HIROTAKA, KANNO ISAKU
    第61回応用物理学会春季学術講演会, Mar. 2014, Japanese, Domestic conference
    Oral presentation

  • 植物寄生性センチュウの行動分析用マイクロ流路デバイス:流路規格および流路内物質濃度分布の検証
    肥田 博隆, 西山 英孝, 澤 進一郎, 神野 伊策, 東山 哲也, 新田 英之
    第5回 マイクロ・ナノ工学シンポジウム, Nov. 2013, Japanese, 日本機械学会マイクロ・ナノ工学部門, 仙台国際センター(仙台市), Domestic conference
    Oral presentation

  • スパッタ法で作製したPZT薄膜積層アクチュエータ
    岸本 真哉, 辻浦 裕一, 黒川 文弥, 肥田 博隆, 神野 伊策
    第5回 マイクロ・ナノ工学シンポジウム, Nov. 2013, Japanese, 仙台国際センター(仙台市), Domestic conference
    Oral presentation

  • 亜鉛負極近傍における亜鉛イオン濃度場の評価
    萩ノ崎賢也, 伊藤靖仁, 三橋貴仁, 酒井康彦, 長田孝二, 寺島 修, 宇治原徹, 式田光宏, HIDA HIROTAKA
    第54回電池討論会, Oct. 2013, Japanese, 電気化学会電池技術委員会, 大阪国際会議場(大阪市), Domestic conference
    Oral presentation

  • ステンレス基板上圧電薄膜を用いた MEMS エナジ ーハーベスター
    辻浦 裕一, 諏訪 英作, 肥田 博隆, 末永 和史, 柴田 憲治, 神野 伊策
    日本機械学会 2013 年度年次大会, Sep. 2013, Japanese, 岡山大学津島キャンパス(岡山市), Domestic conference
    Oral presentation

  • サツマイモネコブセンチュウに対する誘引忌避物質探索
    西山英孝, HIDA HIROTAKA, 戸髙晃彦, 江島千佳, 相良知実, Bui Thi Ngan, 澤進一郎
    2013年度日本線虫学会大会（第21回大会）, Sep. 2013, Japanese, 唐津市民交流プラザ(佐賀県), Domestic conference
    Oral presentation

  • コンビナトリアル成膜法による PMN-PT薄膜の組成依存性評価
    黒川 文弥, 冨岡 宏平, 肥田 博隆, 神野 伊策
    日本機械学会 2013 年度年次大会, Sep. 2013, Japanese, 岡山大学津島キャンパス(岡山市), Domestic conference
    Oral presentation

  • Fe-B-Nd-Nb 金属ガラス薄膜の破壊靭性評価
    TuanPhan, 大口裕之, 原基揚, 式田光宏, HIDA HIROTAKA, 安藤妙子, 佐藤一雄, 桑野博喜
    日本機械学会 2013 年度年次大会, Sep. 2013, Japanese, 岡山大学津島キャンパス(岡山市), Domestic conference
    Oral presentation

  • 熱式マイクロセンサによる壁面せん断応力変動計測に関する研究
    沢田拓也, 寺島修, 酒井康彦, 長田孝二, 式田光宏, HIDA HIROTAKA, 伊藤靖仁
    平成25年度 日本実験力学会 年次大会, Aug. 2013, Japanese, Domestic conference
    Oral presentation

  • Composition depndence of PMN-PT thin films prepared by combinatorial sputtering
    Kurokawa Fumiya, Tomioka Kohei, Hida Hirotaka, Kanno Isaku
    IEEE 2013 Joint UFFC, EFTF, and PFM Symposium, Jul. 2013, English, IEEE, プラハ, International conference
    Poster presentation

■ Affiliated Academic Society
  • The Institute of Electrical Engineers of Japan (IEEJ)

  • IEEE

  • 化学とマイクロ・ナノシステム学会

  • 応用物理学会

  • 日本機械学会

  • 電気学会

■ Research Themes
  • 植物の環境ストレス応答のオンチップ解析技術
    肥田 博隆
    日本学術振興会, 科学研究費助成事業, 基盤研究(C), 神戸大学, 01 Apr. 2024 - 31 Mar. 2027

  • Development of a living cell-cell battery inspired by electric fishes
    MATURANA ANDRES, 肥田 博隆, 神野 伊策
    日本学術振興会, 科学研究費助成事業, 挑戦的研究(萌芽), 名古屋大学, 30 Jun. 2022 - 31 Mar. 2025

  • Method for analyzing dynamic response of plants to external stimulation
    肥田 博隆
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (C), Kobe University, 01 Apr. 2020 - 31 Mar. 2023
    本研究は，植物の根や地上部の機械的特性（硬さ，推進力）を連続的に計測可能なマイクロセンサデバイスを開発し，重力や病害虫，化学物質などの外部刺激を与えた際の力学的応答を定量的に解析することで，植物の成長最適化に関する知見の獲得を目的とする。さらに，本手法を発展させ，温度や養分など多様な環境要因を考慮した分析プラットフォームを確立し，将来的には栽培技術の最適化や品種改良への知見の獲得を目指す。 今年度は，昨年度までに開発した分析手法を用い，(1)胚軸（地上部）の重力屈性の解析用デバイスとそのモデル化，(2)植物寄生性線虫の感染過程で生じる構造変化の細胞レベルでの解析，(3)マイクロピラーデバイスを用いた根の伸長挙動解析 を主に行った。 その結果，胚軸の屈性時における力の定量的評価を実現するとともに，ならびに植物寄生性線虫の感染が引き起こす根の変質を，マイクロデバイスを用いることで細胞レベルで制御可能である見通しを得た。

  • 神野 伊策
    科学研究費補助金／基盤研究(B), Apr. 2017 - Mar. 2021
    Competitive research funding

  • 肥田 博隆
    科学研究費補助金／若手研究(A), Apr. 2016 - Mar. 2018, Principal investigator
    Competitive research funding

  • Investigation on the kinetics of turbulent shear flows by means of the measurements of spatio-temporal wall shear stresses
    KOUJI Nagata, SAKAI Yasuhiko, ITO Yasumasa, SHIKIDA Mitsuhiro, HIDA Hirotaka
    Japan Society for the Promotion of Science, Grants-in-Aid for Scientific Research, Grant-in-Aid for Challenging Exploratory Research, Nagoya University, 01 Apr. 2013 - 31 Mar. 2015
    Three types of new sensors for measurements of wall shear stresses in turbulent shear flows: a hot-film sensor made of Silicon wafer (referred to as a SW sensor), a floating element sensor (referred to as a FE sensor), and a patch-type hot-film sensor made of polyimide (referred to as a patch-type sensor), and their control circuits have been developed. Frequency responses and SN ratios of the sensors are investigated. Further, simultaneous measurement of wall shear stress and velocity field are performed in a wall jet using the SW sensor and the patch-type sensor.

  • 肥田 博隆
    学術研究助成基金助成金／若手研究(B), Apr. 2013 - Mar. 2015, Principal investigator
    Competitive research funding

  • 共振特性を用いたMEMSデバイスに関する研究
    2007 - 2010
    Competitive research funding

  • MEMS devices using resonant characteristic
    2007 - 2010
    Competitive research funding

■ Industrial Property Rights
  • 圧電薄膜、圧電薄膜の製造方法、圧電薄膜付き基板、圧電アクチュエータ、圧電センサ、インクジェットヘッドおよびインクジェットプリンタ
    KANNO ISAKU, HIDA HIROTAKA
    特願2015-033682, 24 Feb. 2015, 大学長, 特許6468881, 18 Dec. 2018
    Patent right

■ Media Coverage
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