研究者紹介システム

菅野 公二
スガノ コウジ
未来医工学研究開発センター
教授
機械工学関係
Last Updated :2022/06/23

研究者情報

所属

  • 【主配置】

    未来医工学研究開発センター
  • 【配置】

    大学院工学研究科 機械工学専攻

学位

  • 博士(工学), 立命館大学
  • プラズモニック金ナノ構造を用いた超高感度センシング技術

授業科目

ジャンル

  • 科学・技術 / 工学

コメントテーマ

  • MEMS
  • 金ナノ粒子
  • マイクロ流体デバイス

研究活動

研究キーワード

  • self-assemble
  • nanoparticle
  • microreactor
  • microfluidic device
  • nano/micro fabrication
  • MEMS
  • セルフアセンブル
  • ナノ粒子
  • マイクロリアクタ
  • マイクロ流体デバイス
  • ナノ・マイクロファブリケーション
  • MEMS

研究分野

  • ナノテク・材料 / ナノバイオサイエンス
  • ナノテク・材料 / ナノマイクロシステム
  • ナノテク・材料 / ナノ構造物理
  • ナノテク・材料 / ナノ構造化学

受賞

  • 2019年11月 電気学会, 第36回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター発表賞, 光励起ナノギャップ電極を用いたDNAオリゴマーの光トラップおよび1分子検出

    森田明宏, 上杉晃生, 菅野公二, 磯野吉正

  • 2017年10月 電気学会, 第34回「センサ・マイクロマシンと応用システム」シンポジウム 奨励賞, 単一金ナノ粒子二量体を用いた表面増強ラマン分光によるDNAオリゴマー1分子検出

    丸岡 克成, 菅野 公二

    国内学会・会議・シンポジウム等の賞

  • 2017年01月 電気学会, 平成28年電気学会優秀論文発表(IEEJ Excellent Presentation Award), 金ナノ粒子二量体配列を用いたDNA塩基の高感度・高速表面増強ラマン分光

    池上 晃平, 菅野 公二, 磯野 吉正

    国内学会・会議・シンポジウム等の賞

  • 2016年10月 電気学会, 第33回「センサ・マイクロマシンと応用システム」シンポジウム 優秀技術論文賞, 金ナノロッド構造を用いた光熱変換によるレーザ波長計測マイクロ振動子デバイス

    菅野 公二, 田中 祐樹, 前田 悦男, 米谷 玲皇, 磯野 吉正

    国内学会・会議・シンポジウム等の賞

  • 2015年10月 電気学会, 第32回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞, 金ナノ粒子二量体配列を用いたDNA 塩基の表面増強ラマン分光

    饗庭 清仁, 池上 晃平, 菅野 公二, 磯野 吉正

    国内学会・会議・シンポジウム等の賞

  • 2015年10月 電気学会, 第32回「センサ・マイクロマシンと応用システム」シンポジウム 奨励賞, 金ナノ粒子直線状配列を用いた表面増強ラマン分光の特性評価

    池上 晃平, 饗庭 清仁, 菅野 公二, 磯野 吉正

  • 2015年01月 電気学会, 平成26年電気学会優秀論文発表(IEEJ Excellent Presentation Award), 金粒子配列ナノ流路を用いた表面増強ラマン分光分析デバイス

    竹下 俊光, 末國 啓輔, 饗庭 清仁, 菅野 公二, 磯野 吉正

    国内学会・会議・シンポジウム等の賞

  • 2014年10月 電気学会, 第31回「センサ・マイクロマシンと応用システム」シンポジウム 最優秀技術論文賞, 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光

    菅野 公二, 松井 大門, 土屋 智由, 田畑 修

    国内学会・会議・シンポジウム等の賞

  • 2022年04月 34th International Microprocesses and Nanotechnology Conference (MNC2021), Young Author’s Award, Characterization of nanogap with gold nanoparticle dimer controlled by four-point bending for electrical and optical single molecule measurement

    Yuanzhi Chang, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono

論文

  • Dynamic surface-enhanced Raman spectroscopy of DNA oligomer with a single hotspot of a gold nanoparticle dimer

    Koji Sugano, Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Yoshitada Isono

    2022年, Optics Letters, Accepted, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono

    Wiley, 2021年12月, Electronics and Communications in Japan, 104 (4), e12340, 英語

    [査読有り]

    研究論文(学術雑誌)

  • 鈴木隆正, 中藤康太, 上杉晃生, 菅野公二, 磯野吉正

    Institute of Electrical Engineers of Japan (IEE Japan), 2021年09月01日, 電気学会論文誌(センサ・マイクロマシン部門誌), 141 (9), 321 - 326, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Tatsuya Tsubota, Naoyuki Arai, Atsuya Harada, Akio Uesugi, Koji Sugano, Yoshitada Isono

    The Optical Society, 2021年08月25日, Journal of the Optical Society of America B, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono

    IOP Publishing, 2021年05月01日, Japanese Journal of Applied Physics, 60 (5), 055502 - 055502, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Akihiro Morita, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono

    IOP Publishing, 2021年03月01日, Nano Express, 2 (1), 010032 - 010032, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Kyosuke Nimura, Kenji Osaka, Kazuma Sawada, Akio Uesugi, Koji Sugano, Yoshitada Isono

    IOP Publishing, 2021年02月01日, Journal of Micromechanics and Microengineering, 31 (2), 025009 - 025009, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Akio Uesugi, Shinya Nakata, Kodai Inoyama, Koji Sugano, Yoshitada Isono

    IEEE, 2021年01月25日, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Koji Sugano, Yuki Tanaka, Akio Uesugi, Etsuo Maeda, Reo Kometani, Yoshitada Isono

    Elsevier BV, 2020年09月, Sensors and Actuators A: Physical, 315, 112337 - 112337, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Tatsuya Tsubota, Akio Uesugi, Koji Sugano, Yoshitada Isono

    © 2020, Springer-Verlag GmbH Germany, part of Springer Nature. Near-infrared (NIR) imaging has been used for nondestructive and non-contact inspections in various areas, such as food and medicine inspections and medical diagnoses. The short-wavelength infrared light (SWIR) sensor currently used requires a Peltier cooler and a diffraction grating spectroscope owing to its detection principle. Thus, realizing a low-cost and miniaturized SWIR imaging device remains challenging and has limitations for practical applications. In this study, we propose a bolometer-type detector element fabricated using a silicon-on-insulator (SOI) wafer as a low cost and miniaturized SWIR image sensor element. We adopted gold (Au) nanowire grating structures coated with silicon as wavelength-dependent SWIR absorbers and aimed at wavelength-selectivity imaging without using a spectroscope. A device was designed and fabricated with Au nanowire grating structures on a doubly clamped Si beam using microelectromechanical system (MEMS)) technology. The electrical characteristics of the device were measured depending on device temperature and SWIR irradiation intensity. It was found that electrical resistance decreased linearly with increasing device temperature and SWIR irradiation intensity (wavelength at 1530 nm), as semiconductors have negative temperature coefficients of resistance. The results show similar trends from both finite element method (FEM) analysis and theoretical calculation. The resistances at wavelengths ranging from 1530 to 1565 nm at 5 nm increment were evaluated. It was confirmed that absorber-integrated bolometer device enabled wavelength-dependent response of the resistance according to the absorption spectrum.

    2020年08月, Microsystem Technologies, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Kohei Takegami, Kota Nakafuji, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

    IOP Publishing, 2020年06月01日, Japanese Journal of Applied Physics, 59 (SI), SIII04 - SIII04, 英語

    [査読有り]

    研究論文(学術雑誌)

  • 新居直之, 上杉晃生, 菅野公二, 磯野吉正

    Institute of Electrical Engineers of Japan (IEE Japan), 2020年04月01日, 電気学会論文誌(センサ・マイクロマシン部門誌), 140 (4), 72 - 78, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Katsunari Maruoka, Akio Uesugi, Yoshitada Isono

    IEEE, 2019年06月, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono

    IEEE, 2019年06月, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Strain engineering of core–shell silicon carbide nanowires for mechanical and piezoresistive characterizations

    Shinya Nakata, Akio Uesugi, Koji Sugano, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, Yoshitada Isono

    2019年04月, Nanotechnology, 30 (26), 265702, 英語

    [査読有り]

    研究論文(学術雑誌)

  • 単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測

    土屋智由, 鈴木淳也, 片岡達哉, 平井義和, 菅野公二, 田畑修

    2019年03月, 実験力学, 19 (1), 24 - 29, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Nanotemplate-guided self-assembly of gold nanoparticles and its application to plasmonic bio/chemical sensing

    Koji Sugano

    2018年01月, International Journal of Automation Technology, 12 (1), 79 - 86, 英語

    [査読有り][招待有り]

    研究論文(学術雑誌)

  • A Novel 3-axis Tiny Tactile Sensor Developed by 3-D Microstructuring using Punch Creep Forming Process

    Kenji Osaka, Satoshi Nakata, Kensuku Yamamoto, Takao Toyoda, Koji Sugano, Yoshitada Isono

    2018年01月, The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2018), 1036 - 1039, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Koji Sugano, Kiyohito Aiba, Kohei Ikegami, Yoshitada Isono

    In this study, single-molecule detection on a prefabricated substrate through surface-enhanced Raman spectroscopy (SERS) with 4,4'-bipyridine molecules was achieved. The use of a substrate with directionally arrayed gold nanoparticle dimers was proposed for the single-molecule detection and identification of a wide range of bio/chemical molecules. Around 50 Raman measurements and statistical analyses were performed to demonstrate a single-molecule SERS. At 10%(-11) M, the distribution was fitted by three Gaussian curves, whereas the distribution of Raman intensities was fitted by one Gaussian curve at 10%(-5) M. The probability of molecule detection is consistent with the Poisson distribution. This result indicates the possibility of detecting 0, 1, and 2 molecules. Thus, we confirmed that the developed substrates achieved single-molecule SERS detection and identification. (C) 2017 The Japan Society of Applied Physics.

    IOP PUBLISHING LTD, 2017年06月, JAPANESE JOURNAL OF APPLIED PHYSICS, 56 (6), 06GK01, 英語

    [査読有り]

    研究論文(学術雑誌)

  • SERS Detection and Analysis of a Single Oligomer using a Single Gold Nanoparticle Dimer

    Katsunari Maruoka, Kohei Ikegami, Koji Sugano, Yoshitada Isono

    2017年06月, The 19th International Conference onSolid-State Sensors, Actuators and Microsystems (Transducers2017), 468 - 471, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device

    Toshiyuki Tsuchiya, Koji Sugano, Hideki Takahashi, H. Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata

    2017年06月, The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2017), 1245 - 1248, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Koji Sugano, Kohei Ikegami, Yoshitada Isono

    In this paper, a characterization method for Raman enhancement for highly sensitive and quantitative surface-enhanced Raman spectroscopy (SERS) is reported. A particle dimer shows a marked electromagnetic enhancement when the particle connection direction is matched to the polarization direction of incident light. In this study, dimers were arrayed by nanotrench-guided self-assembly for a marked total Raman enhancement. By measuring acetonedicarboxylic acid, the fabricated structures were characterized for SERS depending on the polarization angle against the particle connection direction. This indicates that the fabricated structures cause an effective SERS enhancement, which is dominated by the electromagnetic enhancement. Then, we measured 4,4'-bipyridine, which is a pesticide material, for quantitative analysis. In advance, we evaluated the enhancement of the particle structure by the Raman measurement of acetonedicarboxylic acid. Finally, we compared the Raman intensities of acetonedicarboxylic acid and 4,4'-bipyridine. Their intensities showed good correlation. The advantage of this method for previously evaluating the enhancement of the substrate was demonstrated. This developed SERS characterization method is expected to be applied to various quantitative trace analyses of molecules with high sensitivity. (C) 2017 The Japan Society of Applied Physics.

    IOP PUBLISHING LTD, 2017年06月, JAPANESE JOURNAL OF APPLIED PHYSICS, 56 (6), 06GK03, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Surface-Enhanced Raman Spectroscopy Analysis Device with Gold Nanoparticle Arranged Nanochannel

    Toshimitsu Takeshita, Keisuke Suekuni, Kiyohito Aiba, Koji Sugano, Yoshitada Isono

    2017年03月, Electronics and Communications in Japan, 100 (4), 33 - 41, 英語

    [査読有り]

    研究論文(学術雑誌)

  • SURFACE-ENHANCED RAMAN SPECTROSCOPY ANALYSIS OF DNA BASES USING ARRAYED AND SINGLE DIMER OF GOLD NANOPARTICLE

    Kohei Ikegami, Koji Sugano, Yoshitada Isono

    This paper reports an ultrasensitive surface-enhanced Raman spectroscopy (SERS) for detecting and identifying four kinds of DNA bases: adenine, cytosine, thymine, and guanine using a gold nanoparticle dimer. The gold nanoparticle dimer was directionally arrayed on a substrate in order to achieve huge enhancement according to the polarization-dependent enhancement. 10-11 M limit of detection for four DNA bases and 0.1 s rapid detection for adenine were achieved. Additionally, a separated single dimer was fabricated and evaluated. We clarified single-molecule-level SERS detection and identification was possible using the locally enhanced single hotspot of the single dimer with the 1-nm nanogap.

    IEEE, 2017年, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 408 - 411, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Microresonator with gold nanorod array for laser wavelength measurement by photo−thermal conversion

    Koji Sugano, Yuki Tanaka, Etsuo Maeda, Reo Kometani, Yoshitada Isono

    In this study, we developed the resonator-based sensor device for measurement of laser wavelength changes in a wavelength division multiplexing (WDM) system for large capacity transmission. Laser light is absorbed into the gold nanorod array on the resonator beam, which has wavelength dependent absorption, resulting in temperature change of the beam. Therefore the wavelength change can be measured from resonant frequency shift. We observed the large resonant frequency shift when changing the laser wavelength. The shift was proportional to a cube of beam length and a laser power according to the developed equation. The maximum shift and resolution were 68.8 Hz/nm and 0.29 pm, respectively.

    IEEE, 2017年, Proceedings of The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2017), 159 - 162, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata

    This paper reports on the effect of oxidation on fracture behavior of single crystal silicon (SCS). SCS specimens were fabricated from (100) silicon-on-insulator wafer with 5-pm thick device layer and oxide layer were thermally grown. Quasi-static tensile testing of as-fabricated, oxidized and oxidized layer removed specimens was performed. The fracture origin location transited from the surface to silicon/oxide interface and inside of silicon. The transition may be caused by surface smoothing, thickening oxide layer and formation of oxide precipitation defects in silicon during oxidation. The radius of the oxide precipitation defects was estimated, which is well agreed with the fracture-initiating crack sizes. (C) 2015 Elsevier Ltd. All rights reserved.

    PERGAMON-ELSEVIER SCIENCE LTD, 2016年09月, ENGINEERING FRACTURE MECHANICS, 163, 523 - 532, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Ryu Matsumoto, Ryota Tsutsui, Hiroyuki Kishihara, Naoki Matsuzuka, Ichiro Yamashita, Yukiharu Uraoka, Yoshitada Isono

    This study focuses on the development of a multi-walled carbon nanotube (MWCNT) forest integrated micromechanical resonator working as a rarefied gas analyzer for nitrogen (N2) and hydrogen (H2) gases in a medium vacuum atmosphere. The resonant response is detected in the form of changes in the resonant frequency or damping effects, depending on the rarefied gas species. The carbon nanotube (CNT) forest on the resonator enhances the effective specific surface area of the resonator, such that the variation of the resonant frequency and the damping effect based on the gas species increase significantly. We developed the fabrication process for the proposed resonator, which consists of standard micro-electro-mechanical systems (MEMS) processes and high-density CNT synthesis on the resonator mass. The high-density CNT synthesis was realized using multistep alternate coating of two types of ferritin proteins that act as catalytic iron particles. Two devices with different CNT densities were fabricated and characterized to evaluate the effect of the surface area of the CNT forest on the resonant response as a function of gas pressures ranging from 0.011 to 1 Pa for N2 and H2. Considering the damping effect, we found that the device with higher density was able to distinguish N2 and H2 clearly, whereas the device with lower density showed no difference between N2 and H2. We confirmed that a larger surface area showed a higher damping effect. These results were explained based on the kinetic theory of gases. In the case of resonant frequency, the relative resonant frequency shift increased with gas pressure and surface area because of the adsorption of gas molecules on the resonator surfaces. Higher density CNT forest adsorbed more gas molecules on the surfaces. The developed CNT forest integrated micromechanical resonator could successfully detect N2 and H2 gases and distinguish between them under pressures of 1 Pa.

    Institute of Physics Publishing, 2016年06月10日, Journal of Micromechanics and Microengineering, 26 (7), 075010, 英語

    [査読有り]

    研究論文(学術雑誌)

  • 金ナノ粒子二量体配列を用いたアデニン分子の高感度表面増強ラマン分光検出

    饗庭 清仁, 池上 晃平, 山崎 真之亮, 菅野 公二, 磯野 吉正

    2016年06月, 電気学会論文誌(センサ・マイクロマシン部門誌), 136 (6), 256 - 260, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Time-Resolved Micro Raman Stress Spectroscopy for Single Crystal Silicon Resonator using MEMS Optical Chopper

    Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata

    2016年01月, Journal of Microelectromechanical Systems, 25 (1), 188 - 196, 英語

    [査読有り]

    研究論文(学術雑誌)

  • MEMS-BASED MECHANICAL CHACTERIZATION OF CORE-SHELL SILICON CARBIDE NANO WIRES FOR HARSH ENVIRONMENTAL NANONIECHANICAL ELEMENTS

    Shinya Nakata, Koji Sugano, Mario Negri, Francesca Rossi, Giancarlo Salyiati, Alois Lugstein, Yoshitada Isono

    This research clarified mechanical properties of core-shell silicon carbide nanowires (C/S-SiCN Ws) grown by a vapor-liquid-solid (VSL) technique, using newly developed Electrostatically Actuated I\Anotensile Testing devices (EANATs). The C/S-SiCNWs consist of a crystalline cubic silicon carbide (3C-SiC) core with < 111 > axis wrapped by an amorphous SiOx shell. The stress-strain relations for individual C/S-SiCNWs and 3C-SiCNWs without the SiOx shell have been successfully obtained from the nanotensile tests using EANATs. Young's modulus of the C/S-SiCNWs was 247.2 GPa whereas that of the 3C-SiCNWs showed a quite different value of 498 GPa on average. The tensile strengths for C/S- and 3C-SiCNWs also showed 7.0 GPa and 22.4 GPa on average, respectively, which are enough huge values as a structural material of MEMS/NEMS.

    IEEE, 2016年, 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 543 - 546, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Electrical Resistance Characterization of Strain-Induced Multiwalled Carbon Nanotubes Using MEMS-Based Strain Engineering Device

    Kenji Yamauchi, Keisuke Obata, Shinya Nakata, Koji Sugano, Kisaragi Yashiro, Yoshitada Isono

    In this research, we clarified the electrical resistance change and mechanical properties of strain induced multiwalled carbon nano tubes (MWCNTs), synthesized by atmospheric chemical vapor deposition (CVD), using a MEMS-based strain engineering device mounted on an in situ scanning electron microscopy (SEM) nanomanipulation system. The Young's modulus of an individual MWCNT and its shear strength during interlayer sliding deformation were estimated from the load displacement curve. The electrical resistance of the MWCNT was 215 kW without strain, while an anomalous electrical resistance change was observed under a large strain. The resistance change ratio was almost 0 during the interlayer sliding of the MWCNT, but it specifically showed a sharp increase at the end of the sliding in spite of the MWCNT not breaking mechanically. Molecular dynamics (MD) simulations provided us with a reasonable suggestion that the hard sticking with an atomic reconfiguration at the edge of the outer layer of the MWCNT induces the sharp increase in electrical resistance before the mechanical breaking of the MWCNT.

    MYU, SCIENTIFIC PUBLISHING DIVISION, 2016年, SENSORS AND MATERIALS, 28 (2), 75 - 88, 英語

    [査読有り]

    研究論文(学術雑誌)

  • K. Sugano

    This study achieved single molecule detection, for the first time, on the prefabricated substrate for SERS (surface-enhanced Raman spectroscopy) with non-resonant molecules. Single-molecule SERS has never been achieved using the prefabricated SERS substrate. It has been achieved only using molecule bridged particle dimer by in-liquid formation with polarization matching of incident light. In this study the substrate with directionally arrayed gold nanoparticle dimers was proposed for single molecule detection and identification of a wide range of bio/chemical molecules. Around 50 Raman measurements and statistical analysis were performed for demonstrating single-molecule SERS. At 10(-5) M, the distribution of Raman intensities were fitted by one Gaussian curve. At 10(-11) M, the distribution was fitted by three Gaussian curves. That is consistent with a Poisson distribution. This indicates the probability of detecting 0, 1, and 2 molecule(s). From these results, we confirmed that the developed substrates achieved single molecule SERS detection and identification.

    ELECTROCHEMICAL SOC INC, 2016年, MICROFABRICATED AND NANOFABRICATED SYSTEMS FOR MEMS/NEMS 12, 75 (17), 3 - 10, 英語

    [査読有り][招待有り]

    研究論文(国際会議プロシーディングス)

  • Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This Letter investigates the effect of crystallographic orientation on tensile fractures of silicon microstructures. Specimens 5 m wide and 5 m thick were fabricated on (100) and (110) wafers with 100, 110, and 111 tensile axes. To explore the effects of different surface orientations and morphologies, these specimens were patterned from (100) and (110) silicon-on-insulator (SOI) wafers using the Bosch process under identical fabrication conditions, while other specimens were fabricated from (110) wafers under different conditions. Tensile tests of specimens prepared under the identical fabrication conditions showed that (100) specimens had lower strength than (110) specimens along the 100 and 110 axes; the average strength decreased from 3.62 to 3.14 GPa for 110. This decrease in strength is related to differences in damage that ultimately causes fractures. While (110) specimens fractured due to fabrication damage at top corners, fractures of (100) specimens were due to pit-like defects on bottom surfaces. Since these defects were introduced during SOI bonding processes, the fractures of (100) specimens were dominated by intrinsic SOI defects rather than damage introduced during specimen fabrication processes. To realise higher-strength structures on SOI wafers, both the damage caused during fabrication and the intrinsic defects need to be controlled.

    INST ENGINEERING TECHNOLOGY-IET, 2015年12月, MICRO & NANO LETTERS, 10 (12), 678 - 682, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports the fabrication technique for chain-like arrangements of gold nanoparticles on a substrate and its optical characterization. We successfully fabricated the directional chain-like arrangements and controlled the particle number by the self-assembly using nanotrench templates. We fabricated the dense arrangement in the nanotrenches with high yield reducing an electrostatic repulsive force between particles in water suspension by an addition of electrolytes. Extinction spectra showed the shift of spectrum peaks depending on the particle number, which was consistent with the analytical results.

    Institute of Electrical Engineers of Japan, 2015年11月01日, IEEJ Transactions on Sensors and Micromachines, 135 (11), 474 - 475, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • 高感度表面増強ラマン分光分析に向けた マイクロ流路内粒子凝集反応解析

    菅野 公二, 片山 拓, 土屋 智由, 田畑 修

    2015年11月, 電気学会論文誌(センサ・マイクロマシン部門誌), 135-E (11), 433 - 438, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価

    菅野 公二, 平岡 亮二, 土屋 智由, 田畑 修

    2015年11月, 電気学会論文誌(センサ・マイクロマシン部門誌), 135-E (11), 474 - 475, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • High-speed Pulsed Mixing in a Short Distance with High-frequency Switching of Pumping from Three Inlets

    Koji Sugano, Akihiro Nakata, Toshiyuki Tsuchiya, Osamu Tabata

    2015年07月, Journal of Micromechanics and Microengineering, 25 (8), 084003, 英語

    [査読有り]

    研究論文(学術雑誌)

  • 竹下 俊光, 菅野 公二, 末國 啓輔, 饗庭 清仁, 磯野 吉正

    A micro/nanofluidic device containing linearly arranged gold nanoparticles embedded in nanochannels was developed for highly sensitive surface-enhanced Raman spectroscopy (SERS). The Si nanochannel array was fabricated using a photolithography-based process. Synthesized colloidal particles of mean diameter 100 nm were arranged linearly in the nanochannels, using a nanotrench-guided self-assembly process. The particle geometry provides significant Raman enhancement by matching the polarization direction of the incident light to the connection direction of the particles. The SERS spectrum was obtained from 1 mM 4,4′-bipyridine solution using the fabricated micro/nanofluidic SERS device. The directionally arranged particles showed the same polarization angle dependency as the simulated result. The molecule was detected from 10 pM solution using the particle arrangement. We confirmed that the particle arrangement was appropriate for highly sensitive SERS.

    Institute of Electrical Engineers of Japan, 2015年06月01日, 電気学会論文誌(センサ・マイクロマシン部門誌), 135 (6), 214 - 220, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Surface-Enhanced Raman Spectroscopy using Linearly Arranged Gold Nanoparticles Embedded in Nanochannels

    Koji Sugano, Keisuke Suekuni, Toshimitsu Takeshita, Kiyohito Aiba, Yoshitada Isono

    2015年05月, Japanese Journal of Applied Physics, 54 (6S1), 06FL03, 英語

    [査読有り]

    研究論文(学術雑誌)

  • ULTRASENSITIVE SURFACE-ENHANCED RAMAN SPECTROSCOPY USING DIRECTIONALLY ARRAYED GOLD NANOPARTICLE DIMERS

    Koji Sugano, Daimon Matsui, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports an ultrasensitive nanostructure for surface-enhanced Raman spectroscopy (SERS). The gold nanoparticle dimer, which has been reported as the highest Raman enhancing structure, was directionally arrayed on a substrate for the first time. The highest enhancement can be achieved when a particle connection direction of a dimer is matched to polarization direction of incident light. Therefore the huge enhancement can be achieved at all dimers in total. Optimizing the dimer arrangement, 10 pM limit of detection and 0.5 s rapid detection were achieved.

    IEEE, 2015年, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 608 - 611, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • ANOMALOUS RESISTANCE CHANGE OF ULTRASTRAINED INDIVIDUAL MWCNT USING MEMS-BASED STRAIN ENGINEERING

    K. Yamauchi, T. Kuno, K. Sugano, Y. Isono

    This research clarified the anomalous electric resistance change of ultrastrained multi-walled carbon nanotube (MWCNT), as well as its mechanical properties, using the Electrostatically Actuated NAnotensile Testing device (EANAT) mounted on the in-situ SEM nanomanipulation system. The Young's modulus of MWCNT and its shear stress during interlayer sliding deformation were estimated from the load-displacement curve. The electrical resistance of the MWCNT was 215 k. without strain, which was similar to the previously reported value, however the anomalous resistance change was observed under enormous strain. Although the resistance change ratio was almost constant during interlayer sliding of the MWCNT, it specifically showed a sharp raise at the end of the sliding in spite of the MWCNT not breaking mechanically. The molecular dynamics (MD) simulation provided a good understanding that the atomic reconfiguration due to the hard sticking at the edge of extracted outer layer of MWCNT might induce the sharp raise of resistance without its mechanically breaking. This result reported here is extremely important for reliability of MWCNT interconnects.

    IEEE, 2015年, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 369 - 372, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    The effect of in- and anti-phase mode decoupling on the frequency response of coupled in-plane resonators was examined, experimentally, to suppress the acceleration sensitivity (acceleration output) in tuning fork gyroscopes (TFGs). Finite element simulations, conducted in our recent works, show that the origin of acceleration sensitivity for the sensing resonators in TFGs lies in the transduction of linear (in-phase) acceleration to anti-phase resonant vibration of the sensing resonators in TFGs. We further revealed that the frequency decoupling of the in- and anti-phase vibration modes is effective in suppressing the transduction. To experimentally validate this, two types of coupled resonators (one coupled with a frame and the other with a spring) to represent the sensing resonators of TFGs were fabricated on silicon-on-insulator wafer. Different resonant frequencies were used to evaluate the frequency decoupling effect on the coupled resonators, i.e., the coupling from in-phase mode oscillation to the anti-phase mode vibration. The vibration amplitude of the anti-phase mode increased in the coupled resonators with small frequency decoupling (decoupling ratio, DR) value. Additionally, the two types of coupled resonators exhibit similar output after considering the effect of decoupling ratio, anti-phase frequency and different stiffness unbalances. Our results reveal that TFG can be designed with lower acceleration sensitivity by utilizing sense resonators with large decoupling ratio, higher anti-phase frequency, and possessing structures which are insensitive to fabrication imperfections.

    SPRINGER, 2014年03月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20 (3), 403 - 411, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    An alkali metal vapor cell is a crucial component of the highly sensitive Chip Scale Atomic Magnetometers (CSAMs) that are increasingly deployed in a variety of electronic devices. Herein, we propose a novel microfabrication technique utilizing an array of microchannels at a bonded interface, to enable gas feedthrough for evacuation of unwanted gases from a vapor cell and subsequent introduction of an inert gas, followed by permanent sealing of the microchannels by reflow of a glass frit. The characteristics of glass frit reflow are analyzed to investigate the feasibility of using microchannels formed either on a silicon substrate, or embedded in a glass frit layer, with four different cross-sectional shapes considered. Prior to modeling the microchannels for simulation, the minimum cross-sectional size of a microchannel that fulfills gas feedthrough requirements was calculated and a value of 10 mu m was determined based on a flow conductance model. The sealing of the microchannels was simulated using the finite element method (FEM) and the results revealed that flow resistance is a crucial design factor. Thus, embedded microchannel designs were more suitable for the proposed sealing technique than microchannel designs fabricated in silicon.

    SPRINGER, 2014年03月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 20 (3), 357 - 365, 英語

    [査読有り]

    研究論文(学術雑誌)

  • FABRICATION OF GOLD NANOPARTICLE-EMBEDDED NANOCHANNELS FOR SURFACE-ENHANCED RAMAN SPECTROSCOPY

    Keisuke Suekuni, Toshimitsu Takeshita, Koji Sugano, Yoshitada Isono

    A micro/nanofluidic device including linearly-arranged gold nanoparticles embedded into nanochannels was developed toward highly-sensitive Surface-Enhanced Raman Spectroscopy (SERS) of multicomponent analysis with low background signal. The nanochannels array was fabricated by a "photo" - lithography-based process without costly and time-consuming process such as an electron beam lithography and a focused-ion-beam etching. Then particles with diameters of 100 nm are linearly arranged into the nanochannels by a nanotrench-guided self-assembly process followed by microchannel fabrication for introducing solutions. The device was successfully fabricated and it was evaluated for SERS. The fabricated structure was active for SERS analysis with 4,4'-bypiridine as a target molecule.

    IEEE, 2014年, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 1059 - 1062, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • DIRECT MEASUREMENT OF SHEAR PIEZORESISTANCE COEFFICIENT ON SINGLE CRYSTAL SILICON NANOWIRE BY ASYMMETRICAL FOUR-POINT BENDING TEST

    Taiki Kimura, Naoki Saito, Toshimitsu Takeshita, Koji Sugano, Yoshitada Isono

    This research evaluated the shear piezoresistance property of p-type single crystal silicon nanowire (SiNW) by the asymmetrical four-point bending (AFPB) technique proposed by the authors [1]. We fabricated the p-type SiNW on the AFPB test specimen with "V"-shaped notches (V-notches) made of single crystal silicon. Bending the specimen by the asymmetrical four point-supports, simple shear stress can be produced at the center of the specimen. Consequently, we have succeeded in evaluating the shear piezoresistance coefficient of SiNW directly, which was found to be pi(44)=203 x 10(-11) Pa-1 at an impurity concentration of 7.3 x 10(18) cm(-3). This value is 2.1 times larger than that of p-type piezoresistors used in conventional piezoresistance sensors on a micrometer scale. The proposed evaluation technique and obtained result will be effective for design application of high-sensitivity mechanical sensors integrating SiNW piezoresistance elements.

    IEEE, 2014年, 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 600 - 603, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    Vibration coupling in out-of-plane resonators was investigated to design low acceleration sensitivity tuning fork gyroscopes (TFGs) of out-of-plane sensing axis type. Numerical and theoretical analysis was carried out on a spring-coupled translational x-axis TFG. The vibration coupling was controlled by separating the in-phase mode ( fin) from anti-phase mode ( fanti). The theoretical and numerical analysis showed that the acceleration sensitivity is inversely proportional to decoupling ratio, whereas the angular rate sensitivity does not change by keeping the fanti constant. For experimental verification, we designed four types of coupled resonators and fabricated them from SOI wafer: two of them are frame-coupled and the other two are spring-coupled. In each coupling type, one adopted a translational resonator and the other adopted a torsional resonator. The measured anti-phase vibration amplitude against in-phase oscillation decreased by weakening coupling which agreed with the numerical analysis. As decoupling ratio (=( fin - fanti)/ fanti) of the spring-coupled translational resonator increased from 0.09 to 0.29, the anti-phase vibration amplitude in the analysis and measurement decreased to 28% and 51%, respectively.

    Institute of Electrical Engineers of Japan, 2014年, IEEJ Transactions on Sensors and Micromachines, 134 (12), 392 - 399, 英語

    [査読有り]

    研究論文(学術雑誌)

  • On-chip Fabrication of Alkali-Metal Vapor Cells utilizing an Alkali-Metal Source Tablet

    Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata

    2013年09月, Journal of Micromechanics and Microengineering, 23 (11), 115003, 英語

    [査読有り]

    研究論文(学術雑誌)

  • MEMSネガレジストの粗視化分子動力学シミュレーション

    平井 義和, 柳生 裕聖, 牧野 圭秀, 上杉 晃生, 菅野 公二, 土屋 智由, 田畑 修

    2013年08月, 電気学会論文誌E(センサ・マイクロマシン部門誌), 133 (8), 320 - 329, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection

    Koji Sugano, Hiroshi Katayama, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    2013年06月, Proceedings of The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2013), 1807 - 1810, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon

    Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2013年06月, Proceedings of The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers2013), 1946 - 1949, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    A novel sealing technique using sacrificial microchannels was proposed for control of an atmosphere in a micromachined alkali metal vapor cell for a chip-scale atomic magnetometer. The microchannels act as a feedthrough connecting the cell to the outside atmosphere during evacuation and gas filling steps, and eventually they are sealed by glass-frit reflow. A silicon microchannel was designed and sealing by glass-frit reflow was successfully demonstrated in reflow experiments. Simulation results clarified the glass-frit reflow characteristics and their dependence on cross-sectional shapes of the microchannels. Hermeticity of the proposed sealing technique at a leak rate of less than 10-12 Pa·m3/s was verified by a high-resolution helium leak test. © 2013 Wiley Periodicals, Inc.

    2013年05月, Electronics and Communications in Japan, 96 (5), 58 - 66, 英語

    [査読有り]

    研究論文(学術雑誌)

  • T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata, O. Tabata

    A new integration technique of Deoxyribonucleic acid (DNA) origami as an excellent platform to arrange various nanomaterials such as metallic nanoparticles, carbon nanotubes and proteins and so on with nanometer scale resolution into MEMS utilizing DNA hybridization of a complementary pair of single-strand DNAs (ssDNAs) was demonstrated. A contact-mode atomic force microscopy (AFM) based lithography was adopted to form ssDNA modified patterns into an organic thin film with 30 nm resolution on a silicon substrate. A newly designed DNA origami (30 nm × 150 nm) with ssDNA as sticky ends was successfully fixed at specific positions of the substrate by DNA hybridization. © 2013 IEEE.

    2013年04月02日, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 307 - 310

  • Yoshikazu Hirai, Hiromasa Yagyu, Yoshihide Makino, Akio Uesugi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports on a newly developed coarse-grained molecular dynamics simulation for epoxy-based chemically-amplified photoresist dedicated to MEMS. To analyze photoresists material properties, Kremer-Grest model (bead-spring model) with an extended angle bending potential was newly employed. A uniaxial elongation simulation and the molecular diffusion simulation were performed to analyze the dependence of an elastic modulus and a molecular permeability on the cross-linked ratio of a photoresists, since these characteristics are important for a permeable membrane made of photoresist to control biological molecules diffusion in biomedical applications. The simulated dependencies of the elastic modulus and the molecular permeability on the cross-linked ratio of photoresists showed good correspondences with the experimental results. This suggests a photoresists membrane can be used as a molecular permeable membrane with controllable permeability by varying photolithography process parameters. © 2013 The Institute of Electrical Engineers of Japan.

    2013年, IEEJ Transactions on Sensors and Micromachines, 133 (8), 1 - 329, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • 上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    We report the effects of surface damage and crystal orientation on fracture strength of single crystal silicon (SCS) by means of tensile test using electrostatic-force grip. The specimens of three major crystal orientations fabricated from (110) SOI wafer were characterized with different surface morphologies prepared by the specimen patterning process. Our specimen patterning process was composed of Bosch process and wet etching process for surface residue removal. We changed processing time and sequence of the two processes to get different surface morphologies. As result of uni-axial tensile test of 9 types of specimens (length: 120 μm, width: 5 μm, thickness: 5 μm), i.e. specimens of 3 crystal orientations with 3 different surface morphologies, improvement of surface morphology doubled average tensile strength: e.g. < 110> strength varied from 1.8 GPa to 3.6 GPa, while average tensile strength difference among crystal orientations was less than 20 % on each fabrication conditions. The fracture surfaces mainly consisted of (111) plane. We found tensile fracture characteristics of 3 crystal orientations: in < 100> specimens the fracture origin location changed by the fabrication conditions, while < 110> and < 111> specimens respectively showed quantitative relationships between surface morphology and tensile strength common to different fabrication conditions. These results are beneficial for tensile strength prediction from surface morphology. © 2013 The Japan Society of Mechanical Engineers.

    2013年, 日本機械学会論文誌A編, 79 (804), 1191 - 1200, 日本語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    The mechanical properties of an epoxy-based chemically amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the Kremer-Grest model with an extended angle bending potential depends on the cross-linking ratio, its dependency exhibits good agreement with that determined by nanoindentation tests. (c) 2012 Elsevier Ltd. All rights reserved.

    ELSEVIER SCI LTD, 2012年09月, POLYMER, 53 (21), 4834 - 4842, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam

    Compliance detection becomes very essential in minimally invasive surgery (MIS). It can help in detection of cancerous lumps and/or for deciding on tissue healthiness. In this paper, a micromachined piezoresistive tactile sensor, with two serpentine springs and 500-mu m cubic mesas, has been designed for detecting the compliance of soft tissue independent of the applied distance between the sensor and the tissue. The measuring range of the sensor is chosen to be associated with the soft-tissue properties. The sensor parameters are optimized to give high sensitivity and linearity of the sensor output. The design is simulated using ANSYS for checking the sensor performance. Then, the sensor is fabricated and tested by three types of specimens, namely, specimen chips with known stiffness, silicone rubber specimens, and chicken organ specimens (leg and heart). For the specimen chips and silicone rubber specimens, the sensor distinguished between different stiffnesses independent of the applied displacement in the range of 50-200 mu m. The sensor measured Young's modulus up to 808 kPa with an average error of +/- 7.25%. For the chicken leg and heart, the sensor distinguished between them under the applied displacement from 100 to 200 mu m, and they were calculated as 12 +/- 1 kPa and 81 +/- 8 kPa, respectively. [2011-0213]

    IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2012年06月, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21 (3), 635 - 645, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    The frequency response of in-plane coupled resonators is used for investigating the acceleration sensitivity of a MEMS tuning fork gyroscope (TFG) and a new method of suppressing the acceleration output is presented. The unbalancing of two sense resonators in the TFG caused by fabrication errors converted an external vibration into anti-phase mode excitation. To reduce the acceleration output, decoupling between in- and anti-phase modal frequencies [decoupling ratio (DR)] is crucial, since coupled resonators may cause large anti-phase vibrations from the acceleration. The acceleration output model was verified using two coupled resonators with 1 and 5 % stiffness unbalance. FEM simulation results showed a 25 % reduction in the anti-phase vibration by increasing the decoupling ratio from 0.09 to 0.29, irrespective of the coupled resonators designs. Quantitative analysis of a TFG based on coupled resonators with 1 % stiffness unbalance showed the acceleration output decreased from 5.65 to 1.43 deg/s/g.

    SPRINGER, 2012年06月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 18 (6), 797 - 803, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata

    In this paper, we report a test stand device for tensile testing nanoscale materials and its application to testing of a fullerene wire. We have developed an electrostatic microelectromechanical-systems tensile testing device which has a comb drive actuator to apply tensile force to a specimen and two capacitances for sensing the displacement to measure the elongation and applied force of the specimen. The force and displacement measurement resolutions have been demonstrated as 2 nN and 0.2 nm, respectively. A freestanding fullerene wire which was about 16 mu m long, 2 mu m wide, and 40 nm thick was integrated on the device, and the tensile testing of the wire was successfully demonstrated with nano-order resolutions. Measured Young's modulus and tensile strength of the wire were 5.9 GPa and 17 MPa, respectively. [2011-0257]

    IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2012年06月, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 21 (3), 523 - 529, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Tatsuya Kataoka, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    In this paper, we report on a method to assemble and clamp single walled carbon nanotubes (SWCNTs) mechanically and electrically on patterned electrodes for developing a new tensile testing method which achieves SWCNT mechanical characterization with high throughput. Electrical transport measurement on assembled SWCNTs was conducted in order to characterize clamping property. Theoretical analysis based on the obtained result reveals that the proposed mechanical clamp is sufficiently strong to conduct tensile testing of SWCNT. © 2012 The Institute of Electrical Engineers of Japan.

    Institute of Electrical Engineers of Japan, 2012年, IEEJ Transactions on Sensors and Micromachines, 132 (5), 108 - 113, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    We conducted uni-axial tensile test using electrostatic-force grip on thin film single crystal silicon of < 110> direction. The specimens were fabricated on (110) SOI wafer (length: 120 μm, width: 5 μm, thickness: 5 μm) and went through 3 different conditions of patterning process composed of Bosch process and wet etching process for surface residue removal. As a result, improvement of surface morphology brought increase of average tensile strength from 1.9 GPa to 3.6 GPa. SEM observation of fractured specimens suggests that, regardless of processing conditions, relationship between tensile strength and the top-view length of (110) crystal plane of specimens can be expressed with a common equation. © 2012 The Institute of Electrical Engineers of Japan.

    Institute of Electrical Engineers of Japan, 2012年, IEEJ Transactions on Sensors and Micromachines, 132 (9), 320 - 321, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング

    片岡 達哉, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2012年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 132-E (5), 108 - 113, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • 加工条件の異なる(110)<110>単結晶シリコン薄膜の引張試験

    上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2012年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 132-E (9), 320 - 321, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    A novel sealing technique using sacrificial microchannels was proposed for atmosphere control in a micromachined alkali gas-filled cell for a chip scale atomic magnetometer. The microchannels act as feedthrough connecting the cell to outside atmosphere during evacuation and gas-filling steps, and eventually they are sealed by glass-frit reflow. Si microchannel dedicated as a sacrificial microchannel was proposed and its feasibility was successfully demonstrated by experiments. The simulation results clarified the glass-frit reflow characteristics and its dependence on cross-sectional shape of the microchannel. Hermeticity of the proposed sealing technique of less than 10 -12Pa·m3/s leak rate was verified by a high resolution helium leak test. © 2011 The Institute of Electrical Engineers of Japan.

    2011年, IEEJ Transactions on Sensors and Micromachines, 131 (7), 251 - 257, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique

    K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

    2011年, International workshop on micro/nano-engineering, 12, 17 - 18, 英語

    [査読有り]

  • チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術

    辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2011年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 131-E (7), 251 - 257, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer

    Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata

    We successfully demonstrated pattern formation of 60 nm gold nanoparticles using a highly productive combined technique of particle self-assembly and subsequent assembled particle pattern transfers. Dot and line patterns of nanoparticles were fabricated on a template substrate (SiO2/Si) utilizing template-assisted self-assembly (TASA). The obtained dot and line patterns of nanoparticles were transferred to a flexible poly-dimethylsiloxane (PDMS) substrate (the first transfer) and were subsequently transferred onto a gold thin film fabricated on a silicon substrate (the second transfer). We defined a yield of self-assembly as a ratio of the properly assembled area to the total dot-patterned area, and investigated the dependence of the yield on the experimental conditions such as the cross-sectional profiles of the template trench pattern, the concentration of the aqueous particle dispersion, and the cleaning process. It was confirmed that the yield is mainly governed by the width of the template trench. Under optimized conditions, a self-assembly yield of 79% was obtained. The flexible PDMS substrate was used for the first transfer step of the assembled particle pattern and an average yield of 58% was achieved. The second transfer yield onto the gold thin film was 93% using surface-activation bonding between the gold surfaces of the nanoparticles and the thin film. The developed process achieved high patterning accuracy and the misalignment of the dot pattern with the interval of 300 nm was 3.2% on average.

    MYU, SCIENTIFIC PUBLISHING DIVISION, 2011年, SENSORS AND MATERIALS, 23 (5), 263 - 275, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata

    Gold nanoparticles with diameters of a few tens of nanometer and a narrow size distribution were synthesized using a pulsed mixing method with a microfluidic system which consists of a Y-shaped mixing microchannel and two piezoelectric valveless micropumps. This mixing method enables control of the mixing speed of gold salts and reducing agent by changing the switching frequency of the micropumps, which was our focus to improve the particle size distribution, which is an essential parameter in gold nanoparticle synthesis. In the proposed method, the mixing time was inversely proportional to the switching frequency and the minimum mixing time was 95 ms at a switching frequency of 200 Hz. During synthesis experiments, the mean diameter of the synthesized gold nanoparticles was found to increase, and the coefficient of variation of particle size was found to decrease with decreasing mixing time. We successfully improved the coefficient of variation to less than 10% for a mean diameter of around 40 nm.

    SPRINGER HEIDELBERG, 2010年12月, MICROFLUIDICS AND NANOFLUIDICS, 9 (6), 1165 - 1174, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports on a novel and simple 3-D fabrication technique of microstructures embedded in a single-layer negative resist. The proposed technique allows one the fabrication of an embedded microstructure with a single exposure and the subsequent development process. The unique feature of the proposed fabrication technique is the development method which enables the rapid fabrication of polymer-based microfluidic systems with relatively large areas but with micrometer-sized features. For example, features of microchannels, on the order of 100 mu m in width and 50 mm in length, sufficient for microfluidic systems, were successfully fabricated with a relatively short (< 20 min) development time. These features are realized by the interesting physical response of the top-membrane to the developer; the developer permeates through the top-membrane region made of semi-cross-linked photoresist, and the permeated developer dissolves the uncross-linked photoresist at the same time. As a step toward the practical use of the proposed development method, process parameter sets (exposure dose, postexposure bake (PEB) time, and temperature) related to the cross-linking reaction of the top-membrane region were investigated by employing the cross-linking reaction model describing the chemical reaction during the UV exposure and the PEB. Through a series of experiments, 1) a criterion of process parameter sets for the fabrication of centimeter-long embedded microchannels was obtained, and 2) the applicability to polymer-based microfluidic systems was successfully demonstrated.

    IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2010年10月, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 19 (5), 1058 - 1069, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    The present paper describes a three-dimensional (3D) thick-photoresist microstructuring technique that exploits the effect of exposure wavelength on dissolution rate distributions in a thick-film diazonaphthoquinone (DNQ) photoresist. In fabricating 3D microstructure with specific applications, it is important to control the spatial dissolution rate distribution in the photoresist layer, since the lithographic performance for 3D microstructuring is largely determined by the details of the dissolution property. To achieve this goal, the effect of exposure wavelength on dissolution rate distributions was applied for 3D microstructuring. The parametric experimental results demonstrated (1) the advantages of the fabrication technique for 3D microstructuring and (2) the necessity of a dedicated simulation approach based on the measured thick-photoresist property for further verification. Thus, a simple and practical photolithography simulation model that makes use of the Fresnel diffraction theory and an empirically characterized DNQ photoresist property was adopted. Simulations revealed good quantitative agreement between the photoresist development profiles of the standard photolithography and the moving-mask UV lithography process. The simulation and experimental results conclude that the g-line (lambda = 436 nm) process can reduce the dimensional limitation or complexity of the photolithography process for the 3D microstructuring which leads to nanoscale microstructuring.

    IOP PUBLISHING LTD, 2010年06月, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 20 (6), 65005 (pp.1 - 13), 英語

    [査読有り]

    研究論文(学術雑誌)

  • Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    In this paper, we report on a component modeling of in-plane 2DOF comb transducer for equivalent circuit analysis of electrostatic MEMS. The proposed model does not depend on connected components such as voltage sources, external forces, and springs since the model contained a dummy spring that can detect the comb displacement in itself. Using the model, we can analyze not only small-signal ac response but also dc operating points which means that once the parameters are calculated for a comb transducer, we need not to change the model parameters by changing any connected components. This model was adapted to a 2DOF SOI resonator and the measured frequency responses agreed well with the simulated responses. © 2010 The Institute of Electrical Engineers of Japan.

    2010年, IEEJ Transactions on Sensors and Micromachines, 130 (9), 5 - 449, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Yuki Uchida, Toshiyuki Tsuchiya, Osamu Tabata

    In this study, we fabricated the microreactor which enables to control mixing speed and reaction temperature since their conditions are considered as essential parameters for chemical reduction method of gold nanoparticle synthesis. The microreactor consists of valveless micropumps and a microchannel for mixing and reaction. Mixing speed was controlled by the pulsed mixing method with two micropumps and reaction temperature was controlled by micro thin-film heater fabricated on the backside of a microchannel chip. Then, gold naoparticle was synthesized using the fabricated microreactor. The coefficient of variation decreased with increasing the mixing speed and the percentage of spherically-shaped particle increased with increasing the reaction temperature. Finally, the coefficient of variation of 15 % and the percentage of spherically-shaped particle of 100 % for the mean diameter of 65 nm were achieved. © 2010 The Institute of Electrical Engineers of Japan.

    2010年, IEEJ Transactions on Sensors and Micromachines, 130 (7), 5 - 299, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • 自己変位検出機能を有する面内2自由度静電櫛歯トランスデューサの等価回路

    徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2010年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 130-E (9), 443 - 449, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ

    菅野 公二, 内田 雄喜, 土屋 智由, 田畑 修

    2010年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 130-E (7), 292 - 299, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating

    Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata

    In this paper, we report the development of a new tensile tester operable at 800 degrees C using an infrared radiation heating method to evaluate the mechanical properties of thin films at high temperature. The tester uses an electrostatic grip system for specimen chucking. We evaluated the grip force at high temperature and concluded that the electrostatic grip is effective up to 800 degrees C. Single-crystal silicon specimens of 3 mu M thickness and 4 gin width were tested at room temperature (RT) and 600 degrees C. At RT, the fracture strength and Young's modulus were 3.33 and 163.2 GPa, respectively. At 600 degrees C, they were 2.71 and 151.8 GPa, respectively. The stress and stage displacement curves at 600 degrees C with lower strain rate showed yield points and the fractured specimens exhibited slip lines.

    MYU, SCIENTIFIC PUBLISHING DIVISION, 2010年, SENSORS AND MATERIALS, 22 (1), 1 - 11, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment

    TSUCHIYA Toshiyuki, YAMAJI Yusuke, SUGANO Koji, TABATA Osamu

    2010年, Experimental Mechanics, 50 (4), 509 - 516, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata

    We report a fabrication of doubly supported free-standing buckminster fullerene (C60) nanowires onto single crystal silicon microstructures in order to demonstrate an integration of carbon nanomaterials to surface-micromachined microelectromechanical devices. By irradiating vacuum-deposited C60 film with an electron beam, polymerized C 60 nanowires were patterned. Free-standing structures of the C 60 nanowires were obtained by sacrificial etching of underlying silicon structures using XeF2 gas. The supporting 5-μm thick silicon structure was released using vapor hydrofluoric acid. The C60 nanowire of 2-μm width, 25-μm length, and 40-nm thickness connected to a movable single crystal silicon structure was successfully fabricated. © 2009 Society of Photo-Optical Instrumentation Engineers.

    SPIE, 2009年, Journal of Micro/Nanolithography, MEMS, and MOEMS, 8 (1), 英語

    [査読有り]

    研究論文(学術雑誌)

  • A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam

    A micro-machined piezoresistive type tactile sensor (5mm x 6mm), composed of two zigzag structures which act as spring, with 500 mu m cubic contact mesas at their tips, has been fabricated for detecting compliance of soft tissue. The concept of applying two springs, with considerably different stiffnesses, to soft tissue for compliance detection has been chosen to get output reading independent of the applied pushing distance between the sensor and the tissue. The testing process is done by three ways; by subjecting the sensor to 1-specimen chips with known stiffness, 2-silicone rubber, 3-chicken organs; namely heart, liver and leg.

    ELSEVIER SCIENCE BV, 2009年, PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 1 (1), 84 - +, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • MicroChannel Embedded in Glass-Frit Layer Bonding for Gas-Filled Sealed Cavity

    Yoshikazu Hirai, Hideaki Yoshimune, Kazuya Tsujimoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2009年, The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2009), Saskatoon ,Canada, 153 - 154, 英語

    [査読有り]

  • Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

    Direct stiffness calibration of microelectromechanical-system (MEMS) springs made of single-crystal silicon was performed using a previously developed mechanical force measurement tool. The spring devices used for calibration were fabricated from silicon-on-insulator wafers and contained one or four folded-beam springs. The spring constants were directly measured using an electromagnetic force-feedback balance with a force resolution of about 0.2 mu N. The average measured spring constant of a folded-beam spring with a designed constant of 0.7 N/m was 0.58 N/m. This successful calibration shows that this tool can be used to calibrate various kinds of MEMS flexible structures. (C) 2007 Elsevier B.V. All rights reserved.

    ELSEVIER SCIENCE SA, 2008年05月, SENSORS AND ACTUATORS A-PHYSICAL, 143 (1), 136 - 142, 英語

    [査読有り]

    研究論文(学術雑誌)

  • 超小型触覚ディスプレイ用垂直駆動SMA 薄膜アクチュエータの設計

    吉川 弥, 篠部 晃生, 菅野 公二, 土屋 智由, 石田 章, 田畑 修

    2008年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 128-E (4), 151 - 160, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam

    A detailed design procedure for a tactile sensor for compliance detection is developed. The sensor principle is based on the concept of applying two springs, with considerably different stiffnesses, to soft tissue for compliance detection. The spring stiffnesses are chosen to be associated with the soft tissue properties. The sensor design parameters are optimized to give high sensitivity and linearity of the sensor output with taking into account the effect of crosstalk between two springs due to the tissue deformation. A finite element model is developed to investigate the sensor performance with the designed parameters using two types of spring end, namely cubic and spherical in shape. The results show a significant stability of reading with the cubic end rather than the spherical one during pushing the sensor against a tissue. Finally, the same finite element model is used with changing the distance between the spring ends to show the crosstalk effect due to the tissue deformation. © 2008 The Institute of Electrical Engineers of Japan.

    2008年, IEEJ Transactions on Sensors and Micromachines, 128 (5), 186 - 192, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara

    We theoretically and experimentally evaluated the damping effect in a rotational resonator with a comb-drive actuator and sensor. The resonator was fabricated from an SOI wafer and has a fan-shaped mass. The underlying substrate was removed using back side deep reactive ion etching. One set of comb electrodes was attached to each side of the mass: one for electrostatic driving and the other for capacitive detection. In our theoretical analysis, the dynamics of the resonator were simplified so that they could be represented by a lumped system. In this lumped system, the damping coefficient was estimated by assuming the damping to be slide film damping and the air flow to be a Stokes flow. The phase shift due to the slide film damping of thick air layers was included in the lumped system. In the experimental evaluation, one side of the rotational combs was removed step-by-step and a half of the mass using a laser trimming tool so that the individual damping effects caused by the comb electrodes and mass could be determined quantitatively. We compared the experimental results with the results of the theoretical analysis and found that the difference in the damping coefficients between the experimental results and results of the theoretical analysis was less than 40%. © 2008 The Institute of Electrical Engineers of Japan.

    2008年, IEEJ Transactions on Sensors and Micromachines, 128 (5), 203 - 208, 英語

    [査読有り]

    研究論文(学術雑誌)

  • 日下部達哉, 種村友貴, 樋口雄一, 菅野公二, 土屋智由, 田畑修

    2008年, 粉体工学会誌, 45 (3), 156 - 161

  • Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer

    Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    We propose a method of sub-micro particle pattern formation with high productivity, flexibility and accuracy of pattern. The proposed process is composed of Template-Assisted Self-Assembly (TASA) for particle self-assembly and subsequent two-step transfer of the assembled particles. In the self-assembly process, the pattern of 70 % was successfully self-assembled. In the first transfer step, the transfer yield of 79 % was obtained by SAM (Self-Assembled Monolayer) coated carrier substrate. In the second transfer step, the transfer temperature of 115 degrees C provided the maximum transfer yield of 85 %. The overall process yield of 48 % was achieved by optimized process parameters and it was successfully demonstrated that the proposed method fabricates any sub-micro particle pattern.

    IEEE, 2007年, PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 594 - 597, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • 2種類の液滴の界面張力を用いた逐次積層セルフアセンブル

    樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修

    2007年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 127-E (4), 214 - 220, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Hiromasa Yagyu, Koji Sugano, Shigehiko Hayashi, Osamu Tabata

    IOP Publishing, 2005年06月01日, Journal of Micromechanics and Microengineering, 15 (6), 1236 - 1241, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Osamu Tabata

    IOP Publishing, 2002年11月01日, Journal of Micromechanics and Microengineering, 12 (6), 911 - 916, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Osamu Tabata

    Springer Science and Business Media LLC, 2002年11月01日, Microsystem Technologies, 9 (1-2), 11 - 16, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Osamu Tabata

    A new technique to control selectivity of mask materials during XeF2 etching was proposed. By exposing Si sample with SiO2 and Si3N4 as mask materials to UV light of 981 mW/cm2 during XeF2 etching, the etching rate ratios of Si/SiO2 and Si/Si3N4 were dramatically decreased from 11446 to 906.1 and from 488.2 to 29.3, respectively. This new technique allows us to remove the mask material selectively and change the mask pattern by UV light exposure during in-situ etching process without additional photolithography step and opens a new silicon micromachining process for 3-dimensional fabrication. The multi-step Si structure was successfully realized by this technique. Keywords: XeF2, 3-dimentuional microstructure, ultra violet light, selectivity. © 2001, The Institute of Electrical Engineers of Japan. All rights reserved.

    2001年, IEEJ Transactions on Sensors and Micromachines, 121 (12), 647 - 651, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Naoki Kondo, Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

    2022年04月, Microsystem Technologies, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Integration of silicon nanowire bridges in microtrenches with perpendicular bottom-up growth promoted by surface nanoholes

    Akio Uesugi, Shusuke Nishiyori, Tatsuya Nakagami, Koji Sugano, Yoshitada Isono

    2022年01月, Japanese Journal of Applied Physics, 英語

    [査読有り]

    研究論文(学術雑誌)

MISC

  • プラズモニック構造のバイオ・ケミカルセンシング応用

    菅野 公二

    2017年06月, 電気学会誌, 137 (6), 354 - 357, 日本語

    [査読有り][招待有り]

    記事・総説・解説・論説等(学術雑誌)

  • 単一金ナノ粒子二量体を用いたアデニンの表面増強ラマン分光検出 (フィジカルセンサ マイクロマシン・センサシステム 合同研究会 メタマテリアル・プラズモニック構造を基軸とする新機能創成)

    丸岡 克成, 池上 晃平, 菅野 公二, 磯野 吉正

    電気学会, 2016年12月19日, 電気学会研究会資料. PHS, 2016 (58), 43 - 46, 日本語

  • Si薄膜被覆金ナノワイヤアレイ構造の光学特性評価 (フィジカルセンサ マイクロマシン・センサシステム 合同研究会 メタマテリアル・プラズモニック構造を基軸とする新機能創成)

    新居 直之, 城谷 修司, 菅野 公二, 磯野 吉正

    電気学会, 2016年12月19日, 電気学会研究会資料. MSS, 2016 (27), 1 - 3, 日本語

  • 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光

    菅野 公二, 松井 大門, 土屋 智由, 田畑 修

    2014年10月, 第31回「センサ・マイクロマシンと応用システム」シンポジウム, 20pm1-B1, 日本語

  • J2240304 非対称四点曲げ試験法による単結晶シリコンナノワイヤのせん断ピエゾ抵抗係数の直接計測([J224-03]『マイクロ・ナノ機械の信頼性』のための材料創製・測定・解析技術 シリコンの破壊と疲労)

    竹下 俊光, 木村 大気, 菅野 公二, 磯野 吉正

    This research evaluated the shear piezoresistance property of p-type single crystal silicon nanowire (SiNW) by the asymmetrical four-point bending (AFPB) testing proposed by the authors. We fabricated the p-type SiNW on the AFPB specimen with "V"-shaped notches (V-notches) made of single crystal silicon. Bending the specimen by the asymmetrical four point-supports, simple shear stress can be produced at the center of the specimen. Consequently, we have succeeded in evaluating the shear piezoresistance coefficient of SiNW directly, which was found to be π_<44>=203.28×10^<-11> Pa^<-1> at an impurity concentration of 4×10^<18> cm^<-3>. This value is 2.1 times larger than that of p-type piezoresistors used in conventional piezoresistance sensors on a micrometer scale. The proposed evaluation technique and obtained result will be effective for design application of high-sensitivity mechanical sensors integrating SiNW piezoresistance elements.

    一般社団法人日本機械学会, 2014年09月07日, 年次大会 : Mechanical Engineering Congress, Japan, 2014, "J2240304 - 1"-"J2240304-5", 日本語

  • 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価

    菅野公二, 松井大門, 土屋智由, 田畑修

    2014年05月, 平成26年度電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会), 電気学会, MSS-14-011, 日本語

  • 強誘電体材料をエレクトレットとして用いたマイクロ環境発電デバイス

    菅野 公二

    日本板硝子材料工学助成会, 2014年, 財団法人日本板硝子材料工学助成会成果報告書 Nippon Sheet Glass Foundation for Materials Science and Engineering report, (35), 169 - 173, 日本語

  • 静電容量型SOI3軸加速度センサの角速度横感度

    中野篤, 平井義和, 菅野公二, 土屋智由, 田畑修

    2013年11月, 第30回「センサ・マイクロマシンと応用システム」シンポジウム, 電気学会, 6PM3-PSS-058, 日本語

  • (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性

    上杉晃生, 平井義和, 菅野公二, 土屋智由, 田畑修

    2013年09月, 日本機械学会2013年度年次大会, 日本機械学会, J211013, 日本語

  • 多段ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工

    鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修

    2013年09月, 日本機械学会2013年度年次大会, 日本機械学会, J211017, 日本語

  • ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル

    外薗洸佑, 鈴木淳也, 平井義和, 菅野公二, 土屋智由, 田畑修

    2013年09月, 日本機械学会2013年度年次大会, 日本機械学会, J211024, 日本語

  • 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価

    中野篤, 平井義和, 菅野公二, 土屋智由, 田畑修

    2013年08月, Dynamics and Design Conference 2013(D&D2013), 日本機械学会, 講演番号549, 日本語

  • Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography

    Y. Kato, Yoshikazu Hirai, F. van Kempen, F. van Keulen, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2013年04月, The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology, 192 - 193, 英語

  • 節付きBoschプロセスによるシリコン3層構造の作製

    北村彰男, 平井義和, 菅野公二, 土屋智由, 田畑修

    2013年03月, 平成25年電気学会全国大会, 191 - 192, 日本語

  • グレースケールDMD露光用3次元微細加工プロセスシミュレータ

    加藤義基, 平井義和, Floris van Kempen, Fred van Keulen, 菅野公二, 土屋智由, 田畑修

    2013年03月, 平成25年電気学会全国大会, 193 - 194, 日本語

  • 原子磁気センサのための新規なオンチップアルカリ金属蒸気セルの作製手法と評価

    辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2013年01月, 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編], 30, 6p, 日本語

  • 時間分解顕微ラマン分光のためのプルイン型MEMS光チョッパの動作特性 (2013年度年次講演会)

    谷山 彰, 小北 雄亮, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2013年01月, 日本実験力学会講演論文集, (13), 129 - 131, 日本語

    [査読有り]

  • 辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 藩 和宏, 水谷 夏彦, 田畑 修

    2013年01月, 電子情報通信学会ソサイエティ大会講演論文集, 2013, S - 28, 日本語

  • Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda

    The rotational motion effect on the sensitivity matrix of a MEMS three-axis accelerometer was evaluated to realize the concurrent calibration of multiple MEMS accelerometers using a multi-axis shaker. The stage position dependency on the sensitivity matrix of a single-mass capacitive SOI three-axis accelerometer was measured. We found that the rotational motions generated by the resonance of the shaker causes an acceleration error on the accelerometer and can be compensated by measuring it using gyroscopes. © 2013 IEEE.

    2013年, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 645 - 648, 英語

    [査読有り]

  • 粗視化分子動力学シミュレーションによる架橋度制御ネガレジストの分子透過係数解析

    柳生 裕聖, 平井 義和, 牧野 圭秀, 菅野 公二, 土屋 智由, 田畑 修

    2012年10月, 第29回「センサ・マイクロマシンと応用システム」シンポジウム, 371 - 374, 日本語

  • 単層カーボンナノチューブの MEMS 引張試験における顕微ラマン分光を用いたひずみ測定

    鈴木 淳也, 片岡 達哉, 平井 義和, 菅野 公二, 土屋智由, 田畑 修

    2012年10月, 第4回「マイクロ・ナノ工学シンポジウム」, OS7-3-5, 日本語

  • 702 3軸加速度センサのマトリックス感度校正における振動台回転運動の影響評価

    中野 篤, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修, 梅田 章

    The calibration method based on a vector space theory has been proposed for multi-axis accelerometers. In this method, acceleration generated from a 3-DOF vibration table and the output signal from calibration target accelerometers are treated as vector quantities and a calibration result is described as a matrix. This method has many advantages of short measurement time and cross sensitivity evaluation. In order to realize more efficient measurement, a simultaneous calibration technique is required. However, it is supposed that uncontrolled rotational motion of a 3-DOF vibration table generates position dependency on some of the elements of sensitivity matrix. This paper reports the effect of rotational motion on the vibration table in the sensitivity matrix calibration of an SOI capacitive 3-axis accelerometer. In order to clarify the rotation effect on sensitivity, we made a 6-DOF reference sensor in combination of 3 single axis accelerometers and 3 single axis gyros As a result, certain elements of the cross sensitivity show the position dependency at a 150Hz excitation, which could be near the resonant frequency of rotation. This result is explicable by approximate expression of sensitivity calculation.

    一般社団法人日本機械学会, 2012年09月18日, Dynamics & Design Conference, 2012, "702 - 1"-"702-10", 日本語

  • Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist

    Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2012年07月, The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012), ac12000168, 英語

  • 金ナノロッドの基板上成長によるナノギャップ電極の作製

    西野聡, 菅野公二, 平井義和, 土屋智由, 田畑修, 武中能子

    2012年06月11日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-12 (1-22), 29 - 32, 日本語

  • 高感度SERS分析に向けた銀ナノ粒子二量体の凝集反応解析

    片山拓, 菅野公二, 平井義和, 土屋智由, 田畑修

    2012年06月11日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-12 (1-22), 33 - 38, 日本語

  • Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes

    Praveen Thakur Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2012年04月, 2012 MRS Spring Meeting, San Francisco, B7.5, 英語

  • Temperature dependency of DNA origami self-assembly rate

    C. Huang, T. Akishiba, N. Tamura, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2012年03月, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 411 - 412, 英語

  • Fabrication of nanogap electrodes by gold nanorod growth on substrate

    S. Nishino, Y. Takenaka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2012年03月, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 652 - 653, 英語

  • Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics

    H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2012年03月, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 999 - 1000, 英語

  • Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer

    T. Kataoka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2012年03月, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 335 - 336, 英語

  • 自己変位検出型静電櫛歯等価回路モデルを用いたMEMS振動ジャイロ解析

    徳崎裕幸, 平井義和, 菅野公二, 田畑 修, 土屋智由

    2012年03月, 応用物理学会 第59回 応用物理学関係連合講演会, 0, 日本語

  • Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata

    The article presents a new equivalent circuit model of electrostatic comb transducers for an integration of MEMS into LSI. The model detects the displacement using a dummy spring to express the current induced by the movement, and the model parameters can be derived from only its dimensions not from external parameters, such as acting force and applied voltage. In addition, being composed from basic circuit components, the model is easily utilized in conventional circuit simulation software. The in-plane two-degree-of-freedom comb model was applied to a simple SOI coupled resonator and the measured and simulated electrical and mechanical properties showed good agreement with each other. The model was also applied to a decoupled two-axis resonator for a vibrating gyroscope made on silicon-on-glass substrate. Frequency tuning and oscillating circuit with constant amplitude control have been tested and the tuning results and transient responses showed good agreement as well. © 2012 IFIP International Federation for Information Processing.

    2012年, IFIP Advances in Information and Communication Technology, 379, 94 - 109, 英語

  • Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    A unique simulation method of epoxy-based chemically-amplified resist by coarse-grained molecular dynamics was proposed. The mechanical properties of an epoxy-based chemically-amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the bead-spring model with an extended angle bending potential depends on the cross-linking ratio its dependency exhibits good agreement with that determined by nanoindentation tests. © 2012 Materials Research Society.

    2012年, Materials Research Society Symposium Proceedings, 1415, 59 - 64, 英語

    [査読有り]

  • A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya

    Equivalent circuit analysis for electrostatic nonlinear resonators was conducted for evaluating the efficiency of vibrating energy harvesting devices. Non-linear models for a parallel plate capacitor and doubly clamped beam as well as a non-linear response analysis method on a spice tool have been developed. Measurements from fabricated resonators were in good agreement with output from simulation models. These models were applied for evaluating the efficiency of nonlinear resonators as energy harvesters but no significant improvement compared to linear resonators was obtained. © 2012 IEEE.

    2012年, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1213 - 1216, 英語

    [査読有り]

  • Hiromasa Yagyu, Yoshikazu Hirai, Yoshihide Makino, Koji Sugano, Tsuchiya Toshiyuki, Osamu Tabata

    Biocompatible permeable membranes integrated with a microfluidic system, which allow the diffusion of biological molecules with certain molecular weight, are desirable in biomedical applications. This paper reports on a molecular level study of the molecules permeability of epoxy-based chemically-amplified photoresists in MEMS by employing a coarse-grained molecular dynamics simulation. For analyzing diffusion coefficient of molecular in photoresists, Kremer-Grest model (bead-spring model) with an extended angle bending potential was employed. The simulation results show that, with increasing the cross-linked ratio of photoresists, the diffusion coefficient of small molecules in photoresist have larger diffusion coefficient, and which suggests photoresist membrane can be used as permeable membranes with controllable permeability by varying photolithography parameters. (C) 2012 Elsevier Ltd.... Selection and/or peer-review under responsibility of the Symposium Cracoviense Sp. z.o.o.

    ELSEVIER SCIENCE BV, 2012年, 26TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS, EUROSENSOR 2012, 47, 402 - 405, 英語

    [査読有り]

  • Koji Sugano, Akihiro Nakata, Hideaki Yoshimune, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    In this study, we proposed a novel mixing method using alternate pulsed flows from three inlet channels using three piezoelectric valveless micropumps. Two solutions are assigned into one micropump and the other two micropumps, respectively. The fabricated microfluidic device consists of a cross-shaped mixing channel with three inlet microchannels and three valveless micropumps. According to the experimental results, it was confirmed that the pulsed mixing using three inlet microchannels increased mixing speed with increasing the switching frequency of the micropump driving up to 200 Hz. The proposed method solved the problem of a bias of concentration ratio near the sidewalls which has happened in the previous pulsed mixing method using T- or Y-shaped microchannel with two inlet microchannels. Furthermore, by controlling a solution flow at the confluent area utilizing a reverse flow of the micropump, the mixing speed dramatically increased and the mixing time of 3.6 ms for 90 % mixing ratio was achieved at the micropumps switching of 400 Hz.

    AMER SOC MECHANICAL ENGINEERS, 2012年, FLUID MEASUREMENTS AND INSTRUMENTATION CAVITATION AND MULTIPHASE FLOW ADVANCES IN FLUIDS ENGINEERING EDUCATION MICROFLUIDICS, VOL 2, 2, 365 - 369, 英語

    [査読有り]

  • Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist

    Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2011年12月, Proceedings of International Workshop on Micro/Nano-Engineering, 88

  • 微細加工技術を応用したチップスケール原子磁気センサ用気密封止技術

    平井義和, 辻本和也, 菅野公二, 土屋智由, 田畑修

    2011年11月21日, 電気学会電子回路研究会資料, ECT-11 (102-112), 7 - 11, 日本語

  • 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング

    片岡達也, 平井義和, 菅野公二, 土屋智由, 田畑修

    2011年09月, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 107 - 110, 日本語

  • MEMS厚膜ネガレジストの粗視化分子動力学モデル

    平井義和, 柳生裕聖, 上杉晃生, 牧野圭秀, 菅野公二, 土屋智由, 田畑修

    2011年09月, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 334 - 339, 日本語

  • ナノトレンチテンプレートを用いたナノギャップ制御可能なナノ粒子セルフアセンブリ

    菅野公二, 平岡亮二, Martin Klaumnzer, Michael Voigt, Wolfgang Peukert, 土屋智由, 田畑 修

    2011年09月, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 149 - 153, 日本語

  • ナノギャップ電極の作製に向けた金ナノロッドの基板上成長

    西野聡, 菅野公二, 武仲能子, 田畑修, 土屋智由, 平井義和

    2011年09月, 日本化学会第63回コロイドおよび界面化学討論会, 289, 日本語

  • エポキシ系ネガレジスト機械的特性の架橋度依存性

    上杉晃生, 牧野圭秀, 柳生裕聖, 平井義和, 菅野公二, 土屋智由, 田畑修

    2011年09月, 日本機械学会2011年度年次大会, J161021, 日本語

  • ナノトレンチを用いた高精度・高収率金ナノ粒子セルフアセンブル

    菅野公二, 平岡亮二, 平井義和, 土屋智由, 田畑修

    2011年07月01日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-11 (1-7.9-12.14-21), 83 - 86, 日本語

  • 高速脈動混合マイクロ流体デバイスを用いた金ナノ粒子の合成

    菅野公二, 吉宗秀晃, 中田哲博, 平井義和, 土屋智由, 田畑修

    2011年07月01日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-11 (1-7.9-12.14-21), 73 - 78, 日本語

  • 大変位による非線形応答を考慮した静電櫛歯型MEMSデバイスの電気等価回路の構築

    北村彰男, 平井義和, 菅野公二, 土屋智由, 田畑修

    2011年07月01日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-11 (1-7.9-12.14-21), 31 - 36, 日本語

  • ガラスフリットリフローによる犠牲マイクロ流路気密封止技術の確立と小型原子磁気センサ実装への応用

    辻本和也, 平井義和, 菅野公二, 土屋智由, 田畑修

    2011年07月, 関西ワークショップ2011, エレクトロニクス実装学会,, No.11, 日本語

  • 電気等価回路を用いた静電櫛歯型MEMS振動子の非線形応答解析

    北村 彰男, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2011年06月, 平成23年度電気学会マイクロマシン・センサシステム部門総合研究会, 31 - 36, 日本語

  • Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane

    平井 義和, 上杉 晃生, 牧野 圭秀, 柳生 裕聖, 菅野 公二, 土屋 智由, 田畑 修

    2011年06月, The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011), 62 - 63, 英語

    [査読有り]

  • 高速脈動混合マイクロ流体デバイスを用いた均一粒子径金ナノ粒子の合成

    吉宗 秀晃, 中田 哲博, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2011年03月, 平成23年電気学会全国大会, 186 - 187, 日本語

  • Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity

    Thakur,Praveen Singh, 菅野 公二, 土屋 智由, 田畑 修

    2011年02月, The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems,, pp. 1297-1300, 1297 - 1300, 英語

    [査読有り]

  • Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata

    The paper presents a new equivalent circuit model of electrostatic comb transducers for large-scale integration of MEMS into LSI. The model detects the displacement using a dummy spring to express the current induced by the movement, and the model parameters can be derived from only its dimensions not from external parameters (acting force, applied voltage). In addition, the model is composed from basic circuit components. Therefore it is easily utilized in conventional circuit simulation software. In-plane two-degree-of-freedom comb model was applied to basic SOI resonator and the measured and simulated electrical and mechanical properties showed good agreement in each other. A simple oscillating circuit with constant amplitude control has been tested and the transient responses showed good agreement as well. © 2011 IEEE.

    2011年, 2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011, 208 - 213, 英語

    [査読有り]

  • Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    We report for the first time on a simple fabrication via UV photolithography for a free-standing filtration membrane made of epoxy-based photoresist and its integration on a multilevel microfluidic device. The fabrication process involves three-dimensional thick-photoresist microstructuring combined with standard negative photoresist processing. In this paper, a primary feature of membrane permeability dependence on fabrication process parameters was characterized by employing a cross-linking reaction model. The experiments using a multilevel microfluidic device demonstrated the proposed fabrication is capable of fabricating nano-filtration membrane while maintaining a sufficient mechanical strength for applications in polymer-based microfluidic devices. © 2011 IEEE.

    2011年, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 184 - 187, 英語

    [査読有り]

  • Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports transient equivalent circuit analysis for self-induced oscillation of micromechanical resonator using a novel component model of an electrostatic comb transducer. The model with built-in displacement detection can analyze dc operating points which depends on both on electrical and mechanical biases. By using the proposed model, we analyzed the bias voltage dependency of oscillation risetime and amplitude. From comparing the analysis and measurement of start-up transient response of an SOG (silicon-on-glass) resonator, we showed the proposed comb model facilitate designing and estimate oscillator performance. © 2011 IEEE.

    2011年, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1241 - 1245, 英語

    [査読有り]

  • K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

    This paper reports on a novel and simple packaging technique to enhance the atmosphere controllability of the microfabricated alkali vapor cell used for CSAMs (Chip Scale Atomic Magnetometers), in which sacrificial microchannels at the bonded interface are utilized as gas feedthrough for evacuation and filling, subsequently sealed by glass-frit reflow. By applying the proposed method, a 10 mm(3) potassium vapor cell with 0.1 MPa helium buffer gas was fabricated. Sealing of the microchannels by glass-frit reflow were successfully demonstrated adopting the optimized parameters as 460-480 degrees C at bonding pressure of more than 250 kPa. The leak rate of less than 3.1x10(-14) Pa.m(3)/s, which is required sealing quality for CSAM, was verified through a high resolution helium leak test.

    IEEE, 2011年, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 368 - 371, 英語

    [査読有り]

  • A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya

    This paper reports a method for analyzing local stress in resonating single-crystal silicon (SCS) microstructures of various crystal orientations using micro Raman spectroscopy. The notched support beams of fan-shaped in-plane resonators were used as specimens. The specimens have five different crystallographic orientations. The spectra at notch tips were calculated using the Raman spectrum of Si without stress and the stress distribution analyzed by finite element method (FEM). The measured spectra of all (100) and most of (110) specimens showed good agreement with the analyzed ones, which indicates the validity of this method.

    IEEE, 2011年, 2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 449 - 452, 英語

    [査読有り]

  • Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata

    We report on a simple UV photolithography based fabrication for an epoxy-based filtration membrane and its primary features such as the permeability and the elastic modulus toward a design of polymer-based microfluidic systems. The elastic modulus of filtration membrane was measured by an indentation test, and then which was evaluated by a cross-linked ratio of epoxy group to clarify the dependence on the process parameters. It was revealed for the first time that the elastic modulus for filtration membrane varied from 3.8 GPa to 4.9 GPa according to the cross-linked ratio of 0.5 to 0.75. © 2011 IEEE.

    2011年, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2706 - 2709, 英語

    [査読有り]

  • K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata

    In this study, we proposed a novel mixing method using alternate pulsed flows from three inlet channels with piezoelectric valveless micropumps. It was experimentally and analytically confirmed that the proposed pulsed mixing of two solutions increased mixing speed with increasing the switching frequency of up to 400 Hz. The mixing time of 3.6 ms for 90 % mixing ratio of two solutions was achieved experimentally at the switching frequency of 400 Hz. The further increase in the mixing speed up to 800 Hz was analytically confirmed. As its application, gold nanoparticle was synthesized using the proposed method and the uniformity of particle sizes increased with the mixing speed. © 2011 IEEE.

    2011年, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 1773 - 1776, 英語

    [査読有り]

  • Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper presents an analysis of acceleration output (sensitivity) in MEMS tuning fork gyroscopes (TFG) using simplified coupled resonators. We found that in TFG, applied acceleration in in-phase is transduced into excitation of anti-phase mode by unbalanced phase responses of the resonators. We proposed two mechanism and reduction methods (1) coupling of the in- and anti-phase modes (frequency decoupling) and (2) energy dissipation from the anchors with different vibration systems and supporting structures. They were analyzed using FEM simulations and verified by experiments. Results showed that acceleration output decreased by one-tenth for decoupling ratio from 0.09 to 0.29. © 2011 IEEE.

    2011年, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2006 - 2009, 英語

    [査読有り]

  • K. Sugano, R. Hiraoka, T. Tsuchiya, O. Tabata, M. Klaumunzer, M. Voigt, W. Peukert

    This paper reports high-yield self-assembly process for gold nanoparticle with a diameter of 60 nm, which can precisely control an interparticle nanogap ranging from 0 to 60 nm, using a template-assisted self-assembly with a pair of circular nanotrenches. A center-to-center distance of nanotrenches was changed in order to control an interparticle nanopgap. We found that an assembly yield strongly depends on a particle-particle interaction and achieved nanogap-controlled particle arrangement with high yield by controlling the particle-particle interaction with an addition of an electrolyte. This technique would enable us to control plasmonic resonance property of a nanoparticles pair for many emerging applications. © 2011 IEEE.

    2011年, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2570 - 2573, 英語

    [査読有り]

  • Koji Sugano, Hideaki Yoshimune, Akihiro Nakata, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    In this study, we proposed a novel mixing method using alternate pulsed flows from three inlet channel using piezoelectric valveless micropumps. Two solutions are assigned into one micropump and the other two micropumps, respectively. The fabricated microfluidic device consists of a cross-shaped mixing channel with three inlet microchannels and three valveless micropumps. According to the experimental results, it was confirmed that the pulsed mixing using three inlet microchannels increased mixing speed with increasing the switching frequency of the micropump driving up to 200 Hz. The proposed method solved the problem of a bias of concentration ratio near the sidewalls which has happened in the previous pulsed mixing method using T- or Y-shaped microchannel with two inlet microchannels. Furthermore, by controlling a streamline of solution flow at the confluent area utilizing a reverse flow, the mixing speed dramatically increased and the mixing time of 3.6 ms for 90 % mixing ratio was achieved at the micropumps switching of 400 Hz. © 2011 IEEE.

    2011年, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 75 - 78, 英語

    [査読有り]

  • Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuehiya, Osamu Tabata

    This paper presents analysis of the acceleration sensitivity (output) in decoupled resonators and a proposal of a new method to suppress acceleration output by controlling frequency decoupling of coupled resonators for developing MEMS tuning fork gyroscope (TFG) with low acceleration sensitivity. We identified that unbalancing of two sense resonators in TFG caused by fabrication error converts external acceleration into anti-phase vibration. This anti-phase vibration appeared as the rate output, which is called acceleration output in gyroscope. In order to reduce the acceleration output, decoupling between in-phase and anti-phase modal frequency is crucial, since coupled resonators may cause large anti-phase vibration from acceleration. To confirm the acceleration output model, we designed two types of decoupling methods of artificially unbalanced resonators. Through modal harmonic analysis, the anti-phase vibration reduced by one-tenth by increasing decoupling ratio from 0.09 to 0.29, irrespective to resonator designs. © 2011 IEEE.

    2011年, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 1250 - 1253, 英語

    [査読有り]

  • Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper presents an analysis of the acceleration output (sensitivity) in frequency decoupled MEMS tuning fork gyroscopes (TFG). We found that in-phase acceleration input is transduced into excitation of anti-phase mode, which results into acceleration output. Therefore, frequency decoupling (decoupling ratio, DR) of in-and anti-phase modes of sense resonators is key factor to suppress acceleration output in TFG, which was verified in a fully operating tuning fork gyroscope. The FEA simulation results showed that as DR increases, the acceleration output decreased from 73.56deg/s/g to 23.42deg/s/g. (C) 2011 Published by Elsevier Ltd.

    ELSEVIER SCIENCE BV, 2011年, EUROSENSORS XXV, 25, 623 - 626, 英語

  • C. Huang, T. Saeki, M. Endo, H. Sugiyama, C.-H. Weng, G.-B. Lee, K. Sugano, T. Tsuchiya, O. Tabata

    2011年, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 197 - 200, 英語

    [査読有り]

  • Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly

    Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata

    2010年11月, Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology, 99, 英語

  • 単結晶Siマイクロ試験片における破壊の結晶異方性のワイブル統計解析

    脇田拓, 平井義和, 菅野公二, 田畑修, 池原毅, 土屋智由

    2010年10月12日, 日本機械学会マイクロ・ナノ工学シンポジウム講演論文集, 2nd, 149 - 150, 日本語

  • MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法)

    徳崎 裕幸, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2010年10月12日, マイクロ・ナノ工学シンポジウム, 2010 (2), 141 - 142, 日本語

  • チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術

    辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2010年10月, 第27回「センサ・マイクロマシンと応用システム」シンポジウム, 656 - 661, 日本語

  • (110)単結晶Siの引張試験における破壊の結晶異方性評価

    脇田拓, 平井義和, 菅野公二, 田畑修, 土屋智由, 池原毅

    2010年09月04日, 日本機械学会年次大会講演論文集, 2010 (Vol.8), 243 - 244, 日本語

  • 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析

    谷山彰, 平井義和, 菅野公二, 田畑修, 池原毅, 土屋智由

    2010年09月04日, 日本機械学会年次大会講演論文集, 2010 (Vol.8), 255 - 256, 日本語

  • 顕微ラマン分光を用いた単結晶シリコン振動子の局所応力解析

    谷山 彰, 平井 義和, 菅野 公二, 田畑 修, 池原 毅, 土屋 智由

    2010年09月, 日本機械学会2010年度年次大会, 0, 日本語

  • Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell

    Tsujimoto Kazuya, Hirai Yoshikazu, 菅野 公二, Toshiyuki Tsuchiya, Osamu Tabata

    2010年07月, The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010), 211, 英語

    [査読有り]

  • 3方向からの交互脈動送液による高速2液混合

    菅野公二, 中田哲博, 平井義和, 土屋智由, 田畑修

    2010年06月17日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-10 (1-6.8-16.18-30), 139 - 144, 日本語

  • T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata

    A tensile and tensile-mode-fatigue tester has been developed for testing microscale specimens in high humidity environments in order to investigate the fracture mechanisms of microelectromechanical materials. A humidity control system was installed on a tensile-mode fatigue tester equipped with an electrostatic force grip. A specimen and a griping device were inserted into a small chamber and the humidity was controlled by air flow from a temperature and humidity chamber. The humidity stability was within +/- 2%RH for humidities in the range 25-90%RH for eight hours of testing. Fatigue tests were performed on single-crystal silicon (SCS) specimens in constant humidity environments and laboratory air for up to 10(6) cycles. The gauge length, width, and thickness of the SCS specimens were 100 or 500 mu m, 13.0 mu m, and 3.3 mu m, respectively. The average tensile strength was 3.68 GPa in laboratory air; this value decreased in high humidity environments. Fatigue failure was observed during cyclic loading at stresses lower than the average strength. A reduction in the fatigue strength was observed at high relative humidities. Different fracture origins and fracture behaviors were observed in tensile tests and fatigue tests, which indicates that the water vapor in air affects the fatigue properties of SCS specimens.

    SPRINGER, 2010年04月, EXPERIMENTAL MECHANICS, 50 (4), 509 - 516, 英語

  • T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata

    A tensile and tensile-mode-fatigue tester has been developed for testing microscale specimens in high humidity environments in order to investigate the fracture mechanisms of microelectromechanical materials. A humidity control system was installed on a tensile-mode fatigue tester equipped with an electrostatic force grip. A specimen and a griping device were inserted into a small chamber and the humidity was controlled by air flow from a temperature and humidity chamber. The humidity stability was within +/- 2%RH for humidities in the range 25-90%RH for eight hours of testing. Fatigue tests were performed on single-crystal silicon (SCS) specimens in constant humidity environments and laboratory air for up to 10(6) cycles. The gauge length, width, and thickness of the SCS specimens were 100 or 500 mu m, 13.0 mu m, and 3.3 mu m, respectively. The average tensile strength was 3.68 GPa in laboratory air; this value decreased in high humidity environments. Fatigue failure was observed during cyclic loading at stresses lower than the average strength. A reduction in the fatigue strength was observed at high relative humidities. Different fracture origins and fracture behaviors were observed in tensile tests and fatigue tests, which indicates that the water vapor in air affects the fatigue properties of SCS specimens.

    SPRINGER, 2010年04月, EXPERIMENTAL MECHANICS, 50 (4), 509 - 516, 英語

  • 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価

    脇田拓, 菅野公二, 土屋智由, 田畑修, 池原 毅

    2010年03月, 第1回マイクロ・ナノ工学シンポジウム,, pp. 39-40, 39 - 40, 日本語

    [査読有り]

  • G. Lopez, T. Tanemura, R. Sato, T. Saeki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda

    2010年01月, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, 245 - 249, 英語

    [査読有り]

  • DNA Mediated self-assembly of micro-scale components and sites

    R. Sato, T. Tanemura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

    2010年, 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010, 11 - 12, 英語

    [査読有り]

  • Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata

    This paper reports on a characterization of the developer-permeability of negative resist enabling a quick development of a complex microchannel network. The present development technique overcomes the diffusion limited process on the existing embedded microchannel fabrications, since the developer permeates the membrane region (channel ceiling) and the permeated developer dissolves uncross-linked photoresist under themembrane. In this paper, a primary feature of dependence of developer-permeability on process parameters was characterized by employing a cross-linking reaction model. Furthermore, microfluidic device with double-layered microchannel was demonstrated to show the usefulness of the proposed fabrication technique. (C) 2010 Published by Elsevier Ltd.

    ELSEVIER SCIENCE BV, 2010年, EUROSENSORS XXIV CONFERENCE, 5, 854 - 857, 英語

    [査読有り]

  • A. M. R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M. E. H. Eltaib, M. M. Sallam

    Among the current challenges of the tactile sensor for soft tissue stiffness detection is to get an output reading independent of the pushing distance between the senor and the tissue. Although a sensor with two probes configuration is used, the sensor output shows dependency on the pushing distance due to a cross talk effect between the two probes. To address this problem, a new compensation technique was proposed. It utilizes a tissue deformation effect in stiffness measurement to compensate the error due to cross talk effect between the two probes. A finite element analysis for the sensor output using ANSYS was carried out to investigate the dependency of cross talk effect on the separation distance between the two probes, It was confirmed that the cross talk effect and the error in stiffness measurement during tissue deformation can compensate each other. (C) 2009 Published by Elsevier Ltd.

    ELSEVIER SCIENCE BV, 2010年, EUROSENSORS XXIV CONFERENCE, 5, 1304 - 1307, 英語

    [査読有り]

  • マイクロリアクタによる金ナノ粒子合成技術を紹介します

    菅野公二, 土屋 智由, 田畑 修

    2009年10月, APPIE 産学官連携フェア2009, 0, 日本語

  • ナノ粒子を所望のパターンに配列する

    菅野公二, 平岡亮二, 土屋 智由, 田畑 修

    2009年10月, APPIE 産学官連携フェア2009, 0, 日本語

  • 厚膜ネガレジストの埋め込み型流路作製のためのフォトリソグラフィ条件の決定手法

    平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2009年10月, 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 533-538, 533 - 538, 日本語

    [査読有り]

  • 十字型混合流路による2液脈動混合の高速化

    中田 哲博, 菅野 公二, 土屋 智由, 田畑 修

    2009年10月, 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 483-486, 483 - 486, 日本語

    [査読有り]

  • 自己変位検出機能を有する面内2自由度静電櫛歯電極の等価回路

    徳崎裕幸, 菅野公二, 土屋智由, 田畑 修

    2009年10月, 第26回センサ・マイクロマシンと応用システムシンポジウム,, pp. 518-523, 518 - 523, 日本語

    [査読有り]

  • T0302-2-3 直流動作点解析に対応した静電櫛歯トランスデューサの等価回路の構築(マイクロ・ナノ力学とシステム設計論(2))

    徳崎 裕幸, 菅野 公二, 土屋 智由, 田畑 修

    2009年09月12日, 年次大会講演論文集 : JSME annual meeting, 2009 (8), 69 - 70, 日本語

  • 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ

    菅野公二, 内田雄喜, 平井義和, 土屋智由, 田畑修

    2009年07月23日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-09 (1-13), 7 - 12, 日本語

  • 平成21年度電気学会センサ・マイクロマシン部門総合研究会

    菅野公二, 内田雄喜, 平井 義和, 土屋 智由, 田畑 修

    2009年07月, 平成21年度電気学会センサ・マイクロマシン部門総合研究会, 7 - 12, 日本語

  • Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata

    A differential capacitive three-axis silicon-on-insulator (SOI) accelerometer using vertical comb electrodes fabricated by using surface-micromachining technique has been developed. The accelerometer structures consist of only the device layer of a SOI wafer without lower or upper electrodes. The vertical comb electrodes of this device have structures different from conventional vertical comb electrodes. The bottom faces of both movable and fixed electrodes are in the same plane at their initial positions but their heights are different. Three-axis acceleration can be sensed with differential capacitance detection by using only these vertical comb electrodes. The device structures were successfully fabricated using self-alignment and Deep-RIE processes. As an initial result, the capacitance changes against three-axis acceleration were observed and the device sensitivities to three-axis accelerations were measured. The capacitance sensitivities of X, Y and Z-axis were 1.01, 0.898 and 0.989 fF/G, respectively. (C) 2009 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    WILEY, 2009年05月, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4 (3), 345 - 351, 英語

  • Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata

    A differential capacitive three-axis silicon-on-insulator (SOI) accelerometer using vertical comb electrodes fabricated by using surface-micromachining technique has been developed. The accelerometer structures consist of only the device layer of a SOI wafer without lower or upper electrodes. The vertical comb electrodes of this device have structures different from conventional vertical comb electrodes. The bottom faces of both movable and fixed electrodes are in the same plane at their initial positions but their heights are different. Three-axis acceleration can be sensed with differential capacitance detection by using only these vertical comb electrodes. The device structures were successfully fabricated using self-alignment and Deep-RIE processes. As an initial result, the capacitance changes against three-axis acceleration were observed and the device sensitivities to three-axis accelerations were measured. The capacitance sensitivities of X, Y and Z-axis were 1.01, 0.898 and 0.989 fF/G, respectively. (C) 2009 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    WILEY, 2009年05月, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 4 (3), 345 - 351, 英語

  • Modeling of Self-face-alignment Process Using Contact Potential Difference

    佐藤 亮, 種村 友貴, Lopez Hinojosa Guillermo, Serry ElSayed Ahmed Mohammed, 菅野 公二, 土屋 智由, 田畑 修

    2009年04月, International Conference on Electronics Packaging (ICEP2009), 959 - 962, 英語

    [査読有り]

  • Fabrication of Large-scale Nanoparticle Array using Combination of Self-assembly and 2-step Transfer

    菅野 公二, 尾崎 貴志, 土屋 智由, 田畑 修

    2009年04月, International Conference on Electronics Packaging (ICEP2009), 2009, 409 - 412, 英語

    [査読有り]

  • 静電容量型MEMSデバイスを用いたカーボンナノ材料引張試験

    浦靖武, 菅野公二, 土屋智由, 田畑修

    2009年03月17日, 電気学会全国大会講演論文集, 2009 (3), 182 - 183, 日本語

    [査読有り]

  • Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata

    We report a fabrication of doubly supported free-standing buckminsterfullerene (C(60)) nanowires onto single crystal silicon microstructures in order to demonstrate an integration of carbon nanomaterials to surface-micromachined microelectromechanical devices. By irradiating vacuum-deposited C(60) film with an electron beam, polymerized C(60) nanowires were patterned. Free-standing structures of the C60 nanowires were obtained by sacrificial etching of underlying silicon structures using XeF(2) gas. The supporting 5-mu m thick silicon structure was released using vapor hydrofluoric acid. The C(60) nanowire of 2-mu m width, 25-mu m length, and 40-nm thickness connected to a movable single crystal silicon structure was successfully fabricated. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3094745]

    SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS, 2009年01月, JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 8 (1), 英語

  • Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata

    We report a fabrication of doubly supported free-standing buckminsterfullerene (C(60)) nanowires onto single crystal silicon microstructures in order to demonstrate an integration of carbon nanomaterials to surface-micromachined microelectromechanical devices. By irradiating vacuum-deposited C(60) film with an electron beam, polymerized C(60) nanowires were patterned. Free-standing structures of the C60 nanowires were obtained by sacrificial etching of underlying silicon structures using XeF(2) gas. The supporting 5-mu m thick silicon structure was released using vapor hydrofluoric acid. The C(60) nanowire of 2-mu m width, 25-mu m length, and 40-nm thickness connected to a movable single crystal silicon structure was successfully fabricated. (C) 2009 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3094745]

    SPIE-SOC PHOTOPTICAL INSTRUMENTATION ENGINEERS, 2009年01月, JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 8 (1), 英語

  • M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

    This paper presents a novel membrane design for capacitive micromachined ultrasonic transducers (cMUTs). The proposed design is composed of a thick membrane with reinforcing beams supported by a circumferential thin membrane to improve transducer sensitivity without degrading the membrane resonance frequency. Analytical formulation of sensitivity for the proposed design was newly derived and its validity was verified by finite element analysis (FEA). From the analysis, we confirmed that this thick membrane structure achieved three times higher sensitivity compared to the conventional design by decreasing 70% of the mass of the thick membrane part with keeping the resonance frequency same.

    ELSEVIER SCIENCE BV, 2009年, PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 1 (1), 389 - 392, 英語

  • Yasutake Ura, K. Sugano, T. Tsuchiya, O. Tabata

    In this paper, we report tensile testing of a fullerene wire using an electrostatic MEMS device which can test nano-scale materials. We developed an electrostatic MEMS tensile testing device which has a comb drive actuator to apply tensile force to a specimen and two capacitances for measurement of the displacement to measure the elongation and applied force of the specimen. A free-standing fullerene wire which was about 16 μm long, 2μm wide and 40nm thick was integrated on the device and the tensile testing of the wire was successfully demonstrated with nano order resolutions. Measured Young's modulus and tensile strength of the wire were 5.9 GPa, 17 MPa, respectively. ©2009 IEEE.

    2009年, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 2062 - 2065, 英語

    [査読有り]

  • Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

    This paper reports on an optimization method for parameter sets for fabricating 3-dimensional microstructures in a single thick-film photoresist by the moving-mask UV lithography technique. The proposed optimization method employs the UV exposure calculation and the chemical behavior of chemically amplified negative-photoresist considering a cross-linking process during a thermal treatment of post-exposure bake to predict an optimum parameter range. In this paper, the validity of the proposed optimization method was successfully verified by evaluating a microchannel with "cm" length covered by a top-membrane and its dependence on the process parameter sets. ©2009 IEEE.

    2009年, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 1616 - 1619, 英語

    [査読有り]

  • T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda

    We demonstrated that Deoxyribonucleic Acid (DNA) can be utilized as an intelligent adhesive activated by temperature control to realize sequential and selective self-assembly of 5 mm squared silicon micro components on a substrate. Two kinds of complementary DNA pairs whose melting transition temperature (T-m) and base sequence were designated appropriately were utilized to verify the feasibility of the proposed approach. It was successfully confirmed that sequential and selective assembly of micro components on the substrate can be realized below each Tm. Furthermore, DNA grafted polymer was proposed for the first time as a flexible spacer between micro components and a substrate to improve self-assembly yield and speed.

    IEEE, 2009年, IEEE 22ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2009), 184 - 187, 英語

    [査読有り]

  • Effective Fabrication Method for Monolithic 3-dimensional Embedded Microstructure using the Moving-mask UV Lithography Technique

    HIRAI Yoshikazu, INAMOTO Yoshiteru, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

    2008年10月22日, Proc Sens Symp Sens Micromachines Appl Syst, 25th, 15 - 20, 英語

    [査読有り]

  • Electrical Equivalent Circuit Model of Microfluidic System Containing Piezoelectric Valveless Micropump and Viscoelastic PDMS Microchannnel

    中田 哲博, 田中 伸治, 菅野 公二, 土屋 智由, 田畑 修

    2008年10月, The 12th International Conference on Miniturized Systems for Chemistry and Life Sciences, 730 - 732, 英語

    [査読有り]

  • 3-dimensional Positive Thick-resist Microstructuring Adopting Wavelength Dependency of Photoresist Property

    Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2008年09月, EUROSENSORS (EUROSENSORS XXII), 1559 - 1602, 英語

    [査読有り]

  • バルブレス圧電マイクロポンプと粘弾性マイクロ流路の電気等価回路

    中田哲博, 田中伸治, 菅野公二, 土屋智由, 田畑修

    2008年08月02日, 日本機械学会年次大会講演論文集, 2008 (Vol.8), 23 - 24, 日本語

    [査読有り]

  • 単結晶シリコン引張試験における表面酸化の影響評価

    土屋 智由, 宮本 憲治, 菅野 公二, 田畑 修

    2008年08月, 日本機械学会2008年度年次大会,8, pp. 157-158, 8, 157 - 158, 日本語

    [査読有り]

  • セルフアセンブルによるマイクロ/ナノコンポーネントのMEMSへの集積化

    佐藤 亮, 種村 友貴, 菅野 公二, 土屋 智由, 田畑 修

    2008年07月, エレクトロニクス実装学会関西ワークショップ2008, 0, 日本語

  • ポジ型厚膜レジストの溶解速度の露光波長依存性と3次元加工への応用

    平井義和, 菅野公二, 土屋智由, 田畑修

    2008年06月12日, 電気学会マイクロマシン・センサシステム研究会資料, MSS-08 (1-21), 1 - 6, 日本語

    [査読有り]

  • 電気等価回路モデルによる高周波駆動バルブレス圧電マイクロポンプの特性解析

    菅野 公二, 田中 伸治, 土屋 智由, 田畑 修

    2008年06月, 平成20年度電気学会センサ・マイクロマシン部門総合研究会, 61 - 66, 日本語

  • Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

    Direct stiffness calibration of microelectromechanical-system (MEMS) springs made of single-crystal silicon was performed using a previously developed mechanical force measurement tool. The spring devices used for calibration were fabricated from silicon-on-insulator wafers and contained one or four folded-beam springs. The spring constants were directly measured using an electromagnetic force-feedback balance with a force resolution of about 0.2 mu N. The average measured spring constant of a folded-beam spring with a designed constant of 0.7 N/m was 0.58 N/m. This successful calibration shows that this tool can be used to calibrate various kinds of MEMS flexible structures. (C) 2007 Elsevier B.V. All rights reserved.

    ELSEVIER SCIENCE SA, 2008年05月, SENSORS AND ACTUATORS A-PHYSICAL, 143 (1), 136 - 142, 英語

  • Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata

    A soft X-ray source with a periodic aluminum multilayer structure with vacuum layers in between for tabletop synchrotrons with low-energy electrons was designed, and the dependence of radiation performance on structural parameters was clarified using a theoretical calculation of the resonance transition radiation. A photon density of I keV pr incident electron was calculated by optimizing the thickness of the aluminum and vacuum layers. Furthermore, the designed structure was fabricated by a microfabrication technique. The effects of dimensional error on the photon density are discussed on the basis of the calculated results and the prototype structure of a 6-MeV synchrotron. It is clarified that dimensional errors of 1.5% in Al layers and of plus or minus a few dozen nanometers in the vacuum layers are negligible in obtaining a photon density of more than 90% of the maximum value. (c) 2008 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    WILEY, 2008年05月, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3 (3), 268 - 273, 英語

  • Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata

    A soft X-ray source with a periodic aluminum multilayer structure with vacuum layers in between for tabletop synchrotrons with low-energy electrons was designed, and the dependence of radiation performance on structural parameters was clarified using a theoretical calculation of the resonance transition radiation. A photon density of I keV pr incident electron was calculated by optimizing the thickness of the aluminum and vacuum layers. Furthermore, the designed structure was fabricated by a microfabrication technique. The effects of dimensional error on the photon density are discussed on the basis of the calculated results and the prototype structure of a 6-MeV synchrotron. It is clarified that dimensional errors of 1.5% in Al layers and of plus or minus a few dozen nanometers in the vacuum layers are negligible in obtaining a photon density of more than 90% of the maximum value. (c) 2008 Institute of Electrical Engineers of Japan. Published by John Wiley & Sons, Inc.

    WILEY, 2008年05月, IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING, 3 (3), 268 - 273, 英語

  • Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

    Direct stiffness calibration of microelectromechanical-system (MEMS) springs made of single-crystal silicon was performed using a previously developed mechanical force measurement tool. The spring devices used for calibration were fabricated from silicon-on-insulator wafers and contained one or four folded-beam springs. The spring constants were directly measured using an electromagnetic force-feedback balance with a force resolution of about 0.2 mu N. The average measured spring constant of a folded-beam spring with a designed constant of 0.7 N/m was 0.58 N/m. This successful calibration shows that this tool can be used to calibrate various kinds of MEMS flexible structures. (C) 2007 Elsevier B.V. All rights reserved.

    ELSEVIER SCIENCE SA, 2008年05月, SENSORS AND ACTUATORS A-PHYSICAL, 143 (1), 136 - 142, 英語

  • Contact Potential Difference for Face Alignment of Submillimeter Components with Chemical Reaction Kinetics

    T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Karl F Bhringer

    2008年04月, FNANO2008, 0, 英語

  • 微小コンポーネントの接触帯電によるセルフフェースアライメントプロセスのモデリング

    佐藤 亮, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修

    2008年03月, 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0, 日本語

  • 任意基板への微小要素の集積化のためのマニピュレーションシステム

    樋口 雄一, 日下部 達哉, 種村 友貴, 佐藤 亮, 菅野 公二, 土屋 智由, 田畑 修

    2008年03月, 機械学会 情報・知能・精密機器部門(IIP部門)講演会, 0, 日本語

  • 櫛歯型垂直変位電極を用いた基板面内軸回転検出振動型SOI ジャイロスコープ

    濱口 裕之, 菅野 公二, 土屋 智由, 田畑 修

    2008年03月, 電気学会全国大会,3, pp. 195-196, 3, 195 - 196, 日本語

    [査読有り]

  • レジスト現像特性の露光波長依存性を応用した厚膜レジストの3次元微細加工技術

    平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2008年03月, 電気学会全国大会,3, pp. 138-139, 3, 138 - 139, 日本語

    [査読有り]

  • Y-AXIS VIBRATING SOI GYROSCOPE USING VERTICAL COMB ELECTRODES

    H. Hamaguchi, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2008年, The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 0, 英語

  • Effect of surface oxide layer on mechanical properties of single crystalline silicon

    Kenji Miyamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports on the tensile testing of single crystal silicon (SCS), whose specimen surface was intentionally oxidized, and the effect of the oxide thickness on the mechanical properties in order to investigate the fatigue fracture mechanism under cyclic loading. SCS specimens were fabricated from silicon-on-insulator (SOI) wafer with 3-mu m -thick device layer and oxide layer were grown to the specimens using thermal dry oxidation at 1100 degrees C. The specimen test part was 120 or 600 mu m long and 4 mu m wide. Quasi-static tensile testing of SCS specimen without oxide layer, with 100-nm-thick oxide, and with 200-mn-thick oxide was performed. As the results, the fracture origin location changed from the surface of the specimen of SCS without oxide to inside of silicon of oxidized specimen. This change may be caused by the smoothing of the surface and formation of oxide precipitation defects in silicon during oxidation. The estimated radius of the defects in specimen with 100 -nm-thick oxide and with 200-nm-thick oxide was 26 nm and 45 nm, respectively, which is well agreed with the fracture-initiating crack sizes calculated from the measured strengths.

    MATERIALS RESEARCH SOC, 2008年, MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES, 1052, 53 - 58, 英語

    [査読有り]

  • T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata

    We demonstrated a new approach utilizing contact potential difference (CPD) based self-assembly for a future sequential assembly of nano/micro components and face alignment of submillimeter scale components. Two types of experiments realized by CPD were carried out 1) sequential assembly of silica particles using Coulomb force induced by contacting a Silver (Ag) probe on a Platinum (Pt) substrate, and 2) face alignment of component with Ag on one face and Pt on the other face on a Pt substrate by CPD induced additional electrostatic adhesive energy. In the face alignment experiment, the measured adhesive energies of two different metal pairs (Pt-Ag and Pt-Pt) were one order smaller than the theoretical value. However, 83 % components were successfully aligned as Pt face up. ©2008 IEEE.

    2008年, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1056 - 1059, 英語

    [査読有り]

  • T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata

    A novel sequential self-assembly process of nano/micro components applying deoxyribonucleic acid (DNA) hybridization was proposed for the first time and its validity was experimentally verified. In the proposed process, characteristics of DNA, such as hybridization specificity of complementary pairs of single-stranded DNA (ssDNA) into a double-stranded DNA (dsDNA), and the dependence of hybridization on ambient temperature (melting temperature T.) plays a key role. These characteristics of DNA can be designed and synthesized by base-pair sequence of DNA. Three types of self-assembly experiments using two types of ssDNA with different T,, (65 degrees C and 50 degrees C) were carried out; 1) between Au nanoparticles, 2) between An nanoparticle and Au coated substrate, and 3) between Silicon micro components (5 x 5 x 3 mu m(3)) and Au coated substrate. Through these experiments, it was successfully verified that the sequence of the self-assembly can be controlled by controlling the ambient temperature. The reversibility of this process was also confirmed. However, the Silicon micro components assembly on Au coated substrate was not confirmed.

    IEEE, 2008年, MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 1052 - 1055, 英語

    [査読有り]

  • T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata

    We successfully demonstrated a pattern formation of 60 nm gold nanoparticles using high productive combined technique of particle self-assembly and the assembled particle pattern transfer, and its availability for bio/chemical sensor with localized surface plasmon resonance (LSPR) of the patterned particles was verified. Dot and line patterns of nanoparticles were fabricated on a flexible PDMS substrate by proposed method. In addition, by measuring spectrums of assembled nanoparticle arrays, it was confirmed that the LSPR optical characteristic can be controlled by patterns of the assembled nanoparticles. ©2008 IEEE.

    2008年, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1048 - 1051, 英語

    [査読有り]

  • Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata

    We developed, for the first time, the manipulation system based on optoelectronic tweezers (OET) which manipulates multiple nano/micro components on an arbitrary substrate with concurrent observation of the component motion. From the theoretical analysis, the manipulation force of a hundred pN order is expected to act on components. It was successfully demonstrated to manipulate a PMMA particle of 10 μm diameter on a photoconductive film. ©2008 IEEE.

    2008年, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 836 - 839, 英語

    [査読有り]

  • T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano, O. Tabata

    This paper reports a fabrication of doubly-supported free-standing fullerene (C(60)) nanowires on MEMS structures to propose an integration process of carbon nano-materials to surface-micromachined silicon devices. By irradiating vacuum-deposited fullerene film with electron beam (EB), polymerized fullerene nanowires were patterned. Then, free-standing structures of the fullerene nanowires were obtained by sacrificial etching using XeF(2) gas. The fabricated fullerene nanowire was 2 mu m long, 400 nm wide and 15 nm thick.

    IEEE, 2008年, MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 689 - 692, 英語

    [査読有り]

  • 吉川弥, 篠部晃生, 菅野公二, 土屋智由, 石田章, 田畑修

    This paper presents a novel shape memory alloy (SMA) thin film actuator that has capability of vertical driving, miniaturization, and generating both large force and large displacement. We targeted a small tactile display which can reproduce a texture of an object to a fingertip, termed Smart Button, as a device for utilizing the proposed actuator performance effectively. An actuator for Smart Button has to achive displacement of dozens micron, output force of mN, output frequency of dozens Hz and an actuator pitch of less than 1 mm. The actuator structure of TiNi/SiO2 bi-material beam structure with flexible fixed ends is proposed for performing the requirements. The structural dependences of the displacement and generating force of the actuator were analyzed by FEM. As a result, the validity of the proposed design concept and the configuration of the actuator for Smart Button was successfully confirmed. © 2008 The Institute of Electrical Engineers of Japan.

    2008年, 電気学会センサ・マイクロマシン部門誌, 128 (4), 6 - 160, 日本語

  • Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam

    A detailed design procedure for a tactile sensor for compliance detection is developed. The sensor principle is based on the concept of applying two springs, with considerably different stiffnesses, to soft tissue for compliance detection. The spring stiffnesses are chosen to be associated with the soft tissue properties. The sensor design parameters are optimized to give high sensitivity and linearity of the sensor output with taking into account the effect of crosstalk between two springs due to the tissue deformation. A finite element model is developed to investigate the sensor performance with the designed parameters using two types of spring end, namely cubic and spherical in shape. The results show a significant stability of reading with the cubic end rather than the spherical one during pushing the sensor against a tissue. Finally, the same finite element model is used with changing the distance between the spring ends to show the crosstalk effect due to the tissue deformation. © 2008 The Institute of Electrical Engineers of Japan.

    2008年, IEEJ Transactions on Sensors and Micromachines, 128 (5), 186 - 192, 英語

  • Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara

    We theoretically and experimentally evaluated the damping effect in a rotational resonator with a comb-drive actuator and sensor. The resonator was fabricated from an SOI wafer and has a fan-shaped mass. The underlying substrate was removed using back side deep reactive ion etching. One set of comb electrodes was attached to each side of the mass: one for electrostatic driving and the other for capacitive detection. In our theoretical analysis, the dynamics of the resonator were simplified so that they could be represented by a lumped system. In this lumped system, the damping coefficient was estimated by assuming the damping to be slide film damping and the air flow to be a Stokes flow. The phase shift due to the slide film damping of thick air layers was included in the lumped system. In the experimental evaluation, one side of the rotational combs was removed step-by-step and a half of the mass using a laser trimming tool so that the individual damping effects caused by the comb electrodes and mass could be determined quantitatively. We compared the experimental results with the results of the theoretical analysis and found that the difference in the damping coefficients between the experimental results and results of the theoretical analysis was less than 40%. © 2008 The Institute of Electrical Engineers of Japan.

    2008年, IEEJ Transactions on Sensors and Micromachines, 128 (5), 203 - 208, 英語

  • Ahmed M.R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam

    A detailed design procedure for a tactile sensor for compliance detection is developed. The sensor principle is based on the concept of applying two springs, with considerably different stiffnesses, to soft tissue for compliance detection. The spring stiffnesses are chosen to be associated with the soft tissue properties. The sensor design parameters are optimized to give high sensitivity and linearity of the sensor output with taking into account the effect of crosstalk between two springs due to the tissue deformation. A finite element model is developed to investigate the sensor performance with the designed parameters using two types of spring end, namely cubic and spherical in shape. The results show a significant stability of reading with the cubic end rather than the spherical one during pushing the sensor against a tissue. Finally, the same finite element model is used with changing the distance between the spring ends to show the crosstalk effect due to the tissue deformation. © 2008 The Institute of Electrical Engineers of Japan.

    2008年, IEEJ Transactions on Sensors and Micromachines, 128 (5), 186 - 192, 英語

  • Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Tsuyoshi Ikehara

    We theoretically and experimentally evaluated the damping effect in a rotational resonator with a comb-drive actuator and sensor. The resonator was fabricated from an SOI wafer and has a fan-shaped mass. The underlying substrate was removed using back side deep reactive ion etching. One set of comb electrodes was attached to each side of the mass: one for electrostatic driving and the other for capacitive detection. In our theoretical analysis, the dynamics of the resonator were simplified so that they could be represented by a lumped system. In this lumped system, the damping coefficient was estimated by assuming the damping to be slide film damping and the air flow to be a Stokes flow. The phase shift due to the slide film damping of thick air layers was included in the lumped system. In the experimental evaluation, one side of the rotational combs was removed step-by-step and a half of the mass using a laser trimming tool so that the individual damping effects caused by the comb electrodes and mass could be determined quantitatively. We compared the experimental results with the results of the theoretical analysis and found that the difference in the damping coefficients between the experimental results and results of the theoretical analysis was less than 40%. © 2008 The Institute of Electrical Engineers of Japan.

    2008年, IEEJ Transactions on Sensors and Micromachines, 128 (5), 203 - 208, 英語

  • Effect of surface oxidation on mechanical properties of single crystalline silicon

    MIYAMOTO Kenji, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

    2007年10月16日, Proc Sens Symp Sens Micromachines Appl Syst, 24th, 165 - 168, 英語

    [査読有り]

  • 接触帯電による静電付着エネルギーを利用したセルフアセンブル

    種村 友貴, 日下部 達哉, 樋口 雄一, 菅野 公二, 土屋 智由, 田畑 修

    2007年09月, 日本機械学会2007年度年次大会, 313 - 314, 日本語

  • 低侵襲触覚センサーの構造設計

    田村 智久, ファス エルバブアハメッド, 菅野 公二, 土屋 智由, 田畑 修

    2007年09月, 日本機械学会2007年度年次大会, 307 - 308, 日本語

  • 移動マスクUV露光法によるポジ型厚幕レジストの3次元加工と形状シミュレーション技術

    平井 義和, 稲本 好輝, 菅野 公二, 土屋 智由, 田畑 修

    2007年09月, 日本機械学会2007年度年次大会, 303 - 304, 日本語

  • ナノテンプレートを用いたセルフアセンブルによる粒子パターン形成

    尾崎 貴志, 菅野 公二, 土屋 智由, 田畑 修

    2007年08月, 粉体工学会第43回夏期シンポジウム, 52 - 53, 日本語

  • DNAの選択性およい温度特性を利用したAuナノ微粒子のセルフアセンブル

    日下部 達哉, 種村 友貴, 樋口 雄一, 菅野 公二, 土屋 智由

    2007年08月, 粉体工学会第43回夏期シンポジウム,, pp. 19-20, 19 - 20, 日本語

    [査読有り]

  • 電気等価回路を用いたバルブレス圧電マイクロポンプの流れ特性解析とその実験的評価

    田中 伸治, 市橋 治, 菅野 公二, 土屋 智由, 田畑 修

    2007年07月, 電気学会総合研究会, 79 - 84, 日本語

  • Fast Marching Methodを適用した移動マスクUV露光用加工形状シミュレーション技術

    平井 義和, 稲本 好輝, 菅野 公二, 土屋 智由, 田畑 修

    2007年07月, 電気学会総合研究会, 19 - 24, 日本語

  • マイクロ流体デバイスを用いた混合速度制御による金ナノ粒子作製

    菅野 公二, 田中 伸治, 市橋 治, 土屋 智由, 田畑 修

    2007年06月, 化学とマイクロシステム, 0, 日本語

  • Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    We propose a method of submicroparticle pattern formation with high productivity, flexibility, and accuracy. The proposed process is composed of template-assisted self-assembly for particle self-assembly and a subsequent two-step transfer of the assembled particles. Optimization of the process parameters was performed by carrying out experiments to evaluate the effects of the parameters on the yields of each process. Polystyrene particles that are 500 nm in diameter were used, and a silicon wafer was used as a target substrate in the experiments that are described in this paper. In the self-assembly process, 70% of the pattern was successfully self-assembled on a silicon template substrate. In the first transfer step, a transfer yield of 79% was obtained with a self-assembled-monolayer-coated polydimethylsiloxane carrier substrate. In the second transfer step, a transfer temperature of 115 degrees C provided the maximum transfer yield of 85%. The overall process yield of 48% was achieved by the optimized process parameters, and it was successfully demonstrated that the proposed method can fabricate any submicroparticle pattern.

    IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2007年06月, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16 (3), 746 - 752, 英語

  • Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    We propose a method of submicroparticle pattern formation with high productivity, flexibility, and accuracy. The proposed process is composed of template-assisted self-assembly for particle self-assembly and a subsequent two-step transfer of the assembled particles. Optimization of the process parameters was performed by carrying out experiments to evaluate the effects of the parameters on the yields of each process. Polystyrene particles that are 500 nm in diameter were used, and a silicon wafer was used as a target substrate in the experiments that are described in this paper. In the self-assembly process, 70% of the pattern was successfully self-assembled on a silicon template substrate. In the first transfer step, a transfer yield of 79% was obtained with a self-assembled-monolayer-coated polydimethylsiloxane carrier substrate. In the second transfer step, a transfer temperature of 115 degrees C provided the maximum transfer yield of 85%. The overall process yield of 48% was achieved by the optimized process parameters, and it was successfully demonstrated that the proposed method can fabricate any submicroparticle pattern.

    IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 2007年06月, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 16 (3), 746 - 752, 英語

  • 移動マスクUV露光法による埋め込み型流路の作製

    稲本 好輝, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2007年03月, 平成19年,電気学会全国大会, 181 - 182, 日本語

  • DNA修飾した微小コンポーネントのシーケンシャルセルフアセンブリ

    日下部達哉, 菅野公二, 土屋 智由, 田畑 修

    2007年03月, 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82 - 83, 日本語

  • EB描画によるナノパターンを用いたナノ粒子アセンブル

    菅野 公二, 尾崎 貴志, 土屋 智由, 田畑 修

    2007年03月, 文部科学省ナノテクノロジー総合支援プロジェクト「分子・物質総合合成・解析支援グループ」成果発表会, 82 - 83, 日本語

  • 静電容量型MEMS デバイスを用いたカーボンナノ材料引張試験

    城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修

    2007年03月, 日本機械学会情報・知能・精密機器部門講演会, 0, 日本語

  • Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper presents a systematic study on a novel 3D (three-dimensional) UV (ultraviolet) lithography apparatus for thick photoresist and a UV lithography process simulation for 3D microstructuring. In order to realize a wide variety of 3D microstructures, the developed proximity 3D UV lithography apparatus adopts the 'moving mask lithography' concept which was originally proposed by the authors for deep x-ray lithography. Furthermore, the authors propose a new practical photoresist profile simulation approach adopting the 'fast marching method' to consider the photoresist dissolution vector in the development process. A series of moving mask UV lithography experiments using a positive-tone photoresist (50 mu m thickness) successfully confirmed (1) the capability of the moving mask UV exposure technique for 3D microstructuring and (2) the validity of the proposed photoresist profile simulation.

    IOP PUBLISHING LTD, 2007年02月, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 17 (2), 199 - 206, 英語

  • Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This paper presents a systematic study on a novel 3D (three-dimensional) UV (ultraviolet) lithography apparatus for thick photoresist and a UV lithography process simulation for 3D microstructuring. In order to realize a wide variety of 3D microstructures, the developed proximity 3D UV lithography apparatus adopts the 'moving mask lithography' concept which was originally proposed by the authors for deep x-ray lithography. Furthermore, the authors propose a new practical photoresist profile simulation approach adopting the 'fast marching method' to consider the photoresist dissolution vector in the development process. A series of moving mask UV lithography experiments using a positive-tone photoresist (50 mu m thickness) successfully confirmed (1) the capability of the moving mask UV exposure technique for 3D microstructuring and (2) the validity of the proposed photoresist profile simulation.

    IOP PUBLISHING LTD, 2007年02月, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 17 (2), 199 - 206, 英語

  • Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments

    Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya

    2007年, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 267 - 270, 英語

    [査読有り]

  • Mechanical calibration of MEMS spring with 0.1-mu N force resolution

    Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

    The direct calibration of MEMS springs made of single crystal silicon was carried out using a mechanical force measurement tool. The spring device for calibration fabricated from silicon on insulator (SOI) wafer contains four folded-beam springs. The spring constants of different-length devices were directly measured using electromagnetic force-feedback balance, whose force resolution was about 0.2 mu N. The spring constants of the two types of folded-beam springs, whose designed constant was 0.3 and 0.7 N/m, were 0.18 and 0.57 N/m, respectively. The spring constants were successfully calibrated, which shows that this tool can calibrate various kinds of MEMS flexible structures.

    IEEE, 2007年, PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2, 21 - 24, 英語

    [査読有り]

  • Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata

    A soft X-ray source with a periodic Al multi-layer structure for a tabletop synchrotron was designed and the dependence of radiation performance on structural parameters was clarified by using a theoretical calculation of resonance transition radiation. The spectral intensity of photon per incident electron at emitted photon of 1 keV was calculated by optimizing the Al thickness and vacuum space. Furthermore the designed structure was fabricated by microfabrication technique. Based on the fabrication results, we discussed dimension errors of Al thickness and vacuum space. It was confirmed that the vacuum space should be ranged from 90 nm to 140 nm to obtain the spatial total intensity of more than 90 percents of the maximum value of radiation intensity. © 2007 American Institute of Physics.

    2007年, AIP Conference Proceedings, 902, 121 - 124, 英語

    [査読有り]

  • T. Ikeda, K. Sugano, T. Tsuchiya, O. Tabata

    This paper reports on the development of a new tensile tester operable at 800 degrees C using IR heating system for evaluating mechanical properties of thin films at high temperature. Single crystal silicon films of 3 mu m thick were tested at 600 degrees C. At room temperature, the fracture strength and Young's modulus were 3.33 GPa and 163.2 GPa, respectively. At 600 degrees C, they were 2.71 GPa and 151.8 GPa, respectively. When the strain rate was decreased, the stress and stage displacement curves had yield points and the fractured specimens exhibited the slip lines at 600 degrees C.

    IEEE, 2007年, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 571 - 574, 英語

    [査読有り]

  • S. Tanaka, O. Ichihashi, K. Sugano, T. Tsuchiya, O. Tabata

    An improved equivalent circuit model for effective calculation of a valveless piezoelectric micropump performance which is operated by a dependency of flow resistance on flow rate was proposed. The validity of the proposed model was evaluated by comparing the dynamic flow behavior calculated by the equivalent circuit model with mu-PIV measurement. From the good agreements between the analysis and the experimental results, it was concluded that a dynamic flow characteristic with microsecond scale of the micropump was able to be analyzed precisely by the developed equivalent circuit model.

    IEEE, 2007年, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2183 - 2186, 英語

    [査読有り]

  • Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata

    This paper presents a systematic study on "Moving-mask UV lithography" for 3-D (three-dimensional) microstructuring of positive- and negative-tone thick photoresist and a dedicated UV lithography process simulation. As an application of the moving-mask UV lithography, we propose a novel method to fabricate embedded microfluidic structures Using SU-8. Furthermore, we propose a new practical photoresist profile simulation approach adopting the "Fast Marching Method" to consider the photoresist dissolution vector in the development process. Through a series of moving-mask UV lithography experiments, (1) the capability of the moving-mask UV lithography for 3-D microstructuring, and (2) the validity of the proposed photoresist profile simulation, were successfully confirmed.

    IEEE, 2007年, TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 545 - 548, 英語

    [査読有り]

  • H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata

    This paper reports a differentially detecting capacitive three-axis SOI accelerometer using novel vertical comb electrodes. The accelerometer structure was fabricated by surface-micromachining technique and consists of only the device layer of a SOI wafer without lower or upper electrodes. The bottom faces of both movable and fixed electrodes are in the same plane at their initial positions but those heights are different. It is also an important feature that the device applies fully differential detections in all three-axis by using only two pairs of four type capacitors. As an initial result, the capacitance changes against three-axis acceleration were observed. The capacitance sensitivities to X and Z-axis acceleration against Y-axis rotation were 1.04 fF/G and 1.14 fF/G, respectively. ©2007 IEEE.

    2007年, TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, 1483 - 1486, 英語

    [査読有り]

  • Yuichi Higuchi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    in this paper, a new temperature controlled sequential stacking self-assembly technique is proposed. This method utilizes capillary force generated by two different liquid of TEGDMA (Triethyleneglycol Dimethacrylate) and 42Sn-58Bi solder as adhesives. TEGDMA with an additional thermal initiator is liquid at room temperature and hardens by heat. 42Sn-58Bi solder is solid at room temperature and melts at 138 degrees C. Since TEGDMA and 42Sn-58Bi solder are selectively utilized as adhesives by setting the process temperature at room temperature for TEGDMA and 150 degrees C for 42Sn-58Bi solder, the sequential self-assembly of different components can be realized. The feasibility of the proposed process and alignment accuracy are experimentally and theoretically examined using 1 mm square silicon chips as test components. The first component assembly on a substrate is carried out at room temperature using TEGDMA, and the second component assembly on the assembled component is carried out at 150 degrees C using 42Sn-58Bi solder Both assembly steps are carried out in EG (Ethylene Glycol) solvent with an additional sulfuric acid. It was confirmed that the first and the second assembly were successfully done at room temperature and at 150 degrees C, and alignment accuracy of the first and the second assembly were 33 mu m and a few pm, respectively.

    IEEE, 2007年, 6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 128 - +, 英語

    [査読有り]

  • 樋口雄一, 菅野公二, 土屋智由, 田畑修

    2007年, 電気学会センサ・マイクロマシン準部門論文誌, 127 (4), 214 - 220

  • 単層カーボンナノチューブ引張試験のための静電容量型MEMS デバイスの構造設計

    城森 知也, 宮本 憲治, 菅野 公二, 土屋 智由, 田畑 修

    2006年12月, 第50回日本学術会議材料工学連合講演会, 0, 日本語

  • 高温薄膜引張試験機の試作および単結晶シリコン薄膜の物性評価

    池田 哲郎, 菅野 公二, 土屋 智由, 田畑 修

    2006年12月, 第50回日本学術会議材料工学連合講演会, 0, 日本語

  • Sub-Micro Particles Patterning Using Self-Assembly and Two-Step Printing

    OZAKI Takashi, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

    2006年10月05日, Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 19 - 22, 英語

    [査読有り]

  • A differential capacitive three-axis SOI accelerometer using vertical comb electrodes

    HAMAGUCHI Hiroyuki, SUGANO Koji, TSUCHIYA Toshiyuki, TABATA Osamu

    2006年10月05日, Proc Sens Symp Sens Micromachines Appl Syst, 23rd, 471 - 476, 英語

    [査読有り]

  • 移動マスクUV露光法による厚膜レジストの三次元微細加工技術

    平井 義和, Inamoto, 菅野 公二, 土屋 智由, 田畑 修

    2006年10月, Proceedings of the 23rd Sensor Symposium, 471 - 476, 日本語

  • 電磁式天秤を用いたマイクロ構造のバネ定数測定

    宮本 憲治, 城森 知也, 菅野 公二, 土屋 智由, 田畑 修

    2006年09月, 日本機械学会2006年年次大会, 0, 日本語

  • 薄膜材料の高温引張試験に関する基礎検討

    池田哲郎, 菅野公二, 土屋 智由, 田畑 修

    2006年05月, 電気学会E部門総合研究会, MSS-06-18, 83 - 87, 日本語

  • 単結晶シリコン薄膜の環境制御引張疲労試験

    山地 祐輔, 菅野 公二, 土屋 智由, 田畑 修

    2006年03月, 電気学会全国大会, 3, 198 - 199, 日本語

  • Vertical drive micro actuator using SMA thin film for a smart button

    W Yoshikawa, A Sasabe, K Sugano, T Tsuchiya, O Tabata, A Ishida

    This paper presents the performance of a shape memory alloy (SMA) thin film micro-actuator for a small tactile display to reproduce an object texture to a fingertip. Maximum displacement of 30 mu m under 4.2 mN load with an actuator length of 1 mm, which fulfills the minimum requirements for reproducing a texture to a fingertip, is realized by the newly proposed SMA thin film actuator structure.

    IEEE, 2006年, MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, 734 - 737, 英語

    [査読有り]

  • Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps

    K. Sugano, H. Yamada, O. Ichihashi, T. Tsuchiya, O. Tabata

    2006年, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2006, 546 - 549, 英語

    [査読有り]

  • Tensile-Mode Fatigue Test of Single Crystal Silicon Thin Films Using Electrostatic Grip

    Yusuke Yamaji, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2005年10月, PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 311 - 315, 英語

  • Gold Nanoparticles Synthesis With Pulsed Mixing Method

    Hideo Yamada, Osamu Ichihashi, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2005年10月, PROCEEDINGS OF THE 22ND SENSOR SYMPOSIUM, 329 - 332, 英語

  • 粒子アセンブルにおける液中微粒子の付着力評価

    市橋 治, 李 周原, 石井 昌宏, 菅野 公二, 土屋 智由, 田畑 修

    2005年06月, 電気学会E部門総合研究会, 57 - 62, 日本語

  • H Yagyu, K Sugano, S Hayashi, O Tabata

    We present a new rapid prototyping technique without a photolithography step to produce a glass chip with high aspect ratio channel for a micro total analysis system (mu TAS). This technique consists of a powder blasting technique and direct laser patterning of Au nanoparticles dispersed polymer mask technique, and is useful in the development stage of a glass chip. The mask thickness and powder blasting condition were optimized for the fabrication of a glass chip with a higher aspect ratio channel. Under the optimized processing condition, the microchannel with a maximum aspect ratio of 2.1 in a glass substrate was successfully realized. The proposed technique was applied to a glass chip for electrophoresis and its performance for DNA separation analysis was confirmed.

    IOP PUBLISHING LTD, 2005年06月, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 15 (6), 1236 - 1241, 英語

  • H Yagyu, K Sugano, S Hayashi, O Tabata

    We present a new rapid prototyping technique without a photolithography step to produce a glass chip with high aspect ratio channel for a micro total analysis system (mu TAS). This technique consists of a powder blasting technique and direct laser patterning of Au nanoparticles dispersed polymer mask technique, and is useful in the development stage of a glass chip. The mask thickness and powder blasting condition were optimized for the fabrication of a glass chip with a higher aspect ratio channel. Under the optimized processing condition, the microchannel with a maximum aspect ratio of 2.1 in a glass substrate was successfully realized. The proposed technique was applied to a glass chip for electrophoresis and its performance for DNA separation analysis was confirmed.

    IOP PUBLISHING LTD, 2005年06月, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 15 (6), 1236 - 1241, 英語

  • Simulation of Surface Roughness in Si Etching with XeF

    Koji Sugano, Osamu Tabata

    2004年07月, Asia-Pacific Conference of Transducers and Micro-Nano Technology, 547 - 552, 英語

  • Simulation of Surface Roughness in Si Etching with XeF2

    Koji Sugano, Osamu Tabata

    2004年, 第21回「センサ・マイクロマシンと応用システム」シンポジウム, 483 - 488, 日本語

  • マイクロブラストを用いたμ-TASガラスチップの作製

    楠原賢治, 菅野公二, 田畑 修, 柳生裕聖

    2004年, 電気学会E部門総合研究会, 75 - 80, 日本語

  • Rapid prototyping of glass chip with micro-powder blasting using nano-particles dispersed polymer

    H Yagyu, K Sugano, S Hayashi, O Tabata

    We present a new rapid prototyping technique to produce a glass chip with high aspect ratio channel for micro total analysis system (muTAS). This technique consists of powder blasting technique and laser patterning of newly developed Au nano-particles dispersed polymer mask. The microchannel with maximum aspect ratio of 2.1 in a glass substrate was successftilly realized without photolithography step. The proposed technique was applied to a glass chip for electrophoresis and its performance for DNA separation analysis was confirmed. Furthermore, the micro-powder blasting technique with elevated temperature of Au nano-particles dispersed polymer mask was proposed for the first time.

    IEEE, 2004年, MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 697 - 700, 英語

    [査読有り]

  • マイクロマシニングを用いた軟X線遷移放射ターゲット

    菅野 公二, 田畑 修, 辻 慎史, 豊杉 典生, 山田 廣成

    2003年, 電気学会研究会資料,マイクロマシン・センサシステム研究会, MSS-03-35, 35 - 39, 日本語

  • K. Sugano, O. Tabata

    Low etching pressure and addition of buffer gas successfully decrease the etched surface roughness and the aperture effect which represent challenges toward the application of silicon etching with XeF2 to MEMS fabrication. Etched roughness and aperture effect are extremely high and limit factors for the design rules of MEMS. By lowering the charge pressure of XeF2 from 390 to 65 Pa, the etched roughness decreased from 870.8 and 174.4 Å and the uniformity ((depth for 25 μm mask aperture)/(depth for 175 μm mask aperture) × 100 %) improved from 71.3 to 88.7%. By adding N2 or reaction products including Xe and SiF4 as buffer gas, surface roughness was reduced and the surface morphology changed.

    2003年, Proceedings of SPIE - The International Society for Optical Engineering, 4979, 62 - 69, 英語

    [査読有り]

  • K. Sugano, O. Tabata

    Low etching pressure and high silicon substrate temperature successfully decrease the etched surface roughness and the aperture size effect, which represent challenges to the application of silicon etching with XeF2 to the fabrication of microelectromechanical systems (MEMS). The etched roughness and aperture size effect are extremely high and limit factors for the design rules of MEMS devices. In order to express the extent of the aperture size effect, a uniformity of etched depth is defined as follows: (depth at 25 μm)/(depth at 175 μm) × 100%. By lowering the charge pressure from 390 to 65 Pa, the etched roughness decreased from 870.8 and 174.4 Å and the uniformity improved from 71.3 to 88.7%. By increasing the substrate temperature from 300 to 440 K, the etched roughness decreased from 151.4 and 44.5 Å and the uniformity increased from 71.3 to 91.6%. These results will allow us to design with fewer constraints and to expand the field of applications of XeF2 etching to MEMS.

    2002年11月, Journal of Micromechanics and Microengineering, 12 (6), 911 - 916, 英語

  • K Sugano, O Tabata

    We developed a XeF2 pulse etching system and clarified the Si etching characteristics. Dependencies of Si etching rates and etched roughness on the crystallographic orientation, number of pulses, pulse duration time, aperture size and etching pressure were measured. An etching depth and an etched roughness were 12.9 mum and 115 nm, respectively under charge pressure of 390 Pa, a pulse number of 10 and pulse duration time of 60 s. The etching depth increased by 36% with increasing the aperture width from 25 to 175 mum. This aperture size effect decreased from 36 to 20% with decreasing charge pressure from 390 to 65 Pa. The etched roughness decreases also with decreasing the etching pressure. The roughness was 25 nm under the charge pressure of 65 Pa, 50 pulses, 60 s.

    SPRINGER, 2002年11月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 9 (1-2), 11 - 16, 英語

  • K. Sugano, O. Tabata

    Low etching pressure and high silicon substrate temperature successfully decrease the etched surface roughness and the aperture size effect, which represent challenges to the application of silicon etching with XeF2 to the fabrication of microelectromechanical systems (MEMS). The etched roughness and aperture size effect are extremely high and limit factors for the design rules of MEMS devices. In order to express the extent of the aperture size effect, a uniformity of etched depth is defined as follows: (depth at 25 μm)/(depth at 175 μm) × 100%. By lowering the charge pressure from 390 to 65 Pa, the etched roughness decreased from 870.8 and 174.4 Å and the uniformity improved from 71.3 to 88.7%. By increasing the substrate temperature from 300 to 440 K, the etched roughness decreased from 151.4 and 44.5 Å and the uniformity increased from 71.3 to 91.6%. These results will allow us to design with fewer constraints and to expand the field of applications of XeF2 etching to MEMS.

    2002年11月, Journal of Micromechanics and Microengineering, 12 (6), 911 - 916, 英語

  • K Sugano, O Tabata

    We developed a XeF2 pulse etching system and clarified the Si etching characteristics. Dependencies of Si etching rates and etched roughness on the crystallographic orientation, number of pulses, pulse duration time, aperture size and etching pressure were measured. An etching depth and an etched roughness were 12.9 mum and 115 nm, respectively under charge pressure of 390 Pa, a pulse number of 10 and pulse duration time of 60 s. The etching depth increased by 36% with increasing the aperture width from 25 to 175 mum. This aperture size effect decreased from 36 to 20% with decreasing charge pressure from 390 to 65 Pa. The etched roughness decreases also with decreasing the etching pressure. The roughness was 25 nm under the charge pressure of 65 Pa, 50 pulses, 60 s.

    SPRINGER, 2002年11月, MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 9 (1-2), 11 - 16, 英語

  • K Sugano, O Tabata

    Low etching pressure and high temperature on silicon substrate successfully decrease the etched surface roughness and the aperture effect which represent challenges toward the application of silicon etching with XeF2 to MEMS fabrication. Etched roughness and aperture effect are extremely high and limit factors for the design rules of MEMS devices. In order to express an extent of the aperture effect, an uniformity of etched depth is defined as follow: (Depth at 25 mum)/(Depth at 175 mum)X100%. By lowering the charge pressure from 390 to 65 Pa, the etched roughness decreased from 870.8 and 174.4 Angstrom and the uniformity improved from 71.3 to 88.7%. By heightening the substrate temperature from 300 to 440 V, the etched roughness decreased from 151.4 and 44.5 Angstrom and the uniformity increased from 71.3 to 91.6%. These results will allow us to design with less constrained and expand the field of applications of XeF2 etching to MEMS.

    IEEE, 2002年, MHS2002: PROCEEDINGS OF THE 2002 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 47 - 52, 英語

  • XeF2 を用いたSi エッチングにおける表面粗さと加工深さの制御

    菅野 公二, 田畑 修

    2002年, 第19回「センサ・マイクロマシンと応用システム」シンポジウム, 303 - 308, 日本語

  • XeF2エッチングにおけるエッチング特性と紫外線照射によるマスク材のエッチレート制御

    菅野 公二, 田畑 修

    2001年, マイクロマシニング研究会, 0, 日本語

  • Koji Sugano, Osamu Tabata

    A new technique to control etching rates of mask materials during XeF2 etching was proposed. By exposing Si sample with SiO2 and Si3N4 as mask materials to UV light of 3 W/cm2 during XeF2 etching, the etching rates of SiO2 and Si3N4 were dramatically increased from 2.52 Å/pulse to 42.0 Å/pulse and from 27.3 Å/pulse to 403 Å/pulse, respectively. This new technique allows us to remove the mask material selectively and change the mask pattern by UV light exposure during in-situ etching process without additional photolithography step and opens a new silicon micromachining process for 3-dimensional fabrication. The multi-step Si structure was successfully realized by this technique.

    2001年, Proceedings of SPIE-The International Society for Optical Engineering, 4557, 18 - 23, 英語

    [査読有り]

  • Selectivity Control of Mask Material for XeF2 Etching Using UV light Exposure

    2001年, 電気学会センサ・マイクロマシン準部門論文誌, Vol.121-E, No.12, pp.327-332

  • Selectivity Control of Mask Material for XeF2 Etching Using UV light Exposure

    2001年, 電気学会センサ・マイクロマシン準部門論文誌, Vol.121-E, No.12, pp.327-332

  • Effects of etching pressure and aperture width on Si etching with XeF2

    K. Sugano, O. Tabata

    2000年, Proceedings of the International Symposium on Micro Machine and Human Science, 89 - 94, 英語

    [査読有り]

  • Study on XeF2 pulse etching using wagon wheel pattern

    Koji Sugano, Osamu Tabata

    1999年, Proceedings of the International Symposium on Micro Machine and Human Science, 163 - 167, 英語

    [査読有り]

講演・口頭発表等

  • 静電型マイクロ振動子トランスデューサを用いたシリコン近赤外光強度センサ

    中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

    第36回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年11月20日, 日本語

    ポスター発表

  • Electrical and Optical Characterization of Nanogap Electrodes with an Assembled Gold Nanoparticle Chain

    Takayuki Sumitomo, Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono

    33rd International Microprocesses and Nanotechnology Conference (MNC2020), 2020年11月09日, 英語

    口頭発表(一般)

  • Growth Direction of VLS Silicon Nanowires with Surface Nanoholes Formed Using MACE

    Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono

    33rd International Microprocesses and Nanotechnology Conference (MNC2020), 2020年11月09日, 英語

    口頭発表(一般)

  • マイクロ振動子のたわみ制御による振動型光センサの高感度化

    竹上 航平, 新居 直之, 上杉 晃生, 菅野, 磯野 吉正

    第37回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年10月28日, 日本語

    口頭発表(一般)

  • ⾦ナノ構造光吸収体集積静電型マイクロ振動⼦デバイスによる近⾚外光強度センシング

    鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

    第37回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年10月27日, 日本語

    ポスター発表

  • 光センシングマイクロ共振デバイスの梁長さおよび振幅が計測分解能に与える影響

    近藤 直輝, 竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

    第37回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年10月27日, 日本語

    口頭発表(一般)

  • 高温パンチクリープ成形技術を用いた3軸力覚センサの開発および被覆樹脂の粘弾性特性を考慮したセンサ性能評価

    澤田 和磨, 丹村 響介, 大坂 憲司, 上杉 晃生, 菅野 公二, 磯野 吉正

    第37回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年10月27日, 日本語

    口頭発表(一般)

  • 金ナノ構造を用いた波長依存性を有するSOI型近赤外ボロメータ素子

    坪田 達也, 上杉 晃生, 菅野 公二, 磯野 吉正

    第37回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年10月26日, 日本語

    口頭発表(一般)

  • 金ナノ粒子二量体を用いたナノギャップ電極の作製とその電気的・光学的評価

    住友 孝行, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

    第37回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年10月26日, 日本語

    口頭発表(一般)

  • 近赤外吸収体を有する静電型マイクロ振動子デバイスを用いた水の分光測定

    鈴木 隆正, 中藤 康太, 上杉 晃生, 菅野 公二, 磯野 吉正

    第37回「センサ・マイクロマシンと応用システム」シンポジウム, 2020年10月26日, 日本語

    口頭発表(一般)

  • シリコンマイクロ振動子光センサにおける共振周波数特性の形状依存性

    竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

    第36回「センサ・マイクロマシンと応用システム」シンポジウム, 2019年11月21日, 日本語

    ポスター発表

  • 架橋成長Si ナノワイヤの熱電特性評価に関する研究

    北川 諒, 岸本 卓巳, 小國 凌, 上杉 晃生, 菅野 公二, 磯野 吉正

    第36回「センサ・マイクロマシンと応用システム」シンポジウム, 2019年11月20日, 日本語

    ポスター発表

  • コアシェルSiC ナノワイヤの電気伝導性に及ぼすシェル表面電位

    井ノ山 滉大, 仲田 進哉, 上杉 晃生, 菅野 公二, 磯野 吉正

    第36回「センサ・マイクロマシンと応用システム」シンポジウム, 2019年11月20日, 日本語

    ポスター発表

  • 金ナノグレーティング構造の光吸収ピーク波長制御による高感度レーザ波長計測マイクロ振動子デバイス

    竹上 航平, 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

    第36回「センサ・マイクロマシンと応用システム」シンポジウム, 2019年11月20日, 日本語

    ポスター発表

  • 光励起ナノギャップ電極を用いたDNA オリゴマーの光トラップおよび1 分子検出

    森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

    第36回「センサ・マイクロマシンと応用システム」シンポジウム, 2019年11月20日, 日本語

    口頭発表(一般)

  • 金ナノ粒子二量体表面増強ラマン分光によるDNA オリゴマーの1 塩基検出

    金谷 恭臣, 丸岡 克成, 森田 明宏, 上杉 晃生, 菅野 公二, 磯野 吉正

    第36回「センサ・マイクロマシンと応用システム」シンポジウム, 2019年11月20日, 日本語

    ポスター発表

  • Evaluation of Thermoelectric Properties of VLS-Grown Bridged Si Nanowire

    Akio Uesugi, Ryo Kitagawa, Ryo Oguni, Koji Sugano, Yoshitada Isono

    32nd International Microprocesses and Nanotechnology Conference (MNC2019), 2019年10月28日, 英語

    ポスター発表

  • Near-Infrared Light Absorbers Using Si-Deposited Gold Nanowire Grating Structures

    Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

    32nd International Microprocesses and Nanotechnology Conference (MNC2019), 2019年10月28日, 英語

    ポスター発表

  • Effect of The Numbers of Beams and Corners on Resonant Frequency Response of Silicon Microresonator to Near-Infrared-Light Irradiation for Optical Sensing

    Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

    32nd International Microprocesses and Nanotechnology Conference (MNC2019), 2019年10月28日, 英語

    ポスター発表

  • Effect of Gold Nanoparticle Diameter on Raman Intensity of DNA Oligomers toward Single Nucleobase Detection

    Keji Murotani, Katsunari Maruoka, Akio Uesugi, Koji Sugano, Yoshitada Isono

    32nd International Microprocesses and Nanotechnology Conference (MNC2019), 2019年10月28日, 英語

    口頭発表(一般)

  • Microresonator-Based Photodetector of Near-Infrared Light Using Electrostatic Transducers

    Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono

    32nd International Microprocesses and Nanotechnology Conference (MNC2019), 2019年10月28日, 英語

    口頭発表(一般)

  • Single-molecule Surface Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimer

    Koji Sugano

    2019 International Conference on Optical MEMS and Nanophotonics (IEEE OMN 2019), 2019年08月01日, 英語

    [招待有り]

    口頭発表(招待・特別)

  • Surface-Enhanced Raman Spectroscopy of DNA with Single-Molecule Sensitivity Using Gold Nanoparticle Dimer

    Koji Sugano

    The 19th IEEE International Conference on Nanotechnology (IEEE-NANO2019), 2019年07月26日, 英語

    [招待有り]

    口頭発表(招待・特別)

  • SERS detection of a single nucleobase in a DNA oligomer using gold nanoparticle dimer

    Koji Sugano, Katsunari Maruoka, Akio Uesugi, Yoshitada Isono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2019), 2019年06月26日, 英語

    ポスター発表

  • Manipulation of biomolecules into nanogap by plasmonic optical excitation for highly sensitive biosensing

    Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2019), 2019年06月26日, 英語

    口頭発表(一般)

  • Surface-Enhanced Raman Spectroscopy of DNA Bases Using Gold Nanoparticle Dimer Array

    Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Koji Sugano, Yoshitada Isono

    31st International Microprocesses and Nanotechnology Conference (MNC2018), 2018年11月, 英語, 国際会議

    ポスター発表

  • Development of 3D Formed Tactile Sensor by High Temperature Punch Creep Forming Technique

    Kyosuke Nimura, Kenji Osaka, Takao Toyoda, Akio Uesugi, Koji Sugano, Yoshitada Isono

    31st International Microprocesses and Nanotechnology Conference (MNC2018), 2018年11月, 英語, 国際会議

    口頭発表(一般)

  • VLS成長SiNW単体に対する熱電変換特性評価

    北川 諒, 井本 大暉, 上杉 晃生, 菅野 公二, 磯野 吉正

    第35回「センサ・マイクロマシンと応用システム」シンポジウム, 2018年10月, 日本語, 国内会議

    ポスター発表

  • Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性

    新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

    第35回「センサ・マイクロマシンと応用システム」シンポジウム, 2018年10月, 日本語, 国内会議

    ポスター発表

  • 単結晶シリコン薄膜の高温パンチクリープ成形による極小3軸力覚センサの開発

    丹村 響介, 大坂 憲司, 豊田 崇夫, 菅野 公二, 磯野 吉正

    日本材料学会マルチスケール材料力学シンポジウム, 2018年05月, 日本語, 国内会議

    口頭発表(一般)

  • A Novel 3-axis Tiny Tactile Sensor Developed by 3-D Microstructuring Using Punch Creep Forming Process

    Kenji Osaka, Satoshi Nakata, kensuke Yamamoto, Takao Toyoda, Koji Sugano, Yoshitada Isono

    The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS2018), 2018年01月, 英語, 国際会議

    ポスター発表

  • Surface-Enhanced Raman Spectroscopy of Adenine Molecule Using Single Dimer of Gold Nanoparticles

    Katsunari Maruoka, Kohei Ikegami, Koji Sugano, Yoshitada Isono

    30th International Microprocesses and Nanotechnology Conference (MNC2017), 2017年11月, 英語, 国際会議

    ポスター発表

  • Laser Wavelength Measurement Using Gold Nanoparticle Aggregate Integrated Microresonator

    Koji Sugano, Shuji Joya, Naoyuki Arai, Yuki Tanaka, Etsuo Maeda, Reo Kometani, Yoshitada Isono

    30th International Microprocesses and Nanotechnology Conference (MNC2017), 2017年11月, 英語, 国際会議

    口頭発表(一般)

  • 単一金ナノ粒子二量体を用いた表面増強ラマン分光によるDNAオリゴマー1分子検出

    丸岡 克成, 菅野 公二, 磯野 吉正

    第34回「センサ・マイクロマシンと応用システム」シンポジウム, 2017年10月, 日本語, 国内会議

    口頭発表(一般)

  • 高温クリープ立体成形技術による極小MEMS触覚センサの開発研究

    大坂 憲司, 中田 悟史, 山本 賢祐, 菅野 公二, 磯野 吉正

    第34回「センサ・マイクロマシンと応用システム」シンポジウム, 2017年10月, 日本語, 国内会議

    ポスター発表

  • Si薄膜被覆金ナノワイヤグレーティング構造の近赤外域光学特性評価

    新居 直之, 菅野 公二, 磯野 吉正

    第34回「センサ・マイクロマシンと応用システム」シンポジウム, 2017年10月, 日本語, 国内会議

    ポスター発表

  • Evaluation of mechano-electric properties for VLS-grown core/shell silicon carbide nanowires

    Shinya Nakata, Daiki Imoto, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, Koji Sugano, Yoshitada Isono

    14th International Conference on Fracture, 2017年06月, 英語, 国際会議

    口頭発表(一般)

  • VLS成長Core/Shell-SiCナノワイヤのピエゾ抵抗効果に及ぼすSiO2被覆の影響

    仲田 進哉, 菅野 公二, 磯野 吉正

    日本材料学会マルチスケール材料力学シンポジウム, 2017年05月, 日本語, 国内会議

    ポスター発表

  • ボトムアップナノ構造形成技術とバイオ・ケミカルセンサへの応用

    菅野 公二

    平成29年電気学会全国大会, 2017年03月, 日本語, 国内会議

    [招待有り]

    口頭発表(招待・特別)

  • 単一金ナノ粒子二量体を用いたアデニンの表面増強ラマン分光検出

    丸岡 克成, 池上 晃平, 菅野 公二, 磯野 吉正

    フィジカルセンサ/マイクロマシン・センサシステム合同研究会, 2016年12月, 日本語, 国内会議

    口頭発表(一般)

  • Si薄膜被覆金ナノワイヤアレイ構造の光学特性評価

    新居 直之, 城谷 修司, 菅野 公二, 磯野 吉正

    フィジカルセンサ/マイクロマシン・センサシステム合同研究会, 2016年12月, 日本語, ,城谷修司,菅野公二,磯野吉正, 国内会議

    口頭発表(一般)

  • Piezoresistance effect of VLS-synthesized core/shell-SiC nanowires

    Shinya Nakata, Daiki Imoto, Koji Sugano, Francesca Rossi, Alois Lugstein, Yoshitada Isono

    International Symposium on Micro-Nano Science and Technology2016, 2016年12月, 英語, 国際会議

    ポスター発表

  • Near Infrared Optical Absorption Property of Gold Nanoparticle Aggregates for Laser Wavelength Measurement

    Shuji Joya, Naoyuki Arai, Yuki Tanaka, Koji Sugano, Yoshitada Isono

    International Symposium on Micro-Nano Science and Technology2016, 2016年12月, 英語, 国際会議

    ポスター発表

  • High temperature creep forming technique of single crystal silicon thin film for 3D MEMS tactile sensors

    Kensuke Yamamoto, Satoshi Nakata, Koji Sugano, Yoshitada Isono

    International Symposium on Micro-Nano Science and Technology2016, 2016年12月, 英語, 国際会議

    ポスター発表

  • Highly-Sensitive and Rapid Detection of DNA bases using Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimer Array

    Kohei Ikegami, Koji Sugano, Yoshitada Isono

    International Symposium on Micro-Nano Science and Technology2016, 2016年12月, 英語, 国際会議

    ポスター発表

  • Single-Molecule Surface-Enhanced Raman Spectroscopy of 4,4'-bipyridine on Fabricated Substrates with Directionally Arrayed Gold Nanoparticle Dimers

    Koji Sugano, Kiyohito Aiba, Kohei Ikegami, Yoshitada Isono

    29th International Microprocesses and Nanotechnology Conference (MNC2016), 2016年11月, 英語, 国際会議

    口頭発表(一般)

  • Optimization of Gold Nanorod Array Structure on Microresonator for Resonant-Based Laser Wavelength Measurement Using Photothermal Conversion

    Koji Sugano, Yuki Tanaka, Etsuo Maeda, Reo Kometani, Yoshitada Isono

    29th International Microprocesses and Nanotechnology Conference (MNC2016), 2016年11月, 英語, 国際会議

    口頭発表(一般)

  • Mechanical Characterization of VLS-Grown Core-Shell SiC Nanowires for Nanomechanical Sensors

    Shinya Nakata, Koji Sugano, Francesca Rossi, Giancarlo Salyiati, Alois Lugstein, Yoshitada Isono

    29th International Microprocesses and Nanotechnology Conference (MNC2016), 2016年11月, 英語, 国際会議

    口頭発表(一般)

  • Characterization Method of Relative Raman Enhancement for Surface Enhanced Raman Spectroscopy Using Gold Nanoparticle Dimer Array

    Kohei Ikegami, Koji Sugano, Yoshitada Isono

    29th International Microprocesses and Nanotechnology Conference (MNC2016), 2016年11月, 英語, 国際会議

    口頭発表(一般)

  • 金ナノ粒子二量体配列を用いたDNA塩基の高感度・高速表面増強ラマン分光

    池上 晃平, 菅野 公二, 磯野 吉正

    第33回「センサ・マイクロマシンと応用システム」シンポジウム, 2016年10月, 日本語, 国内会議

    口頭発表(一般)

  • 金ナノロッド構造を用いた光熱変換によるレーザ光波長計測マイクロ振動子デバイス

    菅野 公二, 田中 祐樹, 前田 悦男, 米谷 玲皇, 磯野 吉正

    第33回「センサ・マイクロマシンと応用システム」シンポジウム, 2016年10月, 日本語, 国内会議

    口頭発表(一般)

  • 逆解析手法による単結晶Si薄膜の高温クリープ特性解明と触覚センサ開発への応用

    山本 賢祐, 中田 悟史, 菅野 公二, 磯野 吉正

    第33回「センサ・マイクロマシンと応用システム」シンポジウム, 2016年10月, 日本語, 国内会議

    口頭発表(一般)

  • 逆解析による単結晶Si薄膜の三次元高温クリープ成形加工技術の確立

    山本 賢祐, 中田 悟史, 菅野 公二, 磯野 吉正

    日本機械学会 M&M2016材料力学カンファレンス, 2016年10月, 日本語, 国内会議

    口頭発表(一般)

  • VLSボトムアップ成長Core/Shell-SiCナノワイヤのMEMS援用ピエゾ抵抗特性評価

    仲田 進哉, 井本 大暉, Feancesca Rossi, Alois Lugstein, 菅野 公二, 磯野 吉正

    第33回「センサ・マイクロマシンと応用システム」シンポジウム, 2016年10月, 日本語, 国内会議

    口頭発表(一般)

  • Single Molecule SERS with Directionally Arrayed Gold Nanoparticle Dimers on Substrate

    Koji Sugano

    Pacific Rim Meeting on Electrochemical and Solid-state Science 2016 (PRiME2016), 2016年10月, 英語, 国際会議

    [招待有り]

    口頭発表(招待・特別)

  • 逆解析手法による単結晶シリコン薄膜の高温クリープ三次元成形加工技術の確立

    山本 賢祐, 中田 悟史, 菅野 公二, 磯野 吉正

    マルチスケール材料力学シンポジウム, 2016年05月, 日本語, 国内会議

    ポスター発表

  • 3C-SiCNWのMEMS援用Elastic Strain Engineering研究 -ピエゾ抵抗効果の実験解明

    仲田 進哉, 井本 大暉, 菅野 公二, 磯野 吉正

    マルチスケール材料力学シンポジウム, 2016年05月, 日本語, 国内会議

    口頭発表(一般)

  • Plasmonic Nanostructure based on Self-Assembled Gold Nanoparticles for Highly Sensitive Surface-Enhanced Raman Spectroscopy

    Koji Sugano

    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS2016), 2016年04月, 英語, 国際会議

    [招待有り]

    口頭発表(招待・特別)

  • Fabrication and Characterization of CNT Forest Integrated Micromechanical Resonator for Rarefied Gas Sensor

    Koji Sugano, Ryu Matsumoto, Ryota Tsutsui, Hiroyuki Kishihara, Naoki Matsuzuka, Yoshitada Isono

    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), 2016年04月, 英語, 国際会議

    口頭発表(一般)

  • Crystal Orientation Dependence of Piezoresistivity for VLS-Grown Single Crystal Silicon Nanowires

    Shinya Nakata, Yuma Kitada, Stefan Wagesreither, Alois Lugstein, Koji Sugano, Yoshitada Isono

    The 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), 2016年04月, 英語, 国際会議

    口頭発表(一般)

  • Gold Nanoparticle Synthesis Using High-Speed Pulsed Mixing Microfluidic Device

    Koji Sugano, Ayumi Maedomari, Yuki Tanaka, Yoshitada Isono

    28th International Microprocesses and Nanotechnology Conference (MNC2015), 2015年11月, 英語, 国際会議

    ポスター発表

  • 金ナノ粒子二量体配列を用いた表面増強ラマン分光におけるラマン増強度評価法

    池上 晃平, 饗庭 清仁, 菅野 公二, 磯野 吉正

    第32回「センサ・マイクロマシン と応用システム」シンポジウム, 2015年10月, 日本語, 国内会議

    口頭発表(一般)

  • 金ナノ粒子二量体配列を用いたDNA塩基の表面増強ラマン分光

    饗庭 清仁, 池上 晃平, 菅野 公二, 磯野 吉正

    第32回「センサ・マイクロマシン と応用システム」シンポジウム, 2015年10月, 日本語, 国内会議

    ポスター発表

  • 金ナノ粒子二量体配列における表面増強ラマン分光1分子検出特性

    饗庭 清仁, 池上 晃平, 菅野 公二, 磯野 吉正

    第32回「センサ・マイクロマシン と応用システム」シンポジウム, 2015年10月, 日本語, 国内会議

    口頭発表(一般)

  • 金ナノ粒子直線状配列を用いた表面増強ラマン分光の特性評価

    池上 晃平, 竹下 俊光, 饗庭 清仁, 菅野 公二, 磯野 吉正

    第32回「センサ・マイクロマシン と応用システム」シンポジウム, 2015年10月, 日本語, 国内会議

    口頭発表(一般)

  • VLS成長シリコンナノワイヤの歪み誘起電気伝導特性の結晶方位依存性

    仲田 進哉, 北田 勇馬, Stefan Wagesreither, Alois Lugstein, 菅野 公二, 磯野 吉正

    第32回「センサ・マイクロマシン と応用システム」シンポジウム, 2015年10月, 日本語, 国内会議

    口頭発表(一般)

  • Evaluation of Piezoresistivity for VLS-Grown Silicon NanowiresUnder Enormous Elastic Strain

    Sinya Nakata, Yuma Kitada, Stefan Wagesreither, Alois Lugstein, Koji Sugano, Yoshitada Isono

    International Conference on Advanced Technology in Experimental Mechanics 2015 (ATEM'15), 2015年10月, 英語, 国際会議

    口頭発表(一般)

  • 直線状金ナノ粒子配列の表面増強ラマン分光特性

    竹下 俊光, 池上 晃平, 菅野 公二, 磯野 吉正

    平成27年度電気学会マイクロマシン・センサシステム部門総合研究会, 2015年07月, 日本語, 国内会議

    口頭発表(一般)

  • Surface-Enhanced Raman Spectroscopy Analysis Using Micro/Nanofluidic Devices with Gold Nanoparticle-Embedded Nanochannels

    Koji Sugano, Keisuke Suekuni, Toshimitsu Takeshita, Yoshitada Isono

    27th International Microprocesses and Nanotechnology Conference (MNC2014), 2014年11月, 英語, Fukuoka, Japan, 国際会議

    口頭発表(一般)

  • Highly-sensitive Surface-Enhanced Raman Spectroscopy with Directionally-Arrayed Gold Nanoparticle Dimers

    Koji Sugano, Daimon Matsui, Toshiyuki Tsuchiya, Osamu Tabata

    27th International Microprocesses and Nanotechnology Conference (MNC2014), 2014年11月, 英語, Fukuoka, Japan, 国際会議

    ポスター発表

  • 半導体ナノワイヤ物性評価のためのMEMS-Based Strain Engineering

    北田 勇真, 川瀬 真也, 菅野 公二, Stefan Wagesreither, Alois Lugstein, 磯野 吉正

    第31回「センサ・マイクロマシンと応用システム」シンポジウム, 2014年10月, 日本語, 国内会議

    ポスター発表

  • 金粒子配列ナノ流路を用いた表面増強ラマン分光分析デバイス

    竹下 俊光, 末國 啓輔, 饗庭 清仁, 菅野 公二, 磯野 吉正

    第31回「センサ・マイクロマシンと応用システム」シンポジウム, 2014年10月, 日本語, 国内会議

    口頭発表(一般)

  • 金ナノ粒子二量体の規則的配列構造による高感度表面増強ラマン分光

    菅野 公二, 松井 大門, 土屋 智由, 田畑 修

    第31回「センサ・マイクロマシンと応用システム」シンポジウム, 2014年10月, 日本語, 国内会議

    口頭発表(一般)

  • MEMS デバイスによる多層カーボンナノチューブの層間すべり変形機構の解明

    竹下 俊光, 木村 大気, 菅野 公二, 磯野 吉正

    日本機械学会2014年度年次大会, 2014年09月, 日本語, 国内会議

    口頭発表(一般)

  • Surface-Enhanced Raman Spectroscopy for Molecular Trace Analysis using Directionally-Arranged Gold Nanoparticles

    Koji Sugano

    2014 International Symposium of Materials on Regenerative Medicine (2014 ISOMRM), 2014年08月, 英語, Tao-Yuan, Taiwan, 国際会議

    [招待有り]

    口頭発表(招待・特別)

  • 一方向に配列した金ナノ粒子二量体構造の表面増強ラマン分光特性評価

    菅野 公二, 松井 大門, 土屋 智由, 田畑 修

    平成26年度電気学会マイクロマシン・センサシステム部門総合研究会, 2014年05月, 日本語, 東京大学,東京, 国内会議

    口頭発表(一般)

  • 表面増強ラマン分光法のための金粒子配列ナノチャンネルの作製

    末國 啓輔, 竹下 俊光, 菅野 公二, 磯野 吉正

    第30回「センサ・マイクロマシンと応用システム」シンポジウム, 2013年11月, 日本語, 仙台, 国内会議

    ポスター発表

  • Development of MWCNT Embedded Micromechanical Resonator Working as rarefied Gas Sensor

    松本 竜, 岸原 宏幸, 菅野 公二, 花崎 逸雄, 山下 一郎, 浦岡 行治, 磯野 吉正

    応用物理学会 関西支部第2回講演会, 2013年10月, 日本語, 奈良, 国内会議

    ポスター発表

  • 多段 ICP-RIEプロセスを用いた架橋構造Siナノワイヤの加工

    鈴木 淳也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    日本機械学会 2013年度年次大会, 2013年09月, 日本語, 岡山, 国内会議

    口頭発表(一般)

  • ビオチン修飾1本鎖DNAを用いた単層カーボンナノチューブのギャップ電極への孤立アセンブル

    外薗 洸佑, 鈴木 淳也, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    日本機械学会 2013年度年次大会, 2013年09月, 日本語, 岡山, 国内会議

    口頭発表(一般)

  • MWCNT-Embedded MEMS Resonator Fabricated by Bio-MEMS Compatible Process for Rarefied Gas Sensing

    Koji Sugano, Ryu Matsumoto, Yukiharu Uraoka, Ichiro Yamashita, Yoshitada Isono

    2013 JSAP-MRS Joint Symposia, 2013年09月, 英語, Kyoto, 国際会議

    口頭発表(一般)

  • Atomic MEMSのための新規なアルカリ金属蒸気セル作製手法

    辻本 和也, 平井 義和, 菅野 公二, 土屋 智由, 藩 和宏, 水谷 夏彦, 田畑 修

    電子情報通信学会 ソサイエティ大会, 2013年09月, 日本語, 福岡, 国内会議

    口頭発表(一般)

  • (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性

    上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    日本機械学会 2013年度年次大会, 2013年09月, 日本語, 岡山, 国内会議

    口頭発表(一般)

  • 3軸加速度センサのマトリックス感度校正における取付角度誤差の影響評価

    中野 篤, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修, 梅田 章

    日本機械学会 Dynamics and Design Conference 2013 (第13回「運動と振動の制御」シンポジウム), 2013年08月, 日本語, 福岡, 国内会議

    口頭発表(一般)

  • Fractography Analysis of Tensile Tested (110) Silicon Prepared by Different Surface Morphology and Crystal Orientations

    Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK2013), 2013年07月, 英語, Burlingame, USA, 国際会議

    口頭発表(一般)

  • Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography

    Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK2013), 2013年04月, 英語, Berlin, Germany, 国際会議

    口頭発表(一般)

所属学協会

  • The Society of Powder Technilogy, Japan

  • The Japan Society of Mechanical Engineers

  • Japan Institute of Electronics Packaging

  • The Institute of Electrical Engineers of Japan

  • IEEE(The Institute of Electrical and Electronics Engineers)

  • 粉体工学会

  • (社)日本機械学会

  • エレクトロニクス実装学会

  • 電気学会

  • IEEE

共同研究・競争的資金等の研究課題

  • マイクロナノ融合プロセスによる光電気複合型ナノポアセンサデバイスの基盤技術構築

    田畑 修, 菅野 公二, 山下 直輝, 川合 健太郎

    日本学術振興会, 科学研究費助成事業 基盤研究(B), 基盤研究(B), 2019年04月 - 2022年03月, 研究分担者

  • 表面増強ラマン分光を用いた次世代DNAシーケンシング基盤技術

    菅野 公二, 磯野 吉正

    日本学術振興会, 科学研究費助成事業 基盤研究(B), 基盤研究(B), 神戸大学, 2018年04月 - 2021年03月, 研究代表者

    本申請課題では,従来のナノポアなど電気的検出法による次世代DNAシーケンシング技術より高い信頼性を有する新規な技術として,分子識別能力に優れた表面増強ラマン分光(SERS:Surface Enhanced Raman Spectroscopy)によるDNAシーケンシングを提案し,その基盤技術の確立を目的としている。この研究により,メチル化など異常修飾を含めた塩基配列を識別可能なDNAシーケンシング技術が期待される。平成30年度では以下の項目を明らかにすることを目的としてSERSおよび電気的手法によるDNAオリゴマー検出実験を行った。 (1)DNA断片における1塩基検出感度・1塩基空間分解能の実現と諸特性・現象の理解 単一金ナノ粒子二量体を用いてDNAオリゴマーのSERS計測を行った。単一の金ナノ粒子二量体のナノギャップ部分は単一のDNAオリゴマーのみ侵入可能な空間であり,本実験でDNAオリゴマー内容物のラマンピークが観測されることで単一DNAオリゴマーの検出が確認できる。CCCCACCCのDNAオリゴマー内にある種類の塩基(アデニン)が1つのみ含まれる配列にてSERS計測を行った結果,アデニンの明確なラマンピークが検出された。これにより,DNAオリゴマー内の1分子塩基感度の検出・同定が可能であることを実証した。 (2)巨大電磁場増強場におけるDNA断片挙動の理解とマニピュレーション技術の確立 トップダウン加工でナノギャップ電極を形成し,ナノギャップ(巨大電磁場増強場)におけるDNA断片の挙動を電気的計測により調べた。レーザ照射による電磁場増強によって大きな電場勾配が発生するためDNAオリゴマーに誘電泳動力が働くと考えられる。これまでにレーザ照射することでナノギャップ間に電流シグナルが得られた。この結果によりレーザ照射により分子がナノギャップに引き寄せられていることが考えられる。

  • 半導体ナノ細線の弾性歪み誘起電気伝導特性に対する表面電位の関与解明

    磯野 吉正, 菅野 公二

    日本学術振興会, 科学研究費助成事業 基盤研究(B), 基盤研究(B), 神戸大学, 2018年04月 - 2021年03月, 研究分担者

  • 田畑 修, 菅野 公二, 川合 健太郎

    日本学術振興会, 科学研究費助成事業 基盤研究(B), 基盤研究(B), 京都大学, 2016年04月 - 2019年03月, 研究分担者

    DNAナノ構造を利用し直径30nmの金ナノ粒子二量体を形成し,表面増強ラマン分光(SERS)による分子由来のシグナルの高感度検出に成功した。粒子径の最適化により,単一の二量体構造を用いて単一のDNAオリゴマーの検出と単一のアデニン塩基の検出・識別が可能であることを明らかにした。50%を超える収率で基板上の所望位置へのDNAナノ構造を固定化に成功した。Heイオンビームを用いてDNA塩基計測に最適な1.5-2nmのグラフェンナノポアを再現性良く形成し、作製したナノポアを用いてイオン電流によるDNAセンシングに成功した。以上より,光電気複合型ナノポアセンサデバイス実現に必要な基盤技術構築を完了した。

  • 菅野 公二

    日本学術振興会, 科学研究費助成事業 基盤研究(C), 基盤研究(C), 神戸大学, 2015年10月 - 2018年03月, 研究代表者

    巨大な表面増強ラマン散乱(SERS)を生み出す金ナノ粒子二量体アレイの高効率生成技術および高速高感度SERS分光分析技術を基盤として,1分子ずつ多成分をラマン分光検出する分子同定技術の構築を目的とした。その中で,単独の金ナノ粒子二量体を用いてDNAオリゴマーの検出が可能であることを確認した。局所的なラマン散乱光増強場から1つのDNAオリゴマーを検出したと考えられる。さらに,構成要素であるアデニンやグアニン,骨格要素に由来するラマンピークを検出したことから,多成分を同定できることを示した。

  • 磯野 吉正, 菅野 公二

    日本学術振興会, 科学研究費助成事業 基盤研究(B), 基盤研究(B), 神戸大学, 2015年04月 - 2018年03月, 研究分担者

    3C-SiCNWは、過酷環境下で使用されるMEMS用ピエゾ抵抗素子としての利用が期待されている。本研究では「ナノ細線集積MEMS歪み制御デバイス」を新開発し、同デバイスを利用してSiO2で包まれた3C-SiCNW(C/S-SiCNWという)の機械的特性およびピエゾ抵抗を明らかにした。SiO2シェルを含まない3C-SiCNWとC/S-SiCNWの引張強さは、平均でそれぞれ22.4、7.3GPaを示した。また、3C-SiCNWのゲージ係数は0.022εで-17.6であった。このように、3C-SiCNWはn型半導体の振る舞いを示し、ピエゾ抵抗素子材料として有用であると示唆された。

  • A-STEP「金ナノ粒子二量体配列基板を用いた高感度・高信頼性表面増強ラマン分光技術の開発」

    菅野 公二

    科学技術振興機構, 研究成果最適展開支援プログラム フィージビリティスタディステージ 探索タイプ, 2015年, 研究代表者

    競争的資金

  • A-STEP「金ナノ粒子二量体配列基板を用いた高感度・高信頼性表面増強ラマン分光技術の開発」

    菅野 公二

    研究成果最適展開支援プログラム フィージビリティスタディステージ 探索タイプ, 2014年, 研究代表者

    競争的資金

  • 菅野 公二

    日本学術振興会, 科学研究費助成事業 基盤研究(C), 基盤研究(C), 2012年04月 - 2015年03月, 研究代表者

    金ナノ粒子二量体は,その粒子連結方向と入射光偏光方向が一致した際に,巨大な電磁場増強を引き起こすことが知られている.本研究では,巨大な増強を得るために,ナノトレンチを用いたセルフアセンブルによって方向が揃ったナノ粒子二量体アレイを基板上に生成した.入射光偏光方向と粒子連結方向が一致した際に最大のラマン強度が得られることを,実験による評価によって実証した。さらに,二量体間距離に最適値があることを明らかにし,構造の最適化を達成した。その結果,4,4'-ビピリジン分子を10 pMの極低濃度で検出することに成功し,また100 nMの溶液では0.2 sの短時間で検出できることを示した。

  • 菅野 公二

    日本学術振興会, 科学研究費助成事業 若手研究(B), 若手研究(B), 京都大学, 2010年 - 2011年, 研究代表者

    ナノメータスケールの溝パターンをテンプレートとしたTemplate-Assisted Self-Assembly手法によって,粒子二量体構造の粒子間隔を10nmから60nmまで10nm毎に高精度に制御できる技術を構築した.ナノスケール溝へのセルフアセンブルの際に問題となる粒子間反発力を電解質添加によって抑制し, 90%程度の高収率で粒子間隔が制御された粒子二量体構造を作製することに成功した.

  • マイクロチップを用いた脈動混合による単分散金ナノ粒子創製

    菅野 公二

    日本学術振興会, 科学研究費助成事業 若手研究(B), 若手研究(B), 京都大学, 2006年 - 2007年, 研究代表者

    金ナノ粒子の局所プラズモン共鳴(LPR)や表面増強ラマン散乱(SERS)を用いた化学分析の高感度化を実現するために,最も大きな電場増強を示す粒子径60nmで粒子径分布の小さな金ナノ粒子を還元法により作製することを目的とした.そのため,マイクロポンプと混合用マイクロ流路を用いた脈動混合を2液に適用した.この手法により迅速な2液混合を行い,小さな粒子径分布の金ナノ粒子を作製する.研究成果を以下に示す. (1)脈動混合法の混合速度評価: 蛍光顕微鏡を用いて蛍光色素と純水の2液が混合する様子を観察し,混合速度を計算した.その結果,最短で95msecの混合が可能であり,混合速度をマイクロポンプの切替周波数により制御できることがわかった. (2)ポリマーマイクロ流路の設計・製作: ポリマー製の最適な混合流路形状を設計するために,流路内圧による流路変形を考慮することができる新しい電気等価回路解析モデルを構築した.このモデルにより,流路形状による流量や流れの応答性を正確に解析することができる. (3)脈動混合を用いた金ナノ粒子作製と粒子生成メカニズムの考察: 脈動混合により混合速度を制御し金ナノ粒子を作製した.(1)での混合速度と生成した粒子の粒子径・粒子径分布の関係から生成メカニズムについて考察を行った. (4)化学分析への応用の検討: LSPもしくはSERSを用いた化学分析に応用するために,金ナノ粒子の電場増強と消失スペクトルを有限差分領域法(FDTD)を用いて計算し,最適な構造を導出した.

  • 異種材料微粒子アセンブル技術による卓上型シンクロトロンのための軟X線源の開発

    菅野 公二

    日本学術振興会, 科学研究費助成事業 若手研究(B), 若手研究(B), 京都大学, 2004年 - 2005年, 研究代表者

    本研究では新規な微粒子のアセンブル技術を用いて卓上型シンクロトロン用の軟X線源構造を作製することを目的とした.本年度は1)理論計算による軟X線源構造の設計と2)軟X線源の中の微細構造を実現する粒子アセンブル技術の開発を行った. 1)理論計算による軟X線源構造の設計 理論計算によって軟X線放射に必要な膜厚と間隔を求めることができる.その際に,膜厚と間隔の誤差が放射強度に与える影響を計算した.その結果,使用する軟X線放射の角度によって誤差の影響が変わった.41mradの放射角度を使用する場合,寸法誤差による放射強度の減少を10%に抑えるためには約0.2μmの寸法誤差まで許容することが明らかになった. 2)粒子アセンブル技術 軟X線源実現のために膜厚の間隔を上記で求めた許容誤差範囲に抑えることが重要である.そのため,膜厚間に支柱を設けるための微粒子アセンブル技術を開発した.微粒子として直径500nmのポリスチレン粒子を用いた.支柱となる微粒子を所望の形状にパターン化するために,a)微細溝を有するテンプレート基板へのセルフアセンブル技術とb)アセンブルによって形成したパターンのターゲット基板への転写技術を実現した.a)ではテンプレート基板上のコロイド溶液を乾燥させ,メニスカスの後退速度を制御することで,微細溝への高収率なアセンブルが可能となった.b)では自己組織化膜を用いて基板の撥水性を変えることで,粒子と基板間の付着力を制御した.これらの結果により所望の粒子パターンを得ることができ,軟X線源のための支柱構造が実現される.