研究者紹介システム

上杉 晃生
ウエスギ アキオ
大学院工学研究科 機械工学専攻
助教
機械工学関係
Last Updated :2022/06/29

研究者情報

所属

  • 【主配置】

    大学院工学研究科 機械工学専攻
  • 【配置】

    工学部 機械工学科

学位

  • 博士(工学), 京都大学
  • 半導体ナノワイヤのマルチフィジックス特性評価とデバイス応用

授業科目

研究活動

研究分野

  • ナノテク・材料 / ナノマイクロシステム

論文

  • Strain engineering of core–shell silicon carbide nanowires for mechanical and piezoresistive characterizations

    Shinya Nakata, Akio Uesugi, Koji Sugano, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, Yoshitada Isono

    2019年04月, Nanotechnology, 30 (26), 265702, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    2018年, SENSORS AND MATERIALS, 30 (9), 2143 - 2157, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports the tensile properties of single-crystal silicon (SCS) microstructures fully coated with sub-micrometer thick diamond like carbon (DLC) film using plasma enhanced chemical vapor deposition (PECVD). To minimize the deformations or damages caused by non-uniform coating of DLC, which has high compression residual stress, released SCS specimens with the dimensions of 120μm long, 4 μm wide, and 5 μm thick were coated from the top and bottom side simultaneously. The thickness of DLC coating is around 150nm and three different bias voltages were used for deposition. The tensile strength improved from 13.4 to 53.5% with the increasing of negative bias voltage. In addition, the deviation in strength also reduced significantly compared to bare SCS sample.

    Japan Society of Applied Physics, 2017年06月01日, Japanese Journal of Applied Physics, 56 (6), 06GN01, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    This Letter investigates the effect of crystallographic orientation on tensile fractures of silicon microstructures. Specimens 5 m wide and 5 m thick were fabricated on (100) and (110) wafers with 100, 110, and 111 tensile axes. To explore the effects of different surface orientations and morphologies, these specimens were patterned from (100) and (110) silicon-on-insulator (SOI) wafers using the Bosch process under identical fabrication conditions, while other specimens were fabricated from (110) wafers under different conditions. Tensile tests of specimens prepared under the identical fabrication conditions showed that (100) specimens had lower strength than (110) specimens along the 100 and 110 axes; the average strength decreased from 3.62 to 3.14 GPa for 110. This decrease in strength is related to differences in damage that ultimately causes fractures. While (110) specimens fractured due to fabrication damage at top corners, fractures of (100) specimens were due to pit-like defects on bottom surfaces. Since these defects were introduced during SOI bonding processes, the fractures of (100) specimens were dominated by intrinsic SOI defects rather than damage introduced during specimen fabrication processes. To realise higher-strength structures on SOI wafers, both the damage caused during fabrication and the intrinsic defects need to be controlled.

    INST ENGINEERING TECHNOLOGY-IET, 2015年12月, MICRO & NANO LETTERS, 10 (12), 678 - 682, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    This paper reports development of a high-temperature tensile testing machine and testing of single crystal silicon (SCS) for investigation of the size effect on brittle-ductile transition temperature (BDTT). Two different-width (110) SCS specimens (120 mu m long, 5 mu m thick and 4 or 9 mu m wide) were tested in a vacuum at the temperature range from room temperature to 600 degrees C. The specimens tested at 500 degrees C and above exhibit slip, which indicated that the micrometer-sized silicon structures have lower BDTT compared to millimeter-sized ones. By investigating the temperature ranges of the slip occurrences among the differently-sized specimens including other researchers' reports, we found that the length along slip direction, i.e., thickness, might dominate the BDTT. (C) 2015 The Japan Society of Applied Physics

    IOP PUBLISHING LTD, 2015年06月, JAPANESE JOURNAL OF APPLIED PHYSICS, 54 (6), 06FP04, 英語

    [査読有り]

    研究論文(学術雑誌)

  • SIZE EFFECT ON BRITTLE-DUCTILE TRANSITION TEMPERATURE OF SILICON BY MEANS OF TENSILE TESTING

    A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata

    This paper reports the size effect on brittle-ductile transition temperature (BDTT) of single crystal silicon (SCS) using different width specimens (120-mu m long, 5-mu m thick and 4 or 9-mu m wide). The BDTT was characterized using tensile testing in a vacuum from room temperature to 600 degrees C. The fractured specimens showed that the slips were occurred at 500 degrees C and above, which indicated that the BDTT of micrometer-sized silicon decreased compared to millimeter-sized structures. By comparing the temperature ranges of the slip occurrences among the different sized specimens including other researchers' reports, we found that the length along slips-propagation direction, i.e. thickness, might dominate the BDTT.

    IEEE, 2015年, 2015 28TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2015), 389 - 392, 英語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • 上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    We report the effects of surface damage and crystal orientation on fracture strength of single crystal silicon (SCS) by means of tensile test using electrostatic-force grip. The specimens of three major crystal orientations fabricated from (110) SOI wafer were characterized with different surface morphologies prepared by the specimen patterning process. Our specimen patterning process was composed of Bosch process and wet etching process for surface residue removal. We changed processing time and sequence of the two processes to get different surface morphologies. As result of uni-axial tensile test of 9 types of specimens (length: 120 μm, width: 5 μm, thickness: 5 μm), i.e. specimens of 3 crystal orientations with 3 different surface morphologies, improvement of surface morphology doubled average tensile strength: e.g. < 110> strength varied from 1.8 GPa to 3.6 GPa, while average tensile strength difference among crystal orientations was less than 20 % on each fabrication conditions. The fracture surfaces mainly consisted of (111) plane. We found tensile fracture characteristics of 3 crystal orientations: in < 100> specimens the fracture origin location changed by the fabrication conditions, while < 110> and < 111> specimens respectively showed quantitative relationships between surface morphology and tensile strength common to different fabrication conditions. These results are beneficial for tensile strength prediction from surface morphology. © 2013 The Japan Society of Mechanical Engineers.

    2013年, 日本機械学会論文誌A編, 79 (804), 1191 - 1200, 日本語

    [査読有り]

    研究論文(国際会議プロシーディングス)

  • Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    The mechanical properties of an epoxy-based chemically amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the Kremer-Grest model with an extended angle bending potential depends on the cross-linking ratio, its dependency exhibits good agreement with that determined by nanoindentation tests. (c) 2012 Elsevier Ltd. All rights reserved.

    ELSEVIER SCI LTD, 2012年09月, POLYMER, 53 (21), 4834 - 4842, 英語

    [査読有り]

    研究論文(学術雑誌)

  • Koji Sugano, Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Yoshitada Isono

    Various nanostructures for single-molecule surface-enhanced Raman spectroscopy (SERS) have been fabricated through a random aggregation process using nanoparticles that can stochastically generate multiple hotspots in the laser spot. This leads to multiple molecule detection. In this study, a single gold nanoparticle (AuNP) dimer with a single hotspot was fabricated in a laser spot controlling the position and orientation on a silicon substrate using a nanotrench-guided self-assembly. The Raman peaks of deoxyribonucleic acid (DNA) were dynamically observed, indicating a single DNA oligomer detection composed of adenine, guanine, cytosine, phosphate, and deoxyribose.

    2022年01月15日, Optics Letters, 47 (2), 373 - 376

    研究論文(学術雑誌)

  • Naoki Kondo, Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

    Microresonator-based optical sensing has been reported to achieve a high measurement resolution of near-infrared light intensity. The light intensity was measured from the resonant frequency shift with the thermal stress of a silicon doubly clamped beam. In this study, the beam length and vibration amplitude were considered as parameters for improving the measurement resolution. This study investigates the effect of these parameters on the sensitivity (resonant frequency shift per light intensity) and the quality factor (Q factor) to estimate the measurement resolution, considering the thermomechanical noise as the fundamental limitation. The result of the measurement indicated that the longer the resonator, the greater the shift in the resonant frequency. The Q factor is considered to be constant regardless of the resonator beam length. Although the vibration amplitude was increased until nonlinear vibration occurred, no change in the sensitivity and Q factor was observed. The light intensity measurement resolution was calculated using a theoretical equation based on the experimental tendencies. The device with the longest beam length of 800 µm and the gold nanostructured absorber had the highest resolution. The light intensity measurement resolution was improved with a longer beam length and larger vibration amplitude.

    2022年, Microsystem Technologies

    研究論文(学術雑誌)

  • Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono

    The widespread of near-infrared spectroscopes in the consumer field is expected to create new demand, such as the detections of fruit and vegetable rot and the easy measurement of the amount of water in the skin. Conventional cooled photodiodes using compound semiconductor materials such as InGaAs have problems with cost reduction and miniaturization. Therefore, we proposed an electrostatic Si microresonator device for the realization of a near-infrared optical sensor. This device measures the resonance frequency shift caused by the thermal stress generated in the resonator due to light absorption depending on the light intensity. The purpose of this study is to apply the device to near-infrared spectroscopy of water as a photodetector. We proposed an evaluation method based on a theoretical equation and confirmed that the device could detect the near-infrared absorption spectrum of water. The measurement results of the developed device matched well with that of the commercially available photodiode intensity sensor. In the future, it is expected that a compact near-infrared spectrometer with high sensitivity and low cost will be realized by arranging devices that integrate absorbers with different wavelength dependencies.

    2021年12月, Electronics and Communications in Japan, 104 (4)

    研究論文(学術雑誌)

  • Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono

    Institute of Electrical Engineers of Japan (IEE Japan), 2021年09月01日, IEEJ Transactions on Sensors and Micromachines, 141 (9), 321 - 326

    研究論文(学術雑誌)

  • Tatsuya Tsubota, Naoyuki Arai, Atsuya Harada, Akio Uesugi, Koji Sugano, Yoshitada Isono

    The Optical Society, 2021年08月25日, Journal of the Optical Society of America B

    研究論文(学術雑誌)

  • Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono

    IOP Publishing, 2021年05月01日, Japanese Journal of Applied Physics, 60 (5), 055502 - 055502

    研究論文(学術雑誌)

  • Akihiro Morita, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono

    IOP Publishing, 2021年03月01日, Nano Express, 2 (1), 010032 - 010032

    研究論文(学術雑誌)

  • Kyosuke Nimura, Kenji Osaka, Kazuma Sawada, Akio Uesugi, Koji Sugano, Yoshitada Isono

    IOP Publishing, 2021年02月01日, Journal of Micromechanics and Microengineering, 31 (2), 025009 - 025009

    研究論文(学術雑誌)

  • Akio Uesugi, Shinya Nakata, Kodai Inoyama, Koji Sugano, Yoshitada Isono

    IEEE, 2021年01月25日, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

    研究論文(国際会議プロシーディングス)

  • Koji Sugano, Yuki Tanaka, Akio Uesugi, Etsuo Maeda, Reo Kometani, Yoshitada Isono

    Elsevier BV, 2020年11月, Sensors and Actuators A: Physical, 315, 112337 - 112337

    研究論文(学術雑誌)

  • Kohei Takegami, Kota Nakafuji, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

    © 2020 The Japan Society of Applied Physics. In this study, we investigated the effect of the resonator beam shape on the thermal stress and the resonance frequency change when providing heat to the resonator beam by near-infrared laser irradiation. This investigation provides crucial data for optical and heat sensing application using microresonators. The microresonator beam with an optical absorber for near-infrared region was fabricated, varying the numbers of beams and corners. When irradiating the optical absorber with a laser, the resonant frequency decreased. It is because the photothermal effect provides compressive stress in the beam, resulting in resonant frequency decrease. The resonant frequency change rate increased with decreasing the number of beams. According to the analytical results, we confirmed that the analytical thermal stress determined the resonant frequency change rate in the same beam length. The corner remarkably decreased the resonant frequency change rate. The straight beams bend to the orthogonal direction by the thermal expansion of another straight part of the beam, resulting in deformation of the beam in the axial direction. Therefore, the reaction force and compressive stress in the axial direction reduces.

    2020年, Japanese Journal of Applied Physics, 59 (SI)

    研究論文(国際会議プロシーディングス)

  • Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono

    © 2020 The Institute of Electrical Engineers of Japan. For applications of plasmonic structures to high performance sensors in the near-infrared region, the structures require narrowband absorption peaks, good controllability of absorption peak position, and easy fabrication process. Multiple patterns with different absorption peaks should be integrated on the same substrate. In addition, polarization independence is desired for cost reduction and miniaturization of devices. In this study, we fabricated the Si-deposited gold nano-grating structures, the wire and concentric ring structures. Then their absorption spectra were evaluated. The peak wavelength shifted to longer wavelength with increasing the pitch of the grating structure and the thickness of Si. It was revealed that the peak was greatly shifted changing the thickness of Si. In the wire structures and the concentric ring structures, polarization dependence and polarization independence of peak absorption were observed, respectively. By using the Si-deposited gold nano-grating structures, wide control of the peak wavelength was realized in the near infrared region.

    2020年, IEEJ Transactions on Sensors and Micromachines, 140 (4), 72 - 78

    研究論文(学術雑誌)

  • Tatsuya Tsubota, Akio Uesugi, Koji Sugano, Yoshitada Isono

    © 2020, Springer-Verlag GmbH Germany, part of Springer Nature. Near-infrared (NIR) imaging has been used for nondestructive and non-contact inspections in various areas, such as food and medicine inspections and medical diagnoses. The short-wavelength infrared light (SWIR) sensor currently used requires a Peltier cooler and a diffraction grating spectroscope owing to its detection principle. Thus, realizing a low-cost and miniaturized SWIR imaging device remains challenging and has limitations for practical applications. In this study, we propose a bolometer-type detector element fabricated using a silicon-on-insulator (SOI) wafer as a low cost and miniaturized SWIR image sensor element. We adopted gold (Au) nanowire grating structures coated with silicon as wavelength-dependent SWIR absorbers and aimed at wavelength-selectivity imaging without using a spectroscope. A device was designed and fabricated with Au nanowire grating structures on a doubly clamped Si beam using microelectromechanical system (MEMS)) technology. The electrical characteristics of the device were measured depending on device temperature and SWIR irradiation intensity. It was found that electrical resistance decreased linearly with increasing device temperature and SWIR irradiation intensity (wavelength at 1530 nm), as semiconductors have negative temperature coefficients of resistance. The results show similar trends from both finite element method (FEM) analysis and theoretical calculation. The resistances at wavelengths ranging from 1530 to 1565 nm at 5 nm increment were evaluated. It was confirmed that absorber-integrated bolometer device enabled wavelength-dependent response of the resistance according to the absorption spectrum.

    2020年, Microsystem Technologies

    研究論文(学術雑誌)

  • 新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

    For applications of plasmonic structures to high performance sensors in the near-infrared region, the structures require narrowband absorption peaks, good controllability of absorption peak position, and easy fabrication process. Multiple patterns with different absorption peaks should be integrated on the same substrate. In addition, polarization independence is desired for cost reduction and miniaturization of devices. In this study, we fabricated the Si-deposited gold nano-grating structures, the wire and concentric ring structures. Then their absorption spectra were evaluated. The peak wavelength shifted to longer wavelength with increasing the pitch of the grating structure and the thickness of Si. It was revealed that the peak was greatly shifted changing the thickness of Si. In the wire structures and the concentric ring structures, polarization dependence and polarization independence of peak absorption were observed, respectively. By using the Si-deposited gold nano-grating structures, wide control of the peak wavelength was realized in the near infrared region.

    一般社団法人 電気学会, 2020年, 電気学会論文誌E(センサ・マイクロマシン部門誌), 140 (4), 72 - 78, 日本語

  • MANIPULATION OF BIOMOLECULES INTO NANOGAP BY PLASMONIC OPTICAL EXCITATION FOR HIGHLY SENSITIVE BIOSENSING

    Akihiro Morita, Akio Uesugi, Koji Sugano, Yoshitada Isono

    This paper demonstrates the manipulation of DNA oligomers with 16 adenine molecules using plasmonic nanogap structure. The optical excitation caused plasmonic dielectrophoresis or/and thermophoresis of molecules to the nanogap due to huge gradient of an electric field. We confirmed the single-molecule electrical measurement using the nanogap electrodes irradiated by a He-Ne laser. We considered that the DNA oligomers were transported to the nanogap resulting in conductance change. We classified the changes in the current as step- or spike-like signals. The histogram of the stagnation time shows the peak at around 22 ms. We were able to detect the behavior of DNA oligomers.

    IEEE, 2019年, 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 166 - 169, 英語

    研究論文(国際会議プロシーディングス)

  • SERS DETECTION OF A SINGLE NUCLEOBASE IN A DNA OLIGOMER USING A GOLD NANOPARTICLE DIMER

    Koji Sugano, Katsunari Maruoka, Akio Uesugi, Yoshitada Isono

    This paper reports a surface enhanced Raman spectroscopy (SERS) of a single-stranded DNA toward SERS-based DNA sequencing. The Raman enhancing hotspot with 1-nm nanogap in the single dimer of gold nanoparticles has a space for only single DNA oligomer and enables measurements of a single nucleobase. Optimizing gold nanoparticle size, we demonstrated the detection of a single adenine in a single DNA oligomer. The time transition of adenine and cytosine peaks reflects identification of adjacent bases in a DNA oligomer sequence, suggesting the possibility of one-by-one DNA sequencing with SERS.

    IEEE, 2019年, 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 979 - 982, 英語

    研究論文(国際会議プロシーディングス)

  • 平井 義和, 柳生 裕聖, 牧野 圭秀, 上杉 晃生, 菅野 公二, 土屋 智由, 田畑 修

    一般社団法人 電気学会, 2013年08月, 電気学会論文誌. E, センサ・マイクロマシン部門誌, 133 (8), 320 - 329, 日本語

    [査読有り]

    研究論文(学術雑誌)

  • Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    We conducted uni-axial tensile test using electrostatic-force grip on thin film single crystal silicon of < 110> direction. The specimens were fabricated on (110) SOI wafer (length: 120 μm, width: 5 μm, thickness: 5 μm) and went through 3 different conditions of patterning process composed of Bosch process and wet etching process for surface residue removal. As a result, improvement of surface morphology brought increase of average tensile strength from 1.9 GPa to 3.6 GPa. SEM observation of fractured specimens suggests that, regardless of processing conditions, relationship between tensile strength and the top-view length of (110) crystal plane of specimens can be expressed with a common equation. © 2012 The Institute of Electrical Engineers of Japan.

    Institute of Electrical Engineers of Japan, 2012年, IEEJ Transactions on Sensors and Micromachines, 132 (9), 320 - 321, 日本語

    [査読有り]

    研究論文(学術雑誌)

MISC

  • Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    The paper reports the improvement of tensile strength of single-crystal silicon (SCS) microstructures fully coated with sub-micrometer thick diamond like carbon (DLC) film using plasma enhanced chemical vapor deposition (PECVD). To minimize the deformations or damages caused by non-uniform coating of DLC, which has high residual stress, the released SCS specimens with the dimensions of 120 mu m long, 4 mu m wide and 5 mu m thick were coated from the top and bottom side simultaneously. Three kinds of different deposition bias voltages were adopted with the thickness around 150 nm. The tensile strength improved up to 53.5% by the full coatings depending on deposition bias voltage. In addition, the deviation in strength reduced significantly compared to bare SCS specimen.

    IEEE, 2017年, 30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 732 - 735, 英語

  • Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    Copyright © 2016 The Authors. Published by Elsevier B.V. Effects of tensile orientations on fracture and slip behaviors of (110) single crystal silicon (SCS) microstructures at a high temperature are reported. Specimens with a parallel portion 120 μm long, 2 μm wide and 5μm thick were aligned along <110> and <111> tensile axes, and were fabricated from identical silicon-on-insulator wafers using UV lithography and a deep reactive ion etching. The specimens were subjected to tensile testing at 500 °C in a vacuum, which showed linear stress-displacement behaviors until their fractures at 3.2 GPa on <110> and at 4.0 GPa on <111>. The fracture surfaces mostly consisted of large planes oriented along {111}, which indicated cleavage fractures. Contrary to the obtained linear nominal stress behaviors, fractured specimens had surface steps owing to slip along {111}, which indicated that criteria for brittle-ductile transition of SCS were surpassed under the applied stress. Criteria for the slip occurrences were discussed based on maximum shear stress along the slip system, and stress concentration around the surface step was analyzed using finite element method calculation to discuss an effect of the surface step on decrease of nominal tensile strength at the high temperature.

    2016年01月01日, Procedia Structural Integrity, 2, 1413 - 1420

  • 単結晶シリコンマイクロ構造体の引張応力下における脆性延性遷移

    上杉晃生, 平井義和, 土屋智由, 田畑修

    2014年10月, 第6回「マイクロ・ナノ工学シンポジウム」, 20pm3-PM005, 日本語

  • Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature

    A. Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    2014年10月, The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014), 6C-5-1, 英語

  • J2240303 赤外光集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験([J224-03]『マイクロ・ナノ機械の信頼性』のための材料創製・測定・解析技術 シリコンの破壊と疲労)

    上杉 晃生, 安富 貴浩, 平井 義和, 土屋 智由, 田畑 修

    High-temperature tensile testing for single crystal silicon microstructure up to 600 ℃ was conducted to reveal the size effect on the fracture properties, especially for the brittle-ductile transition temperature (BDTT). A newly developed tensile testing machine with concentrated infrared light heating was used for testing in a vacuum at high temperature. Beam specimens of 120 μm long, 4 μm wide and 5 μm thick which were designed for <110> tensile testing showed BDTT between 400 and 500 ℃, which is lower than bulk silicon of 600 ℃. The fracture strength also decreased by more than 50 % between the same temperature range, and slips on (111) crystal planes were observed on the fractured specimens. These results indicate that the dislocation slips caused stress concentration to decrease the tensile strength.

    一般社団法人日本機械学会, 2014年09月07日, 年次大会 : Mechanical Engineering Congress, Japan, 2014, "J2240303 - 1"-"J2240303-3", 日本語

  • 赤外集光加熱を用いた単結晶シリコンマイクロ構造体の真空中高温引張試験

    上杉晃生, 安富貴浩, 平井義和, 土屋智由, 田畑修

    2014年09月, 日本機械学会2014年度年次大会, J2240303, 日本語

  • Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C

    Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata

    2014年06月, The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), 0, 英語

  • 単結晶シリコンの高温機械的特性評価に向けた赤外光集光加熱による真空中高温引張試験 (2014年度年次講演会)

    上杉 晃生, 平井 義和, 土屋 智由, 田畑 修

    2014年01月, 日本実験力学会講演論文集, (14), 265 - 267, 日本語

  • (100)及び(110)単結晶シリコンにおける引張強度の結晶方位依存性

    上杉晃生, 平井義和, 菅野公二, 土屋智由, 田畑修

    2013年09月, 日本機械学会2013年度年次大会, 日本機械学会, J211013, 日本語

  • Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations

    Akio Uesugi, Yoshikazu Hirai, Koji Sugan, Toshiyuki Tsuchiya, Osamu Tabata

    2013年07月, ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), 0, 英語

  • A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata

    2013年, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 1946 - 1949, 英語

    [査読有り]

  • 加工条件の異なる(110)<111>単結晶シリコン薄膜の引張試験

    上杉 晃生, 平井 義和, 菅野 公二, 土屋 智由, 田畑 修

    2012年09月, 日本機械学会M&M2012材料力学カンファレンス, OS1909, 日本語

  • Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics

    H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2012年03月, The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 999 - 1000, 英語

  • H. Yagyu, Y. Hirai, A. Uesugi, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata

    2012年, Materials Research Society Symposium Proceedings, 1415, 59 - 64, 英語

    [査読有り]

  • Coarse-Grained Molecular Dynamics Simulation Approach for Mechanical Property of Epoxy-Based Chemically-Amplified Resist

    Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

    2011年12月, Proceedings of International Workshop on Micro/Nano-Engineering, 88

  • MEMS厚膜ネガレジストの粗視化分子動力学モデル

    平井義和, 柳生裕聖, 上杉晃生, 牧野圭秀, 菅野公二, 土屋智由, 田畑修

    2011年09月, 第28回「センサ・マイクロマシンと応用システム」シンポジウム, 334 - 339, 日本語

  • エポキシ系ネガレジスト機械的特性の架橋度依存性

    上杉晃生, 牧野圭秀, 柳生裕聖, 平井義和, 菅野公二, 土屋智由, 田畑修

    2011年09月, 日本機械学会2011年度年次大会, J161021, 日本語

  • 平井 義和, 上杉 晃生, 牧野 圭秀, 柳生 裕聖, 菅野 公二, 土屋 智由, 田畑 修

    2011年07月, The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers'11), 2706 - 2709, 英語

    [査読有り]

  • Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane

    平井 義和, 上杉 晃生, 牧野 圭秀, 柳生 裕聖, 菅野 公二, 土屋 智由, 田畑 修

    2011年06月, The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011), 62 - 63, 英語

    [査読有り]

  • 29pm3-PN-49 (110)単結晶シリコンマイクロ構造の高温引張破壊特性

    上杉 晃生, 平井 義和, 土屋 智由, 田畑 修

    We report high-temperature tensile testing of (110) microstructures of single crystal silicon (SCS) to investigate a size effect on BDTT (brittle-ductile transition temperature). Specimens 5 μm wide and 5 μm thick were fabricated on (110) SOI (silicon-on-insulator) wafers with <100>, <110>, and <111> tensile axes. Since dislocations of SCS appear along (111) planes, measurement with different tensile axes would allow to clarify criteria of appearance of plastic deformations. <110>- and <111>-tensile specimens measured at 600 ℃ showed necking along (110) planes, and slip on (111) planes was also observed on surface of <111>-tensile specimens. It was interpreted that the necking was macroscopically along (110) but that was formed with aggregation of multiple slips along (111) planes.

    一般社団法人日本機械学会, 2015年10月21日, マイクロ・ナノ工学シンポジウム, 2015 (7), "29pm3 - PN-49-1"-"29pm3-PN-49-2", 日本語

  • J2210404 ひずみゲージ集積型単結晶シリコンマイクロ構造の並列引張疲労試験

    上杉 晃生, 平井 義和, 土屋 智由, 田畑 修

    We have proposed a method for tensile-mode fatigue testing of micro structures of single crystal silicon (SCS). For reliable measurements of fatigue property of SCS, a large number of cyclic loadings (10^6〜) and a sufficient number of measurements are necessary for statistical analysis, which requires very long measurements using tensile-mode fatigue testing, because the loading frequencies in reported tensile-mode fatigue testing are usually lower than 100 Hz. To shorten measurements, the proposed method conducts parallel measurements of testing structures. Arrayed testing structures with integrated piezoresistive strain gauges are subjected to tensile-mode fatigue testing simultaneously actuated using a piezoelectric stage. Because of the strain gauges with a linear and low noise output and a simple readout circuit, simultaneous measurement is realized. Designs of the testing structures and the strain gauges were reported, which allows us to use the piezoelectric stage and realizes quick measurements with higher test frequency.

    一般社団法人日本機械学会, 2015年09月13日, 年次大会 : Mechanical Engineering Congress, Japan, 2015, "J2210404 - 1"-"J2210404-3", 日本語

講演・口頭発表等

  • Surface-Enhanced Raman Spectroscopy of DNA Bases Using Gold Nanoparticle Dimer Array

    Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Koji Sugano, Yoshitada Isono

    31st International Microprocesses and Nanotechnology Conference (MNC2018), 2018年11月, 英語, 国際会議

    ポスター発表

  • Development of 3D Formed Tactile Sensor by High Temperature Punch Creep Forming Technique

    Kyosuke Nimura, Kenji Osaka, Takao Toyoda, Akio Uesugi, Koji Sugano, Yoshitada Isono

    31st International Microprocesses and Nanotechnology Conference (MNC2018), 2018年11月, 英語, 国際会議

    口頭発表(一般)

  • VLS成長SiNW単体に対する熱電変換特性評価

    北川 諒, 井本 大暉, 上杉 晃生, 菅野 公二, 磯野 吉正

    第35回「センサ・マイクロマシンと応用システム」シンポジウム, 2018年10月, 日本語, 国内会議

    ポスター発表

  • Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性

    新居 直之, 上杉 晃生, 菅野 公二, 磯野 吉正

    第35回「センサ・マイクロマシンと応用システム」シンポジウム, 2018年10月, 日本語, 国内会議

    ポスター発表

  • Effect of Ge concentration on poly SiGe mechanical properties

    Akio Uesugi, Kazusuke Maenaka, Takahiro Namazu

    The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), 2017年11月, 英語, Jeju, Korea, 国際会議

    口頭発表(一般)

  • Fatigue testing of poly-SiGe film using microresonator

    Akio Uesugi, Takahiro Namazu

    2017 International Conference on Solid State Devices and Materials (SSDM 2017), 2017年09月, 英語, Sendai, 国際会議

    ポスター発表

共同研究・競争的資金等の研究課題